CN102175064A - Polishing solution heating device, polishing solution temperature control device and polishing solution conveying system - Google Patents
Polishing solution heating device, polishing solution temperature control device and polishing solution conveying system Download PDFInfo
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- CN102175064A CN102175064A CN2010105942631A CN201010594263A CN102175064A CN 102175064 A CN102175064 A CN 102175064A CN 2010105942631 A CN2010105942631 A CN 2010105942631A CN 201010594263 A CN201010594263 A CN 201010594263A CN 102175064 A CN102175064 A CN 102175064A
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Abstract
The invention discloses a polishing solution heating device which comprises a heating container, a heating element and a polishing solution heat exchanging pipe, wherein a containing cavity is defined in the heating container; the containing cavity is internally filled with a heat exchanging solution; the heating element is arranged in the containing cavity and is used for heating the heat exchanging; the polishing solution heat exchanging pipe is provided with an inlet end and an outlet end, and is wound in the containing cavity, and the inlet end and outlet end of the polishing solution heat exchanging pipe respectively extend out of the heating container. The invention also discloses a polishing solution temperature control device comprising the polishing solution heating device and a polishing solution conveying system. Through utilizing the polishing solution temperature control device comprising the polishing solution heating device provided by the invention and the polishing solution conveying system, the polishing solution at required temperature can be provided for a chemical mechanical polishing procedure, thus the polishing effect is improved.
Description
Technical field
The present invention relates to a kind of polishing fluid heater, comprise the polishing fluid Temperature-controlled appliance and the polishing fluid induction system of this polishing fluid heater.
Background technology
Along with the large scale integrated circuit wiring number of plies is more and more,, need carry out planarization to each layer wiring for guaranteeing effectively carrying out of next process.Chemically mechanical polishing (chemical-mechanical polishing, be called for short CMP) be best also be unique leveling technology.When chemically mechanical polishing, at first be that oxidant, complexing agent etc. in the polishing fluid that is present between surface and the polishing pad carries out chemical reaction with copper, produce one deck chemical reaction film on the copper surface, this stratification reactive film is removed by mechanism by the abrasive particle in the polishing fluid with by the polishing pad that macromolecular material is made then, make unsalted surface expose out again, and then carry out above-mentioned chemical reaction.In the hocketing of chemical action process and mechanism process, finish surface finish like this.Chemical Mechanical Polishing Technique is the combination technique that chemical action and mechanism combine, and its process is quite complicated, and influence factor is a lot.The CMP technological parameter influences final polishing effect with degree in a different manner.
Wherein, the temperature of polishing fluid has very big influence to polishing effect, and temperature is crossed to hang down and can be caused polishing speed low excessively, the too high corrosion that can increase the wiring surface of temperature.
Summary of the invention
The present invention is intended to solve at least one of technical problem that exists in the prior art.
For this reason, one object of the present invention is to propose a kind of polishing fluid heater.
Another object of the present invention is to propose a kind of polishing fluid Temperature-controlled appliance that can accurately control the polishing fluid temperature.
A further object of the present invention is to propose a kind of polishing fluid induction system that can carry temperature required polishing fluid.
To achieve these goals, propose a kind of polishing fluid heater according to the embodiment of first aspect present invention, described polishing fluid heater comprises: heating container, be limited with container cavity in the described heating container, and be loaded with heat exchanger fluid in the described container cavity; Heater element, described heater element are arranged on and are used in the described container cavity described heat exchanger fluid heating; With the polishing fluid heat exchanger tube, described polishing fluid heat exchanger tube has the arrival end and the port of export, and described polishing fluid heat exchanger tube is coiled in the described container cavity and the arrival end and the port of export of described polishing fluid heat exchanger tube stretch out in described heating container respectively.
