CN102278594A - Valve box module - Google Patents
Valve box module Download PDFInfo
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- CN102278594A CN102278594A CN2011102122955A CN201110212295A CN102278594A CN 102278594 A CN102278594 A CN 102278594A CN 2011102122955 A CN2011102122955 A CN 2011102122955A CN 201110212295 A CN201110212295 A CN 201110212295A CN 102278594 A CN102278594 A CN 102278594A
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- 230000000903 blocking effect Effects 0.000 claims abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 11
- 239000007789 gas Substances 0.000 description 340
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Abstract
The invention relates to a valve box module, which comprises a first gas input pipeline, at least one first gas output pipeline and at least one second gas pipeline group. The first gas output pipeline is communicated with the first gas input pipeline and is used for outputting a first gas input through the first gas input pipeline. The second gas pipeline set is communicated with the first gas output pipeline and comprises at least one second gas output pipeline, a gas blocking valve device and a second gas input pipeline. The second gas output line is used for outputting the first gas or a second gas. The gas block valve device is disposed on the second gas output line for selectively blocking communication between the first and second gas output lines. The second gas input line is used for inputting the second gas to the second gas output line. The present invention not only improves the flexibility of the use of the bellows module in gas supply, but also solves the throughput problem of semiconductor processing as mentioned in the prior art.
Description
Technical field
The present invention is about a kind of clack box module, refers to that especially a kind of using gases blocked valve device optionally blocks the clack box module of the connection of the first gas output tube line and the second gas output tube line.
Background technique
Generally speaking, be used for carrying out branch clack box (the Valve Manifold Box of the output and the input of semiconductor process gases, VMB) structural design is normally by a gas inlet pipe line, at least one gas output tube line, and one the clean air intake pipeline form, the clean air intake pipeline is communicated in each gas output tube line, be used for importing the required clean air of semiconductor processes (as handling with nitrogen etc.), and the gas inlet pipe line is communicated in the gas output tube line, by this, divide clack box can utilize being communicated with and the body of regulating the flow of vital energy from each gas output tube line outlet between gas inlet pipe line and the gas output tube line, can provide the purpose of processing gas simultaneously to reach, thereby promote the utilization efficiency of handling gas to different disposal use point by single intake pipeline input.Yet, mix and cause the situation generation of pipeline pollution for fear of different disposal gas, divide clack box only can provide pure gas at one time, that is to say, under continuous conditions of manufacture, when if the output of a gas output tube line desire wherein is different from other gases (for example being that a test gas is for testing on the line) of the processing gas of originally being imported, then divides other gas output tube lines in the clack box just must stop using, but so promptly can the production capacity of semiconductor processes be impacted.
Summary of the invention
Therefore, the invention provides the clack box module that a kind of using gases blocked valve device is optionally blocked the connection of the first gas output tube line and the second gas output tube line, use solving the above problems.
The invention provides a kind of clack box module, it comprises one first gas inlet pipe line, at least one first gas output tube line, and at least one second gas line group.This first gas output tube line is communicated in this first gas inlet pipe line, is used for exporting one first gas of being imported via this first gas inlet pipe line.This second gas line group is communicated in this first gas output tube line, and this second gas line group comprises at least one second gas output tube line, a gas occluding control valve unit, and one second gas inlet pipe line.This second gas output tube line is used for exporting this first gas or one second gas.This gas occluding control valve unit is arranged on this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line.This second gas inlet pipe line is communicated in this second gas output tube line, is used for importing this second gas to this second gas output tube line.
The present invention provides a kind of clack box module in addition, and it comprises one first gas inlet pipe line, at least one first gas line group, and at least one second gas line group.This first gas inlet pipe line is used for importing one first gas.This first gas line group is communicated in this first gas inlet pipe line, and this first gas line group comprises at least one first gas output tube line and one first gas occluding control valve unit.This first gas output tube line is communicated in this first gas inlet pipe line, is used for exporting this first gas or one second gas.This first gas occluding control valve unit is arranged on this first gas output tube line.This second gas line group is communicated in this first gas line group, and this second gas line group comprises at least one second gas output tube line, one second gas occluding control valve unit, and one second gas inlet pipe line.This second gas output tube line is used for exporting this first gas or this second gas.This second gas occluding control valve unit is arranged on this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line.This second gas inlet pipe line is communicated in this second gas output tube line, is used for importing this second gas.
