CN102213673B - MEMS infrared emission gas-sensitive sensor - Google Patents
MEMS infrared emission gas-sensitive sensor Download PDFInfo
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- CN102213673B CN102213673B CN 201010145221 CN201010145221A CN102213673B CN 102213673 B CN102213673 B CN 102213673B CN 201010145221 CN201010145221 CN 201010145221 CN 201010145221 A CN201010145221 A CN 201010145221A CN 102213673 B CN102213673 B CN 102213673B
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Abstract
The invention discloses an MEMS (micro-electromechanical system) infrared emission gas-sensitive sensor. In the MEMS infrared emission gas-sensitive sensor, gas to be detected is excited to emit light so as to analyze emission spectra of the gas to be detected and judge the varieties of the gas, and the concentration of the gas is determined by measuring absorbance. The gas-sensitive sensor comprises a gas luminous tube (1), an absorption gas chamber (2), an emission spectrum light splitting array (3), an absorption spectrum light splitting array (4), an emission spectrum detection array (5) and an absorption spectrum detection array (6), wherein the gas luminous tube (1) is positioned on the middle part of the absorption gas chamber (2); both ends of the absorption gas chamber (2) are provided with the emission spectrum light splitting array (3) and the absorption spectrum light splitting array (4) respectively; the outer side of the emission spectrum light splitting array (3) is further provided with the emission spectrum detection array (5); and the outer side of the absorption spectrum light splitting array (4) is further provided with the absorption spectrum detection array (6). By utilizing the MEMS infrared emission gas-sensitive sensor, the requirements of people on the accuracy, convenience and low cost of gas analysis are met.
Description
Technical field
The present invention relates to the gas sensor technical field, relate in particular to a kind of MEMS infrared emission formula gas sensor.
Background technology
Gas sensor plays irreplaceable effect in pharmacy, chemical industry, food, medical science detection, environmental monitoring etc. are multi-field, existing MEMS sensor mostly is greatly sensitive membrane class gas sensor, and sensors with auxiliary electrode were utilizes the variation of the mechanical parameter such as electric parameters such as causing the sensitive membrane resistance capacitance after sensitive membrane and the object gas generation selective adsorption or vibration frequency to realize the gas detection mostly.Thereby the critical nature such as this class sensor gaseous species that can detect, sensitivity usually is subjected to the restriction of sensitive membrane material behavior.This chemico-analytic Last Resort of spectral analysis is combined with the MEMS technology, is a selection that solves sensor research and development difficulty.But the large cost of existing spectral detection device volume is high, is not easy to be widely used.Micromation complicated processing difficulty.
Summary of the invention
The technical matters that (one) will solve
In order to solve low, the problems such as detectable gas is limited, complex process of MEMS gas sensor sensitivity, the invention provides a kind of MEMS infrared emission formula gas sensor, people are accurate, convenient for gas analysis to satisfy, cheaply requirement.
(2) technical scheme
For achieving the above object, the invention provides a kind of MEMS infrared emission formula gas sensor, after this sensor excites gas discharge to be measured luminous, determine gas componant by analytical gas emission spectrum feature, and by detecting this gas the absorbing state of characteristic wavelength infrared light is determined gas concentration.This sensor can effectively solve existing gas sensor sensitivity low, detect that gaseous species is limited, the problem such as complex process, cost are higher.And this manufacturing of the fiber grating sensors and CMOS process compatible are convenient on the sheet integrated.
This MEMS infrared emission formula gas sensor provided by the invention, by exciting gas luminescence to be measured, analyze its emission spectrum and judge gaseous species, and determine that by measuring absorbance the concentration of this gas, this MEMS infrared emission formula gas sensor comprise the luminous discharge tube 1 that is integrated on the silicon substrate, absorb air chamber 2, emission spectrum spectral array 3, absorption spectra spectral array 4, emission spectrum detection arrays 5 and absorption spectra detection arrays 6; Wherein, described luminous discharge tube 1 is positioned at the middle part that absorbs air chamber 2, the two ends that absorb air chamber 2 are separately installed with emission spectrum spectral array 3 and absorption spectra spectral array 4, the outside of emission spectrum spectral array 3 further is equipped with emission spectrum detection arrays 5, and the outside of absorption spectra spectral array 4 further is equipped with absorption spectra detection arrays 6.
