CN102204038B

CN102204038B - System method and apparatus for selecting and controlling light source bandwidth

Info

Publication number: CN102204038B
Application number: CN2009801426193A
Authority: CN
Inventors: E·菲格罗亚; W·N·帕特洛; J·M·阿尔格特斯
Original assignee: Cymer Inc
Current assignee: Cymer Inc
Priority date: 2008-10-24
Filing date: 2009-10-24
Publication date: 2013-07-10
Anticipated expiration: 2029-10-24
Also published as: KR20110089155A; JP5773526B2; EP2351169A4; CN102204038A; TW201027128A; EP2351169B1; US8144739B2; USRE45249E1; US20100149647A1; KR101721026B1; EP2351169A1; TWI420153B; JP2012507048A; WO2010048604A1

Abstract

A mechanism for bandwidth selection includes a dispersive optical element having a body including a reflective face of dispersion including an area of incidence extending in a longitudinal axis direction along the reflective face of the dispersive optical element The body also includes a first end block, disposed at a first longitudinal end of the body and a second end block, disposed at a second longitudinal end of the body, the second longitudinal end being opposite the first longitudinal end The bandwidth selection mechanism also includes a first actuator mounted on a second face of the dispersive optical element, the second face opposite the reflective face, the first actuator having a first end coupled to the first end block and a second end coupled to the second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block

Description

Select and control systems approach and the device of light source bandwidth

Technical field

The present invention relates generally to grating, specifically, relates to systems approach and device tuning and the control bandwidth, and it is undertaken tuning and the control bandwidth by the bandwidth that curved raster is selected to be centered in the light wavelength on the selected centre wavelength.

Background technology

Usually use grating to select the light beam of constriction.Yet the wavelength bandwidth in the constriction light beam just can easily not selected with common grating.Fig. 1 is the rough schematic view of typical light beam constriction system 100.This typical light beam constriction system 100 comprises light source beam 102 and grating 106, and described light source beam 102 is conducted through optical beam expander 104 (generally including one or more prisms).Grating 106 has the reflecting surface 108 with many grid strokes 110.Reflecting surface 108 has curved surface 112, and it is equal to the wavefront curved surface 114 of the light source beam 102A of expansion basically.Should be noted that the parts 102-114 of light beam constriction system 100 is not drawn to scale, specifically, for the purpose of demonstrating, the spacing of curved surface 112, wavefront curved surface 114 and grating amplifies.

The light beam source 102A of expansion comprises a plurality of light wavelength 116A-n.A plurality of light wavelength 116A-n disperse with different angles with respect to optical beam expander 104, and strike on the reflecting surface 108 at corresponding different parts.

It is desirable to, the light beam 124 of selected grid stroke 110A reflection constriction, light beam 124 only comprises with the corresponding reflection wavelength 116E ' of proper angle 118 towards optical beam expander 104, make the light beam 124 of constriction return by optical beam expander 104, surmount optical beam expander 104 and to optical system 120.Regrettably, the bandwidth that the grid stroke 110A that selectes also reflects other wavelength comprises the wavelength 1502A that lacks slightly than the centre wavelength 116E ' that reflects and the wavelength 1502B that grows slightly than the centre wavelength 116E ' that reflects.Therefore, the light beam 124 of constriction comprises the centre wavelength 116E ' of reflection and comprises than the short slightly wavelength 1502A of the centre wavelength 116E ' of reflection with than the centre wavelength 116E ' of the reflection bandwidth of the wavelength of long wavelength 1502B slightly.

Curvature measure in tuned light beam expander 104 and the curved surface 112 can be selected point-device centre wavelength and very narrow maximum bandwidth, for example, for the light beam 124 of constriction, bandwidth in every side of the centre wavelength 116E ' that reflects less than 1.0pm (1.0 * 10 ^-12Rice)+/-.Yet maximum bandwidth and minimum bandwidth accurately be controlled or be selected to tuned light beam expander 104 can not to the light beam 124 of constriction, for example, bandwidth in the both sides 0.5 to 1.0pm+ of the centre wavelength 116E ' of reflection/-.

Optical system 120 can comprise the subsystem of the light beam 124 of a plurality of use constrictions.Some subsystem can require the maximum bandwidth of selecting and the minimum bandwidth of selecting.For instance, optical system 120 can comprise scanner, and it needs several to be centered on the selected wavelength and crosses over the wavelength that distributes on the bandwidth of enough width of the jamming pattern that can be used to produce requirement.

In order to satisfy the requirement of stricter control bandwidth continuously, especially, the width that comprises the spectrum of selected percentage brightness, namely, respectively from 95% (" E95% " or " E95 ") simply or the E95 of overall with half value (" FWHM "), centre wavelength is selected and bandwidth selection optical element (for example, has a plurality of dispersing optics features, for example, the wavefront interaction areal deformation chromatic dispersion grating of the groove on face of grating).These requirements can comprise control that needs are wider and with bandwidth remain on some among a small circle in and/or be no more than some set point value.This distortion need be in two planes, and need independently in each plane in two planes, make the interference between the deformation mechanism as far as possible little, have found that, need a kind of deformation mechanism can act on bigger deformation force, this deformation mechanism forms the mechanism that separates distortion of feature such as the groove that makes groove traverse the surface (with comparing along the length of dispersing optics element) of dispersing optics element.The applicant has proposed these improvement of existing laser system bandwidth controlling organization.

In view of the above, a kind of system, method and apparatus of curved raster need be arranged, be used for the bandwidth that selection is centered on selected center's wavelength and has the optical wavelength of selected minimum bandwidth and selected maximum bandwidth.

Summary of the invention

Say that broadly the present invention satisfies the demand by a kind of system, method and apparatus of bandwidth that makes the grating bending select to be centered on selected center's wavelength and have a light wavelength of selected minimum bandwidth and selected maximum bandwidth is provided.Should be realized that the present invention can implement in many ways, as a kind of technical process, can comprise equipment, system, computer-readable medium or device.Several inventive embodiments of various details.

Bandwidth selective system disclosed herein and method comprise the chromatic dispersion reflecting surface bending that makes the dispersing optics element along two different directions (vertically and flatly), simultaneously also from horizontal curvature power decoupling zero basically (decoupling) go out vertical bending force.This decoupling zero makes interaction or the interference between vertical bending force and the horizontal curvature power become minimum.Use one or more flex member to come each vertical bending force of decoupling zero and horizontal curvature power.