Beneficial effect of the present invention is: using gases blocked valve device is optionally blocked the mode of communicating between the first gas output tube line and the second gas output tube line, so that the clack box module can use the first gas output tube line and the second gas output tube line to export first gas to different disposal simultaneously and use a little according to the real gas supply requirement, or export at the first gas output tube line under the situation of first gas and utilize the second gas output tube line to export second gas simultaneously.Thus, but in addition the use elasticity of poppet valve tank module in gas supply not only, also can solve the problem of the production capacity of the semiconductor processes of mentioning in the prior art.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the schematic representation of the clack box module of one embodiment of the invention;
Fig. 2 is the schematic representation of the clack box module of another embodiment of the present invention;
Fig. 3 is the schematic representation of the clack box module of another embodiment of the present invention;
Fig. 4 is the schematic representation of the clack box module of another embodiment of the present invention.
Wherein, reference character
102 first gas inlet pipe lines, 104,306 first gas output tube lines
110,204 gas occluding control valve units, 113 clean air intake pipelines
302,402 first gas line groups, 308,406 first gas occluding control valve units
100,200,300,400 clack box modules
106,202,304,404 second gas line groups
108,310,408 second gas output tube lines
112,314,410 second gas inlet pipe lines
312,412 second gas occluding control valve units
Embodiment
Below in conjunction with the drawings and specific embodiments technical solution of the present invention being described in detail, further understanding purpose of the present invention, scheme and effect, but is not the restriction as claims protection domain of the present invention.
See also Fig. 1, it is the schematic representation of a clack box module 100 of one embodiment of the invention.As shown in Figure 1, clack box module 100 comprises one first gas inlet pipe line 102, at least one first gas output tube line 104 (show four in Fig. 1, but not limit by this), and one second gas line group 106.The first gas output tube line 104 is communicated in the first gas inlet pipe line, 102, the first gas output tube lines 104 and is used for exporting first gas of being imported via the first gas inlet pipe line 102, uses a little so that first gas to different disposal to be provided.The second gas line group 106 is communicated in the first gas output tube line 104, the second gas line group 106 comprises at least one second gas output tube line 108 and (shows one in Fig. 1, but not limit by this), a gas occluding control valve unit 110, and one second gas inlet pipe line 112.The second gas inlet pipe line 112 is communicated in the second gas output tube line 108, the second gas inlet pipe line 112 is when testing the gas different with former first gas, be used for importing second gas to the second gas output tube line 108, and the second gas output tube line 108 is used for exporting demand and optionally exporting first gas or second gas according to the real gas of clack box module 100, in this embodiment, first gas and second gas are preferably for to have identical component but the gas of different purity, use and reduce the generation probability that pipeline pollutes further, but not limit by this.In addition, as shown in Figure 1, clack box module 100 can comprise a clean air intake pipeline 113 in addition, and clean air intake pipeline 113 is communicated in each the first gas output tube line 104 and the second gas output tube line 108, is used for importing the required clean air of semiconductor processes (as handling with nitrogen etc.).
Above-mentioned gas occluding control valve unit 110 is arranged between the first gas output tube line 104 and the second gas output tube line 108, gas occluding control valve unit 110 is a separating valve, be used for optionally blocking the connection between the first gas output tube line 104 and the second gas output tube line 108, in this embodiment, this separating valve preferably is a manually operated valve (Manual Valve), but not limit by this, it also can adopt other to have the valving of same gas barrier effect.
