CN102252700A - Micro-cantilever beam piezoresistive bridge type sensor detecting instrument - Google Patents

Micro-cantilever beam piezoresistive bridge type sensor detecting instrument Download PDF

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CN102252700A
CN102252700A CN 201110110948 CN201110110948A CN102252700A CN 102252700 A CN102252700 A CN 102252700A CN 201110110948 CN201110110948 CN 201110110948 CN 201110110948 A CN201110110948 A CN 201110110948A CN 102252700 A CN102252700 A CN 102252700A
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differential amplifier
resistance
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micro
electric bridge
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CN102252700B (en
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文丰
闫树斌
李圣昆
鲍爱达
周振
王二伟
莫润泉
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North University of China
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Abstract

The invention relates to the technical field of biochemical sensor detection, in particular to a micro-cantilever beam piezoresistive bridge type sensor detecting instrument, which solves the problems that the traditional micro-cantilever beam piezoresistive bridge type sensor detecting instrument cannot carry out automatically zero setting or has low zero setting accuracy due to poor contact or abrasion of a mechanical potentiometer, and gain values of two output ends of an inner electric bridge cannot be adjusted. The micro-cantilever beam piezoresistive bridge type sensor detecting instrument comprises a micro-cantilever beam piezoresistive bridge type sensor, a first differential amplifier, a filter, a voltage follower, a singlechip, a computer and an LCD (liquid crystal display); a high-speed synchronous serial port input end of a digital-to-analog converter is connected with a high-speed synchronous serial port output end of the singlechip; a voltage-dividing circuit which is formed by serially connecting a third resistor and a fourth resistor is connected between a fine-tuning signal output end of the digital-to-analog converter and the ground. The micro-cantilever beam piezoresistive bridge type sensor detecting instrument has the advantages of reasonable structure, ingenious design, small volume, low power consumption and strong universality, and can be widely suitable for biochemical detection, automobiles, meteorology and a plurality of industrial devices.

Description

Micro-cantilever pressure drag electric bridge sensor detector
Technical field
The present invention relates to biochemical sensor detection technique field, be specially a kind of micro-cantilever pressure drag electric bridge sensor detector.
Background technology
Micro-cantilever pressure drag electric bridge sensor is mainly used in automobile, meteorology and the many commercial units, in biochemical field, it can adopt self-assembling technique to modify different special compositions on micro-cantilever DNA, various antigen, virus, organism and various biochemical substances are carried out concentration to detect.The principle of work of micro-cantilever pressure drag electric bridge sensor is to adopt MEMS technology to obtain voltage dependent resistor (VDR) on semi-girder to form inner electric bridge, the method of the differential signal by detecting the output of inner electric bridge obtains the variable quantity of semi-girder, thereby obtains the concentration of measured matter again by certain calculating.Owing to the reason of technology is difficult to guarantee the absolute consistance of resistance in the inner electric bridge, so inner electric bridge can not complete equipilibrium, promptly sensor output zero difference sub-signal is non-vanishing when not having measured matter; The semi-girder microbend of sensor causes the variation of voltage dependent resistor (VDR) very faint simultaneously, obtain measured signal and must carry out bigger gain difference amplification usually, if the output zero-bit of electric bridge does not compensate zeroing and directly amplifies, then moving thereby amplifier output meeting is saturated can not carry out Validity Test in the big gain time difference, so a kind of micro-cantilever pressure drag electric bridge sensor detector at this problem seems particularly necessary.
