CN102232199B - Optical waveguides in image sensors - Google Patents

Optical waveguides in image sensors Download PDF

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Publication number
CN102232199B
CN102232199B CN200980142671.9A CN200980142671A CN102232199B CN 102232199 B CN102232199 B CN 102232199B CN 200980142671 A CN200980142671 A CN 200980142671A CN 102232199 B CN102232199 B CN 102232199B
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core
clad
imageing sensor
electromagnetic radiation
wavelength
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CN102232199A (en
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穆尼布·沃贝尔
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Zena Technologies Inc
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Zena Technologies Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/421—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical component consisting of a short length of fibre, e.g. fibre stub
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

An embodiment relates to an image sensor comprising (a) a optical pipe comprising a core and a cladding, and (b) a pair of photosensitive elements comprising a central photosensitive element and a peripheral photosensitive element, wherein the central photosensitive element is operably coupled to the core and the peripheral photosensitive element is operably coupled to the cladding, and methods of fabricating and using the same. The image sensor could further comprise a lens structure or an optical coupler over the optical pipe, wherein the lens structure or the optical coupler is operably coupled to the optical pipe.

Description

The optical waveguide of imageing sensor
Technical field
The present embodiment is about a kind of production of integrated circuits, is more particularly about making more effective cmos image sensor.
Background technology
One imageing sensor has a large amount of identical sensor elements (pixel), generally speaking in a Descartes (square) grid, is greater than 1,000,000 pixels.Distance between adjacent pixels is called spacing (p).The area of one pixel is p 2.The area of light activated element (that is, pixel light can be converted to the area of an electric signal to photaesthesia) be only conventionally pixel surface area 20% to 30%.
To a deviser challenge, be that the light being incident in pixel as much as possible is guided on the light activated element of pixel.Factors can reduce the amount of the light that arrives light activated element.A factor is the mode of construct image sensor.CMOS (Complementary Metal Oxide Semiconductor) (CMOS) imageing sensor can be made by etching on the top of crystalline silicon and the processing procedure that deposits oxide, metal and the nitride layer of many silicon.The layer of one typical sensors is recited in Table I and is shown in Fig. 1.
Table I
In Table I, the ground floor on a common silicon substrate is that ILD layer and top layer are overlayers.In Table I, ILD refers to the dielectric layer of interlayer; Metal 1, metal 2 and metal 3 refer to different metal layer; IMD1B, IMD2B and IMD5B refer to dielectric layer between different metal (its etc. be spacer layers); PASS1, PASS2 and PASS3 refer to different passivation layers (normally dielectric layer).
The gross thickness of the layer on the silicon substrate of imageing sensor is the stacks as high of imageing sensor, and stacks as high is the summation of the thickness of single layer.In the example of Table I, the summation of the thickness of single layer is about 11.6 microns (μ m).
Space on the light activated element of a pixel must be printing opacity, is incident on the light activated element that is arranged in silicon substrate allowing from the incident light of a full color scene.Therefore, can not arrange metal level across the light activated element of a pixel, guarantee to allow the light activated element layer just above be transparent.
The ratio of pel spacing and stacks as high (p/s) has determined to be accepted and can be transported to by pixel the light cone (F number) of the light activated element on silicon.When become less and stacks as high of pixel increases, this ratio decreased number, so the decrease in efficiency of pixel.
More importantly, the stacks as high causing due to the number increase of metal level increases, can shield lights, especially with a certain angle, incide the light of sensor component, and make it can not see through this stacking arrival light activated element.Solution is to reduce stacks as high to reach a significant quantity (that is, > 2 μ m).Yet this solution is difficult to reach in standard CMOS processing procedure.
The problem of the conventional image sensor performance of another restriction is that approximately 1/3rd or the light still less that incides the light on imageing sensor is transmitted to the light activated element such as a photodiode.In traditional imageing sensor, for three kinds of compositions of difference light are to can reproduce the color from a full color scene, use a light filter for each pixel, to filter two kinds in the composition of light.For example, red pixel has and absorbs green light and blue light only allows red light by arriving a light filter of sensor.
Summary of the invention
Accompanying drawing explanation
Fig. 1 shows a sectional view of a conventional imageing sensor.
Fig. 2 shows a sectional view of an embodiment of an imageing sensor.
Fig. 3 shows a sectional view of another embodiment with a lenticular imageing sensor.
Fig. 4 A-4B shows a schematic cross-section of a composite pixel with two imageing sensors, and these two imageing sensors have two aperture (d 1and d 2) and there is different wave length (λ for guiding band λ r) the light pipe of light.
The different schematic cross sectional view of the structure of one embodiment of Fig. 4 C-4G demonstration one imageing sensor.
Fig. 5 shows a schematic cross sectional view of an embodiment of a double photodiode that comprises one first photodiode and one second photodiode, this first photodiode has a cross-sectional area roughly the same with the cross-sectional area of light pipe and is positioned at below this light pipe, this second photodiode have with stacking in the cross-sectional area in aperture roughly the same or than its large cross-sectional area and be positioned at below this first photodiode, and wherein this first photodiode and this second photodiode are to crosstalk preventing by an entity barrier separation.
Fig. 6 shows a schematic cross sectional view of an embodiment of a photo-coupler that is operationally coupled to an imageing sensor.
Fig. 7 shows the different schematic cross sectional view of structure of an embodiment of the photo-coupler be operationally coupled to an imageing sensor.Vertical view and upward view are the xsects of two complementary pixels (the 2 pipe light with different-diameter) of generation color.
Fig. 8 shows a schematic plan of a device of the imageing sensor that contains embodiments disclosed herein, and each imageing sensor has two outputs that represent complementary hue.
Embodiment
In the following detailed description, with reference to the accompanying drawing that forms a part of the present invention.In graphic, the common recognition category of simileys is like assembly, unless context is otherwise stipulated.In detailed description, graphic in and the illustrative embodiment set forth in claim do not mean to have restricted.Under the spirit of theme or the situation of category, can utilize other embodiment and can make other changes not departing to present herein.
In addition, this disclosure extends to method, device, system and the device relevant to an imageing sensor and composite pixel.One embodiment is a kind of method about efficiency for increasing an imageing sensor.Another embodiment provide a kind of for removing color filter so that more than the light of incident light 1/3rd mode for generation of electric signal.Another embodiment is a kind of by increasing the method that increases the efficiency of imageing sensor such as the amount that is incident in the electromagnetic radiation of the light on imageing sensor.One embodiment of imageing sensor comprises an optical tube, for example, one the electromagnetic radiation being incident on imageing sensor is sent on the substrate that is positioned at imageing sensor or the optical tube of its light activated element.Optical tube comprises having one compared with low-refraction clad and a high index core.The end that optical tube is adjacent to light activated element has the size approximately identical with light activated element so that the most of electromagnetic radiation in this optical tube or all electromagnetic radiation are incident on light activated element.One coupling mechanism that can be microlens shape can be arranged in optical tube effectively to collect electromagnetic radiation and electromagnetic radiation is guided to optical tube.
Another embodiment is about using optical tube to be incident in the color filter of the light on imageing sensor to remove absorption approximately 2/3.Core and the clad of optical tube can be used as wave guide.Although wave guide absorbs light unlike color filter, it can be through design with the selected wavelength of transmission optionally.
One wave guide has a cutoff wavelength, and it is the propagable low-limit frequency of wave guide.Therefore, the wave guide of its cutoff wavelength in core in green will do not propagated red light, and the wave guide of its cutoff wavelength in core in blueness will do not propagated redness and green light.In one embodiment, a blue wave guide and a blue/green wave guide can embed a white wave guide that can be arranged in clad.For example, any blue light can be retained in the blue wave guide in a core, any blueness or green light can be retained in the green/blue wave guide in another core, and the light of remainder can be retained in the white wave guide in one or more clads.