Be described in detail in this operation at clack box module 100.See also Fig. 1, when clack box module 100 only need be exported first gas, just do not import under the situation of second gas at the second gas inlet pipe line 112, at this moment, export first gas of being imported via the first gas inlet pipe line 102 except utilizing the first gas output tube line 104, clack box module 100 can be opened gas occluding control valve unit 110 to be communicated with the first gas output tube line 104 and the second gas output tube line 108, use to reach and can use the first gas output tube line 104 and the second gas output tube line 108 to export the purpose that first gas to different disposal is used point simultaneously, thus the gas of poppet valve tank module 100 output usefulness.
On the other hand, when clack box module 100 need be exported first gas and second gas simultaneously, meaning promptly must use the first gas output tube line 104 and the second gas output tube line 108 to export respectively under the situation of first gas and second gas in clack box module 100, at this moment, gas occluding control valve unit 110 can be blocked the connection between the first gas output tube line 104 and the second gas output tube line 108.Thus, first gas that the first gas inlet pipe line 102 is imported just only can be via 104 outputs of the first gas output tube line, and second gas that the second gas inlet pipe line 112 is imported also only can be via 108 outputs of the second gas output tube line, by this, clack box module 100 can utilize the first gas output tube line, 104 supplying semiconductor to handle under the situation of the first required gas, utilize the second gas output tube line, 108 output second gases (for example being a test gas) simultaneously, thereby solve the problem of the production capacity of the semiconductor processes of mentioning in the prior art.
It should be noted that, the quantity system of the second gas line group 106 that is connected with the first gas output tube line 104 can be not limited to the foregoing description, it can increase to some extent according to the actual user demand of clack box module 100, use to be created under the situation of utilizing the first gas output tube line, 104 supplies, first gas and can export multiple second gas simultaneously, thus the use elasticity of amplification clack box module 100 in gas output.
See also Fig. 2, it is the schematic representation of a clack box module 200 of another embodiment of the present invention, the identical person of element described in this embodiment with the element number described in the foregoing description, represent that it has similar function or structure, repeat no more in this, clack box module 200 and clack box module 100 main difference parts are the design of the second gas line group.As shown in Figure 2, clack box module 200 comprises the first gas inlet pipe line 102, at least one first gas output tube line 104 (shows four in Fig. 2, but not limit by this), clean air intake pipeline 113, and at least one second gas line group 202 (in Fig. 2, show, but not limit by this).The second gas line group 202 is communicated in the first gas output tube line 104 and comprises the second gas output tube line 108, the second gas inlet pipe line 112, and a gas occluding control valve unit 204.In this embodiment, gas occluding control valve unit 204 is a three-way valve, the second gas inlet pipe line 112 is connected in a wherein end of this three-way valve, and meaning i.e. this three-way valve connects the first gas output tube line 104, the second gas output tube line 108 and the second gas inlet pipe line 112 respectively.
Thus, when clack box module 200 only need be exported first gas, clack box module 200 can be opened this three-way valve to be communicated with the first gas output tube line 104 and the second gas output tube line 108, and block being communicated with of the second gas output tube line 108 and the second gas inlet pipe line 112, thereby reach the purpose that to use the first gas output tube line 104 and the second gas output tube line, 108 outputs, first gas to use point to different disposal simultaneously; Otherwise, when clack box module 200 need be exported first gas and second gas simultaneously, this three-way valve then is the connection that can block between the first gas output tube line 104 and the second gas output tube line 108, and only be communicated with the second gas output tube line 108 and the second gas inlet pipe line 112, in other words, first gas that the first gas inlet pipe line 102 is imported just only can be via 104 outputs of the first gas output tube line, and second gas that the second gas inlet pipe line 112 is imported also only can be via 108 outputs of the second gas output tube line, by this, as clack box module 100, clack box module 200 also can utilize the first gas output tube line, 104 supplying semiconductor to handle under the situation of the first at present required gas, utilizes the second gas output tube line, 108 outputs, second gas simultaneously.Similarly, the quantity of the second gas line group 202 that is connected with the first gas output tube line 104 can be unrestricted, it can increase to some extent according to the actual user demand of clack box module 200, use to be created under the situation of utilizing the first gas output tube line, 104 supplies, first gas and can supply multiple second gas simultaneously, thus the use elasticity of amplification clack box module 200 in gas output.