As shown in Figure 2, traditional micro-cantilever pressure drag electric bridge sensor detector comprises that micro-cantilever pressure drag electric bridge sensor 1, first differential amplifier 2, wave filter 4, voltage follower 5, single-chip microcomputer 6, serial ports change USB chip 10, square usb 11, computing machine 12 and LCD display 13; Inside electric bridge two output terminals of micro-cantilever pressure drag electric bridge sensor link to each other with inverting input with the in-phase input end of first differential amplifier, and the output terminal of first differential amplifier links to each other with the input end of wave filter; The output terminal of wave filter links to each other with the input end of voltage follower; The output terminal of voltage follower links to each other with the modulus signal collection terminal of single-chip microcomputer, and the serial port end of single-chip microcomputer changes the USB chip by serial ports and links to each other with computing machine with square USB interface, and the display interface end of single-chip microcomputer links to each other with LCD display; Have an end of two brachium pontis to link to each other with ground in the inside electric bridge of micro-cantilever pressure drag electric bridge sensor, the other end of these two brachium pontis is as the output terminal of micro-cantilever pressure drag electric bridge sensor, and the other end of two brachium pontis links to each other with power supply in addition; Ground connection one end of any brachium pontis that an end is connected with ground in the inside electric bridge of micro-cantilever pressure drag electric bridge sensor is in series with slide rheostat, makes the voltage of inner electric bridge two output terminals reach balance by the resistance of regulating slide rheostat.But because traditional mechanical adjustable potentiometer is subjected to the restriction of manufactured materials and manufacturing process, its sliding brachium pontis exists loose contact or abrasion problem, and loose contact is one of source of circuit generation noise and interference.Serious loose contact may make powerful subsequent conditioning circuit and topworks be subjected to excessive surge, thereby causes circuit transient oscillation or device damage; And use mechanical potentiometer not export resistance by the automatically accurate CONTROLLED POTENTIAL device of controller, and do not reach the purpose of electric bridge automatic, high precision zeroing, this just requires all must manual adjustments to regulate at each sensor, the signal accuracy that obtains so often is not very high, be difficult to realize real zeroing, and influenced by temperature, humidity etc. to make the feeble signal of pressure drag bridge type magnetic sensor accurately to detect great difficulty is arranged.After inner electric bridge leveling, carrying out concentration after the difference that need gain to the voltage of inner electric bridge two output terminals is amplified detects, traditional method is to the external amplification resistance of the first difference differential amplifier, and make that like this enlargement factor of voltage is a fixed value, thereby can't regulate enlargement factor automatically according to the size of internal electrical bridge voltage signal, limit the dynamic range and the accuracy of detection of detector.
Summary of the invention
Cause can't automatic zero set (AZS) or zero setting accuracy is low and the yield value of inner electric bridge two output terminals can't dynamically be adjusted according to measurand problem because of mechanical potentiometer loose contact or abrasion in order to solve traditional micro-cantilever pressure drag electric bridge sensor detector in the present invention, the micro-cantilever pressure drag electric bridge sensor detector that provides High Precision Automatic zeroing of a kind of closed loop and closed loop automatic gain to adjust, be particularly suitable for the high Precision Detection of biochemical sensor feeble signal, also can be generalized to the micro-cantilever pressure drag electric bridge sensor in other field.
The present invention adopts following technical scheme to realize: micro-cantilever pressure drag electric bridge sensor detector comprises micro-cantilever pressure drag electric bridge sensor, first differential amplifier, wave filter, voltage follower, single-chip microcomputer, computing machine and LCD display; Inside electric bridge two output terminals of micro-cantilever pressure drag electric bridge sensor link to each other with inverting input with the in-phase input end of first differential amplifier respectively, and the output terminal of first differential amplifier links to each other with the input end of wave filter; The output terminal of wave filter links to each other with the input end of voltage follower; The output terminal of voltage follower links to each other with the modulus signal collection terminal of single-chip microcomputer, and the serial port end of single-chip microcomputer links to each other with computing machine, and the display interface end of single-chip microcomputer links to each other with LCD display; Also comprise digital to analog converter, the 3rd differential amplifier and stabilized voltage supply; The high-speed synchronous serial port input end of digital to analog converter links to each other with the high-speed synchronous serial port output terminal of single-chip microcomputer, is connected with the bleeder circuit that is in series by the 3rd resistance and the 4th resistance between the fine adjustment signal output terminal of digital to analog converter and the ground; Node between the 3rd resistance and the 4th resistance links to each other with the inverting input of the 3rd differential amplifier, the reference power source end of the 3rd differential amplifier links to each other with the coarse adjustment signal output part of digital to analog converter, the in-phase input end of the 3rd differential amplifier links to each other with stabilized voltage supply, and signal output part links to each other with the earth terminal of any brachium pontis of an end ground connection of the inner electric bridge of micro-cantilever pressure drag electric bridge sensor; Being in series with first resistance R 1 and second resistance R, 2, the first resistance R 1 or second resistance R 2 between the earth terminal of any brachium pontis of the inner electric bridge one end ground connection of micro-cantilever pressure drag electric bridge sensor and the ground respectively links to each other with the signal output part of the 3rd differential amplifier 8 with connected node between the coupled brachium pontis.