In the such scheme, gas luminescence to be measured after this MEMS infrared emission formula gas sensor energising in the energizing gas luminotron 1, the light that luminous discharge tube 1 sends enters and absorbs air chamber 2, after the gas interaction to be measured that absorbs air chamber 2 inside, through 4 light splitting of absorption spectra spectral array, and on absorption spectra detection arrays 6, the transmitted intensity signal of heterogeneity is converted to electric signal output; The light that luminous discharge tube 1 sends is pressed wavelength at space development through 3 light splitting of emission spectrum spectral array, and on emission spectrum detection arrays 5 light intensity signal of the light of heterogeneity is converted to electric signal output; This MEMS infrared emission formula gas sensor is determined gas componant by the emission spectrum feature of analytical gas, by gas to be measured in the measurement absorption air chamber absorption intensity of the infrared light of characteristic wavelength is determined gas concentration.
In the such scheme, described luminous discharge tube 1 is the open chamber that etching forms on silicon chip, this chamber interior has the electrode pair 101 for the energizing gas ionic discharge, form electric field 101 of electrode pairs after the energising, this electric field makes the gas ionization to be measured between electrode pair 101 gaps, and luminous according to the level structure of gas molecule self.
In the such scheme, described electrode pair 101 is the platinum electrode in 1 micron in two gaps, forms highfield between described two platinum electrodes after the energising, makes interelectrode gas discharge build-up of luminance.
In the such scheme, described absorption air chamber 2 is open air chamber, and with environmental communication to be measured, the light that luminous discharge tube 1 sends is in this air chamber, and the characteristic wavelength composition is absorbed by selectivity.
In the such scheme, described emission spectrum spectral array 3 and absorption spectra spectral array 4 are the narrow band filter array.
In the such scheme, described narrow band filter array is formed by a series of 1-D photon crystal wave filters 301 parallel arranging, and each wave filter band passband rate scope is adjacent and do not repeat.
In the such scheme, described 1-D photon crystal wave filter 301, for the silicon groove sequence cascade of periodic arrangement forms, described sequence period, with its for wavelength relevant.
In the such scheme, described emission spectrum detection arrays 5 and absorption spectra detection arrays 6 are comprised of a series of anti-inclined to one side photodiodes, and corresponding one by one from different wave filter output channels.
(3) beneficial effect
As can be seen from the above technical solutions, the present invention has following beneficial effect
1), MEMS infrared emission formula gas sensor provided by the invention, excite gas luminescence to be measured, judge gas componant by analyzing the emission spectrum feature, and utilize this gas that the absorbance of the infrared light of characteristic wavelength is determined gas concentration.The means of spectral analysis are combined with the MEMS technology of inheriting the microelectronics advantage, and the sensitivity of sensor and sensitive range are not limited by sensitive material, and be applied widely, analysis precision is high, reliability is strong.
2), MEMS infrared emission formula gas sensor provided by the invention, utilize the multi-channel parallel wave filter to replace the raster in traditional spectral analysis device to realize light splitting, without movable structure, technique is simple, is easy to realize.
3), MEMS infrared emission formula gas sensor provided by the invention, utilize the cascade of 1-D photon crystal wave filter to realize step by step filter function, design easyly, can use need to adjust flexibly according to reality the parameters such as resolution.
4), red emission-type gas sensor of MEMS provided by the invention, compatible with standard CMOS process, can by CMOS technology and the correlation module of maturation, realize on the sheet integrated.
Description of drawings
Fig. 1 is MEMS infrared emission formula gas-sensitive sensor structure synoptic diagram provided by the invention;
Fig. 2 is MEMS infrared emission formula gas sensor luminous discharge tube circuit diagram provided by the invention;
Fig. 3 is MEMS infrared emission formula gas sensor spectral array structural representation provided by the invention;
Fig. 4 is MEMS infrared emission formula gas sensor filter unit structural representation provided by the invention;
Among the figure, luminous discharge tube 1, absorption air chamber 2, emission spectrum spectral array 3, absorption spectra spectral array 4, emission spectrum detection arrays 5, absorption spectra detection arrays 6, sparking electrode 101,1-D photon crystal wave filter 301.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, be instantiation below in conjunction with methenyl choloride steam in the analysis environments gas, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, Fig. 1 is MEMS infrared emission formula gas-sensitive sensor structure synoptic diagram provided by the invention, and this sensor mainly partly is comprised of luminous discharge tube 1, absorption air chamber 2, emission spectrum spectral array 3, absorption spectra spectral array 4, emission spectrum detection arrays 5, absorption spectra detection arrays 6 etc.
