CN102269687A - Fluid probe - Google Patents
Fluid probe Download PDFInfo
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- CN102269687A CN102269687A CN2011101535838A CN201110153583A CN102269687A CN 102269687 A CN102269687 A CN 102269687A CN 2011101535838 A CN2011101535838 A CN 2011101535838A CN 201110153583 A CN201110153583 A CN 201110153583A CN 102269687 A CN102269687 A CN 102269687A
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- flexible member
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Abstract
A device for measuring the properties of a fluid, a method of manufacture, and a method of operation is described. The device includes a body region, a first flexible element and a second flexible element. Each flexible element has a first end and a second end, the first end being fixedly located on the body region. Each flexible element is moveable from at least a first respective configuration to a second respective configuration via bending of the element. The first flexible element includes an actuating portion arranged to move the flexible element between the first configuration and the second configuration. The second flexible element includes an integral movement sensor for sensing movement of the flexible element. The first flexible element is coupled to the second flexible element at a position distant from the body region. Only the actuating portion of the first flexible element is operable to move the first and second flexible elements.
Description
The present invention relates to a kind of probe that is used for fluid properties mensuration, and relate to the method for manufacture and use thereof of this probe.Although restriction, this probe is suitable for measuring the relative variation of the viscosity of fluid such as blood.
The flexible physical construction of the use microcosmic for example sensor of micro-cantilever is known.Micro-cantilever is the device of variation that wherein variation on the engineering properties of microcosmic micro-cantilever can be used for detecting the environment of micro-cantilever.Micro-cantilever is by material silicon for example, silicon nitride, and glass or metal are made, and the typical case uses micro-processing technology.For example, US6,575,020 have described the various micro-cantilevers that are integrated in little-fluid-operating system (micro-liquid handling system), and the physics that how so little-fluid-operating system is used for monitoring the fluid of such system, chemistry and biological character.Described this device comprise triangle little-the various structures of cantilevered construction, in described triangular construction, piezoresister is placed on each of two arms, thereby makes it possible to detect the vertical deflection of moment of torsion and micro-cantilever.
A shortcoming of typical micro-cantilever configuration is that cantilever is formed by the material of relative stiffness, thereby has limited the range of deflection (and voltage sensitivity therefore) of sensor.
As the international patent application no PCT/GB2004/005079 that WO 2005/054817 announces, many different embodiments that are used for by the device that uses flexible member test fluid character have been described.This flexible member can be formed by two layers with different heat expansion coefficient.Well heater can be attached in the flexible member, make this element construct from first tectonic movement to the second.When removing heat, then element can relax back first the structure.The degree of deflection or the ratio that suitable piezoresistive material can be used for measuring element.Because a large amount of relatively deflection that can obtain by this flexible member, so this element has allowed the viscosity along with past of time changed and has carried out relatively accurate measurement.
A purpose of embodiment of the present invention is the one or more problems that solve the prior art of mentioned in this article or others.A purpose of specific embodiments of the present invention provides a kind of fluid probe of sensitivity of raising.
In first aspect, the invention provides a kind of device that is used for test fluid character, described device comprises: body region; First flexible member and second flexible member, each flexible member has first terminal and second end, described first end is fixedly located on the described body region, and each flexible member can move to second relative configurations from least the first relative configurations by the bending of this element; Described first flexible member comprises that configuration is used to make the drive division of flexible member motion between first structure and second structure; Described second flexible member comprises the integrated motion sensor of the motion that is used for the sensing flexible member, and wherein in position away from described body region, described first flexible member is connected to described second flexible member, and the drive division of only described first flexible member can be operated and is used to make first and second flexible members motions.
Because first and second flexible members are coupled to each other, therefore the motion of one or more first flexible members causes both motions of first and second flexible members.This makes the one or more sensors in second flexible member can measure the motion of one or more second flexible members more exactly, thereby can be increased in qualitative accuracy and/or sensitivity that mensuration wherein makes the fluid of flexible member motion.Because relevant one or more driver portion are arranged in different flexible members with one or more Sensor sections, therefore owing to the reduction of the noise of the one or more sensors of influence that produce by one or more driver portion, cause the sensitivity of this increase.This noise can be taked the form of thermonoise or electrical noise.
Each of described flexible member can be basically longitudinal extension in parallel to each other.
Each flexible member can be by described element in the bending of flexure plane separately and from described first tectonic movement to described second structure, and be substantially perpendicular on the direction of flexure plane, this element can be linked together via the coupling member that extends between first and second elements.
Described coupling member can be formed by the material of rigidity basically.
Described coupling member can be connected to second end of first and second flexible members.
Described coupling member can extend on the face away from first and second flexible members.
Can be with this coupling member moulding, thus when flexure member moved between described first and second structures, described coupling member served as blade.
This device can comprise at least two described first flexible members, and described second flexible member is between described two first flexible members.
Described first flexible member can be connected to described second flexible member via heat insulator.
Described first flexible member can be connected to described second flexible member in a plurality of positions.
Described first and second flexible members can longitudinal extension, and first flexible member is connected to described second flexible member along whole length of described element.
The drive division of described first flexible member can comprise: the two-layer at least laminated material with different heat expansion coefficient; Heating element, it is used to heat flexible member, to cause the bending of described element.
The ground floor of this laminated material can comprise polymkeric substance, and the second layer of this laminated material can comprise metal.
The ground floor of this laminated material can comprise polymkeric substance, and the second layer of this laminated material can comprise polymkeric substance.
Described layer can have less than the Young modulus of 100GPa and greater than the thermal expansivity in room temperature of 10-6/K.
Can be configured described motion sensor, make the electrical property of motion sensor change owing to the motion of described second flexible member.
