CN102194918A - Manufacturing method of colored solar batteries - Google Patents

Manufacturing method of colored solar batteries Download PDF

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Publication number
CN102194918A
CN102194918A CN2010101214565A CN201010121456A CN102194918A CN 102194918 A CN102194918 A CN 102194918A CN 2010101214565 A CN2010101214565 A CN 2010101214565A CN 201010121456 A CN201010121456 A CN 201010121456A CN 102194918 A CN102194918 A CN 102194918A
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magnesium fluoride
colored
solar battery
crystal silicon
cell sheet
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CN102194918B (en
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赵枫
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention discloses a manufacturing method of colored solar batteries, comprising the following steps: (1) preparing an electron beam evaporation source, and selecting magnesium fluoride particles and yttrium oxide particles, wherein, the size of the magnesium fluoride particle is 1mm-3mm; the purity of the magnesium fluoride is larger than 99.995%, the yttrium oxide particle is 1mm-5mm, and the purity of the yttrium oxide is larger than 99.995%; (2) preparing a battery plate substrate, selecting a crystalline silicon battery plate, cleaning the crystalline silicon battery plate in a class 1000 clean room, and packaging the crystalline silicon battery plate into a rotating frame of electron beam evaporation equipment after the positive electrode of the crystalline silicon battery plate is masked; (3) respectively packaging the magnesium fluoride particles and the yttrium oxide particles into a crucible of the electron beam evaporation equipment, vacuumizing and starting a substrate heating device; and (4) opening an electron gun power source, and carrying out evaporation coating on the surface of the crystalline silicon battery plate to form a colored composite thin film, so as to prepare into a colored solar battery. By utilizing the manufacturing method provided by the invention, the colored color solar battery with multiple colors can be prepared.

Description

A kind of preparation method of colored solar battery
Technical field
The present invention relates to the photovoltaic field, particularly relate to a kind of preparation method of colored solar battery.
Background technology
At present, solar cell of a great variety, mainly comprise three major types: silicon is solar cell, compound semiconductor solar cell and organic photovoltaic cell, the color of these solar cells generally is blueness or black.Crystal-silicon solar cell is owing to showing blueness at its surface deposition one deck silicon nitride film as antireflection film, and compound semiconductor solar cell and organic photovoltaic cell generally all are black.The shown color of coming out of solar cell is because it reflects the light of this color, conventional blue solar cell be exactly battery surface adopt plasma reinforced chemical vapour deposition method (PECVD) deposited a layer thickness about 75nm silicon nitride film and demonstrate blueness, the thickness difference of film, the color relation of battery can there are differences.Therefore, when the conventional solar cell sheet was used for BIPV, color can compare dullness and the collocation of many buildings is not in tune, and is outside the building very single in the sight design, influenced the aesthetic feeling of building.
Summary of the invention
For solving the problem that prior art exists, the invention provides a kind of preparation method of colored solar battery, can prepare colored solar battery with multiple color.
The present invention is achieved in that
A kind of preparation method of colored solar battery may further comprise the steps:
(1) prepare electron beam evaporation source: choose magnesium fluoride particle and yttria particles, wherein, the magnesium fluoride granular size is 1mm~3mm, and the purity of magnesium fluoride is greater than 99.995%, and the yttria particles size is 1mm~5mm, and yittrium oxide purity is greater than 99.995%;
(2) battery sheet substrate is prepared: choose the crystal silicon cell sheet, in thousand grades of clean rooms the crystal silicon cell sheet is carried out cleaning processing, with the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) magnesium fluoride particle and yttria particles are respectively charged in the crucible of electron beam evaporation equipment, vacuumize, start lining heat;
When (4) treating that underlayer temperature and vacuum degree reach set point, open the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, form colored laminated film, make the colored solar battery.
Preferably, in the step of the present invention (3), the pressure when vacuumizing is 3 * 10 -3Pa~5 * 10 -5Pa; Design temperature during heated substrate is 50~300 ℃.
Preferably, in the step of the present invention (4), first plating one deck magnesium fluoride film during plated film plates one deck Yttrium oxide thin film again, and two kinds of films are alternating deposit successively, and the number of plies of thin film deposition is respectively 3 layers or 5 layers or 7 layers.
Preferably, in the step of the present invention (4), the thickness of magnesium fluoride film is 10~100nm, and the thickness of Yttrium oxide thin film is 10~100nm, and the thickness of colored laminated film is 50~200nm.
Alternatively, the color of colored laminated film comprises in the step of the present invention (4): redness, green, yellow, grey, blueness, purple.
Preferably, during evaporation coating, vaporization voltage is 6KV or 8KV in the step of the present invention (4), and heater current is 10mA~500mA.
Therefore compared with prior art, the present invention has following beneficial effect:
The present invention is a matrix with the crystal silicon cell sheet, adopt the electron beam evaporation deposition method to plate the laminated film of magnesium fluoride and yittrium oxide in its surface, the film of the different numbers of plies, thickness can demonstrate multiple color, and even, the fine and close nothing of film surface ftractures, nothing comes off, the film particles size evenly, thickness is easy to control, is fit to large-scale production.The photovoltaic module made from this colored solar battery can be applied to the large-sized solar electricity generation system, especially is suitable for BIPV, not only has electricity generate function, can also realize the perfect adaptation with facade.
Embodiment
Describe the present invention in detail below in conjunction with specific embodiment, be used for explaining the present invention in this illustrative examples of the present invention and explanation, but not as a limitation of the invention.
Embodiment 1
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 80 ℃, and being evacuated to pressure is 2 * 10 -4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 10mA, deposit the thick magnesium fluoride film of one deck 20nm earlier, deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make red solar cell.
Embodiment 2
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 100 ℃, and being evacuated to pressure is 8 * 10 -5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 500mA, the thick magnesium fluoride film of deposition one deck 30nm deposits the thick Yttrium oxide thin film of one deck 20nm then earlier, deposits the thick magnesium fluoride film of one deck 30nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 30nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 30nm again, make the green solar battery.
Embodiment 3
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 2mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 120 ℃, and being evacuated to pressure is 6 * 10 -5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 100mA, the thick Yttrium oxide thin film of the thick magnesium fluoride film of deposition one deck 20nm, and then deposition one deck 30nm earlier, deposit the thick magnesium fluoride film of one deck 20nm again, and then the thick Yttrium oxide thin film of deposition one deck 30nm, deposit the thick magnesium fluoride film of one deck 20nm again, make yellow solar cell.
Embodiment 4
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 60 ℃, and being evacuated to pressure is 8 * 10 -5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 300mA, the thick magnesium fluoride film of deposition one deck 20nm deposits the thick Yttrium oxide thin film of one deck 40nm then earlier, deposits the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 40nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make the grey solar cell.
Embodiment 5
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 60 ℃, and being evacuated to pressure is 4 * 10 -4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, vaporization voltage is 6KV, heater current is 400mA, the thick magnesium fluoride film of deposition one deck 20nm deposits the thick Yttrium oxide thin film of one deck 20nm then earlier, deposits the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 20nm again; Deposit the thick Yttrium oxide thin film of one deck 20nm then, deposit the thick magnesium fluoride film of one deck 20nm again, make blue solar cell.
Embodiment 6
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, granular size is 3mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 100 ℃, and being evacuated to pressure is 8 * 10 -5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 200mA,, the thick magnesium fluoride film of deposition one deck 20nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 30nm then earlier, deposit the thick magnesium fluoride film of one deck 20nm again, make the purple solar cell.
Embodiment 7
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 1mm, the yttria particles size is 5mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 300 ℃, and being evacuated to pressure is 3 * 10 -3Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 100mA,, the thick magnesium fluoride film of deposition one deck 10nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 100nm then earlier, deposit the thick magnesium fluoride film of one deck 10nm again, make the colored solar battery.
Embodiment 8
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 3mm, the yttria particles size is 1mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 50 ℃, and being evacuated to pressure is 5 * 10 -5Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 250mA,, the thick magnesium fluoride film of deposition one deck 100nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 10nm then earlier, deposit the thick magnesium fluoride film of one deck 90nm again, make the colored solar battery.
Embodiment 7
Make the colored solar battery according to the following step:
(1) choose respectively 200 gram purity be 99.995% magnesium fluoride and yttria particles as evaporation source, the magnesium fluoride granular size is 1mm, the yttria particles size is 4mm;
(2) choose the crystal silicon cell sheet, in thousand grades of clean rooms, the crystal silicon cell sheet is carried out cleaning and handle, the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) evaporation source is packed in the crucible, start lining heat, underlayer temperature is 250 ℃, and being evacuated to pressure is 5 * 10 -4Pa;
(4) start the electron gun power supply, evaporation coating is carried out on surface to the crystal silicon cell sheet, vaporization voltage is 8KV, heater current is 350mA,, the thick magnesium fluoride film of deposition one deck 60nm on the battery sheet deposits the thick Yttrium oxide thin film of one deck 60nm then earlier, deposit the thick magnesium fluoride film of one deck 60nm again, make the colored solar battery.
More than the technical scheme that the embodiment of the invention provided is described in detail, used specific case herein the principle and the execution mode of the embodiment of the invention are set forth, the explanation of above embodiment only is applicable to the principle that helps to understand the embodiment of the invention; Simultaneously, for one of ordinary skill in the art, according to the embodiment of the invention, the part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.

Claims (7)

1. the preparation method of a colored solar battery is characterized in that this method may further comprise the steps:
(1) prepare electron beam evaporation source: choose magnesium fluoride particle and yttria particles, wherein, the magnesium fluoride granular size is 1mm~3mm, and the purity of magnesium fluoride is greater than 99.995%, and the yttria particles size is 1mm~5mm, and the purity of yittrium oxide is greater than 99.995%;
(2) battery sheet substrate is prepared: choose the crystal silicon cell sheet, in thousand grades of clean rooms the crystal silicon cell sheet is carried out cleaning processing, with the front electrode of crystal silicon cell sheet carry out packing into behind the mask swivel mount of electron beam evaporation equipment;
(3) magnesium fluoride particle and yttria particles are respectively charged in the crucible of electron beam evaporation equipment, vacuumize, start lining heat;
(4) open the electron gun power supply, evaporation coating is carried out on the surface of crystal silicon cell sheet, form colored laminated film, make the colored solar battery.
2. the preparation method of a kind of colored solar battery according to claim 1 is characterized in that: the pressure when vacuumizing in the described step (3) is 3 * 10 -3Pa~5 * 10 -5Pa.
3. the preparation method of a kind of colored solar battery according to claim 1 is characterized in that: the temperature in the described step (3) during heated substrate is 50 ℃~300 ℃.
4. the preparation method of a kind of colored solar battery according to claim 1, it is characterized in that: plating one deck magnesium fluoride film earlier during plated film in the described step (4), plate one deck Yttrium oxide thin film again, two kinds of films are alternating deposit successively, and the number of plies of thin film deposition is respectively 3 layers or 5 layers or 7 layers.
5. the preparation method of a kind of colored solar battery according to claim 4, it is characterized in that: the thickness of magnesium fluoride film is 10~100nm in the described step (4), the thickness of Yttrium oxide thin film is 10~100nm, and the thickness of colored laminated film is 50~200nm.
6. the preparation method of a kind of colored solar battery according to claim 1 is characterized in that: the color of colored laminated film comprises in the described step (4): redness, green, yellow, grey, blueness, purple.
7. the preparation method of a kind of colored solar battery according to claim 1 is characterized in that: during evaporation coating, vaporization voltage is 6KV or 8KV in the described step (4), and heater current is 10mA~500mA.
CN2010101214565A 2010-03-05 2010-03-05 Manufacturing method of colored solar batteries Expired - Fee Related CN102194918B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876592A (en) * 2017-02-15 2017-06-20 中国科学院合肥物质科学研究院 Colorful solar cell and preparation method thereof
CN109004040A (en) * 2018-06-11 2018-12-14 汉能移动能源控股集团有限公司 Solar power generation tile and substrate thereof and preparation methods of solar power generation tile and substrate
CN110963714A (en) * 2018-09-25 2020-04-07 汉能移动能源控股集团有限公司 Colored glass, preparation method thereof and colored solar cell module
CN111045268A (en) * 2019-12-31 2020-04-21 哈尔滨工业大学 All-solid-state electrochromic device with fluoride as electrolyte layer and preparation method thereof
CN113921624A (en) * 2021-11-22 2022-01-11 上海交通大学 Colorful solar photovoltaic cell and assembly

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1134760A (en) * 1993-11-05 1996-10-30 时至准钟表股份有限公司 Solar battery device and its manufacture
CN2733597Y (en) * 2004-09-27 2005-10-12 西安佳阳新能源有限公司 Color photovoltaic assembly
CN1910121A (en) * 2004-04-26 2007-02-07 兴亚硝子株式会社 Multicolor development glass vessel and process for producing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1134760A (en) * 1993-11-05 1996-10-30 时至准钟表股份有限公司 Solar battery device and its manufacture
CN1910121A (en) * 2004-04-26 2007-02-07 兴亚硝子株式会社 Multicolor development glass vessel and process for producing the same
CN2733597Y (en) * 2004-09-27 2005-10-12 西安佳阳新能源有限公司 Color photovoltaic assembly

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876592A (en) * 2017-02-15 2017-06-20 中国科学院合肥物质科学研究院 Colorful solar cell and preparation method thereof
CN109004040A (en) * 2018-06-11 2018-12-14 汉能移动能源控股集团有限公司 Solar power generation tile and substrate thereof and preparation methods of solar power generation tile and substrate
CN110963714A (en) * 2018-09-25 2020-04-07 汉能移动能源控股集团有限公司 Colored glass, preparation method thereof and colored solar cell module
CN111045268A (en) * 2019-12-31 2020-04-21 哈尔滨工业大学 All-solid-state electrochromic device with fluoride as electrolyte layer and preparation method thereof
CN113921624A (en) * 2021-11-22 2022-01-11 上海交通大学 Colorful solar photovoltaic cell and assembly

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Application publication date: 20110921

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