CN102221737B - Fine adjuster for projection photoetching objective - Google Patents
Fine adjuster for projection photoetching objective Download PDFInfo
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- CN102221737B CN102221737B CN201010149251.8A CN201010149251A CN102221737B CN 102221737 B CN102221737 B CN 102221737B CN 201010149251 A CN201010149251 A CN 201010149251A CN 102221737 B CN102221737 B CN 102221737B
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Abstract
The invention discloses a fine adjuster for a projection photoetching objective, which comprises a multi-pitch adjusting bolt. The multi-pitch adjusting bolt comprises a cylinder and a drum; the drum is sheathed on the cylinder; the cylinder is longer than the drum; the outer wall of the drum is provided with an outer thread; the inner wall of the drum is provided with an inner thread; the outer wall of the cylinder is provided with an outer thread which is matched with the inner thread on the inner wall of the drum; when the cylinder is rotated, the cylinder rotates and moves in the drum; and the pitch of the outer thread on the outer wall of the drum is larger than the pitch of the outer thread on the outer wall of the cylinder. The fine adjuster for the projection photoetching objective has multiple pitches, and can use a big pitch for coarse adjusting and a small pitch for fine adjusting, so that the adjusting speed and the adjusting precision are high.
Description
Technical field
The present invention relates to the litho machine adjusting gear, relate in particular to a kind of precision adjustment unit of light projection photoetching objective lens.
Background technology
In the front end manufacturing equipment of large-scale semiconductive integrated circuit, litho machine is equipment the most complicated, that requirement is the highest, and the light harvesting mechanical & electrical technology, has especially almost reached the limit to the accuracy of mechanical system and the requirement of stability.In order to reach such requirement, in the design and production run of litho machine, need to pay attention to the determining of relative space position of very many-sided problem, especially each lens.
Current, light projection photoetching objective lens is very high to the relative space position requirement of eyeglass, and existing machining accuracy can not meet high-precision relative position requirement, and therefore, the relative space position of each eyeglass all relies on adjusting mechanism to be regulated.The relative space position of adjusting part with the adjustment screw is a kind of common method, and the adjustment screw of prior art is all the screw with single pitch, adjusts precision inadequate when pitch is large, when pitch is little, regulates the speed slow.
Summary of the invention
The object of the present invention is to provide a kind of precision adjustment unit of light projection photoetching objective lens, have many pitch, can use coarse pitch to carry out coarse adjustment, use fine pitch to carry out accurate adjustment, governing speed is fast and precision is high.
To achieve the above object, the invention provides a kind of precision adjustment unit of light projection photoetching objective lens, comprise the adjustment of pitch more than one screw, described many pitch is adjusted screws and is comprised a cylinder and a cylinder; Described cylindrical sleeve is on described cylinder, and described cylinder is longer than described cylinder; The outer wall of described cylinder is provided with external thread, and the inwall of described cylinder is provided with internal thread; The outer wall of described cylinder is provided with external thread, and the internal thread on the external thread on described cylindrical outer wall and described cylinder inner wall is complementary, and rotates described cylinder, and this cylinder is in rotary moving in described cylinder; Externally threaded pitch on described cylinder outer wall is greater than the externally threaded pitch on described cylindrical outer wall.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, also comprise an associated spanner, and described associated spanner comprises spanner and the outer spanner of a tubular in a cylindricality; The outer spanner of described tubular is enclosed within on the interior spanner of described cylindricality, and in described cylindricality, spanner is longer than the outer spanner of described tubular; The cylinder that the outer spanner of described tubular and described many pitch are adjusted screw is used in conjunction with, and the cylinder that rotates the described many pitch adjustment screws of the outer spanner drive of this tubular is in rotary moving; The cylindrical fit that the interior spanner of described cylindricality and described many pitch are adjusted screws is used, and the cylinder that rotates the described many pitch adjustment screws of spanner drive in this cylindricality is in rotary moving.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, the end that described many pitch is adjusted the cylinder of screw is provided with groove, and this groove is adjusted the axis direction of the cylinder of screw along described many pitch; The axis direction of adjusting the cylinder of screw along described many pitch is provided with a well, and the openend of described well is communicated with described groove.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, the groove that described many pitch is adjusted the cylinder of screw is " one " font groove, the well that described many pitch is adjusted the cylinder of screw is the circle well.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, in the cylindricality of described associated spanner, an end of spanner is provided with step, and this step is along the axis direction of spanner in described cylindricality, and the groove that described step and described many pitch are adjusted the cylinder of screw is complementary; One end of described step is provided with fore-set, and this fore-set is along the axis direction of spanner in described cylindricality, and the well that described fore-set and described many pitch are adjusted the cylinder of screw is complementary; In described cylindricality, the other end of spanner is provided with end cap.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, in described cylindricality, the step of spanner is " one " word step.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, the end that described many pitch is adjusted the cylinder of screw at least is provided with a groove, and this groove is adjusted the axis direction of the cylinder of screw along described many pitch.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, the cylinder that described many pitch is adjusted screw is provided with two " one " font grooves, and these two " one " font grooves are adjusted the circumference symmetry of the cylinder of screw along described many pitch.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, an end of the outer spanner of the tubular of described associated spanner at least is provided with a step, the axis direction of this step spanner outside described tubular; The groove that the step of the outer spanner of described tubular and described many pitch are adjusted the cylinder of screw is complementary; The other end of the outer spanner of described tubular is provided with end cap.