The present invention is in series with first resistance R 1 and second resistance R 2 respectively between the earth terminal of any brachium pontis of the inner electric bridge one end ground connection of micro-cantilever pressure drag electric bridge sensor and ground, played the effect of restriction electric current, avoided sensor Yin Wendu when electric current is excessive to raise and influence acquisition precision; And linking to each other with the signal output part of the 3rd differential amplifier 8 by first resistance R 1 or second resistance R 2 and connected node between the coupled brachium pontis makes the 3rd amplifier a voltage is provided for one of them brachium pontis, provides reference point for the resistance injustice of inner electric bridge is converted to voltage-regulation like this.The present invention adopts high-resolution digital to analog converter to replace traditional potentiometer, has improved electric bridge leveling precision.The signal of voltage behind first differential amplifier, wave filter and voltage follower of inner electric bridge two output terminals of the inner integrated analog digit converter collection of single-chip microcomputer analyzed contrast, the comparison of repeatedly sampling, control digital to analog converter then two output end voltages of inner electric bridge are carried out coarse adjustment and the leveling of fine setting two-stage: coarse adjustment is to use digital to analog converter to produce the reference power source end that a reference voltage offers the 3rd differential amplifier; Fine setting is adopted proportion resistor R3, R4(100:1 after being to use digital to analog converter to produce voltage) method of segmentation reaches the resolution of the 6mV minute adjustment of the output end voltage of the 3rd differential amplifier (thereby realize by the reverse input end that voltage after partial is regulated the 3rd differential amplifier).Because of the enlargement factor of the 3rd differential amplifier is 1 times (enlargement factor is 1 during the not external amplification resistance of all differential amplifiers), then the output voltage of the 3rd difference differential amplifier is given by the following formula:
Figure 503330DEST_PATH_IMAGE001
Carry out coarse adjustment when the voltage difference of electric bridge two output terminals during greater than the setting value in the single-chip microcomputer, single-chip microcomputer offers by digital to analog converter
Figure 178025DEST_PATH_IMAGE002
A definite value, single-chip microcomputer is regulated by digital to analog converter simultaneously Value; Carry out fine tuning when the voltage difference of electric bridge two output terminals again during less than set-point, single-chip microcomputer makes by digital to analog converter Remain unchanged, single-chip microcomputer is regulated via the bleeder circuit of the 3rd resistance and the 4th resistance composition by digital to analog converter simultaneously
Figure 61296DEST_PATH_IMAGE002
Value; When the earth terminal voltage of any brachium pontis of an end ground connection that is added to inner electric bridge by the output voltage with the 3rd differential amplifier made that two output end voltage differences of inner electric bridge are zero, the inner electric bridge of micro-cantilever pressure drag electric bridge sensor reached balance.
Further, between first differential amplifier and wave filter, have additional second differential amplifier, the output terminal of first differential amplifier links to each other with the in-phase input end of second differential amplifier, the reference power source end of first differential amplifier links to each other with the inverting input of second differential amplifier and the reference power source end of second differential amplifier simultaneously, and the output terminal of second differential amplifier links to each other with wave filter; The amplification resistance terminal of first differential amplifier is amplified resistance terminal with first of digital regulation resistance and is linked to each other; Second of digital regulation resistance amplifies resistance terminal and links to each other with the amplification resistance terminal of second differential amplifier, and the signal input part of digital regulation resistance links to each other with the signal output part of single-chip microcomputer.After inner electric bridge leveling, when carrying out the detection of measured object concentration, single-chip microcomputer is given first differential amplifier and the default enlargement factor of second differential amplifier by digital regulation resistance.Because the voltage amplification factor of first differential amplifier and second differential amplifier is by the decision of connect amplification resistance, so can regulate the enlargement factor of second differential amplifier and the 3rd differential amplifier by digital regulation resistance flexibly.When inner electric bridge two output end voltage amplitudes are very big, reduce enlargement factor; When inner electric bridge two output end voltage amplitudes hour, by increasing enlargement factor the magnitude of voltage that obtains is always shown in a suitable scope; And computing machine also can control the enlargement factor of voltage signal by special software, and it is regulated neatly, thereby realized regulating enlargement factor automatically according to the size of internal electrical bridge voltage signal.
