CN102211458A

CN102211458A - Liquid ejection head and method of manufacturing the same

Info

Publication number: CN102211458A
Application number: CN2011100706355A
Authority: CN
Inventors: 中本光
Original assignee: Brother Industries Ltd
Current assignee: Brother Industries Ltd
Priority date: 2010-03-30
Filing date: 2011-03-17
Publication date: 2011-10-12
Anticipated expiration: 2031-03-17
Also published as: JP5099163B2; EP2371546A1; US8684495B2; US20110242216A1; JP2011207060A; CN102211458B; EP2371546B1

Abstract

A liquid ejection head and a method of manufacturing the same. The liquid ejection head includes: a plate base material; and an actuator; wherein the plate base material has: ejection holes having recessed portions; and an ejection face having ejection openings; wherein the recessed portions include pairs thereof each constituted by two recessed portions located side by side and at least one of which has the ejection openings; wherein, where a shortest line segment of a certain pair is equal to or shorter than that of another pair, an average value of lengths of the respective recessed portions constituting the certain pair is not larger than that of lengths of the respective recessed portions constituting said another pair; and wherein a liquid repellent layer is formed on the bottom portion of the recessed portion having the ejection openings. The ejection opening could decrease the liquid ejection characteristic.

Description

The method of jet head liquid and manufacturing jet head liquid

Technical field

The present invention relates to a kind of jet head liquid, in this jet face, be formed with the injection opening that is used for liquid droplets, the invention still further relates to a kind of method of making jet head liquid with jet face.

Background technology

Existing a kind of ink gun with jet face in this jet face, is formed with water repellent layer on the periphery of nozzle opening, so that improve characteristics of inkjet.For example; patent documentation 1 (Japanese Patent Application Laid-Open No.2006-334910) discloses following technology: nozzle opening is formed in the base section of each elongated hole in the elongated hole that forms in jet face, so that the protection water repellent layer avoids being used for the wiper influence of wiping ink ejection face.

Summary of the invention

In the process of making such ink gun, when water repellent layer is formed on the ink ejection face, in each nozzle, all can form unwanted water repellent layer.Therefore, only, remove unwanted water repellent layer in each nozzle then by covering ink ejection face and ink ejection face is carried out mask with mask material.In above-mentioned technology, when covering jet face with mask material, the shape of the elongated hole that forms in jet face can cause the unequal or different mask material amount that enters the respective fine slotted hole with the position relation.Under the unequal situation of the amount of the mask material that enters the respective fine slotted hole, be difficult to accurately regulate the pressure that mask material is engaged to jet face, make mask material not enter each nozzle.This makes and be difficult to accurately only remove the water repellent layer that forms in each nozzle.Under water repellent layer remains in situation in the nozzle unequally, in nozzle, cause the variation of spray characteristic, cause the deterioration of recording characteristic.

In view of said circumstances is made the present invention, and the purpose of this invention is to provide a kind of jet head liquid that in spraying opening, can reduce the variation of liquid spray characteristic, and a kind of method of making jet head liquid.

Can realize above-indicated purpose according to the present invention that jet head liquid is provided, this jet head liquid comprises: plate substrate; And actuator, the liquid in this actuator configurations pair of panel base material applies drop and sprays energy; Wherein plate substrate has: a plurality of spray-holes that form on the thickness direction of this plate substrate in described plate substrate are used for liquid droplets; And jet face, this jet face has a plurality of injection openings at this jet face split shed, wherein by described a plurality of spray-holes and described a plurality of injection opening liquid droplets; Wherein jet face has a plurality of recesses that form in this jet face, and each recess at least one recess in described a plurality of recess has base section, and described a plurality of injection openings are at described base section split shed; Wherein a plurality of recesses comprise many to recess, the every pair of recess by and registration and two recesses having base section respectively constitute, spray opening and be formed at least one base section of base section; Wherein, the line of shortest length section of certain a pair of recess of the shortest single line section equals or is shorter than as connecting and composing under another situation to the line of shortest length section of recess of single line section the shortest in another line segment to the profile of corresponding two recesses of recess in the line segment of profile as corresponding two recesses that connect and compose certain a pair of recess, and the mean value of length that constitutes corresponding two recesses of this certain a pair of recess is equal to or less than and constitutes described another mean value to the length of corresponding two recesses of recess; Wherein on the base section of the recess that form to spray opening, be formed with the liquid repellent layer, wherein be formed on liquid repellent layer on the base section and be owing to enter recess and cover the mask material of liquid repellent layer and not removed layer.

Be to be noted that in the aforesaid liquid injector head a plurality of recesses can only be made of recess many, the every pair of recess by and registration and two recesses having base section respectively constitute.

In the jet head liquid of structure as mentioned above, when in making the process of jet head liquid, covering jet face, can make the amount of the mask material that enters corresponding recess even by mask material.As a result, can accurately adjust the amount of the mask material that enters corresponding recess, make mask material not enter the injection opening, thereby accurately only remove the liquid repellent layer that in spraying opening, forms.This makes it possible to suppress to spray the variation of liquid spray characteristic between the opening.In addition, when the wiper that is used to clean jet face contacts with jet face, can make wiper enter the degree of depth of corresponding recess or distance evenly.As a result, can clean jet face equably, and prevent the local deterioration of wiper and jet face.

In jet head liquid, mask material is to be crimped onto jet face at least to cover the material of liquid repellent layer.Remove the liquid repellent layer that not masked material covers.Mask material is the material of removing after removing the liquid repellent layer.

In jet head liquid, apply the liquid repellent agent by spraying and form described liquid repellent layer.

In jet head liquid, remove the liquid repellent layer that not masked material covers by the plasma etching process processes of using to the liquid repellent layer from the surface of the opposition side that is positioned at jet face of plate substrate.

In jet head liquid, by when being expressed to mask material on the jet face, mask material being crimped to jet face along the extruded member that moves with respect to plate substrate on the direction of line of shortest length section.

In jet head liquid, the roller transfer method of piling up the band (71) that described mask material is arranged by utilization forms described mask material.Extruded member is configured to the surface of opposition side on the surface that is positioned at the contact mask material of extrusion strip.

In jet head liquid, a plurality of recesses comprise two recesses, described two recesses and registration, and the line of shortest length section of described two recesses all in described a plurality of recesses are the shortest in to recess.Each recess in two recesses is equaling along the length on the direction of the line of shortest length section of described two recesses or is being shorter than each recess in the recess except that described two recesses along the length on the direction of the line of shortest length section of described two recesses.

According to aforesaid structure, each recess in two recesses is equaling along the length on the direction of the line of shortest length section of described two recesses or is being shorter than each recess in the recess except that described two recesses along the length on the direction of the line of shortest length section of described two recesses.It is too many to prevent reliably that mask material from entering two recesses.

In jet head liquid, and registration and line of shortest length section for two the shortest recesses along having identical length on the direction of the line of shortest length section of described two recesses.

According to aforesaid structure, two recesses have identical length in the direction along the line of shortest length section of two recesses.This can make that the inlet of mask material is even.

In jet head liquid, two recesses and registration and along having the length that differs from one another respectively on the direction of the line of shortest length section of two recesses.A plurality of recesses comprise with two recesses in the 3rd adjacent recess of a recess, wherein between this recess another recess in the 3rd recess and two recesses.Under the situation that a recess and the line of shortest length section of the 3rd recess are lacked than the line of shortest length section of two recesses, this recess is shorter along the length of the line of shortest length section of two recesses than another recess along the length of the line of shortest length section of two recesses.Under the situation of line of shortest length section than the line of shortest length segment length of two recesses of a recess and the 3rd recess, this recess is longer along the length of the line of shortest length section of two recesses than another recess along the length of the line of shortest length section of two recesses.

According to aforesaid structure, this recess is determined by the relation between another recess and the 3rd recess along the length of the line of shortest length section of two recesses.Therefore, it is even to make mask material enter the inlet of recess.

In jet head liquid, at this certain a pair of with this another to each centering of recess, along on the direction of the line of shortest length section of corresponding two recesses and the centre-to-centre spacing between the center of described corresponding two recesses of registration equal or be shorter than corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses.Equal or be shorter than under another situation to the line of shortest length section of recess in the recess in the line of shortest length section of corresponding two recesses that constitute certain a pair of recess, the mean value of length that constitutes corresponding two recesses of this certain a pair of recess is equal to or less than and constitutes described another mean value to the length of corresponding two recesses of recess.

The present inventor finds, along on the direction of the line of shortest length section of corresponding two recesses and the centre-to-centre spacing between the center of corresponding two recesses of registration than corresponding two recesses along under five times of big situations of the mean value of the length on the direction of the line of shortest length section of corresponding two recesses, less change the inlet that mask material enters recess by centre-to-centre spacing.Therefore, according to aforesaid structure, can make the amount of the mask material that enters recess even effectively.In addition, can prevent that centre-to-centre spacing from becoming long relatively, thereby prevent that jet head liquid from becoming bigger.

In jet head liquid, along on the direction of the line of shortest length section of corresponding two recesses and the centre-to-centre spacing between the center of corresponding two recesses of registration than corresponding two recesses along under five times of big situations of the mean value of the length on the direction of the line of shortest length section of corresponding two recesses, corresponding two recesses the mean value along the length on the direction of the line of shortest length section of corresponding two recesses equal other to recess along the maximum in the mean value of the length on the direction of this line of shortest length section, each that constitutes described other centering to two recesses of recess along on the direction of this line of shortest length section and registration.Each that constitutes described other centering is to equaling along the centre-to-centre spacing on the direction of the line of shortest length section of two recesses or be shorter than corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses between the center of two recesses of recess.

According to aforesaid structure, can prevent that the rigidity of jet head liquid or hardness from unnecessarily reducing.

In jet head liquid, many recess is comprised first pair of recess and second pair of recess, wherein, each centering of first pair and second centering, equaling along the centre-to-centre spacing on the direction of the line of shortest length section of corresponding two recesses or be shorter than corresponding two recesses between the center of corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses.Each of first pair and second centering is to all having the line of shortest length section that comprises in the scope in a plurality of scopes of the length of line of shortest length section.Corresponding two recesses of first pair of recess along corresponding two recesses of the mean value of the length on the direction of the line of shortest length section of corresponding two recesses and second pair of recess mutually the same along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses.

According to aforesaid structure, help the design of recess.

In jet head liquid, many recess is comprised first pair of recess and second pair of recess, wherein, each centering of first pair and second centering, equaling along the centre-to-centre spacing on the direction of the line of shortest length section of corresponding two recesses or be shorter than corresponding two recesses between the center of corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses.Each of first pair and second centering is to all being formed in the zone in a plurality of zones that are arranged on the jet face.Under the situation that the length of the line of shortest length section of two recesses of the length of the line of shortest length section of two recesses of first pair of recess and second pair of recess is equal to each other, corresponding two recesses of first pair of recess along corresponding two recesses of the mean value of the length on the direction of the line of shortest length section of corresponding two recesses of first pair of recess and second pair of recess identical along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses of second pair of recess.

According to aforesaid structure, further help the design of recess.

In jet head liquid, a recess of two recesses along the length on the direction of the line of shortest length section of two recesses than another recesses of two recesses along under the long situation of the length on the direction of the line of shortest length section of two recesses, each opening diameter in the opening diameter of the respective spray opening that forms in the base section of this recess is all big than each opening diameter in the opening diameter of the respective spray opening that forms in the base section of another recess.

According to aforesaid structure, can help to regulate the inlet that enters the mask material that sprays opening.

In jet head liquid, in jet face, be formed with a plurality of injection opening rows, wherein a plurality of injection openings each in a plurality of injection opening rows sprayed among the opening row and arranged in one direction.Form as the groove at this upwardly extending recess in side by at least two recesses that connect in one direction in the recess, at least two recesses in a plurality of recesses are corresponding with a plurality of injection openings that form in a plurality of injection opening rows.

According to aforesaid structure, form recess easily, and can make the amount of the mask material that enters recess even effectively.

In liquid droplet ejecting head, the width of this groove of conduct of groove constant on this direction along the length on the direction of line of shortest length section.

In jet head liquid, form a plurality of injection openings are limited by jet face and coating from the recess that jet face exposes.

According to aforesaid structure, can more easily form recess.

Can realize above-indicated purpose according to the present invention that the method for making jet head liquid is provided, this jet head liquid comprises: plate substrate, this plate substrate has: a plurality of spray-holes that form on the thickness direction of plate substrate in described plate substrate are used for liquid droplets; And jet face, this jet face has a plurality of injection openings at this jet face split shed, wherein by described a plurality of spray-holes and described a plurality of injection opening liquid droplets; And actuator, the liquid in this actuator configurations pair of panel base material applies drop and sprays energy; This method comprises: base material forms step, and this base material forms step and forms in plate substrate: a plurality of recesses that (a) form in jet face; (b) a plurality of spray-holes, a plurality of spray-holes have a plurality of injection openings of the base section split shed of each recess at least one recess of a plurality of recesses respectively; The liquid repellent layer forms step, and this liquid repellent layer forms step and form the liquid repellent layer on the jet face that forms a plurality of recesses; The crimping step, this crimping step is crimped onto jet face with mask material, makes mask material enter a plurality of recesses; The liquid repellent layer is removed step, and this liquid repellent layer is removed the liquid repellent layer that step is removed does not have masked material to cover; Mask material is removed step, and this mask material is removed step and remove mask material from plate substrate after the liquid repellent layer is removed step; Wherein base material formation step is following steps: form a plurality of recesses, it is many to recess to make a plurality of recesses comprise, the every pair of recess by and registration and two recesses having base section respectively constitute, spraying opening is formed at least one base section of base section, and make in the line segment of profile the line of shortest length section of certain a pair of recess of the shortest single line section equal or be shorter than as connecting and composing under another situation of single line section the shortest in another line segment that the mean value of length that constitutes corresponding two recesses of this certain a pair of recess is equal to or less than and constitutes described another mean value to the length of corresponding two recesses of recess to the line of shortest length section of recess to the profile of corresponding two recesses of recess as corresponding two recesses that connect and compose certain a pair of recess.

In the method for structure as mentioned above, when in making the process of jet head liquid, covering jet face, can make the amount of the mask material that enters corresponding recess even by mask material.As a result, can accurately adjust the amount of the mask material that enters corresponding recess, make mask material not enter the injection opening, thereby accurately only remove the liquid repellent layer that in spraying opening, forms.This makes it possible to suppress to spray the variation of liquid spray characteristic between the opening.In addition, when the wiper that is used to clean jet face contacts with jet face, can make wiper enter the degree of depth of corresponding recess or distance evenly.As a result, can clean jet face equably, and prevent the local deterioration of wiper and jet face.

In the method, crimping step is following steps: along relatively moving on the direction of line of shortest length section mask material is being crimped onto on the jet face when being expressed to mask material on the jet face by making extruded member.

According to aforesaid method, can make the amount of the mask material that enters recess even effectively.

In the method, it is following steps that base material forms step: form a plurality of recesses in plate substrate, make a plurality of recesses extend in one direction, and be arranged in parallel on the vertical direction vertical with this direction.The crimping step is following steps: move with respect to plate substrate on this direction by making extruded member, mask material is crimped onto on the jet face.

In the method, it is following steps that base material forms step: form a plurality of spray-holes and a plurality of recess in plate substrate, make a recess of two recesses along the length on the direction of the line of shortest length section of two recesses than another recesses of two recesses along under the long situation of the length on the direction of the line of shortest length section of two recesses, each opening diameter in the opening diameter of the respective spray opening that forms in the base section of this recess is all big than each opening diameter in the opening diameter of the respective spray opening that forms in the base section of another recess.

According to aforesaid method, can help to regulate the inlet that enters the mask material that sprays opening.

Description of drawings

When considered in conjunction with the accompanying drawings, will understand purpose of the present invention, feature, advantage and technology and industrial conspicuousness better by the detailed description of reading following embodiments of the invention, wherein:

Fig. 1 is the schematic diagram that illustrates as the internal structure of the ink-jet printer of embodiments of the invention;

Fig. 2 is the view that the upper surface of ink gun shown in Figure 1 is shown;

Fig. 3 is the enlarged drawing by single-point line area surrounded shown in Figure 2;

Fig. 4 is the cutaway view along the line IV-IV among Fig. 3;

Fig. 5 is the amplification view of nozzle bore shown in Figure 4;

Fig. 6 is the partial enlarged drawing of ink ejection face shown in Figure 4;

Fig. 7 is the block diagram that the process of making ink gun shown in Figure 1 is shown;

Fig. 8 A-8E is the view that is used to explain the process of making ink gun shown in Figure 4;

Fig. 9 is the view that is used to explain mask material crimping step shown in Figure 7;

Figure 10 is the partial enlarged drawing of ink ejection face of first modification of embodiment;

Figure 11 is the partial enlarged drawing of ink ejection face of another modification of embodiment; And

Figure 12 is the partial enlarged drawing of ink ejection face of another modification of embodiment.

The specific embodiment

Below, embodiments of the invention will be described with reference to the drawings.

Ink-jet printer 1 is the line color inkjet printer.As shown in Figure 1, printer 1 comprises the housing 1a with rectangular shape.Be provided with row's paper part 31 at part place, the top of housing 1a.The inside of housing 1a is divided into three space A, B, C in order from the upside of this housing 1a.Each space among space A and the B is the space that the paper path to the row's of extending to paper part 31 limits.Paper feeding and image is recorded on the paper in the A of space.In space B, accommodate one or more paper, and to every paper of space A supply.In the C of space, accommodate the ink supply source, to allow the supply China ink.

In the A of space, be provided with paper feed unit 20, (c) that (a) four ink guns 2, (b) are configured to paper feeding and be used to leader that guides by paper or the like.Each head in four statures 2 is line head, and described line head is long and have a rectangular shape substantially as outer shape on the main scanning direction as an example of a direction.2 lower surfaces that have respectively as ink ejection face 2a spray China ink as four kinds of colors of ink droplet, the i.e. China ink of magenta, cyan, yellow and black from described ink ejection face 2a respectively.2 are arranged to separate with predetermined spacing on the sub scanning direction vertical with main scanning direction.

As shown in Figure 1, paper feed unit 20 comprises: (a) leather belt roller 6,7; (b) hold the belt of paper supply for no reason 8 of roller 6,7; (c) on sub scanning direction, be arranged on the nip roll 5 and the peel plate 13 in paper feed belt 8 outsides; (d) on sub scanning direction, be arranged on the pressing plate 9 of paper feed belt 8 inboards and idler roller 10 or the like.Leather belt roller 7 is driven rollers by feed motor M rotation on the clockwise direction in Fig. 1.During the rotation of leather belt roller 7, paper feed belt 8 is along thick arrow rotation or circulation shown in Figure 1.Leather belt roller 6 is the driven vollers that rotate on the clockwise direction among Fig. 1 that are rotated in by paper feed belt 8.Nip roll 5 is arranged in the face of leather belt roller 6, and is configured to every paper P of the supply along the upstream leader from paper supply unit 1b is expressed on the outer surface 8a of paper feed belt 8.Peel plate 13 is arranged in the face of leather belt roller 7, and is configured to peel off every paper P from outer surface 8a, so that every paper P is presented or be delivered to the downstream leader.Pressing plate 9 is arranged in the face of four statures 2, and from the top part of this paper feed belt 8 of paper feed belt 8 inner support.As a result, between outer surface 8a and corresponding 's 2 ink ejection face 2a, be formed with the space that is suitable for the image record.The bottom part of idler roller 10 extruding downwards or pushing leather belt roller 7 is removed the lax of paper feed belt 8.

Leader is arranged in the opposition side of paper feed unit 20 on sub scanning direction.The upstream leader comprises guiding

piece

27a, 27b and a pair of paper feed roller 26.This upstream leader is connected to each other paper supply unit 1b and paper feed unit 20.The downstream leader comprises guiding

piece

29a, 29b and two pairs of paper feed rollers 28.This downstream leader is connected to each other paper feed unit 20 and row's paper part 31.

Paper supply unit 1b is arranged in the space B.Paper supply unit 1b comprises sheet feed stacker 23 and paper feed roller 25.Sheet feed stacker 23 can be installed in housing 1a and go up and can dismantle from this housing 1a.Sheet feed stacker 23 has the box-like shape of upward opening, so that hold plurality of sheets of paper P.Paper feed roller 25 leader supply upstream is contained in uppermost a piece of paper among the paper P in the sheet feed stacker 23.

As mentioned above, in space A and space B, be formed with the paper path via paper feed unit 20 row's of extending to paper parts 31 from paper supply unit 1b.Present from the next paper P of sheet feed stacker 23 supplies to paper feed unit 20 by paper feed roller 26 along guiding piece 27a, 27b.When paper P is presenting by the position under 2 on the sub scanning direction, from the beginning 2 spray ink droplets in order, with record on paper P or form coloured image.At the right-hand member release papers P of paper feed belt 8, and upwards present this paper P by two paper feed rollers 28 along guiding piece 29a, 29b.Then, by opening 30 paper P is discharged on the paper part 31.

At this, sub scanning direction is parallel to the paper feed direction by paper feed unit 20 paper feeding P, and main scanning direction is parallel to horizontal plane and perpendicular to sub scanning direction.

In the C of space, be provided with and be installed in that housing 1a goes up and can be from the ink container unit 1c of housing 1a dismounting.Ink container unit 1c holds four ink containers 49 that are arranged to a row therein.By unshowned pipeline corresponding China ink in 2 a supply ink container 49.

Next will explain 2 with reference to figure 2-6.Be to be noted that in Fig. 3 for the purpose that is easier to understand illustrates balancing gate pit 110, hole 112 and nozzle bore 108 with solid line, but these elements are positioned at actuating unit 21 belows, and therefore should illustrate with dotted line.In addition, because four statures 2 have identical construction, so for simplicity, only the stature in described 2 is given an explaination.

As shown in Figure 2, four actuating units 21 are fixed to the upper surface 15a of channel unit 15.Shown in Fig. 3 and 4, in channel unit 15, be formed with ink passage with a plurality of balancing gate pits 110 grades.Each actuating unit in the actuating unit 21 includes respectively a plurality of actuators corresponding with balancing gate pit 110, and has the China ink that is used for by being driven by unshowned driver IC optionally balancing gate pit 110 and apply the function of spraying energy.

Channel unit 15 has rectangular shape.The upper surface 15a of channel unit 15 has ten ink supply opening 105b at this upper surface 15b split shed, and is black to described ten ink supply opening 105b supplies from unshowned black memory.Shown in Fig. 2 and 3, in channel unit 15, be formed with: (a) the collector path 10 5, two corresponding ink supply open communication among each the collector passage in the described collector path 10 5 and the ink supply opening 105b; (b) secondary collector path 10 5a, described secondary collector path 10 5a is from each collector path 10 5 branch.The lower surface of channel unit 15 is formed with a large amount of ink-jet opening 108a (opening in respective nozzle hole 108), so that be arranged to matrix as ink ejection face 2a in this ink ejection face 2a.Similarly, a large amount of balancing gate pits 110 form and are arranged to matrix in the upper surface 15a of channel unit 15.

In the present embodiment, with actuating unit 21 in the opposed zone of each actuating unit in the balancing gate pit that forms 110 constitute 16 rows of balancing gate pits, in each row of balancing gate pit of the described row of 16 balancing gate pits, balancing gate pit 110 is arranged to mutual spaced at equal intervals on main scanning direction.These balancing gate pits come on the sub scanning direction and are arranged in parallel.Corresponding with the profile (trapezoidal shape) of each actuating unit in the actuating unit 21, the quantity of the balancing gate pit 110 that comprises among each row of balancing gate pit in the row of balancing gate pit from the longer sides of the trapezoidal shape of each actuating unit 21 towards reducing gradually than minor face.Ink-jet opening 108a is also to arrange with the similar mode of the arrangement of balancing gate pit 110.Therefore, corresponding with the row of balancing gate pit as shown in Figure 6, the ink-jet opening 108a that forms in ink ejection face 2a constitutes 16 ink-jet opening rows, and in described 16 ink-jet openings row, ink-jet opening 108a is arranged on the main scanning direction.The ink-jet opening comes on the sub scanning direction and is arranged in parallel.

As shown in Figure 4, channel unit 15 is made of nine plate 122-130 and coating 131.Every block of plate among nine plate 122-130 is by forming such as stainless metal material, and is formed on the surface of plate 130 by the coating 131 that nickel forms.Among coating 131 and the plate 122-130 each all has rectangle plane elongated on main scanning direction.

The through hole that forms by corresponding plate 122-130 communicates with each other by plate 122-130 is piled up in the location each other.As a result, in channel unit 15, be formed with outlet and balancing gate pit 110 via secondary collector path 10 5a, corresponding secondary collector path 10 5a extend to the ink-jet opening 108a of nozzle bore 108 from four collector path 10s 5 a large amount of independent ink passage 132.

Transfer to the secondary collector path 10 5a from collector path 10 5 via the China ink that ink supply opening 105b is fed to the channel unit 15 from black memory.China ink among the secondary collector path 10 5a flows into each the independent ink passage in the independent ink passage 132, and arrives corresponding in the nozzle bore 108 nozzle bore via a corresponding hole in the hole 112 that is used separately as limiter with via corresponding in the balancing gate pit 110 balancing gate pit.

The lower surface of nozzle plate 130 is ink ejection face 2a.As illustrated in Figures 5 and 6, be formed with ten groove 109a and six groove 109b of extending in ink ejection face 2a on main scanning direction, six groove 109b have than the little constant width of each groove 109a respectively and extend on main scanning direction.Among groove 109a, the 109b each all has specific width on sub scanning direction.Groove 109a, 109b are arranged in parallel on sub scanning direction.In the base section of each in groove 109a, 109b (promptly on the part of the bottom that limits each groove 109a, 109b), ink-jet opening 108a is arranged to provide single ink-jet opening row on main scanning direction.On the other hand, by a plurality of recesses being connected to each other form among groove 109a, the 109b each by connecting groove (coupling part).In each recess in recess, be furnished with the one or more ink-jet openings among the ink-jet opening 108a that constitutes identical ink-jet opening row.Each groove 109a, 109b limit by the inner wall surface of the elongated hole of the lower surface of nozzle plate 130 and coating 131, and this elongated hole exposes ink-jet opening row.In addition, on the whole ink ejection face 2a (except that ink-jet opening 108a) of the respective base part that comprises groove 109a, 109b, be formed with and refuse water (liquid) layer 2b.The thickness (being the degree of depth of groove 109a, 109b) that is to be noted that coating 131 is 2 μ m.

Facing in the zone of actuating unit 21 of ink ejection face 2a, on sub scanning direction, be furnished with from a side (upside Fig. 6) in order: (a) the groove group X1 that constitutes by two groove 109a; (b) three groove group X2-X4 that constitute by two groove 109a and two groove 109b between two groove 109a respectively; (c) the groove group X5 that constitutes by two groove 109a.Each groove among the groove 109a all has the width (length on sub scanning direction) of 0.2mm, and each groove among the groove 109b all has the width of 0.1mm.

Adjacent one another are and belong to that the centre-to-centre spacing on sub scanning direction is 1.78mm (l between per two groove 109a of groove group different among the groove group X1-X5 ₁=1.78mm).In other words, the distance on sub scanning direction between the center on the sub scanning direction at the center on the sub scanning direction and another groove 109a of a groove 109a is 1.78mm, wherein said two groove 109a are adjacent one another are on sub scanning direction, and partly constitute different groove groups in groove group X1-X5.In each groove group in groove group X1, X5, the centre-to-centre spacing between the groove 109a on sub scanning direction is 0.75mm (l ₄=0.75mm).In other words, in each groove group in groove group X1, X5, the center on sub scanning direction of a groove among the groove 109a and the distance on sub scanning direction between the center on the sub scanning direction of another groove among the groove 109a are 0.75mm, and wherein said two groove 109a are adjacent one another are on sub scanning direction.In each groove group in groove group X2-X4, the centre-to-centre spacing between groove 109a adjacent one another are and the groove 109b on sub scanning direction is 0.5mm (l ₂=0.5mm).In other words, in each groove group in groove group X2-X4, the center on sub scanning direction of a groove among the groove 109a and the distance on sub scanning direction between the center on the sub scanning direction of a groove among the groove 109b are 0.5mm, and wherein said two groove 109a are adjacent one another are on sub scanning direction.In addition, in each the groove group in groove group X2-X4, the centre-to-centre spacing between the groove 109b adjacent one another are on sub scanning direction is 0.24mm (l ₃=0.24mm).In other words, in each groove group in groove group X2-X4, the center on sub scanning direction of a groove among the groove 109b and the distance on sub scanning direction between the center on the sub scanning direction of another groove among the groove 109b are 0.24mm, and wherein said two groove 109b are adjacent one another are on sub scanning direction.

So describes, adjacent one another are and two grooves that have in groove by the respective profile of the shortest line segment connection have the respective width that is equal to each other and lacks than the width of each groove except that described groove respectively in groove 109a, 109b.In the present embodiment, in

groove

109a, 109b on sub scanning direction two the shortest groove 109b of separation distance have and be equal to each other and shorter than the width of each groove 109a respectively respective width.The shortest separation distance is 0.14 (0.1-0.24) mm in the present embodiment.Be to be noted that separation distance is the distance on sub scanning direction between two grooves among groove 109a, the 109b.

In addition, separation distance in

groove

109a, 109b between two grooves adjacent one another are equals or is shorter than under five times the situation of mean value of width of corresponding two grooves, separation distance between two grooves is short more respectively, and then the width corresponding average with corresponding two grooves is more little respectively.In other words, equal or be shorter than under five times the situation of mean value of width of corresponding two grooves at the separation distance between per two grooves of

groove

109a, 109b, wherein the separation distance between certain a pair of groove is shorter to the separation distance between the groove than another, then the mean value of the respective width of this certain a pair of groove than this another little to the mean value of the respective width of groove.Particularly, the mean value with the respective width of the separation distance of 0.55 (0.2-0.75) mm, two groove 109a adjacent one another are is 0.2mm.Mean value with the respective width of the separation distance of 0.35 (0.15-0.50) mm groove 109a adjacent one another are and groove 109b is 0.15mm.Mean value with the respective width of the separation distance of 0.14mm two groove 109b adjacent one another are is 0.1mm.

On the other hand, under the situation of the separation distance between two grooves of

groove

109a, 109b than five double-lengths of the mean value of the width of corresponding two grooves, the mean value of the width of corresponding two grooves equals to tackle mutually the value of the maximum (the longest) in the mean value of width of groove, and wherein said many separation distances to every pair in groove groove equal or be shorter than five times of mean value of the width of corresponding two grooves.Particularly, as mentioned above, each separation distance equals or maximum (the longest) value that is shorter than in the mean value of five times the width of tackling groove mutually of mean value of width of corresponding two grooves is 0.2mm.Therefore, the mean value with the respective width of the separation distance of 1.58 (0.2-1.78) mm groove 109a adjacent one another are is 0.2mm.

In addition, under the situation that has the 3rd groove 109b, wherein the 3rd groove 109b and two groove 109a, another groove 109a among the 109b lays respectively at the opposition side (that is to say that the 3rd groove 109b is positioned at the opposite side that is different from another groove 109a of this groove 109b) of this groove 109b, the 3rd groove 109b and adjacent one another are and have two groove 109a of different in width, a groove 109b among the 109b is adjacent, and wherein the separation distance between this groove 109b and the 3rd groove 109b is than two groove 109a, separation distance between the 109b is short, and then the width of this groove 109b is less than the width of another groove 109a.On the other hand, groove 109a in two

groove

109a, 109b and the separation distance between the 3rd groove 109a are than under the long situation of the separation distance between two groove 109a, the 109b, and the width of this groove 109a is bigger than the width of another groove 109b.

For example, groove group X2 in the present embodiment with the separation distance of 0.35mm under the situation of groove 109a adjacent one another are and groove 109b, as the groove 109a of a groove among two groove 109a, the 109b and as the separation distance between the groove 109a of the 3rd groove is 1.58mm, wherein the 3rd groove 109a is adjacent with this groove 109a, and wherein the 3rd groove 109a and another groove 109b lay respectively at the opposition side (that is to say that the 3rd groove 109a is positioned at the opposite side that is different from another groove 109b of this groove 109a) of this groove 109a.Therefore, the width of this groove 109a (0.2mm) is bigger than the width (0.1mm) of this another groove 109b.On the contrary, under the situation of the separation distance of groove group X2 groove 109a adjacent one another are and groove 109b with 0.35mm, as the groove 109b of a groove among two groove 109a, the 109b and as the separation distance between the groove 109b of the 3rd groove is 0.14mm, wherein the 3rd groove 109b is adjacent with this groove 109b, and wherein the 3rd groove 109b and another groove 109a lay respectively at the opposition side (that is to say that the 3rd groove 109b is positioned at the opposite side that is different from another groove 109a of this groove 109b) of this groove 109b.Therefore, the width of this groove 109b (0.1mm) is littler than the width (0.2mm) of this another groove 109a.

Next will explain and make a method of 2, concentrate on the step that is used to form nozzle plate 130.As shown in Figure 7, make a method of 2 and comprise that nozzle opening forms that step (base material forms step (process)), water repellent layer form step (process), mask material crimping step (process), water repellent layer removes step (process) and mask material is peeled off (removal) step (process).Shown in Fig. 8 A, form in the step at nozzle opening, pass the metallic plate base material that is used to form nozzle plate 130 and form each nozzle bore 108, thereby each nozzle bore 108 is tapered towards ink ejection face 2a.Particularly, by be positioned at the surperficial stripper plate base material as the opposition side on the surface of ink ejection face 2a of tapered punch from plate substrate, the far-end take-through plate base material of drift thus.Polish ink ejection face 2a then, to remove the burr that on the periphery of the end of each nozzle bore 108, forms.As a result, in the end in respective nozzle hole 108, form the ink-jet opening 108a that has the prodefined opening diameter respectively.

Shown in Fig. 8 B, the ink ejection face 2a (having the ink-jet opening 108a at this ink ejection face 2a split shed) that is formed with the plate substrate of nozzle bore 108 therein goes up and forms nickel coating 131.After the mask in the zone of groove 109a to be formed, the 109b of ink ejection face 2a, by being immersed electrolyte, ink ejection face 2a on ink ejection face 2a, carries out electrolytic ni plating, on ink ejection face 2a, form coating 131 thus.

Particularly, the photoresists sheet is sticked on the whole ink ejection face 2a, make the exposure of photoresists sheet via mask then.Mask has the opening of opening therein, and described opening is corresponding with ink-jet opening 108a respectively.Each opening all has the center line of the width at the center of passing corresponding ink-jet opening 108a, and has about five times width of the corresponding ink-jet opening 108a that reaches the opening diameter that for example has about 20 μ m.Opening equals the distance between two oblique lines of corresponding two actuating units 21 substantially in the length on the longitudinal direction of this opening, described oblique line in actuating unit 21 opposed zones toward each other.In plane, each the inkjet mouth row among the ink-jet opening row is included in corresponding in the opening opening.After exposure, by the unexposed part of developer removal resist sheet, the part of having exposed of resist sheet is retained on the ink ejection face 2a thus.The complete jet of sealed mouth row's of the expose portion of resist sheet ink-jet opening 108a.Under this state, carry out metallide, for example form the coating 131 of thickness thus with 2 μ m.Cleaning nozzle plate 130 is to remove mask material then, and

groove

109a, 109b are formed among the ink ejection face 2a thus.

Shown in Fig. 8 C, form in the step at water repellent layer, form at nozzle opening and form water repellent layer 2b on the ink ejection face 2a that is formed with

groove

109a, 109b in the step.Particularly, to ink ejection face 2a coating water repellent, then nozzle plate 130 is used heat treatment by spraying, to form water repellent layer 2b.In the coating water repellent, the part of water repellent enters nozzle bore 108 by corresponding ink-jet opening 108a, thus the unwanted water repellent layer 2b ' of local formation on the inner wall surface of each nozzle bore 108.Be to be noted that and pass through PVD (evaporation) or chemical vapor deposition (evaporation) formation water repellent layer 2b.

Shown in Fig. 8 D, in mask material crimping step, mask material 72 is crimped onto together with the ink ejection face 2a that is formed with water repellent layer 2b by the roller transfer method.Particularly, as shown in Figure 9, make roller 75 rotation and end from two opposite ends on main scanning direction of ink ejection face 2a in contact band 71 move to the other end, make and face under the state of ink ejection face 2a, mask material 72 is expressed on the ink ejection face 2a with specific pressure at the lip-deep mask material 72 that remains in band 71.On the direction vertical, apply the extruding force of roller 75 with the direction of groove 109a, 109b extension.As mentioned above, separation distance between two grooves in groove 109a, 109b equals or is shorter than under five times the situation of mean value of width of corresponding two grooves, separation distance between two grooves is short more respectively, and then the width corresponding average with corresponding two grooves is more little respectively.Therefore, when mask material 72 is crimped to ink ejection face 2a, make the amount of the mask material 72 that enters corresponding recesses 109a, 109b even or equal.Therefore, can prevent that via the pressure that band 71 pushes mask materials 72 mask material 72 from entering nozzle bore 108 by dancer rools 75.Even mask material 72 has entered nozzle bore 108, the amount that enters the mask material 72 in respective nozzle hole 108 also is uniform.

Shown in Fig. 8 E, in water repellent layer is removed step, nozzle plate 130 is used plasma etching process processes from the surface of the opposition side that is located at ink ejection face 2a masked the mask material crimping step of nozzle plate 130.As a result, remove the unwanted water repellent layer 2b ' of not masked material 72 masks that on the inner wall surface of each nozzle bore 108, form.

In the mask material strip step, peel off or remove mask material 72 from the ink ejection face 2a that water repellent layer is removed step, has removed unwanted water repellent layer 2b ' of nozzle plate 130.Then, cleaning and dry nozzle plate 130.As a result, finish formation nozzle plate 130.

As mentioned above, in 2 ink ejection face 2a of present embodiment, separation distance between two grooves in groove 109a, 109b equals or is shorter than under five times the situation of mean value of width of corresponding two grooves, separation distance between two grooves is short more respectively, and then the width corresponding average with corresponding two grooves is more little respectively.Therefore, when in mask material crimping step mask material 72 being crimped to ink ejection face 2a, it is even to make mask material 72 enter the pressure of corresponding recesses 109a, 109b.That is to say, make the amount of the mask material 72 that enters corresponding recesses 109a, 109b even.Therefore, can prevent that via the pressure that band 71 pushes mask materials 72 mask material 72 from entering nozzle bore 108 by dancer rools 75.As a result, can accurately only remove the water repellent layer 2b ' that in each spray-hole 108, forms, thus the variation that suppresses to spray characteristics of inkjet between the opening 108a.Equally, when the wiper that is used to clean ink ejection face 2a contacts with ink ejection face 2a, can make wiper enter the degree of depth of corresponding grooves 109a, 109b or distance evenly.As a result, can clean ink ejection face 2a equably, and prevent the local deficiency that contacts pressure of wiper and local deterioration of ink ejection face 2a and wiper.