Described motion sensor can comprise piezoresistive element, disposes described piezoresistive element and makes the resistance of this piezoresistive element change when second flexible member is crooked.
Described piezoresistive element can comprise nickel-chrome, chromium, copper and chrome copper at least a.
Described piezoresistive element can comprise AlN (aluminium nitride), PZT, polysilicon, conducting polymer at least a.
Flexible member can be in the scope of 100 to 1000 μ m from the length of first end to the second end.
Distance between second end of second flexible member in second terminal and described second structure of second flexible member in described first structure can be in the scope of 20 to 650 μ m.
This device can also comprise electronic circuit, and described electronic circuit is coupled to first flexible member, and is configured to provide signal for driver portion, is used for first flexible member is constructed from first tectonic movement to the second; And be coupled to the motion sensor of second flexible member, and be configured to provide output signal, described output signal indication is by the motion of described motion sensor sensing.
In second aspect, the invention provides the method that a kind of manufacturing is used for the device of test fluid character, described method comprises: the provider district; First flexible member and second flexible member are provided, each flexible member has first terminal and second end, described first end is fixedly located on the described body region, each flexible member can move to second relative configurations from least the first relative configurations by the bending of described element, described first flexible member comprises the drive division that is configured to make flexible member motion between first structure and second structure, and described second flexible member comprises the integrated motion sensor that is used for the motion of sensing flexible member; In position, be used in the unitor (coupling) that extends between the flexible member and form first flexible member and second element away from described body region; And only the drive division with first flexible member is configured to exercisable so that the motion of first and second flexible members.
This method can also comprise the step that metal level is provided, and described metal level is arranged to during the pattern of flexible member forms (patterning) and plays etching stopping layer, and allows the subsequently release of flexible member from surrounding structure.
This metal can be a chromium.This metal can be a titanium.
This method can also comprise that formation comprises each flexible member of at least a conductive material, and is formed the step of unitor by non-conducting material.
In the third aspect, the invention provides a kind of use and be fixedly located in a end on the body region, and first and second flexible members that are linked together in the position away from described body region are measured the method for fluid properties, described method comprises: drive first flexible member and bend to second structure from first structure, and owing to be coupled to first flexible member, second flexible member from corresponding first tectonic movement to second relative configurations; The motion of sensing second flexible member; And, measure at least a character of fluid by handling the motion of institute's sensing.
This method can comprise described first flexible member of driving, so that it is with the frequency motion between first and second structures less than 10Hz.
Can drive described first flexible member and construct, make the end of the flexible member of winning move at least 100 μ m from first tectonic movement to the second.
In fourth aspect, the invention provides the device that is used for test fluid character, basically by installing as described in this article with reference to the accompanying drawings.
In aspect the 5th, the invention provides the method that at least two flexible members of a kind of use are measured fluid properties, pass through with reference to the accompanying drawings as described in this article basically.
In aspect the 6th, the invention provides a kind of manufacturing method by installing as described in this article with reference to the accompanying drawings basically.
By with reference to the accompanying drawings, only, now the preferred embodiments of the invention will be described by embodiment, wherein:
Figure 1A and 1B show respectively the skeleton view according to the device of embodiment of the present invention of constructing with first structure and second;
Fig. 2 shows the schematic plan of graphic device among Figure 1A and the 1B, and at two side views along the diverse location place of the length of this device;
Three kinds of not isostructures in the zone between Fig. 3 diagram first and second flexible members show how this zone adopts the space, the vertical view of form partially filled or complete filling;
Fig. 4 A, B and C diagram according to the sensor in the device of embodiment of the present invention respectively at air, the different responses in water and the silicone oil;
Fig. 5 A-5Q diagram is according to the manufacture method of embodiment of the present invention.
Figure 1A, 1B and 2 illustrate the device that is used for test fluid character 100 according to the preferred embodiments of the invention.
In this specific embodiments, each flexible member 102,104,106th, the major part of body region 110 and extend from body region 110.First end of each flexible member is connected to body region 110.The second terminal body region free movement relatively away from each flexible member of described first end.Each flexible member is the bar (bar) with rectangular tables area, and extend from body region 110 on the long limit of this rectangle.In this specific embodiments, each flexible member 102,104,106 comprises two-layer at least 108a, the laminated material of 108b.The material of each layer has different thermal expansivity (CTE).Described layer can be formed by different materials.Alternatively, material (for example, suppressing and/or be connected to the other material in the flexible member) in handling different layers makes described layer show under the situation of different thermal expansivity, and each layer of described layer can be formed by identical materials.For example, material stress distribution in different directions can cause having the thermal expansivity of directional dependence.Thereby if different layers is formed by identical materials, still different layers is plus-pressure in different directions, and then this different layer will have different thermal expansivity effectively.
Under the application of heating, for identical intensification, one deck will expand manyly than another layer, and therefore heated flexible member will be crooked on the direction of the material with relatively low thermel expansion coefficient.When cooling, for identical cooling, one deck will be bigger than another layer shrinkage degree, and therefore, flexible member then will be crooked on the direction of the material with big expansion coefficient.
Corresponding heating element 112 be positioned on the flexible member 102,106 or within.Flexible member 102,106 is positioned in the either side of flexible member 104.Each longitudinal extension of flexible member and parallel.Electrical contact pad 114 can be applied to the electric signal from electric signal generator each heating element 112.Typically, each flexible member 102,106 will have similar size, and be formed by materials similar.Thereby, same signal is applied to each of heating element 112, thereby guarantees the identical degree of two cross bars (beam), 102,106 deflections.
