CN102192785B - Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation - Google Patents
Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation Download PDFInfo
- Publication number
- CN102192785B CN102192785B CN 201010128358 CN201010128358A CN102192785B CN 102192785 B CN102192785 B CN 102192785B CN 201010128358 CN201010128358 CN 201010128358 CN 201010128358 A CN201010128358 A CN 201010128358A CN 102192785 B CN102192785 B CN 102192785B
- Authority
- CN
- China
- Prior art keywords
- fourier transform
- light guide
- optical waveguide
- integrated light
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 70
- 230000003287 optical effect Effects 0.000 title claims abstract description 64
- 238000001228 spectrum Methods 0.000 claims abstract description 21
- 238000005070 sampling Methods 0.000 claims abstract description 18
- 230000008878 coupling Effects 0.000 claims abstract description 13
- 238000010168 coupling process Methods 0.000 claims abstract description 13
- 238000005859 coupling reaction Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 13
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 30
- 230000010287 polarization Effects 0.000 claims description 18
- 239000011780 sodium chloride Substances 0.000 claims description 15
- 239000007864 aqueous solution Substances 0.000 claims description 13
- 239000000243 solution Substances 0.000 claims description 13
- 230000002572 peristaltic effect Effects 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 11
- 239000008367 deionised water Substances 0.000 claims description 11
- 229910021641 deionized water Inorganic materials 0.000 claims description 11
- 230000010365 information processing Effects 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 28
- 239000011521 glass Substances 0.000 description 11
- 230000009466 transformation Effects 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 7
- 230000007613 environmental effect Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000000306 component Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Images
Abstract
The invention discloses an integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation, relating to a light MEMS (Micro-Electro-Mechanical Systems) processing technology, an integrated optical waveguide sensing technology and a digital signal processing technology. The integrated optical waveguide Fourier transform spectrograph comprises a light source, a chip of an integrated optical waveguide interferometer, an optical detector, a sample cell, a flow control sampling system and a digital signal processing system, wherein the sample cell of the integrated optical waveguide Fourier transform spectrograph is fixed on the surface of the chip of the optical waveguide interferometer, and the flow control sampling system is communicated with the sample cell; light emitted from the light source enters the chip of the integrated optical waveguide interferometer through prism coupling (or optical grating coupling or end face coupling) so as to become wave guiding light; and an interference optical signal output by the chip of the integrated optical waveguide interferometer in a coupling way is received by the optical detector, and an electrical signal generated by the optical detector is transmitted to the digital signal processing system which is connected with the optical detector so as to be processed to realize the inversion reconstruction of an input spectrum. The integrated optical waveguide Fourier transform spectrograph disclosed by the invention has the advantages of novel method, simple device structure, convenience for use, small size, light weight and easiness for manufacturing.
Description
Technical field
The present invention relates to integrated light guide sensing technical field, a kind of based on the Fourier transform spectrometer, to the extremely sensitive integrated light guide interferometer of liquid refractivity chip, a kind of novel portable Fourier transform spectrometer, based on integrated light guide principle of interference and surface liquid index modulation method particularly.
Background technology
Spectrometer is the powerful tool of amalyzing substances composition and structure thereof.Spectrometer is in field extensive application, especially miniaturizations such as environmental monitoring, chemical analysis, biomedicine, space exploration, military science and technology and functional materials, and portable spectrometer has the huge market demand in these fields.Be different from the large-scale spectral analysis apparatus in laboratory, miniaturization, portable spectrometer can satisfy the on-the-spot real-time requirement of test, therefore has more wide application prospect and good development trend.
Spectrometer has multiple sorting technique, according to principle of work, can be divided three classes: prism dispersion formula spectrometer, grating beam splitting formula spectrometer and modulating transformation formula spectrometer.Prism dispersion formula and grating beam splitting formula spectrometer are the spectrometers that is based upon the classics on the geometric optical theory, and modulating transformation formula spectrometer is the spectrometric instrument that is based upon on the modulation Computing Principle basis.The former is based on the spectral instrument of slit, adopts prism or grating as the spatial dispersion element, and the latter is based on optical modulation and finishes the instrument that the spectrum composition detects, and mainly finishes dispersion based on interference modulations.Different from the former is that the result that modulating transformation formula spectrometer collects must just can obtain actual measure spectrum through computational transformation again.Common modulating transformation formula spectrometer comprises Fourier transform spectrometer,, Hadamard Transform Spectroscopy instrument and Fabry-Perot spectrometer.Classical dispersive spectrometer is simple in structure, and system is ripe, is widely used; And modulating transformation formula spectrometer more classical dispersive spectrometer on system forms is complicated, usually comprise moving component, but modulating transformation formula spectrometer is not subjected to the restriction of entrance slit, can obtain the spectral signal that signal to noise ratio (S/N ratio) is higher, resolution is larger by input aperture or the interference modulations of diffusion, be applicable to more high-end application.