In addition, separation distance between two grooves in

groove

109a, 109b is longer than under five times the situation of mean value of width of corresponding two grooves, unlikely changes the pressure (promptly entering the amount of the mask material 72 of corresponding

recesses

109a, 109b) that mask material 72 enters corresponding

recesses

109a, 109b by separation distance.Therefore, only the separation distance between two grooves in

groove

109a, 109b equals or is shorter than under five times the situation of mean value of width of corresponding two grooves, could pass through to change the mean value of the respective width of every couple of

groove

109a, 109b, it is even to make mask material 72 enter the pressure of corresponding

recesses

109a, 109b effectively.In addition, can prevent that separation distance from becoming long relatively, thus prevent 2 become bigger.

Under the situation of the separation distance between two grooves of

groove

109a, 109b than five double-lengths of the mean value of the width of corresponding two grooves, the mean value of the width of corresponding two grooves equals to tackle mutually maximum (the longest) value in the mean value of width of

groove

109a, 109b, and wherein the separation distance of every pair of groove in the groove equals or be shorter than five times of mean value of the width of corresponding two grooves in pairs.This helps to design groove 109a, 109b.In addition, can prevent that the rigidity of nozzle plate 130 or hardness from reducing.The reduction of the rigidity of nozzle plate 130 causes the reduction of 2 rigidity, this can be when being installed on the printer 1 with 2 (especially under elongated 2 situation) cause a distortion of 2.Because 2 distortion reduces recording quality, make and keep recording quality so width is maintained the value that is equal to or less than predetermined value.

In addition, in

groove

109a, 109b on sub scanning direction two the shortest groove 109b of separation distance have the respective width that is equal to each other and equals or be shorter than the width of each groove 109a respectively.Therefore, it is too many to prevent reliably that mask material 72 from entering hithermost each other two groove 109b, and it is even to make mask material 72 enter the pressure of two groove 109b, thereby makes the inlet of mask material 72 even.

In addition, under the situation that has the

3rd groove

109a or 109b, wherein the

3rd groove

109a or 109b are adjacent with a groove adjacent one another are and that have among two groove 109a, the 109b of different width, and the

3rd groove

109a or 109b are arranged in the opposite side of another groove that is different from two

groove

109a, 109b of the groove of two

groove

109a, 109b, and the size relationship of then tackling mutually in the width of

groove

109a, 109b is determined by the size relationship in the separation distance of tackling

groove

109a, 109b mutually.Therefore, it is even to make mask material 72 enter the pressure of two

groove

109a, 109b, thereby makes the inlet of mask material 72 even.

In addition, the width of each groove among groove 109a, the 109b on its whole length (except that its opposite ends) is constant, and this helps to form groove 109a, 109b.In addition, it is even to make mask material 72 enter the pressure of corresponding

recesses

109a, 109b effectively, thereby makes the inlet of mask material 72 even.

In addition, each among groove 109a, the 109b limits by the inner wall surface of the elongated hole of the lower surface of nozzle plate 130 and coating 131 correspondences, and this elongated hole exposes ink-jet opening row.This further helps to form

groove

109a, 109b.

In addition, in mask material crimping step, make roller 75 the contact band 71 in the rotation and on main scanning direction an end from the opposite ends of ink ejection face 2a move to the other end, make and face under the state of ink ejection face 2a, mask material 72 is expressed on the ink ejection face 2a at the lip-deep mask material 72 that remains in band 71.Therefore, it is even to make mask material 72 enter the pressure of corresponding

recesses

109a, 109b, thereby makes the inlet of mask material 72 even.

＜the first modification 〉

In the above-described embodiments, as groove 109a, separation distance between two grooves among the 109b reduces very little, the mean value of the width of corresponding two grooves reduces, but following mean value can be mutually the same: corresponding two recesses that (a) have a separation distance that comprises in the scope in a plurality of scopes of the length of corresponding separation distance along the mean value of the length on the direction of the line of shortest length section of described two recesses and corresponding other two recesses of (b) having a separation distance that in a scope, comprises at mean value along the length on the direction of the line of shortest length section of described other two recesses.For example, this structure is applicable to that separation distance between two grooves equals or be shorter than five times the situation of mean value of the width of corresponding two grooves.Particularly, as shown in figure 10, the scope from five times separation distance of the mean value of the width that equals corresponding recesses to the separation distance of the separation distance of minimum is divided into a plurality of scopes.For example, the scope of a separation distance in the separation distance is set for the scope of the separation distance of the twice of mean value of the width that equals corresponding two grooves or three times.In this case, each is to having two groove 109a, 109b (the centre-to-centre spacing l of the separation distance that comprises in identical separation distance scope ₂Be 0.50mm, and separation distance is 0.35 (0.15-0.50) mm) and other two groove 109a, 109b (centre-to-centre spacing l ₂' be 0.60mm, and separation distance is 0.45 (0.15-0.60) mm) have the identical mean value (0.15mm) of its width.In this case, the width of corresponding two grooves can be mutually the same and can be differed from one another.This further helps the design of groove.

In addition, the present invention is applicable to following structure.For example, shown in Figure 11 and 12, two grooves (it should be noted along sub scanning direction a plurality of zones adjacent one another are in each zone therein, a plurality of zones are the zone that forms groove group X6-X10 in Figure 11, and be the zone that forms groove group X11-X15 in Figure 12) in same area (in Figure 11, form the zone of groove group X8 and in Figure 12, form the zone of groove group X13) in two grooves between separation distance and same area in other two groove between separation distance identically (be to be noted that separation distance is 0.55mm (0.75mm (=l in Figure 11 ₅=l ₆=l ₇)-0.2mm), and be 0.35mm (0.50mm (=l in Figure 12 ₁₀=l ₁₁=l ₁₂=l ₁₆)-0.15mm)) under the situation, the mean value of the width of corresponding two grooves in same area can with the mean value identical (mean value is 0.2mm in Figure 11, and is 0.15mm in Figure 12) of the width of corresponding other two groove in the same area.The width of corresponding two groove 109a in same area can be identical width as shown in figure 11, and can differ from one another as shown in figure 12.This further helps the design of groove.

＜the second modification 〉

In the above-described embodiments, equate at all opening diameters of the ink-jet opening 108a of the base section split shed of

groove

109a, 109b, but the opening diameter of ink-jet opening 108a can change between groove.For example, the opening diameter of each the ink-jet opening among the ink-jet opening 108a of another groove in the comparable described groove adjacent one another are of the opening diameter of each the ink-jet opening among the ink-jet opening 108a of a groove in the groove adjacent one another are is big.Under the situation that this printer 1 constitutes in this mode, preferably the size relationship of the respective width of two grooves of opening is identical respectively with described ink-jet opening for the size relationship of the opening diameter of the ink-jet opening that differs from one another.The pressure that this helps to regulate the extruding mask material makes that mask material does not enter the ink-jet opening in mask material crimping step.

Although below described embodiments of the invention, but be understood that, the present invention is not limited to the details of illustrated embodiment, but under situation without departing from the spirit and scope of the present invention, can realize by various variations and the modification that those skilled in the art can expect.In the above-described embodiments, ink-jet opening 108a is at the base section split shed of the corresponding recesses 109a, the 109b that extend along main scanning direction, but groove can extend being different from the direction of main scanning direction, and can extend on different directions.In addition, replace groove, the ink-jet opening can be at the base section split shed that has respectively such as the recess of another round-shaped shape.For example, under the situation that adopts the circular recess part, the preferably coincidence each other of center of a corresponding recess in the center of each ink-jet opening and the recess.