See also Fig. 3, it is the schematic representation of a clack box module 300 of another embodiment of the present invention, the identical person of element described in this embodiment with the element number described in the foregoing description, represent that it has similar function or structure, clack box module 300 is setting up of gas occluding control valve unit with clack box module 100 main difference parts.Clack box module 300 comprises the first gas inlet pipe line 102, clean air intake pipeline 113, (demonstration is four in Fig. 3 at least one first gas line group 302, but not limit by this), and at least one second gas line group 304 (in Fig. 3, show, but not limit by this).The first gas line group 302 is communicated in the first gas inlet pipe line, 102, the first gas line groups 302 and comprises at least one first gas output tube line 306 (show in Fig. 3, but not limit by this) and one first gas occluding control valve unit 308.The first gas output tube line 306 is communicated in the first gas inlet pipe line 102, is used for exporting first gas or second gas.The first gas occluding control valve unit 308 is arranged on the first gas output tube line 306, be used for optionally blocking the connection between the first gas inlet pipe line 102 and the first gas output tube line 306, in this embodiment, the first gas occluding control valve unit 308 is a separating valve, this separating valve preferably is a manually operated valve, but not limit by this, it also can adopt other to have the valving of same gas barrier effect.The second gas line group 304 is communicated in the first gas line group 302, the second gas line group 304 comprises at least one second gas output tube line 310 and (shows one in Fig. 3, but not limit by this), one second gas occluding control valve unit 312, and one second gas inlet pipe line 314.The arrangements of components of the second gas line group 304 and function can be analogized with reference to the second gas line group 106 of Fig. 1, for asking simplified illustration, repeat no more in this.
Thus, clack box module 300 is except can having the gas output function identical with clack box module 100 (for example utilize the first gas output tube line 306 and the second gas output tube line 310 to export first gas simultaneously or export first gas respectively and second gas etc.), open-minded by the first gas occluding control valve unit 308 and the second gas occluding control valve unit 312, clack box module 300 also can utilize the first gas output tube line 306 and the second gas output tube line 310 to export second gas simultaneously, use and reach the purpose that arbitrary gas output tube line in the clack box module 300 is all optionally exported first gas or second gas, thus the gas of poppet valve tank module 300 output usefulness.In addition, utilize the mode of partly opening four first gas occluding control valve units 308 (remaining is then blocked) as shown in Figure 3, clack box module 300 also can be according to its actual user demand, control the export pipeline number of first gas or second gas, using increases the use elasticity of clack box module 300 in gas output.
See also Fig. 4, it is the schematic representation of a clack box module 400 of another embodiment of the present invention, the identical person of element described in this embodiment with the element number described in the foregoing description, represent that it has similar function or structure, clack box module 400 and clack box module 200 main difference parts are the design of gas line group.As shown in Figure 4, clack box module 400 comprises the first gas inlet pipe line 102, clean air intake pipeline 113, (demonstration is four in Fig. 4 at least one first gas line group 402, but not limit by this), and at least one second gas line group 404 (in Fig. 4, show, but not limit by this).The first gas line group 402 is communicated in the first gas inlet pipe line 102, the first gas line group 402 comprises at least one first gas output tube line 104 and (shows one in Fig. 4, but not limit by this) and one first gas occluding control valve unit 406, the second gas line group 404 is communicated in the first gas line group 402, the second gas line group 404 comprises at least one second gas output tube line 408 and (shows one in Fig. 4, but not limit by this), one second gas inlet pipe line 410, and one second gas occluding control valve unit 412.In this embodiment, the first gas occluding control valve unit 406 is a three-way valve, the second gas inlet pipe line 410 is connected in a wherein end of this three-way valve, and meaning i.e. this three-way valve connects the first gas inlet pipe line 102, the first gas output tube line 104 respectively, and the second gas inlet pipe line 410.Arrangements of components and function as for the second gas line group 404, it can be analogized with reference to the second gas line group 202 of Fig. 2, in brief, the second gas occluding control valve unit 412 is a three-way valve, connect the first gas inlet pipe line 102 respectively, the second gas output tube line 408, and the second gas inlet pipe line 410, be communicated with the first gas inlet pipe line 102 with the second gas output tube line 408 or be communicated with the second gas inlet pipe line 410 and the second gas output tube line 408 in order to selectivity, by this, clack box module 400 can utilize the first gas output tube line, 104 supplying semiconductor to handle under the situation of the first at present required gas, utilizes the second gas output tube line, 408 outputs, second gas simultaneously.