Common Fourier transform spectrometer, mostly is based on traditional index glass Michelson interferometer structure, although the Fourier transform spectrometer, of this structure has the advantage of high flux, hyperchannel, high spectral resolution and wide spectral range, but the index glass that is used as catoptron in the spectrometer needs the high-precision drive system of a cover, and needs good damping environment.This system exists also that volume is large simultaneously, quality is heavy, complicated in mechanical structure and be difficult for microminiaturized shortcoming.In addition, spectrometer adopts the space free light beam, is easy to be subject to environmental interference.
The development of Micro-Opto-Electro-Mechanical Systems (MOEMS) technology, detecting technique and advanced machining technology provides increasing possibility for miniaturization, the microminiaturization of modulation system Fourier transform spectrometer.Wherein comparatively outstanding is Switzerland in 1999
A kind of Miniature Fourier transform spectrometer based on the MOEMS technology [O.Manzardo of the people such as the Omar Manzardo development of microtechnology research institute of university (IMT), H.P.Herzig, C.R.Marxer, and N.F.de Rooij, Opt.Lett.24 (1999) 1705-1707.], this spectrometer uses silicon micromirror as the interferometric scanning reflection mirror of Michelson, usable range-10V～+ the ramp voltage electrostatic actuator of 10V drives the movement of silicon micromirror, can realize the accurate scanning to micromirror systems, maximum displacement can reach 39 μ m, repetitive error ± 13nm, can obtain at visible light wave range the resolving power of 10nm, this spectrometer architecture is compact simultaneously, and size only is 5mm * 4mm.But this spectrometer in use is to have adopted the space free light beam to interfere equally, and the shortcoming that is subject to easily external environmental interference still exists.
Summary of the invention
The objective of the invention is to disclose a kind of integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, deficiency with the Fourier transform spectrometer, that overcomes above-mentioned existing Michelson interferometer structure based on traditional index glass, realize a kind of environmental interference simple in structure, anti-, need not to use the high speed of moving component, highly sensitive spectrometer.
For achieving the above object, technical solution of the present invention is:
A kind of integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation comprises light source, integrated light guide interferometer chip, photo-detector, sample cell, Flow Control sampling system, digital information processing system; Its sample cell is fixed on light guide interference meter chip surface, and Flow Control sampling system and sample cell interlink; The light of light source emission enters integrated light guide interferometer chip through prism-coupled becomes guided wave, received by photo-detector from the interference light signal of integrated light guide interferometer chip coupling output, the electric signal that photo-detector produces is transferred to the digital information processing system that links to each other with photo-detector and processes, and realizes the inverting of input spectrum is rebuild.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described integrated light guide interferometer chip, be wherein a kind of of optical waveguide Mach-Ceng Deer interferometer chip, optical waveguide Mechanical Study On Young Interference meter chip, optical waveguide polarization polarization interference meter chip, optical waveguide Michelson interferometer chip, optical waveguide Fabry-Perot interferometer chip, bimodulus interfere type chip of light waveguide, or the distressed structure of above-mentioned interference meter chip.
Described integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation, the light of its described light source emission or be coupled through the grating coupling or through end face.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation when its described spectrometer is used or tests, utilizes the Flow Control sampling system to change the interior liquid refractivity of sample cell, makes in time even variation of refractive index.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described sample cell and Flow Control sampling system are made for adopting miromaching.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, it improves spectrometer resolution by the responsive length of window of regulating integrated light guide interferometer chip, when responsive window changed between 0-20mm, length of window was longer, and spectrometer resolution is higher.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its variation range by liquid refractivity in the expansion sample cell improves the resolution of spectrometer.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described integrated light guide interferometer chip surface is provided with the high refractive index film of one deck gradient-structure, to strengthen the evanescent field intensity of integrated light guide interferometer chip, improve the resolution of spectrometer.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described high refractive index film is titania, five oxidation two tantalum film.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its monochromatic source of passing through to use known wavelength is determined the correlation parameter of optical waveguide in conjunction with the spectra inversion computing method; When light source is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform, by comparing the emission spectrogram of Fourier transform spectrogram and known wavelength monochromatic source, in conjunction with the Wave Guiding Optics theory, determine the correlation parameter of optical waveguide.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, the correlation parameter of its described optical waveguide is the high refractive index film thickness of ducting layer thickness, ducting layer upper surface.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described Flow Control sampling system comprises two containers, two miniature peristaltic pumps, a stirrer and pipeline; Wherein, a minitype creepage pump intake has the NaCl aqueous solution through pipeline and container phase communications and liaison in the container, and outlet has deionized water through pipeline and another container phase communications and liaison in another container; The two ends of another container through pipeline and sample cell phase communications and liaison, are connected to another miniature peristaltic pump respectively in the pipeline, make the interior solution of another container and the interior solution of sample cell form loop through another miniature peristaltic pump, pipeline;
Be provided with a stirrer in another container.
Described integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation, its described NaCl aqueous solution is 6% NaCl aqueous solution for the 1mL massfraction; Deionized water is 4mL.
Different from existing spectrometer, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation involved in the present invention, maximum characteristics are to realize linear modulation to the interference light optical path difference by the liquid refractivity that changes integrated light guide interferometer chip surface.Above-mentioned Fourier transform spectrometer, based on index glass Michelson interferometer structure then is to realize the linear modulation of interference light optical path difference by the relative position that changes index glass and horizontal glass.Simultaneously, in use, the guided wave that is constrained in the ducting layer has replaced the space free light beam in the conventional spectrometers, therefore, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation involved in the present invention, except having with tradition based on the identical advantage of the Fourier transform spectrometer, of Michelson interferometer structure, also have simple in structure, be easy to integrated, miniaturization, characteristics that the environmental interference factor is little.
Description of drawings
Fig. 1 is the integrated light guide Fourier transform spectrometer, structural representation based on the liquid refractivity modulation of the present invention;
Fig. 2 is the structural representation of equipment therefor in the embodiment providing of the present invention;
Fig. 3 is a kind of structure-Planar Compound optical waveguide polarization polarization interference meter chip of employed integrated light guide interferometer chip in the embodiment providing of the present invention;
Fig. 4 is integrated light guide interferometer chip surface liquid refractivity graph of a relation over time in the embodiment providing of the present invention;
Fig. 5 is in the embodiment providing of the present invention, when the liquid in the sample cell fades to weight ratio and is the 1.2%NaCl aqueous solution from deionized water, and the interference pattern synoptic diagram that photo-detector monitors;
Fig. 6 is for to carry out the spectrogram that discrete Fourier transformation obtains to interference pattern shown in Figure 5, and it is the spectrogram about sampled point and luminous power;
Fig. 7 is Planar Compound optical waveguide polarization polarization interference meter chip TE, the theoretical simulation figure of TM guided mode effective refractive index and surface liquid index of refraction relationship;
Fig. 8 is for carrying out the light source light spectrogram behind the Wavelength calibration to Fig. 6 transverse axis, it is the spectrogram about wavelength and luminous power;
Fig. 9 is in the embodiment providing of the present invention, when the liquid in the sample cell fades to weight ratio and is the 9%NaCl aqueous solution from deionized water, and the interference pattern synoptic diagram that photo-detector monitors;
Figure 10 is for carrying out the light source light spectrogram after the discrete Fourier transformation inverting to interference pattern shown in Figure 9.
Embodiment
Integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation of the present invention has the structure identical with the integrated light guide biochemical sensor.As shown in Figure 1, be the structural representation of the integrated light guide Fourier transform spectrometer, that the present invention is based on liquid refractivity modulation, it comprises light source 1, integrated light guide interferometer chip 2, photo-detector 3, digital information processing system 4, sample cell 5, Flow Control sampling system 6.Wherein integrated light guide interferometer chip 2 is core components of this spectrometer.Sample cell 5 is fixed on integrated light guide interferometer chip 2 surfaces, and Flow Control sampling system 6 interlinks with sample cell 5.The light of light source 1 emission enters integrated light guide interferometer chip 2 through prism-coupled (or grating coupling or end face coupling) becomes guided wave, Flow Control sampling system 6 pumps into sample cell 5 with sample solution, change sample cell 5 interior liquid refractivities, thereby cause the guided wave phasic difference.Received by photo-detector 3 from the interference light signal of integrated light guide interferometer chip 2 coupling outputs, the electric signal that photo-detector 3 produces is transferred to the 4 pairs of interference patterns of digital information processing system that link to each other with photo-detector 3 and analyzes and do Fourier transform reconstruction input light spectrum.
Integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation of the present invention has and rebuilds principle based on the similar spectra inversion of the Fourier transform spectrometer, of Michelson interferometer structure.When input light is monochromatic light, through output interference light intensity behind the integrated light guide interferometer chip 2 be
I
out＝I
in[1+cos(Δφ)]＝I
in[1+cos(2πνl)] (1)
Wherein, I
InBe the input light intensity, Δ φ is the guided mode phase differential that interferes,
Be wave number, l=L Δ N is optical path difference, and L is the responsive length of window of light guide interference meter chip, and Δ N is the variation of guided mode effective refractive index.When sample cell 5 interior liquid refractivities changed, the guided wave effective refractive index was followed and is changed, and caused the interference light optical path difference to change, and realized that namely the light guide surface liquid refractivity is to the modulation of interference light optical path difference.
Equally, when input light was polychromatic light, behind integrated light guide interferometer chip 2, its distribution of interference intensity was
Following formula comprises two parts: first and optical path difference l are irrelevant, represent the direct current composition of interference signal; Second portion is relevant with optical path difference, represents the Alternating Component of interference light signal.In the practical application, can extract separately AC portion analysis, so have
According to the definition of Fourier transform, following formula can be write as
Accordingly
By formula (5) and formula (6) as can be known, Fourier transform each other between heterogeneous light distribution of interference intensity and its wave number power spectrum.The intensity distributions that needs only the interference pattern that photo-detector 3 is monitored is carried out the luminous power spectrum distribution that one-dimensional Fourier transform just can obtain light source.
With the other types Fourier transform spectrometer,, what especially index glass Michelson interferometer Fourier transform spectrometer, was different is, the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation that the present invention is mentioned, do not comprise moving component, be to change the interference light optical path difference by the liquid refractivity that changes light guide surface, optical path difference can be write as
l＝LΔN＝LC
1Δn
c (6)
Wherein, C
1Be constant, Δ n
cVariation for liquid refractivity.In certain liquid refractivity variation range, the changes delta N of guided mode effective refractive index and the changes delta n of liquid refractivity
cHas good linear relationship.If adopt suitable Flow Control sampling system 6 that the in time linear increase of sample cell 5 interior liquid refractivities or linearity are reduced, that is:
l＝LΔN＝LC
1C
2t (7)
Wherein, C
2Be constant, t is the time.
It is to be noted, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation proposed by the invention, its core component integrated light guide interferometer chip 2 can have the various structures form: optical waveguide Mach-Ceng Deer interferometer chip [RG.Heideman, P.V.Lambeck, Sensorsand Actuators B 61 (1999) 100-127.], optical waveguide Mechanical Study On Young Interference meter chip [K.Schmitt, B.Schirmer, C.Hoffmann, A.Brandenburg, and P.Meyrueis, Biosens.Bioelectron.22 (2007) 2591-2597; Graham H.Cross, Andrew Reeves, Stuart Brand, Marcus J.Swann, Louise L.Peel, Neville J.Freeman, and Jian R.Lu, J.Phys.D:Appl.Phys.37 (2004) 74-80.], optical waveguide polarization polarization interference meter chip [Zhi-mei Qi, Kiminori Itoh, Masayuki Murabayashi, andHiroyuki Yanagi, J.Ligthwave Techn.18 (8) (2000) 1106-1110.], optical waveguide Michelson interferometer chip [Shyh-Lin Tsao, and Shin-Ge Lee, Opt.and Quantum Electron.36 (2004) 309-320.], optical waveguide Fabry-Perot interferometer chip [Kinrot Noam, Nathan Menachem, J.Ligthwave Techn.24 (5) (2006) 2139-2145.], bimodulus interfere type chip of light waveguide [Sergey S.Sarkisov, Darnell E.Diggs, Grigory Adamovsky, and Michael J.Curley, Appl.Opt.40 (3) (2001) 349-359.] etc. the interferometer structure.
From disclosed document, not yet find with of the present invention based on the similar method and apparatus of the integrated light guide Fourier transform spectrometer, of liquid refractivity modulation.
In the practical operation, spectrometer can adopt structure as shown in Figure 2, Fig. 2 is the structural representation of equipment therefor in the embodiment providing of the present invention, 1 is light source among the figure, 2 is integrated light guide interferometer chip, and 3 is photo-detector, and 4 is digital information processing system, 5 is sample cell, 61 is that container 1,62 is that container 2,63 is miniature peristaltic pump 1,64 is miniature peristaltic pump 2,65 is stirrer, and 61～65 to have formed the Flow Control sampling system 6,7 among Fig. 1 be 45 ° of analyzers, 8 are the input couple prism, and 9 are the output couple prism.
Integrated light guide interferometer chip 2 of the present invention has adopted polarization polarization interference meter chip [the Zhi-mei Qi based on the Planar Compound optical waveguide, Kiminori Itoh, Masayuki Murabayashi, and HiroyukiYanagi, J.Ligthwave Techn.18 (8) (2000) 1106-1110.].The structure of this chip as shown in Figure 3, a kind of structure of employed integrated light guide interferometer chip 2-Planar Compound optical waveguide polarization polarization interference meter chip in the embodiment that provides for the present invention, 21 is glass substrate among the figure, 22 ducting layer that adopt ion exchange technique to make for the glass substrate upper surface, 23 have the high index of refraction gradient film of wedge structure for two ends.Exchange one deck refractive index ducting layer 22 slightly high than substrate of glass by ion exchange technique at glass basic surface, then sputter one deck length is the high index of refraction gradient film 23 (such as titania, tantalum pentoxide etc.) that L and two ends have wedge structure on ducting layer, the accurate thickness of this film of control makes the transmission of its support transverse electric (TE) guided mode and does not support the transmission of horizontal magnetic (TM) guided mode.
At first adopting wavelength is that the ruddiness of 633nm is as monochromatic source 1, the light that light source 1 sends is propagated along optical waveguide after 8 couplings of input couple prism, when propagating the wedge area of paramount refraction gradient film 23, TE guided mode in the guided wave will be coupled in this film 23 and propagate, and interact with film 23 upper sample ponds 5 interior liquid as surface coating, then the wedge area by gradient film 23 opposite sides is coupled into optical waveguide again.When TE guided mode and surface liquid occured to interact, equivalent refractive index had changed Δ N
TEAnd the TM guided mode in the guided wave ends in high index of refraction gradient film 23, can only propagate along optical waveguide, and it and surface liquid interactional degree occur want weak many than the TE guided mode, and equivalent refractive index has changed Δ N after interacting
TM, can be used as reference variable.TE guided mode and TM guided mode are together exported from optical waveguide after 9 couplings of output couple prism, exist between the two
Phase differential, simultaneously through both interfere behind 45 ° the analyzer 7, use photo-detector 3 to survey the interference light positions mutually over time, carry out analyzing and processing by 4 pairs of interference patterns of digital information processing system again.
In operating process, the refractive index that requires solution in the sample cell 5 is even variation in time.Concrete operations are as follows: the 1mL massfraction is housed is 6% NaCl aqueous solution in the container 61, the 4mL deionized water is housed in the container 62.Open first peristaltic pump 64 with deionized water from container 62 at the uniform velocity the circulation outpour sample cell 5, then with peristaltic pump 63 the 6%NaCl aqueous solution is at the uniform velocity pumped into container 62 from container 61, use simultaneously stirrer 65 agitating solutions, solution is evenly mixed.Then the NaCl solution circulation after peristaltic pump 64 will dilute pumps into and pumps sample cell 5.Regulating two peristaltic pumps 63,64 pump speed makes after 9 seconds the solution in the sample cell 5 become massfraction from deionized water to be
The NaCl aqueous solution, liquid refractivity has changed Δ n in this process
c=n
1.2%-n
Water=0.0021297.The changes delta n of liquid refractivity
cWith the relation of time t as shown in Figure 4.Can get the constant C in the formula (8)
2=0.0002366.
When the liquid on Planar Compound optical waveguide high index of refraction gradient film 23 surfaces changes to 1.2% NaCl solution from deionized water, the interference pattern that photo-detector 3 monitors is exported in this course as can be known from Fig. 5 light phase and has been changed about 8 π as shown in Figure 5.The gained interference pattern is carried out discrete Fourier transformation, and the result as shown in Figure 6.This is about the sampling number of interference pattern and the spectrogram of light source power, is not the spectrogram about wavelength-luminous power that finally needs, and therefore also needs to carry out corresponding with wavelength the transverse axis of this spectrogram.This just need to know the length L of the responsive window of optical waveguide in the formula (8), constant C
1And C
2L=10mm wherein, C
2=0.0002366, C
1Wait to ask.
According to the Wave Guiding Optics theory as can be known, when liquid refractivity changed, the effective refractive index of guided mode also will change.For Planar Compound optical waveguide polarization polarization interference meter chip, the effective refractive index of the effective refractive index of TE guided mode and TM guided mode all changes with the surface liquid refractive index.Substrate 21, ducting layer 22, high index of refraction gradient film 23, the surface liquid of Planar Compound optical waveguide polarization polarization interference meter chip have consisted of four layers of slab construction, this structure is carried out emulation obtain as shown in Figure 7 theoretical value.As can be known from Fig. 7 when high index of refraction gradient film 23 surface liquid refractive index ns
cWhen changing in 1.33 to 1.37 scopes, the variation of the effective refractive index of TE and TM guided mode all is to approach linearity.And C
1=0.1149530-0.0031479=0.118051.
With L, C
1, C
2Value bring formula (7) into and spectrogram shown in Figure 6 done the wavelength correspondence, obtain spectrogram shown in Figure 8, spectrum spectrum peak appears at 639.2 nanometers as can be seen from Figure 8, although with the wavelength of known luminaire deviation is arranged slightly, but this spectrogram still can be good at illustrating the power spectrum that can be finally inversed by light source by interference pattern, only the spectrum peak among Fig. 8 is wider, this number of cycles with interference pattern is relevant, can increase interference periods if improve sample cell 5 interior solution concentration variation ranges, reduce to compose peak width, improve spectrometer resolution.Figure 9 shows that the interference pattern when sample cell 5 interior concentration are the 9%NaCl aqueous solution, Figure 10 shows that the spectrogram after the inverting.Comparison diagram 8 and Figure 10 find, more near optical source wavelength, and the spectrum peak width of Figure 10 is narrower than the spectrum peak width of Fig. 8 than the spectrum peak position among Fig. 8 for spectrum peak position among Figure 10, and spectrometer resolution increases.When light source was expanded to polychromatic light from ruddiness, this method based on the liquid refractivity modulation was still applicable.
In addition, the effect that also has definite optical waveguide parameter based on the integrated light guide Fourier spectrometer of liquid refractivity modulation of the present invention.When light source 1 is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform.By the emission spectrogram of comparison Fourier transform spectrogram and known wavelength monochromatic source, and in conjunction with the Wave Guiding Optics theory, can determine the correlation parameter (such as ducting layer 22 thickness, ducting layer 22 upper surface high refractive index films 23 thickness etc.) of optical waveguide.For example, use wavelength as the ruddiness of 633nm as light source 1, to become weight ratio from deionized water be 1.2% NaCl aqueous solution to sample cell 5 interior liquid simultaneously, liquid refractivity even variation in time obtains the C in the formula (7) in this course
2=0.0002366.The change of sample cell 5 interior solution concentrations causes photo-detector 3 to monitor as shown in Figure 5 interference pattern, this interference pattern is done discrete Fourier transformation obtain as shown in Figure 6 spectrogram, this is the spectrogram about sampled point and light source power, and this spectrogram a spectrum peak occurred in corresponding sample point.This spectrum peak ought to appear at 633nm wavelength place, therefore will utilize formula (7) that this sampled point is corresponding with 633nm.L=10mm in the formula (7), C
2=0.0002366, again in conjunction with λ=633nm, can instead release C
1=0.118051.At C
1, substrate 21 refractive index (n
S), ducting layer 22 refractive index (n
f), ducting layer 22 thickness (h), gradient film 23 refractive index (n
TiO2) in the known situation, just can determine the thickness (h of high index of refraction gradient film 23 according to the guided wave equation of four layers of slab construction of optical waveguide
TiO2).If h in like manner
TiO2Known, and ducting layer 22 thickness h are unknown, can determine equally ducting layer 22 thickness h according to the method.
Claims (11)
1. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation comprises light source, integrated light guide interferometer chip, photo-detector, sample cell, Flow Control sampling system, digital information processing system; It is characterized in that sample cell is fixed on integrated light guide interferometer chip surface, Flow Control sampling system and sample cell interlink; The light of light source emission enters integrated light guide interferometer chip through prism-coupled becomes guided wave, received by photo-detector from the interference light signal of integrated light guide interferometer chip coupling output, the electric signal that photo-detector produces is transferred to the digital information processing system that links to each other with photo-detector and processes, and realizes the inverting of input spectrum is rebuild;
Wherein, the monochromatic source by using known wavelength is determined the correlation parameter of optical waveguide in conjunction with the spectra inversion computing method; When light source is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform, by comparing the emission spectrogram of Fourier transform spectrogram and known wavelength monochromatic source, in conjunction with the Wave Guiding Optics theory, determine the correlation parameter of optical waveguide;
When described spectrometer is used or tests, utilize the Flow Control sampling system to change the interior liquid refractivity of sample cell, make in time even variation of refractive index.
2. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1, it is characterized in that, described integrated light guide interferometer chip, be wherein a kind of of optical waveguide Mach Zehnder interference meter chip, optical waveguide Mechanical Study On Young Interference meter chip, optical waveguide polarization polarization interference meter chip, optical waveguide Michelson interferometer chip, optical waveguide Fabry-Perot interferometer chip, bimodulus interfere type chip of light waveguide, or the distressed structure of above-mentioned interference meter chip.
3. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1 is characterized in that, the light of described light source emission or be coupled through the grating coupling or through end face.
4. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 is characterized in that, described sample cell and Flow Control sampling system are made for adopting miromaching.
5. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1 and 2, it is characterized in that, improve spectrometer resolution by the responsive length of window of regulating integrated light guide interferometer chip, when responsive window changes between 0-20mm, length of window is longer, and spectrometer resolution is higher.
6. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 is characterized in that, improves the resolution of spectrometer by the variation range of liquid refractivity in the expansion sample cell.
7. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1 and 2, it is characterized in that, described integrated light guide interferometer chip surface is provided with the high refractive index film of one deck gradient-structure, to strengthen the evanescent field intensity of integrated light guide interferometer chip, improve the resolution of spectrometer.
8. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 7 is characterized in that described high refractive index film is titania, five oxidation two tantalum film.
9. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 is characterized in that the correlation parameter of described optical waveguide is the high refractive index film thickness of ducting layer thickness, ducting layer upper surface.
10. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 is characterized in that described Flow Control sampling system comprises two containers, two miniature peristaltic pumps, a stirrer and pipeline; Wherein, a minitype creepage pump intake has the NaCl aqueous solution through pipeline and container phase communications and liaison in the container, and outlet has deionized water through pipeline and another container phase communications and liaison in another container; The two ends of another container through pipeline and sample cell phase communications and liaison, are connected to another miniature peristaltic pump respectively in the pipeline, make the interior solution of another container and the interior solution of sample cell form loop through another miniature peristaltic pump, pipeline;
Be provided with a stirrer in another container.
11. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 10 is characterized in that, described NaCl aqueous solution is 6% NaCl aqueous solution for the 1mL massfraction; Deionized water is 4mL.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010128358 CN102192785B (en) | 2010-03-17 | 2010-03-17 | Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010128358 CN102192785B (en) | 2010-03-17 | 2010-03-17 | Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102192785A CN102192785A (en) | 2011-09-21 |
| CN102192785B true CN102192785B (en) | 2013-05-01 |
Family
ID=44601321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010128358 Expired - Fee Related CN102192785B (en) | 2010-03-17 | 2010-03-17 | Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102192785B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104081175A (en) | 2012-04-25 | 2014-10-01 | 惠普发展公司，有限责任合伙企业 | Analyzing light by mode interference |
| CN103901013B (en) * | 2012-12-26 | 2016-08-24 | 中国科学院电子学研究所 | The Enhancement Method of a kind of evanescent field excitation thin film Raman signal and device |
| WO2015123622A1 (en) * | 2014-02-14 | 2015-08-20 | Lumense, Inc. | System and method for continuous, real-time monitoring of chemical contaminants in carbon dioxide |
| CN104990897B (en) * | 2015-07-15 | 2017-08-25 | 华南理工大学 | A kind of device and method for determining breeding water body Chlorophyll-a Content |
| JP6943452B2 (en) * | 2016-06-15 | 2021-09-29 | シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ | Integrated spectrum unit |
| CN110082313B (en) * | 2019-04-22 | 2021-08-20 | 天津大学 | Micro-nano material refractive index measurement method based on prism coupler |
| CN113776642A (en) * | 2021-08-24 | 2021-12-10 | 挚感(苏州)光子科技有限公司 | Digital hydrophone based on laser Doppler vibration measurement and vibration measurement method |
| CN115128735B (en) * | 2021-10-27 | 2024-05-07 | 赛丽科技(苏州)有限公司 | Optical sensor chip and optical sensing system |
| CN114371128B (en) * | 2022-01-13 | 2023-03-24 | 挚感(苏州)光子科技有限公司 | Fourier transform spectrometer based on multilayer slab waveguide structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101592472A (en) * | 2008-05-28 | 2009-12-02 | 中国科学院电子学研究所 | Time-resolved single-grating interferometer |
-
2010
- 2010-03-17 CN CN 201010128358 patent/CN102192785B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101592472A (en) * | 2008-05-28 | 2009-12-02 | 中国科学院电子学研究所 | Time-resolved single-grating interferometer |
Non-Patent Citations (6)
| Title |
|---|
| A composite optical waveguide-based polarimetric interferometer for chemical and biological sensing applications;Zhi-mei Qi等;《Journal of lightwave technology》;20000831;第18卷(第8期);1106页-1110页 * |
| Zhi-mei Qi等.A composite optical waveguide-based polarimetric interferometer for chemical and biological sensing applications.《Journal of lightwave technology》.2000,第18卷(第8期), |
| Zhi-mei Qi等.Chemical gas sensor application of open-pore mesoporous thin films based on integrated optical polarimetric interferometry.《Analytical Chemistry》.2006,第78卷(第4期), * |
| Zhi-mei Qi等.Integrated Young interferometer sensor with a channel-planar composite waveguide sensing arm.《Optics Letters》.2009,第34卷(第14期), * |
| 邓琳等.光波导分光光谱技术研究染料分子在玻璃表面的吸附特性.《物理化学学报》.2009,第25卷(第12期), * |
| 陈方等.光波导耦合的表面等离子体共振光谱传感器实时监测表面生化反应.《分析化学》.2009,第37卷(第4期), * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102192785A (en) | 2011-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102192785B (en) | Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation | |
| CN102207459B (en) | Fourier transform chip spectrometer based on integrated light technique | |
| CN101091100B (en) | Miniature fourier transform spectrophotometer | |
| US7411670B2 (en) | Collection probe for use in a Raman spectrometer system and methods of making and using the same | |
| Qiao et al. | MEMS-enabled on-chip computational mid-infrared spectrometer using silicon photonics | |
| Barrios | Integrated microring resonator sensor arrays for labs-on-chips | |
| Katiyi et al. | Si nanostrip optical waveguide for on-chip broadband molecular overtone spectroscopy in near-infrared | |
| Lu et al. | High performance refractive index sensor with stacked two-layer resonant waveguide gratings | |
| Zhou et al. | High-Q guided mode resonance sensors based on shallow sub-wavelength grating structures | |
| Martens et al. | Comparison between Vernier-cascade and MZI as transducer for biosensing with on-chip spectral filter | |
| US9068950B2 (en) | Vernier photonic sensor data-analysis | |
| Vallance et al. | Open-access microcavities for chemical sensing | |
| CN102374974A (en) | Attenuated total reflection (ATR) spectrum measurement type Fourier transform spectrometer based on integrated optical waveguide | |
| Ghoname et al. | Attenuated total reflection (ATR) MEMS FTIR spectrometer | |
| US20060126067A1 (en) | Crystal grating apparatus | |
| Wawro et al. | Resonating periodic waveguides as ultraresolution sensors in biomedicine | |
| Gauglitz et al. | Spectroscopic analysis | |
| Xie et al. | MEMS-based optical chemical sensors | |
| Anderson et al. | Grating light reflection spectroscopy for determination of bulk refractive index and absorbance | |
| US9696208B2 (en) | Interferometric device and corresponding spectrometer | |
| Ghosh et al. | Surface plasmon resonance structures in spectral interrogation using high refractive index prism materials for sensing of different amino acids | |
| Facchin et al. | Unveiling the Significance of Intrinsic Sensitivity and Multiple Scattering in Speckle Metrology | |
| Raghuwanshi et al. | Fiber Optic SPR Sensor—Past, Present, and Future | |
| Efremova et al. | Application of PT-symmetry in metasurfaces for measuring the inclination angle | |
| Arora | Colorimetric Sensors Using Hybrid Mode Plasmon Imaging for Refractive Index and Thickness Sensing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130501 |