In addition, one or more ink-jet openings can be at the base section split shed of each groove or recess.In addition, can there be the ink-jet openings in the base section of a recess in groove in two grooves adjacent one another are or two recesses adjacent one another are.Be to be noted that in this case the separation distance of two grooves adjacent one another are or two recesses adjacent one another are is determined by the length of the respective profile line of shortest length section connected to one another that makes two grooves or two recesses.In addition, the width of each groove or each recess all has the length identical with line segment.

In addition, in the above-described embodiments, separation distance between two grooves in

groove

109a, 109b equals or is shorter than under five times the situation of mean value of width of corresponding two grooves, separation distance between two grooves is short more respectively, then the width corresponding average with corresponding two grooves is more little respectively, but this printer 1 is not limited to this structure.For example, even this printer 1 can be configured such that the separation distance between two grooves is short more respectively under the situation of separation distance than five double-lengths of the mean value of the width of corresponding two grooves, then the width corresponding average with corresponding two grooves is more little respectively.

In addition, in the above-described embodiments, under the situation of separation distance between two grooves in

groove

109a, 109b than five double-lengths of the mean value of the width of corresponding two grooves, the mean value of corresponding two grooves equals maximum (the longest) value in the mean value of width of corresponding groove, wherein in pairs the separation distance of every pair of groove in the groove is equal to or is shorter than five times of mean value of the width of corresponding two grooves, but the mean value of corresponding two grooves can be than maximum (the longest) value that value is big.

In addition, in the above-described embodiments, two the shortest groove 109b of separation distance have the respective width that is equal to each other and equals or be shorter than the width of each groove 109a respectively on sub scanning direction in

groove

109a, 109b, but this printer 1 is not limited to this structure.For example, two groove 109b can have different width.In this case, a width in the width can be greater than the width of groove 109b.

In addition, in the above-described embodiments, under the situation that has the 3rd groove 109a or 109b, wherein the 3rd groove 109a or 109b are with adjacent one another are and have two groove 109a of different width, a groove among the 109b is adjacent, and the 3rd groove 109a or 109b are positioned at two groove 109a, a groove among the 109b be different from two groove 109a, the opposite side of another groove among the 109b, then tackle groove 109a mutually, size relationship in the width of 109b is by tackling groove 109a mutually, size relationship in the separation distance of 109b is determined, but this printer 1 is not limited to this structure.That is to say, tackle the width of groove 109a, 109b mutually and can irrespectively determine with the size relationship in the separation distance of tackling groove 109a, 109b mutually.For example, groove in two groove 109a, 109b and the separation distance between the 3rd groove 109a or the 109b are than under the short situation of the separation distance between two groove 109a, the 109b, and the width of another groove among the comparable two groove 109a of the width of a groove among two groove 109a, the 109b, the 109b is big.In addition, groove in two groove 109a, 109b and the separation distance between the 3rd groove 109a or the 109b are than under the long situation of the separation distance between two groove 109a, the 109b, and the width of another groove among the comparable two groove 109a of the width of a groove among two groove 109a, the 109b, the 109b is little.

In addition, in the above-described embodiments, the width of each groove among groove 109a, the 109b is all constant, but can change at the part place of groove.For example, each connection groove can have the width littler than other parts.

In addition, in the above-described embodiments, each among groove 109a, the 109b limits by the inner wall surface in the respective elongated hole of the lower surface of nozzle plate 130 and coating 131, and this elongated hole exposes ink-jet opening row, but this printer 1 is not limited to this structure.For example, can form among groove 109a, the 109b each by nozzle plate 130 being carried out etching and processing, punch process or machining.

In addition, in the above-described embodiments, in mask material crimping step, roller 75 is rotated in contact zones sill 71 and on main scanning direction an end from the opposite ends of ink ejection face 2a move to the other end, make at the lip-deep mask material 72 that remains in band 71 in the face of under the state of ink ejection face 2a, mask material 72 is expressed on the ink ejection face 2a, but this printer 1 is not limited to this structure.For example, 2 can under the fixing state of roller 75, move.In addition, can be with arbitrary mechanism as the mechanism that mask material 72 is expressed on the ink ejection face 2a.For example, the extruded member with compressive surface can be used for mask material 72 is expressed to the whole zone of ink ejection face 2a.

In the above-described embodiments, the present invention is applicable to and is configured to spray 2 of ink droplet, but the present invention is also applicable to the arbitrary jet head liquid that is configured to spray the liquid that is different from China ink.

Claims

1. jet head liquid comprises:

Plate substrate; With

Actuator, the liquid in the paired described plate substrate of described actuator configurations apply drop and spray energy;

Wherein said plate substrate has: a plurality of spray-holes that form on the thickness direction of described plate substrate in described plate substrate are used for liquid droplets; And jet face, described jet face has a plurality of injection openings at described jet face split shed, wherein by described a plurality of spray-holes and described a plurality of injection opening liquid droplets;

Wherein said jet face has a plurality of recesses that form in described jet face, and each recess at least one recess in described a plurality of recess has base section, and described a plurality of injection openings are at described base section split shed;

Wherein said a plurality of recess comprises many to recess, the every pair of recess by and registration and two recesses having base section respectively constitute, described injection opening is formed at least one base section in the described base section;

Wherein, the line of shortest length section of described certain a pair of recess of the shortest single line section equals or is shorter than as connecting and composing under described another situation to the line of shortest length section of recess of single line section the shortest in another line segment to the profile of corresponding two recesses of recess in the line segment of profile as corresponding two recesses that connect and compose certain a pair of recess, and the mean value of length that constitutes corresponding two recesses of described certain a pair of recess is equal to or less than and constitutes described another mean value to the length of corresponding two recesses of recess; And

Wherein on the described base section of the described recess that is formed with described injection opening, be formed with the liquid repellent layer, wherein be formed on described liquid repellent layer on the described base section and be owing to the mask material that enters described recess and cover described liquid repellent layer causes not removed layer.

2. jet head liquid according to claim 1,

Wherein said mask material is to be crimped onto described at least jet face covering the material of described liquid repellent layer,

Wherein remove the described liquid repellent layer that is not covered by described mask material, and

Wherein said mask material is the material of removing after removing described liquid repellent layer.

3. jet head liquid according to claim 1 wherein applies the liquid repellent agent by spraying and forms described liquid repellent layer.

4. jet head liquid according to claim 1 wherein removes the described liquid repellent layer that is not covered by described mask material by the plasma etching process processes of described liquid repellent layer being used from the surface of the opposition side that is positioned at described jet face of described plate substrate.

5. jet head liquid according to claim 2, wherein said mask material is to be extruded the material that member is crimped to described jet face, described extruded member when being expressed to described mask material on the described jet face along moving with respect to described plate substrate on the direction of described line of shortest length section.

6. jet head liquid according to claim 5,

Wherein the roller transfer method of piling up the band that described mask material is arranged by utilization forms described mask material, and

Wherein said extruded member is configured to push the surface of the opposition side that is positioned at the surface that contacts with described mask material of described band.

7. according to each described jet head liquid in the claim 1 to 6,

Wherein said a plurality of recess comprises two recesses, described two recesses and registration, and in described a plurality of recesses all are the shortest to the line of shortest length section of two recesses described in the recess, and

Each recess in wherein said two recesses is equaling along the length on the direction of the line of shortest length section of described two recesses or is being shorter than each recess in the recess except that described two recesses along the length on the direction of the line of shortest length section of described two recesses.

8. jet head liquid according to claim 7, wherein and registration and line of shortest length section for the shortest described two recesses along having identical length on the direction of the line of shortest length section of described two recesses.

