CN102272586B - Liquid crystal array inspection device and liquid crystal array inspection device signal processing method - Google Patents
Liquid crystal array inspection device and liquid crystal array inspection device signal processing method Download PDFInfo
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- 239000004973 liquid crystal related substance Substances 0.000 title claims description 30
- 238000007689 inspection Methods 0.000 title claims description 9
- 238000003672 processing method Methods 0.000 title claims description 8
- 238000001514 detection method Methods 0.000 claims abstract description 35
- 238000004364 calculation method Methods 0.000 claims abstract description 28
- 230000002950 deficient Effects 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 36
- 239000013078 crystal Substances 0.000 claims description 26
- 239000007788 liquid Substances 0.000 claims description 26
- 230000000052 comparative effect Effects 0.000 claims description 6
- 230000007547 defect Effects 0.000 abstract description 18
- 230000008569 process Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 19
- 238000003860 storage Methods 0.000 description 15
- 230000008859 change Effects 0.000 description 7
- 241001270131 Agaricus moelleri Species 0.000 description 5
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- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002153 concerted effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
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Abstract
A normal value calculation is performed for each pixel as follows in order to reduce the affect from a defect intensity of a pixel in the vicinity. When the detection intensity is within a level range which can be assumed on a panel, the detection intensity of a pixel in the vicinity is used to calculate the normal value of a target pixel. On the other hand, when the detection intensity is out of the level range which can be assumed on the panel, the normal value set for an adjacent pixel is set as the normal value of a target pixel without calculating the normal value of the target pixel so as to avoid the affect from the defect intensity of the pixels in the vicinity. The panel standard deviation is used to judge whether the detection intensity is within the assumed level range. This suppresses variations caused by fluctuations contained in the detection intensity when calculating a normal value for deciding gradation and reduces the affect of the defect intensity of adjacent pixels to the normal value, thereby calculating an appropriate normal value from the detection intensity.
Description
Technical field
The present invention relates to that a kind of use is taken and the photographed images that obtains is checked the liquid crystal array testing fixture of liquid crystal array on crystal liquid substrate, particularly a kind of data processing that is suitable for detecting the detected intensity of defective.
Background technology
In the liquid crystal array testing fixture, the photographed images that obtains as taking on crystal liquid substrate can be used the optics photographed images that optical pickup obtains or utilize charged particle beams such as electron beam, ion beam to carry out two-dimensional scan on substrate and the scan image that obtains.
Be used for TFT (Thin Film Transistor: the manufacturing process of the tft array substrate of display equipment thin film transistor (TFT)), whether the tft array substrate that manufactures correctly driven check, and in the inspection of this tft array substrate, for example use electron beam as charged particle beam, obtain scan image by tft array substrate is scanned, check (patent documentation 1,2) according to this scan image.
For example, known following a kind of array detection device: the array as the crystal liquid substrate of checking object is applied the inspection signal, utilize charged particle beams such as electron beam, ion beam on substrate, to carry out two-dimensional scan, obtain scan image according to transmitted beam scanning and carry out inspecting substrate.In array testing technologies, the secondary electron that will emit under the irradiation of electron ray by photomultiplier etc. is converted to simulating signal and detects, and judges array defect according to the signal intensity of this detection signal.
In the array testing technologies that utilizes detected intensity to carry out, by carrying out standardization with for example 256 grades gray scale performance detected intensity.Show for detected intensity being carried out gray scale, need be as the signal intensity of benchmark.Two values that can signal intensity is different are as base value, and this base value is the benchmark of signal intensity.
For example, based on the voltage that applies when checking signal, the high value of value that signal intensity is low and signal intensity is made as intensity 0 respectively as reference value and normal value with reference value, and normal value is made as intensity 100, determines the base value of the signal level of gray scale.
As reference value, for example known following situation: the signal intensity that will obtain from the frame that constitutes substrate is as the detected intensity (with reference to patent documentation 3) that obtains under zero potential.
In addition, also comprise following situation: the pixel of substrate is applied the inspection signal of different voltages, obtain two signal intensities, thereby try to achieve reference value and normal value is used as base value by applying this voltage.
In general, comprise the variance components (fluctuation) that scanning brings in the detected intensity of secondary electron.Therefore, under the situation of using a base value to a panel setting gray scale, gray-scale value is unable to cope with the variance components that detected intensity comprises, so gray-scale value can the change along with the fluctuation of detected intensity, thereby even produces the identical problem that also becomes different gray-scale values of current potential of pixel.
Therefore, in the past,, suppress gray-scale value and change along with the fluctuation of detected intensity by dynamically calculating the base value that each becomes the normal value of object pixels.The dynamic calculation of the base value of this normal value is followingly to carry out like that: obtain the detected intensity that is positioned near a plurality of pixels the object pixel, use a plurality of detected intensity to come to handle the detected intensity of obtaining median then, this detected intensity is defined as the base value of object pixel by intermediate value.
Patent documentation 1: TOHKEMY 2004-271516 communique
Patent documentation 2: TOHKEMY 2004-309488 communique
Patent documentation 3: TOHKEMY 2005-321308 communique (0045 section)
Summary of the invention
The problem that invention will solve
Under the situation of the normal value of handling the calculating object pixel for the change that fluctuation caused that suppresses detected intensity by intermediate value, there is the problem that is difficult to detect defective owing to the kind of defective.
For example, under near the situation of the big defective of the existence object pixel, even the detected intensity of object pixel has normal value, sometimes also can the detected intensity of defect pixel be calculated as the detected intensity of object pixel, thereby produce the problem of object pixel having been set wrong detected intensity owing to carrying out intermediate value to handle.
Figure 13 is the figure of calculating that is used to illustrate the detected intensity of normal pixel in the past.(a) of Figure 13 is the figure that is used for the relation of description object pixel Psu, near pixel Pne, normal pixel Pno, defect pixel Pde.(b) of Figure 13 is the figure that is used to illustrate the intermediate value processing.
In (a) of Figure 13, show the situation of pixel Pne having set eight around the object pixel Psu near.Five among near the pixel Pne is defect pixel, and remaining four is normal pixel.In (a) of Figure 13, represent defect pixel with the pixel that is added with oblique line.The detected intensity of object pixel Psu of representing Figure 13 (a) with " e ", the detected intensity of representing the normal pixel Pno in the detected intensity of eight pixel Pne on every side near with " f ", " h ", " i " is represented the detected intensity of defect pixel Pde with " a ", " b ", " c ", " d ", " g ".
Example shown in Figure 13 (a) is handled the detected intensity of calculating mistake owing to carrying out intermediate value sometimes under the situation that has big defective.(b) of Figure 13 shows the example that intermediate value is handled.The detected intensity of each pixel is being arranged under the situation of obtaining median with order from small to large, the detected intensity g of defect pixel Pde can be calculated as the detected intensity of object pixel Psu.In addition, at this, the detected intensity of establishing defect pixel is bigger than the detected intensity of normal pixel.
Figure 14 is used to illustrate owing to the erroneous calculations detected intensity causes the detection failure of defective and the figure of error-detecting.
In (a) of Figure 14, the detected intensity when " 100 " expression does not have defective, the detected intensity when there is defective in " 200 " expression.Detected intensity near the pixel object pixel Psu is under the situation of " 100 ", handles by intermediate value and calculates the detected intensity of intensity " 100 " as object pixel Psu, and intensity " 100 " is made as normal value.And near object pixel Psu in the detected intensity of pixel under the more situation of intensity " 200 ", handle by intermediate value and to calculate the detected intensity of intensity " 200 " as object pixel Psu, intensity " 200 " is made as normal value.The normal value that Figure 14 (b) expression is calculated, and defective value (intensity 200) has been calculated as normal value as the detected intensity of the pixel shown in A, the B.
Object pixel A, B on line of (c) expression of Figure 14, the detected intensity of C, D, the normal value (intensity 100) that (d) expression of Figure 14 is calculated at pixel A, B, C, D.Set the gray scale of the detected intensity of each pixel based on normal value (intensity 100) and reference value (intensity 0), utilize and carry out value that gray scale shows and carry out defective and judge.The gray-scale value of (e) remarked pixel A of Figure 14, B, C, D.For pixel A, detected intensity 200 is set to normal value, though therefore it be defective value (intensity 200) thus not being judged as defective causes the defects detection failure.Therefore in addition, for pixel B, detected intensity 200 is set to normal value, though it is normal value (intensity 100) thereby but is judged as the defective detection that leads to errors.
As mentioned above, the processing utilizing intermediate value to handle as in the past to calculate the detected intensity that is arranged near the pixel the object pixel as normal value can produce the problem that can't correctly carry out defects detection.
Therefore, the objective of the invention is to, solve above-mentioned problem points in the past, in the calculating of the normal value of determining gray scale, in the change that the inhibition fluctuation that detected intensity comprised causes, near the influence that the defective intensity of pixel causes normal value reducing, thus calculate suitable normal value based on detected intensity.
The scheme that is used to deal with problems
The present invention is used for the array defect that carries out in the detected intensity of utilizing pixel and judges and suitably set the gray scale that the detected intensity standardization is represented, be used for when the normal value of the employed detected intensity of setting of calculating this gray scale, reducing near the influence that is subjected to of the defective intensity of pixel.At this, normal value is the detection level of the detected intensity that arrives based on normal pixel detection when driving array and pixel being applied assigned voltage.
The influence that is subjected near the defective intensity of pixel when calculating normal value in order to reduce, the present invention carries out following processing: for each pixel, the detected intensity of pixel is calculated the normal value of this pixel near using in the time of in its detected intensity is in the horizontal extent of supposing based on panel, and exceeded in its detected intensity under the situation of the horizontal extent of supposing based on panel, influence for fear of the defective intensity that is subjected near pixel, do not calculate the normal value of this pixel, and will be set at the normal value of this pixel based on the normal value that adjacent pixels is set out.Use the standard deviation of panel to judge whether detected intensity is in the horizontal extent of supposing based on panel.
The present invention includes the form of signal processing method of liquid crystal array testing fixture and the form of liquid crystal array testing fixture.