One embodiment is about a kind of imageing sensor, it comprises: (a) optical tube, it comprises a core and a clad, and (b) a pair of light activated element, it comprises a central optical photosensitive elements and a periphery light activated element, and wherein this central optical photosensitive elements is to be operationally coupled to this core and this periphery light activated element is to be operationally coupled to clad.Preferably, imageing sensor does not comprise color filter, or optionally it can comprise a color filter.Preferably, optical tube is circular, non-circular or conical.Preferably, core has a core refractive index (n 1) and clad there is a clad refractive index (n 2), and further n wherein 1be greater than n 2.Preferably, optical tube be take a cutoff wavelength and as boundary, the electromagnetic radiation beam being incident on imageing sensor is assigned on core and clad.Preferably, optical tube optical tube under the situation of not using color filter be take a cutoff wavelength and as boundary, the electromagnetic radiation beam being incident on imageing sensor is assigned on core and clad.Preferably, the electromagnetic radiation beam receiving end of optical tube comprises a curved surface.Preferably, core has at electromagnetic radiation beam receiving end place than at the large cross-sectional area in electromagnetic radiation beam transmitting terminal place.Preferably, this is to be positioned on a substrate or it to light activated element.
Imageing sensor can further comprise a lens arrangement or an optical coupler that is positioned at optical tube top, and wherein this lens arrangement or optical coupler are to be operationally coupled to optical tube.Preferably, core comprises a first wave guide device, and it has a cutoff wavelength and leaks in clad from this core so that wavelength is greater than the electromagnetic radiation of this cutoff wavelength.Preferably, clad comprises one second wave guide, and the electromagnetic radiation that its allowance wavelength is greater than cutoff wavelength remaines in clad and is transmitted to periphery light activated element.Preferably, core is an area that is substantially equal to central optical photosensitive elements at a cross-sectional area of an electromagnetic radiation beam transmitting terminal of core.Preferably, clad is an area that is substantially equal to periphery light activated element at a cross-sectional area of an electromagnetic radiation beam transmitting terminal of clad.
Imageing sensor can further be included in around one stacking of optical tube, this stacking metal level being embedded in dielectric layer that comprises, and wherein this dielectric layer has a refractive index lower than the refractive index of clad.Preferably, a stacking surface comprises a reflecting surface.Preferably, imageing sensor is a complementary metal oxide semiconductor (CMOS) (CMOS) imageing sensor.Preferably, optical tube also can be used for charge-coupled device (CCD) (CCD).Preferably, the amount that is incident in the electromagnetic radiation beam on imageing sensor that is transmitted to light activated element is greater than approximately 1/3rd of the electromagnetic radiation beam that is incident on imageing sensor.Preferably, core has a core refractive index (n 1), clad has a clad refractive index (n 2), and stackingly there is the folded refractive index (n of a pile 3), and further n wherein 1> n 2> n 3.Preferably, light activated element comprises a photodiode.Preferably, core is that first wave guide device and clad are the second wave guide.Preferably, lens arrangement or optical coupler comprise a curved surface and a plane so that lens arrangement or optical coupler are configured as a sessile drops shape.Preferably, the connecting surface that lens arrangement or optical coupler comprise one first opening and one second opening and extend between this first opening and this second opening, wherein this first opening is greater than this second opening.Preferably, the diameter of the first opening is that the roughly the same and diameter of the second opening of diameter with coating and the diameter of core are roughly the same.Preferably, connecting surface is flat or crooked.Preferably, connecting surface comprises a reflecting surface.
Another embodiment is about a kind of composite pixel, it comprises at least two different images sensors, each imageing sensor comprises (a) optical tube, it comprises a core and a clad, and (b) a pair of light activated element, it comprises a central optical photosensitive elements and a periphery light activated element, wherein this central optical photosensitive elements is for being operationally coupled to this core and this periphery light activated element for being operationally coupled to this clad, wherein each at least two different images sensors is incident in the wavelength of the electromagnetic radiation beam in this composite pixel with a cutoff wavelength separation, and this composite pixel can reconstruct electromagnetic radiation beam the spectrum of wavelength.Preferably, core comprises a first wave guide device, it has cutoff wavelength and leaks in clad from core so that wavelength is greater than the electromagnetic radiation of cutoff wavelength, further wherein the cutoff wavelength of the core of each at least two different images sensors is different, so that at least two different imageing sensors are incident in the electromagnetic radiation beam in composite pixel with different cutoff wavelength separation.Preferably, clad comprises one second wave guide, and the electromagnetic radiation that its allowance wavelength is greater than cutoff wavelength remaines in clad and is transmitted to periphery light activated element.Preferably, clad is the area that is substantially equal to periphery light activated element at the cross-sectional area of an electromagnetic radiation beam transmitting terminal of clad.Composite pixel can further comprise the stacking of metal level and non-metallic layer, and this is stacked on around each the optical tube at least two different optical sensors.
Another embodiment is about a kind of composite pixel, it comprises at least one the first imageing sensor and one second imageing sensor, wherein this first imageing sensor provides with one first cutoff wavelength being incident in the first separation of the electromagnetic radiation beam on imageing sensor under the situation of not using arbitrary color filter, this second imageing sensor provides with the second cutoff wavelength being incident in the second separation of the electromagnetic radiation beam on imageing sensor under the situation of not using arbitrary color filter, this first cutoff wavelength is different from this second cutoff wavelength, and the spectrum of the wavelength of this composite pixel reconstruct electromagnetic radiation beam.Preferably, the first imageing sensor comprises a first wave guide device, it has the first cutoff wavelength and leaks from this first wave guide device so that wavelength is greater than the electromagnetic radiation of the first cutoff wavelength, wherein the second imageing sensor comprises one second wave guide, it has the second cutoff wavelength so that wavelength is greater than the electromagnetic radiation of this second cutoff wavelength to be leaked from this second wave guide, and further wherein this first cutoff wavelength is to be different from this second cutoff wavelength.Preferably, the first imageing sensor further comprises one first white wave guide, and the electromagnetic radiation that its allowance wavelength is greater than the first cutoff wavelength remaines in the first white wave guide; And the second imageing sensor further comprises one second white wave guide, the electromagnetic radiation that its allowance wavelength is greater than the second cutoff wavelength remaines in the second white wave guide.Preferably, the first imageing sensor comprises one first pair of light activated element and the second imageing sensor comprises one second pair of light activated element.Composite pixel can further be included in the stacking of near metal level first wave guide device and the second wave guide and non-metallic layer.Preferably, two different images sensors comprise the core with different-diameter.Preferably, the first imageing sensor comprises a core with the diameter that is different from the second imageing sensor.
Another embodiment is the method about a kind of making one imageing sensor, it comprises (a) and forms a pair of light activated element that comprises a central optical photosensitive elements and a periphery light activated element, and (b) form the optical tube comprise a core and a clad, wherein this central optical photosensitive elements is to be operationally coupled to this core and this periphery light activated element is to be operationally coupled to this clad.
These embodiment are a kind of a kind of methods about high-level efficiency imageing sensor and efficiency for increasing an imageing sensor.When the light on being more incident in an imageing sensor is received by light activated element and is converted to an electric signal, can increase efficiency.
The method of one embodiment (Fig. 2) of making image sensor comprises uses a fibre-optic waveguide device principle to form an optical tube.As shown in Fig. 2, one optical tube comprises a high-index core passage (22), its end from the reception incidence electromagnetic radiation bundle of imageing sensor (for example, overlayer (15)) extend downward the upper or light activated element in it (24) of substrate (20), wherein compared with a clad (26) of low-index material around this core.In the imageing sensor of embodiments disclosed herein, the color filter in Fig. 2 (12) is optional, and preferably embodiment is the embodiment that does not comprise color filter.
Each in light activated element (optical sensor) comprises a photodiode conventionally, but is not limited only to a photodiode.Conventionally, when using a suitable adulterant, photodiode can be doped into a concentration, this concentration is from every cubic centimetre of about 1e (E) 16 to about 1e (E) 18 dopant atoms.
Layer 1-layer 11 graphic extension in Fig. 2 are similar to the different stack layers of the layer 1-layer 11 of Fig. 1.This stack layer comprises containing dielectric materials layer and metallic layer.Dielectric material includes but not limited to have specific inductive capacity (in a vacuum measure) approximately 4 is to approximately oxide, nitride and the oxynitride of the silicon between 20.Comprise equally and be also not limited to have a specific inductive capacity from approximately 20 to the general high dielectric constant gate electrode dielectric material between at least about 100.These high dielectric constant dielectric materials can include but not limited to hafnia, hafnium silicate, titanium dioxide, barium strontium (BST) and lead zirconate titanate (PZT).
Can with suitable method such as its composition material such as grade is formed containing dielectric material layer.The unrestricted example of method comprises thermal oxide or plasma oxidation or hot nitrogenize or pecvd nitride method, chemical vapour deposition technique (comprising atomic layer chemical vapor deposition method) and physical vaporous deposition.
Metallic layer can be used as electrode.Unrestricted example comprises special metal, metal alloy, metal silicide and metal nitride, and through doped polycrystalline silicon materials (that is, there is the concentration of dopant to about 1e22 dopant atom from every cubic centimetre of about 1e18 dopant atom) and polysilicon compound (that is, stacking through doped polycrystalline silicon/metal silicide) material.Can deposit metallic layer with any in some methods.Unrestricted example comprises chemical vapour deposition technique (also comprising atomic layer chemical vapor deposition method) and physical vaporous deposition.Metallic layer can comprise scope approximately 1000 dusts to approximately 1500 dusts once doped polycrystalline silicon materials (thering is the thickness in the scope of 1000 dust to 1500 dusts conventionally).
Dielectric and metallization stack layer comprise a series of dielectric passivation layer.Be embedded in equally in this stack layer for interconnection metallization.Assembly for interconnection metallization combination includes but not limited to contact stud, interconnection layer, interconnect posts.
The indivedual metallization interconnect posts and the metallization interconnect layers that can be used in interconnection metallization can comprise any one in the some metallization materials that are usually used in semiconductor fabrication.Unrestricted example comprises special metal, metal alloy, metal nitride and metal silicide.Modal for aluminum metallization material and copper metallization material, any one in these both generally includes a barrier metallization material, as below discussed in more detail.The type of metallization material can be along with its size and location in semiconductor structure and difference.The conductor material that metallization features comprises cupric is conventionally laid in less and bottom.Large and top is laid metallization features and is conventionally comprised containing aluminium conductor material.
This series dielectric passivation layer also can comprise any one in the some dielectric materials that are usually used in semiconductor fabrication.Included for thering is the general high dielectric constant dielectric material from a specific inductive capacity of 4 to approximately 20.The unrestricted example being contained in this group is that the oxide of silicon is, the oxynitride of the nitride of silicon and silicon.For example, this series dielectric layer also can comprise have from a specific inductive capacity of approximately 2 to approximately 4 generally compared with low dielectric constant dielectric materials.Be included in this group but what be not limited to this is hydrogel, aerogel, silsesquioxane spin-coating glass dielectric material, fluoride glass material and organic polymer material.
Conventionally, dielectric and metallization stack layer comprise at least one interconnection metallization and the discrete metal layer in copper-containing metal formed material and aluminum metallization material.Dielectric and metallization stack layer also comprise dielectric passivation layer, this dielectric passivation layer also comprise above disclosed generally compared with at least one in low dielectric constant dielectric materials.Dielectric and metallization stack layer can have the gross thickness from approximately 1 micron to approximately 4 microns.During one is stacking, can comprise scope at approximately 2 to approximately 4 discrete levels dielectric and metalized component layer.
Can use and be usually used in semiconductor fabrication and to forming the suitable method of the material of this series dielectric passivation layer and some layers of patterns of material stack layer, to form patterned dielectric and metallization stack layer.Patterned electricity medium and metallization stack layer can not comprise that the position that a metallization features is positioned at wherein completely carries out.Can use wet chemical etch method, dry plasma etching method or integrated approach patterned electricity medium and metallization stack layer.If need size extremely little, dry plasma etching method and el are conventionally better, as long as its method provides the side wall profile of enhancing to control when forming this series patterning dielectric and metallization stack layer.
Planarization layer 11 can comprise any one in some printing opacity smoothing material.Unrestricted example comprises spin-coating glass smoothing material and organic polymer smoothing material.Planarization layer 11 can extend on optical tube so that planarization layer 11 will have a thickness of the opening that is enough at least planarization optical tube 22, is provided for thus manufacturing a plane of the supernumerary structure in cmos image sensor (its schematic cross sectional view is illustrated in Fig. 2).Patternable planarization layer is to form patterned planarization layer.
Optionally, as shown in Fig. 2, a series of color-filter layers 12 can be present on patterned planarization layer 11.Color-filter layer is aimed at respect to photosensor region 24.Although there is above situation, color-filter layer 12 is not also aimed at respect to any photosensor region.This series color-filter layer (if existence) will generally include redness, green and blue main color or yellow, cyan and mauve complementary hue.This series color-filter layer will comprise a series of dyed or painted patterned photoresist layers conventionally, this layer through intrinsic imaging to form this series color-filter layer.Or this series color-filter layer can comprise dyed or painted organic polymer material, this material is printing opacity otherwise, but its extrinsic imaging when using a suitable mask layer.Also can use alternative color filter materials.This light filter also can be used for the light filter of a black and white or infrared sensor, but wherein this light filter mainly blocks visible ray infrared light and can pass through.
Spacer layers (13) can be by entity ground but is not on optics, the stack layer any material separated with lenticule (14) to be formed to one or more layers.Spacer layers can be formed by the dielectric spacer material of a dielectric spacer material or lamination, and the situation that also known spacings part layer is formed by conductor material also exists.The oxide of silicon, nitride and oxynitride are typically used as dielectric spacer material.Oxide, nitride and the oxynitride of not getting rid of other elements.Can use similar with the method set forth, equivalent or identical method deposition to become dielectric spacer material above.Can use blanket blanket deposition and eat-back the spacer layers that method forms the characteristic with inside sharp shape.
Lenticule (14) can comprise any one in some printing opacity lens materials known in this technology.Lens jacket can comprise any one in some printing opacity lens materials known in this technology.Unrestricted example comprises printing opacity inorganic material, transmitting organic material and printing opacity synthetic material.Modal is transmitting organic material.Conventionally lens jacket can form through being easy to the organic polymer material of patterning and backflow, and the glass transformation temperature of this organic polymer material is lower than the glass transformation temperature of this series color-filter layer 12 (if existence) or patterned planarization layer 11.
In optical tube 22, high-index material can (for example) for thering is the silicon nitride of a refractive index of approximately 2.0.Compared with low-refraction coating layer material, can (for example) be a glass, (for example) be selected from the material that Table II has a refractive index of approximately 1.5.
Table II
In Table II, PESiN refers to that SiN and PESiO that plasma strengthens refer to the SiO that plasma strengthens.
Preferably, the cross-sectional area that is adjacent to light activated element end of optical tube approximately with the area formed objects of light activated element.Otherwise the electromagnetic radiation that sees through the optical tube of light activated element outside through guiding can be incident in the non-sensitive district of substrate, therefore reduce the light quantity that is converted to electric signal and the efficiency that reduces imageing sensor.
Optionally, a lenticule can be positioned in optical tube the incidence electromagnetic radiation bundle receiving end place close to imageing sensor.Lenticular function or be more generally a coupling mechanism, that is, incidence electromagnetic radiation bundle is coupled in optical tube.If select a lenticule as coupling mechanism, lenticule, apart from the distance of optical tube by the distance being far shorter than to light activated element, is therefore more undemanding to the constraint of lenticular curvature, makes thus it be implemented by existing manufacturing technology.
The shape of optical tube can be for different embodiment and difference.In a configuration, optical tube can be columniform, that is the diameter of pipe is roughly the same along the length maintenance of optical tube.In another configuration, optical tube can be conical, and wherein the upper diameter of the cross-sectional area of optical tube can be greater than the lower diameter of the cross-sectional area of optical tube.Term " top " and " bottom " refer to the incidence electromagnetic radiation bundle receiving end and the exit end that are positioned at more close imageing sensor of optical tube.Other shapes comprise the stacking of circular cone aspect.
Table II is enumerated some different glass and refractive index thereof.These glass can be used for making optical tube so that the refractive index of the refractive index ratio clad of core is high.Can under the situation of not using painted color filter, use the cmos image sensor of the different clear glasses making embodiment with different refractivity.Because the wave guide of embodiment absorbs light unlike color filter, but wave guide can be through the selected wavelength of design alternative ground transmission, the light transmission efficiencies of optical tube can be at least 50%, preferably at least 75%, the best is at least 99%, that is, roughly 100%.Applicable configuration by wave guide in the optical tube of embodiment, can more effectively be transmitted through light activated element by the electromagnetic radiation beam being incident in image sensing, therefore increases the susceptibility of sensor.
In certain embodiments, optical tube can be circular to as a circular waveguide device, it is characterized in that following parameter: (1) core radii (Rc) on cross section or xsect; (2) core refractive index (n 1); And (3) clad refractive index (n 2).These parameters can be determined substantially can see through the light wavelength that wave guide is propagated.Wave guide has a cutoff wavelength, λ ct.The wavelength part with the cutoff wavelength of being longer than of incidence electromagnetic radiation will not limited by core.Therefore, as the optical tube of its cutoff wavelength in green wave guide, will not see through core and propagate red light, and will through core, not propagate red light and green light as the optical tube of its wavelength in blue wave guide.
By nested optical tube as wave guide and use a lenticule coupling mechanism (as shown in Fig. 3), an image sensor array can be configured to obtain the complementary hue having in the core of each optical tube of each imageing sensor and clad with the separated electromagnetic radiation wavelength of a cutoff wavelength.Complementary hue produces two kinds of colors of a neutral color (grey, white or black) while being generally the ratio mixing being applicable to.This configuration also can catch the great majority in the electromagnetic radiation incident beam being incident on lenticule and be guided to the light activated element (that is, photodiode) of the lower end that is positioned at optical tube.Having two complementary separated imageing sensors that adjoin or roughly adjoin of different color can provide in order to according to the Complete Information of embodiment reconstruct one full color scene described in this paper.This technology of embodiment disclosed herein can further replace the color refactor based on pigment for image sensing, and the defect of the color refactor based on pigment is to have lost non-selected color and then the inefficiency for each pixel (see through and absorb).。
Each entity pixel of the device of an imageing sensor that contains embodiment disclosed herein will have two outputs that represent complementary hue, for example be appointed as (cyan, the redness) of output type 1, or be appointed as (yellow, blueness) of output type 2.These outputs will configure as follows:
1?2?1?2?1?2?1?2?1?2?1?2?1?2?1?2...
2?1?2?1?2?1?2?1?2?1?2?1?2?1?2?1...
1?2?1?2?1?2?1?2?1?2?1?2?1?2?1?2...
Each entity pixel will have the full brightness information obtaining by two complementary output of combination.Therefore, same imageing sensor can be used as full resolution black and a white sensor, or full color sensor.
In the embodiment of imageing sensor disclosed herein, the full spectrum of incidence electromagnetic radiation Shu Bochang (for example, the full color information of incident light) can be by suitably combining two flatly or adjacent pixels and obtaining vertically, this is different from 4 pixels for conventional Bel (Bayer) pattern.
The imageing sensor of embodiments disclosed herein is by having triple impacts the future of cmos image sensor technology.
The first ghost image rings for the light that increases coke ratio (F-number) or each pixel is accepted to cone, therefore increases the total efficiency of sensor.Equally, nationality helps embodiments disclosed herein, and the coke ratio of sensor will be to stacks as high relative insensitivity (lenticular surface be to the distance of photodiode).Thus, can be easy to adapt to 10 microns or larger stacks as high.
The second ghost image rings for will remove color filter (unless being expected to be useful in some other object), and color filter optical absorption characteristics can reduce to the susceptibility of commonly using imageing sensor approximately original 1/3rd.
Triple impacts will come from advanced CMOS manufacture process and use the metal of transparency and the fact of material that can damage electromagnetic radiation beam (being stacked on the light of propagating such as the whole metal levels on the top of the photoelectric subassembly of photodiode such as seeing through).One optical tube of embodiments disclosed herein is by the solution providing this problem.Equally, the system of embodiment disclosed herein will depart from the light path of imageing sensor (that is, optical tube), with the impurity of avoiding introducing during the patterned stack layer of shop drawings image-position sensor.Yet the manufacture of optical tube itself should be used the low transmission loss material such as glass.
According to minimum transistor size, each pixel of an imageing sensor that contains embodiments disclosed herein can be as small as 1 micron or less in spacing, and has again abundant susceptibility.Can start the method for the contact imaging of the minimum structure such as biosystem like this.
In the context of following explanation, will set forth in further detail and comprise the embodiment of a plurality of imageing sensors (a better cmos image sensor) and for the manufacture of the embodiment of method.This explanation can further be understood in graphic upper and lower literary composition explained above.Graphic is the object for illustrating, therefore needn't illustrate in proportion.
Fig. 4 A-4B shows the schematic cross-section of an embodiment of a composite pixel, and this composite pixel has two imageing sensors, and (it has two aperture (d 1and d 2)) and for guiding different wave length (λ band λ r) the light pipe of light.Under each aperture, two photodiodes of surface construction are to catch wavelength X b(or λ r) light and wavelength X w-B(or λ w-R) light.Notice that (w) refers to white light wavelength.Signal from 4 photodiodes (being arranged in 2 pixels) is used for constructing color.
Fig. 4 (A) shows a series of schematic cross sectional view to Fig. 4 (G), and it illustrates according to the result in the progress stage in the cmos image sensor of one embodiment of the invention.Specific, Fig. 4 (A) is presented at manufacture commitment, the schematic cross sectional view of the cmos image sensor when structure photodiode.The area of photodiode is consistent with the area that is overlying on the light pipe on photodiode through manufacture.
Fig. 4 (A) shows semi-conductive substrate.This substrate can comprise a mutually trans-impure well (it has the conduction type that is different from Semiconductor substrate), and this mutually trans-impure well is arranged in this Semiconductor substrate (not being shown in Fig. 4 (A)).A series of isolated areas also can be positioned at this Semiconductor substrate.This Semiconductor substrate can comprise one first district R1, and it comprises a photoactive region (being shown in Fig. 4 (A)); And one laterally adjoin Second Region R2, it comprises a circuit region (not being shown in Fig. 4 (A)).
In the R1 of photoactive region, the separated a series of photosensor region of this series isolated area (that is, be shown in the double photodiode in Fig. 4 (A)).In circuit region R2, the separable a pair of active region of this series isolated area.This can comprise and be positioned at wherein and be manufactured in one first field effect transistor T1 and one second field effect transistor T2 wherein active region.Field effect transistor T1 and T2 can comprise a pair of CMOS transistor, and this is can be arranged in and be manufactured in Semiconductor substrate and transistor T 2 can be positioned at and be manufactured in impure well (it has the conduction type that is different from Semiconductor substrate) because of transistor T 1.Finally, exist a blanket to cover etch stop, it locates this Second Region R2 of the structure that covers this firstth district R1 and comprise field effect transistor T1 and T2 through conformally.
At photoactive region R1 and circuit region R2 in both, this series isolated area 12 can comprise material in conventional semiconductor fabrication, have the size in conventional semiconductor fabrication, and uses with the method in the semiconductor fabrication of commonly using and form.
This series isolated area can including but not limited to localized oxidation of silicon (LOCOS) isolated area, shallow channel isolation area (that is, there is the degree of depth that maximum is about 5000 dusts) and deep trench isolation region (that is, there is the degree of depth that maximum is about 60000 dusts).Conventionally, the first embodiment is used the shallow channel isolation area that is arranged in shallow isolated groove.Any one that isolated area (no matter being to be arranged in shallow isolated groove or dark isolated groove) can comprise some dielectric materials.Generally include oxide, nitride and the oxynitride of silicon, with and combination and the composition thereof of lamination.Oxide, nitride and the oxynitride of not getting rid of other element.
Can use at least partly blanket blanket deposition and planarization method to form this series isolated area.Can use thermal oxide or plasma oxidation or hot nitrogenize or pecvd nitride method, chemical vapour deposition technique and physical vaporous deposition to form suitable blanket coating.Planarization method can include but not limited to machinery planarization method and chemically mechanical polishing (CMP) planarization method.Modal is chemically mechanical polishing planarization method.
In the R1 of photoactive region, each in this series photosensor region can comprise and otherwise generally be usually used in the optical sensor in semiconductor fabrication.Although only the invention is not restricted to as a photosensor region of photodiode, each of optical sensor comprises a photodiode conventionally.When using suitable adulterant, photodiode can be doped to a concentration, and it is to about 1e (E) 18 foreign atoms from every cubic centimetre of about 1e (E) 16 foreign atoms.
In circuit region R2, this can comprise to each in field effect transistor T1 and T2 the gate electrode dielectric layer being positioned in Semiconductor substrate.One gate electrode can be positioned on gate electrode dielectric layer.Spacer layers can be positioned to be adjacent to the side-walls of gate electrode dielectric layer and gate electrode.Finally, each in the first transistor T1 and transistor seconds T2 can comprise by a pair of source/drain regions that is positioned at the channel region separation below gate electrode.
The aforementioned layers that comprises this first transistor T1 and transistor seconds T2 and each in structure can comprise the material being usually used in semiconductor fabrication, and have the size being usually used in semiconductor fabrication.Also the aforementioned layers that can use the method that is usually used in semiconductor fabrication to form to comprise the first transistor T1 and transistor seconds T2 and each in structure.
Gate electrode dielectric layer can comprise any one in some gate electrode dielectric materials.Include but not limited to generally compared with low-k gate electrode dielectric material, such as, but not limited to the oxide, nitride and the oxynitride that have from the silicon of the specific inductive capacity of approximately 4 to approximately 20 (measuring in a vacuum).Comprise equally and be also not limited to have from the approximately 20 general high dielectric constant gate electrode dielectric materials to the specific inductive capacity at least about 100.These high dielectric constant dielectric materials can include but not limited to hafnia, hafnium silicate, titanium dioxide, barium strontium (BST) and lead zirconate titanate (PZT).
Can use the suitable method of its composition material is formed to aforementioned gate electrode dielectric material.The unrestricted example of method comprises thermal oxide or plasma oxidation or hot nitrogenize or pecvd nitride method, chemical vapour deposition technique (comprising atomic layer chemical vapor deposition method) and physical vaporous deposition.Typically, gate electrode dielectric layer can comprise a hot Si oxide gate electrode dielectric material with the thickness to approximately 70 dusts from approximately 20 dusts.
Gate electrode also can comprise any one in some gate electrode conductor materials similarly.Unrestricted example comprises special metal, metal alloy, metal silicide and metal nitride, and through doped polycrystalline silicon materials (that is, there is the concentration of dopant to about 1e22 dopant atom from every cubic centimetre of about 1e18 dopant atom) and polysilicon compound (that is, stacking through doped polycrystalline silicon/metal silicide) material.Can use any one the deposition gate material in some methods.Unrestricted example comprises chemical vapour deposition technique (also comprising atomic layer chemical vapor deposition method) and physical vaporous deposition.Conventionally, each in gate electrode 18 all comprise have from approximately 1000 dusts to the thickness of approximately 1500 dusts through doped polycrystalline silicon materials.
Spacer layers can be conventionally formed by the lamination of a dielectric spacer material or dielectric spacer material, but also known spacings part layer is formed by conductor material.The oxide of silicon, nitride and oxynitride are the materials that is typically used as dielectric spacer.Oxide, nitride and the oxynitride of not getting rid of other element.Can use similar with the method that is used to form gate electrode dielectric layer, equivalent or identical method deposit dielectric spacer materia.Typically, can use blanket blanket deposition and eat-back the spacer layers that method forms the characteristic with inside sharp shape.
Can use two step ion implantation to form source/drain regions.Source/drain can form applicable polarity to form a field-effect transistor by Implantation.Having under spacer layers and the situation without spacer layers, this two steps ion implantation is used gate electrode as a shade.Typical dopant concentration in source/drain regions can be from every cubic centimetre of about 1c (E) 15 dopant atoms to about 1c (E) 22 dopant atoms.
Blanket covers etch stop can comprise the etch stop material being usually used in semiconductor fabrication.Unrestricted example also comprises oxide, nitride and the oxynitride of silicon.Also oxide, nitride and the oxynitride of not getting rid of other element.Can form the specific composition of selecting etch stop according to being positioned at and being formed on the material of etch stop on it.According to following other disclosure, blanket covers etch stop can comprise mononitride etch stop material thus, but not so restriction of the present invention.Can use any one the formation blanket in some methods to cover etch stop.Unrestricted example comprises chemical vapour deposition technique or physical vaporous deposition.Conventionally, blanket covers etch stop and comprises a silicon nitride material, and it has the thickness to approximately 300 dusts from approximately 100 dusts.
Fig. 4 (B) shows the further result of cmos image sensor (its schematic cross sectional view is to be illustrated in Fig. 4 (A)).Fig. 4 (B) shows that dielectric and the metal be patterned and made by the material that is generally used for manufacturing cmos sensor connect stacking.
Fig. 4 (B) shows a dielectric and the metallization stack layer be arranged on cmos image sensor (its schematic cross sectional view be illustrated in Fig. 4 (A)).Dielectric and metallization stack layer comprise a series of dielectric passivation layer.Be embedded in the interconnection metallization that comprises in this series dielectric passivation layer.Assembly for interconnection metallization includes but not limited to contact stud CA, the first interconnection layer M1, the first interconnect posts V1, the second interconnection layer M2, the second interconnect posts V2, the 3rd interconnection layer M3, terminal interconnect post V3 and terminal metal layer M4.An interconnection metallization can be connected to the source/drain region of transistor T 1 and the source/drain region that another interconnection metallization can be connected to transistor T 2.A pair of the first interconnection layer M1, a pair of the second interconnection layer M2 and a pair of the 3rd interconnection layer M3 are also distally arranged in photosensor region R1, but still are embedded in dielectric and metallization stack layer shown in Fig. 4 (B).
The indivedual metallization interconnect posts and metallization interconnect layers CA, M1, V1, M2, V2, M3, V3 and the M4 that can be used in interconnection metallization can comprise any one in the some metallization materials that are usually used in semiconductor fabrication.Unrestricted example comprises special metal, metal alloy, metal nitride and metal silicide.Modal is aluminum metallization material and copper metallization material, and any one in these both often comprises a barrier metallization material, as below discussed in more detail.The type of metallization material can be along with its size and location in semiconductor structure and difference.Less and bottom is laid metallization features and is conventionally comprised containing copper conductor material.Large and top is laid metallization features and is conventionally comprised containing aluminium conductor material.
Stacking any one that also can comprise in the some dielectric materials that are usually used in semiconductor fabrication of this series dielectric passivation layer.Comprise the general high dielectric constant dielectric material having from 4 to approximately 20 specific inductive capacity.The unrestricted example being included in this group is oxide, nitride and the oxynitride of silicon.This series dielectric layer also can comprise have from approximately 2 to approximately 4 specific inductive capacity generally compared with low dielectric constant dielectric materials.The material that is included in this group but is not limited to this is hydrogel, aerogel, silsesquioxane spin-coating glass dielectric material, fluoride glass material and organic polymer material.
Dielectric and metallization stack layer can comprise at least one interconnection metallization and discrete metal layer M1, M2 and the M3 in copper metallization material and aluminum metallization material.Dielectric and metallization stack layer also can comprise dielectric passivation layer, this dielectric passivation layer also comprise above disclose generally compared with at least one in low dielectric constant dielectric materials.Dielectric and metallization stack layer can have the gross thickness from approximately 1 to approximately 4 micron (μ m).It can comprise discrete levels dielectric and the metalized component layer from approximately 2 to approximately 4 one in stacking conventionally.
A schematic cross sectional view of the result of cmos image sensor (being illustrated in Fig. 4 (B) of its schematic cross sectional view) is further processed in Fig. 4 (C) demonstration graphic extension.
The result of Fig. 4 (C) shows patterned metal dielectric and metallization stack layer is to have formed patterned electricity medium and the metallization stack layer that comprises a series of patterned dielectric passivation layer.Patterned electricity medium and metallization stack layer have a series of aperture A1 and the A2 that is positioned at wherein and aims at this series photosensor region.
The patterning of dielectric and metallization stack layer can be used the proper method that is usually used in semiconductor fabrication and to forming the suitable material of this series dielectric passivation layer material.Can use wet chemical etch method, dry plasma etching method or its integrated approach patterned electricity medium and metallization stack layer.Dry plasma etching method provides the side wall profile of enhancing conventionally better with regard to controlling when forming the patterned dielectric of this series and metallization stack layer with regard to it.As graphic extension in Fig. 4 (C), dielectric and metallization stack layer can be used an etch stop to be patterned to form patterned dielectric and metallization stack layer as a suspension layer.
Fig. 4 (D) shows the result of further processing cmos image sensor (being illustrated in Fig. 4 (C) of its schematic cross sectional view).
Fig. 4 (D) shows and to be filled with the have high refractive index aperture of material of (n1).Optionally, in one embodiment, can form a reflection horizon with reflecting surface, its reflecting surface conformally and is continuously given each (bottom and the sidewall that the comprise it) lining in aperture A1 and A2, and also conformally and continuously covers the top surface of this patterned dielectric and metallization stack layer.This reflection horizon also can passivation one terminal metal M4.
Dielectric material in the patterned dielectric of this series and metallization stack layer has the specific inductive capacity (for example,, when being comprised of Si oxide) from approximately 1.4 to approximately 1.6 conventionally.The aperture packing material with high anaclasis (n1) can have the specific inductive capacity from approximately 1.6 to approximately 2.1.One silicon nitride dielectric material has the specific inductive capacity from approximately 2.0 to approximately 2.1 conventionally, and it can be used for form filling the high light refraction material in aperture, but embodiment is not restricted to this.
Fig. 4 (E) shows the result of further processing cmos image sensor (its schematic cross sectional view is illustrated in Fig. 4 (D)).Particularly, Fig. 4 (E) thus the high light refraction material removing materials in shows patterned metal aperture A1 and A2 is to leave the have high refractive index result of one light-pipe structure of (n1).Can use the method and the material that are usually used in this technology to implement aforementioned pattern.Unrestricted example comprises wet chemical etch method and material, dry plasma etching method and material and integrated approach and material.Do not get rid of other alternative method.
Fig. 4 (F) shows the result of further processing cmos image sensor (its schematic cross sectional view is to be illustrated in Fig. 4 (E)).Particularly, Fig. 4 (F) demonstration is filled light pipe volume around with the material that refractive index is (n2 < n1).Optionally, in one embodiment, also can remain this volume and not be filled.
Optionally, in one embodiment, a planarization layer can be positioned on reflection horizon and/or above filling aperture.Planarization layer can comprise any one in some printing opacity smoothing material.Unrestricted example comprises spin-coating glass smoothing material and organic polymer smoothing material.Planarization layer can have a thickness that is enough to this series aperture A1 of at least planarization and A2, is provided for thus manufacturing a plane of the supernumerary structure in cmos image sensor.
Fig. 4 (G) shows that wherein a reflection horizon can be deposited on stacking upper (as discussed above) so that the sidewall in aperture has the embodiment in reflection horizon.This reflection horizon can strengthen the light collection efficiency of imageing sensor.
Optionally, can after the patterning of aperture, a series of color-filter layers be arranged on this aperture.Can aim at color-filter layer with respect to photosensor region.This series color-filter layer can generally include redness, green and blue main look or yellow, cyan and mauve complementary colors.This series color-filter layer can comprise a series of dyed or through painted patterned photoresist layer, this layer of intrinsic imaging is to form this series color-filter layer.Another is chosen as, and it is dyed or through painted organic polymer material that this series color-filter layer can comprise, otherwise printing opacity but its extrinsic imaging when using a suitable mask layer of this material.Also can use alternative color filter materials.
Fig. 5 is presented at the embodiment of the double photodiode below each aperture.Preferably, below each aperture, there are 2 photodiode PD b(or PD r) and PD w-B(or PD w-R).Each photodiode catches by different wave length (λ b(or λ r) and λ w-B(or λ w-R)) the electric charge carrier of light stimulus.The topological structure of these two photodetectors (photodiode) makes not crosstalk from the charge carrier of the not same district of spectrum.This is owing to forming such as the entity barrier of groove or reaching to form high impedance areas by doping.
For reaching good photodetection, realizing light to the good coupling of photodiode is the expectation that will reach.In one embodiment, this can reach by a lenticule being positioned on the top of pixel or forming a monolithic coupling mechanism.Have lenticule or without lenticular situation under, can in the embodiment of imageing sensor, not use color filter, or optionally (as explained above) have lenticule or without lenticular situation under, in the embodiment of sensor, also can use color filter.
Lenticule should be positioned over to suitable At The Height, light preferably focuses on the top of light pipe like this.The polymeric layer that Fig. 6 demonstration has specific thicknesses by use is positioned at as distance piece the lenticular schematic diagram that optimum distance (Z) is located.Then light focuses on the top of light pipe, and this light pipe guides to photodiode by light again.Can use the lenticule that forms this embodiment for the standard method of cmos sensor.
Fig. 7 (A) to (C) shows can be by a monolithic coupled structure of filling lens material formation in a darker etching.Fig. 7 (A) shows to have a darker etched aperture, and light pipe does not extend to the top of structure.Fig. 7 (B) shows that the area filling on light pipe top has a polymkeric substance with suitable surface tension and viscosity to form lens in being used to form lenticular normal processes.Fig. 7 (C) (overlooking) shows that a plurality of monolithic coupled structures and Fig. 7 (C) (looking up) are presented at a plurality of lenticules of patterning on a plurality of light pipes aperture.
The lenticule of the embodiment of imageing sensor can be included in any one in some printing opacity lens materials known in this technology.Unrestricted example comprises printing opacity inorganic material, transmitting organic material and printing opacity synthetic material.Modal is transmitting organic material.Microlens layer can form through being easy to the organic polymer material of patterning and backflow, and the glass transformation temperature of this organic polymer material is lower than the glass transformation temperature (being conventionally present in the embodiment of imageing sensor) of this series color-filter layer (if existence) or patterned planarization layer.
The embodiment of imageing sensor can complete by color refactor the identification of color and brightness.Each composite pixel has the full brightness information obtaining by two complementary output of combination.Therefore, same imageing sensor can be used for a full resolution black and white sensor or full color sensor.
Can carry out color refactor to obtain full color information by suitably combining two levels or vertical adjacent pixels (it can be an embodiment of a composite pixel).Obtain color information institute by according to be less than two pixels size but not for the size of 4 pixels of Bel (Bayer) pattern.
Each entity pixel of the device of an imageing sensor that contains embodiments disclosed herein will have two outputs that represent complementary hue, for example be appointed as cyan, the redness (C, R) of output type 1, be appointed as yellow, the blueness (Y, B) (as shown in Fig. 8) of output type 2.These 4 outputs of two pixels of one composite pixel can be through resolving the full color scene of the image of being observed by the device of the imageing sensor that contains embodiment described in this paper with reconstruct.
Aforementioned detailed description is by the various embodiment that use figure, process flow diagram and/or example explaination device and/or processing procedure.Under the situation that contains one or more functions and/or operation at these figure, process flow diagram and/or example, those who familiarize themselves with the technology should understand can nationality help the hardware, software, firmware of a broad range or almost its arbitrary combination individually and/or collectively implement each function and/or the operation in these figure, process flow diagram and/or example.In one embodiment, some parts of theme described in this paper can be implemented via special IC (ASIC), field programmable gate array (FPGA), digital signal processor (DSP).Yet, those who familiarize themselves with the technology (for example can be used as one or more computer programs of moving on one or more computers by some aspect of recognizing embodiments disclosed herein, one or more programs of moving in one or more computer systems), one or more programs of moving on one or more processors (for example, one or more programs of moving on one or more microprocessors), firmware, or almost its arbitrary combination equivalence is whole or in part implemented in integrated circuit, and according to this disclosure, design circuit and/or write will be certainly in those who familiarize themselves with the technology skill for the code of software and/or firmware.In addition, those who familiarize themselves with the technology is to be distributed as various forms of program products by the mechanism of understanding theme described in this paper, and regardless of carry out the particular type of the signal bearing media of this distribution for reality, all apply an illustrative embodiment of main body described in this paper.The example of signal bearing media includes but not limited to following: such as floppy disk, hard disk drive, CD (CD), digital video disks, numerical digit tape, computer memory etc. can record type media; And for example, such as numeral and/or the analogue communication media transport-type media of (, fiber optic cables, wave guide, wire communication connection, radio communication connect etc.).
Those who familiarize themselves with the technology sets forth device and/or processing procedure by recognizing in technique in the mode of explaining herein, and after this use engineering practice by these the device of setting forth and/or processing procedure to be integrated into data processing system be also common.That is at least a portion of device described in this paper and/or processing procedure can be integrated into via the experiment of a reasonable amount in a data handling system.Those who familiarize themselves with the technology will recognize that typical data disposal system generally comprises with one or more in lower device: system unit shell, video display devices, such as volatibility or Nonvolatile memory, such as the processor of microprocessor and digital signal processor, such as the computational entity of operating system, driver, graphic user interface and application program, such as one or more interactive devices of touch pad or screen, and/or comprise feedback loop and control motor (for example,, for the feedback of sensing location and/or speed; Control motor for movement and/or adjustment assembly and/or quantity) control system.One typical data disposal system can utilize commercially available applicable assembly on arbitrary market (such as being typically found at assembly in data calculating/communication and/or networking calculating/communication system) to implement.