Three cross bars 102,104, each of 106 has substantially the same length.Coupling member 120 is connected to flexible member 102,104, each of 106 the free terminal end of the flexible member of body region 110 (that is, away from).Coupling member is preferably formed by the material of relative stiffness.Preferably, coupling member is formed by heat insulator.In use, coupling member (and flexible member) will be immersed in the fluid.Preferably, the material of coupling member serves as than the better heat insulator of fluid.In the graphic specific embodiments of institute, coupling member 120 is formed as plane component, away from element 102,104, extends on 106 the plane in the accompanying drawings.Coupling member 120 has and flexible member 102,104,106 identical thickness.When utilizing this device, this shape allows coupling member 120 to serve as blade, thereby the swing of opposing flexible member in measured fluid, and thereby allowed the Signal Processing (tailoring) (resonance, decay etc.) of the measurement of various to being used for (or along with the time changes) fluid.
Figure 1A, 1B and 2 illustrates, flexible member 102,104, the gap 122 of 106 scheduled fixed widths separates from contiguous flexible member, and only coupling member 120 is linked together with flexible member.Fig. 3 illustrate can be between flexible member three alternative embodiment using of position 122.At first, flexible member 102,104, the form of space (that is, be filled with flexible member immersion fluid wherein, comprise liquid or air) can be taked in the zone 122 between 106.Although should be appreciated that since around the bar shaped of flexible member, shown in zone 122 be generally rectangle, in other embodiments, zone 122 can have Any shape, circle for example, ellipse, rhombus, square or arbitrary shape.Alternatively, shown in 122 ', (the residual space/clearance in this zone is passed in the circle expression, and surrounding environment is opened wide) can partly be filled by another kind of material in this zone.Extending through 122 ' hole, zone can be as shown in Figure 3 for circular, maybe can be other shape arbitrarily.Alternatively, as 122 " shown in, this zone can be filled by material fully.If (thereby serving as blade) filled by material fully in zone 122, so preferably, this material has the engineering properties with the materials similar of flexible member.If desired, the rigidity that the thickness of structural sheet that can be by forming blade is further regulated blade, make this material with deflection to the degree similar to flexible member, or keep firm relatively.The material of (that is, 122 ' or 122 " in) can serve as other coupling member between flexure member, maybe can replace coupling member 120.Preferably, according to the feature of the drive division of flexible member, this material is an insulating material, for example heat insulator and/or electrically insulating material.For example, any material that when the operation by heating element 112 causes the driving of said apparatus, so preferably, extends (for example, in gap 122, or forming coupling member 120) between element comprises heat insulator.Preferably, compare,, also play good equally heat insulator at least even this material is not better heat insulator with flexible member.
In use, flexible member 102,104,106 (and the coupling members 120 that play the blade effect) are dipped in the fluid.Flexure member 102,106 is applied drive signal.This drive signal takes to be applied to the form of the electric signal of heating element track 112 (via electrical contact pad 114).Heat is owing to the resistance in the track 112 dissipates, and this temperature that causes flexible member 102,106 raises.Thereby because the difference of thermal expansivity separately, a layer 108a of laminated material will expand with the speed bigger than another layer 108b.Figure 1A has shown the bending position of flexible member when not applying thermal signal.When applying thermal signal, track 112 heating that flexible member 102,106 (but not having 104) is embedded cause the constructional variation of flexible member, i.e. element bending.Because have this concrete configuration of the layer of different heat expansion coefficient, in this specific embodiments, flexible member 102,106 will bend to the position shown in Figure 1B, that is, and not crooked and more straight/more linear (more not crooked) that become of element.Preferably, the distance that the end of flexible member 102,106 (coupling member 120 is attached to this end) moves through in the scope of 20 to 650 μ m, the second terminal preferred movement at least 100 μ m.Because the freedom (second) of flexible member terminal (promptly not being connected to the end of body region 110) is linked together, so the motion of flexible member 102,106 also causes the corresponding sports/bending of passive flexible member 104.
In bending, flexible member 104 is induced the strain of the resistance variations that causes piezoresistive element 116 on piezoresistive element 116.Therefore, the resistance of motion sensor 116 has been represented the motion of sensing element 104.This resistance can be by including but not limited to the electric resistance measuring apparatus arbitrarily or the circuit measuring of Wheatstone bridge.
About given input signal for heating element 112, flexible member 102,104,106 (or deflection) scheduled volumes that will move.If thermal signal is repetition, for example sinusoidal signal or a string rect.p., flexible member will continue crookedly when being heated so, and apply when hot not (or less), will be lax towards its equilibrium position.Thereby, can make flexible member 102,106 (and flexible member 104 therefore) swing.Alternatively, single driving pulse (promptly by big or short electric pulse induced once bombardment (shot) or ' step function excites ') can impel flexible member to produce ' ring (ringing) ' response (for example, referring to Fig. 4 A-C).If apply the damping force relative with the motion of flexible member, if moving through resisting medium such as flexible member, then the rate of change of the degree of deflection of flexible member and deflection is with influenced.Thereby the measurement of the ratio of the variation (or phase) of deflection amplitude and/or the deflection compared with the signal that is used to drive flexible member 102,106 is used to detect and measure the viscosity of the fluid that wherein is soaked with flexible member.
By having described how to carry out such viscosity measurement (and measurement of other character or fluid) with reference to the WO2005/054817 that is combined in this.Use device described here similarly to measure.Thereby, can be to handling from the signal of motion sensor (ohmically variation), with the value of at least a character of measuring the indication fluid.This can indicate the value of fluid viscosity to carry out by monitor signal for example by measuring the motion change speed of flexible member 104 over time and from the rate of change mensuration of motion.Alternatively, can be to the deflection amplitude of flexible member, the resonant frequency of flexible member or " ring " (it is proportional with the thermal signal that applies) are handled, to measure the value that the indication flexible member immerses the viscosity of fluid wherein.For example, Fig. 4 A, 4B and 4C have shown and are applying single thermal pulse so that flexible member after their the rest position deflection (shown in Figure 1A) that different fluid (is respectively, air, water and silicone oil) in as the resistance variations of the motion sensor of the function of time.As can be seen, medium is sticking more, and the damping effect of flexible member experience is remarkable more.