9. according to each described jet head liquid in the claim 1 to 6,

Wherein said two recesses and registration and along having the length that differs from one another respectively on the direction of the line of shortest length section of described two recesses,

Wherein said a plurality of recess comprise with described two recesses in the 3rd adjacent recess of a recess, between a wherein said recess another recess in described the 3rd recess and described two recesses,

Wherein, under the situation that a described recess and the line of shortest length section of described the 3rd recess are lacked than the line of shortest length section of described two recesses, a described recess is shorter along the length of the line of shortest length section of described two recesses than described another recess along the length of the line of shortest length section of described two recesses, and

Wherein, under the situation of line of shortest length section than the line of shortest length segment length of described two recesses of a described recess and described the 3rd recess, a described recess is longer along the length of the line of shortest length section of described two recesses than described another recess along the length of the line of shortest length section of described two recesses.

10. according to each described jet head liquid in the claim 1 to 6,

Wherein, described certain a pair of recess and described another in the recess each to recess in, along on the direction of the line of shortest length section of described corresponding two recesses and the centre-to-centre spacing between the center of described corresponding two recesses of registration equal or be shorter than described corresponding two recesses along five times of the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses, and

Wherein, equal or be shorter than under another situation to the line of shortest length section of recess in the described recess in the line of shortest length section of described corresponding two recesses that constitute described certain a pair of recess, the mean value of length that constitutes described corresponding two recesses of described certain a pair of recess is equal to or less than and constitutes described another mean value to the length of described corresponding two recesses of recess.

11. jet head liquid according to claim 10,

Wherein, along on the direction of the line of shortest length section of described corresponding two recesses and the centre-to-centre spacing between the center of described corresponding two recesses of registration than described corresponding two recesses along under five times of big situations of the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses, described corresponding two recesses the mean value along the length on the direction of the line of shortest length section of described corresponding two recesses equal other to recess along the maximum in the mean value of the length on the direction of described line of shortest length section, constitute described other in the recess each to two recesses of recess along on the direction of described line of shortest length section and registration, and

Wherein constitute between the center of each two right recess of described other centering and to equal along the centre-to-centre spacing on the direction of the line of shortest length section of described two recesses or to be shorter than described corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses.

12. according to each described jet head liquid in the claim 1 to 6,

Wherein saidly many recess is comprised first pair of recess and second pair of recess, wherein, in described first pair of recess and described second pair of recess each to recess in, equaling along the centre-to-centre spacing on the direction of the line of shortest length section of described corresponding two recesses or be shorter than described corresponding two recesses between the center of described corresponding two recesses at five times along the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses

In wherein said first pair of recess and the described second pair of recess each all has the line of shortest length section that comprises in the scope in a plurality of scopes of the length of line of shortest length section to recess, and

Corresponding two recesses of wherein said first pair of recess along corresponding two recesses of the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses of described first pair of recess and described second pair of recess mutually the same along the mean value of the length on the direction of the line of shortest length section of described corresponding two recesses of described second pair of recess.

13. according to each described jet head liquid in the claim 1 to 6,

In wherein said first pair of recess and the described second pair of recess each all is formed on recess in the zone in a plurality of zones that are arranged on the described jet face, and

Wherein, under the situation that the length of the line of shortest length section of two recesses of the length of the line of shortest length section of two recesses of described first pair of recess and described second pair of recess is equal to each other, corresponding two recesses of described first pair of recess along corresponding two recesses of the mean value of the length on the direction of the line of shortest length section of corresponding two recesses of described first pair of recess and described second pair of recess identical along the mean value of the length on the direction of the line of shortest length section of corresponding two recesses of described second pair of recess.

14. according to each described jet head liquid in the claim 1 to 6, wherein, a recess of described two recesses along the length on the direction of the line of shortest length section of described two recesses than another recesses of described two recesses along under the long situation of the length on the direction of the line of shortest length section of described two recesses, each opening diameter in the opening diameter of the respective spray opening that forms in the base section of a described recess is all big than each opening diameter in the opening diameter of the respective spray opening that forms in the base section of described another recess.

15. according to each described jet head liquid in the claim 1 to 6,

Wherein be formed with a plurality of injection opening rows in described jet face, wherein said a plurality of injection openings each in described a plurality of injection opening rows sprayed among the opening row and arranged in one direction, and

Wherein form as the groove at a described upwardly extending recess in side by at least two recesses that connect on a described direction in the described recess, described at least two recesses are corresponding with the described a plurality of injection openings that form in described a plurality of injection opening rows.

16. jet head liquid according to claim 15, wherein as the described groove of the width of described groove constant on a described direction along the length on the direction of described line of shortest length section.

17. according to each described jet head liquid in the claim 1 to 6, wherein limit described recess by described jet face and coating, described coating forms described a plurality of injection opening is exposed from described jet face.

18. a method of making jet head liquid, described jet head liquid comprises:

Plate substrate, described plate substrate has: a plurality of spray-holes that form on the thickness direction of described plate substrate in described plate substrate are used for liquid droplets; And jet face, described jet face has a plurality of injection openings at described jet face split shed, wherein by described a plurality of spray-holes and described a plurality of injection opening liquid droplets; With

Actuator, the liquid in the paired described plate substrate of described actuator configurations apply drop and spray energy, and described method comprises:

Base material forms step, and described base material forms step and forms in described plate substrate: (a) a plurality of recesses that form in described jet face; (b) described a plurality of spray-hole, described a plurality of spray-holes have described a plurality of injection openings of the base section split shed of each recess at least one recess in described a plurality of recesses respectively;

The liquid repellent layer forms step, and described liquid repellent layer forms step and forming formation liquid repellent layer on the described jet face of described a plurality of recesses;

The crimping step, described crimping step is crimped onto described jet face with mask material, makes described mask material enter in described a plurality of recess;

The liquid repellent layer is removed step, and described liquid repellent layer is removed step and removed the liquid repellent layer that is not covered by described mask material; And

Mask material is removed step, and described mask material is removed step and remove described mask material from described plate substrate after described liquid repellent layer is removed step;

It is following steps that wherein said base material forms step: form described a plurality of recess, it is many to recess to make that described a plurality of recess comprises, the every pair of recess by and registration and two recesses having base section respectively constitute, described injection opening is formed at least one base section in the described base section, and make in the line segment of profile the line of shortest length section of certain a pair of recess of the shortest single line section equal or be shorter than as connecting and composing under described another situation of single line section the shortest in another line segment that the mean value of length that constitutes corresponding two recesses of described certain a pair of recess is equal to or less than and constitutes described another mean value to the length of corresponding two recesses of recess to the line of shortest length section of recess to the profile of corresponding two recesses of recess as corresponding two recesses that connect and compose certain a pair of recess.

19. the method for manufacturing jet head liquid according to claim 18, wherein said crimping step is following steps: along relatively moving on the direction of described line of shortest length section described mask material is being crimped onto on the described jet face when being expressed to described mask material on the described jet face by making extruded member.

20. the method for manufacturing jet head liquid according to claim 19,

It is following steps that wherein said base material forms step: in described plate substrate, form described a plurality of recesses, make described a plurality of recess extend in one direction and on the vertical direction vertical, be arranged in parallel with a described direction, and

Wherein said crimping step is by described extruded member is moved with respect to described plate substrate on a described direction described mask material to be crimped onto step on the described jet face.

21. method according to each described manufacturing jet head liquid in the claim 18 to 20, it is following steps that wherein said base material forms step: form described a plurality of spray-holes and described a plurality of recess in described plate substrate, make a recess of described two recesses along the length on the direction of the line of shortest length section of described two recesses than another recesses of described two recesses along under the long situation of the length on the direction of the line of shortest length section of described two recesses, each opening diameter in the opening diameter of the respective spray opening that forms in the base section of a described recess is all big than each opening diameter in the opening diameter of the respective spray opening that forms in the base section of described another recess.