CN102169207B - Periodically poleddomain reverse lithium niobate optical waveguide - Google Patents
Periodically poleddomain reverse lithium niobate optical waveguide Download PDFInfo
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- CN102169207B CN102169207B CN 201110139041 CN201110139041A CN102169207B CN 102169207 B CN102169207 B CN 102169207B CN 201110139041 CN201110139041 CN 201110139041 CN 201110139041 A CN201110139041 A CN 201110139041A CN 102169207 B CN102169207 B CN 102169207B
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- lithium niobate
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Abstract
The utility model provides a periodically poleddomain reverse lithium niobate optical waveguide which comprises a substrate, a waveguide layer arranged on the substrate, an upper photonic crystal and a lower photonic crystal; the lower photonic crystal is grown between the substrate and the waveguide layer; the upper photonic crystal is grown on the waveguide layer; the upper photonic crystal and the lower photonic crystal can lead both the fundamental frequency light-wave length and the frequency doubling light-wave length of the periodically poleddomain reverse lithium niobate optical waveguide in a photonic forbidden band; and one-dimensional, two-dimensional or three-dimensional photonic crystals are adopted as the upper photonic crystal and the lower photonic crystal. As the photonic crystals are both prepared on an upper coating and a lower coating of the waveguide layer, and the periodically poleddomain reverse lithium niobate optical waveguide is combined with the photonic crystals, the optical waveguide loss is low and the conversion efficiency is high.
Description
Technical field
The present invention relates to a kind of optical waveguide, be specifically related to a kind of period polarized counter-rotating lithium niobate fiber waveguide.
Background technology
Have frequency multiplication (SHG) and frequently second order and the cascaded second-order nonlinear interactions such as (SFG), difference frequency (DFG), cascade frequency multiplication and difference frequency (cSHG/DFG), cascade and frequency and difference frequency (cSFG/DFG) in the period polarized counter-rotating lithium niobate fiber waveguide (PPLN), at aspects such as All Optical Wavelength Conversion, all-optical switch, all-optical logic gate, full optical code type conversions huge application potential is arranged, receive in recent years increasing concern.
So far, the primary structure of period polarized counter-rotating lithium niobate fiber waveguide has the waveguide of raised line shape, buries the shape waveguide, ridge waveguide, bar carry the shape waveguide, diffusion slab waveguide etc., these waveguiding structures are simple, a little less than the period polarized counter-rotating lithium niobate fiber waveguide that adopts these structures to prepare limits to light field, loss in the waveguide is larger, and the raising of conversion efficiency is had a great impact.Adopt simultaneously the prepared optical waveguide of these structures when carrying out All Optical Wavelength Conversion, can not mate well the mould field of flashlight and pumping light, thereby affect wavelength conversion efficiency.
Summary of the invention
The purpose of this invention is to provide a kind of period polarized counter-rotating lithium niobate fiber waveguide with novel structure that full light signal is processed that is applied to, this period polarized counter-rotating lithium niobate fiber waveguide adopts photon crystal structure at top covering and the under-clad layer of ducting layer, period polarized counter-rotating lithium niobate fiber waveguide is combined with photonic crystal, so that optical waveguide loss is low, conversion efficiency is high.
The invention provides a kind of period polarized counter-rotating lithium niobate fiber waveguide, comprise substrate and the ducting layer that is positioned on the substrate, it is characterized in that, it also comprises photonic crystal and lower photonic crystal, lower photonic crystal grows between substrate and the ducting layer, upper photonic crystal grows on the ducting layer, and described upper photonic crystal and lower photonic crystal can make fundamental light wave length and the frequency doubled light wavelength of described period polarized counter-rotating lithium niobate fiber waveguide all be in the forbidden photon band.
Further, described upper photonic crystal is one dimension, two dimension or three-D photon crystal, and described lower photonic crystal is one dimension, two dimension or three-D photon crystal.
The present invention has following beneficial effect:
1, the present invention adopts photon crystal structure that light wave mould field is limited, so that the mould field energy of flashlight and pumping light is mated enough well when carrying out All Optical Wavelength Conversion, has improved mould field matching attribute, thereby improves wavelength conversion efficiency.If prepare up and down two dimension or three-D photon crystal at ducting layer, stronger to the light field restriction, better effects if more is conducive to the raising of conversion efficiency.Divide generation and the transmission that is conducive to frequency-doubled effect among the PPLN in this waveguide, its conversion efficiency is improved, also can improve the conversion efficiency of other second order and cascaded second-order nonlinear interaction simultaneously.