Form about the signal processing method of liquid crystal array testing fixture of the present invention, be the signal processing method of following a kind of liquid crystal array testing fixture: the inspection signal that crystal liquid substrate is applied assigned voltage drives array, the secondary electron that detection obtains crystal liquid substrate irradiation electron ray comes the array of crystal liquid substrate is checked according to the detected intensity of secondary electron.
Signal Processing comprises each step of gray scale setting step, gray-scale value calculation procedure, defective determining step, normal value calculation procedure.
It is following step that gray scale is set step: the detected intensity of the pixel under the driven state is made as normal value, the detected intensity of the pixel under the non-driven state is made as reference value, set the gray scale of the detected intensity of pixel based on this normal value and reference value.The gray-scale value calculation procedure is following step: calculate and the corresponding gray-scale value of detected intensity that goes out from each pixel detection according to set the gray scale of setting in the step in gray scale.The defective determining step is following step: compare the defective judgement of carrying out each pixel by the gray-scale value and the threshold value that will calculate in the gray-scale value calculation procedure.
In addition, above-mentioned gray scale setting step comprises the normal value calculation procedure of calculating normal value.In this normal value calculation procedure, calculate the mean value and the standard deviation of the whole front panel comprise all pixels, the detected intensity and the normal range of each pixel compared, this normal range is according to mean value and standard deviation and definite.This relatively in, when the detected intensity of each pixel is in the normal range, will be made as the normal value of this pixel by the calculated value that near the detected intensity of a plurality of pixels the pixel is carried out obtain after moving average is handled.And when the detected intensity of each pixel is in outside the normal range in comparison, will be set at the normal value of this pixel based on the normal value that adjacent pixels is calculated.
When utilizing moving average to handle the calculating normal value, the present application can improve processing speed by carrying out following computing.Computing behind this high speed is as follows: calculate in advance with the scope of carrying out the moving average processing and compare wider mean value, the operation times that carries out in handling by the moving average that utilizes this large-scale mean value to reduce each pixel when calculating the normal value of each pixel.This computing has utilized the following fact: the normal value of normal pixel is the value of roughly the same level in panel, and this normal value is about equally with comprising this pixel at the mean value of interior scope.In the computing of moving average,, realize the reduction of calculation process amount by using the mean value calculate in advance detected intensity as the pixel except that object pixel in the detected intensity of employed pixel in the computing.
Therefore, when carrying out moving average and handle, on panel, set and comprise object pixel, the total value of the detected intensity of the pixel of obtaining this zone in advance and being comprised in interior zone arbitrarily.During the normal value of each pixel in the zone that calculating sets,, the value that obtains after this weighting is added that the value that obtains after the detected intensity of object pixel is calculated as the normal value of this pixel to the total value additional weight of obtaining in advance.Handle by carrying out above-mentioned moving average, can reduce the treatment capacity of calculation process by utilizing the total value of obtaining in advance.
In addition, the weight of adding to total value can be made as (m-1)/n.At this, m is the number of the pixel used during moving average is handled, and n is the number of the pixel used in the calculating of total value.
In addition, form about the signal processing apparatus of liquid crystal array testing fixture of the present invention, be following a kind of liquid crystal array testing fixture: the inspection signal that crystal liquid substrate is applied assigned voltage drives array, the secondary electron that detection obtains crystal liquid substrate irradiation electron ray comes the array of crystal liquid substrate is checked according to the detected intensity of secondary electron.
Liquid crystal array testing fixture of the present invention possesses the signal processing part that detected intensity is carried out signal Processing.This signal processing part has gray scale configuration part, gray-scale value calculating part and defective judging part.The gray scale configuration part is made as normal value with the detected intensity of the pixel under the driven state, and the detected intensity of the pixel under the non-driven state is made as reference value, thereby sets the gray scale of the detected intensity of pixel.The gray-scale value calculating part calculates and the corresponding gray-scale value of detected intensity that goes out from each pixel detection according to the gray scale of setting in the gray scale configuration part.The gray-scale value of defective judging part by each pixel that will calculate in the gray-scale value calculating part compares and carries out defective and judge with being predetermined to be used for threshold value that defective judges.
Gray scale of the present invention configuration part possesses the normal value calculating part that calculates normal value.This normal value calculating part possesses: the mean value operational part, and its calculating comprises the mean value of the whole front panel of all pixels; The standard deviation operational part, its calculating comprises the standard deviation of the whole front panel of all pixels; Comparing section, it determines normal range according to mean value and standard deviation, and detected intensity and this normal range of each pixel compared; Normal value is set switching part, and its comparative result according to comparing section switches the computing of normal value; And the normal value operational part, it carries out computing to normal value.
Normal value of the present invention is set the comparative result of switching part according to comparing section, when the detected intensity of each pixel is in the normal range, make the normal value operational part use near the detected intensity of a plurality of pixels that this object pixel is implemented moving average and handle, the calculated value that obtains after moving average is handled is set at the normal value of this object pixel.And when the detected intensity of each pixel is in outside the normal range, will be set at the normal value of this object pixel based on the normal value of calculating with the object pixel adjacent pixels.