Single-chip microcomputer is by gathering, analyze contrast to the signal of voltage behind first differential amplifier, second differential amplifier, wave filter and voltage follower of inner electric bridge two output terminals of micro-cantilever pressure drag electric bridge sensor among the present invention, if inner electric bridge imbalance, can carry out inner electric bridge leveling by the Single-chip Controlling digital to analog converter, form a closed loop automatic, high precision electric bridge zero-bit system; After inner electric bridge leveling, the voltage of inner electric bridge two output terminals is through first differential amplifier, second differential amplifier, wave filter, and behind the voltage follower by the inner integrated analog digit converter collection of single-chip microcomputer, the data that collect are carried out software filtering with single-chip microcomputer and the numerical value judgement provides gain control parameter one by one, thereby the control figure potentiometer changes the enlargement factor that its inner amplification resistance is regulated the internal electrical bridge voltage, all the time within the suitable input range of the inner integrated analog digit converter of single-chip microcomputer, this is a self-regulating process of closed loop gain up to the output of the rear end of simulating signal; Then single-chip microcomputer is according to gain control parameter and the magnitude of voltage size that collects, use certain proportionate relationship to calculate the concentration parameter of measured matter, then data are sent to LCD display and show or be sent to computing machine and carry out graphic presentation, data processing by special software.
Can also link to each other with other same type of sensor its electric bridge of leveling and carry out the high Precision Detection of concentration or other physical quantity of the present invention.
The present invention is rational in infrastructure, design is ingenious, cause can't automatic zero set (AZS) or zero setting accuracy is low and the yield value of inner electric bridge two output terminals can't self-adjusting problem because of mechanical potentiometer loose contact or abrasion to have solved traditional micro-cantilever pressure drag electric bridge sensor detector, volume is little, low in energy consumption, highly versatile, realized automatic detection and zero setting accuracy height, can be widely used in biochemistry detection, automobile, meteorology and the many commercial units.
Description of drawings
Fig. 1 is a connection diagram of the present invention.
Fig. 2 is the connection diagram of traditional micro-cantilever pressure drag electric bridge sensor detector.
Among the figure: 1-micro-cantilever pressure drag electric bridge sensor; The 2-first difference differential amplifier; The 3-second difference differential amplifier; The 4-wave filter; The 5-voltage follower; The 6-single-chip microcomputer; The 7-digital to analog converter; 8-the 3rd difference differential amplifier; The 9-digital regulation resistance; The 10-serial ports changes the USB chip; The square USB interface of 11-; The 12-computing machine; The 13-LCD display; The 14-stabilized voltage supply.
Embodiment
Micro-cantilever pressure drag electric bridge sensor detector comprises micro-cantilever pressure drag electric bridge sensor 1, first differential amplifier 2, wave filter 4, voltage follower 5, single-chip microcomputer 6, computing machine 12 and LCD display 13; Inside electric bridge two output terminals of micro-cantilever pressure drag electric bridge sensor 1 link to each other with inverting input with the in-phase input end of first differential amplifier 2 respectively, and the output terminal of first differential amplifier 2 links to each other with the input end of wave filter 4; The output terminal of wave filter 4 links to each other with the input end of voltage follower 5; The output terminal of voltage follower 5 links to each other with the modulus signal collection terminal of single-chip microcomputer 6, and the serial port end of single-chip microcomputer 6 links to each other with computing machine 12, and the display interface end of single-chip microcomputer 6 links to each other with LCD display 13; Also comprise digital to analog converter 7, the 3rd differential amplifier 8 and stabilized voltage supply 14; The high-speed synchronous serial port input end of digital to analog converter 7 links to each other with the high-speed synchronous serial port output terminal of single-chip microcomputer 6; Be connected with the bleeder circuit that is in series by the 3rd resistance R 3 and the 4th resistance R 4 between the fine adjustment signal output terminal of digital to analog converter 7 and the ground, the node between the 3rd resistance R 3 and the 4th resistance R 4 links to each other with the inverting input of the 3rd differential amplifier 8; The reference power source end of the 3rd differential amplifier 8 links to each other with the coarse adjustment signal output part of digital to analog converter 7; The in-phase input end of the 3rd differential amplifier 8 links to each other with stabilized voltage supply; Being in series with first resistance R 1 and second resistance R, 2, the first resistance R 1 or second resistance R 2 between the earth terminal of any brachium pontis of micro-cantilever pressure drag electric bridge sensor 1 inner electric bridge one end ground connection and the ground respectively links to each other with the signal