CN102192785A - Integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation - Google Patents
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Abstract
The invention discloses an integrated optical waveguide Fourier transform spectrograph based on liquid refractive index modulation, relating to a light MEMS (Micro-Electro-Mechanical Systems) processing technology, an integrated optical waveguide sensing technology and a digital signal processing technology. The integrated optical waveguide Fourier transform spectrograph comprises a light source, a chip of an integrated optical waveguide interferometer, an optical detector, a sample cell, a flow control sampling system and a digital signal processing system, wherein the sample cell of the integrated optical waveguide Fourier transform spectrograph is fixed on the surface of the chip of the optical waveguide interferometer, and the flow control sampling system is communicated with the sample cell; light emitted from the light source enters the chip of the integrated optical waveguide interferometer through prism coupling (or optical grating coupling or end face coupling) so as to become wave guiding light; and an interference optical signal output by the chip of the integrated optical waveguide interferometer in a coupling way is received by the optical detector, and an electrical signal generated by the optical detector is transmitted to the digital signal processing system which is connected with the optical detector so as to be processed to realize the inversion reconstruction of an input spectrum. The integrated optical waveguide Fourier transform spectrograph disclosed by the invention has the advantages of novel method, simple device structure, convenience for use, small size, light weight and easiness for manufacturing.
Description
Technical field
The present invention relates to integrated light guide sensing technical field, be a kind of based on Fourier transform spectrometer, to the extremely sensitive integrated light guide interferometer of liquid refractivity chip, particularly a kind of novel portable Fourier transform spectrometer, based on integrated light guide principle of interference and surface liquid index modulation method.
Background technology
Spectrometer is the strong instrument of amalyzing substances composition and structure thereof.Spectrometer is in field extensive application, especially miniaturizations such as environmental monitoring, chemical analysis, biomedicine, space exploration, military science and technology and functional materials, and portable spectrometer has great demand in these fields.Be different from the large-scale spectral analysis apparatus in laboratory, miniaturization, portable spectrometer can satisfy the on-the-spot requirement of test real-time, therefore has more wide application prospect and good development trend.
Spectrometer has multiple sorting technique, according to principle of work, can be divided three classes: prism chromatic dispersion formula spectrometer, grating beam splitting formula spectrometer and modulating transformation formula spectrometer.Prism chromatic dispersion formula and grating beam splitting formula spectrometer are the spectrometers that is based upon the classics on the geometric optical theory, and modulating transformation formula spectrometer is the spectrometric instrument that is based upon on the modulation calculating principle basis.The former is based on the spectral instrument of slit, adopts prism or grating as the spatial dispersion element, and the latter is based on optical modulation and finishes the instrument that the spectrum composition detects, and mainly finishes chromatic dispersion based on interference modulations.Different with the former is that the result that modulating transformation formula spectrometer is collected must just can obtain actual measure spectrum through computational transformation again.Common modulating transformation formula spectrometer comprises Fourier transform spectrometer,, Hadamard transform spectrometer and Fabry-Perot spectrometer.Classical dispersive spectrometer is simple in structure, and system's maturation is widely used; And modulating transformation formula spectrometer more classical dispersive spectrometer complexity on system forms, usually comprise moving component, but modulating transformation formula spectrometer is not subjected to the restriction of entrance slit, can obtain the spectral signal that signal to noise ratio (S/N ratio) is higher, resolution is bigger by the input aperture or the interference modulations of diffusion, be applicable to more high-end application.
Common Fourier transform spectrometer, mostly is based on traditional index glass Michelson interferometer structure, though the Fourier transform spectrometer, of this structure has the advantage of high flux, hyperchannel, high spectral resolution and wide spectral range, but the index glass that is used as catoptron in the spectrometer needs the high-precision drive system of a cover, and needs good damping environment.This system exists also that volume is big simultaneously, quality is heavy, complicated in mechanical structure and be difficult for microminiaturized shortcoming.In addition, spectrometer adopts the space free light beam, is easy to be subjected to environmental interference.
The miniaturization that constantly develops into the modulation system Fourier transform spectrometer,, the microminiaturization of Micro-Opto-Electro-Mechanical Systems (MOEMS) technology, detecting technique and advanced machining technology provides increasing possibility.Wherein comparatively outstanding is Switzerland in 1999
A kind of Miniature Fourier transform spectrometer [O.Manzardo of people such as the Omar Manzardo development of microtechnology research institute of university (IMT) based on the MOEMS technology, H.P.Herzig, C.R.Marxer, and N.F.de Rooij, Opt.Lett.24 (1999) 1705-1707.], this spectrometer uses silicon micromirror as the interferometric scanning reflection mirror of Michelson, usable range-10V～+ the ramp voltage electrostatic actuator of 10V drives moving of silicon micromirror, can realize accurate scanning to micromirror systems, maximum displacement can reach 39 μ m, repetitive error ± 13nm, can obtain the resolving power of 10nm at visible light wave range, this spectrometer architecture compactness simultaneously, size only is 5mm * 4mm.But this spectrometer in use is to have adopted the space free light beam to interfere equally, and the shortcoming that is subjected to external environmental interference easily still exists.
Summary of the invention
The objective of the invention is to disclose a kind of integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, deficiency with the Fourier transform spectrometer, that overcomes above-mentioned existing Michelson interferometer structure based on traditional index glass, realize a kind of environmental interference simple in structure, anti-, need not to use the high speed of moving component, highly sensitive spectrometer.
For achieving the above object, technical solution of the present invention is:
A kind of integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation comprises light source, integrated light guide interferometer chip, photo-detector, sample cell, Flow Control sampling system, digital information processing system; Its sample cell is fixed on light guide interference meter chip surface, and Flow Control sampling system and sample cell interlink; The light of light emitted enters integrated light guide interferometer chip through prism-coupled becomes guided wave, received by photo-detector from the interference light signal of integrated light guide interferometer chip coupling output, the electric signal that photo-detector produces is transferred to the digital information processing system that links to each other with photo-detector and handles, and realizes the inverting of input spectrum is rebuild.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described integrated light guide interferometer chip, be wherein a kind of of optical waveguide Mach-Ceng Deer interferometer chip, optical waveguide Young interferometer chip, optical waveguide polarization polarization interference meter chip, optical waveguide Michelson interferometer chip, optical waveguide Fabry-Perot interferometer chip, bimodulus interfere type chip of light waveguide, or the distressed structure of above-mentioned interference meter chip.
Described integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation, the light of its described light emitted or be coupled through the grating coupling or through end face.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation when its described spectrometer is used or tests, utilizes the Flow Control sampling system to change the interior liquid refractivity of sample cell, makes refractive index even variation in time.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described sample cell and Flow Control sampling system are made for adopting micromachined technology.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, it improves spectrometer resolution by the responsive length of window of regulating integrated light guide interferometer chip, when responsive window changed between 0-20mm, length of window was long more, and spectrometer resolution is high more.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its variation range by liquid refractivity in the expansion sample cell improves the resolution of spectrometer.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described integrated light guide interferometer chip surface is provided with the high refractive index film of one deck gradient-structure, to strengthen the evanescent field intensity of integrated light guide interferometer chip, improve the resolution of spectrometer.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described high refractive index film is titania, five oxidation two tantalum film.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its monochromatic source of passing through to use known wavelength is determined the correlation parameter of optical waveguide in conjunction with spectrum Inversion Calculation method; When light source is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform, by comparing the emission spectrogram of Fourier transform spectrogram and known wavelength monochromatic source,, determine the correlation parameter of optical waveguide in conjunction with the Wave Guiding Optics theory.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, the correlation parameter of its described optical waveguide is the high refractive index film thickness of ducting layer thickness, ducting layer upper surface.
Described integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation, its described Flow Control sampling system comprises two containers, two miniature peristaltic pumps, a stirrer and pipeline; Wherein, a minitype creepage pump intake has the NaCl aqueous solution through pipeline and container communications and liaison mutually in the container, and outlet has deionized water through pipeline and another container communications and liaison mutually in another container; The two ends of another container through pipeline and sample cell communications and liaison mutually, are connected to another miniature peristaltic pump respectively in the pipeline, make in another container in the solution and sample cell solution through another miniature peristaltic pump, pipeline formation loop;
Be provided with a stirrer in another container.
Described integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation, its described NaCl aqueous solution is 6% NaCl aqueous solution for the 1mL massfraction; Deionized water is 4mL.
Different with existing spectrometer, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation involved in the present invention, maximum characteristics are to realize linear modulation to the interference light optical path difference by the liquid refractivity that changes integrated light guide interferometer chip surface.Above-mentioned Fourier transform spectrometer, based on index glass Michelson interferometer structure then is to realize the linear modulation of interference light optical path difference by the relative position that changes index glass and horizontal glass.Simultaneously, in use, the guided wave that is constrained in the ducting layer has replaced the space free light beam in the conventional spectrometers, therefore, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation involved in the present invention, except have with tradition based on the identical advantage of the Fourier transform spectrometer, of Michelson interferometer structure, also have simple in structure, be easy to integrated, miniaturization, characteristics that the environmental interference factor is little.
Description of drawings
Fig. 1 is the integrated light guide Fourier transform spectrometer, structural representation based on the liquid refractivity modulation of the present invention;
The structural representation of equipment therefor in the embodiment that Fig. 2 provides for the present invention;
A kind of structure-Planar Compound optical waveguide polarization polarization interference meter the chip of employed integrated light guide interferometer chip in the embodiment that Fig. 3 provides for the present invention;
Integrated light guide interferometer chip surface liquid refractivity graph of a relation over time in the embodiment that Fig. 4 provides for the present invention;
In the embodiment that Fig. 5 provides for the present invention, when the liquid in the sample cell when deionized water fades to weight ratio and is the 1.2%NaCl aqueous solution, the interference pattern synoptic diagram that photo-detector monitors;
Fig. 6 is for to carry out the spectrogram that discrete Fourier transformation obtains to interference pattern shown in Figure 5, and it is the spectrogram about sampled point and luminous power;
Fig. 7 is Planar Compound optical waveguide polarization polarization interference meter chip TE, the theoretical simulation figure of TM guided mode effective refractive index and surface liquid index of refraction relationship;
Fig. 8 is for carrying out the light source light spectrogram behind the Wavelength calibration to Fig. 6 transverse axis, it is the spectrogram about wavelength and luminous power;
In the embodiment that Fig. 9 provides for the present invention, when the liquid in the sample cell when deionized water fades to weight ratio and is the 9%NaCl aqueous solution, the interference pattern synoptic diagram that photo-detector monitors;
Figure 10 is for carrying out the light source light spectrogram after the discrete Fourier transformation inverting to interference pattern shown in Figure 9.
Embodiment
Integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation of the present invention has the structure identical with the integrated light guide biochemical sensor.As shown in Figure 1, be the structural representation of the integrated light guide Fourier transform spectrometer, that the present invention is based on liquid refractivity modulation, it comprises light source 1, integrated light guide interferometer chip 2, photo-detector 3, digital information processing system 4, sample cell 5, Flow Control sampling system 6.Wherein integrated light guide interferometer chip 2 is core components of this spectrometer.Sample cell 5 is fixed on integrated light guide interferometer chip 2 surfaces, and Flow Control sampling system 6 interlinks with sample cell 5.The light of light source 1 emission enters integrated light guide interferometer chip 2 through prism-coupled (or grating coupling or end face coupling) becomes guided wave, Flow Control sampling system 6 pumps into sample cell 5 with sample solution, change liquid refractivity in the sample cell 5, thereby cause the guided wave phasic difference.Received by photo-detector 3 from the interference light signal of integrated light guide interferometer chip 2 coupling outputs, the electric signal that photo-detector 3 produces is transferred to the 4 pairs of interference patterns of digital information processing system that link to each other with photo-detector 3 and analyzes and do Fourier transform reconstruction input light spectrum.
Integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation of the present invention, have with based on the Fourier transform spectrometer, of Michelson interferometer structure similar spectrum inverting rebuild principle.When input light is monochromatic light, be through integrated light guide interferometer chip 2 back output interference light intensities
I
out＝I
in[1+cos(Δφ)]＝I
in[1+cos(2πνl)] (1)
Wherein, I
InBe the input light intensity, Δ φ is the guided mode phase differential that interferes,
Be wave number, l=L Δ N is an optical path difference, and L is the responsive length of window of light guide interference meter chip, and Δ N is the variation of guided mode effective refractive index.When liquid refractivity changed in the sample cell 5, the guided wave effective refractive index was followed and is changed, and caused the interference light optical path difference to change, and promptly realized the modulation of light guide surface liquid refractivity to the interference light optical path difference.
Equally, when input light was polychromatic light, behind integrated light guide interferometer chip 2, its interference light intensity was distributed as
Following formula comprises two parts: first and optical path difference l are irrelevant, represent the direct current composition of interference signal; Second portion is relevant with optical path difference, represents the Alternating Component of interference light signal.In the practical application, can extract AC portion analysis separately, so have
According to the definition of Fourier transform, following formula can be write as
Accordingly
By formula (5) and formula (6) as can be known, heterogeneous light interference light intensity distribute and its wave number power spectrum between Fourier transform each other.The intensity distributions that needs only the interference pattern that photo-detector 3 is monitored is carried out the luminous power spectrum distribution that one-dimensional Fourier transform just can obtain light source.
With the other types Fourier transform spectrometer,, what especially index glass Michelson interferometer Fourier transform spectrometer, was different is, the integrated light guide Fourier transform spectrometer, that the present invention is mentioned based on the liquid refractivity modulation, do not comprise moving component, be to change the interference light optical path difference by the liquid refractivity that changes light guide surface, optical path difference can be write as
l＝LΔN＝LC
1Δn
c (6)
Wherein, C
1Be constant, Δ n
cVariation for liquid refractivity.In certain liquid refractivity variation range, the changes delta N of guided mode effective refractive index and the changes delta n of liquid refractivity
cHas good linear relationship.If adopt suitable Flow Control sampling system 6 that linear in time increase of sample cell 5 interior liquid refractivities or linearity are reduced, that is:
l＝LΔN＝LC
1C
2t (7)
Wherein, C
2Be constant, t is the time.
It is to be noted, integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation proposed by the invention, its core component integrated light guide interferometer chip 2 can have multiple version: optical waveguide Mach-Ceng Deer interferometer chip [RG.Heideman, P.V.Lambeck, Sensorsand Actuators B 61 (1999) 100-127.], optical waveguide Young interferometer chip [K.Schmitt, B.Schirmer, C.Hoffmann, A.Brandenburg, and P.Meyrueis, Biosens.Bioelectron.22 (2007) 2591-2597; Graham H.Cross, Andrew Reeves, Stuart Brand, Marcus J.Swann, Louise L.Peel, Neville J.Freeman, and Jian R.Lu, J.Phys.D:Appl.Phys.37 (2004) 74-80.], optical waveguide polarization polarization interference meter chip [Zhi-mei Qi, Kiminori Itoh, Masayuki Murabayashi, andHiroyuki Yanagi, J.Ligthwave Techn.18 (8) (2000) 1106-1110.], optical waveguide Michelson interferometer chip [Shyh-Lin Tsao, and Shin-Ge Lee, Opt.and Quantum Electron.36 (2004) 309-320.], optical waveguide Fabry-Perot interferometer chip [Kinrot Noam, Nathan Menachem, J.Ligthwave Techn.24 (5) (2006) 2139-2145.], bimodulus interfere type chip of light waveguide [Sergey S.Sarkisov, Darnell E.Diggs, Grigory Adamovsky, and Michael J.Curley, Appl.Opt.40 (3) (2001) 349-359.] etc. the interferometer structure.
From disclosed document, do not find as yet and the similar method and apparatus of integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation of the present invention.