The normal value operational part possesses: the summation calculating part, and it calculates the total value of setting on the panel of the detected intensity of the regional pixel that is comprised arbitrarily; And the moving average operational part, the value to obtaining after the total value additional weight of each pixel in its zoning adds the value that obtains after the detected intensity of object pixel, calculates the moving average of detected intensity.
In the weighted of in the moving average operational part, carrying out, additional weight to total value is made as (m-1)/n.At this, m is the number of the pixel used during moving average is handled, and n is the number of the pixel used in the calculating of total value.
According to form of the present invention, when calculating normal value, can obtain the summation amount in the regulation zone in advance, by utilizing the value that obtains after this summation amount additional weight is reduced the calculation process amount, thereby can improve processing speed.
The effect of invention
According to the present invention, in the calculating of the normal value of determining gray scale, can suppress the change that fluctuation that detected intensity comprises causes.
In addition, near the influence that the defective intensity of pixel causes normal value can reducing, thus calculate suitable normal value based on detected intensity.
Description of drawings
Fig. 1 is the general block diagram that is used to illustrate the structure example of liquid crystal array testing fixture of the present invention.
Fig. 2 is the process flow diagram that is used to illustrate the process of the defective of utilizing liquid crystal array testing fixture of the present invention to judge pixel.
Fig. 3 is the key diagram that is used to illustrate the process of the defective of utilizing liquid crystal array testing fixture of the present invention to judge pixel.
Fig. 4 is the figure that is used to illustrate the structure example of signal processing part of the present invention.
Fig. 5 is the process flow diagram that is used to illustrate the calculation process example of normal value calculating part of the present invention.
Fig. 6 is the summary structured flowchart that is used to illustrate the calculation process example of normal value calculating part of the present invention.
Fig. 7 is the process flow diagram that is used to illustrate the calculation process of normal value of the present invention.
Fig. 8 is the key diagram that is used to illustrate the calculation process of normal value of the present invention.
Fig. 9 is the key diagram that is used to illustrate the calculation process of normal value of the present invention.
Figure 10 is used to illustrate that the high-speed computation of the normal value of pixel of the present invention handles the process flow diagram of example.
Figure 11 is used to illustrate that the high-speed computation of the normal value of pixel of the present invention handles the key diagram of example.
Figure 12 is used to illustrate that the high-speed computation of the normal value of pixel of the present invention handles the structural drawing of example.
Figure 13 is the figure of calculating that is used to illustrate the detected intensity of normal pixel in the past.
Figure 14 is used to illustrate owing to the erroneous calculations detected intensity causes the detection failure of defective and the figure of error-detecting.
Description of reference numerals
1: the liquid crystal array testing fixture; 2: mounting table; 3: electron gun; 4: detecting device; 5: the electron ray scan control section; 6: the mounting table drive control part; 7: control part; 10: signal processing part; 11: storage part; 12: the gray scale configuration part; 13: the normal value calculating part; 13a: mean value operational part; 13b: standard deviation operational part; 13c: comparing section; 13d: normal value is set switching part; 13e: normal value operational part; 13e1: summation calculating part; 13e2: moving average operational part; 13e3: normal value configuration part; 13e4: region storage unit; 13f: normal value storage part; 14: the reference value calculating part; 15: the gray scale calculating part; 16: the grey scale pixel value storage part; 17: the gray-scale value calculating part; 20: the defective judging part; 100: crystal liquid substrate; 101: panel; 102: pixel.
Embodiment
Below, describe embodiments of the present invention in detail with reference to accompanying drawing.
Fig. 1 is the general block diagram that is used to illustrate the structure example of liquid crystal array testing fixture of the present invention.
In addition, in example shown in Figure 1, show following structure example: to crystal liquid substrate irradiation electron ray, detect the secondary electron of emitting, obtain photographed images based on detected intensity from crystal liquid substrate.
In Fig. 1, liquid crystal array testing fixture 1 possesses: mounting table 2, its mounting crystal liquid substrate 100, this crystal liquid substrate 100 of conveyance freely on the XY direction; Electron gun 3, it is disposed at the place, top position of mounting table 2 away from mounting table 2 ground; And detecting device 4, it detects the secondary electron of emitting from the pixel (not shown) of the panel 101 of crystal liquid substrate 100.
Control the driving of mounting table 2 by mounting table drive control part 6, control the irradiation and the scanning on crystal liquid substrate 100 of the electron ray of electron gun 3 by electron ray scan control section 5.Detection signal by detecting device 4 detected secondary electrons is handled by signal processing part 10, and resulting gray-scale value is used to the defective of pixel and judges in defective judging part 20.
Control the drive actions of each one of electron ray scan control section 5, mounting table drive control part 6, signal processing part 10, defective judging part 20 by control part 7.In addition, control part 7 has the function of action of the integral body of control liquid crystal array testing fixture 1, can constitute this control part 7 by the storer of the program of CPU that carries out these controls and storage control CPU etc.
Mounting table 2 mounting crystal liquid substrates 100, and on X-direction and Y direction, move freely by 6 controls of mounting table drive control part, in addition, can utilize electron ray scan control section 5 to make from the electron ray of electron gun 3 irradiations swings in X-direction or Y direction.Mounting table drive control part 6 and electron ray scan control section 5 can make electron ray in crystal liquid substrate 100 enterprising line scannings by single movement or concerted action, thereby on the panel 101 of crystal liquid substrate 100 each pixel are shone.