As shown in Figure 2, luminous discharge tube 1 is for being produced on the open architecture on the silicon chip, and there is platinum electrode 101 inside, and externally is furnished with matching network on the circuit.After the energising, be in the gas of electrode gap part, build-up of luminance discharge under the high field effect, and according to the outside electromagnetic radiation energy of the level structure of gas molecule, wherein the infrared light of penetrable monocrystalline silicon is after 3 light splitting of emission spectrum spectral array, and the difference of wavelength basis is launched in spatial order, and on the detecting unit of corresponding with it emission spectrum detection arrays 5, the intensity signal of the infrared light of different wave length is converted into electric signal output.
As shown in Figure 3, emission spectrum spectral array 3 and absorption spectra spectral array 4 are parallel photonic crystal filtering channel of arranging, and described photonic crystal filtering channel is the narrow band filter of 1-D photon crystal wave filter cascade formation.The logical scope of the band of each wave filter is adjacent and do not repeat, and covers the spectral range of analysis of this sensor.
As shown in Figure 4, described 1-D photon crystal wave filter is the periodicity silicon groove sequence that is produced on the silicon chip, and the infrared light wavelength that the cycle of described silicon groove sequence and the permission of wave filter are passed through has proportionate relationship.
After described infrared light enters and absorbs air chamber 2, fully act on gas in the air chamber, belong to the infrared light of this gas characteristic frequency, will be according to the height of gas concentration, the decay that occurrence degree is different.Transmitted light through different exit channel outgoing, and in absorption spectra detection arrays 6 with it on corresponding a series of detecting units, is converted into electric signal output with the infrared light strength information of each frequency content behind absorption spectra spectral array 4.
The infrared light strength signal of each wavelength that emission spectrum detection arrays 5 provides has embodied the emission spectrum information of gas to be measured.Analyze emission spectrum, locate at 2374.7nm, 1861.9nm, 1695.8nm, 1412.4nm, 1152.9nm etc., have obvious characteristic peak to occur, accordingly, can judge in the gas to be measured to contain methenyl choloride.
The strength signal of each wavelength infrared light that absorption spectra detection arrays 6 provides has embodied the absorption spectra information of gas to be measured.Analyze transmission spectrum, the strength retrogression has occured in the infrared light of characteristic wavelength after absorbing air chamber 2, by measuring damping capacity, can determine the concentration of air chamber 2 interior methenyl cholorides.
Above-described implementation example has carried out further detailed explanation to purpose of the present invention, technical scheme and beneficial effect.Institute it should be understood that the above only for implementation example of the present invention, is not limited to the present invention.All any modifications of making within the spirit and principles in the present invention, be equal to and replace or improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. MEMS infrared emission formula gas sensor, by exciting gas luminescence to be measured, analyze its emission spectrum and judge gaseous species, and determine the concentration of this gas by measuring absorbance, it is characterized in that this MEMS infrared emission formula gas sensor comprises luminous discharge tube (1), absorption air chamber (2), emission spectrum spectral array (3), absorption spectra spectral array (4), emission spectrum detection arrays (5) and the absorption spectra detection arrays (6) that is integrated on the silicon substrate; Wherein, described luminous discharge tube (1) is positioned at the middle part that absorbs air chamber (2), the two ends that absorb air chamber (2) are separately installed with emission spectrum spectral array (3) and absorption spectra spectral array (4), the outside of emission spectrum spectral array (3) further is equipped with emission spectrum detection arrays (5), and the outside of absorption spectra spectral array (4) further is equipped with absorption spectra detection arrays (6);
Wherein, emission spectrum spectral array (3) and absorption spectra spectral array (4) are parallel photonic crystal filtering channel of arranging, and described photonic crystal filtering channel is the narrow band filter of 1-D photon crystal wave filter (301) cascade formation; The logical scope of the band of each wave filter is adjacent and do not repeat, and covers the spectral range of analysis of this sensor.