Preferably, this device is used for measuring fluid viscosity variation in time.For example, can measure as the blood viscosity of the function of time and change, for example when blood clotting, can measure, with the relative variation of the blood viscosity of measuring blood viscosity/in time with predetermined interval.Preferably, be the order of magnitude of 1 microlitre from its volume of measuring the fluid of character, for example reach 5 microlitres, or more preferably, between 0.5 and 3 microlitres.Preferably, this device configuration is used to measure the range of viscosities that is suitable for blood measuring, for example range of viscosities of 1cP-1000cP.
Because drive division is provided in the element that separates with motion sensor, so motion sensor is less is subjected to by the caused The noise of the driving of flexible member.Thereby, the accuracy that can improve sensor.In addition, provide the effect of blade or oar (oar) and the coupling member 120 of moulding has increased the influence of viscosity to the flexible member motion, thereby allowed the raising of sensitivity.
Should be appreciated that above embodiment is only described by embodiment, and various alternatives will be obvious for the technician, fall into simultaneously in the scope of appended claim.
For example,, drive 102,106 motions of two flexible members, and utilize single flexible member to measure motion, should be appreciated that and to use constructive alternative although in above embodiment.For example, can implement single driver flexible member and single motion sensor flexible member.Alternatively, the motion sensor flexible member and the driver element of any amount can be implemented, for example, this element array can be formed.
In preferred embodiments, only driver flexible member 102,106 comprises the drive division that configuration is used to cause flexible member deflection, and only sensor flexible member 104 comprises motion sensor.Yet, should be appreciated that in the flexible member any one can comprise motion sensor and drive division.For example, two flexible members described in the WO2005/054817 can be connected in together, and operate according to embodiment of the present invention.Particularly, only drive the flexible member motion (causing the corresponding sports of another flexible member that it is connected to) in the flexible member, only another flexible member is used for the sensing motion.
In above embodiment,, illustrated coupling member 120 as plane institution movement.In alternative embodiment, coupling member can be taked by the form of the blade of punching or plate (plate), to change fluid drag force and/or the shearing in the fluid of being paid close attention to.For example, perforation can be in coupling member, provided,, thereby Change of Fluid Viscosity in relative short-term can be measured so that strengthen condensing of monitored fluid.This coupling member will be particularly suitable for the viscosity variation of monitoring of blood along with the past of time.Should be appreciated that similarly, the hole can be provided in coupling member, thus influence reaction chemistry and/or physics.
If flexible member is used to monitor the fluid that contains discrete particle or droplet/colloidal particle, can provide any any hole that has in the following size so: more much bigger with the similar size of particle than particle, or more much smaller than particle dimensionally.For example, if the development of monitoring soliquid can provide the size in hole so, make its be generally with suspending liquid in the similar size of middle particle; Less colloidal particle will be by the hole, and bigger particle can not pass through the hole simultaneously, and the particle of similar size can keep being trapped in the hole.Thereby when moving along with the time supervision flexible member, this system can provide the more information about the development of soliquid.Equally, should be appreciated that and other structure/shape of coupling member can be used to strengthen this shearing or drag force effect.The size of coupling member will directly influence the mechanical time constant of bimorph structure (bimorph construction), and thereby change and relevant amplitude and the time constant of sensor response.Typically, coupling member will from flexible member extend each flexible member length at least 20%, and more preferably 50% distance.Typically, the length of the flexible member from body region to coupling member is between 100 and 1000 μ m.Although coupling member has been expressed as the blade that extends from the end of flexible member, but in other embodiment, coupling member can be taked to extend between flexible member, for example extends through the form of the one or more discrete member in the zone 122 between the flexible member.
In above embodiment, described coupling member and formed, and flexible member is driven by heat by heat insulator.In other embodiment, flexible member can be via electrostatic force, magnetic force, or electricity drives (for example, using piezoelectric).In such alternative embodiment, coupling member will be formed by the appropriate insulation material, be electric if for example drive, and coupling member will be formed by electrically insulating material so.
In above embodiment, the driving of flexible member motion is caused by heating.Yet, should be appreciated that the drive system that can use other.Similarly, except that utilizing the voltage dependent resistor (VDR) track, can utilize alternative motion sensor.For example, depend on from piezoelectric and measure electric signal, still piezoelectric is applied electric signal, can be with piezoelectric element as motion sensor or drive division.WO2005/054817 has described various sensors, the type of driver and structure, and it is any can be used to different embodiments of the present invention.
Typically, flexible member will be for example golden by the material that comprises one layer of polymeric (coming free polyimide, the group that polyamide and acrylic polymers are formed) or another kind of type, aluminium, and the laminated material of copper or silicon dioxide forms.Preferably, this material is an insulating material.
Another layer of laminated material can comprise metal, for example aforesaid gold, the aluminium of platinum (aluminium of platinum), and most preferably be material, to keep the deformation (in the zone of 20 μ m-650 μ m) that causes by first laminated material with the rigidity higher (Young modulus) and sufficient elasticity (length growth rate) than first laminated material.Drive division in the flexible member 102 and 106 (well heater) can be by conductive material arbitrarily (for example, metal or conducting polymer) make, the detecting means in the element 104 should be made by the material group with sufficient voltage dependent resistor (VDR) or piezoelectricity (piezovoltaic) character simultaneously.Typically, in the above-described embodiment, detecting means is made by Au or Pt, but can also be made by conducting polymer, and is preferably made by NiCr or CrCu alloy.Any conductive layer in the member 102 and 106 or track preferably should not extend in unitor/coupling member 120.
Should be appreciated that and to utilize other made flexible member, coupling member, and the thermal insulating area between adjacent flexible member.Table 1 and 2 has illustrated the character of the suitable material that is used for such structure.If zone 122 is not filled by another kind of material in addition, then, in table 2, listed air, the second alcohol and water as the example of the potential thermal property of the fluid that can fill the zone 122 between the flexible member.
In above embodiment, flexible member 102,104 and 106 is described to all have similar laminar structure.Yet, should be appreciated that with motion flexible member 102,104 and compare that different materials can be used to form different flexible members, that is, the sensor flexible member can be formed by different materials, or has different structures.Yet, it is desirable for flexible member and have similar extent of elasticity (for example, Young modulus) separately, thereby when the actuation movement flexible member, whole flexible member deflection or bend to similar degree.
Be used for member 102 from following table 1, the preferred compositions of the structured material of 104 and 106 laminated material is-i) polyimide-Au and ii) polyimide-polyimide, in the situation of polyimide-polyimide, use two kinds of dissimilar polyimide with big CTE difference, simultaneously at least one of laminated material has more the structure of rigidity (for example, Young modulus＞5GPa).Another kind of possible combination is iii) polyimide-Al, can have lower efficient owing to the higher CTE of Al.Because high CTE and the low-down thermal conductivity and the thermal capacity (heat insulator) of polyimide, so it is preferred.On the other hand, gold utensil has excellent engineering properties (flexible, and compare with polyimide, as to have rigidity) and relative low CTE.When needing the quick response of flexure member, higher thermal conductivity is desirable.If select alternative driving method, then thermal parameter is not too paid close attention to.At last, the careful selection of polyimide (or polymeric material of any appropriate) can and mechanically produce optimum performance in heat.
Possible laminated material combination comprises Al-Si, Al-SiO
2, polyimide-Si and polyimide-SiO
2
Table 1: the table of comparisons that is used for the material of little manufacture method
*CTE is that temperature relies on, and the value of expression here is corresponding to room temperature
*This parameter depends primarily on the type of deposition, and depends on for example temperature of procedure parameter, pressure etc.
* *Change with different polyimide families
* * *This parameter depends primarily on solidification temperature and time, and the polyimide chemistry
Table 2: the thermal property of polyimide and other associated materials
By with reference to figure 5A-5Q, will for example manufacture method of bimorph cantilever of flexible member be described now.
Fig. 5 A-5Q is that explanation is used to make the device that comprises at least one flexible member, i.e. Figure 1A for example, among the 1B and 2 the cross-sectional view of little manufacturing process of graphic device.Described figure illustrates the length along flexible member, promptly from body region 110 until and comprise the xsect of (and being higher than a little) coupling member 120.How Fig. 5 Q illustrates the different cross section that forms in the manufacturing process corresponding to Figure 1A, the element of graphic device 100 among the 1B and 2.
Should be understood that this xsect is in fact transparent figure, promptly it is not that the xsect of any concrete line of device is passed on the edge, and only is the figure that sees described device from the side, has shown the whole correlated characteristics in the different layers.Should be understood that under most situation, such layer does not extend through the whole width of device.For example, in 5Q, shown the nickel/evanohm that forms motion sensor track 116; Should be appreciated that this track simply sensor flexible member 104 inner extensions, and not contiguous motion flexible member 102,106 (as by shown in Figure 2).
In addition, should be understood that,, exaggerated the height (comparing) of different layers in the drawings with length for clear.The gross thickness typical case of flexible member is between 1 μ m and 30 μ m, and promptly thickness is preferably than little at least 1 order of magnitude of typical length of each flexible member.
Fig. 5 A illustrates prepared wafer (wafer) 200.Typically, this wafer will be a silicon wafer, for example 4 inches silicon wafers.At first, described wafer is cured at 120 ℃, to remove moisture from this wafer.Cure and to carry out 30 minutes.
The layer 202 of deposition of silica, preferred deposition is to about 1 μ m thickness.Can be by heat deposition or by CVD (chemical vapor deposition) deposition of silica.The basic unit (base layer) that the body region 110 that wafer 200 and layer 202 form device 100 is connected.At last, flexible member 102,104 and 106 will towards or away from layer 202 deflection.
Subsequently, deposit the layer 204 of chromium from the teeth outwards, then the thick-layer 206 of deposited gold.Chromium and gold can pass through plasma sputter deposition.Typically, the layer 204 of chromium will be that 50nm is thick, and the approximate 150nm of the layer of gold is thick.The chromium layer is used as kind of a layer, is used for the formation of golden structural sheet 206 subsequently.
Fig. 5 B illustrates via the use of first photomask and forms the later substrate of pattern (pattern).At first, further dewater at 120 ℃ and cure about 30 minutes.Then the suitable resist of the top coating of Jin Hege the layer.This resist is suitable for sheltering in the etching process of Jin Hege.Suitable resist comprises that the chemistry of JSR strengthens positive photoresist or causes resist or equivalent from the AZ5214E positivity I-linear light of AZ electronic material (AZElectronic Materials).
Subsequently, via this resist layer of photomask exposure, thereby from first photomask with design transfer to resist layer.The opening that forms pattern has rectangular shape, and will provide subsequently from being connected to the flexure member 102,104,106 that substrate discharges and the free space of coupling member 120.
Resist coating with exposure develops then, and etches away the relevant portion of layer 206,204.Then residual resist is divested.This can promote by the oxygen plasma of the anticorrosive additive material/bonding agent of resist is removed.Residual structure is a graphic structure among Fig. 5 B.The substrate of body region 110 subsequently is provided in the part of the Jin Hege of the left-hand side of this figure.By gold and the gap in the chromium layer 204,206 that engraving method limited is wherein to form flexible member 102,104 subsequently, 106 and the zone of coupling member 120.
Fig. 5 C has shown the result of the deposition of first structural sheet.Typically, cure 30 minutes by structure being dewatered once more, the preparation surface at 120 ℃.Deposit other gold layer 207 then, deposit another chromium layer 208 and the 3rd gold layer 210 subsequently.Typically, gold layer 207 in addition will be for about 100nm be thick, and chromium layer 208 is that 50nm is thick, and last gold layer 210 described relatively layer are thicker, for example are about 750nm thick (thickness of promptly about 1 μ m).Gold layer 210 forms a layer (being laminate layers 108b) of the laminar structure of flexible member.In the final structure that realizes in proper order by this coating (referring to Fig. 5 Q), as can be seen, the chromium layer also extends to the end of flexible member, and forms outer in flexible member.This layer plays etching stopping layer, is used for forming at the pattern of flexible member the wet etch process (Fig. 5 P) of (patterning) process control gold layer.
Fig. 5 D has shown the result who uses second photomask to make first structural sheet formation pattern.Once more, 120 ℃ of about 30 minutes of roastings of dewatering.Utilize suitable resist coating (once more, JSR or AZ5214E, or equivalent) then, and place it on the outermost layer of gold layer 210, as diagram among Fig. 5 C.
Then via this resist of second photomask exposure, thereby limit the zone that will form coupling member 120, and the excessive metal of etching, to reduce thermal conductivity by blade.Develop the then resist coating of part exposure, and externally carry out etching on gold layer 210 and the adjacent chromium layer 208 subsequently, with the part (as being limited) that removes these layers by second photomask.Resist is divested once more, and preferably removes via oxygen plasma.The structure that obtains is shown among Fig. 5 D.Gap 302 in the layer 208,209 that forms by pattern formation method finally defines the free terminal (that is, being connected to coupling member 120, away from the end of the flexible member of the body region in the resulting device 110) of flexible member.
Fig. 5 E has shown that second structural sheet is the deposition results of the first of laminate layers 108a.In this specific embodiments, laminate layers 108a is formed by polyimide.In order to obtain this structure, at first, dewater at 120 ℃ and to cure about 30 minutes.The coating (for example, from PI2562 or the PI2566 of the Pyralin polyimide PI2560 of family of Du Pont (DuPont), or equivalent) of the polyimide of typical thickness between 2 μ m-4 μ m is provided.For coating 212a is solidified, then described coating is for example cured in the stove of programmable.
Preferably, the temperature of the stove that contains this structure via slowly raising from room temperature to stoving temperature is cured.Suitable climbing speed can be several degrees celsius/minute.Then this structure is remained on stoving temperature, then the temperature of stove is slowly brought up to final ceiling temperature (for example), then this structure is remained on this finishing temperature and reach about 1 hour with the speed of several degrees celsius/minute.For example, can stove be risen to 200 ℃ from room temperature, keep 30 minutes, with about 2 ℃/minute slow climbing speed temperature is elevated to then and be no more than 350 ℃ temperature, then temperature be remained on this finishing temperature and reach 60 minutes at 200 ℃ with 3 ℃/minute.Make this structure natural cooling (that is, not forcing cooling) to room temperature then.This has finished the processing of the first of polyimide layer 212 (described first is a layer 212a).The different polyimide layer 212b of deposition in step subsequently, 212c, thereby relevant motion sensor/driver (for example, heating element) that sealing forms subsequently.
Fig. 5 F has shown the result of first registration (registration) step of using the 3rd photomask.Carry out step of registration, thereby be provided for the register mark indenture (indentation) of photomask 4-7 with post-equalization (alignment).
At first, dewater and cure, use resist coating (once more, JSR or AZ5214E, or analog) coating upper surface then, use the 3rd mask to carry out step of exposure, the resist with exposure develops then.Then dry etching (for example, via oxygen plasma) is carried out (for example, reaching 4 minutes),, thereby in polyimide structures 212a, stay desirable indenture with a part (as being limited) that removes polyimide structures by the 3rd photomask.Residual anticorrosive additive material can be divested then.
Fig. 5 G has shown first metallization step.Once more, at first dewater and cure about 30 minutes at 120 ℃.Then, for example pass through the typically thin layer between 50nm and 250nm of plasma sputter deposition.This layer material is the layer material that is used to form drive track or sensor track.In this specific embodiments, this layer is used to form drive track, therefore utilizes suitable material (for example, chromium/billon, aluminium, or nickel-chrome).This material can be via plasma sputter deposition.Fig. 5 G shown in layer 214 the result by this material behind this material of plasma sputter deposition, and layer 214 via the indenture that forms in the step of registration extend/fixing (secure) to polyimide layer 212a (referring to Fig. 5 F).The structure that obtains is shown among Fig. 5 G.
Fig. 5 H has shown that the pattern subsequently of the related track that utilizes the 4th photomask forms the result of the formation of pattern subsequently that is drive track.Here the 4th photomask of Li Yonging defines the shape of drive track.Once more, at first at 120 ℃ with material dehydration 20 minutes.Apply then suitable resist coating () layer for example, JSR or AZ5214E, or equivalent, and via this material of photomask exposure, with the design transfer of drive track to resist.Then resist is developed, and carry out metal etch, make in layer 214, to limit the drive track pattern.Thereby, form drive track 112.Metal etch is typically the wet method metal etch.Then residual resist layer is divested.
Fig. 5 I has shown the result of the deposition of the 3rd structural sheet.Particularly, the other laminate ply (that is the second layer of polyimide) of deposition.The second layer 212b of this polyimide is provided, thereby seals drive track 214/112.Layer 212b is that about 2 μ m-4 μ m are thick.Required these steps of layer 212b that deposit this polyimide be used to deposit about the described polyimide of Fig. 5 E layer those steps identical.
Fig. 5 J has shown the result of second metallization step, and described second metallization step is used for depositing the material (in this concrete condition, finally forming the material of sensor track 116) that is used for other track groups.Once more, at first the structure dehydration is cured.Depositing metal layers 216 then.This layer is deposited as the film of typical thickness between 50nm and 250nm.This deposition can be undertaken by plasma sputtering.Suitable material comprises chromium/gold or platinum, perhaps preferably, in this specific embodiments, utilizes nickel-chrome or chromium-aldary, thereby owing to their low-temperature coefficient forms the metal level 216 shown in Fig. 5 J.
Fig. 5 K has shown the result that the pattern of the motion sensor track that uses the 5th photomask forms, and described the 5th photomask is used for limiting from the layer material that previous step deposits the shape of track.With reference to figure 5H, use pattern to form the pattern formation that described identical step is carried out this track about drive track.
Subsequently, provide another layer 212c of polyimide, thereby seal the signal track 216 of patterning.Use with described, be used to deposit the layer of identical this polyimide of step deposition of the second layer 212b of polyimide with reference to figure 5I.The alternative materials that is used to seal comprises thin (50nm) Si
3N
4, SiO
2Or analog, deposit by plasma-deposited.This structure of sealing is illustrated among Fig. 5 L.
Subsequently, flexure member is formed pattern, and form opening, described opening is used for being provided for subsequently the contact mat (that is, forming opening for the pad shown in Fig. 2 114,118) of sensing and drive track.Use other (the 6th) photomask, this pattern formation of flexible member and the providing of opening that is used to fill up can be carried out with single step.The result is illustrated among Fig. 5 M.
At first, the structure dehydration is cured.The layer (8 μ m-12 μ m) of the thick relatively resist coating of coating (for example, from AZ electronic material (AZ Electronic Materials) AZ4562 or AZ9260 positive photoresist or equivalent) then.
With the structure soft baking,, then resist coating is developed then by the 6th photomask exposure resist coating.Thereby mask will be defined for the opening of pad and the structure of cantilevered distal end.Carry out etching then, thereby remove the relevant portion of the polyimide that limits by mask.This can be a dry etching, for example uses the potpourri of oxygen and tetrafluoromethane to carry out.According to previous steps, peel off the residual fraction of resist layer subsequently, and remove the surface.This has stayed graphic structure among Fig. 5 M.As can be seen, this structure comprises the opening 304,306 that reaches track 214,216 by polyimide layer.These openings 304,306 are used to provide electrical contact pad subsequently.In addition, provide opening 308 to layer 210.A surface 310 that limits this opening 308 forms the end surface of coupling member 120 in resulting device.
Subsequently, as institute's diagram among Fig. 5 N, deposition forms the material 218 of electrical contact pad.At first, the structure dehydration is cured.Deposition forms the material of contact mat then.Typically, material will be metal (aluminium or chromium/gold).This material is deposited as thick metal level (for example, about 1 μ m is thick).This metal level can pass through plasma sputter deposition.Apply thick resist coating (AZ4562 or AZ9260) then, and this thick resist coating is carried out soft baking.Then via the 7th photomask with the exposure of this coating, thereby limit the structure (that is, remove by the plasma sputtering step deposition excessive other material) of contact mat 218.Subsequently, resist coating is developed, and for example remove unnecessary metal by wet etching.Once more, then residual resist is peeled off, and removed outside surface, to stay the structure that shows among Fig. 5 N.
At last, by taking out from wafer with the rectangular dies form, the release of passing through cantilever subsequently is to form stand-alone configuration, and preparation forms the device of pattern.Apply thick resist coating (AZ4562 or the AZ9260 of 8 μ m-12 μ m), carry out soft baking (Fig. 5 O) then.Then via the 3rd photomask exposure coating (also be used for registration, and the rectangular aperture of rectangular aperture coupling photomask 1, and cantilever and blade track (footprints) is overlapping).
Before photoresist develops, with proper step with wafer scribe (for example, the diamond cut saw by having the wide blade of 100 μ m is drawn indenture to entire wafer on X and Y direction), with device for limiting chip area in silicon substrate.(Fig. 5 P) do not draw wafer and wears, to be used for discharging the final preparation of cantilever on wafer size.Alternatively, can be in the starting stage of manufacture method, and before any pattern forms, wafer is rule.
After wafer scribe,, clean and drying crystal wafer gold/chromium layer etching that development of photoresist also will expose.In this stage, take out independent chip (by along the line bending) from wafer.Carry out final golden etching (Fig. 5 Q).Can choose the bottom chromium layer of peeling off in wet etching is bathed in the cantilever zone (50nm is thick) wantonly, described bottom chromium layer plays etching and stops in final cantilever pattern formation and dispose procedure.
Fig. 5 Q has shown the preparation of resulting device and the result of packing.Residual resist is divested, and this structure is cleaned and drying.Preferably, then this structure is installed on the appropriate carriers, for example CerDIP carrier (ceramic dual-in-line head (Ceramic Dual-in-line header)) with 8,12,16,24 or more a plurality of lead-in wire/pins.To be wired to the electrical contact pad that is used for running gear then.The formed structure that obtains can be Figure 1A, the structure shown in the 1B and 2.