The summary of the process that the defective of using the key diagram explanation of the process flow diagram of Fig. 2 and Fig. 3 to be used to utilize liquid crystal array testing fixture 1 of the present invention to carry out pixel is judged.
The panel of crystal liquid substrate is provided with a plurality of pixels, whether has defective in order to detect these a plurality of pixels, uses the detected intensity that goes out based on each pixel detection.In the defective of utilizing this detected intensity to carry out is judged, detected detected intensity is except having according to pixel zero defect changes, also depend on measurement environment such as the intensity of the electron ray that is shone, the detection sensitivity of detecting device and change, therefore, the raw data of detected intensity and threshold value being compared is can't carry out correct defective to judge.Therefore, detected detected intensity standardization need be converted to the value that does not rely on measurement environment, could use this value to carry out defective and judge.By detected intensity is converted to the standardization that gray-scale value carries out this detected intensity, and carries out defective and judge by this gray-scale value and predetermined threshold value are compared.
In grayvalue transition, obtain detected intensity from pixel as benchmark, set gray scale based on this detected intensity.As the detected intensity of benchmark, use normal value and reference value.The detected intensity of the pixel under the driven state is made as normal value, the detected intensity of the pixel under the non-driven state is made as reference value.About normal value, for example can use from by checking that signal carries out that array drives and the normal pixel detection that has been applied in assigned voltage to detected intensity as normal value, and about reference value, for example can use and never carry out detected intensity that pixel that array drives obtains as reference value, in addition, also can use from the normal pixel detection that drives the reference voltage be applied in regulation by array to detected intensity as reference value.
For example, according to the voltage that applies when checking signal, the value that value that signal intensity is low and signal intensity are high is made as reference value and normal value respectively, and reference value is made as intensity 0, and normal value is made as intensity 100, thereby determines the base value of the signal level of gray scale.
Therefore, obtain the detected intensity (S1) of pixel, calculate normal value (intensity 100) and reference value (intensity 0).(a) expression of Fig. 3 drives the state that array comes pixel is applied assigned voltage, the non-driven state of Fig. 3 (b) expression array or applied the state of the reference voltage of regulation, (c) expression of Fig. 3 have applied the state of checking signal, obtaining detected intensity from normal pixel and defect pixel.
Shown in Fig. 3 (a), the detected intensity that will get access to from the pixel that has been applied in assigned voltage is made as normal value.For example intensity 100 is set at the value of normal value.In addition, intensity 100 is as the value that is suitable for 256 gray scales and a definite example, and not necessarily the value of intensity 100 also can be set other numerical value.
Shown in Fig. 3 (b), the detected intensity that will get access to from the pixel of reference voltage is made as reference value.For example intensity 0 is set at the value of reference value.In addition, intensity 0 is as the value that is suitable for 256 gray scales and a definite example, and not necessarily the value of intensity 0 also can be set other numerical value (S2, S3).
Then, set gray scale according to normal value of being calculated (intensity 100) and reference value (intensity 0).(d) expression detected intensity of Fig. 3, (e) expression gray scale of Fig. 3.At this, setting under the situation of 256 gray scales as an example, make normal value (intensity 100) corresponding with " 100 " of 256 gray scales, make reference value (intensity 0) corresponding with " 0 " of 256 gray scales.Set gray scale (S4) thus.
Then, obtain the gray-scale value of the detected intensity of each pixel at the gray scale of obtaining.The gray-scale value of the pixel that utilization is obtained is even also can estimate detected intensity with same benchmark under the situation that the measurement environment such as detection level of the irradiating state of electron ray, detecting device change.The value of the detected intensity of the pixel i in (c) of Fig. 3 is under the situation of detected intensity xi, obtain " Xi " as with detected intensity xi corresponding gray (Fig. 3 (e)) (S5).
Compare by the gray-scale value that will obtain and predetermined threshold value and to carry out defective and judge.The gray-scale value that obtains after gray-scale value " 100 " is added surplus is set under the situation of threshold value (shown in broken lines in Fig. 3 (e)), gray-scale value " Xi " and this threshold value is compared carry out defective judgement (S6).
Fig. 4 is the figure that is used to illustrate the structure example of signal processing part of the present invention.Signal processing part 10 possesses: storage part 11, and its storage is detected the secondary electron from pixel i and the detected intensity xi that obtains by detecting device; Gray scale configuration part 12, its detected intensity with the pixel under the driven state is made as normal value, and the detected intensity of the pixel under the non-driven state is made as reference value, thereby sets the gray scale of the detected intensity of pixel; Gray-scale value storage part 16, the gray scale that its storage is set by gray scale configuration part 12; And gray-scale value calculating part 17, it calculates and the corresponding gray-scale value Xi of detected intensity xi that goes out from each pixel detection based on the gray scale of being set by gray scale configuration part 12.