The precision adjustment unit of above-mentioned light projection photoetching objective lens, wherein, the step of the outer spanner of the tubular of described associated spanner is provided with two " one " word steps, the circumference symmetry of these two " one " word steps spanner outside described tubular.
The precision adjustment unit of light projection photoetching objective lens of the present invention has a plurality of pitch, be that many pitch is adjusted the externally threaded pitch of cylinder of screw and the externally threaded pitch of cylinder that many pitch is adjusted screw, the externally threaded pitch of cylinder that many pitch is adjusted screw is greater than the externally threaded pitch of cylinder that many pitch is adjusted screw, the external thread that utilizes many pitch to adjust the cylinder of screw carries out coarse adjustment to eyeglass, speed is fast, the external thread that utilizes many pitch to adjust the cylinder of screw carries out the accurate adjustment joint to eyeglass, and precision is high;
The precision adjustment unit of light projection photoetching objective lens of the present invention is that many pitch is adjusted screw specialized designs one associated spanner, makes operation easier, quick.
The accompanying drawing explanation
The precision adjustment unit of light projection photoetching objective lens of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 is the cut-open view that in the present invention, many pitch is adjusted screw;
Fig. 2 is the vertical view that in the present invention, many pitch is adjusted screw;
Fig. 3 is the cut-open view of associated spanner in the present invention;
Fig. 4 is the vertical view of associated spanner in the present invention;
Fig. 5 is the schematic diagram of the precision adjustment unit of light projection photoetching objective lens of the present invention while using.
Embodiment
Below with reference to Fig. 1～Fig. 5, the precision adjustment unit of light projection photoetching objective lens of the present invention is described in further detail.
Referring to Fig. 1～Fig. 4, the precision adjustment unit of light projection photoetching objective lens of the present invention comprises the adjustment screw of pitch more than one and an associated spanner.
As depicted in figs. 1 and 2, described many pitch adjustment screws comprise a cylinder 11 and a cylinder 12;
Described cylinder 12 is enclosed within on described cylinder 11, and described cylinder 11 is slightly longer than described cylinder 12, and stretch out from the two ends of described cylinder 12 respectively at the two ends of described cylinder 11;
The outer wall of described cylinder 12 is provided with external thread 122, and the inwall of described cylinder 12 is provided with the internal thread (not shown);
The outer wall of described cylinder 11 is provided with external thread 113, and external thread on described cylinder 11 outer walls 113 is complementary with the internal thread on described cylinder 12 inwalls, and described cylinder 11 is can relatively described cylinder 12 in rotary moving;
The pitch of the external thread 122 on described cylinder 12 outer walls is greater than the pitch of the internal thread on described cylinder 12 inwalls;
One end of described cylinder 11 is provided with " one " font groove 111, should " one " font groove 111 axis direction along described cylinder 11, be provided with a circle well 112 along the axis direction of described cylinder 11, and the openend of described round well 112 is communicated with described " one " font groove 111;
One end of described cylinder 12 is provided with two " one " font grooves 121, described two " one " font groove 121 axis directions along described cylinder 12, and be symmetrically distributed on circumference.
As shown in Figure 3 and Figure 4, described associated spanner comprises spanner 21 and the outer spanner 22 of a tubular in a cylindricality;
The outer spanner 22 of described tubular is enclosed within described cylindricality on spanner 21, and in described cylindricality, spanner 21 is longer than the outer spanner 22 of described tubular, the two ends of the interior spanner 21 of described cylindricality respectively from described tubular the two ends of spanner 22 stretch out;
In described cylindricality, an end of spanner 21 is provided with " one " word step 211, be somebody's turn to do " one " word step 211 axis directions along spanner 21 in described cylindricality, described " one " word step 211 is complementary with " one " font groove 111 that described many pitch is adjusted the cylinder 11 of screws, should " one " word step 211 can insert described many pitch and adjust in " one " font groove 111 of cylinder 11 of screws;
One end of described " one " word step 211 is provided with fore-set 212, this fore-set 212 is along the axis direction of spanner 21 in described cylindricality, described fore-set 212 is complementary with the round well 112 that described many pitch is adjusted the cylinder 11 of screws, and this fore-set 212 can insert in the round well of cylinder 11 of described many pitch adjustment screws;
In described cylindricality, the other end of spanner 21 is provided with end cap 213;
One end of the outer spanner 22 of described tubular is provided with two " one " word steps 221, the axis direction of described two " one " word steps 221 spanner 22 outside described tubular, and be symmetrically distributed on circumference;
Described " one " word step 221 is complementary with " one " font groove 121 that described many pitch is adjusted the cylinder 12 of screws, and this word step 221 can insert described many pitch and adjust in " one " font groove 121 of cylinder 12 of screws;
The other end of the outer spanner 22 of described tubular is provided with end cap 222;
In described cylindricality, spanner 21 can rotate and slide relative to described cylinder 22.