The mechanism that embodiment provides bandwidth to select, it comprises the dispersing optics element, and this dispersing optics element has the body that comprises the chromatic dispersion reflecting surface, and this chromatic dispersion reflecting surface comprises along the incident area of the reflecting surface direction of principal axis extension longitudinally of dispersing optics element.This body also comprises first end block and second end block, and first end block is arranged on first vertically on the end of body, and second end block is arranged on second vertically on the end of body, second vertically end and first vertically hold relative.This bandwidth selection mechanism also comprises first actuator that is installed on second of the dispersing optics element, described second opposite with reflecting surface, described first actuator has first end that is connected to first end block and second end that is connected to second end block, first actuator can be operated and first end block and second end block are applied equal and opposite power, so that body is along the longitudinal axis of body with along the first direction bending that is orthogonal to dispersing optics element reflects face.This bandwidth selection mechanism also comprises second actuator that is installed on the 3rd of the dispersing optics element, the 3rd face is orthogonal to reflecting surface, useful first flex member of described second actuating device is connected to first end of first end block and second end that is connected to second end block with second flex member, first actuator can be operated and first end block and second end block are applied equal and opposite power, so that body is along the longitudinal axis of body with along the second direction bending perpendicular to dispersing optics element reflects face, this second direction is also perpendicular to first direction, and described second actuator comprises the applying mechanism of pressurized stream muscle power.A kind of method of selecting bandwidth is also disclosed.

From the detailed description below in conjunction with accompanying drawing, it is clear that other aspects and advantages of the present invention will become, and accompanying drawing shows principle of the present invention by means of example.

Description of drawings

By the detailed description below in conjunction with accompanying drawing, can easily understand the present invention.

Fig. 1 is the rough schematic view of typical light beam constriction system.

Fig. 2 A is the rough schematic view according to the Beam Control device of the each side of the embodiment of open subject content.

Fig. 2 B and 2C are the rough schematic views according to the reflecting surface of the Beam Control device of the each side of the embodiment of open subject content.

Fig. 3 is the each side according to the embodiment of open subject content, shows that curved raster selects to be centered on selected center's wavelength and have the flow chart of the performed method operation of the bandwidth of optical wavelength of selected minimum bandwidth and selected maximum bandwidth.

Fig. 4 is the rough schematic view according to the light beam constriction system of the each side of the embodiment of open subject content.

Fig. 5 is the vertical view according to the dispersing optics element of the each side of the embodiment of open subject content.

Fig. 6 is the end view according to the dispersing optics element of the each side of the embodiment of open subject content.

Fig. 7 A-7E is the rough schematic view that power is applied to the various forms actuator on the grating body according to the each side of the embodiment of open subject content.

Fig. 8 is the stereogram according to the double acting bandwidth control apparatus of the each side of the embodiment of open subject content.

Fig. 9-12 illustrates another according to the double acting bandwidth controlling organization of the each side of the embodiment of open subject content.

Figure 13 A and 13B are the stereograms according to the deflection element of the each side of the embodiment of open subject content.

Figure 14 A is the stereogram according to the gusset of the each side of the embodiment of open subject content.

Figure 14 B is according to the front end of the dispersing optics element body of the each side of the embodiment of open subject content or the stereogram of rear end.

Figure 15 A is the curve chart according to the E95 bandwidth of the each side of the embodiment of open subject content.

Figure 15 B is the stereogram according to another device of the dispersing optics element that is used for bending such as grating of the each side of the embodiment of open subject content.

Figure 16 A and 16B schematically illustrate the grating installed part of the deflection that the each side according to the embodiment of open subject content comes in handy.

Embodiment

The system, several example embodiment of method and apparatus of bandwidth that curved raster is selected to be centered on selected center's wavelength and had the optical wavelength of selected minimum bandwidth and selected maximum bandwidth now will be described.Those skilled in the art will recognize that do not have some or all specific details described in this paper also can put into practice the present invention.

Fig. 2 A is the rough schematic view according to the Beam Control device 200 of the each side of the embodiment of open subject content.This Beam Control device BCD comprises grating 206 and first power apparatus 218.First power apparatus 218 is connected to opposite end 206A, the 206B of the grating 206 in first plane 230.

First power apparatus 218 can be respectively

opposite end

206A, 206B by the grating 206 of

connector

219A, 219B apply first power so that grating reflection surface 208 is crooked in a controlled manner.For instance, first power apparatus 218 can apply pulling force 5022 at the opposite end of grating 206 206A, 206B, so that grating is along direction 5024 bendings of the protrusion of control.Similarly, first power apparatus 218 can be on the opposite end of grating 206 206A, 206B applied thrust 5026 so that grating is along recessed direction 5028 bendings of control.Like this, first power apparatus 218 can make reflecting surface 212 bendings of grating 206, with basically with the wavefront SURFACES MATCHING of light beam, and therefore select the maximum bandwidth of light beam of the constriction of the centre wavelength of reflection and reflection.

In use, light beam adds thermal grating 206.Adding thermal grating 206 can cause grating to expand according to the thermal coefficient of expansion of grating material.Usually, grating 206 is formed by the low material of the coefficient of expansion.

The thermal coefficient of expansion of first power apparatus 218 and

connector

219A, 219B is substantially similar to the thermal coefficient of expansion of grating 206, so that first power apparatus 218 expands with the speed identical with grating.Therefore, the power 5022,5026 that acts on the grating of first power apparatus keeps invariable basically in the hot range of operation of expection.

Second power apparatus 240 is connected to opposite end 206A, the 206B of grating 206 in being different from second plane 232 on first plane 230.Second power apparatus 240 is connected to opposite end 206A, the 206B of grating 206 respectively by connector 241A, 241B.For instance, as shown in the figure, second plane 232 can be substantially perpendicular to first plane 230.The thermal coefficient of expansion of second power apparatus 240 and

connector

241A, 241B is substantially similar to the thermal coefficient of expansion of grating 206, so that second power apparatus expands with the speed identical with grating.Therefore, the power 5022,5026 that acts on the grating of second power apparatus keeps invariable basically in the hot range of operation of expection.

Fig. 2 B and 2C are the rough schematic views according to the reflecting surface 208 of the Beam Control device 200 of the each side of the embodiment of open subject content.Second power apparatus 240 can apply second power to opposite end 206A, the 206B of grating 206, so that grating is crooked in a controlled manner.Like this, second power apparatus 240 can make reflecting surface 212 bendings of grating 206, makes grid stroke 210 be fan-shaped at grating reflection face 208.Because fan-shaped cause, along with the edge of beam reflected reflects in different directions, this fan-shaped figure is changing the shape of folded light beam.

For instance, shown in Fig. 2 B, second power apparatus 240 can apply pulling force 242 at the opposite end of grating 206 206A, 206B, so that the fan-shaped figure of grid stroke 210 increases from right to left.Similarly, and shown in Fig. 2 C, second power apparatus 240 can be on the opposite end of grating 206 206A, 206B applied thrust 246 be close together on the right so that fan-shaped figure on the left side is wideer.

Fig. 3 is the flow chart according to the each side of the embodiment of open subject content, has shown the bandwidth performed method operation 300 of curved raster to select being centered on selected center's wavelength and to have the optical wavelength of selected minimum bandwidth and selected maximum bandwidth.Operation shown in the literary composition only is for example, can have child-operation because should be understood that some operation, and in other situation, in the operation shown in some operation described in the literary composition may not be included in.Remember this point, now will describe this method and operation 300.Fig. 4 is the rough schematic view according to the light beam constriction system 400 of the each side of the embodiment of open subject content.Should be noted that the parts 102-424 of light beam constriction system 400 is not drawn to scale, specifically, be the purpose of demonstration, the spacing of curved surface 5028, wavefront surface 114 and grating amplifies.

In operation 310, light beam passes such as the such amplifier of prism, and for example, optical beam expander 104 amplifies and expansion or spread light beam.In operation 320, first power apparatus 218 applies

first power

222 or 226 by opposite end 206A, the 206B of the grating 206 of

connector

219A, 219B respectively, so that grating reflection surface 208 is crooked in a controlled manner.Reflecting surface 208 bends to reflecting surface is mated with the wavefront surface 114 of the light beam 102A that expands basically.

In operation 330, select centre wavelength.Centre wavelength 116E is selected by gridline 210A, and this gridline is towards optical beam expander 104 and optical system 120 reflected back centre wavelengths.Select centre wavelength 116E and reflecting surface 208 and the wavefront surface 114 of the light beam 102A of expansion are mated, also determined the maximum bandwidth 422A of constriction beam reflected 424A.

In operation 340, second power apparatus 240 applies

second power

242 or 244 by opposite end 206A, the 206B of the grating 206 of

connector

241A, 241B respectively, so that the fan-shaped increase of the grid stroke 210 on the grating reflection surface 208 or reduce.Change the fan-shaped bandwidth 422B that determines the folded light beam 424B of line constriction of grid stroke 210.

Light beam constriction system 400 also can comprise variable orifice 430.Variable orifice 430 can change the area of the grid surface that the light beam of expansion clashes into.Variable orifice 430 also can increase or reduce dispersing of extensible beam.Described dispersing is the angle that different light beam 116A-116n are separated from each other.Increase this and disperse the angle that has just strengthened between the light beam 116A-116n, also increased the differential seat angle that these light beams 116A-116n reflects grating 208.So variable orifice 430 can increase or reduce from the angle of the light of grating surface reflected back.With the crooked combination of the grating of along continuous straight runs and vertical direction, variable orifice just can increase the scope of reflection bandwidth, from less than about 200fm extremely greater than between about 1500fm.

Fig. 5 is the vertical view according to the dispersing optics element 500 of the each side of the embodiment of open subject content.This dispersing optics element 500 can be used for the selection of centre wavelength, dispersing optics element 500 namely, such as the such grating of Ai Xiele (eschelle) grating.Dispersing optics element 500 also can be used for determining bandwidth at least in part.Dispersing optics element 500 comprises the dispersing optics element body 502 with dispersing optics element top 504.Should be understood that, this title of described top is with for referencial use purely, it refers to such fact here: when dispersing optics element 500 was placed in the module housing 1002 of online constriction, with regard to as vertical view as shown in Figure 10, this dispersing optics element 500 will be in the face of the top of shell 1002.Dispersing optics element 500 also can have a face that forms dispersing optics element dispersive surface 508, and described dispersive surface 508 is formed on the front surface 510 of dispersing optics element body 502.Dispersing optics element body 502 also can have the back side 506.Dispersing optics element body 502 also can have the dispersing optics element bottom 512 shown in Fig. 6 and 9.

Dispersing optics element 500 also can have front end 514 and the rear end 516 of dispersing optics element, it is also to be understood that, before the term and after only be purpose for reference, it refers to such fact: as shown in Figure 9, the most close centre wavelength selection mechanism 900 of front end, this mechanism 900 emits light from laser chamber (not shown), and the incidence angle of control light on dispersing optics element 500 is in order to select centre wavelength.

As can be seen from Fig. 5, the dispersing optics element back side is applied power, to more fully be described hereinafter, it is known in this bandwidth control apparatus (" BCD ") row, for example with end 514,516 is in position, and (be again only for reference along towards the direction of body 502 back side 506 of dispersing optics element body 502 being applied horizontal force, and with only for the purpose of reference previously described direction align), the dispersing optics element back side is applied power can bring out front surface 510 generation column distortion, and the columns distortion takes place in the grating face 508 of dispersing optics element thus.This can make the grating face with respect to the cylindrical shape that is incident on light on the grating face 508 from centre wavelength selection mechanism 900 and is deformed into protrusion.Similarly, direction applies power on the contrary and can make the grating face be deformed into recessed cylindrical shape with respect to the light from centre wavelength selection mechanism incident therewith.

As shown in Figure 5, apply compression stress along the back side 506 of dispersing optics element body 502, can shorten the length that is not subjected to stress at the back side 506 of dispersing optics element body 502, for example, from length L 1 to length L 2.Therefore the back side 506 forms the compression stress face, and front 510 (corresponding to grating surface 508) forms the stress plane under the tension stress.For example, the grating back side 506 can be from angle, corresponding back by the position that not be displaced to by stress position to be subjected to stress, displacement is about 8 μ m, it can be overleaf forms curvature in 506, this curvature magnitude is being about on the radius of curvature of 1km, and corresponding curvature is arranged in the front of containing grating surface 508.

Fig. 6 is the end view according to the dispersing optics element 500 of the each side of the embodiment of open subject content.Dispersing optics element 500 is shown as because BCD is applied to power on the top surface 504 and is under the stress, make dispersing optics element grid have a plurality of surface grooves 210, each groove has the reflection groove face, this reflection groove face is towards front end 514, and the opposing face of groove is towards rightabout, usually perpendicular to each groove 210 of the longitudinal axis of grating face 508, deform as shown in the figure.This distortion along from top surface 504 to basal surface 512 extension widened groove 210, make the reflecting surface of groove 210 towards the rear end 516, with respect to grating face 508 unstressed longitudinal center axis close to angle beta, and towards front end 514 roughly close to phase dihedral α.

Fig. 7 A-7E is the rough schematic view that is applied to the various forms actuator on the grating body according to the each side of the embodiment of open subject content, with power.Actuator shown in Fig. 7 A-7E uses capable of being combinedly and power is applied to the both sides of dispersing optics element 500, therefore, has formed the BCD of level and vertical BCD.Fig. 7 A schematically illustrates actuator 702, and it is connected to a pair of

end block

704A, 704B by

flexed portion

706A, 706A ', 706B and 706B ', and flexed

portion

706A, 706A ', 706B and 706B ' are connected to movable block 708A, 708B.Be similar to situation shown in Fig. 9,

end block

704A, 704B are connected to the respective end of grating body (not shown among Fig. 7 A).A movable block 708B has attacked screw thread, and has the differential screw rod 710 that passes the fine pitch of screw thread along the direction of the longitudinal axis that is orthogonal to the actuator 702 that passes

end block

704A, 704B.

Another movable block 708A is operably connected to static block 712 by reloading spring 714, by pulling

movable block

708A, 708B toward each other, surpasses certain neutral movable block position, and spring 714 can apply pulling force between end block 704A, 704B.The resolution that differential screw rod activates can be that 40nm reverses/encloses.Reverse adjusting range and can be ± 1 micron.For example, movable block 20 microns move journey and can cause 8 microns sagging on screw rod 5028, as Fig. 6 schematically shown in, that is, be the manual activation of 0.1 micron/circle for resolution, 2.5 microns of 1 micron sagging needs move journey.

Fig. 7 B is schematically illustrated in the concept that reduces the power that applies in the adjustment process.Actuator 720 has the end block 704A that is attached to grating body (not shown among Fig. 7 B).Fig. 7 B illustrates the BCD actuator, and as mentioned above, it can be attached to the gusset that install the end on the grating body 502 at

piece

704A, 704B place, or block can keep transfixion, and is positioned to press against on the grating body (not shown among Fig. 7 B) along vertical direction.Axle 722 usefulness engage thread are engaged to block 704A, and extend through end wall and the bearing on the midfeather 724 of framework 726.This 722 can have the piston 728 that is attached to it, and corresponding adjacent springs 730 is positioned in the middle of end wall and the piston 728, and in the middle of piston 728 and the midfeather.Rotate this axle 722 and can move block 704A with respect to block 704B, and can be to the end gusset application of force on the grating end, or to the grating top application of force, as shown above.

After the adjustment, the axle 722 of screw thread can be locked by the mode of knowing by technical staff in the art, the high power of bringing out with OBCD shown in the opposing, for other embodiment, for example Fig. 7 A-E, 8 and 9-12 shown in embodiment, also can be such situation.Shown in Fig. 7 A-E and 8, for given revolution, for example, the thread spindle of type B CD actuator shown in Figure 8 is approximately 25 to be changeed, and so BCD can provide the displacement (sagging) of BCD body 1 micron dimension.Have found that, provide the power of about 160N can cause such displacement, that is, being about 6N/ changes (160N/25 commentaries on classics).6N/ pitch equals spring constant, and 25 commentaries on classics * pitch equal to move the journey amount.

Desirable sagging (curvature) scope of center of curve place displacement is from-1 to+8 micron, this means, if opposition is not provided especially, for example by spring, as the active force that the reloading spring of discussing in Fig. 9 and following examples each side provides, it is not satisfied only pushing away actuator.As this paper with reference to Fig. 9 and discussed below, such as such only the pushing away actuator and can carry out prestrain with spring of bellows, for example, be loaded into-1 and set.

The actuator of another form is attachable to the end power piece on the grating, or straight line applies force on the sidewall/top of grating, and the actuator of form can schematically be presented among Fig. 7 C like this, has the spring for this actuator of prestrain, for example, be loaded in-1 micron sagging setting.Shown in Fig. 7 C, actuator 740 has outside framework 742 and inner frame 744, make the top and bottom portion of inner frame cooperate rear wall 746A and the midfeather 746B of outside framework 742 slidably, one type actuator driving mechanism 748 pointing out of other place can be used to inner frame 744 and outside framework 742 are directly applied power herein, to shorten the distance between end block 704A, the 704B.Spring 750 can apply preload force in opposite direction.

Fig. 7 D schematically illustrates actuator 760, and it uses lever arm 762 that power is applied on end block 704A, the 704B.Lever arm 762 is also included among other embodiment as herein described.Lever arm 762 need can reduce actuator driving mechanism 764 applied forces.Actuator driving mechanism 764 among Fig. 7 D is applied to power on the lever 762, and this lever pulls

end block

704A, 704B toward each other by linking arm 766 again, and connector 766 is attached on the axle 768 that links to each other with end block 704B pivotly.The axle 768 on and then the spring 770 of right hand end piece 704B can apply preload force.

Fig. 7 E illustrates similar actuator 780, and it has around fulcrum 784 and pivots and be pivotably connected to the lever 782 of axle 768, and this actuator

pulls end block

704A, 704B toward each other, and spring 790 is used for applying preload force.Should be understood that, shown in this paper and described actuator only be exemplary, also can use the combination of actuator and all kinds actuator of other type.That the type of actuator can comprise is hydraulic pressure, pneumatic, piezoelectricity, motor, stepping motor, electromagnetism and magnetostrictive etc., more than only enumerate some examples.

Fig. 8 is the stereogram according to the double acting bandwidth control apparatus 800 of the each side of the embodiment of open subject content.Double acting bandwidth control apparatus 800 comprises first bandwidth control apparatus 802 and second bandwidth control apparatus 804, and they are arranged on the end face 504 of the back side 506 of dispersing optics element body 502 and dispersing optics element body 502.A pair of end block (gusset) 704A, 704B are arranged on each end, and are suitable for applying power by BCD802,804 pairs of bodies 502.

Each BCD802,804 comprises

BCD framework

806A, 806B respectively.

Corresponding framework

806A, 806B comprise corresponding BCD framework

front bulkhead

808A, 808B; BCD framework

rear partition wall

810A, 810B; And BCD framework intermediate bulkheads 812A, 812B.Corresponding

rear partition wall

810A, 810B comprise BCD framework rear partition wall finger-

type thing

814A, 814B, and each finger-type thing has columniform installation shaft opening (not shown).

BCD cylinder shape actuater

axle

816A, 816B extend through

front bulkhead

808A, 808B and

intermediate bulkheads

812A, 812B, terminate on the end that has BCD axle blocking mechanism.The bearing of BCD axle extends through

front bulkhead

808A, 808B and comprises the bearing flange of BCD axle.The BCD screw-thread bush extends through preceding gusset 704A and has attacked internal thread, to admit the threaded portion of BCD axle.

Pair of L-shaped support 160 is glued to respectively on the front end 514 and rear end 516 of dispersing optics element body 502, and this has suitable attachment mechanism to support, is used for holding gusset 166 to be attached on the dispersing optics element body 502 accordingly.Gusset 704A comprises two pairs of power board clamps, respectively has the power board clamp and tightens screw, so that after the clamping and top BCD802,804 the attached pin of corresponding rear partition wall finger-type thing tightly.Corresponding attached pin respectively extends through corresponding attached pin bush(ing).

BCD piston

820A, 820B for example are fixed on a 816A, the 816B by setting screw or other suitable fasteners, by having the piston thrust bearing of thrust bearing plastic hoop, they are respectively opened by preceding

compression spring

822A, 822B and back

compression spring

824A, 824B branch.

In operation, in response to bandwidth control actuator position signal, corresponding axle 816A and/or 816B by for example stepping motor of rotation, or have linear movement to the linear stepping motor of rotational motion transducer, manually or automatically rotate.Because axle rotates, it oppresses corresponding

spring

822A, 822B and 824A, 824B, and according to the rotation direction of

corresponding axis

816A, 816B, towards or deviate from front end gusset 704A and masterpiece be used on corresponding framework 806A, the 806B, and by corresponding finger-

type thing

814A, 814B masterpiece is used on the gusset 704B of rear end, so that being in, corresponding face 506,504 stretches or compressive state.BCD802 affects the grating face as Fig. 5 shown in schematically, and BCD804 affects grating face 508 as Fig. 6 shown in schematically.

This double acting bandwidth control apparatus 800 can be used to reverse dispersing optics element body 502 as discussed above, as the bandwidth of the light that amplifies in the selection mechanism influence of the centre wavelength/bandwidth laser chamber (not shown) related with the dispersing optics original paper.Situation for overall with half value (" FWHM "), bandwidth can be subjected to influence in various degree, the bandwidth of the spectrum of measuring at half place of high-high brightness peak point on the spectrum sidewall and for E95%/E95, the width of spectrum comprise 95% the brightness on the spectral centroid wavelength of being centered in.Two BCD802,804 interconnected connecing can be like this: the independence to the influence on FWHM and the E95 can be traded off fully, or other harmful effect can cause double acting bandwidth control apparatus 800 bandwidth select and control aspect desirable not to the utmost.

Fig. 9-12 illustrates another double acting bandwidth controlling organization 900 according to the each side of the embodiment of open subject content.As shown in Figure 9, double acting bandwidth controlling organization 900 uses front end gusset 704A and rear end gusset 704B, as among Figure 14 A at length shown in.Figure 14 A is stereogram each side,

gusset

704A, 704B according to the embodiment of open subject content.Figure 14 B is according to the front end 514 of the dispersing optics element body 502 of the each side of the embodiment of open subject content or the stereogram of rear end 516.

Gusset

704A, 704B have a plurality of installation pads 1402, and it is formed by level trough 1404 and vertical groove 1406, and they are divided into corresponding pad 1402 with installed surface 1408.Some or all installation pad 1402 can be placed gummed

point

1410,1410 ', 1410 thereon ", so that

corresponding gusset

704A, 704B are attached on the front end 514 or rear end 516 of dispersing optics element body 502.Selected corresponding gummed

point

1410,1410 ', 1410 " layout can therefore make shearing force concentrated.As shown in Figure 14B, zone 1412 does not have gummed point placed on it.So shearing force is not applied to the front surface 508 of dispersing optics element body 502, but be applied to the rear surface more.

Corresponding gummed

point

1410,1410 ', 1410 " selected position can concentrate best pivoted position.Best pivoted position is that vertical BCD and the BCD of level influence that minimum position each other.For example, in best pivoted position, add or reduce vertical BCD and be applied to power quantity on the dispersing optics element body 502, can not reduce basically or the horizontal BCD of increase is applied to power on the dispersing optics element body 502.Similarly, in best pivoted position, add or the horizontal BCD of minimizing is applied to power quantity on the dispersing optics element body 502, can not reduce or increase vertical BCD basically and be applied to power on the dispersing optics element body 502.

Deflection element as herein described be used for making basically force vector with to straight BCD decoupling zero or isolation, prevent from reducing or the horizontal BCD of increase is applied to power on the dispersing optics element body 502.Deflection element as herein described also is used for making basically force vector and horizontal BCD decoupling zero or isolation, prevents from reducing or increase vertical BCD being applied to power on the dispersing optics element body 502.

Should be noted that corresponding gummed

point

1410,1410 ', 1410 " be shown as different sizes and/or intensity, make shear stress concentration in the other size of the desired site of dispersing optics element body 502 front ends 514 or rear end 516 in order to increase.

Gusset

704A, 704B can comprise that also a pair of horizontal BCD mounting bracket 1414 and vertical (quadrature) BCD (" OBCD ") install surface 1416.

Forward Fig. 9-12 again to, quadrature shown in the figure (for example, vertical) BCD (" OBCD "), it can will stretch or compression stress be applied on the dispersing optics element body 502, widens as the gradual of groove 210 of Fig. 6 part shown in schematically realizing.Double acting bandwidth controlling organization has a pair of back mounting bracket 902, for example its available invar (Invar) is made, and be used for connecting gusset 704B by a pair of mounting bracket finger-type thing, each finger-type thing extends in corresponding support 141 and the mounting bracket dihedral arm, they are attached to respectively on the top or bottom arm of the attached yoke 904 of horizontal BCD, and are connected to yoke by bolt.Similarly support 902 is connected to rear end gusset 704B with the bottom of yoke 904.The attached yoke 904 of BCD has the bearing that is installed on the yoke in order to admit axle 906.Axle 906 comprises flexed portion 910.Each thrust bearing 912 can have certain development length.

Preceding mounting bracket 902 ' is connected to preceding gusset 704A top and the bottom of front end deflection mounting panel 914 similarly, front end deflection mounting panel 914 has the deflection element 916 that is connected to horizontal BCD deflection connecting plate 918, and horizontal BCD deflection connecting plate 918 is connected to the front end 920 of horizontal BCD922 by the similar deflection connector (not shown) in the space 924, demonstrates this situation among Figure 13 A, the 13B in more detail.Horizontal BCD922 is substantially similar to and discusses in the relevant literary composition and the BCD802,804 shown in Fig. 8.

Figure 13 A and 13B are according to the deflection element 916 of the each side of the embodiment of open subject content, 918 stereogram.Deflection element 916,918 and end block 300 can make with invar.OBCD can have one or more deflection elements, for example, pre-buckling element and back deflection element, for example its be connected on the OBCD installed part 904 by bolt and with OBCD be connected to corresponding before and back gusset 704A, 704B.Deflection element 916,918 have deflection connection end block connector 1302, screwed hole 1304 and deflection be connected end block wall 1306.As shown in the figure, connector piece 1302 forms actuator L bracket 1308, but should be understood that deflection element 916,918 can be the connector of any kind.Connector board 1306 comprises connector opening 1310, and if necessary, opening can have screw thread.Deflection element 916,918 makes

block

1302,1306 relative to each other rotate round the axis that is formed by flexed portion 1312 length.

Refer again to Fig. 9, OBCD actuator 900 comprises OBCD actuator frame 930.This OBCD actuator frame 930 comprises the horizontally extending ridge in a pair of top, rear wall and diapire.Rear wall for example is connected on the taper beam 932 by bolt.Taper beam 932 comprises structure and the firmware 936 of longitudinal structural part 934 and vertical extension.Taper beam 932 can be connected on the end plate 940 of deflection, and end plate 940 can be by on the L bracket part that is connected to connector members such as the such screw thread coupling of bolt.The end plate element 940 of deflection comprises flex member 942.

Actuator frame 930 can comprise a pair of top water flat-topped ridge, and the actuator frame bearing support can be installed on the top water flat-topped ridge by bolt.Actuator bellows 950 can be made with aluminium or stainless steel.Actuator bellows 950 is attached to framework 930, and as being connected to the framework rear wall with bolt, the framework rear wall is attached to behind the cylindrical ripple pipe of hollow on the plate.Actuator bellows 950 also is connected on the actuator lever arm 952 with bolt by cylindrical ripple pipe header board.Actuator bellows 950 also can comprise bellows actuation fluid or liquid.

Actuator lever arm 952 is connected to the dihedral arm 954 of downward extension.The thin plate 960 of the deflection that this dihedral arm 954 is connected to is that lever arm 952 extends betwixt, flatly extend from the framework diapire and the thin plate 962 of deflection, lever arm align with the central axis of the dihedral arm 954 of lever arm usually.The end of dihedral arm 954 also is attached to connector piece 964 by the thin plate 966 of deflection.

Flexed plate 960,962,966 is the common pivotal point that forms in the scope of the bottom of dihedral arm 952, this point is positioned at the plane of flexed plate 960 and the intersection of deflection band 962, when actuator bellows 950 expands or shrinks, 952 on actuator lever arm centers on this point and pivots, by flex member 966 power is applied to connector piece 940, therefore, be connected to preceding gusset 704A by pre-buckling connector 940.

Framework 950 has overhang 972.This overhang 972 comprises the cylindrical channel 974 of admitting reloading spring 976, and reloading spring also can be received within the cylinder open 978 in actuator lever arm 952 upper ends.Passage 974 also can comprise the spring compressing mechanism 980 of screw thread.980 pairs of springs 976 of the spring compressing mechanism of this screw thread apply compression stress, with prestrain dispersing optics element body 502, apply bending in opposite direction in body 502 when applying bending not expand at the actuator bellows.

By the fluid openings in the bellows end plate gas, fluid or liquid are introduced in the bellows 950 or from wherein removing, exert pressure with this, bellows 950 just can expand or withdrawal the preload position that the center is for example set up under the influence of reloading spring 976 from certain center.By the pipeline for fluids 986 by 988 supportings of fluid feed system pipeline strutting piece, gas-pressurized, fluid or liquid can be from actuator fluid feed systems 984.

Those skilled in the art will be understood that, above-mentioned OBCD can be applied to power on the dispersing optics element along the top of dispersing optics element, for example, apply compression stress, this compression stress can (should be understood that again on vertical direction is used in masterpiece the central axis of body, whole levels is with vertical all relevant with the orientation of as shown in Figure 8 line constriction module, orientation shown in the vertical view of module, and any actual orientation of module when not using with reality is relevant, in fact, the actual orientation of module for example can be to make paper be positioned at vertical plane, and is actually end view with respect to the level in the installation module in using and the vertical view of vertical Figure 10).Such power can make the groove distortion (being oriented such that the view of Figure 10 center line constriction module again, as vertical view) of dispersing optics element along direction shown in the end view of Fig. 6.

Controller 980 is connected to OBCD actuator 900.This controller can comprise feedback loop, and this loop analysis is from the bandwidth of the light beam of reflective surface reflects back and correspondingly adjust the shape of reflecting surface by adjusting the power that is applied by actuator, for example, adjusts the bending of reflecting surface.Controller 980 can comprise operating OBCD actuator 900 and the software and hardware of analysis by the shape of the bandwidth of the light beam of reflective surface reflects back and adjustment reflecting surface.Controller 980 can be linked to other controller or comprise other controllers, such as central server or system controller (not shown) and pressure controller (not shown), the QB1T controller of making such as the ratio air company (Proportion Air) by the McCordsville city of Indiana.Sort controller can use the input current of 4-20mA to come setting pressure, and this pressure is 0 to maximum pressure, is limited by the bandwidth tuning scope and the Machine Design that require.For example, 5 bar or 10 bar can be used as maximum pressure.

Have found that the needed pressure of OBCD tuning range (reversing) that reaches 300fm is very rational for the design shown in Fig. 5-8 example, and be confirmed as than slightly little for what expect in some cases.Crosstalking between HBCD and the OBCD is very little, for example, just causes sagging in the HBCD less than about 20nm.

Such as plate 960 and can be by making such as the low-down material of the such CTE of invar with 962,966 deflection element and connector 940.Should be understood that, in Machine Design, also can use other material of low-thermal-expansion, such as the part that is become by the ULE glass processing.

Framework and taper beam can be by the aluminium manufacturings, comprise connector piece 940 and flex member 1312, aluminium is such as 7075 aluminium, and it can be flexed plate 960 and band flex member 962,966, and they form the pivotal point of the actuator lever arm 952 that is connected to actuator bellows 950 front ends.The end block 914 of deflection and the remainder of BCD casing frame 922 and middle flexed plate 916 be available invar or aluminium or other has low CTE and high-intensity suitable material is made also, or forms by both suitable groups are incompatible.Actuator frame 930 is available aluminium manufacturing such as 7075 aluminium also.Plate 902 can be with manufacturings such as invar or aluminiums.

The present patent application people determined, this distortion the BW tuning range can be expanded as on be limited to LNM＞0.50pm, for example, make scope nargin cover 0.25 to 0.50pm the tuning specification of system BW.

The effect of bandwidth shows, makes in the laser structure of seed laser amplifier, can carry out laser in the such power oscillator of all like power ring amplifiers (" PRA ") and amplify.Just described in No. the 7366219th, the United States Patent (USP) as mentioned above, for example, in the narrow module of line of variable amplification, bandwidth can the about 70fm of conversion to the relation of magnification ratio, yet, on the grating deformation level that openly each side of subject content produces, for example, on magnitude shown in Figure 5, the vertical power that applies does not change beam shape significantly and disperses shape.Because the incident beam that is incident on the dispersing optics element amplifies greatlyyer, so, the power that applies can exert all one's strength and the bandwidth correction between relation roughly be linear.Have found that, for the vertical force/BW conversion of this scope, change with regard to transportable horizontal BCD curve by approximate 1/2.Also show, by applying the 70fm migration that power causes along vertical direction in dispersing optics element body 502, do not make and cause the remarkable variation of wavelength stability, especially compare with independent dwindling, even and after vertical force applied, bandwidth also continued to observe the reliable standard of verifying as field survey.

Determine that also the resonance according to the OBCD of the each side that discloses subject content can be used to slow down significantly bandwidth is used as the suitability optics with the wavefront coupling that enters effectively.Wavefront surface is owing to the sound gas disturbance that influences bandwidth by meeting has distortion.Use the situation among the standard LNM to compare with so far generation, by zero grid is vertical depart near fine tuning OBCD, can make this bandwidth disturbance reduce to minimum.

Also have been found that the each side according to open subject content, combine the variable orifice of the line constriction module porch that comprises OBCD mechanism, just can make the utilization of OBCD become very effective.The hole that restriction is incident on beam sizes on the grid can be adjusted, and described beam sizes is parallel to the direction of grid groove, the bandwidth of control light when also further allowing under grid is in the stationary bending condition.When for example optimizing the bandwidth of light beam and divergence characterization at the same time, this kind combination is of great use.

Another variant of open subject content is, uses the actuating of OBCD in conjunction with the beam spread of vertical direction, and vertical direction is roughly parallel to the direction of groove.For the fixing vertical skew of grid, expand or reduce the light beam that incides on the vertical direction on the grid, can form the tuning of bandwidth, selected because wavelength wide/close limit is come to a point by grid, and be included in total reflectance spectrum.

In addition, more than the OBCD of explanation does not conflict with the utilization of existing horizontal BCD.

See that the separation (" expansion ") that the vertical crooked generation of grid block 502 is inhomogeneous and the line of rabbet joint are with respect to the inclination of vertical axis.In Littrow (Littrow) device, the light that incides on the grating core is returned along the incident direction diffraction.Yet, incide the light diffraction in face no longer on the grating right-hand member, because groove tilts: light is returned with the angle B diffraction downward slightly with respect to incident direction A, as shown in Figure 6.The light beam that is incident on the grating left end is returned with same little angle B diffraction with respect to incident beam equally, but has opposite symbol.Therefore, the light beam that returns from grating is owing to the change of groove orientation manifests distortion.

The applicant to the required Zygo interferometry of various bandwidth tuning targets to grating distortion made rough estimate.For instance, for the tuning range of 250fm (250fm-500fm), caused wavefront distortion measurement value is 100 μ rad, and this is worth corresponding to the grating bending of the radius of curvature of R=3.5Km and 4.4um sagging.For the tuning range of 1.2pm (0.25-1.45pm), radius of curvature is reduced to and is approximately 0.98Km, and the grating that causes is sagging to be 16um.This skew is made an uproar to the wavelength that grating top to bottom produces 0.21pm/mm.Figure 15 A is the curve chart 1500 according to the E95 bandwidth of the each side of the embodiment of open subject content.This E95 bandwidth tuning is suitable with the vertical bent horizontal of grating, and is for example, suitable with the wavefront distortion from the Zygo interferometry.

For making comparisons, the radius of curvature of grating that typically has the horizontal BCD of adjustment is being about the magnitude of 40Km, the sagging 0.63um of being about that maximum is brought out.

For the effect of repairing bandwidth by use OBCD, must consider following factor: the connection between level and the vertical BCD, light beam parameters change, and method of measurement, but the variation such as the spectral shape of the method for measurement of the believable instrument of tracking on the trimming device, instrument is such as LTB spectrometer, especially E95.

Connection between the vertical and horizontal BCD has minimized to insignificant horizontal BCD compensation, for example, and less than bringing out sagging about 20nm.

Following Table I is pointed out because the each side of the embodiment of the open subject content of basis has used double acting bandwidth controlling organization to record the parameter of filing, shown in Fig. 5-8.

Table I

The present patent application people considers the option of a plurality of actuators, such as above-mentioned pneumatic; Piezoelectric, or the deformable material of other appropriate actuation are such as the material of mangneto contraction; Be attached to the motor of manual lead by axle, such as being used for the motor of embodiment as shown in Figure 8; Electromagnetism; Hydraulic pressure (perhaps be suitable or better scheme shown in Fig. 5-8, and similar in design, but perhaps more expensive).The criterion of considering be technical risk, power consumption, speed, the necessary LNM GRAS material revising, this actuator is provided for property, and life-span etc.Based on a variety of causes, be confirmed as onlyly according to the embodiment shown in Fig. 9-12, but also can use one or more in these options, especially, the embodiment of hydraulic pressure for example, and more or less reach with Fig. 9-12 in the identical effect conceived of disclosed subject content.

For the pneumatic embodiment shown in Fig. 9-12, find that its life-span is the function of the solid degree of pressure controller life-span and the mechanical part that power is sent to the dispersing optics element body.In general, in structural line constriction module (LNM) process, can use acceptable optical material (GRA material).The bellows of 100mm diameter is confirmed as applying power and 3 bar (43psi) gas pressure of 2500N in bellows, such as helium or air pressure.This device is a push controller, and therefore, if necessary, then needing has spring mechanism or similar device, comes in opposite direction grating body 502 to be applied power, for example, carries out prestrain.

As shown in Figure 14 A and 14B, adopted and used a plurality of independently glue spots to admit the surface, with on the life-span of vertical BCD (OBCD) actuator, reduce glue spots is thrown off bonding at

end block

704A, 704B risk.This can be avoided the possibility at grating end emersion wave front-distortion, for example, if must carry out the gummed of gross area, rather than the gummed of front point, each surface of then not using Figure 14 A.

Because the method that can need to activate is by hand adjusted the distortion of grating body 502, for example, be used for determining the baseline of self actuating, so, still can utilize the horizontal BCD according to existing BCD design.In addition, the grating curvature of controlling in two Different Plane can have other useful result, selects/control such as the FWHM that is independent of on the E95, and feasible selection the/control bandwidth is more responsive etc.

Figure 15 B is according to the each side of the embodiment of open subject content, is used for making the stereogram such as another device 1550 of the dispersing optics element bending of grating.Shown in Figure 15 A, horizontal BCD is shown as the orientation along Fig. 5, that is, the grating face 508 on grating body 502 bottoms and the top, that is to say roughly in paper as shown in Figure 14 A towards preceding.Two End Force piece/

plate

704A, 704B are shown as the front-end and back-end that for example are attached to grating body 502 by the method for gummed, each End Force piece/plate can have can with

corresponding end block

704A, 704B all-in-one-piece flexed plate 1554.Each flexed plate 1554 respectively is connected on a pair of bar keeper 1560.These bar keeper 1560 each maintenances are connected to the respective end of respective rods 1562.

Actuator 1570 comprises mechanism bellows 1572 or other expansion or that shrink.Bellows 1572 is connected on the flexed plate 1572.Each flexed plate 1574 is connected to deflection element 1554.Each deflection element 1554 is connected on the respective end of respective rods 1562 by boom end 1560.

In operation, when actuator 1570 expands, for example by being incorporated into such as the pressure fluid of liquid or gas in the bellows 1572, pressure fluid such as hydraulic oil or water, gas is helium or nitrogen or air for example, so, power just can act on two end plates 1574, roughly in by the plane of bar 1562 center lines, two end plates are pulled to together, therefore, make 508 bendings of grating face.Should be understood that the bending mechanism 1550 of the grating face shown in Figure 15 B also can be oriented to as shown in Figure 6, that is, be generally parallel to grating top surface 504 and make the grating facial disfigurement.

Therefore, the grating body deformability mechanism 1550 shown in Figure 15 B can provide the straightforward procedure that makes grating body 502 bend in one direction, and it makes material and compensates for minimum for increasing bandwidth simultaneously.By between two ends, producing tensile force, can in grating, cause bending.Tensile member for example bar 1562 and flex member 1554 can select to have the material of low-down relatively thermal coefficient of expansion by making with grating body 502 identical materials, or other has the material of low-down relatively CTE, for example invar Invar

Or very low CTE and than other combined material of light weight, so that thermal expansion difference is minimum between the theme material of grating substrate body 502 and announcement, can make the flex member 1554 of combination and the residual heat differential expansion of bar 1562 be compensated by in bellows 1572, keeping constant compression force and keeping constant power thus.The embodiment of Figure 15 B can provide the power amplifier, and gain amplifier can be greater than 7 times.The flex member 1554 also material of available suitable light weight is made, and such as aluminium, for example is 7075 aluminium.

Figure 16 A and 16B schematically illustrate the grating installed part 1600 according to the each side of the embodiment of open subject content, the deflection that comes in handy.This grating installed part 1600 can be attached on the floor of LNM shell 1002 as illustrated in fig. 10.Except other deflection connector allows thermal expansion difference between the grating made by ULE and the installation/receiving member made of aluminum, also can use flex member 1602 to resist distortion by the grating body 502 that causes such as OBCD.Should be understood that the past is used for the flex member of the thermal expansion difference of operation in the opposing plane, can consider the distortion of the grating body 502 that existing form BCD causes usually,, also be referred to as HBCD sometimes here.

The bending of grating body is provided by OBCD, adds the mounting points 1602 of deflection, so that the arc sections 1608 of grating is moved in perpendicular to the plane that surface 1608 is installed.They for example can be the form of one or more vertical deflection installed parts, that is, be applied to the grating top on the power of the distortion shown in partly illustrating such as Fig. 6 with opposing consistent.Flex member 1602 comprises groove 1606, and it can roughly take the shape of the letter U, but also can have for example corner, forms tongue 1608, and tongue allows deflection in the direction on two surfaces that are orthogonal to the grating installed part.This also can form the prestressed to top offset of tool directed line, to resist the bending of any negative form, for example, is labeled as the prestrain bending of-1 μ m.

By checking the influence of multiple effect, for example, double action, the grating body is applied bending force, namely, the ratio of FWHM and E95 has big variation, different bandwidth measurements in two planes, for the different force levels that are applied on the associated actuator, for example, the bellows among the embodiment of Fig. 9-12 shows that spectral line shape changes significantly with the grating distortion.The distortion grating can cause the rotation of beam profile, and this can manifest more serious after MO, but after amplifier stage is such as the PRA level, can be covered slightly.Light beam also can have vertical migration, and this also can be caused by the alignment relative of MO and PRA beam axis.

Should be understood that, bellows 950,1572 according to the each side of the embodiment of open subject content can be operated with pressure fluid, both can be the compression (namely, pneumatic mode) also can be non-compression fluid (namely, hydraulic way), compressed fluid such as forced air or gas, incompressible fluid such as hydraulic oil or water, term " pressure fluid " refers to comprise two types actuator.

Although above purpose for clear understanding has described the present invention in greater detail, should be realized that, within the scope of attached claims, also can make certain variation and modification.Therefore, it is illustrative and not restrictive that embodiment herein should be considered to, and the present invention is not limited to details given in the literary composition, also can make amendment within the category of the scope of attached claims and equivalent.

Claims

1. the mechanism selected of a bandwidth comprises:

The dispersing optics element, described dispersing optics element has the body that comprises the chromatic dispersion reflecting surface, and described chromatic dispersion reflecting surface comprises along the incident area of the described reflecting surface direction of principal axis extension longitudinally of described dispersing optics element;

First end block, described first end block are arranged on first of described body and vertically hold;

Second end block, described second end block are arranged on second of described body and vertically hold, and vertically end is opposite with described first for described second vertical end;

First actuator, described first actuator is installed on second of the described dispersing optics element, described second opposite with described reflecting surface, described first actuator has first end that is connected to described first end block and second end that is connected to described second end block, described first actuator can be operated and described first end block and described second end block are applied equal and opposite power, so that described body is along the longitudinal axis of described body with along the first direction bending that is orthogonal to the described reflecting surface of described dispersing optics element; And

Second actuator, described second actuator is installed on the 3rd of the described dispersing optics element, described the 3rd and described reflecting surface quadrature, useful first flex member of described second actuating device is connected to first end of described first end block and second end that is connected to described second end block with second flex member, described first actuator can be operated and described first end block and described second end block are applied equal and opposite power, so that described body is along the longitudinal axis of described body with along the second direction bending perpendicular to the described reflecting surface of described dispersing optics element, described second direction is also perpendicular to described first direction, described second actuator comprises the applying mechanism of pressurized stream muscle power, and described first flex member and described second flex member make the described equal and opposite power that is applied by described first actuator and the power decoupling zero that is applied by described second actuator.

2. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that, described pressurized stream muscle power applying mechanism is pneumatic mechanism.

3. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that, described pressurized stream muscle power applying mechanism is hydraulic mechanism.

4. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that the applying mechanism of described pressurized stream muscle power is variable.

5. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that, also comprises:

Carry out manual prestrain adjustment with at least one in described first actuator and described second actuator of constant fixedly amount of deflection.

6. the mechanism of bandwidth selection as claimed in claim 5 is characterized in that, also comprises:

Feedback control loop on described second actuator, described feedback control loop is in response to the spectrum parameter of light.

7. the mechanism selected of bandwidth as claimed in claim 1, it is characterized in that, also be included in the pneumatically actuated and feedback control loop at least one in described first actuator and described second actuator, described pneumatically actuated and described feedback control loop is in response to the spectrum parameter of light.

8. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that also comprise variable orifice, described variable orifice is positioned between the described reflecting surface of incident beam and described dispersing optics element.

9. the mechanism selected of bandwidth as claimed in claim 8 is characterized in that, described variable orifice has variable-sized along the bending direction of described second actuator.

10. the mechanism of bandwidth selection as claimed in claim 1 is characterized in that, also comprises optical beam expander, and described optical beam expander is used for the incident beam that described incident area is crossed in expansion.

11. a method of selecting bandwidth comprises:

Expansion is across the incident beam on the incident area of the reflecting surface of dispersing optics element;

Use first direction along the reflecting surface that is orthogonal to described dispersing optics element by first bending force that first actuator applies, make the reflecting surface bending of described dispersing optics element;

Use along perpendicular to the second direction of the reflecting surface of described dispersing optics element by second bending force that second actuator applies, make the described reflecting surface bending of described dispersing optics element, described second direction is also perpendicular to described first direction; And

Come described second bending force of decoupling zero by at least one flex member, make second power of decoupling zero that first power is increased or reduce.

12. method as claimed in claim 11 is characterized in that, when the described reflecting surface that makes described dispersing optics element is crooked along first direction, changes the spacing between the dispersion characteristic on the described reflecting surface equably according to the position along described first direction.

13. method as claimed in claim 11 is characterized in that, also comprises:

Be modified in the size of incident beam on the described reflecting surface, to comprise the zones of different of curved reflection surface.

14. method as claimed in claim 11 is characterized in that, in response to the feedback that obtains from the folded light beam characteristic, makes described reflecting surface along at least one the direction bending in first direction and the second direction.