CN102280350A - Vacuum chamber system for mass spectrometer - Google Patents
Vacuum chamber system for mass spectrometer Download PDFInfo
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- CN102280350A CN102280350A CN2010101940158A CN201010194015A CN102280350A CN 102280350 A CN102280350 A CN 102280350A CN 2010101940158 A CN2010101940158 A CN 2010101940158A CN 201010194015 A CN201010194015 A CN 201010194015A CN 102280350 A CN102280350 A CN 102280350A
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- vacuum chamber
- mass spectrometer
- vacuum
- chamber system
- mass spectrometric
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Abstract
The invention discloses a vacuum chamber system for a mass spectrometer. The vacuum chamber system comprises a vacuum chamber which is connected with a molecular pump through a connecting chamber, wherein the molecular pump is connected with a stainless steel pipe, the vacuum chamber is also connected with a vacuum gauge, end covers are respectively at two ends of the vacuum chamber, an O-shaped seal ring is additionally arranged on a connection part between the end covers and the vacuum chamber, the surface roughness Ra of the vacuum chamber reaches 0.8-1.6, and the vacuum chamber is made of an aluminum material. The vacuum chamber for the mass spectrometer, disclosed by the invention, is simple in structure and easy to assemble and disassemble and can ensure that the vacuum level of the mass spectrometer reaches a higher level.
Description
Technical field
The present invention relates to the mass spectrometer field, be specifically related to a kind of mass spectrometric vacuum chamber system that is used for.
Background technology
Mass spectrometer claims mass spectrograph again, a kind of separation with detect different isotopic instruments, promptly according to charged particle can deflection in electromagnetic field principle, by the quasi-instrument that the mass discrepancy of material atom, molecule or molecular fragment is separated and detection material is formed.Mass spectrometer is a core with ion source, mass analyzer and ion detector.Ion source is to make sample molecule Ionized device under high vacuum condition.Molecule after the ionization is because of having accepted multiple fragment ion and the neutral particle that too much energy can further be fragmented into less quality.They obtain the mean kinetic energy with identical energy and enter mass analyzer under the accelerating field effect.Mass analyzer is to enter the ion of different quality wherein simultaneously, by the device of mass-to-charge ratio m/z size separation.Ion after the separation enters ion detector successively, gathers and amplifies ion signal, and machine is handled as calculated, is depicted as mass spectrogram.Ion source, mass analyzer and ion detector all respectively have polytype.Mass spectrometer is divided into isotope mass spectrometer, inorganic mass spectrometer and organic mass spectrometer by range of application; Be divided into high-resolution, middle resolution and Low Resolution Mass Spectra instrument by resolving power; Be divided into static instrument and dynamic instrument by operation principle.
Mass spectrometric vacuum degree is the key factor that influences ion motion speed, vacuum degree deficiency causes ion and gas molecule collision easily, thereby reduce the movement rate of ion, to the influence of corresponding relation between the signal of telecommunication of mass analyzer and the detector signal of telecommunication mainly is thereby that aspect such as embodiment time correspondence influences mass accuracy, and the ion motion rate variation that causes of vacuum degree deficiency also can influence mass spectrometric resolution simultaneously.
But the problem of the design ubiquity vacuum degree deficiency of existing mass spectrometric vacuum chamber.
Summary of the invention
In order to overcome the deficiencies in the prior art, the object of the present invention is to provide a kind of mass spectrometric vacuum chamber system that is used for, this system can guarantee that mass spectrometric vacuum degree reaches a higher level.
For solving the problems of the technologies described above, realize above-mentioned technique effect, the present invention adopts following technical scheme:
A kind of mass spectrometric vacuum chamber system that is used for, it comprises a vacuum chamber, and described vacuum chamber connects a part pump by a connection chamber, and described molecular pump connects a stainless steel tube.
Preferably, described vacuum chamber also connects a vacuum gauge.
Preferably, described vacuum chamber two ends are provided with end cap, and described end cap and vacuum chamber junction are equipped with the O RunddichtringO.
Preferably, the surface roughness Ra of described vacuum chamber reaches 0.8-1.6.
What preferably, described vacuum chamber used is aluminum.
Compared with prior art, the mass spectrometric vacuum chamber system that is used for of the present invention adopts molecular pump to produce high vacuum, by adopting high-precision surface roughness (0.8-1.6), avoid of the influence of the high adsorption on surface to vacuum, and use aluminum to make very light of quality, surface adsorption is few, uses sealing ring that vacuum chamber is sealed simultaneously, has reduced cost and easy accessibility.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, below with preferred embodiment of the present invention and conjunction with figs. describe in detail as after.The specific embodiment of the present invention is provided in detail by following examples and accompanying drawing thereof.
Description of drawings
Fig. 1 is the structural representation that is used for mass spectrometer vacuum chamber system of the present invention.
Fig. 2 is the cutaway view that is used for the vacuum chamber of mass spectrometer vacuum chamber system of the present invention.
Number in the figure explanation: 1. vacuum chamber, 2. molecular pump, 3. stainless steel tube, 4. vacuum gauge, 5. connection chamber, 6.O RunddichtringO, 7. end cap.
Embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are described in detail.
See also Fig. 1, shown in Figure 2, a kind of mass spectrometric vacuum chamber system that is used for, it comprises a vacuum chamber 1, and described vacuum chamber 1 connects a part pumps 2 by a connection chamber 5, and described molecular pump 2 connects a stainless steel tube 3.
Preferably, described vacuum chamber 1 also connects a vacuum gauge 4.
Preferably, described vacuum chamber 1 two ends are provided with end cap 7, and described end cap 7 is equipped with O RunddichtringO 6 with vacuum chamber 1 junction.
Preferably, the surface roughness Ra of described vacuum chamber 1 reaches 0.8-1.6.
What preferably, described vacuum chamber 1 used is aluminum.
More than be used for mass spectrometric vacuum chamber system to the embodiment of the invention provided and be described in detail; for one of ordinary skill in the art; thought according to the embodiment of the invention; the part that all can change in specific embodiments and applications, therefore all any changes of making according to design philosophy of the present invention are all within protection scope of the present invention.
Claims (5)
1. one kind is used for mass spectrometric vacuum chamber system, it is characterized in that: comprise a vacuum chamber (1), described vacuum chamber (1) connects a part pump (2) by a connection chamber (5), and described molecular pump (2) connects a stainless steel tube (3).
2. the mass spectrometric vacuum chamber system that is used for according to claim 1, it is characterized in that: described vacuum chamber (1) also connects a vacuum gauge (4).
3. the mass spectrometric vacuum chamber system that is used for according to claim 1, it is characterized in that: described vacuum chamber (1) two ends are provided with end cap (7), and described end cap (7) is equipped with O RunddichtringO (6) with vacuum chamber (1) junction.
4. require any described mass spectrometric vacuum chamber system that is used in 1 to 3 according to aforesaid right, it is characterized in that: the surface roughness Ra of described vacuum chamber (1) reaches 0.8-1.6.
5. require any described mass spectrometric vacuum chamber system that is used in 1 to 3 according to aforesaid right, it is characterized in that: described vacuum chamber (1) material is that model is 6061 aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101940158A CN102280350A (en) | 2010-06-08 | 2010-06-08 | Vacuum chamber system for mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101940158A CN102280350A (en) | 2010-06-08 | 2010-06-08 | Vacuum chamber system for mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102280350A true CN102280350A (en) | 2011-12-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101940158A Pending CN102280350A (en) | 2010-06-08 | 2010-06-08 | Vacuum chamber system for mass spectrometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103884466A (en) * | 2014-04-01 | 2014-06-25 | 钢研纳克检测技术有限公司 | Method and device for vacuum degree measurement and control of mass spectrometer |
| CN105304456A (en) * | 2015-09-24 | 2016-02-03 | 钢研纳克检测技术有限公司 | Mass spectrometer vacuum cavity system applying small compound molecular pump |
| CN107644803A (en) * | 2017-10-01 | 2018-01-30 | 江苏天瑞仪器股份有限公司 | A kind of gas chromatography mass spectrometry vacuum cavity |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101470101A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Relative sensitivity calibration system for quadrupole mass spectrometer |
| CN201829450U (en) * | 2010-06-08 | 2011-05-11 | 江苏天瑞仪器股份有限公司 | Vacuum chamber system for mass spectrograph |
-
2010
- 2010-06-08 CN CN2010101940158A patent/CN102280350A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101470101A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Relative sensitivity calibration system for quadrupole mass spectrometer |
| CN201829450U (en) * | 2010-06-08 | 2011-05-11 | 江苏天瑞仪器股份有限公司 | Vacuum chamber system for mass spectrograph |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103884466A (en) * | 2014-04-01 | 2014-06-25 | 钢研纳克检测技术有限公司 | Method and device for vacuum degree measurement and control of mass spectrometer |
| CN103884466B (en) * | 2014-04-01 | 2016-03-02 | 钢研纳克检测技术有限公司 | Mass spectrometer is carried out to the method and apparatus of vacuum measurement and control |
| CN105304456A (en) * | 2015-09-24 | 2016-02-03 | 钢研纳克检测技术有限公司 | Mass spectrometer vacuum cavity system applying small compound molecular pump |
| CN107644803A (en) * | 2017-10-01 | 2018-01-30 | 江苏天瑞仪器股份有限公司 | A kind of gas chromatography mass spectrometry vacuum cavity |
| CN107644803B (en) * | 2017-10-01 | 2024-03-19 | 江苏天瑞仪器股份有限公司 | Air-mass combined vacuum cavity |
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Application publication date: 20111214 |