Referring to Fig. 5, describe the using method of the precision adjustment unit of light projection photoetching objective lens of the present invention in detail:
The microscope base 31 of light projection photoetching objective lens is provided with the adjusting gear interface, described many pitch is adjusted screw and is arranged in the adjusting gear interface of described microscope base 31, and the cylinder 11 that described many pitch is adjusted screws withstands on the outside surface of light projection photoetching objective lens for the eyeglass box 32 of placing eyeglass; In the round well 112 of the cylinder 11 of the described many pitch adjustment screws of the fore-set of described associated spanner 212 insertion, in " one " font groove 111 of the cylinder 11 of the described many pitch adjustment screws of " one " word step 211 insertion of the interior spanner 21 of the cylindricality of described associated spanner, promote the outer spanner 22 of tubular of described associated spanner, spanner 21 in the outer relatively described cylindricality of spanner 22 of tubular of described associated spanner is slided, make " one " word step 221 of the outer spanner 22 of tubular of described associated spanner insert described many pitch and adjust in " one " font groove 121 of cylinder 12 of screws; Rotate the interior spanner 21 of cylindricality and the outer spanner 22 of tubular (in described cylindricality, spanner 21 is relative static with the outer spanner 22 of described tubular) of described associated spanner simultaneously, eyeglass to described light projection photoetching objective lens carries out coarse adjustment, under described associated spanner moment loading, described many pitch is adjusted screw and is rotated (described cylinder 11 is relative static with described cylinder 12) relative to the adjusting gear interface of described microscope base 31, and the described eyeglass box 32 of cylinder 11 promotion that described many pitch is adjusted screw moves (mobile minimum spacing equals the pitch that described many pitch is adjusted cylinder 12 external threads 122 of screws); Rotate the interior spanner 21 of cylindricality of described associated spanner, eyeglass to described light projection photoetching objective lens carries out the accurate adjustment joint, in the cylindricality of described associated spanner under spanner 21 moment loadings, the cylinder 11 that described many pitch is adjusted screw rotates (now the adjusting gear interface of the relatively described microscope base 31 of cylinder 12 of described many pitch adjustment screws is static) relative to the cylinder 12 of described many pitch adjustment screws, the described eyeglass box 32 of cylinder 11 promotion that described many pitch is adjusted screws moves (pitch that mobile minimum spacing equals cylinder 11 external threads 113 of described many pitch adjustment screws); Three described many pitch are set usually between described eyeglass box 32 and described microscope base 31 and adjust screws (Fig. 5 only shows one of them), rely on this pitch more than three to adjust that screw can carry out fast the relative space position of eyeglass, the high precision adjusting.
The precision adjustment unit of light projection photoetching objective lens of the present invention has a plurality of pitch, be that many pitch is adjusted the externally threaded pitch of cylinder of screw and the externally threaded pitch of cylinder that many pitch is adjusted screw, the externally threaded pitch of cylinder that many pitch is adjusted screw is greater than the externally threaded pitch of cylinder that many pitch is adjusted screw, the external thread that utilizes many pitch to adjust the cylinder of screw carries out coarse adjustment to eyeglass, speed is fast, the external thread that utilizes many pitch to adjust the cylinder of screw carries out the accurate adjustment joint to eyeglass, and precision is high.
The precision adjustment unit of light projection photoetching objective lens of the present invention is that many pitch is adjusted screw specialized designs one associated spanner, makes operation easier, quick.
