CN102233223B - The device of absorption pernicious gas and carrier box - Google Patents
The device of absorption pernicious gas and carrier box Download PDFInfo
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- CN102233223B CN102233223B CN201010154177.9A CN201010154177A CN102233223B CN 102233223 B CN102233223 B CN 102233223B CN 201010154177 A CN201010154177 A CN 201010154177A CN 102233223 B CN102233223 B CN 102233223B
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- carrier box
- pernicious gas
- sideboard
- gas
- adsorbent
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Abstract
The invention discloses a kind of device and carrier box of adsorbing pernicious gas, relate to liquid crystal display and manufacture field, occur because chlorine gas leakage causes on array base palte the problem that frog ovum is bad in order to alleviate.Adsorb a device for pernicious gas, comprise a container and be filled in the adsorbent for adsorbing described pernicious gas of this internal tank; The shell of described container is formed at least one place opening, and be provided with at described opening part the breathable films that is positioned at internal layer and be positioned at outer field sideboard, the control circuit of described sideboard is connected with a gas detection module; Wherein, described gas detection module is when detecting that the content of described pernicious gas exceedes threshold value, control circuit to described sideboard outputs signal, and is controlled to open described sideboard so that the adsorbent of described internal tank adsorbs described pernicious gas by described control circuit.Scheme provided by the invention is applicable in the manufacturing environment of liquid crystal display.
Description
Technical field
The present invention relates to liquid crystal display and manufacture field, particularly relate to a kind of device and carrier box of in liquid crystal display manufacture process, adsorbing pernicious gas.
Background technology
In existing Thin Film Transistor-LCD (ThinFilmTransistor-LiquidCrystalDisplay, TFT-LCD), the partial circuit lead-in wire on tft array substrate is all that employing aluminum metal or aluminum alloy are standby; And in the manufacture process of current liquid crystal display, may occur that the trace of chlorine is revealed; Like this, the circuit lead edge prepared by aluminum or aluminum alloy on array base palte by chlorine oxidation, will be formed shape and is similar to the bad of the unrepairable of frog ovum, greatly reduce the yield rate of liquid crystal panel.
Owing to carrying out in the process of the processing such as patterning processes in array substrate, mostly process equipment is in closed state, so the chlorine that now array base palte is revealed affects occur that the bad situation of frog ovum is less; And the array base palte left in carrier box, because it directly can contact with air, the impact being therefore subject to chlorine gas leakage is larger.
But in the prior art, also do not have a kind ofly effectively to solve the bad method of above-mentioned frog ovum.
Summary of the invention
Embodiments of the invention provide a kind of device and carrier box of adsorbing pernicious gas, occur the problem that frog ovum is bad in order to alleviate because chlorine gas leakage causes on array base palte.
For achieving the above object, embodiments of the invention adopt following technical scheme:
Adsorb a device for pernicious gas, comprise a container and be filled in the adsorbent for adsorbing described pernicious gas of this internal tank; The shell of described container is formed at least one place opening, and be provided with at described opening part the breathable films that is positioned at internal layer and be positioned at outer field sideboard, the control circuit of described sideboard is connected with a gas detection module; Wherein,
Described gas detection module is when detecting that the content of described pernicious gas exceedes threshold value, control circuit to described sideboard outputs signal, and is controlled to open described sideboard so that the adsorbent of described internal tank adsorbs described pernicious gas by described control circuit.
A kind of carrier box, this carrier box comprises four carrier box posts; And carrier box post described at least one is provided with the device of above-mentioned absorption pernicious gas wherein.
The device of the absorption pernicious gas that the embodiment of the present invention provides and carrier box, can aerial pernicious gas content when exceeding threshold value, sideboard on the described device of automatic unlatching, the adsorbent that described device inside is filled and contacting external air, and the pernicious gas contained in air is adsorbed, thus air is purified; Utilize the device in the embodiment of the present invention, when can there is chlorine gas leakage on liquid crystal display production line, chlorine in air is adsorbed, reduces the content of the chlorine leaked out, thus there is because chlorine gas leakage causes on array base palte the problem that frog ovum is bad in alleviation.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the device of absorption pernicious gas in the embodiment of the present invention;
Fig. 2 is the structural representation of the electrochemical gas sensor in the embodiment of the present invention;
Fig. 3 is the schematic diagram of the manner of sideboard in the embodiment of the present invention;
Fig. 4 is the structural representation one of the carrier box post in the embodiment of the present invention;
Fig. 5 is the structural representation two of the carrier box post in the embodiment of the present invention:
Mark in figure: 100-container; 110-adsorbent; 120-opening; 130-breathable films; 140-sideboard; 150-control circuit; 160-gas detection module; The outer box of 161-gas detection module; 162-waterproof breathable membrane; 163-working electrode; 164-is to electrode; 165-reference electrode; 166-electrolyte solution; 400-carrier box post; 410-alkaline adsorbent; 420-opening; 430-breathable films; 440-sideboard; 450-control circuit; 460-chlorine detection module; 500-Cl
2molecule.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Be described in detail below in conjunction with the device of accompanying drawing to the absorption pernicious gas that the embodiment of the present invention provides.
It is the side view of the device of the absorption pernicious gas in the embodiment of the present invention shown in Fig. 1; Wherein, the device of described absorption pernicious gas comprises a container 100 and is filled in the adsorbent 110 for adsorbing described pernicious gas of this container 100 inside; The shell of described container 100 is formed at least one place opening 120, and be provided with at described opening part the breathable films 130 that is positioned at internal layer and be positioned at outer field sideboard 140, the control circuit 150 of described sideboard 140 is connected with a gas detection module 160; Wherein,
Described gas detection module 160 is when detecting that the content of described pernicious gas exceedes threshold value, control circuit 150 to described sideboard 140 exports a signal, is controlled to open described sideboard 140 so that the adsorbent 110 of described container 100 inside adsorbs described pernicious gas by described control circuit 150.
The device of the absorption pernicious gas provided in the embodiment of the present invention, can aerial pernicious gas content when exceeding threshold value, sideboard on the described device of automatic unlatching, the adsorbent that described device inside is filled and contacting external air, thus the pernicious gas contained in air is adsorbed, reach the object that air is purified.
In the present embodiment, be described in detail with the device of an instantiation to the absorption pernicious gas in the present invention.
The apparatus structure schematic diagram of the absorption pernicious gas in composition graphs 1, can see: the device of the absorption pernicious gas in the present embodiment, comprises container 100 and is filled in the solid adsorbent 110 for adsorbing described pernicious gas of this container 100 inside; In the present embodiment, the shape of described container 100 is not limited, it can be cuboid, square, spheroid or other there is arbitrarily the three-dimensional shape of hollow structure;
The shell of described container 100 is formed at least one place opening 120, and the shape of described opening 120 can be but be not limited to rectangle, circle, ellipse etc., and its specific implementation can set in conjunction with the shape of described container 100; , also do not limit the quantity of described opening 120 and the position on the shell of described container 100 thereof in the present embodiment, for the container of cuboid, described opening 120 can be located on any one or several side of cuboid meanwhile;
Be provided with at described opening part the breathable films 130 that is positioned at internal layer and be positioned at outer field sideboard 140, wherein, described breathable films 130 is a kind of waterproof breathable membranes, its can stop the adsorbent 110 in container 100 be scattering into described container 100 outside, simultaneously outside gas but can be allowed by this breathable films 130 to be entered into the inside of container 100; Preferably, described breathable films 130 can select ptfe porous membrane; And described sideboard 140 can shelter from described opening 120 in normal state, the adsorbent 110 of container 100 inside can not be contacted with outside air;
Described sideboard 140 is connected with gas detection module 160 by a control circuit 150 again; When described gas detection module 160 detects that the content of described pernicious gas exceedes threshold value, this gas detection module 160 exports a signal to described control circuit 150, is controlled to open described sideboard 140 so that the adsorbent 110 of described container 100 inside adsorbs described pernicious gas by described control circuit 150.
Particularly, the device of the absorption pernicious gas in the present embodiment is mainly used in adsorbing Cl
2, or HCl, HNO
3deng one or more of acidic volatile gas; Therefore, the adsorbent of filling in the device of described absorption pernicious gas can be alkaline adsorbent, such as Ca (OH)
2, the alkaline powder such as NaOH or KOH.And if need to adsorb alkaline gas (such as NH by described device
3) time, then can fill acidic sorbent in described device.
Meanwhile, in order to accurately detect the content of pernicious gas in air, described gas detection module 160 is realized by electrochemical gas sensor in the present embodiment; Its concrete structure, as shown in Figure 2, described gas detection module 160 comprises the outer box 161 with engraved structure and the waterproof breathable membrane 162 be located on described outer box 161 inwall; Described outer box 161 laid inside have the region of described waterproof breathable membrane 162 be provided with working electrode 163 and with this working electrode 163 be oppositely arranged to electrode 164 and reference electrode 165; And, between described waterproof breathable membrane 162, be filled with electrolyte solution 166.In addition, described working electrode 163, electrode 164 is connected with ammeter (not shown in Fig. 2) with external power source with reference electrode 165.