The different assemblies that theme described in this paper graphic extension is sometimes contained in the different assemblies in different other assemblies or connects from different other assemblies.Should be understood that these structures that illustrate are only exemplary, and in fact many other frameworks can be implemented to reach identical functional.In concept meaning, arbitrary arrangement of components of reaching same functionality all effectively " association " thus reach desired functional.Therefore, herein through combination to reach any two assemblies of a particular functionality and can be considered each other " being associated " thus reach desired functional, regardless of structure or intermediate module.Equally, it is desired functional to reach that any two assemblies that are so associated also can be considered each other " being operably connected " or " operationally coupling ", and any two assemblies that can so be associated also to can be considered each other " operationally coupling " desired functional to reach.Operationally the instantiation of coupling includes but not limited to that optical coupled is to permit light transmission, for example via an optical tube or optical fiber, physical interaction assembly and/or can wireless interactive assembly and/or wireless interactive assembly and/or interaction logic assembly and/or can the transmission of interaction logic assembly.
About roughly using arbitrary plural number and/or singular references herein, have the knack of these operators can be based on context and/or application plural number is transformed into odd number and/or odd number is transformed into plural number.For clarity, explain clearly various singular/plural changes herein.
Those who familiarize themselves with the technology should understand, generally speaking use herein and especially in appended claims (for example, the theme of appended claims) term using in (is for example intended for open to the outside world term conventionally, term " comprises (including) " should be interpreted as " including but not limited to ", and term " has (having) " and should be interpreted as " at least having ", term and " comprises (includes) " and should be interpreted as " including but not limited to " etc.).Those who familiarize themselves with the technology will be further understood that, if being intended to make an illustrated request important document is a concrete number, will clearly indicates in the claims this kind of intention, and when indicating without this kind, not have this kind of intention.For example, as the below appended claims that contributes to understand, can contain operation instruction phrase " at least one (at least one) " and " one or more (oneor more) " illustrates request important document.Yet, the use of these phrases should not be construed as and infers the arbitrary specific rights requirement of asking important document restriction to contain this explanation request important document being illustrated by indefinite article " (a) " or " (an) " is the invention that only contains this important document, even when identical claim comprises illustrative phrase " one or more " or " at least one " and for example, such as the indefinite article (, " (a) " and/or " (an) " answers ordinary solution to be interpreted as and mean " at least one " or " one or more ") of " (a) " or " (an) "; For also like this for the use of the definite article of asking important document is described.In addition, even if clearly state a concrete number of illustrated request important document, they those who familiarize themselves with the technology will recognize that this statement answers ordinary solution to be interpreted as to mean at least this institute and state number (for example, the naked statement (without other ornamental equivalents) of " two important documents " means at least two important documents or two or more important documents conventionally).In addition, use and be similar to " A therein, at least one in B and C " the example of common-use words in, generally speaking this structure is intended to refer to that those who familiarize themselves with the technology (for example, " has A by the implication of understanding this idiom, one system of at least one in B and C " will include but not limited to only there is A, only there is B, only there is C, there is A and B simultaneously, there is A and C simultaneously, there is B and C simultaneously, and/or there is A simultaneously, the system of B and C etc.) use and be similar to " A therein, at least one in B or C " they's example of idiom in, generally speaking this structure is intended to refer to that those who familiarize themselves with the technology (for example, " has A by the implication of understanding these common-use words, one system of at least one in B or C " will include but not limited to only there is A, only there is B, only there is C, there is A and B simultaneously, there is A and C simultaneously, there is B and C simultaneously, and/or there is A simultaneously, the system of B and C etc.) those who familiarize themselves with the technology will be further understood that almost no matter turnover word and/or the phrase of arbitrary two or more alternative terms of expression (are in explanation, in claim or in graphic) should be understood to that expection comprises the one in these terms, the possibility of any one in these terms or two terms.For example, phrase " A or B " will be understood to include the possibility of " A " or " B " or " A and B ".
All references (including but not limited to patent, patent application case and non-patent literature) all in full way of reference are incorporated herein.
Although disclosed various aspects and embodiment herein, for those who familiarize themselves with the technology, other aspects and embodiment will be apparent.Various aspects disclosed herein and embodiment all for purposes of illustration and and be not intended to have restricted, wherein true spirit of the present invention and spirit are all indicated by appended claims.

Claims (67)

1. an imageing sensor, it comprises: (a) optical tube, it comprises a core and around a clad of described core, and (b) a pair of light activated element, it comprises a central optical photosensitive elements and a periphery light activated element, and wherein this central optical photosensitive elements is to be operationally coupled to this core and this periphery light activated element is to be operationally coupled to this clad.
2. imageing sensor as claimed in claim 1, wherein this imageing sensor does not comprise light filter.
3. imageing sensor as claimed in claim 1, wherein this optical tube is circular or non-circular.
4. imageing sensor as claimed in claim 3, wherein non-circular optical tube is conical.
5. imageing sensor as claimed in claim 1, wherein this core has a core refractive index n 1, this clad has a clad refractive index n 2, and n wherein 1> n 2.
6. imageing sensor as claimed in claim 5, wherein has the folded refractive index n of a pile described optical tube layer around stacking 3, and n wherein 1> n 2> n 3.
7. imageing sensor as claimed in claim 1, wherein this optical tube is configured to, and sees through this core and this clad and carrys out the separated wavelength that is incident in the electromagnetic radiation beam on this imageing sensor with a cutoff wavelength.
8. imageing sensor as claimed in claim 1, wherein this optical tube is configured to, and is not using under the situation of light filter, sees through this core and this clad and carrys out the separated wavelength that is incident in the electromagnetic radiation beam on this imageing sensor with a cutoff wavelength.
9. imageing sensor as claimed in claim 1, wherein an electromagnetic radiation beam receiving end of this optical tube comprises a curved surface.
10. imageing sensor as claimed in claim 1, wherein this core has the large cross-sectional area of cross-sectional area than the electromagnetic radiation beam transmitting terminal place in this core at an electromagnetic radiation beam receiving end place of this core.
11. imageing sensors as claimed in claim 1, wherein this is to be positioned on a substrate or a substrate to light activated element.
12. imageing sensors as claimed in claim 1, it is further included in a lens arrangement or an optical coupler of this optical tube top, and wherein this lens arrangement or this optical coupler are to be operationally coupled to this optical tube.
13. imageing sensors as claimed in claim 1, wherein this core comprises a first wave guide device, and it has a cutoff wavelength and leaks in this clad from this core so that wavelength is greater than the electromagnetic radiation of this cutoff wavelength.
14. imageing sensors as claimed in claim 13, wherein this clad comprises one second wave guide, and the electromagnetic radiation that its allowance wavelength is greater than this cutoff wavelength remaines in this clad and is transmitted to this periphery light activated element.
15. imageing sensors as claimed in claim 1, wherein this core is substantially equal to an area of this central optical photosensitive elements at a cross-sectional area of an electromagnetic radiation beam transmitting terminal of this core.
16. imageing sensors as claimed in claim 1, wherein this clad is substantially equal to an area of this periphery light activated element at a cross-sectional area of an electromagnetic radiation beam transmitting terminal of this clad.
17. imageing sensors as claimed in claim 1, are further included in around one stacking of this optical tube, this stacking metal level being embedded in dielectric layer that comprises, and wherein said dielectric layer has a refractive index lower than the refractive index of this clad.
18. imageing sensors as claimed in claim 17, wherein this stacking surface comprises a reflecting surface.
19. imageing sensors as claimed in claim 1, wherein this imageing sensor is a complementary metal oxide semiconductor (CMOS) (CMOS) imageing sensor.
20. imageing sensors as claimed in claim 1, wherein, are incident in the amount that is transmitted to this light activated element of the electromagnetic radiation beam on this imageing sensor, are greater than approximately 1/3rd of this electromagnetic radiation beam of being incident on this imageing sensor.
21. imageing sensors as claimed in claim 17, wherein this core has a core refractive index n 1, this clad has a clad refractive index n 2, and n wherein 1> n 2.
22. imageing sensors as claimed in claim 21, wherein have the folded refractive index n of a pile described optical tube layer around stacking 3, and n wherein 1> n 2> n 3.
23. imageing sensors as claimed in claim 1, wherein this light activated element comprises a photodiode.
24. imageing sensors as claimed in claim 1, it further comprises a light filter.