output part of the 3rd differential amplifier 8 with connected node between the coupled brachium pontis.Between first differential amplifier 2 and wave filter 4, have additional second differential amplifier 3, the output terminal of first differential amplifier 2 is connected with the in-phase input end of second differential amplifier 3, the reference power source end of first differential amplifier 2 links to each other with the inverting input of second differential amplifier 3 and the reference power source end of second differential amplifier 3 simultaneously, and the output terminal of second differential amplifier 2 links to each other with wave filter 4; The amplification resistance terminal of described first differential amplifier 2 is amplified resistance terminal with first of digital regulation resistance 9 and is linked to each other; Second of digital regulation resistance 9 amplifies resistance terminal and links to each other with the amplification resistance terminal of second differential amplifier 3, and the signal input part of digital regulation resistance 9 links to each other with the signal output part of single-chip microcomputer 6.
During concrete enforcement, as shown in Figure 1, the serial port end of single-chip microcomputer 6 changes USB chip 10 by serial ports and links to each other with computing machine 12 with square usb 11.Single-chip microcomputer is selected the MSP430F149 chip for use, is the super low power consuming single chip processor of integrated analog digit converter, and the analog to digital converter of single-chip microcomputer inside is 12, and can change negative voltage, and the voltage that reference voltage generating circuit produced is 1.25V; Digital to analog converter is selected 12 TLV5614 chip for use, its full scale output voltage is 2.5V, so its coarse adjustment precision can reach 0.6mV(2.5/4096) resolution, because trim voltage is to adopt the method for proportion resistor (100:1) segmentation to obtain, its precision can reach the resolution of 6mV simultaneously; Voltage follower is selected the OPA4340 model for use; Digital regulation resistance adopts the digital adjustable potentiometer of 8 four-way outputs, and the resistance output area is 0 Ω~100K Ω, and output resolution ratio is 390 Ω, has power down the characteristics that resistance value is not lost are set; Differential amplifier is selected the AD623 model for use, and its enlargement factor can be calculated by following formula:
G=(100kΩ/Rg)+1;
Wherein G is an enlargement factor, and Rg is the inner resistance of amplifying resistance of digital regulation resistance.Because the enlargement factor of AD623 type differential amplifier can be adjustable in the 1-256 scope, so after the voltage of inner electric bridge amplified by two-stage AD623 type differential amplifier, its voltage adjustable extent was 1-65536.

Claims (2)

1. micro-cantilever pressure drag electric bridge sensor detector comprises micro-cantilever pressure drag electric bridge sensor (1), first differential amplifier (2), wave filter (4), voltage follower (5), single-chip microcomputer (6), computing machine (12) and LCD display (13); There is an end of two brachium pontis to link to each other in the inside electric bridge of micro-cantilever pressure drag electric bridge sensor with ground, inside electric bridge two output terminals of micro-cantilever pressure drag electric bridge sensor (1) link to each other with inverting input with the in-phase input end of first differential amplifier (2) respectively, and the output terminal of first differential amplifier (2) links to each other with the input end of wave filter (4); The output terminal of wave filter (4) links to each other with the input end of voltage follower (5); The output terminal of voltage follower (5) links to each other with the modulus signal collection terminal of single-chip microcomputer (6), and the serial port end of single-chip microcomputer (6) links to each other with computing machine (12), and the display interface end of single-chip microcomputer (6) links to each other with LCD display (13); It is characterized in that: also comprise digital to analog converter (7), the 3rd differential amplifier (8) and stabilized voltage supply (14); The high-speed synchronous serial port input end of digital to analog converter (7) links to each other with the high-speed synchronous serial port output terminal of single-chip microcomputer (6), is connected with the resistive subdivision circuit that is in series by the 3rd resistance (R3) and the 4th resistance (R4) between the fine adjustment signal output terminal of digital to analog converter (7) and the ground; Node between the 3rd resistance (R3) and the 4th resistance (R4) links to each other with the inverting input of the 3rd differential amplifier (8); The reference power source end of the 3rd differential amplifier (8) links to each other with the coarse adjustment signal output part of digital to analog converter (7), and the in-phase input end of the 3rd differential amplifier (8) links to each other with stabilized voltage supply (14); Be in series with first resistance (R1) and second resistance (R2) between the earth terminal of any brachium pontis of the inner electric bridge one end ground connection of micro-cantilever pressure drag electric bridge sensor (1) and the ground respectively, first resistance (R1) or second resistance (R2) link to each other with the signal output part of the 3rd differential amplifier (8) with connected node between the coupled brachium pontis.