Gray scale configuration part 12 possesses: normal value calculating part 13, and its calculating is used to set the normal value of gray scale; Reference value calculating part 14, it calculates reference value; And gray scale calculating part 15, it calculates gray scale according to normal value and the reference value calculated.
The process flow diagram of use Fig. 5 and the summary structured flowchart of Fig. 6 illustrate the calculation process example and the structure example of normal value calculating part 13.
In the process flow diagram of the calculation process of normal value shown in Figure 5, the average value mu p and the standard deviation p that at first calculate whole front panel.
For example with
μp＝∑
i n(xi)
Formula represent average value mu p.
In addition, for example with
σp
2＝∑
i n(xi-μp)
2
Formula represent standard deviation p.In the formula of above-mentioned mean value and standard deviation, n is the number (S11) of the pixel that comprises of panel.
Below, carry out the step of S12～S15 by each pixel of counter plate and calculate normal value.Read the detected intensity xi (S12) of pixel i.The detected intensity xi that judgement is read is in the horizontal extent of supposing based on panel or has exceeded scope.In this is judged, can will use the average value mu p and the standard deviation p that in above-mentioned steps S11, obtain to set (μ p ± k σ p) as horizontal extent.At this, k is the coefficient of determining arbitrarily, under the less situation of the tolerance of fluctuation k is set at less value, under the bigger situation of the tolerance of fluctuation k is set at bigger value.In addition, this relatively in, under detected intensity xi and situation that (μ p ± k σ p) equates, can be judged as in the scope of being in, also can be judged as the scope of being in outer (S13).
Under the situation in detected intensity xi is in the horizontal extent (μ p ± k σ p) that sets, regard as the influence that is not subjected to the fluctuation that measurement environment etc. causes, near the detected intensity of the pixel using is also handled the normal value of calculating this pixel by moving average.The back uses Fig. 7～Fig. 9 that the calculating (S14) of this normal value is described.
On the other hand, in the step of S13, be at detected intensity xi under the situation outside the horizontal extent (μ p ± k σ p) that sets, regard as the influence that has been subjected to the fluctuation that measurement environment etc. causes, stop using near the detected intensity of pixel and handle the normal value that calculates this pixel, and use the normal value (S15) that near pixel is set by moving average.
Carry out the normal value (S16) that the step of S12～S15 is calculated each pixel of panel by all pixels of counter plate.
Fig. 6 is the general block diagram that is used to illustrate a structure example of normal value calculating part of the present invention.
Normal value calculating part 13 of the present invention possesses: mean value operational part 13a, and its calculating comprises the average value mu p of the whole front panel of all pixels; Standard deviation operational part 13b, its calculating comprises the standard deviation p of the whole front panel of all pixels; Comparing section 13c, it compares the detected intensity xi of each pixel with the normal range of determining based on average value mu p and standard deviation p (μ p ± k σ p); Normal value is set switching part 13d, and its comparative result according to comparing section 13c switches the computing of normal value; Normal value operational part 13e, its computing normal value; And normal value storage part 13f, the normal value that its storage sets.
Normal value is set the comparative result of switching part 13d according to comparing section 13c, in the time of in the detected intensity xi of each pixel i is in normal range (μ p ± k σ p), normal value operational part 13e indicated make its detected intensity of using near a plurality of pixels this pixel carry out moving average to handle, the calculated value that obtains after moving average is handled is made as the normal value of this pixel and stores.
On the other hand, when the detected intensity of each pixel is in outside the normal range, normal value storage part 13f indicated make it will be stored as the normal value of this pixel based on the normal value that adjacent pixels is set.
Then, use Fig. 7～Fig. 9 that the calculation process of the normal value that carries out in normal value operational part 13e is described.Fig. 7 is the process flow diagram that is used to illustrate the calculation process of normal value, and Fig. 8, Fig. 9 are the key diagrams that is used to illustrate the calculation process of normal value.
At first, in the step of S13, at being judged as the pixel i (S21) that will carry out the calculating of normal value, reading this pixel i that sets and be positioned near the detected intensity of the pixel this pixel i from storage part.Near pixel can at random determining.For example, in being arranged in cancellate pel array, eight pixels that surround object pixel can be set near pixel, perhaps will be the center with the object pixel be set near pixel along the pixel of x direction or the linearly arrangement of y direction, perhaps will be arranged in criss-cross pixel along x direction and this two direction of y direction and be set near pixel (S22).
Near the detected intensity of the pixel that use is read and the detected intensity of object pixel are also utilized moving average to handle and are calculated average value mu i (S23), the average value mu i that is calculated are set at the normal value (S24) of object pixel i.All pixels of counter plate repeat the step of S21～S24, the normal value (S25) of calculating all pixels.
(a) of Fig. 8 summarily shows the detection position of the detected intensity of pixel.Panel 101 possesses a plurality of pixels 102 and they is arranged in clathrate, detects detected intensity based on each pixel 102.In (a) of Fig. 8, for the purpose of simplifying the description, show the example that obtains the detected intensity of this each pixel 102 from the detection position of a point of each pixel 102, obtain a plurality of detected intensity but also can set a plurality of detection positions to each pixel 102.
Detected detected intensity value on line of (b) expression of Fig. 8, the normal value that (c) expression of Fig. 8 is set based on detected intensity.
At this, the detected intensity that shows following example: pixel A～D is in the scope of normal range (μ p+k σ p), the detected intensity of pixel E, F is in outside the scope of normal range (μ p+k σ p), and the detected intensity of pixel G～J is in the scope of normal range (μ p+k σ p).In (b) of Fig. 8, represent (μ p+k σ p) with dot-and-dash line.
Because the detected intensity of pixel A～D is in the scope of normal range (μ p+k σ p), therefore calculate and set normal value by the step of S14 and S21～S24, because the detected intensity of pixel E, F is in outside the scope of normal range (μ p+k σ p), therefore the step by S15 is set at the normal value that adjacent pixels is set.At this, use the normal value that pixel D is set and set.Because the detected intensity of ensuing pixel G～J is in the scope of normal range (μ p+k σ p), therefore calculate and set normal value by the step of S14 and S21～S24.
Fig. 9 shows the present invention and comes figure that defects detection is set by setting normal value.
In (a) of Fig. 9, the detected intensity when " 100 " expression does not have defective, the detected intensity when there is defective in " 200 " expression.At this, the detected intensity that shows pixel D, E and near pixel is the situation of intensity 200.
The detected intensity of pixel B～G on line of (b) expression of Fig. 9, the normal value (intensity 100) that (c) expression of Fig. 9 is calculated by the moving average of pixel B～G, (d) expression gray-scale value of Fig. 9.
Normal value by using adjacent pixels C can suppress the influence of defective intensity as the normal value of pixel D, E, therefore can carry out defects detection.
The present invention can improve arithmetic speed by the total value of utilizing the detected intensity of obtaining in the zone that sets in the computing of the normal value of calculating pixel.
Below, use the process flow diagram of Figure 10, the key diagram of Figure 11, the structural drawing of Figure 12 to come the high-speed computation of the normal value of pixels illustrated to handle example.
On panel, set and comprise object pixel in interior zone.(b) of Figure 11 shows an example of the region R of setting 1 on panel.At this, show the example that region R 1 comprises n pixel.In addition, (a) of Figure 11 shows the example of the region R 2 of the pixel of carrying out the moving average processing, and the normal value that is used for calculating object pixel i is handled in this moving average.At this, show the example (S31) that region R 2 comprises m pixel.
Calculate total value the N (=∑ of the detected intensity of all pixels that this region R 1 comprised
i nXi).At this, " xi " is the detected intensity of pixel i, and " n " is the sum of the regional pixel that is comprised.The value " N/n " that obtains divided by the total n of pixel with total value N is equivalent to the mean value (S32) of the detected intensity of each pixel.
Then, calculate moving average by S33～S36 step at object pixel.(c) expression of Figure 11 uses the detected intensity of m pixel to come the state of moving average calculation μ i.
From region R 1 interior alternative pixel i (S33), read the detected intensity xi (S34) of selected pixel i from storage part.The total value N additional weight of calculating in the step to S32, the detected intensity xi addition with the object pixel i that reads among total value after the weighting and the S34 is calculated as moving average with this additive value.
At this, can use (m-1)/n as the weighting coefficient additional to total value N, with
μi＝(((m-1)/n)·N+xi)/m
Represent the moving average μ i that calculated.At this, m is the number of employed pixel when object pixel is carried out the moving average processing.
About the moving average μ i that obtains in the above-mentioned formula, the detected intensity xi by using object pixel i and (m-1) the individual detected intensity that obtains divided by n with total value N " N/n " calculate moving average handle in m detected intensity of use.In above-mentioned formula, " ((m-1)/n) N " is equivalent to the value that obtains after (m-1) individual detected intensity addition that obtains based on total value N.
In this moving average was handled, in m detected intensity, (m-1) individual detected intensity " (m-1)/n) N " can both be used total value N, therefore can reduce operand, thereby can improve calculation process speed (S35).To be set at the normal value (S36) of object pixel i by the moving average μ i that the step of S35 is calculated.
To the step of all pixels repetition S33～S36 in the zone, the normal value (S37) of calculating all pixels.
And, in panel, remaining pixel is set other zone, and they is repeated the step (S38) of S31～S37.
Figure 12 represents the structure example of the normal value operational part 13e of computing normal value.
Normal value operational part 13e possesses: summation calculating part 13e1, and it calculates the total value N of the detected intensity of the regional pixel that is comprised arbitrarily that sets on the panel; Moving average operational part 13e2, it calculates for each pixel in the zone value that obtains after the total value N additional weight is added the value that obtains behind the detected intensity xi of pixel i, calculates the moving average μ i of detected intensity; Normal value configuration part 13e3, it is set at normal value with the moving average μ i that calculates; And region storage unit 13e4, it stores the zone of using in the summation calculating in advance.
Utilizability on the industry
The computing of the normal value that uses during gray scale of the present invention is set is not limited to the liquid crystal array testing fixture, and it can be applied to the inspecting substrate of semiconductor element.