In the practical operation, spectrometer can adopt structure as shown in Figure 2, the structural representation of equipment therefor in the embodiment that Fig. 2 provides for the present invention, 1 is light source among the figure, 2 is integrated light guide interferometer chip, and 3 is photo-detector, and 4 is digital information processing system, 5 is sample cell, 61 is that container 1,62 is that container 2,63 is a miniature peristaltic pump 1,64 is miniature peristaltic pump 2,65 is stirrer, and 61～65 to have formed the Flow Control sampling system 6,7 among Fig. 1 be 45 ° of analyzers, 8 are input coupling prism, and 9 are output coupling prism.
Integrated light guide interferometer chip 2 of the present invention has adopted polarization polarization interference meter chip [the Zhi-mei Qi based on the Planar Compound optical waveguide, Kiminori Itoh, Masayuki Murabayashi, and HiroyukiYanagi, J.Ligthwave Techn.18 (8) (2000) 1106-1110.].The structure of this chip as shown in Figure 3, a kind of structure-Planar Compound optical waveguide polarization polarization interference meter the chip of employed integrated light guide interferometer chip 2 in the embodiment that provides for the present invention, 21 is glass substrate among the figure, 22 ducting layer that adopt ion exchange technique to make for the glass substrate upper surface, 23 have the high index of refraction gradient film of wedge structure for two ends.Exchange one deck refractive index ducting layer 22 slightly high by ion exchange technique at glass basic surface than substrate of glass, sputter one deck length is the high index of refraction gradient film 23 (as titania, tantalum pentoxide etc.) that L and two ends have wedge structure on ducting layer then, the accurate thickness of this film of control makes the transmission of its support transverse electric (TE) guided mode and does not support the transmission of horizontal magnetic (TM) guided mode.
At first adopting wavelength is that the ruddiness of 633nm is as monochromatic source 1, the light that light source 1 sends is propagated along optical waveguide after 8 couplings of input coupling prism, when propagating the wedge area of paramount refraction gradient film 23, TE guided mode in the guided wave will be coupled in this film 23 and propagate, and with film 23 upper sample ponds 5 in interact as the liquid of surface coating, the wedge area by gradient film 23 opposite sides is coupled into optical waveguide again then.When TE guided mode and surface liquid took place to interact, equivalent refractive index had changed Δ N
TEAnd the TM guided mode in the guided wave ends in high index of refraction gradient film 23, can only propagate along optical waveguide, and it and surface liquid interactional degree take place want weak many than the TE guided mode, and the back equivalent refractive index that interacts has changed Δ N
TM, can be used as reference variable.TE guided mode and TM guided mode are together exported from optical waveguide after 9 couplings of output coupling prism, exist between the two
Phase differential, both interfere through 45 ° analyzer 7 back simultaneously, use photo-detector 3 to survey the interference light positions mutually over time, carry out analyzing and processing by 4 pairs of interference patterns of digital information processing system again.
In operating process, the refractive index that requires solution in the sample cell 5 is even variation in time.Concrete operations are as follows: the 1mL massfraction is housed is 6% NaCl aqueous solution in the container 61, the 4mL deionized water is housed in the container 62.Unlatching peristaltic pump 64 at the uniform velocity circulates deionized water from container 62 and outpours sample cell 5 earlier, with peristaltic pump 63 the 6%NaCl aqueous solution is at the uniform velocity pumped into container 62 from container 61 then, uses stirrer 65 agitating solutions simultaneously, and solution is evenly mixed.NaCl solution circulation pump after peristaltic pump 64 will dilute then goes into to pump sample cell 5.The pump speed of regulating two peristaltic pumps 63,64 makes after 9 seconds the solution in the sample cell 5 become massfraction from deionized water
The NaCl aqueous solution, liquid refractivity has changed Δ n in this process
c=n
1.2%-n
Water=0.0021297.The changes delta n of liquid refractivity
cWith the relation of time t as shown in Figure 4.Can get the constant C in the formula (8)
2=0.0002366.
When the liquid on Planar Compound optical waveguide high index of refraction gradient film 23 surfaces when deionized water changes to 1.2% NaCl solution, the interference pattern that photo-detector 3 monitors is exported light phase as can be known from Fig. 5 in this course and has been changed about 8 π as shown in Figure 5.The gained interference pattern is carried out discrete Fourier transformation, and the result as shown in Figure 6.This is about the sampling number of interference pattern and the spectrogram of light source power, is not the spectrogram about wavelength-luminous power of ultimate demand, therefore also needs to carry out corresponding with wavelength the transverse axis of this spectrogram.This just need know the length L of the responsive window of optical waveguide in the formula (8), constant C
1And C
2L=10mm wherein, C
2=0.0002366, C
1Wait to ask.
According to the Wave Guiding Optics theory as can be known, when liquid refractivity changed, the effective refractive index of guided mode also will change.For Planar Compound optical waveguide polarization polarization interference meter chip, the effective refractive index of the effective refractive index of TE guided mode and TM guided mode all changes with the surface liquid refractive index.Substrate 21, ducting layer 22, high index of refraction gradient film 23, the surface liquid of Planar Compound optical waveguide polarization polarization interference meter chip have constituted four layers of slab construction, this structure is carried out emulation obtain as shown in Figure 7 theoretical value.As can be known from Fig. 7 when high index of refraction gradient film 23 surface liquid refractive index ns
cWhen changing in 1.33 to 1.37 scopes, the variation of the effective refractive index of TE and TM guided mode all is near linear.And C
1=0.1149530-0.0031479=0.118051.
With L, C
1, C
2Value bring formula (7) into and spectrogram shown in Figure 6 done the wavelength correspondence, obtain spectrogram shown in Figure 8, spectrum spectrum peak appears at 639.2 nanometers as can be seen from Figure 8, though deviation is arranged slightly with the wavelength of known luminaire, but this spectrogram still can be good at illustrating the power spectrum that can be finally inversed by light source by interference pattern, the spectrum peak broad among Fig. 8 only, this number of cycles with interference pattern is relevant, the solution concentration variation range can increase interference periods in the sample cell 5 if improve, reduce to compose peak width, improve spectrometer resolution.Figure 9 shows that the interference pattern when concentration are the 9%NaCl aqueous solution in the sample cell 5, Figure 10 shows that the spectrogram after the inverting.Comparison diagram 8 and Figure 10 find, more near optical source wavelength, and the spectrum peak width of Figure 10 is narrower than the spectrum peak width of Fig. 8 than the spectrum peak position among Fig. 8 for spectrum peak position among Figure 10, and spectrometer resolution increases.When ruddiness expanded to polychromatic light, this method based on the liquid refractivity modulation still was suitable for light source.
In addition, the effect that also has definite optical waveguide parameter based on the integrated light guide Fourier spectrometer of liquid refractivity modulation of the present invention.When light source 1 is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform.By the emission spectrogram of comparison Fourier transform spectrogram and known wavelength monochromatic source, and, can determine the correlation parameter (as ducting layer 22 thickness, ducting layer 22 upper surface high refractive index films 23 thickness etc.) of optical waveguide in conjunction with the Wave Guiding Optics theory.For example, use wavelength as the ruddiness of 633nm as light source 1, simultaneously in the sample cell 5 liquid to become weight ratio from deionized water be 1.2% NaCl aqueous solution, liquid refractivity even variation in time obtains the C in the formula (7) in this course
2=0.0002366.The change of solution concentrations causes photo-detector 3 to monitor as shown in Figure 5 interference pattern in the sample cell 5, this interference pattern is done discrete Fourier transformation obtain as shown in Figure 6 spectrogram, this is the spectrogram about sampled point and light source power, and this spectrogram a spectrum peak occurred in corresponding sample point.This spectrum peak ought to appear at 633nm wavelength place, therefore will utilize formula (7) that this sampled point is corresponding with 633nm.L=10mm in the formula (7), C
2=0.0002366, again in conjunction with λ=633nm, can instead release C
1=0.118051.At C
1, substrate 21 refractive index (n
S), ducting layer 22 refractive index (n
f), ducting layer 22 thickness (h), gradient film 23 refractive index (n
TiO2) under the known situation, just can determine the thickness (h of high index of refraction gradient film 23 according to the guided wave equation of four layers of slab construction of optical waveguide
TiO2).If h in like manner
TiO2Known, and ducting layer 22 thickness h the unknowns can be determined ducting layer 22 thickness h equally according to this method.
Claims (13)
1. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation comprises light source, integrated light guide interferometer chip, photo-detector, sample cell, Flow Control sampling system, digital information processing system; It is characterized in that sample cell is fixed on light guide interference meter chip surface, Flow Control sampling system and sample cell interlink; The light of light emitted enters integrated light guide interferometer chip through prism-coupled becomes guided wave, received by photo-detector from the interference light signal of integrated light guide interferometer chip coupling output, the electric signal that photo-detector produces is transferred to the digital information processing system that links to each other with photo-detector and handles, and realizes the inverting of input spectrum is rebuild.
2. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1, it is characterized in that, described integrated light guide interferometer chip, be wherein a kind of of optical waveguide Mach-Ceng Deer interferometer chip, optical waveguide Young interferometer chip, optical waveguide polarization polarization interference meter chip, optical waveguide Michelson interferometer chip, optical waveguide Fabry-Perot interferometer chip, bimodulus interfere type chip of light waveguide, or the distressed structure of above-mentioned interference meter chip.
3. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1 is characterized in that, the light of described light emitted or be coupled through the grating coupling or through end face.
4. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1, it is characterized in that, when described spectrometer is used or tests, utilize the Flow Control sampling system to change the interior liquid refractivity of sample cell, make refractive index even variation in time.
5. according to claim 1 or 4 described integrated light guide Fourier transform spectrometer,s, it is characterized in that described sample cell and Flow Control sampling system are made for adopting micromachined technology based on the liquid refractivity modulation.
6. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 and 2, it is characterized in that, improve spectrometer resolution by the responsive length of window of regulating integrated light guide interferometer chip, when responsive window changes between 0-20mm, length of window is long more, and spectrometer resolution is high more.
7. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 is characterized in that, improves the resolution of spectrometer by the variation range of liquid refractivity in the expansion sample cell.
8. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 1 and 2, it is characterized in that, described integrated light guide interferometer chip surface is provided with the high refractive index film of one deck gradient-structure, to strengthen the evanescent field intensity of integrated light guide interferometer chip, improve the resolution of spectrometer.
9. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 8 is characterized in that described high refractive index film is titania, five oxidation two tantalum film.
10. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 1 is characterized in that, the monochromatic source by using known wavelength is determined the correlation parameter of optical waveguide in conjunction with spectrum Inversion Calculation method; When light source is the monochromatic light of fixed wave length, the interference pattern that records is carried out Fourier transform, by comparing the emission spectrogram of Fourier transform spectrogram and known wavelength monochromatic source,, determine the correlation parameter of optical waveguide in conjunction with the Wave Guiding Optics theory.
11. the integrated light guide Fourier transform spectrometer, based on the liquid refractivity modulation according to claim 10 is characterized in that the correlation parameter of described optical waveguide is the high refractive index film thickness of ducting layer thickness, ducting layer upper surface.
12., it is characterized in that described Flow Control sampling system comprises two containers, two miniature peristaltic pumps, a stirrer and pipeline according to claim 1 or 4 described integrated light guide Fourier transform spectrometer,s based on the liquid refractivity modulation; Wherein, a minitype creepage pump intake has the NaCl aqueous solution through pipeline and container communications and liaison mutually in the container, and outlet has deionized water through pipeline and another container communications and liaison mutually in another container; The two ends of another container through pipeline and sample cell communications and liaison mutually, are connected to another miniature peristaltic pump respectively in the pipeline, make in another container in the solution and sample cell solution through another miniature peristaltic pump, pipeline formation loop;
Be provided with a stirrer in another container.
13. the integrated light guide Fourier transform spectrometer, based on liquid refractivity modulation according to claim 12 is characterized in that, described NaCl aqueous solution is 6% NaCl aqueous solution for the 1mL massfraction; Deionized water is 4mL.
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