2. MEMS infrared emission formula gas sensor according to claim 1, it is characterized in that, gas luminescence to be measured after this MEMS infrared emission formula gas sensor energising in the energizing gas luminotron (1), the light that luminous discharge tube (1) sends enters and absorbs air chamber (2), after inner gas to be measured interacts with absorbing air chamber (2), through absorption spectra spectral array (4) light splitting, and the transmitted intensity signal of going up heterogeneity in absorption spectra detection arrays (6) is converted to electric signal output; The light that luminous discharge tube (1) sends is pressed wavelength at space development through emission spectrum spectral array (3) light splitting, and is converted to electric signal output at the light intensity signal of the upper light with heterogeneity of emission spectrum detection arrays (5); This MEMS infrared emission formula gas sensor is determined gas componant by the emission spectrum feature of analytical gas, by gas to be measured in the measurement absorption air chamber absorption intensity of the infrared light of characteristic wavelength is determined gas concentration.
3. MEMS infrared emission formula gas sensor according to claim 1, it is characterized in that, described luminous discharge tube (1) is the open chamber that etching forms on silicon chip, this chamber interior has for the electrode pair of energizing gas ionic discharge (101), between electrode pair (101), form electric field after the energising, this electric field makes the gas ionization to be measured between electrode pair (101) gap, and luminous according to the level structure of gas molecule self.
4. MEMS infrared emission formula gas sensor according to claim 3, it is characterized in that, described electrode pair (101) is the platinum electrode in 1 micron in two gaps, forms highfield between described two platinum electrodes after the energising, makes interelectrode gas discharge build-up of luminance.
5. MEMS infrared emission formula gas sensor according to claim 1, it is characterized in that described absorption air chamber (2) is for open air chamber, with environmental communication to be measured, the light that luminous discharge tube (1) sends is in this air chamber, and the characteristic wavelength composition is absorbed by selectivity.
6. MEMS infrared emission formula gas sensor according to claim 1 is characterized in that, described 1-D photon crystal wave filter (301), for the silicon groove sequence cascade of periodic arrangement forms, described sequence period, with its for wavelength relevant.
7. MEMS infrared emission formula gas sensor according to claim 1, it is characterized in that, described emission spectrum detection arrays (5) and absorption spectra detection arrays (6) are comprised of a series of anti-inclined to one side photodiodes, and corresponding one by one from different narrow band filter output channels.
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| CN110462377A (en) * | 2016-12-09 | 2019-11-15 | 新加坡国立大学 | Gas sensor MEMS structure and its manufacturing method |
| CN114166709A (en) * | 2021-11-26 | 2022-03-11 | 沪东中华造船(集团)有限公司 | Oil mist sensor for ship engine room and oil mist cleaning method |
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| CN1464298A (en) * | 2002-06-14 | 2003-12-31 | 祥群科技股份有限公司 | Mini type infrared ray gas analysis apparatus |
| CN101470074A (en) * | 2007-12-26 | 2009-07-01 | 中国科学院微电子研究所 | MEMS spectrum gas-sensitive sensor |
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| JP2005121463A (en) * | 2003-10-16 | 2005-05-12 | Anritsu Corp | Gas sensor |
| DE102004010499A1 (en) * | 2004-03-04 | 2005-09-22 | Robert Bosch Gmbh | Microstructured sensor |
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| CN1464298A (en) * | 2002-06-14 | 2003-12-31 | 祥群科技股份有限公司 | Mini type infrared ray gas analysis apparatus |
| CN101470074A (en) * | 2007-12-26 | 2009-07-01 | 中国科学院微电子研究所 | MEMS spectrum gas-sensitive sensor |
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| JP特开2005-121463A 2005.05.12 |
| 高超群 等.光谱式MEMS/CMOS兼容气敏传感器.《半导体学报》.2008,第29卷(第10期),2043-2049. * |
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Effective date of registration: 20180227 Address after: 100086 Beijing city Huairou District Yanqi Yanqi Economic Development Zone South four Street No. 25 Building No. 3 hospital No. 307 Patentee after: Beijing Zhongke micro Intellectual Property Service Co., Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |