Summary of the invention
For solving the problem that prior art exists, the invention provides a kind of preparation method of colored solar battery, can prepare colored solar battery with multiple color.
The present invention is achieved in that
A kind of preparation method of colored solar battery may further comprise the steps:
(1) prepare electron beam evaporation source: choose magnesium fluoride particle and yttria particles, wherein, the magnesium fluoride granular size is 1mm~3mm, and the purity of magnesium fluoride is greater than 99.995%, and the yttria particles size is 1mm~5mm, and yittrium oxide purity is greater than 99.995%;
(2) battery sheet substrate is prepared: choose the crystal silicon cell sheet, in thousand grades of clean rooms the crystal silicon cell sheet is carried out cleaning processing, with the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) magnesium fluoride particle and yttria particles are respectively charged in the crucible of electron beam evaporation equipment, vacuumize, start lining heat;
When (4) treating that underlayer temperature and vacuum degree reach set point, open the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, form colored laminated film, make the colored solar battery.
Preferably, in the step of the present invention (3), the pressure when vacuumizing is 3 * 10
-3Pa~5 * 10
-5Pa; Design temperature during heated substrate is 50~300 ℃.
Preferably, in the step of the present invention (4), first plating one deck magnesium fluoride film during plated film plates one deck Yttrium oxide thin film again, and two kinds of films are alternating deposit successively, and the number of plies of thin film deposition is respectively 3 layers or 5 layers or 7 layers.
Preferably, in the step of the present invention (4), the thickness of magnesium fluoride film is 10~100nm, and the thickness of Yttrium oxide thin film is 10~100nm, and the thickness of colored laminated film is 50~200nm.
Alternatively, the color of colored laminated film comprises in the step of the present invention (4): redness, green, yellow, grey, blueness, purple.
Preferably, during evaporation coating, vaporization voltage is 6KV or 8KV in the step of the present invention (4), and heater current is 10mA~500mA.
Therefore compared with prior art, the present invention has following beneficial effect:
The present invention is a matrix with the crystal silicon cell sheet, adopt the electron beam evaporation deposition method to plate the laminated film of magnesium fluoride and yittrium oxide in its surface, the film of the different numbers of plies, thickness can demonstrate multiple color, and even, the fine and close nothing of film surface ftractures, nothing comes off, the film particles size evenly, thickness is easy to control, is fit to large-scale production.The photovoltaic module made from this colored solar battery can be applied to the large-sized solar electricity generation system, especially is suitable for BIPV, not only has electricity generate function, can also realize the perfect adaptation with facade.
Embodiment
Describe the present invention in detail below in conjunction with specific embodiment, be used for explaining the present invention in this illustrative examples of the present invention and explanation, but not as a limitation of the invention.
Embodiment 1
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 80 ℃, and being evacuated to pressure is 2 * 10
-4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 10mA, deposit the thick magnesium fluoride film of one deck 20nm earlier, deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make red solar cell.
Embodiment 2
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 100 ℃, and being evacuated to pressure is 8 * 10
-5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 500mA, the thick magnesium fluoride film of deposition one deck 30nm deposits the thick Yttrium oxide thin film of one deck 20nm then earlier, deposits the thick magnesium fluoride film of one deck 30nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 30nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 30nm again, make the green solar battery.
Embodiment 3
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 2mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 120 ℃, and being evacuated to pressure is 6 * 10
-5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 100mA, the thick Yttrium oxide thin film of the thick magnesium fluoride film of deposition one deck 20nm, and then deposition one deck 30nm earlier, deposit the thick magnesium fluoride film of one deck 20nm again, and then the thick Yttrium oxide thin film of deposition one deck 30nm, deposit the thick magnesium fluoride film of one deck 20nm again, make yellow solar cell.
Embodiment 4
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 60 ℃, and being evacuated to pressure is 8 * 10
-5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 300mA, the thick magnesium fluoride film of deposition one deck 20nm deposits the thick Yttrium oxide thin film of one deck 40nm then earlier, deposits the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make the grey solar cell.
Embodiment 5
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 60 ℃, and being evacuated to pressure is 4 * 10
-4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 400mA, the thick magnesium fluoride film of deposition one deck 20nm deposits the thick Yttrium oxide thin film of one deck 20nm then earlier, deposits the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make blue solar cell.
Embodiment 6
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 100 ℃, and being evacuated to pressure is 8 * 10
-5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 200mA,, the thick magnesium fluoride film of deposition one deck 20nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 30nm then earlier, deposit the thick magnesium fluoride film of one deck 20nm again, make the purple solar cell.
Embodiment 7
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 1mm, the yttria particles size is 5mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 300 ℃, and being evacuated to pressure is 3 * 10
-3Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 100mA,, the thick magnesium fluoride film of deposition one deck 10nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 100nm then earlier, deposit the thick magnesium fluoride film of one deck 10nm again, make the colored solar battery.
Embodiment 8
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 3mm, the yttria particles size is 1mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 50 ℃, and being evacuated to pressure is 5 * 10
-5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 250mA,, the thick magnesium fluoride film of deposition one deck 100nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 10nm then earlier, deposit the thick magnesium fluoride film of one deck 90nm again, make the colored solar battery.
Embodiment 7
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 1mm, the yttria particles size is 4mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 250 ℃, and being evacuated to pressure is 5 * 10
-4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 350mA,, the thick magnesium fluoride film of deposition one deck 60nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 60nm then earlier, deposit the thick magnesium fluoride film of one deck 60nm again, make the colored solar battery.
More than the technical scheme that the embodiment of the invention provided is described in detail, used specific case herein the principle and the execution mode of the embodiment of the invention are set forth, the explanation of above embodiment only is applicable to the principle that helps to understand the embodiment of the invention; Simultaneously, for one of ordinary skill in the art, according to the embodiment of the invention, the part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.