CN102208748A - A multi-pumped disk solid-state laser - Google Patents
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Abstract
本发明提供了一种多次泵浦的碟片固体激光器,它包括半导体激光器叠阵、泵浦光束准直系统、冷却指、激光碟片晶体、激光输出镜、抛物面反射镜和180度反射的第一、第二折叠镜,激光碟片晶体放置在抛物面反射镜的焦点处,第一、第二折叠镜均位于抛物面反射镜的反射光路上,且分别位于激光碟片晶体的两侧;半导体激光器叠阵发射的泵浦光束经过泵浦光准直器准直后进入抛物面反射镜、第一折叠镜、第二折叠镜和激光碟片晶体,经过多次泵浦,由所述激光谐振腔获得激光输出。该碟片固体激光器实现了可控的泵浦光的多次传输,泵浦光斑面积合理,功率密度分布均匀,仅需对入射泵浦光束进行简单的准直,就可以实现高功率、高效率、高光束质量的激光输出。
The invention provides a multi-pumped disk solid-state laser, which includes a stack of semiconductor lasers, a pump beam collimation system, a cooling finger, a laser disk crystal, a laser output mirror, a parabolic mirror and a 180-degree reflective The first and second folding mirrors, the laser disc crystal is placed at the focal point of the parabolic reflector, the first and second folding mirrors are located on the reflection light path of the parabolic reflector, and are respectively located on both sides of the laser disc crystal; the semiconductor The pump beam emitted by the laser stack is collimated by the pump light collimator and then enters the parabolic reflector, the first folding mirror, the second folding mirror and the laser disc crystal. After multiple pumps, the laser resonator Obtain laser output. The disk solid-state laser achieves multiple transmissions of controllable pump light, the pump spot area is reasonable, and the power density distribution is uniform. Only simple collimation of the incident pump beam is required to achieve high power and high efficiency. , High beam quality laser output.
Description
技术领域technical field
本发明属于激光器技术,具体涉及一种碟片固体激光器。The invention belongs to laser technology, in particular to a disk solid laser.
背景技术Background technique
随着激光技术、器件水平和制造能力的不断提高,固体激光器以其自身独特的优点成为激光器家族中独特的一个分支,并向着高平均功率、高光束质量、高转换效率的方向快速发展。目前高档工业固体激光器的发展十分迅速,以光纤激光器和碟片固体激光器为代表的新一代固体激光器成为重要发展方向。另一方面,固体激光技术与其他高新技术相互渗透,使得固体激光器在汽车车身外板焊接、汽车板拼焊和金属板材切割等领域有着越来越广泛的应用。With the continuous improvement of laser technology, device level and manufacturing capacity, solid-state laser has become a unique branch of the laser family with its own unique advantages, and is developing rapidly in the direction of high average power, high beam quality and high conversion efficiency. At present, the development of high-end industrial solid-state lasers is very rapid, and the new generation of solid-state lasers represented by fiber lasers and disk solid-state lasers has become an important development direction. On the other hand, the interpenetration of solid-state laser technology and other high-tech has made solid-state lasers more and more widely used in the fields of automobile body outer panel welding, automobile panel tailor welding and metal sheet cutting.
新型碟片固体激光器主要利用薄片状激光晶体作为激光器的增益介质,采用端面或侧面泵浦的方式。由于激光晶体厚度很薄(Φ/d值很大,其中Φ为晶体的直径,d晶体厚度),在液体射流冲击冷却或高效TEC贴片冷却技术的条件下,即使采用高功率密度的泵浦光进行泵浦,晶体内部径向温度梯度很小、温升不大且晶体中热流方向与光轴方向平行。这种均匀分布的温度场极大消除了晶体的热形变和对激光的影响,使输出的激光具有较好的光束质量。The new type of disk solid-state laser mainly uses thin-plate laser crystal as the gain medium of the laser, and adopts the method of end-face or side-pumping. Since the thickness of the laser crystal is very thin (the value of Φ/d is very large, where Φ is the diameter of the crystal, and d is the thickness of the crystal), under the condition of liquid jet impingement cooling or high-efficiency TEC chip cooling technology, even if the pump with high power density When the light is pumped, the radial temperature gradient inside the crystal is very small, the temperature rise is not large, and the direction of heat flow in the crystal is parallel to the direction of the optical axis. This uniformly distributed temperature field greatly eliminates the thermal deformation of the crystal and the influence on the laser, so that the output laser has better beam quality.
由于碟片固体激光器增益介质的厚度很小,一般在0.1~1mm之间,有效吸收长度小,因此多次泵浦技术和泵浦光斑的均匀性设计是实现碟片固体激光器高光束质量、高转换效率运行的核心技术之一。2003年,美国专利Steffen Erhard等提出了单抛物面和多棱镜构成的空间旋转多次泵浦的结构(见美国专利US6577666 B2);2005年,Steffen Erhard等对上述方案进行改进提出了基于单抛物面和两个大型棱镜实现光束空间旋转多次泵浦技术的方案(见美国专利US6891874B2)。Because the thickness of the gain medium of the disk solid-state laser is very small, generally between 0.1 and 1mm, and the effective absorption length is small, the multiple pumping technology and the uniformity design of the pump spot are the key to achieving high beam quality and high beam quality of the disk solid-state laser. One of the core technologies of conversion efficiency operation. In 2003, U.S. Patent Steffen Erhard et al. proposed a space-rotating multi-pump structure composed of a single parabola and a polygonal mirror (see U.S. Patent US6577666 B2); A large-scale prism realizes the scheme of beam space rotation and multiple pumping technology (see US patent US6891874B2).
2008年,朱晓教授等人提出一种基于共轭双抛物面方案(见中国专利ZL200810048527.6),倾斜激光晶体、矫正反射镜的多程泵浦结构实现泵浦光斑的多次传输,其泵浦次数与激光晶体和矫正镜的夹角有关。2010年,朱晓教授等对上述方案进行改进(见PCT专利申请PCT/CN2010/071865),提出集多次泵浦和高效冷却为一体的新型泵浦结构,以及以此技术开发的多碟串接模块,进一步提高共轭双抛物面多程泵浦系统的泵浦效率和利用空间。In 2008, Professor Zhu Xiao and others proposed a scheme based on conjugated double paraboloids (see Chinese patent ZL200810048527.6), the multi-pass pumping structure of the tilted laser crystal and the correction mirror realizes the multiple transmission of the pump spot, and its pump The number of Pu is related to the angle between the laser crystal and the correction lens. In 2010, Professor Zhu Xiao et al. improved the above scheme (see PCT patent application PCT/CN2010/071865), proposed a new pump structure integrating multiple pumping and high-efficiency cooling, and developed a multi-disk string The connection module further improves the pumping efficiency and space utilization of the conjugated double paraboloid multi-pass pumping system.
Steffen Erhard等提出碟片激光器的多次泵浦技术要求入射光斑为圆形准直光斑,光斑在整个抛物面空间多次旋转传输,且以光轴为轴对称分布从而实现多次泵浦。这就需要加工尺寸较大的抛物面和折叠镜以实现上述光线的传输;朱晓教授等提出共轭抛物面的多次泵浦方案对矫正镜和碟片之间的角度关系直接决定泵浦光斑的次数,在装配和调整方面要求比较严格。Steffen Erhard et al. proposed that the multiple pumping technology of the disk laser requires the incident spot to be a circular collimated spot, and the spot rotates and transmits multiple times in the entire parabolic space, and the optical axis is symmetrically distributed to achieve multiple pumping. This requires the processing of larger paraboloids and folding mirrors to achieve the transmission of the above light; Professor Zhu Xiao et al. proposed a multiple pumping scheme of conjugate paraboloids, which directly determines the size of the pumping spot on the angle relationship between the correcting mirror and the disc. The number of times, the requirements for assembly and adjustment are relatively strict.
发明内容Contents of the invention
本发明的目的在于提供一种新型的多次泵浦的碟片固体激光器,该碟片固体激光器仅需对入射泵浦光束进行较为简单的准直,就可以实现高功率、高效率、高光束质量的激光输出。The object of the present invention is to provide a new type of multi-pumped disk solid-state laser, which can achieve high power, high efficiency, and high light beam only by relatively simple collimation of the incident pump beam. quality laser output.
本发明提供了一种多次泵浦的碟片固体激光器,包括半导体激光器叠阵、泵浦光束准直系统、冷却指、激光碟片晶体和激光输出镜,激光输出镜与激光碟片晶体构成谐振腔,冷却指用于对激光碟片晶体进行冷却,它还包括抛物面反射镜、第一折叠镜和第二折叠镜,其中第一折叠镜和第二折叠镜均为180度反射,激光碟片晶体放置在抛物面反射镜的焦点处,第一、第二折叠镜均位于抛物面反射镜的反射光路上,且分别位于激光碟片晶体的两侧;The invention provides a multi-pumped disk solid-state laser, which includes a stack of semiconductor lasers, a pump beam collimation system, a cooling finger, a laser disk crystal, and a laser output mirror. The laser output mirror is composed of a laser disk crystal. Resonant cavity, cooling refers to cooling the laser disc crystal, it also includes a parabolic reflector, a first folding mirror and a second folding mirror, wherein the first folding mirror and the second folding mirror are 180-degree reflection, the laser disc The plate crystal is placed at the focal point of the parabolic mirror, and the first and second folding mirrors are located on the reflection light path of the parabolic mirror, and are respectively located on both sides of the laser disc crystal;
半导体激光器叠阵发射的泵浦光束经过泵浦光准直器准直后进入抛物面反射镜、第一折叠镜、第二折叠镜和激光碟片晶体,在其中经过多次泵浦,由所述激光谐振腔获得激光输出。The pump beam emitted by the stack of semiconductor lasers is collimated by the pump light collimator and then enters the parabolic reflector, the first folding mirror, the second folding mirror and the laser disc crystal, where it is pumped many times, by the The laser resonator obtains laser output.
进一步的,第一折叠镜的交线和第二折叠镜的交线在XOY坐标系内的投影均平行X轴,且两投影分布在XOY坐标系的一、三象限或二、四象限,两投影到X轴的距离不相等,其中XOY坐标系是以抛物面反射镜的圆心为原点,以水平方向为X轴,竖直方向为Y轴建立的直角坐标系。Further, the projections of the intersection line of the first folding mirror and the intersection line of the second folding mirror in the XOY coordinate system are parallel to the X axis, and the two projections are distributed in the first and third quadrants or the second and fourth quadrants of the XOY coordinate system. The distances projected to the X-axis are not equal, where the XOY coordinate system is a Cartesian coordinate system established with the center of the parabolic mirror as the origin, the horizontal direction as the X-axis, and the vertical direction as the Y-axis.
进一步的,第一折叠镜的交线与第二折叠镜的交线不平行,两交线均平行于由XOY坐标系所确定的平面,两交线在该平面内的投影中点的连线过XOY坐标系的原点,且到原点的距离相等;其中XOY坐标系是以抛物面反射镜的圆心为原点,以水平方向为X轴,竖直方向为Y轴建立的直角坐标系;第一折叠镜或第二折叠镜上开有一泵浦光的入口,半导体激光器叠阵发射的泵浦光束经过泵浦光准直器准直后由该入口进入抛物面反射镜。Further, the intersection line of the first folding mirror is not parallel to the intersection line of the second folding mirror, both intersection lines are parallel to the plane determined by the XOY coordinate system, and the line connecting the midpoint of the projection of the two intersection lines in the plane Pass the origin of the XOY coordinate system, and the distance to the origin is equal; wherein the XOY coordinate system is a Cartesian coordinate system established with the center of the parabolic reflector as the origin, the horizontal direction as the X axis, and the vertical direction as the Y axis; the first fold There is an inlet for pumping light on the mirror or the second folding mirror, and the pumping beam emitted by the stack of semiconductor lasers is collimated by the pumping light collimator and then enters the parabolic reflector through the inlet.
本发明具有以下有益效果:The present invention has the following beneficial effects:
(1)本发明所述的碟片固体激光器采用半导体激光器叠阵泵浦的方式,效率高、寿命长,设备维护方便。(1) The disk solid-state laser described in the present invention adopts the semiconductor laser cascade pumping method, which has high efficiency, long service life and convenient equipment maintenance.
(2)本发明所述的碟片固体激光器采用抛物面反射镜、碟片状激光晶体和两个180度反射的折叠镜组成的多次泵浦聚光腔,实现了可控的泵浦光的多次传输,泵浦光斑面积合理,功率密度分布均匀。(2) The disk solid-state laser of the present invention adopts a multiple pumping concentrating cavity composed of a parabolic reflector, a disk-shaped laser crystal, and two 180-degree reflecting folding mirrors, and realizes controllable pumping light. With multiple transmissions, the pump spot area is reasonable and the power density distribution is uniform.
(3)本发明所述的碟片固体激光器在实现多次泵浦的同时降低了对半导体激光器泵浦光的准直要求,简化了泵浦结构,降低成本,提高了该系统的实用性。(3) The disk solid-state laser of the present invention realizes multiple pumping while reducing the collimation requirements for the pumping light of the semiconductor laser, simplifying the pumping structure, reducing the cost, and improving the practicability of the system.
(4)本发明根据具体使用需求,可以灵活的采用不同实施方案,构建V型或其他形式激光谐振腔以获得大模体积或基模输出、对多个具有增益的碟片状激光晶体串接以获得更高的输出功率。(4) The present invention can flexibly adopt different implementation schemes according to specific usage requirements, construct V-shaped or other forms of laser resonators to obtain large mode volume or fundamental mode output, and connect multiple disc-shaped laser crystals with gain in series for higher output power.
(5)本发明所述的碟片固体激光器体积较小、机械结构和调整简单、质量较轻,便于工业应用。(5) The disk solid-state laser described in the present invention has small volume, simple mechanical structure and adjustment, light weight, and is convenient for industrial application.
附图说明Description of drawings
图1平行放置的折叠镜的碟片固体激光器结构图;The structural diagram of the disk solid-state laser with folded mirrors placed in parallel in Fig. 1;
图2180度反射的折叠镜示意图;Figure 2180-degree reflection folding mirror diagram;
图3平行放置折叠镜的碟片固体激光器中抛物面镜上光斑的分布特性;The distribution characteristics of the light spots on the parabolic mirror in the disk solid-state laser with folded mirrors placed in parallel in Fig. 3;
图4旋转放置的折叠镜的碟片固体激光器结构图;Fig. 4 Structural diagram of disk solid-state laser with folded mirror rotated;
图5旋转放置折叠镜的碟片固体激光器中抛物面镜上光斑的分布特性;Figure 5. The distribution characteristics of the light spots on the parabolic mirror in the disk solid-state laser with the folding mirror rotated;
图6旋转放置折叠镜、双抛物面的碟片固体激光器结构图。Fig. 6 The structural diagram of a disk solid-state laser with folded mirrors and double paraboloids rotated.
具体实施方式Detailed ways
本发明采用一个或多个半导体激光器叠阵作为泵浦源,抛物面反射镜、碟片状激光晶体和两个180度反射的折叠镜组成多次泵浦匀化聚光腔。利用180度反射的折叠镜和抛物面反射聚焦的光学特性,实现可控的多次泵浦。The invention adopts one or more stacked semiconductor lasers as the pumping source, and a parabolic reflector, a disc-shaped laser crystal and two 180-degree reflecting folded mirrors form a multi-pump homogenizing light-gathering cavity. Using the 180-degree reflective folding mirror and the optical characteristics of parabolic reflective focusing, controllable multiple pumping is realized.
在第一种具体实施方式(简称为方案1)中,两个180度反射的折叠镜位于抛物面反射镜的反射光路上,两个180度反射的折叠镜的交线相互平行,且分布在抛物面反射镜所确定的XOY坐标系的一、三象限或二、四象限,两交线在XOY坐标系内的投影与X轴平行且到X轴的距离存在一定的差值(|L1-L2|≠0)。泵浦光从第一折叠镜上方进入抛物面反射镜被抛物面反射镜反射后直接泵浦到碟片激光晶体内部,未被吸收的光线再次回到抛物面反射镜后以平行光离开抛物面反射镜进入第二个折叠镜,折叠镜将入射的光线以折叠镜的交线为对称轴平移泵浦光,然后180度反射到抛物面反射镜,经抛物面反射镜反射后再次入射到激光碟片晶体内部,此后未被吸收的光经抛物面反射镜反射后,平行入射到第一折叠镜,由于两折叠镜交线到坐标系X的距离存在一定的差值(|L1-L2|≠0)。因此光线进入第一折叠镜再次完成平移和180度反射,返回到抛物面。此后上述泵浦过程不断重复,最终完成匀化光斑的多次泵浦,泵浦光在抛物面反射镜上形成一系列相互平行的泵浦光斑,在碟片上形成均匀的泵浦光斑,有效提高激光器的光光转换效率。In the first specific implementation mode (referred to as Scheme 1 for short), the two 180-degree reflecting folding mirrors are located on the reflection optical path of the parabolic reflecting mirror, and the intersection lines of the two 180-degree reflecting folding mirrors are parallel to each other and distributed on the parabolic surface In the first and third quadrants or the second and fourth quadrants of the XOY coordinate system determined by the mirror, the projection of the two intersection lines in the XOY coordinate system is parallel to the X axis and there is a certain difference in the distance to the X axis (|L1-L2| ≠0). The pumping light enters the parabolic reflector from above the first folding mirror, is reflected by the parabolic reflector, and is directly pumped into the disc laser crystal. Two folding mirrors, the folding mirror translates the incident light with the intersection line of the folding mirror as the symmetrical axis, and then reflects it to the parabolic reflector at 180 degrees, and then enters the laser disc crystal again after being reflected by the parabolic reflector. The unabsorbed light is reflected by the parabolic mirror and then incident on the first folding mirror in parallel, because there is a certain difference in the distance from the intersection line of the two folding mirrors to the coordinate system X (|L1-L2|≠0). Therefore, the light enters the first folding mirror to complete the translation and 180-degree reflection again, and returns to the paraboloid. Since then, the above pumping process has been repeated continuously, and finally the multiple pumping of the homogenized spot is completed. The pump light forms a series of parallel pump spots on the parabolic mirror, and forms a uniform pump spot on the disc, effectively improving Light-to-light conversion efficiency of lasers.
在第二种具体实施方式(简称为方案2)中,两个180度反射的折叠镜位于抛物面反射镜的反射光路上,两个180度反射的折叠镜的交线存在一定的夹角α,两个180度反射的折叠镜的交线在抛物面所确定的XOY平面内的投影中点的连线过原点且到原点的距离相等。泵浦光从第一折叠镜上的入射孔径处入射到抛物面反射镜,光线被抛物面反射镜反射后直接泵浦到碟片激光晶体内部,未被吸收的光线再次回到抛物面反射镜后以平行光离开抛物面反射镜进入第二个折叠镜,由于第二折叠镜相对于第一折叠镜存在一定的旋转,因此第二折叠镜将光线以折叠镜的交线为对称轴平移泵浦光的同时相对于抛物面坐标系发生了旋转,经反射后的光线回到抛物面反射镜,再次入射到激光碟片晶体内部,此后未被吸收的光经抛物面反射镜反射后,平行入射到第一折叠镜,由于两折叠镜的交线存在一定夹角,因此入射到第一折叠镜的光线避开折叠镜上的入射孔径。此后光线被抛物面反射镜镜像和180度反射回抛物面反射镜,光线如此往复重复上述过程,最终完成多次泵浦。泵浦光在抛物面反射镜上两折叠镜在XY坐标系投影的区域内形成圆形分布的光斑,且光斑本身存在旋转,从而实现碟片上泵浦光斑的匀化和多次传输,有效提高激光器的光光转换效率。In the second specific implementation mode (referred to as scheme 2 for short), the two 180-degree reflecting folding mirrors are located on the reflection optical path of the parabolic reflector, and the intersection line of the two 180-degree reflecting folding mirrors has a certain angle α, The intersection line of the two 180-degree reflective folding mirrors in the XOY plane determined by the paraboloid is connected to the midpoint of the projection, and the distance to the origin is equal to the origin. The pumping light enters the parabolic reflector from the incident aperture on the first folding mirror, and the light is directly pumped into the disc laser crystal after being reflected by the parabolic reflector, and the unabsorbed light returns to the parabolic reflector again in parallel The light leaves the parabolic reflector and enters the second folding mirror. Since the second folding mirror has a certain rotation relative to the first folding mirror, the second folding mirror translates the light with the intersection line of the folding mirror as the axis of symmetry of the pumping light. Rotated relative to the parabolic coordinate system, the reflected light returns to the parabolic reflector, and is incident into the laser disc crystal again. After that, the unabsorbed light is reflected by the parabolic reflector, and then parallel incident to the first folding mirror. Since there is a certain angle between the intersection line of the two folding mirrors, the light incident on the first folding mirror avoids the incident aperture on the folding mirror. After that, the light is mirrored by the parabolic reflector and reflected back to the parabolic reflector by 180 degrees. The light repeats the above process in this way, and finally completes multiple pumping. The pump light forms a circular distribution of light spots in the projected area of the XY coordinate system by the two folding mirrors on the parabolic reflector, and the light spots themselves rotate, so as to realize the homogenization and multiple transmission of the pump light spots on the disc, effectively improving Light-to-light conversion efficiency of lasers.
下面结合附图和实例对本发明作进一步详细的说明。Below in conjunction with accompanying drawing and example the present invention is described in further detail.
如图1所示,方案1提供的碟片固体激光器包括抛物面反射镜1、第一折叠镜2、第二折叠镜3、冷却指4、激光碟片晶体5、准直后的激光光束6、半导体激光器叠阵12、泵浦光束准直系统13和激光输出镜14。半导体激光器叠阵12发射的泵浦光束经过泵浦光准直器13准直后进入抛物面反射镜1、第一折叠镜2、第二折叠镜3和激光碟片晶体5所构成的多次泵浦系统中,实现多次、高效、均匀的泵浦,激光碟片晶体5与激光输出镜14构成谐振腔获得激光输出。As shown in Figure 1, the disk solid-state laser provided by Scheme 1 includes a parabolic mirror 1, a first folding mirror 2, a
抛物面反射镜1具有反射聚焦的特性,将入射的平行光束会聚到其焦点处,抛物面镀有对泵浦光高反射的膜层。The parabolic reflector 1 has the characteristics of reflective focusing, which converges the incident parallel light beams to its focal point, and the paraboloid is coated with a film layer that is highly reflective to the pump light.
第一折叠镜2和第二折叠镜3均为180度反射的折叠镜,折叠镜由两部分组成,这两部分组合完成光线的180度回归反射,这两部分在底面的交线称为该折叠镜的交线。该折叠镜可为两个直角棱镜、两个保罗棱镜、也可是两个90度夹角放置的平面镜。如果是棱镜,则棱镜的斜边面镀有泵浦光的增透膜,两个直角面抛光利用光线的全内反射实现光束的180度回归反射。如果是采用两个90度夹角放置的平面镜,则反射光的平面需镀有对泵浦光的高反膜。图2给出了由两个90度夹角放置的平面镜组成的折叠镜的示意图,其中直线AB为该折叠镜的交线,在多次泵浦系统的装配中是重要装配基准线。Both the first folding mirror 2 and the
冷却指4为激光碟片晶体5的冷却部件和支撑部分,碟片激光晶体5焊接、粘贴或夹持在冷却指4上,对激光碟片晶体5进行高效的冷却,可以采用射流冲击冷却的液体冷却方式,也可以采用贴片或微通道的冷却方式。The cooling finger 4 is the cooling part and supporting part of the laser disc crystal 5. The disc laser crystal 5 is welded, pasted or clamped on the cooling finger 4 to efficiently cool the laser disc crystal 5, and jet impact cooling can be used. The liquid cooling method can also adopt the cooling method of patch or microchannel.
激光碟片晶体5厚度为0.1mm~1mm,直径为4mm~25mm,作为激光器的激活介质。该晶体放置在抛物面反射镜1的焦点处,远离抛物面反射镜的一面镀有对泵浦光和输出激光高反射的膜层,该膜层与激光输出镜14构成激光谐振腔,另一面镀有对泵浦光和输出激光的高透膜层,以减少泵浦光和输出激光的反射损耗。激光碟片晶体5在安装时可以适当离焦。The laser disc crystal 5 has a thickness of 0.1 mm to 1 mm and a diameter of 4 mm to 25 mm, and is used as an active medium of the laser. The crystal is placed at the focal point of the parabolic reflector 1, and the side away from the parabolic reflector is coated with a film layer that is highly reflective to the pump light and the output laser. Highly transparent film layer for pump light and output laser to reduce reflection loss of pump light and output laser. The laser disc crystal 5 can be properly defocused when installed.
激光束6,7,8,9,10,11为经过半导体激光准直系统进入多次泵浦系统后,其传输顺序依次为6,7,8,9,10,11。半导体激光器叠阵12作为碟片固体激光器的泵浦源,此光束在快轴(X方向)和慢轴(Y方向)的发散角以及光斑尺寸均不同,因此需经过准直后才能应用。The
泵浦光束准直器13将半导体激光器叠阵12所发出的光束进行准直,经准直后的泵浦光束X、Y方向发散角较小且相等。使得进入抛物面聚焦后的光斑尺寸达到设计的要求,从而获得一长条形的光斑。The
激光输出镜14为输出耦合镜,可以为平面镜、也可以为曲面镜。其与激光碟片晶体5一端面的激光全反膜构成谐振腔,实现谐振放大,完成激光输出。The
本发明所述的第一种碟片固体激光器的工作过程如下:经准直的泵浦光6从第一折叠镜2上方入射到抛物面反射镜1上,被抛物面反射镜1反射至其焦点处,激光碟片晶体放置在该抛物面反射镜的焦点处可适当离焦,因此泵浦光入射到激光碟片晶体内部分被吸收,未被吸收的泵浦光被晶体反射回抛物面反射镜1,被抛物面反射镜反射后以光束7离开抛物面反射镜进入第二折叠镜3,由于第二折叠镜3具有180度回归反射的特性,因此光束7以第二折叠镜交线AB为对称轴将光束7反射平移后以光束8回到抛物面反射镜1,并再次聚焦到激光碟片晶体内部,未被吸收的泵浦光再次被激光晶体反射回抛物面反射镜,由于第二折叠镜的平移特性,使得此次反射的光束在抛物面反射镜的第四象限,以光束9离开抛物面反射镜1进入第一折叠镜2,并在第一折叠镜2内完成光束的平移和180度的回归反射,以光束10再入射到抛物面反射镜1,此后再次进入激光碟片晶体,未被吸收的光束再次反射回抛物面反射镜1的第二象限,光束被抛物面反射镜反射后,以光束11进入第二折叠镜3。从而光束在该多次泵浦系统中形成循环,实现激光碟片晶体的多次泵浦。The working process of the first disc solid-state laser described in the present invention is as follows: the collimated pumping light 6 is incident on the parabolic reflector 1 from above the first folding mirror 2, and is reflected by the parabolic reflector 1 to its focal point , the laser disc crystal is placed at the focal point of the parabolic mirror to defocus properly, so the pump light incident on the laser disc crystal is partially absorbed, and the unabsorbed pump light is reflected back to the parabolic mirror 1 by the crystal, After being reflected by the parabolic reflector, the
该方案布局与光线的传输特性描述如下:以抛物面反射镜1的圆心为原点,以水平方向为X轴,竖直方向为Y轴,建立直角坐标系XOY。两个180度反射的折叠镜2、3位于抛物面反射镜1的反射光路上,第一折叠镜2的交线AB和第二折叠镜3交线CD在XOY坐标系内的投影与X轴平行,且分布在XOY坐标系的一、三象限或二、四象限,两个折叠镜在XOY平面内投影如图3所示,其中A’B’、C’D’分别为第一折叠镜2的交线和第二折叠镜3的交线在该坐标平面的投影。A’B’、C’D’均与X轴平行且距离X轴的长度分别为,L1、L2,两者的差值|L1-L2|≠0。这样才可以保证从第一折叠镜入射的泵浦光束经抛物面反射镜,激光晶体和第二折叠镜反射回来的光束进入第一折叠镜进行平行反射后再次回到多次反射系统中,实现多次平移反射。其中a为入射准直后的入射光斑,经抛物面反射镜反射和碟片晶体反射后入射到抛物面反射镜形成光斑b,此后折叠镜将光束以A’B’对称反射回抛物面反射镜,在抛物面上形成光斑c,光束再次被激光晶体反射后回到抛物面形成光斑d。此后光束进入第一折叠镜,以交线C’D’对称反射后重新入射到抛物面上形成光斑e,并再次入射到抛物面反射镜后聚焦到碟片晶体,而未被吸收的光束返回抛物面反射镜,形成光斑f,上述过程不断反复形成多次泵浦。因此,图3中a,e,d为出入第一折叠镜2的光斑在抛物面反射镜1上的光斑分布特性,b,c,f为出入第二折叠镜3的光斑在抛物面反射镜上1的光斑分布特性,可见,由于两折叠镜交线相互平行,故在抛物面反射镜形成的光斑同样平行分布,其泵浦光斑的次数受到参数N=L/|L1-L2|的影响,其中L如图2所示,为折叠镜两斜边的距离。当N=2n时(n为正整数),每一折叠镜内光束传输2n+1次,在对应得抛物面区域形成2n+1个平行的光斑分部,碟片晶体的泵浦次数为2×(2n+1)次。当N=2n+1时,折叠镜内存在2n+2光斑碟片晶体的泵浦次数为2×(2n+2)次。当2n<N<2n+1时,碟片晶体的泵浦次数同样介于2×(2n+1)次和2×(2n+2)次之间。The scheme layout and light transmission characteristics are described as follows: take the center of the parabolic reflector 1 as the origin, take the horizontal direction as the X axis, and the vertical direction as the Y axis to establish a rectangular coordinate system XOY. Two 180-degree reflective folding mirrors 2 and 3 are located on the reflection optical path of the parabolic mirror 1, and the projection of the intersection line AB of the first folding mirror 2 and the intersection line CD of the
如图4所示,方案2提供的碟片固体激光器包括抛物面反射镜1、第一折叠镜2、第二折叠镜3、冷却指4、激光碟片晶体5、准直后的激光光束6、泵浦光入口15,激光输出镜14,半导体激光器叠阵12,泵浦光束准直系统13。半导体激光器叠阵12发射的泵浦光束经过泵浦光准直器13准直后进入抛物面反射镜1,第一折叠镜2,第二折叠镜3,激光碟片晶体5所构成的多次泵浦系统中,实现多次、高效、均匀的泵浦;激光晶体5与激光输出镜14构成谐振腔获得激光输出。As shown in Figure 4, the disk solid-state laser provided by Scheme 2 includes a parabolic mirror 1, a first folding mirror 2, a
上述各个器件的膜层和功能与方案1基本相同,但在空间布局和位置关系方面存在较大差异,使得泵浦光束在空间传输时分布不同。为实现该传输方案,以抛物面反射镜1的圆心为原点,以水平方向为X轴,竖直方向为Y轴,建立直角坐标系XOY。两个180度反射的折叠镜2、3位于抛物面反射镜1的反射光路上,第一折叠镜2的交线与第二折叠镜3的交线平行于XOY平面。且两个折叠镜的交线存在一定的夹角α(α>0),两交线在抛物面反射镜1所确定的XOY平面内的投影中点的连线过原点且到原点的距离相等。第一折叠镜2或第二折叠镜3上开有一泵浦光的入口15,经准直后泵浦光由此进入多次泵浦系统中。本发明所述的第二种碟片固体激光器工作过程如下:The film layers and functions of the above-mentioned devices are basically the same as those in Scheme 1, but there are large differences in spatial layout and positional relationship, which make the distribution of pump beams different during spatial transmission. In order to realize the transmission scheme, a rectangular coordinate system XOY is established with the center of the parabolic reflector 1 as the origin, the horizontal direction as the X axis, and the vertical direction as the Y axis. Two 180-degree reflecting folding mirrors 2 and 3 are located on the reflection optical path of the parabolic mirror 1, and the intersection line between the first folding mirror 2 and the
经准直的泵浦光6从第一折叠镜2上的泵浦光入口15进入抛物面反射镜1,被该镜面反射至其焦点处,激光碟片晶体放置在该抛物面反射镜的焦点处,因此入射到激光碟片晶体内部分被吸收,未被吸收的泵浦光被晶体反射回抛物面反射镜1,被抛物面反射镜反射以泵浦光离开抛物面反射镜进入第二折叠镜3,由于第二折叠镜3的交线AB相对于第一折叠镜2的交线CD存在以旋转角α且具有180度回归反射的特性,因此入射的泵浦光束以第二折叠镜交线AB为对称轴将该光线反射平移后反射到抛物面反射镜1,并再次聚焦到激光碟片晶体内部,未被吸收的泵浦光再次被激光晶体反射回抛物面反射镜,由于旋转角α的存在回到第一折叠镜2的光线被转移到折叠镜其他位置(离开泵浦光入口15)被第一折叠镜2平移反射回抛物面,再次对激光碟片晶体5进行泵浦,此后上述过程不断重复实现了泵浦光的多次反射。The collimated pump light 6 enters the parabolic reflector 1 from the pump
该方案布局与光线的传输特性描述如下:以抛物面反射镜原点为圆心,以水平方向为X轴,竖直方向为Y轴,建立直角坐标系XOY。两折叠镜的交线平行XOY平面放置,在XOY平面内投影如图5所示,其中A’B’,C’D’为第一折叠镜2的交线和第二折叠镜3的交线在该坐标平面的投影,其交线中点O2,O3的连线过原点,且到原点的距离相同。激光碟片晶体的中心为坐标系的原点O,根据光学成像原理,第二折叠镜的交线A’B’经抛物面1和激光碟片晶体5在第一折叠镜交线C’D’平面成像为A”B”。A”B”与第一折叠镜C’D’与存在夹角α,该角度决定了多次泵浦光斑的次数和泵浦光斑在空间的分布特性。泵浦光斑从泵浦光入口a入射,经抛物面反射镜1和激光碟片晶体5反射后以b入射至第二折叠镜,由于第二折叠镜的180度回归反射特性,光束b以交线A’B’对称成像以光束c反射回抛物面反射镜,经激光碟片晶体反射后再次回到抛物面反射镜的对称区域形成光束d,反射回第一折叠镜,并在第一折叠镜内以交线C’D’镜像为光束e反射回抛物面反射镜,上述过程不断重复,最终在第一折叠镜对应的抛物面区域形成以交线中点O2为圆心中心对称分布的一系列光斑,其光斑在多次传输时相对中点O2旋转。同理,在第二折叠镜对应的抛物面区域形成了以交线中点O3为圆心中心对称分布的一系列光斑,其光斑在多次传输时相对中点O3旋转,这样使得泵浦到激光碟片晶体内部的光斑叠加后泵浦区域更为均匀。泵浦光斑的次数和分布特性由两折叠镜交线夹角α和入射光束的位置决定,折叠镜中传输光线的次数n=mπ/α(若α不能被π整除,先将其化为分数,m的数值为分数中分子的最小公倍数,且为整数,使其满足整除关系)。则在折叠镜之间泵浦光束传输了2n次,相对于碟片激光晶体就泵浦了4n次。而泵浦光斑在抛物面的位置分布最好以交角的角平分线的位置入射,这样所有光斑已圆心为原点均匀分布。The scheme layout and light transmission characteristics are described as follows: with the origin of the parabolic reflector as the center, the horizontal direction as the X axis, and the vertical direction as the Y axis, a rectangular coordinate system XOY is established. The intersection line of the two folding mirrors is placed parallel to the XOY plane, and the projection in the XOY plane is shown in Figure 5, where A'B' and C'D' are the intersection line of the first folding mirror 2 and the intersection line of the
如图6所示,在方案2的基础上可以发现泵浦光在抛物镜面上的分布均落在折叠镜在抛物面反射镜的投影区且为圆形分布,因此,为节约抛物面的加工材料和加工成本,仅需加工两个具有相同面型函数空间对称分布的部分抛物面反射镜以提供有效的反射聚焦,在装配时对应的装配到相应的位置即可,其传输方式和工作原理与方案2相同。As shown in Figure 6, on the basis of Scheme 2, it can be found that the distribution of the pump light on the parabolic mirror falls on the projection area of the folding mirror on the parabolic mirror and is distributed circularly. Therefore, in order to save the processing materials and Processing cost, only need to process two partial parabolic mirrors with the same surface function spatially symmetrical distribution to provide effective reflection focusing, and they can be assembled to the corresponding positions during assembly. Its transmission mode and working principle are the same as those of Scheme 2 same.
本发明不仅局限于上述具体实施方式,本领域一般技术人员根据本发明公开的内容,可以采用其它多种具体实施方式实施本发明,因此,凡是采用本发明的设计结构和思路,做一些简单的变化或更改的设计,都落入本发明保护的范围。The present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can adopt various other specific embodiments to implement the present invention according to the disclosed content of the present invention. Changes or modified designs all fall within the protection scope of the present invention.
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