2. micro-cantilever pressure drag electric bridge sensor detector according to claim 1, it is characterized in that: between first differential amplifier (2) and wave filter (4), have additional second differential amplifier (3), the output terminal of first differential amplifier (2) links to each other with the in-phase input end of second differential amplifier (3), the reference power source end of first differential amplifier (2) links to each other with the inverting input of second differential amplifier (3) and the reference power source end of second differential amplifier (3) simultaneously, and the output terminal of second differential amplifier (3) links to each other with the input end of wave filter (4); The amplification resistance terminal of first differential amplifier (2) is amplified resistance terminal with first of digital regulation resistance (9) and is linked to each other; Second of digital regulation resistance (9) amplifies resistance terminal and links to each other with the amplification resistance terminal of second differential amplifier (3), and the signal input part of digital regulation resistance (9) links to each other with the signal output part of single-chip microcomputer (6).
CN2011101109489A 2011-04-29 2011-04-29 Micro-cantilever beam piezoresistive bridge type sensor detecting instrument Expired - Fee Related CN102252700B (en)

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CN106124822A (en) * 2016-07-27 2016-11-16 同济大学 A kind of bridge balance circuit
CN107807145A (en) * 2016-09-09 2018-03-16 中核兰州铀浓缩有限公司 It is a kind of to detect UF without heat source type6The sensor of dielectric gas flow direction
CN110750057A (en) * 2019-12-26 2020-02-04 江西飞尚科技有限公司 Single-power-supply synchronous data acquisition device and acquisition method thereof
CN112254875A (en) * 2020-10-26 2021-01-22 南通大学 Circuit and method for judging connection state of bridge sensor
CN112697343A (en) * 2021-03-23 2021-04-23 上海艾为微电子技术有限公司 Detection circuit and method of resistance bridge type pressure sensor, electronic equipment and chip
CN113176006A (en) * 2021-03-22 2021-07-27 中国地震局地震预测研究所 High-resolution temperature measuring device and multichannel temperature measuring system

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Publication number Priority date Publication date Assignee Title
CN104132695A (en) * 2013-05-03 2014-11-05 无锡华润上华半导体有限公司 Flowmeter
CN104132695B (en) * 2013-05-03 2018-04-06 无锡华润上华科技有限公司 Flowmeter
CN106124822A (en) * 2016-07-27 2016-11-16 同济大学 A kind of bridge balance circuit
CN107807145A (en) * 2016-09-09 2018-03-16 中核兰州铀浓缩有限公司 It is a kind of to detect UF without heat source type6The sensor of dielectric gas flow direction
CN110750057A (en) * 2019-12-26 2020-02-04 江西飞尚科技有限公司 Single-power-supply synchronous data acquisition device and acquisition method thereof
CN112254875A (en) * 2020-10-26 2021-01-22 南通大学 Circuit and method for judging connection state of bridge sensor
CN112254875B (en) * 2020-10-26 2022-03-08 南通大学 Circuit and method for judging connection state of bridge sensor
CN113176006A (en) * 2021-03-22 2021-07-27 中国地震局地震预测研究所 High-resolution temperature measuring device and multichannel temperature measuring system
CN112697343A (en) * 2021-03-23 2021-04-23 上海艾为微电子技术有限公司 Detection circuit and method of resistance bridge type pressure sensor, electronic equipment and chip
CN112697343B (en) * 2021-03-23 2021-07-16 上海艾为微电子技术有限公司 Detection circuit and method of resistance bridge type pressure sensor, electronic equipment and chip

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