Wherein, the area of the engraved structure on described outer box 161 and the distributed areas on described outer box 161 thereof are not limited; Generally, if the area of described engraved structure is larger, the sensitivity of described gas detection module 160 should be higher.But it should be noted that on described outer box 161, there is the part of engraved structure inwall on waterproof breathable membrane 162 must be set, leak to prevent electrolyte solution 166.
Particularly, described waterproof breathable membrane 162 can be ptfe porous membrane, it can stop that the electrolyte solution of described electrochemical gas sensor inside outwards oozes out, and outside gas (such as chlorine, hydrogen, oxygen etc.) molecule can be allowed to enter into the inside of described electrochemical gas sensor by this waterproof breathable membrane 162 simultaneously;
Described electrolyte solution 166 can be NaCl solution, KCl solution or (NH
4) NO
3the conductive salting liquid such as solution.
Chlorine Cl with described pernicious gas
2for example, when containing Cl in air
2time, Cl
2entered into the inside of electrochemical gas sensor by the described waterproof breathable membrane 162 be made up of porous tetrafluoroethene film, form various valent chlorine element with electrolyte solution generation chemical reaction wherein; After this, various valent chlorine element can working electrode end generation reduction reaction in sensor, and to electrode tip generation oxidation reaction, Faradaic current can with the Cl entering into sensor internal
2content changes.
When above-mentioned electrochemical gas sensor work, Faradaic current and Cl
2the relation of content (representing with the concentration of chlorine in electrolyte solution) is as shown in formula (1):
In formula: I represents Faradaic current; The electron number of the gas generation of n representation unit weight; F represents Faraday constant; A represents the effective area (fretwork area namely on outer box 161) of waterproof breathable membrane 162; D represents gas diffusivity; C represents in electrolyte solution the concentration of the chlorine participating in electrolysis, itself and extraneous Cl
2concentration is directly proportional; σ represents the thickness of waterproof breathable membrane 162.
When electrochemical gas sensor structure is determined, n, F, A, D and σ in above-mentioned parameter just also determine; So, can think when electrochemical gas sensor structure is constant, the concentration C participating in the chlorine of electrolysis in Faradaic current I and electrolyte solution is directly proportional, and participates in the concentration C of the chlorine of electrolysis and the Cl in outside air in electrolyte solution
2concentration is directly proportional, the Cl therefore in Faradaic current I and outside air
2cl in concentration, namely outside air
2content is proportional.Therefore, as long as monitor the Faradaic current I that described electrochemical gas sensor produces, extraneous Cl just can be judged
2whether content exceeds standard.
Under normal circumstances, the sideboard 140 in the device of above-mentioned absorption pernicious gas shelters from the opening 120 on described container 100, and the alkaline adsorbent 110 of container 100 inside directly can not be contacted with the gas in the external world;
And as Cl in air
2content exceed normality threshold, Cl in such as air
2content more than 0.1mg/m
3time, then the Faradaic current I in described electrochemical gas sensor also can more than a threshold value I
0; Now, described electrochemical gas sensor, namely described gas detection module 160 can export a signal to described control circuit 150, is controlled to open described sideboard 140 so that the adsorbent 110 of described container 100 inside adsorbs described pernicious gas by described control circuit 150.
At described Cl
2content lower than normal value time, described control circuit 150 will control described sideboard 140 and automatically cut out.
Particularly, the manner of described sideboard 140 can be but be not limited to the drawing and pulling type shown in Fig. 3 (a) or the open-close type as shown in Fig. 3 (b).Wherein, the moving direction of Telescopic movable baffle plate can be up and down, left and right or along other angular movement; Open-close type sideboard can be an integrally-built baffle plate, and rotating shaft is located at one end of described opening, or described open-close type sideboard can also be made up of the baffle plate of two pieces of splits, and rotating shaft just divides the two ends being located at described opening.
The device of the absorption pernicious gas in the present embodiment, electrochemical gas sensor can be utilized to detect the content of pernicious gas in air, and aerial pernicious gas content is when exceeding threshold value, sideboard on the described device of automatic unlatching, the adsorbent that described device inside is filled and contacting external air, and the pernicious gas contained in air is adsorbed, thus air is purified; Utilize the device in the present embodiment, when can there is chlorine gas leakage on liquid crystal display production line, chlorine in air is adsorbed, reduces the content of the chlorine leaked out, thus there is because chlorine gas leakage causes on array base palte the problem that frog ovum is bad in alleviation.
In the liquid crystal display production plant of reality, the device of the absorption pernicious gas described in multiple above-described embodiment can be set in different positions when occurring that pernicious gas (such as chlorine) is revealed, can clean out the pernicious gas in air in time.But, on the liquid crystal display production line of reality, the situation that pernicious gas is revealed not is frequent generation, and the service efficiency of the device of the multiple absorption pernicious gases newly added is lower, and can take large quantity space.Therefore, in the present embodiment by the concrete condition in conjunction with liquid crystal display production line, introduce a kind of device of the absorption pernicious gas be arranged on the carrier box post of carrier box.
The carrier box provided in the present embodiment comprises four carrier box posts; And at least one carrier box post is provided with the device of above-mentioned absorption pernicious gas wherein.
In the present embodiment, be Cl with described pernicious gas
2for example, introduce the concrete structure for the device of the absorption pernicious gas of this scene in detail.
As shown in Figure 4, the device being arranged on the absorption pernicious gas on carrier box post in the present embodiment, comprise hollow carrier box post 400 and be filled in described carrier box post 400 inside for adsorbing Cl
2alkaline adsorbent 410; The shell of described carrier box post 400 is formed at least one place opening 420, and is provided with the breathable films 430 that is positioned at internal layer at opening 420 place and is positioned at skin and the sideboard 440 of described opening 420 can be sheltered from; Wherein said breathable films 430 is a kind of waterproof breathable membranes, preferably can adopt porous office tetrafluoroethene film, it can stop that the alkaline adsorbent 410 in carrier box post 400 is scattering into the outside of described carrier box post 400, but can allow outside gas (such as O simultaneously
2, Cl
2deng) by entering into the inside of carrier box post 400 to this breathable films 430.
Wherein, described alkaline adsorbent 410 can be but be not limited to Ca (OH)
2, the alkaline powder such as NaOH or KOH.
It should be noted that place's opening 420 shown in Figure 4 is only an example of the many places opening on carrier box post 400, and be not used in the quantity limiting described opening 420.
Shown in composition graphs 4, be also provided with chlorine detection module 460 in the lower end of described carrier box post 400, this chlorine detection module 460 is connected by a control circuit 450 with described sideboard 440; Described Cl is detected at described chlorine detection module 460
2content when exceeding threshold value, this chlorine detection module 460 exports a signal to described control circuit 450, is controlled to open described sideboard 440 so that the Cl in alkaline adsorbent 410 pairs of air of described carrier box post 400 inside by described control circuit 450
2adsorb.
Particularly, above-mentioned chlorine detection module 460 can be realized by an electrochemical gas sensor; Its concrete structure can with reference to shown in Fig. 2 and in above-described embodiment to the description of gas detection module 160.
Certainly, described gas detection module 460 also can be arranged on the upper end of described carrier box post 400; The situation that its specific implementation and These gases detection module 460 are positioned at carrier box post 400 lower end is similar, no longer describes in detail here.
Under normal circumstances, the sideboard 440 in the device of above-mentioned absorption pernicious gas shelters from the opening 420 on described carrier box post 400, and the alkaline adsorbent 410 of carrier box post 400 inside directly can not be contacted with the gas in the external world;
And as Cl in air
2content exceed normality threshold, Cl in such as air
2content more than 0.1mg/m
3time, then the Faradaic current I in described electrochemical gas sensor also can more than a threshold value I
0; Now, described electrochemical gas sensor, namely described chlorine detection module 460 can export a signal to described control circuit 450, is controlled to open described sideboard 440, as shown in Figure 5 (sideboard 440 in Figure 5 after not shown unlatching) by described control circuit 450;
Now, Cl
2molecule 500 directly can enter into the inside of carrier box post 400 by described breathable films 430, with alkaline adsorbent 410, the such as Ca (OH) of carrier box post 400 inside
2contact, and there is chemical reaction with described alkaline adsorbent 410, thus reach the Cl in air
2by the effect of adsorbing, and then reduce Cl in air
2content, reduce be arranged in carrier box array base palte on there is the probability that frog ovum is bad.
And at described Cl
2content lower than after normal value, described control circuit 450 will control described sideboard 440 and automatically cut out.