Claims (10)
1. device that is used for test fluid character, described device comprises:
Body region;
First flexible member and second flexible member, each flexible member has first terminal and second end, described first end is fixedly located on the described body region, and each flexible member can move to second relative configurations from least the first relative configurations by the bending of this element;
Described first flexible member comprises that configuration is used to make the drive division of described flexible member motion between described first structure and described second structure;
Described second flexible member comprises the integrated motion sensor of the motion that is used for the sensing flexible member, and
Wherein,, described first flexible member is connected to described second flexible member, and the drive division of only described first flexible member is exercisable so that described first and second flexible members motion in position away from described body region;
Wherein, the drive division with described first flexible member is configured to drive by magnetically-actuated or use piezoelectric electricity.
2. device according to claim 1, wherein each flexible member by described element in the bending of separately flexure plane and from described first tectonic movement to described second structure, and be substantially perpendicular on the direction of described flexure plane, described element is linked together via the coupling member that extends between described first and second elements.
3. device according to claim 2, wherein said coupling member is formed by the material of rigidity basically.
4. according to claim 2 or the described device of claim 3, wherein said coupling member is connected to second end of described first and second flexible members.
5. according to claim 2 or the described device of claim 3, wherein said coupling member is formed by the suitable insulation material.
6. device according to claim 4, wherein said coupling member extends on the face away from described first and second flexible members.
7. according to each described device in the claim 3 to 6, wherein with described coupling member moulding, when moving between described first and second structures with convenient flexure member, described coupling member serves as blade.
8. according to each described device in the aforementioned claim, described device comprises at least two described first flexible members, and described second flexible member is between described two first flexible members.
9. according to each described device in the aforementioned claim, wherein said first flexible member is connected to described second flexible member via heat insulator.
10. according to each described device in the aforementioned claim, wherein said first flexible member is connected to described second flexible member in a plurality of positions.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0605273.2 | 2006-03-16 | ||
| GBGB0605273.2A GB0605273D0 (en) | 2006-03-16 | 2006-03-16 | Fluid robe |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800158329A Division CN101617209B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
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|---|---|
| CN102269687A true CN102269687A (en) | 2011-12-07 |
| CN102269687B CN102269687B (en) | 2014-11-05 |
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| CN201110153583.8A Expired - Fee Related CN102269687B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
| CN201110153800.3A Expired - Fee Related CN102323187B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
| CN2007800158329A Expired - Fee Related CN101617209B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
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| CN201110153800.3A Expired - Fee Related CN102323187B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
| CN2007800158329A Expired - Fee Related CN101617209B (en) | 2006-03-16 | 2007-03-14 | Fluid probe |
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| EP (1) | EP1994394B1 (en) |
| JP (1) | JP5185836B2 (en) |
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| WO (1) | WO2007104978A1 (en) |
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| GB0328054D0 (en) | 2003-12-04 | 2004-01-07 | Council Cent Lab Res Councils | Fluid probe |
| GB0605273D0 (en) | 2006-03-16 | 2006-04-26 | Council Cent Lab Res Councils | Fluid robe |
| JP4383487B2 (en) * | 2007-03-19 | 2009-12-16 | 古河電気工業株式会社 | Metal-clad laminate and method for producing metal-clad laminate |
| GB0716202D0 (en) | 2007-08-11 | 2007-09-26 | Microvisk Ltd | Improved fluid probe |
| US10170685B2 (en) | 2008-06-30 | 2019-01-01 | The Regents Of The University Of Michigan | Piezoelectric MEMS microphone |
| US8751172B2 (en) * | 2009-06-29 | 2014-06-10 | Rochester Institute Of Technology | Microelectromechanical viscosity measurement devices and methods thereof |
| FR2948114B1 (en) * | 2009-07-17 | 2012-03-30 | Commissariat Energie Atomique | NEMS HAVING ALUMINUM ALLOY TRANSDUCTION MEANS |
| IT1402181B1 (en) * | 2010-09-13 | 2013-08-28 | Fond Istituto Italiano Di Tecnologia | ELECTRO-ACTIVE MICROELETTROMECHANICAL DEVICE AND RELATIVE DETECTION PROCEDURE |
| GB2508358B (en) | 2012-11-28 | 2014-10-29 | Microvisk Ltd | Apparatus and method for monitoring a sedimentation parameter in a fluid medium sample |
| JP6119703B2 (en) * | 2014-09-04 | 2017-04-26 | 横河電機株式会社 | Sensor device, strain sensor device, and pressure sensor device |
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| EP3507585B1 (en) * | 2016-08-31 | 2021-07-28 | Command Alkon Incorporated | Rheological probe |
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2006
- 2006-03-16 GB GBGB0605273.2A patent/GB0605273D0/en not_active Ceased
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- 2007-03-14 WO PCT/GB2007/000887 patent/WO2007104978A1/en active Application Filing
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- 2007-03-14 CN CN2007800158329A patent/CN101617209B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102323187B (en) | 2014-08-20 |
| CN102323187A (en) | 2012-01-18 |
| CN101617209B (en) | 2013-10-02 |
| JP2009530597A (en) | 2009-08-27 |
| CN101617209A (en) | 2009-12-30 |
| WO2007104978A1 (en) | 2007-09-20 |
| CN102269687B (en) | 2014-11-05 |
| EP1994394A1 (en) | 2008-11-26 |
| EP1994394B1 (en) | 2019-02-13 |
| US20090084167A1 (en) | 2009-04-02 |
| JP5185836B2 (en) | 2013-04-17 |
| GB0605273D0 (en) | 2006-04-26 |
| US8297110B2 (en) | 2012-10-30 |
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