25. imageing sensors as claimed in claim 14, wherein this core is that this first wave guide device and this clad are this second wave guides.
26. imageing sensors as claimed in claim 12, wherein this lens arrangement or this optical coupler comprise a curved surface and a plane so that this lens arrangement or this optical coupler are configured as a sessile drops shape.
27. imageing sensors as claimed in claim 12, the connecting surface that wherein this lens arrangement or this optical coupler comprise one first opening and one second opening and extend between this first and second opening, wherein this first opening is greater than this second opening.
28. imageing sensors as claimed in claim 27, wherein a diameter of this first opening is roughly roughly identical with a diameter of this core with a diameter one diameter identical and this second opening of this clad.
29. imageing sensors as claimed in claim 27, wherein this connecting surface is flat or crooked.
30. imageing sensors as claimed in claim 27, wherein this connecting surface comprises a reflecting surface.
31. 1 kinds of composite pixel, it comprises at least two different images sensors, each imageing sensor comprises: (a) optical tube, it comprises a core and around a clad of described core, and (b) a pair of light activated element, it comprises a central optical photosensitive elements and a periphery light activated element, wherein this central optical photosensitive elements is operationally coupled to this core and this periphery light activated element is operationally coupled to this clad, wherein each in these at least two different images sensors is incident in the wavelength of the electromagnetic radiation beam in this composite pixel with a cutoff wavelength separation through configuration, and this composite pixel is the spectrum with the wavelength of reconstruct electromagnetic radiation beam through configuration.
32. composite pixel as claimed in claim 31, wherein this core comprises a first wave guide device, and it has this cutoff wavelength and leaks in this clad from this core so that wavelength is greater than the electromagnetic radiation of this cutoff wavelength.
33. composite pixel as claimed in claim 32, wherein this cutoff wavelength of this core of each in these at least two different images sensors is different so that these at least two different images sensors are incident in this electromagnetic radiation beam in this composite pixel with different cutoff wavelength separation.
34. composite pixel as claimed in claim 32, wherein this clad comprises one second wave guide, and the electromagnetic radiation that its allowance wavelength is greater than this cutoff wavelength remaines in this clad and is transmitted to this periphery light activated element.
35. composite pixel as claimed in claim 31, wherein the cross-sectional area of this clad at an electromagnetic radiation beam transmitting terminal place of this clad is an area that is substantially equal to this periphery light activated element.
36. composite pixel as claimed in claim 31, it is further included in each metal around of this optical tube and non-metallic layer one stacking in these at least two different optical sensors.
37. composite pixel as claimed in claim 31, wherein these two different images sensors comprise the core with different-diameter.
38. composite pixel as claimed in claim 31, this spectrum of its medium wavelength comprises visible light wavelength.
39. composite pixel as claimed in claim 31, wherein a plurality of pixels are configured on a square grid or a hexagonal.
40. 1 kinds of composite pixel, it comprises at least one the first imageing sensor and one second imageing sensor, each imageing sensor comprises: (a) optical tube, it comprises a core and around a clad of described core, and (b) a pair of light activated element, it comprises a central optical photosensitive elements and a periphery light activated element, wherein this central optical photosensitive elements is operationally coupled to this core and this periphery light activated element is operationally coupled to this clad, wherein this first imageing sensor provides with one first cutoff wavelength being incident in one first separation of the electromagnetic radiation beam on this imageing sensor under with the situation not using arbitrary light filter through configuration, this second imageing sensor provides with one second cutoff wavelength being incident in one second separation of this electromagnetic radiation beam on this imageing sensor under with the situation not using arbitrary light filter through configuration, this first cutoff wavelength is to be different from this second cutoff wavelength, and this composite pixel is the spectrum with the wavelength of this electromagnetic radiation beam of reconstruct through configuration.
41. composite pixel as claimed in claim 40, wherein this first imageing sensor comprises a first wave guide device, it has this first cutoff wavelength and not limited by this first wave guide device so that wavelength is greater than the electromagnetic radiation of this first cutoff wavelength, wherein this second imageing sensor comprises one second wave guide, and it has this second cutoff wavelength and leaks from this second wave guide so that wavelength is greater than the electromagnetic radiation of this second cutoff wavelength.
42. composite pixel as claimed in claim 41, wherein this first cutoff wavelength is to be different from this second cutoff wavelength.
43. composite pixel as claimed in claim 41, wherein this first imageing sensor further comprises one first white wave guide, the electromagnetic radiation that its allowance wavelength is greater than this first cutoff wavelength remaines in this first white wave guide, and this second imageing sensor further comprises one second white wave guide, the electromagnetic radiation that its allowance wavelength is greater than this second cutoff wavelength remaines in this second white wave guide.
44. composite pixel as claimed in claim 43, wherein this first imageing sensor comprises one first pair of light activated element and this second imageing sensor comprises one second pair of light activated element.
45. composite pixel as claimed in claim 44, it is further included in the stacking of the metal of this first and second wave guide vicinity and non-metallic layer.
46. composite pixel as claimed in claim 40, wherein the core of this first imageing sensor comprises and has the diameter and this spectral wavelength that are different from this second imageing sensor diameter and comprise visible light wavelength.
47. 1 kinds of methods of manufacturing an imageing sensor, it comprises: (a) form a pair of light activated element that comprises a central optical photosensitive elements and a periphery light activated element, and (b) form and to comprise a core and around an optical tube of a clad of described core, wherein this central optical photosensitive elements is operationally coupled to this core and this periphery light activated element is operationally coupled to this clad.
48. methods as claimed in claim 47, wherein this imageing sensor does not comprise light filter.
49. methods as claimed in claim 47, wherein the xsect of this optical tube is circle or non-circular.
50. methods as claimed in claim 49, wherein non-circular optical tube xsect is conical.
51. methods as claimed in claim 47, wherein this core has a core refractive index n 1and this clad has a clad refractive index n 2, and n wherein 1be greater than n 2.
52. methods as claimed in claim 47, wherein this optical tube is configured to, and sees through this core and this clad and carrys out the separated wavelength that is incident in the electromagnetic radiation beam on this imageing sensor with a cutoff wavelength.
53. methods as claimed in claim 47, wherein this optical tube is configured to, and is not using under the situation of light filter, sees through this core and this clad and carrys out the separated wavelength that is incident in the electromagnetic radiation beam on this imageing sensor with a cutoff wavelength.
54. methods as claimed in claim 47, wherein an electromagnetic radiation beam receiving end of this optical tube comprises a curved surface.
55. methods as claimed in claim 47, wherein this core has the large cross-sectional area of cross-sectional area than the electromagnetic radiation beam transmitting terminal place in this core at an electromagnetic radiation beam receiving end place of this core.
56. methods as claimed in claim 47, wherein this is positioned on a substrate or a substrate to light activated element.
57. methods as claimed in claim 47, it is further included in a lens arrangement or an optical coupler of this optical tube top, and wherein this lens arrangement or this optical coupler are operationally coupled to this optical tube.
58. methods as claimed in claim 47, wherein this core comprises a first wave guide device, and it has a cutoff wavelength and leaks in this clad from this core so that wavelength is greater than the electromagnetic radiation of this cutoff wavelength.
59. methods as claimed in claim 58, wherein this clad comprises one second wave guide, and the electromagnetic radiation that its allowance wavelength is greater than this cutoff wavelength remaines in this clad and is transmitted to this periphery light activated element.
60. methods as claimed in claim 47, wherein the cross-sectional area of this core at an electromagnetic radiation beam transmitting terminal place of this core is substantially equal to an area of this central optical photosensitive elements.
61. methods as claimed in claim 47, wherein the cross-sectional area of this clad at an electromagnetic radiation beam transmitting terminal place of this clad is an area that is substantially equal to this periphery light activated element.
62. methods as claimed in claim 47, it is further included in the stacking of metal around of this optical tube and non-metallic layer.
63. methods as claimed in claim 47, it further comprises a light filter.
64. methods as claimed in claim 47, wherein this imageing sensor is a complementary metal oxide semiconductor (CMOS) (CMOS) imageing sensor or charge-coupled device (CCD) (CCD).
65. methods as claimed in claim 47, are wherein transmitted through this light activated element by least half the amount that is incident in an electromagnetic radiation beam on this imageing sensor.
66. methods as claimed in claim 47, wherein this core comprises one and comprises glass containing SiN material and this clad.
67. methods as claimed in claim 47, wherein this light activated element comprises a photodiode.
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