Claims (6)
1. the signal processing method of a liquid crystal array testing fixture, the inspection signal that crystal liquid substrate is applied assigned voltage drives array, the secondary electron that detection obtains above-mentioned crystal liquid substrate irradiation electron ray, come the array of crystal liquid substrate is checked according to the detected intensity of above-mentioned secondary electron, the method is characterized in that, may further comprise the steps:
Gray scale is set step, and the detected intensity of the pixel the driven state under is made as normal value, and the detected intensity of the pixel under the non-driven state is made as reference value, thus the gray scale of the detected intensity of setting pixel;
The gray-scale value calculation procedure is calculated and the corresponding gray-scale value of detected intensity that goes out from each pixel detection according to above-mentioned gray scale; And
The defective determining step carries out defective and judges by above-mentioned gray-scale value and threshold value are compared,
Wherein, above-mentioned gray scale is set step and is comprised the normal value calculation procedure of calculating above-mentioned normal value,
Above-mentioned normal value calculation procedure may further comprise the steps:
Calculating comprises the mean value and the standard deviation of the whole front panel of all pixels;
The detected intensity and the normal range of each pixel are compared, and this normal range is according to above-mentioned mean value and above-mentioned standard deviation and definite;
When the detected intensity of each pixel is in the above-mentioned normal range, will be made as the normal value of this pixel by the calculated value that near the detected intensity of a plurality of pixels this pixel is carried out obtain after moving average is handled; And
When the detected intensity of each pixel is in outside the above-mentioned normal range, will be made as the normal value of this pixel based on the normal value that adjacent pixels is calculated.
2. the signal processing method of liquid crystal array testing fixture according to claim 1 is characterized in that,
Utilize above-mentioned moving average to handle in the calculating of the normal value that carries out, in the zone of on panel, setting arbitrarily, obtaining the total value of the detected intensity of the pixel that this zone comprises,
For each pixel in the above-mentioned zone, detected intensity that will be by making a pixel in the above-mentioned zone with to calculating the normal value that the resulting value of mean value is calculated as this pixel after the value addition that obtains after the above-mentioned total value additional weight.
3. the signal processing method of liquid crystal array testing fixture according to claim 2 is characterized in that,
In above-mentioned moving average was handled, additional to give the weight of above-mentioned total value be (m-1)/n, and m is the number of the pixel of use during moving average is handled, and n is the number of the pixel used in the calculating of above-mentioned total value.
4. liquid crystal array testing fixture, the inspection signal that crystal liquid substrate is applied assigned voltage drives array, the secondary electron that detection obtains above-mentioned crystal liquid substrate irradiation electron ray, come the array of crystal liquid substrate is checked according to the detected intensity of above-mentioned secondary electron, this liquid crystal array testing fixture is characterised in that
Possess the signal processing part that above-mentioned detected intensity is carried out signal Processing,
Above-mentioned signal processing part possesses:
The gray scale configuration part, its detected intensity with the pixel under the driven state is made as normal value, and the detected intensity of the pixel under the non-driven state is made as reference value, thereby sets the gray scale of the detected intensity of pixel;
The gray-scale value calculating part, it calculates and the corresponding gray-scale value of detected intensity that goes out from each pixel detection according to the gray scale of setting in the above-mentioned gray scale configuration part; And
The defective judging part, it carries out defective and judges by above-mentioned gray-scale value and threshold value are compared,
Wherein, above-mentioned gray scale configuration part has the normal value calculating part that calculates above-mentioned normal value,
Above-mentioned normal value calculating part possesses:
The mean value operational part, its calculating comprises the mean value of the whole front panel of all pixels;
The standard deviation operational part, its calculating comprises the standard deviation of the whole front panel of all pixels;
Comparing section, its detected intensity and normal range with each pixel compares, and this normal range is according to above-mentioned mean value and above-mentioned standard deviation and definite;
Normal value is set switching part, and its comparative result according to above-mentioned comparing section switches the computing of normal value; And
The normal value operational part, it carries out computing to normal value,
Wherein, normal value is set the comparative result of switching part according to above-mentioned comparing section, when the detected intensity of each pixel is in the above-mentioned normal range, indicating above-mentioned normal value computing that near the detected intensity of a plurality of pixels this pixel is carried out moving average handles, the calculated value that obtains after this moving average processing is made as the normal value of this pixel, when the detected intensity of each pixel is in outside the above-mentioned normal range, will be made as the normal value of this pixel based on the normal value that adjacent pixels is calculated.
5. liquid crystal array testing fixture according to claim 4 is characterized in that,
Above-mentioned normal value operational part possesses:
The summation calculating part, it obtains the total value of setting on the panel of the detected intensity of the regional pixel that is comprised arbitrarily; And
The moving average operational part, it carries out moving average and handles, promptly for each pixel in the above-mentioned zone, by calculate with the detected intensity of a pixel in the above-mentioned zone with to calculating the value that mean value obtains after the value addition that obtains after the above-mentioned total value additional weight, thereby calculate the moving average of the detected intensity of this pixel.
6. liquid crystal array testing fixture according to claim 5 is characterized in that,
In above-mentioned moving average operational part, additional to give the weight of above-mentioned total value be (m-1)/n, and m is the number of the pixel of use during moving average is handled, and n is the number of the pixel used in the calculating of above-mentioned total value.
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