In more than describing, be all be Cl with pernicious gas
2for example is described, but the device of the absorption pernicious gas in the present invention is applicable to this kind of scene incessantly, and it is to HCl, HNO
3can absorption cleaning etc. volatile acidic gas, specific implementation with for Cl
2situation similar, repeat no more herein.
Carrier box in the present embodiment, can utilize the device of the absorption pernicious gas be arranged on its carrier box post to detect Cl in air
2content, and aerial Cl
2when content exceedes threshold value, automatically open the sideboard on described device, the alkaline adsorbent that described device inside is filled and contacting external air, and to the Cl contained in air
2adsorb, thus air is purified; Utilize the carrier box in the present embodiment, Cl can be occurred on liquid crystal display production line
2when revealing, to the Cl in air
2adsorb, reduce the Cl leaked out
2content, thus alleviate due to Cl
2reveal to cause on array base palte and occur the problem that frog ovum is bad;
In addition, existing carrier box post is all generally adopt solid or hollow metal Column preparation, only plays the effect of support structure; And in the present embodiment, the device of described absorption pernicious gas is arranged on carrier box post, make the device of described absorption pernicious gas can not take redundant space, and Cl can be detected in time
2existence and it is removed.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (8)
1. a carrier box, this carrier box comprises four carrier box posts; It is characterized in that, carrier box post described at least one is provided with the device of absorption pernicious gas wherein; The device of described absorption pernicious gas comprises hollow carrier box post and is filled in the adsorbent for adsorbing described pernicious gas of described carrier box post inside; The shell of described carrier box post is formed at least one place opening, and described in each, opening part is equipped with the breathable films that is positioned at internal layer and is positioned at outer field sideboard, and the control circuit of described sideboard is connected with a gas detection module;
Described sideboard is in normal state for sheltering from described opening, described gas detection module is when detecting that the content of described pernicious gas exceedes threshold value, control circuit to described sideboard outputs signal, and is controlled to open described sideboard so that the adsorbent of described carrier box post inside adsorbs described pernicious gas by described control circuit;
Wherein, described gas detection module comprises the outer box with engraved structure and the waterproof breathable membrane be located on described outer box inwall; Described outer box laid inside have the region of described waterproof breathable membrane be provided with working electrode and with this working electrode be oppositely arranged to electrode and reference electrode; And, between described waterproof breathable membrane, be filled with electrolyte solution.
2. carrier box according to claim 1, is characterized in that, described pernicious gas comprises Cl
2, HCl, HNO
3in one or more.
3. carrier box according to claim 1, is characterized in that, described adsorbent is alkaline adsorbent.
4. carrier box according to claim 3, is characterized in that, described alkaline adsorbent comprises Ca (OH)
2or NaOH or KOH.
5. carrier box according to claim 1, is characterized in that, described breathable films is waterproof breathable membrane.
6. carrier box according to claim 1, is characterized in that, described gas detection module is electrochemical gas sensor.
7. carrier box according to claim 1 or 5, it is characterized in that, described waterproof breathable membrane is ptfe porous membrane.
8. carrier box according to claim 1, is characterized in that, the manner of described sideboard is drawing and pulling type or open-close type.
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|---|---|---|---|
| CN201010154177.9A CN102233223B (en) | 2010-04-20 | 2010-04-20 | The device of absorption pernicious gas and carrier box |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010154177.9A CN102233223B (en) | 2010-04-20 | 2010-04-20 | The device of absorption pernicious gas and carrier box |
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| Publication Number | Publication Date |
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| CN102233223A CN102233223A (en) | 2011-11-09 |
| CN102233223B true CN102233223B (en) | 2016-04-06 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101165417A (en) * | 2006-10-16 | 2008-04-23 | 罗瑞真 | Intelligent air purifying method and device thereof |
| CN101458225A (en) * | 2008-12-26 | 2009-06-17 | 无锡尚沃生物科技有限公司 | Electrochemical gas sensors |
| CN201423230Y (en) * | 2009-03-20 | 2010-03-17 | 衣然 | Air circulation purifying device |
-
2010
- 2010-04-20 CN CN201010154177.9A patent/CN102233223B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101165417A (en) * | 2006-10-16 | 2008-04-23 | 罗瑞真 | Intelligent air purifying method and device thereof |
| CN101458225A (en) * | 2008-12-26 | 2009-06-17 | 无锡尚沃生物科技有限公司 | Electrochemical gas sensors |
| CN201423230Y (en) * | 2009-03-20 | 2010-03-17 | 衣然 | Air circulation purifying device |
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