Thus, clack box module 400 is except can having the gas output function identical with clack box module 200 (for example utilize the first gas output tube line 104 and the second gas output tube line 408 to export first gas simultaneously or export first gas respectively and second gas etc.), by opening the first gas occluding control valve unit 406 to be communicated with the first gas output tube line 104 and the second gas inlet pipe line 410 and to open the second gas occluding control valve unit 412 to be communicated with the mode of the second gas output tube line 408 and the second gas inlet pipe line 410, clack box module 400 also can utilize the first gas output tube line 104 and the second gas output tube line 408 to export second gas simultaneously, use and reach the purpose that arbitrary gas output tube line in the clack box module 400 is all optionally exported first gas or second gas, thus the gas of poppet valve tank module 400 output usefulness.In addition, utilize as shown in Figure 4 open four first gas occluding control valve units 406 at least one of them so that the first gas output tube line 104 is communicated with the mode of (remaining is then blocked) with the first gas inlet pipe line 102 or the second gas inlet pipe line 410, clack box module 400 also can be according to its actual user demand, control the export pipeline number of first gas or second gas, using increases the use elasticity of clack box module 400 in gas output.
Compared to prior art, using gases blocked valve device of the present invention is optionally blocked the mode of communicating between the first gas output tube line and the second gas output tube line, use making the clack box module use the first gas output tube line and the second gas output tube line to export first gas to different disposal simultaneously and to use a little, or export at the first gas output tube line under the situation of first gas and utilize the second gas output tube line to export second gas simultaneously according to the real gas supply requirement.Thus, but in addition the use elasticity of poppet valve tank module in gas supply not only, also can solve the problem of the production capacity of the semiconductor processes of mentioning in the prior art.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (11)
1. a clack box module is characterized in that, comprises:
One first gas inlet pipe line;
At least one first gas output tube line, it is communicated in this first gas inlet pipe line, is used for exporting one first gas of being imported via this first gas inlet pipe line; And
At least one second gas line group, it is communicated in this first gas output tube line, this second gas line group comprises: at least one second gas output tube line, a gas occluding control valve unit and one second gas inlet pipe line, and this second gas output tube line is used for exporting this first gas or one second gas; This gas occluding control valve unit is arranged on this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line; This second gas inlet pipe line is communicated in this second gas output tube line, is used for importing this second gas to this second gas output tube line.
2. clack box module as claimed in claim 1, it is characterized in that, this gas occluding control valve unit is a three-way valve, connect this first gas output tube line, this second gas output tube line and this second gas inlet pipe line respectively, be communicated with this first gas output tube line with this second gas output tube line or be communicated with this second gas output tube line and this second gas inlet pipe line in order to selectivity.
3. clack box module as claimed in claim 1, it is characterized in that, this gas occluding control valve unit is a separating valve, it is arranged between this first gas output tube line and this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line.
4. clack box module as claimed in claim 3 is characterized in that, this separating valve is a manually operated valve.
5. a clack box module is characterized in that, comprises:
One first gas inlet pipe line, it is used for importing one first gas;
At least one first gas line group, it is communicated in this first gas inlet pipe line, this first gas line group comprises at least one first gas output tube line and one first gas occluding control valve unit, this first gas output tube line is communicated in this first gas inlet pipe line, is used for exporting this first gas or one second gas; This first gas occluding control valve unit is arranged on this first gas output tube line; And
At least one second gas line group, it is communicated in this first gas line group, this second gas line group comprises at least one second gas output tube line, one second gas occluding control valve unit and one second gas inlet pipe line, and this second gas output tube line is used for exporting this first gas or this second gas; This second gas occluding control valve unit is arranged on this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line; This second gas inlet pipe line is communicated in this second gas output tube line, is used for importing this second gas.