Claims (5)
1. the precision adjustment unit of a light projection photoetching objective lens, is characterized in that, comprises the adjustment screw of pitch more than one and an associated spanner, and described many pitch is adjusted screws and comprised a cylinder and a cylinder;
Described cylindrical sleeve is on described cylinder, and described cylinder is longer than described cylinder;
The outer wall of described cylinder is provided with external thread, and the inwall of described cylinder is provided with internal thread;
The outer wall of described cylinder is provided with external thread, and the internal thread on the external thread on described cylindrical outer wall and described cylinder inner wall is complementary, and rotates described cylinder, and this cylinder is in rotary moving in described cylinder;
Externally threaded pitch on described cylinder outer wall is greater than the externally threaded pitch on described cylindrical outer wall;
Described associated spanner comprises spanner and the outer spanner of a tubular in a cylindricality;
The outer spanner of described tubular is enclosed within on the interior spanner of described cylindricality, and in described cylindricality, spanner is longer than the outer spanner of described tubular;
The outer spanner of described tubular is used in conjunction with described cylinder, rotate this tubular outward spanner to drive described cylinder in rotary moving;
Spanner uses with described cylindrical fit in described cylindricality, and rotating the interior spanner of this cylindricality, to drive described cylinder in rotary moving;
One end of described cylinder is provided with groove, and this groove is adjusted the axis direction of the cylinder of screw along described many pitch; Axis direction along described cylinder is provided with a well, and the openend of described well is communicated with described groove;
In described cylindricality, an end of spanner is provided with step, and this step is along the axis direction of spanner in described cylindricality, and the groove of described step and described cylinder is complementary; One end of described step is provided with fore-set, and this fore-set is along the axis direction of spanner in described cylindricality, and the well of described fore-set and described cylinder is complementary; In described cylindricality, the other end of spanner is provided with end cap;
One end of described cylinder at least is provided with a groove, and this groove is along the axis direction of described cylinder;
One end of the outer spanner of described tubular at least is provided with a step, the axis direction of this step spanner outside described tubular; The step of the outer spanner of described tubular and the groove of described cylinder are complementary; The other end of the outer spanner of described tubular is provided with end cap;
Described light projection photoetching objective lens comprises microscope base and eyeglass box, described microscope base is provided with the adjusting gear interface, described many pitch is adjusted screw and is arranged in the adjusting gear interface of described microscope base, and the cylinder that described many pitch is adjusted screws withstands on the outside surface of light projection photoetching objective lens for the eyeglass box of placing eyeglass.
2. the precision adjustment unit of light projection photoetching objective lens as claimed in claim 1, is characterized in that, the groove that described many pitch is adjusted the cylinder of screw is " one " font groove, and the well that described many pitch is adjusted the cylinder of screw is the circle well.
3. the precision adjustment unit of light projection photoetching objective lens as claimed in claim 1, is characterized in that, in described cylindricality, the step of spanner is " one " word step.
4. the precision adjustment unit of light projection photoetching objective lens as claimed in claim 1, is characterized in that, the cylinder that described many pitch is adjusted screw is provided with two " one " font grooves, and these two " one " font grooves are adjusted the circumference symmetry of the cylinder of screw along described many pitch.
5. the precision adjustment unit of light projection photoetching objective lens as claimed in claim 1, is characterized in that, the step of the outer spanner of the tubular of described associated spanner is provided with two " one " word steps, the circumference symmetry of these two " one " word steps spanner outside described tubular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010149251.8A CN102221737B (en) | 2010-04-16 | 2010-04-16 | Fine adjuster for projection photoetching objective |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010149251.8A CN102221737B (en) | 2010-04-16 | 2010-04-16 | Fine adjuster for projection photoetching objective |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102221737A CN102221737A (en) | 2011-10-19 |
| CN102221737B true CN102221737B (en) | 2013-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010149251.8A Active CN102221737B (en) | 2010-04-16 | 2010-04-16 | Fine adjuster for projection photoetching objective |
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| Country | Link |
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| CN (1) | CN102221737B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974550A (en) * | 2016-07-27 | 2016-09-28 | 西安工业大学 | High-precision optical machine adjustment system |
| CN107470939A (en) * | 2017-08-10 | 2017-12-15 | 安徽六方重联机械股份有限公司 | A kind of screw-pressing mechanism |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1101703A (en) * | 1993-10-09 | 1995-04-19 | 杨秦中 | Screw and nut for pressing or micro adjustion |
| CN201344990Y (en) * | 2009-01-16 | 2009-11-11 | 中国科学院上海光学精密机械研究所 | Interferometer primary mirror adjusting mechanism |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4198798A (en) * | 1977-06-22 | 1980-04-22 | Haydock Charles E | Anchor bolt sleeve |
| JP2008223937A (en) * | 2007-03-14 | 2008-09-25 | Aoyama Seisakusho Co Ltd | Fastener |
| CN201341682Y (en) * | 2008-12-29 | 2009-11-11 | 李登新 | Rotary lifting type balcony flower frame |
-
2010
- 2010-04-16 CN CN201010149251.8A patent/CN102221737B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1101703A (en) * | 1993-10-09 | 1995-04-19 | 杨秦中 | Screw and nut for pressing or micro adjustion |
| CN201344990Y (en) * | 2009-01-16 | 2009-11-11 | 中国科学院上海光学精密机械研究所 | Interferometer primary mirror adjusting mechanism |
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| CN102221737A (en) | 2011-10-19 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |