CN102180468B - Polycrystalline silicon reduction furnace and operating method for mounting mirror planes on inner wall of polycrystalline silicon reduction furnace - Google Patents
Polycrystalline silicon reduction furnace and operating method for mounting mirror planes on inner wall of polycrystalline silicon reduction furnace Download PDFInfo
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- CN102180468B CN102180468B CN2011100967590A CN201110096759A CN102180468B CN 102180468 B CN102180468 B CN 102180468B CN 2011100967590 A CN2011100967590 A CN 2011100967590A CN 201110096759 A CN201110096759 A CN 201110096759A CN 102180468 B CN102180468 B CN 102180468B
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Abstract
The invention discloses a polycrystalline silicon reduction furnace and an operating method for mounting mirror planes on the inner wall of the polycrystalline silicon reduction furnace. Two gates are arranged on the furnace body; a bulge on the cylindrical furnace body is formed in the space enclosed by the two gates; a groove is formed on a base plate close to the inner wall of the furnace body in the furnace along one circle of the furnace body; and correspondingly, a T-shaped groove is formed on the middle-height part of the inner wall of the reduction furnace along one circle of the furnace body, and two circles of the grooves form two corresponding rails. The lower end of each highly-polished mirror plane is provided with two small pulley wheels; a T-shaped bulge structure is designed on the middle-height part of one side of the mirror plane fixed on the inner wall of the furnace; the lower end of the T-shaped bulge structure is also provided with two small pulley wheels; the T-shaped bulge of the mirror plane is inosculated with the T-shaped groove on the inner wall of the furnace body; and the mirror planes can be conveniently arranged on the inner wall of the reduction furnace through the rails in the furnace. The design can reduce the energy consumption of the reduction furnace, and simultaneously avoids the onerous process steps of polishing the inner wall of the furnace body and hoisting the furnace body, and reduces the production cost of the polycrystalline silicon reduction furnace.
Description
Technical field
The present invention relates to the production technical field of polysilicon, particularly the working method of a kind of polycrystalline silicon reducing furnace and mounting mirror planes on inner wall of polycrystalline silicon reduction furnace.
Background technology
At present, improved Siemens is mainly adopted in the production of polysilicon.In improved Siemens, the principal reaction that reduction workshop section occurs is that trichlorosilane is generated silicon and hydrogenchloride by hydrogen reducing, and this reaction is carried out in polycrystalline silicon reducing furnace.When reacting, polycrystalline silicon reducing furnace is in the energising condition of high temperature, temperature of reaction remains on about 1050～1150 ℃, body of heater chuck, chassis and the electrode etc. of reduction furnace locate all to be furnished with recirculating cooling water system simultaneously, come to carry out heat exchange to satisfy body of heater temperature requirement everywhere with the furnace high-temperature environment.
Existing polycrystalline silicon reducing furnace energy consumption is very large, can reach 60～100KWh/kg polysilicon, and the reduction power consumption of production of polysilicon accounts for about 70% of total cost.Simultaneously, also have serious power loss problem in the reduction furnace, the power loss major cause is the hyperthermia radiation loss of polycrystalline silicon rod.Polycrystalline silicon rod transfers energy on the reduction furnace inwall by hyperthermia radiation, then by the chuck water coolant heat is taken away.Usually the temperature of reduction furnace inwall is about 600 ℃, and the temperature of silicon rod is about 1050～1150 ℃, and silicon rod is very large to the power loss of reduction furnace inwall by hyperthermia radiation like this.The power loss that causes in order to reduce hyperthermia radiation, the manufacturer of some polysilicons carries out polished finish with the inwall of reduction furnace, in the energy reflection that the smooth finish that improves wall can be radiated a part inwall melts down, reduces power loss.Improve like this and reduced energy consumption, but also have some problems simultaneously.Because the trichlorosilane reduction reaction can produce the corrosive gasess such as hydrogenchloride, the inwall of polishing was often by heavy corrosion after reduction furnace was once produced and finished, and inboard wall of furnace body need to be polished again before next stove drives to produce.Will strengthen like this complicacy of production operation, improve production cost.Simultaneously, we wish to continue to improve production unit and the technology of polycrystalline silicon reducing furnace, further reduce energy consumption and save cost.
Summary of the invention
The working method of polycrystalline silicon reducing furnace of the present invention and mounting mirror planes on inner wall of polycrystalline silicon reduction furnace, purpose is to overcome the above-mentioned shortcoming of prior art and equipment, polycrystalline silicon reducing furnace and its implementation of a kind of mounting mirror planes on inner wall are provided, reduction furnace is designed to the form of opening the door, the time can directly be undertaken by fire door operation in the stove, thereby avoid the heavy difficulty of lifting body of heater; Press polished minute surface is installed on the inboard wall of furnace body by the track that arranges in the stove easily, minute surface can melt down most of because silicon rod hyperthermia radiation to the energy reflection of inboard wall of furnace body in, reduced the power loss of reduction furnace, avoided simultaneously inboard wall of furnace body is carried out repeatedly numerous and diverse operation of sanding and polishing, whole process greatly reduces the production cost of polycrystalline silicon reducing furnace.
The present invention is achieved by the following technical solutions:
A kind of polycrystalline silicon reducing furnace is equipped with two sects on the body of heater, the space that two sects impale forms a projection on the cylindrical furnace; Wide 400～the 800mm of fire door, height is contour with reduction furnace body of heater inner core be fire door up and down about two ends and the reduction furnace body of heater inner core two ends concordant; Two sects distance 700～1000mm; Press close to the inboard wall of furnace body place on the chassis in the reduction furnace and be provided with groove along one week of body of heater, accordingly, reduction furnace inwall intermediate altitude place is provided with the T connected in star along one week of body of heater, and two circle grooves form the track of two correspondences.
The working method of mounting mirror planes on inner wall of polycrystalline silicon reduction furnace, two small sheaves are equipped with in the polished minute surface lower end of each piece, minute surface one side namely is designed with a T shape bulge-structure with the place, a side mid-way that the stove inwall is fixed, the lower end of T shape bulge-structure also is equipped with two small sheaves, and the T shape projection of minute surface matches with the T connected in star with inboard wall of furnace body; By pack in turn track and push forward to correct position place in the stove along track of fire door, each minute surface is closely adjacent in turn to be covered with whole inboard wall of furnace body with each minute surface; And when minute surface cleans or changes, each minute surface is shifted out reduction furnace and takes out by fire door along track by order opposite when installing, after cleaning or change by the professional, the reduction furnace of can again packing into.
A kind of polycrystalline silicon reducing furnace of the present invention as shown in Figure 1 and Figure 2, is designed to the form of opening the door with reduction furnace, the time can directly be undertaken by fire door operation in the stove.And existing polycrystalline silicon reducing furnace needs very heavy body of heater is lifted on the chassis before driving, and produces after the end or goes wrong halfway and again body of heater is sling from the chassis when needing maintenance, and this process is very inconvenient.With the form that reduction furnace is designed to open the door, just can easily avoid having lifted the heavy difficulty of body of heater.Inboard wall of furnace body is equipped with press polished minute surface, and each minute surface is closely adjacent and all fixing with the inboard wall of furnace body applying in turn.Press polished minute surface utilizes fully to the energy in the stove in most of because silicon rod hyperthermia radiation can being melted down to the energy reflection of inboard wall of furnace body, has reduced because the power loss that reduction furnace causes owing to hyperthermia radiation.Simultaneously, each press polished minute surface applying is fixed on the inboard wall of furnace body, has avoided inboard wall of furnace body is carried out numerous and diverse operation of sanding and polishing, reduce production costs.As shown in Figure 4, minute surface and the reduction furnace inwall fixing one side of fitting need not polishing, and minute surface another side i.e. one side in the stove carries out high polish.The minute surface material is stainless steel or silica glass, thickness is about 0.2～2mm, height is contour with reduction furnace body of heater inner core be minute surface up and down about two ends and the reduction furnace body of heater inner core two ends concordant, width is about 200～600mm, also can change according to different the arranging of silicon rod position in different body of heater sizes and the stove.Mirror shape can be set to rectangle, also it can be arranged to concave towards the one side in the stove, to realize the focusing effect of energy.Press polished minute surface can be produced specially by producer, and is convenient and swift.Before reduction furnace was driven, only needing minute surface fitted by production requirement be fixed on the inboard wall of furnace body, thereby avoided numerous and diverse inboard wall of furnace body was carried out the sanding and polishing operation.Like this, not only saved the time, shortened the production of polysilicon cycle, reduced production cost, and the high polish minute surface of professional production has higher level than manual polishing inboard wall of furnace body, further improved the effect of inboard wall of furnace body reflected energy.
The working method of mounting mirror planes on inner wall of polycrystalline silicon reduction furnace of the present invention, press close to the inboard wall of furnace body place on the chassis of reducing furnace and be provided with groove along one week of body of heater, such as A point among Fig. 3 to shown in the E point, accordingly, reduction furnace inwall intermediate altitude place is provided with T connected in star (as shown in Figure 1) along one week of body of heater, two circle grooves form the track of two correspondences, and wherein the structure of T connected in star as shown in Figure 6.Such as Fig. 4, shown in Figure 5, two small sheaves are equipped with in the polished minute surface lower end of each piece, and minute surface one side namely is designed with a T shape bulge-structure with the place, a side mid-way that the stove inwall is fitted fixing, and the lower end of T shape bulge-structure also is equipped with two small sheaves.Shown in Fig. 5,6, the T shape of minute surface projection matches with the T connected in star of inboard wall of furnace body, and T shape projection had both guaranteed with the counter structure of T connected in star that minute surface can firmly be fitted on the stove inwall, can mount and dismount minute surface again easily.As shown in Figure 3, during mounting mirror planes on inner wall of polycrystalline silicon reduction furnace, first with minute surface by the A point place track of packing into, then promoting minute surface moves forward until E point place along track, same next piece minute surface is also decorated into track by A, move forward to the D position adjacent with the E position from the A point along track, by that analogy, next piece minute surface moves forward to the C position adjacent with the D position from the A point along track, continue to install until last piece minute surface is installed in the B position, fix 1～2 minute surface of fitting at the reduction furnace inside door simultaneously, and will install the stove inside door closure of minute surface.Minute surface is arranged a week along body of heater like this, and each minute surface is the tight adjacent whole inboard wall of furnace body that is covered with in turn.Such as Fig. 1, Fig. 2, shown in Figure 3, space in the middle of two sects is used for just with pack in turn track and it is pushed to correct position place in the stove and it is shifted out in turn track when minute surface is dismantled of minute surface, also the silicon core is installed before reduction furnace is driven and is produced and finishes the space of taking out silicon rod afterwards in order to reserve simultaneously.Minute surface all install and stove inside door closure after, the external door of reduction furnace is shut with flange, guaranteed the sealing effectiveness of reduction furnace.
The working method of polycrystalline silicon reducing furnace of the present invention and mounting mirror planes on inner wall of polycrystalline silicon reduction furnace, be characterised in that two sects are housed on the reduction furnace body of heater, the space that two sects impale forms a projection on the cylindrical furnace, the stove inwall is equipped with press polished minute surface, and each minute surface is closely adjacent and fixing with the inboard wall of furnace body applying in turn; Press close to the inboard wall of furnace body place on the chassis of reducing furnace and be provided with groove along one week of body of heater, stove inwall intermediate altitude place is provided with the T connected in star along one week of body of heater, two small sheaves are equipped with in the polished minute surface lower end of each piece, the minute surface one side mid-way place fixing with the stove inwall is designed with a T shape bulge-structure, the lower end of T shape bulge-structure also is equipped with two small sheaves, the T shape of minute surface projection matches with the T connected in star of inboard wall of furnace body, can pack in turn track and move forward to correct position and the stove inwall is firmly fitted along track of polished minute surface.
Effect of the present invention and advantage are:
(1) polycrystalline silicon reducing furnace is designed to the form of opening the door, and can directly be undertaken by fire door operation in the stove, thereby avoid the heavy difficulty of lifting body of heater.
(2) in press polished minute surface can melt down most of because silicon rod hyperthermia radiation to the energy reflection of inboard wall of furnace body, take full advantage of the energy in the stove, do not process with inboard wall of furnace body or the reduction furnace that only carries out simple polished finish is compared the power loss that greatly reduces reduction furnace.
(3) minute surface can be produced by specialized factory, and is convenient and swift and can reach higher technical level; Before driving, reduction furnace only needs pack into track and push forward to along track that the correct position place get final product in the stove of minute surface also can be shifted out reduction furnace along track when needing cleaning or replacing easily.Such design is convenient and swift, has avoided inboard wall of furnace body is carried out numerous and diverse operation of sanding and polishing, has saved time shorten the production of polysilicon cycle, has reduced production cost.
(4) two tracks that arrange on chassis of reducing furnace and the inwall, not only can be with minute surface shift-in or shift out reduction furnace neatly during minute surface in installation and removal, thereby and since T shape structure be arranged so that minute surface can not break away from inboard wall of furnace body and can guarantee that minute surface stably is fitted on the inboard wall of furnace body.
Description of drawings
Fig. 1 is polycrystalline silicon reducing furnace front view of the present invention;
Fig. 2 is polycrystalline silicon reducing furnace vertical view of the present invention;
Fig. 3 is minute surface moving track schematic diagram on the polycrystalline silicon reduction furnace base plate of the present invention;
Fig. 4 is polycrystalline silicon reducing furnace of the present invention minute surface front view;
Fig. 5 is polycrystalline silicon reducing furnace of the present invention mirrored sides view;
Fig. 6 is T connected in star track sectional view on the polycrystalline silicon reduction furnace wall of the present invention;
Wherein, 1-polysilicon reduction furnace body, 2-polycrystalline silicon reducing furnace inside door, 3-polycrystalline silicon reducing furnace external door, 4-minute surface moving track, 5-minute surface, 6-small sheave, 7-T shape projection, 8-furnace wall T connected in star.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings for the below:
As shown in Figure 1 and Figure 2, polycrystalline silicon reducing furnace is designed to the form of opening the door, and two sects are housed on the body of heater, and the space that two sects impale forms a projection on the cylindrical furnace.The wide approximately 400～800mm of fire door, height is contour with reduction furnace body of heater inner core be fire door up and down two ends are concordant up and down with reduction furnace body of heater inner core at two ends, two sects are apart from 700～1000mm.After reduction furnace is designed to the form of opening the door, can directly be undertaken by fire door operation in the stove.And existing polycrystalline silicon reducing furnace needs very heavy body of heater is lifted on the chassis before driving, and produces after the end or goes wrong halfway and again body of heater is sling from the chassis when needing maintenance, and this process is very inconvenient.With the form that reduction furnace is designed to open the door, just can easily avoid having lifted the difficulty of body of heater.
The reduction furnace inwall is equipped with press polished minute surface, and each minute surface is closely adjacent and fixing with the inboard wall of furnace body applying in turn.Press polished minute surface takes full advantage of the energy in the stove in most of because silicon rod hyperthermia radiation can being melted down to the energy reflection of inboard wall of furnace body, has reduced the power loss owing to reduction furnace.Simultaneously, each press polished minute surface fitted to be fixed on the inboard wall of furnace body, thereby has avoided inboard wall of furnace body is carried out numerous and diverse operation of sanding and polishing, Decrease production cost.As shown in Figure 4, minute surface and the reduction furnace inwall fixing one side of fitting need not polishing, and minute surface another side i.e. one side in the stove carries out high polish.The minute surface material is stainless steel or silica glass, thickness is 0.2～2mm, height is contour with reduction furnace body of heater inner core be minute surface up and down about two ends and the reduction furnace body of heater inner core two ends concordant, width is 200～600mm, also can change according to different the arranging of silicon rod position in different body of heater sizes and the stove.Mirror shape can be set to rectangle, also it can be arranged to concave towards the one side in the stove, to realize the focusing effect of energy.Press polished minute surface can be produced specially by producer, and is convenient and swift.Before reduction furnace was driven, only minute surface need be fitted by production requirement was fixed on the inboard wall of furnace body, thereby had avoided inboard wall of furnace body is carried out numerous and diverse operation of sanding and polishing.Like this, not only saved the time, shortened the production of polysilicon cycle, reduced production cost, and the high polish minute surface of professional production has higher level than manual polishing inboard wall of furnace body, further improved the effect of inboard wall of furnace body reflected energy.
As shown in Figure 3, press close to the inboard wall of furnace body place on the chassis of reducing furnace and be provided with groove along one week of body of heater, such as A point among 3 figure to shown in the E point, accordingly, reduction furnace inwall intermediate altitude place is provided with T connected in star (as shown in Figure 1) along one week of body of heater, two circle grooves form the track of two correspondences, and wherein the structure of T connected in star as shown in Figure 6.Such as Fig. 4, shown in Figure 5, two small sheaves are equipped with in the polished minute surface lower end of each piece, and minute surface one side namely is designed with a T shape bulge-structure with the place, a side mid-way that the stove inwall is fitted fixing, and the lower end of T shape projection also is equipped with two small sheaves.Such as Fig. 5, shown in Figure 6, the T shape of minute surface projection matches with the T connected in star of inboard wall of furnace body, and T shape projection had both guaranteed with the counter structure of T connected in star that minute surface can firmly be fitted on the stove inwall, can mount and dismount minute surface again easily.When the polycrystalline silicon reducing furnace inwall is installed the minute surface operation, the track of first minute surface being packed at A point place, then promoting minute surface moves forward until E point place shown in Figure 2 along track, same next piece minute surface is also decorated into track by A, travel forward as for adjacent D position, E position from the A point along track, by that analogy, next piece minute surface travels forward from the A point along track as for adjacent C position, D position, continue to install until last piece minute surface is installed in the B position, inside door is fixed 1～2 minute surface of fitting in reduction furnace simultaneously, and will install the stove inside door closure of minute surface.Minute surface is arranged a week along body of heater like this, and each minute surface is the tight adjacent whole inboard wall of furnace body that is covered with in turn.Such as Fig. 1, Fig. 2, shown in Figure 3, space in the middle of two sects is used for just with pack in turn track and it is pushed to correct position place in the stove and it is shifted out in turn track when minute surface is dismantled of minute surface, also the silicon core is installed before reduction furnace is driven and is produced and finishes the space of taking out silicon rod afterwards in order to reserve simultaneously.Minute surface all install and stove inside door closure after, the external door of reduction furnace is shut with flange, guaranteed the sealing effectiveness of reduction furnace.
Reduction furnace is decorated each minute surface track and is pushed forward to correct position place in the stove along track by A in turn by fire door before driving, and each minute surface is the tight adjacent whole inboard wall of furnace body that is covered with in turn.This design has not only avoided inboard wall of furnace body is carried out numerous and diverse operation of sanding and polishing, saved time shorten the production of polysilicon cycle, and the high polish minute surface of professional production has higher level than manual polishing inboard wall of furnace body, further improved the effect of inboard wall of furnace body reflected energy.When reduction furnace is produced, silicon rod temperature in the stove reaches about 1050～1150 ℃, a large amount of energy is fitted owing to high temperature is radiated and is fixed on the minute surface of reduction furnace inwall, because minute surface is by high polish, in the energy reflection that most of radiation is come can being melted down, energy is fully utilized, and has greatly reduced the loss that causes owing to radiation, reduce energy consumption, saved production cost.And be subject to polluting when need to clean or change when minute surface, each minute surface can be shifted out reduction furnace and takes out by fire door along track by order opposite when installing, after cleaning or change by the professional, the reduction furnace of can again packing into.Can be undertaken by fire door the operation in the polycrystalline silicon reducing furnace, avoid the heavy difficulty of lifting body of heater.Whole process is convenient and swift, has saved the time, has reduced energy consumption, finally greatly reduces production cost.
Claims (2)
1. a polycrystalline silicon reducing furnace is characterized in that being equipped with on the body of heater two sects, i.e. polycrystalline silicon reducing furnace inside door and polycrystalline silicon reducing furnace external door, and the space that two sects impale forms a projection on the cylindrical furnace; The gate-width at two sects is 400～800mm, and height is contour with reduction furnace body of heater inner core to be that two ends are concordant about up and down two ends and the reduction furnace body of heater inner core of inside door and external door; Two sects distance 700～1000mm; Press close to the inboard wall of furnace body place on the chassis in the reduction furnace and be provided with groove along one week of body of heater, accordingly, reduction furnace inwall intermediate altitude place is provided with the T connected in star along one week of body of heater, and two circle grooves form the track of two correspondences.
2. the working method of mounting mirror planes on inner wall of polycrystalline silicon reduction furnace according to claim 1, it is characterized in that the polished minute surface lower end of each piece is equipped with two small sheaves, minute surface one side namely is designed with a T shape bulge-structure with the place, a side mid-way that the stove inwall is fixed, the lower end of T shape bulge-structure also is equipped with two small sheaves, and the T connected in star of the T shape projection inboard wall of furnace body of minute surface matches; By pack in turn track and push forward to correct position place in the stove along track of fire door, each minute surface is closely adjacent in turn to be covered with whole inboard wall of furnace body with each minute surface; When minute surface cleans or changes, each minute surface is shifted out reduction furnace and takes out by fire door along track by order opposite when installing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011100967590A CN102180468B (en) | 2011-04-18 | 2011-04-18 | Polycrystalline silicon reduction furnace and operating method for mounting mirror planes on inner wall of polycrystalline silicon reduction furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011100967590A CN102180468B (en) | 2011-04-18 | 2011-04-18 | Polycrystalline silicon reduction furnace and operating method for mounting mirror planes on inner wall of polycrystalline silicon reduction furnace |
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| CN102180468A CN102180468A (en) | 2011-09-14 |
| CN102180468B true CN102180468B (en) | 2013-02-06 |
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| BRPI0813442A8 (en) * | 2007-06-19 | 2015-12-01 | Zakrytoe Aktsionernoe Obschestvo Solar Si | METHOD FOR PRODUCTION OF POLYCRYSTALLINE SILICON FROM A SOLUTION OF HYDROSILICOFLUORIDIC ACID, AND INSTALLATION FOR PRODUCTION OF POLYCRYSTALLINE SILICON FROM A SOLUTION OF FLUOROSILICIC ACID IN THE FORM OF A POWDER WITH SPHERICAL-SHAPED PARTICLES |
| CN201458747U (en) * | 2009-07-28 | 2010-05-12 | 王春龙 | Polysilicon reduction furnace |
| CN101966992A (en) * | 2009-07-28 | 2011-02-09 | 王春龙 | Polysilicon reduction furnace |
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