6. clack box module as claimed in claim 5, it is characterized in that, this first gas occluding control valve unit is a three-way valve, connect this first gas inlet pipe line, this first gas output tube line and this second gas inlet pipe line respectively, be communicated with this first gas inlet pipe line with this first gas output tube line or be communicated with this second gas inlet pipe line and this first gas output tube line in order to selectivity.
7. clack box module as claimed in claim 5, it is characterized in that, this first gas occluding control valve unit is a separating valve, and it is arranged on this first gas output tube line, is used for optionally blocking being communicated with between this first gas inlet pipe line and this first gas output tube line.
8. clack box module as claimed in claim 7 is characterized in that, this separating valve is a manually operated valve.
9. clack box module as claimed in claim 5, it is characterized in that, this second gas occluding control valve unit is a three-way valve, connect this first gas inlet pipe line, this second gas output tube line and this second gas inlet pipe line respectively, be communicated with this first gas inlet pipe line with this second gas output tube line or be communicated with this second gas inlet pipe line and this second gas output tube line in order to selectivity.
10. clack box module as claimed in claim 5, it is characterized in that, this second gas occluding control valve unit is a separating valve, it is arranged between this first gas output tube line and this second gas output tube line, is used for optionally blocking the connection between this first gas output tube line and this second gas output tube line.
11. clack box module as claimed in claim 10 is characterized in that, this separating valve is a manually operated valve.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100121607A TWI489054B (en) | 2011-06-21 | 2011-06-21 | Valve box module |
| TW100121607 | 2011-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102278594A true CN102278594A (en) | 2011-12-14 |
Family
ID=45104215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011102122955A Pending CN102278594A (en) | 2011-06-21 | 2011-07-22 | Valve box module |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102278594A (en) |
| TW (1) | TWI489054B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112283582A (en) * | 2020-10-23 | 2021-01-29 | 长江存储科技有限责任公司 | Valve box and reactant supply system |
| CN114923124A (en) * | 2021-04-16 | 2022-08-19 | 台湾积体电路制造股份有限公司 | Valve box module, semiconductor device manufacturing system and method for manufacturing semiconductor device |
| US20220375801A1 (en) * | 2021-04-16 | 2022-11-24 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for detecting environmental parameter in semiconductor fabrication facility |
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- 2011-06-21 TW TW100121607A patent/TWI489054B/en not_active IP Right Cessation
- 2011-07-22 CN CN2011102122955A patent/CN102278594A/en active Pending
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| CN101256936A (en) * | 2007-02-26 | 2008-09-03 | 应用材料股份有限公司 | Method and apparatus for controlling gas flow to a processing chamber |
| US20090061640A1 (en) * | 2007-08-29 | 2009-03-05 | Lam Research Corporation | Alternate gas delivery and evacuation system for plasma processing apparatuses |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112283582A (en) * | 2020-10-23 | 2021-01-29 | 长江存储科技有限责任公司 | Valve box and reactant supply system |
| CN112283582B (en) * | 2020-10-23 | 2021-12-21 | 长江存储科技有限责任公司 | Valve box and reactant supply system |
| CN114923124A (en) * | 2021-04-16 | 2022-08-19 | 台湾积体电路制造股份有限公司 | Valve box module, semiconductor device manufacturing system and method for manufacturing semiconductor device |
| US20220375801A1 (en) * | 2021-04-16 | 2022-11-24 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for detecting environmental parameter in semiconductor fabrication facility |
| US11726465B2 (en) * | 2021-04-16 | 2023-08-15 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for detecting environmental parameter in semiconductor fabrication facility |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201300672A (en) | 2013-01-01 |
| TWI489054B (en) | 2015-06-21 |
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Application publication date: 20111214 |