Polishing fluid heater according to the embodiment of the invention comes heat hot exchanging liquid, heat exchanger fluid by the polishing fluid in the heat exchange heating polishing fluid heat exchanger tube by utilizing heater element, thereby realized that heater element heats the polishing fluid in the polishing fluid heat exchanger tube indirectly, avoided effectively heating problems such as the polishing fluid heat exchanger tube that polishing fluid brings breaks, polishing fluid leakage on the polishing fluid heat exchanger tube, prolonged the service life of polishing fluid heat exchanger tube because of heater element is set directly at.In addition, because the polishing fluid heat exchanger tube is coiled in the described container cavity, therefore increased the heat time heating time of polishing fluid greatly, thereby obtained better heating effect.
In addition, the polishing fluid heater according to the embodiment of the invention can have following additional technical characterictic:
According to one embodiment of present invention, described polishing fluid heat exchanger tube is coiled into corrugated or vortex shape in described container cavity, thereby has further increased heat time heating time, acquisition better heating effect.
According to one embodiment of present invention, described polishing fluid heat exchanger tube is coiled into multilayer in described container cavity, thereby has further increased heat time heating time, acquisition better heating effect.
According to one embodiment of present invention, described heating container is the sealing heating container, and described heater element is arranged on the bottom of container cavity, thereby promotes described heat exchanger fluid to flow, and makes the temperature of described heat exchanger fluid more promptly reach homogeneous.
According to one embodiment of present invention, described heating container is a parallelepiped shape, the arrival end of wherein said polishing fluid heat exchanger tube stretches out from the relative both sides of described heating container with the port of export, and the port of export of described polishing fluid heat exchanger tube is higher than the arrival end of described polishing fluid heat exchanger tube on above-below direction.
According to one embodiment of present invention, described heat exchanger fluid is a deionized water, thereby avoids forming incrustation scale on described polishing fluid heat exchanger tube.
According to one embodiment of present invention, described polishing fluid heat exchanger tube is tetrafluoroethene-perfluorinated alkoxy vinyl ether copolymer pipe or polyfluortetraethylene pipe.
Embodiment according to second aspect present invention proposes a kind of polishing fluid Temperature-controlled appliance, described polishing fluid Temperature-controlled appliance comprises: the polishing fluid heater, and described polishing fluid heater can be for according to the described polishing fluid heater of first aspect present invention; The port of export that detector unit, described detector unit are arranged on described polishing fluid heat exchanging pipe is used to detect the temperature of the polishing fluid in the described polishing fluid heat exchanger tube; And temperature controller, described temperature controller is with described detector unit and heater element is electrically connected and control described heater element to regulate the temperature of described polishing fluid according to the polishing fluid temperature that described detector unit detects.
Polishing fluid heat exchanger tube according to the polishing fluid Temperature-controlled appliance of the embodiment of the invention is coiled in the container cavity of heating container, has therefore increased heat time heating time greatly, thereby can accurately control the temperature of the polishing fluid in the polishing fluid heat exchanger tube.
Embodiment according to third aspect present invention proposes a kind of polishing fluid induction system, and described polishing fluid induction system comprises: the polishing fluid reservoir vessel; Polishing fluid carrier pipe, the liquid feeding end of described polishing fluid carrier pipe link to each other with described polishing fluid reservoir vessel so that the polishing fluid in the described polishing fluid reservoir vessel is discharged from the outlet end of described polishing fluid carrier pipe; With the polishing fluid Temperature-controlled appliance, described polishing fluid Temperature-controlled appliance is that the polishing fluid heat exchanger tube of wherein said polishing fluid heater is connected in the described polishing fluid carrier pipe according to the described polishing fluid Temperature-controlled appliance of second aspect present invention.
Can accurately control the temperature of the polishing fluid in the polishing fluid heat exchanger tube according to the polishing fluid Temperature-controlled appliance of the polishing fluid induction system of the embodiment of the invention, therefore described polishing fluid induction system can improve temperature required polishing fluid to chemical-mechanical polishing process, thereby improves polishing effect.
In addition, the polishing fluid induction system according to the embodiment of the invention can have following additional technical characterictic:
According to one embodiment of present invention, the outlet end of the contiguous described polishing fluid carrier pipe of described polishing fluid Temperature-controlled appliance, thus reduce the thermal losses of polishing fluid in course of conveying effectively.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the structural representation according to the polishing fluid heater of the embodiment of the invention;
Fig. 2 is the structural representation according to the polishing fluid Temperature-controlled appliance of the embodiment of the invention;
Fig. 3 implements temperature controlled schematic diagram according to the polishing fluid Temperature-controlled appliance of the embodiment of the invention;
Fig. 4 is the structural representation according to the polishing fluid induction system of the embodiment of the invention.
Description of reference numerals:
The specific embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Below by the embodiment that is described with reference to the drawings is exemplary, only is used to explain the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, term " vertically ", " laterally ", " on ", close the orientation of indications such as D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " or position is based on orientation shown in the drawings or position relation, only be the present invention for convenience of description rather than require the present invention therefore can not be interpreted as limitation of the present invention with specific orientation structure and operation.
Below with reference to the polishing fluid heater of Fig. 1 description according to the embodiment of the invention.As shown in Figure 1, the polishing fluid heater according to the embodiment of the invention comprises heating container 1, heater element 2 and polishing fluid heat exchanger tube 3.
When utilizing polishing fluid heater according to the embodiment of the invention that polishing fluid is heated, can open 2 pairs of described heat exchanger fluids of heater element in advance and preheat.After treating that described heat exchanger fluid reaches uniform temperature, utilize conveying device for example delivery pump make polishing fluid enter into polishing fluid heat exchanger tube 3 from the arrival end of polishing fluid heat exchanger tube 3, and in polishing fluid heat exchanger tube 3, flow in coiling ground mode, this moment, described heat exchanger fluid and polishing fluid carried out heat exchange by polishing fluid heat exchanger tube 3, thereby realized the heating to polishing fluid.Polishing fluid after the heating leaves polishing fluid heat exchanger tube 3 from the port of export of polishing fluid heat exchanger tube 3.The direction of arrow among Fig. 1 is the flow direction of described polishing fluid.
Polishing fluid heater according to the embodiment of the invention heats described heat exchanger fluid, described heat exchanger fluid by the polishing fluid in the heat exchange heating polishing fluid heat exchanger tube 3 by utilizing heater element 2, thereby realized that heater element 2 heats the polishing fluid in the polishing fluid heat exchanger tube 3 indirectly, avoided effectively heating problems such as the polishing fluid heat exchanger tube 3 that polishing fluid brings breaks, polishing fluid leakage on the polishing fluid heat exchanger tube 3, prolonged the service life of polishing fluid heat exchanger tube 3 because of heater element 2 is set directly at.In addition, because polishing fluid heat exchanger tube 3 is coiled in the container cavity 11, has therefore increased polishing fluid greatly and in heat exchanger fluid, flowed and the heated time, thereby obtained better heating effect.
In some embodiments of the invention, polishing fluid heat exchanger tube 3 is coiled into corrugated or vortex shape in container cavity 11.Be coiled into corrugated or Vorticose polishing fluid heat exchanger tube 3 and can prolong path and the time of polishing fluid widely, promptly further increased the heat time heating time of polishing fluid, thereby obtain better heating effect by the polishing fluid heater.
In some embodiments of the invention, polishing fluid heat exchanger tube 3 is coiled into multilayer in container cavity 11.In an example of the present invention, polishing fluid heat exchanger tube 3 can be coiled into multilayer in the horizontal direction in container cavity 11.In another example of the present invention, polishing fluid heat exchanger tube 3 can be coiled into multilayer by in the vertical direction in container cavity 11, as shown in Figure 1, polishing fluid heat exchanger tube 3 extends to the left side of container cavity 11 from the right side of container cavity 11, extend upward then, extend to the right side of container cavity 11 again from the left side of container cavity 11, and the like, thereby make polishing fluid heat exchanger tube 3 in container cavity 11, be coiled into multilayer at vertical direction.Alternatively, polishing fluid heat exchanger tube 3 can be coiled into multilayer earlier in the horizontal direction in container cavity 11, and in the vertical direction is coiled into multilayer then.
In some embodiments of the invention, polishing fluid heat exchanger tube 3 is coiled into multilayer in container cavity 11, and wherein the polishing fluid heat exchanger tube 3 of each layer all can be coiled into corrugated or vortex shape.
In an example of the present invention, heating container 1 can be the sealing heating container, and heater element 2 is arranged on the inner bottom part of container cavity 11.Flow because the heat exchange fluid that is heated is known from experience upwards, the bottom that therefore heater element 2 is arranged on container cavity 11 can promote described heat exchanger fluid to flow, and makes the temperature of described heat exchanger fluid more promptly reach homogeneous.Heater element 2 can be any suitable heater.In a concrete example of the present invention, heater element 2 can be resistance wire.Heating container 1 is preferably made by the material of thermal insulation, and for example pottery is lost in the environment to prevent heat.
In an example of the present invention, heating container 1 can be parallelepiped shape, for example cuboid or cube.The arrival end of polishing fluid heat exchanger tube 3 stretches out from the relative both sides of heating container 1 with the port of export, and the port of export of polishing fluid heat exchanger tube 3 is higher than the arrival end of polishing fluid heat exchanger tube 3 on above-below direction.Can further prolong polishing fluid like this by path and time, promptly further increase the heat time heating time of polishing fluid, thereby obtain better heating effect according to the polishing fluid heater of the embodiment of the invention.For example, as shown in Figure 1, the arrival end of polishing fluid heat exchanger tube 3 stretches out from the lower right side of heating container 1, and the port of export of polishing fluid heat exchanger tube 3 stretches out from the left upper portion of heating container 1.
In a concrete example of the present invention, described heat exchanger fluid can be deionized water.The use deionized water can be avoided forming incrustation scale on polishing fluid heat exchanger tube 3 as described heat exchanger fluid, therefore also can not influence to add thermal effect after long-time the use.
In another concrete example of the present invention, polishing fluid heat exchanger tube 3 is tetrafluoroethene-perfluorinated alkoxy vinyl ether copolymer pipe or polyfluortetraethylene pipe.Tetrafluoroethene-perfluorinated alkoxy vinyl ether copolymer pipe or polyfluortetraethylene pipe have good physical property and chemical stability, therefore have the advantage of long service life.
Below with reference to the polishing fluid Temperature-controlled appliance of Fig. 2 description according to the embodiment of the invention.As shown in Figure 2, the polishing fluid Temperature-controlled appliance according to the embodiment of the invention comprises polishing fluid heater, detector unit 4 and temperature controller.The polishing fluid heater is above-mentioned polishing fluid heater.The port of export that detector unit 4 is arranged on polishing fluid heat exchanging pipe 3 is used to detect the temperature of the polishing fluid in the polishing fluid heat exchanger tube 3.The temperature control heater element 2 of the polishing fluid that the temperature controller (not shown) is electrically connected with detector unit 4 and heater element 2 and detects according to detector unit 4 is to regulate the temperature of described polishing fluid, that is to say that the signal that described temperature controller is fed back according to detector unit 4 is controlled heater element 2 to regulate the temperature of described polishing fluid.
As shown in Figures 2 and 3, when utilizing polishing fluid Temperature-controlled appliance according to the embodiment of the invention that polishing fluid is carried out temperature control, can open 2 pairs of described heat exchanger fluids of heater element in advance and preheat.After treating that described heat exchanger fluid reaches uniform temperature, utilize conveying device for example delivery pump make polishing fluid enter into polishing fluid heat exchanger tube 3 from the arrival end of polishing fluid heat exchanger tube 3, and in polishing fluid heat exchanger tube 3, flow, this moment, described heat exchanger fluid and polishing fluid carried out heat exchange by polishing fluid heat exchanger tube 3, thereby realized the heating to polishing fluid.Polishing fluid after the heating leaves polishing fluid heat exchanger tube 3 from the port of export of polishing fluid heat exchanger tube 3.The direction of arrow among Fig. 2 is the flow direction of described polishing fluid.The detector unit 4 that is arranged on the port of export of polishing fluid heat exchanger tube 3 detects the temperature of the polishing fluid that leaves polishing fluid heat exchanger tube 3, and detected temperature signal is fed back to described temperature controller.
If the temperature of detected polishing fluid is higher than predefined temperature (promptly obtaining the needed temperature of good polishing effect), described temperature controller cuts out heater element 2, stop indirect, so that the temperature of described polishing fluid falls back to predefined temperature to described polishing fluid.If the temperature of detected polishing fluid is higher than predefined temperature, described temperature controller is opened heater element 2, described polishing fluid is carried out indirect, so that the temperature of described polishing fluid rises to predefined temperature.Because polishing fluid heat exchanger tube 3 is coiled in the container cavity 11, has therefore improved widely the time that described polishing fluid is heated, and has so just realized the accuracy control over temperature to described polishing fluid.
Polishing fluid heat exchanger tube 3 according to the polishing fluid Temperature-controlled appliance of the embodiment of the invention is coiled in the container cavity 11 of heating container 1, has therefore increased heat time heating time greatly, thereby can accurately control the temperature of the polishing fluid in the polishing fluid heat exchanger tube 3.So just can improve temperature required polishing fluid, thereby improve polishing effect to chemical-mechanical polishing process.
In an example of the present invention, detector unit 4 for example can be thermocouple, but the present invention is not limited to this.
Below with reference to the polishing fluid induction system of Fig. 4 description according to the embodiment of the invention.As shown in Figure 4, the polishing fluid induction system according to the embodiment of the invention comprises polishing fluid reservoir vessel 5, polishing fluid carrier pipe 6 and polishing fluid Temperature-controlled appliance.
The liquid feeding end of polishing fluid carrier pipe 6 links to each other with polishing fluid reservoir vessel 5 so that the polishing fluid in the polishing fluid reservoir vessel 5 is discharged from the outlet end of polishing fluid carrier pipe 6.That is to say, utilize conveying device for example delivery pump the polishing fluid in the polishing fluid reservoir vessel 5 is entered into polishing fluid carrier pipe 6 from the liquid feeding end of polishing fluid carrier pipe 6, and in polishing fluid carrier pipe 6, flow, described then polishing fluid leaves polishing fluid carrier pipe 6 from the outlet end of polishing fluid carrier pipe 6.The direction of arrow among Fig. 4 is the flow direction of described polishing fluid.
The polishing fluid Temperature-controlled appliance is above-mentioned polishing fluid Temperature-controlled appliance.Described polishing fluid Temperature-controlled appliance is arranged on the polishing fluid carrier pipe 6, and specifically, the polishing fluid heat exchanger tube 3 of the polishing fluid heater of described polishing fluid Temperature-controlled appliance is connected in the polishing fluid carrier pipe 6.In an example of the present invention, the arrival end of polishing fluid heat exchanger tube 3 links to each other with polishing fluid carrier pipe 6 respectively with the port of export.
Utilize conveying device to make the polishing fluid in the polishing fluid reservoir vessel 5 enter into polishing fluid carrier pipe 6, and in polishing fluid carrier pipe 6, flow from the liquid feeding end of polishing fluid carrier pipe 6.Because the arrival end of polishing fluid heat exchanger tube 3 links to each other with polishing fluid carrier pipe 6, described polishing fluid enters into polishing fluid heat exchanger tube 3 from the arrival end of polishing fluid heat exchanger tube 3, and in polishing fluid heat exchanger tube 3, flow, the port of export from polishing fluid heat exchanger tube 3 leaves polishing fluid heat exchanger tube 3 then.Described polishing fluid is heated to temperature required in polishing fluid heat exchanger tube 3.Because the port of export of polishing fluid heat exchanger tube 3 also links to each other with polishing fluid carrier pipe 6, the polishing fluid that leaves polishing fluid heat exchanger tube 3 enters in the polishing fluid carrier pipe 6 once more, and enters into chemical-mechanical polishing process from the outlet end of polishing fluid carrier pipe 6.
Can accurately control the temperature of the polishing fluid in the polishing fluid heat exchanger tube 3 according to the polishing fluid Temperature-controlled appliance of the polishing fluid induction system of the embodiment of the invention, therefore described polishing fluid induction system can improve temperature required polishing fluid to chemical-mechanical polishing process, thereby improves polishing effect.
In an example of the present invention, the outlet end of the contiguous polishing fluid carrier pipe 6 of described polishing fluid Temperature-controlled appliance, can reduce the thermal losses of polishing fluid in course of conveying effectively like this, thereby the temperature that makes employed polishing fluid in the chemical-mechanical polishing process is more near predetermined temperature.In a concrete example of the present invention, the arrival end of polishing fluid heat exchanger tube 3 links to each other with the outlet end of polishing fluid carrier pipe 6, the polishing fluid that leaves the port of export of polishing fluid heat exchanger tube 3 so directly carries out chemical-mechanical polishing process, thereby minimum is reduced in the thermal losses of polishing fluid in course of conveying.
In one embodiment of the invention, as shown in Figure 4, polishing fluid induction system according to the embodiment of the invention also comprises pressure-regulating device 7 and flow regulator 8, pressure-regulating device 7 and flow regulator 8 are arranged on the polishing fluid carrier pipe 6, are used to regulate the pressure and the flow of described polishing fluid.Pressure-regulating device 7 and flow regulator 8 can be known the device that is used to regulate fluid pressure and flow, be not described in detail here.
In addition, switch 9 can also be set on polishing fluid carrier pipe 6, opening and closing with control polishing fluid carrier pipe 6.
Therefore, polishing fluid heater according to the embodiment of the invention, polishing fluid Temperature-controlled appliance and polishing fluid induction system, realized that heater element heats the polishing fluid in the polishing fluid heat exchanger tube indirectly, avoided effectively heating problems such as the polishing fluid heat exchanger tube that polishing fluid brings breaks, polishing fluid leakage on the polishing fluid heat exchanger tube, prolonged the service life of polishing fluid heat exchanger tube because of heater element is set directly at.In addition,, therefore increased the heat time heating time of polishing fluid greatly, thereby obtained better heating effect, and can accurately control the temperature of the polishing fluid in the polishing fluid heat exchanger tube, improved polishing effect thus because the polishing fluid heat exchanger tube is coiled in the described container cavity.
In description of the invention, unless otherwise prescribed and limit, need to prove, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be mechanical connection or electrical connection, it also can be the connection of two element internals, can be directly to link to each other, also can link to each other indirectly, also be referred to as " linking to each other " or " connection " by the contact between the process medium between adjacent two devices on the equipment by intermediary.For the ordinary skill in the art, can understand the concrete implication of above-mentioned term as the case may be.
In the description of this specification, concrete feature, structure, material or characteristics that the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example description are contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete feature, structure, material or the characteristics of description can be with the suitable manner combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple variation, modification, replacement and modification to these embodiment under the situation that does not break away from principle of the present invention and aim, scope of the present invention is limited by claim and equivalent thereof.
Claims (10)
1. a polishing fluid heater is characterized in that, comprising:
Heating container is limited with container cavity in the described heating container, is loaded with heat exchanger fluid in the described container cavity;
Heater element, described heater element are arranged on and are used in the described container cavity described heat exchanger fluid heating; With
The polishing fluid heat exchanger tube, described polishing fluid heat exchanger tube has the arrival end and the port of export, and described polishing fluid heat exchanger tube is coiled in the described container cavity and the arrival end and the port of export of described polishing fluid heat exchanger tube stretch out in described heating container respectively.
2. polishing fluid heater according to claim 1 is characterized in that, described polishing fluid heat exchanger tube is coiled into corrugated or vortex shape in described container cavity.
3. polishing fluid heater according to claim 1 is characterized in that, described polishing fluid heat exchanger tube is coiled into multilayer in described container cavity.
4. polishing fluid heater according to claim 1 is characterized in that, described heating container is the sealing heating container, and described heater element is arranged on the bottom of container cavity.
5. polishing fluid heater according to claim 4, it is characterized in that, described heating container is a parallelepiped shape, the arrival end of wherein said polishing fluid heat exchanger tube stretches out from the relative both sides of described heating container with the port of export, and the port of export of described polishing fluid heat exchanger tube is higher than the arrival end of described polishing fluid heat exchanger tube on above-below direction.
6. polishing fluid heater according to claim 1 is characterized in that, described heat exchanger fluid is a deionized water.
7. polishing fluid heater according to claim 1 is characterized in that, described polishing fluid heat exchanger tube is tetrafluoroethene-perfluorinated alkoxy vinyl ether copolymer pipe or polyfluortetraethylene pipe.
8. a polishing fluid Temperature-controlled appliance is characterized in that, comprising:
Polishing fluid heater, described polishing fluid heater are according to each described polishing fluid heater among the claim 1-7;
The port of export that detector unit, described detector unit are arranged on described polishing fluid heat exchanging pipe is used to detect the temperature of the polishing fluid in the described polishing fluid heat exchanger tube; With
Temperature controller, described temperature controller is with described detector unit and heater element is electrically connected and control described heater element to regulate the temperature of described polishing fluid according to the polishing fluid temperature that described detector unit detects.
9. a polishing fluid induction system is characterized in that, comprising:
The polishing fluid reservoir vessel;
Polishing fluid carrier pipe, the liquid feeding end of described polishing fluid carrier pipe link to each other with described polishing fluid reservoir vessel so that the polishing fluid in the described polishing fluid reservoir vessel is discharged from the outlet end of described polishing fluid carrier pipe; With
Polishing fluid Temperature-controlled appliance, described polishing fluid Temperature-controlled appliance are polishing fluid Temperature-controlled appliance according to claim 8, and the polishing fluid heat exchanger tube of wherein said polishing fluid heater is connected in the described polishing fluid carrier pipe.
10. polishing fluid induction system according to claim 9 is characterized in that, the outlet end of the contiguous described polishing fluid carrier pipe of described polishing fluid Temperature-controlled appliance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105942631A CN102175064A (en) | 2010-12-17 | 2010-12-17 | Polishing solution heating device, polishing solution temperature control device and polishing solution conveying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105942631A CN102175064A (en) | 2010-12-17 | 2010-12-17 | Polishing solution heating device, polishing solution temperature control device and polishing solution conveying system |
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| CN102175064A true CN102175064A (en) | 2011-09-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105942631A Pending CN102175064A (en) | 2010-12-17 | 2010-12-17 | Polishing solution heating device, polishing solution temperature control device and polishing solution conveying system |
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| CN (1) | CN102175064A (en) |
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| CN102430979A (en) * | 2011-10-13 | 2012-05-02 | 清华大学 | Polishing liquid temperature control device and polishing liquid transportation equipment |
| CN114206552A (en) * | 2019-08-13 | 2022-03-18 | 应用材料公司 | Temperature control of slurry by mixing under dosing |
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| JPH10238861A (en) * | 1997-02-27 | 1998-09-08 | Mitsubishi Chem Corp | Heat reserve type electric water heater and its temperature control method |
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| CN102430979A (en) * | 2011-10-13 | 2012-05-02 | 清华大学 | Polishing liquid temperature control device and polishing liquid transportation equipment |
| CN114206552A (en) * | 2019-08-13 | 2022-03-18 | 应用材料公司 | Temperature control of slurry by mixing under dosing |
| KR20220044815A (en) * | 2019-08-13 | 2022-04-11 | 어플라이드 머티어리얼스, 인코포레이티드 | Slurry temperature control by mixing during dispensing |
| KR102700536B1 (en) | 2019-08-13 | 2024-08-30 | 어플라이드 머티어리얼스, 인코포레이티드 | Slurry temperature control by mixing during distribution |
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Application publication date: 20110907 |