2, in the middle of the present invention designs photonic crystal applications to the PPLN waveguiding structure, can so that in the frequency multiplication process fundamental frequency pumping light and frequency doubled light just be in the forbidden photon band, the light wave that forbidden photon band can stop frequency to fall within it enters other media from the PPLN waveguide, causes waveguide that the loss of specific wavelength is reduced.When fundamental frequency pumping light transmitted in this PPLN, because frequency-doubled effect produces frequency doubled light, this two-beam had minimum loss in this waveguide.
3, ducting layer can adopt symmetrical structure up and down in the optical waveguide of the present invention, light field is symmetric in the waveguide so, with the easier coupling of single-mode fiber, coupling efficiency is higher, ducting layer photonic crystal up and down has very high reflectivity, so stronger to light field restriction in the waveguide, optical power density is higher, is very beneficial for the generation of nonlinear effect.
Description of drawings
Fig. 1 is the structural drawing that the present invention adopts the period polarized counter-rotating lithium niobate fiber waveguide of 1-D photon crystal;
Fig. 2 is the structural drawing that the present invention adopts the period polarized counter-rotating lithium niobate fiber waveguide of 2 D photon crystal;
Fig. 3 is SiO designed in the embodiment of the invention
2/ TiO
2The transmission spectrum of film.
Embodiment
The period polarized counter-rotating lithium niobate fiber waveguide that is applicable to full light signal processing of the present invention comprises ducting layer 1, substrate 2, upper photon crystal 3 and lower photonic crystal 4, the lower photonic crystal 4 of growth on the substrate 2, with itself and ducting layer 1 Direct Bonding, the upper photon crystal 3 of growing on the ducting layer 1.Wherein going up the photon crystal 3 can be identical structure with lower photonic crystal 4, it also can be different structures, they can be 1-D photon crystal (as shown in Figure 1), 2 D photon crystal (preparing by punching two ends or other modes about ducting layer as shown in Figure 2) or three-D photon crystal.
The present invention need to design the structure (being the thickness of high low-refraction, the cycle number of plies, every layer dielectric) of upper photon crystal 3 and lower photonic crystal 4, so that fundamental frequency light and frequency doubled light wavelength just are in the forbidden photon band in the frequency multiplication process of period polarized counter-rotating lithium niobate fiber waveguide.
Below above photonic crystal 3 and lower photonic crystal 4 be 1-D photon crystal, 1-D photon crystal is multilayer SiO
2/ TiO
2Film (SiO
2Refractive index be 1.46, TiO
2Refractive index be 2.3) for example, the present invention will be further described.
1-D photon crystal be by two or more media in one direction periodic arrangement consist of, can reach tens even the band gap width of hundreds of nanometer scale near visible district and infrared region, its band gap width determines that by the refractive index of medium refringence is larger, and then the forbidden band is more obvious.
On, the structure of lower 1-D photon crystal can adopt the transfer matrix method design, namely utilize the Maxwell equation group to find the solution two Electric and magnetic fields on next-door neighbour's aspect, thereby can obtain transmission matrix, then the individual layer conclusion is generalized to whole periodical media space, can calculate thus transmission coefficient and the reflection coefficient of whole multilayered medium, transmission coefficient is transmission spectrum with the variation diagram of incident wavelength, change the high low-refraction of 1-D photon crystal, the cycle number of plies, the thickness of every layer dielectric, just can obtain different transmission spectrums, when transmitance in the transmission spectrum is that 0 zone (being forbidden photon band) can be long with the fundamental light wave of period polarized counter-rotating lithium niobate fiber waveguide and frequency doubled light wavelength when corresponding, write down the high low-refraction of this moment, the cycle number of plies, the thickness of every layer dielectric just can obtain the structure of 1-D photon crystal according to these parameters.
Being 8 μ m for the ridge waveguide width, highly is the preparation of the period polarized counter-rotating lithium niobate fiber waveguide of 5 μ m, at first choose mix magnesium lithium columbate crystal as ducting layer, lithium tantalate is as substrate layer; It is period polarized to use the extra electric field polarization method that ducting layer is carried out under the room temperature, performance period domain inversion structures preparation, adopt sol-gel process to prepare multilayer SiO at substrate again
2/ TiO
2Film (TiO
2Film and SiO
2The film alternate cycle is arranged), with itself and ducting layer Direct Bonding, ducting layer is being carried out grinding and polishing, make reduced thickness to the 5 μ m of ducting layer, adopt equally sol-gel process to prepare multilayer SiO to ducting layer afterwards
2/ TiO
2Film, deposit again the metallic film of layer of Ni Cr alloy as mask layer, by photoetching process the waveguiding structure figure is transferred on the ducting layer, method with inductively coupled plasma (ICP) etching etches ridged waveguide structure, with chemical solvent photoresist and metallic mask layer are got rid of at last, namely obtained lithium niobate fiber waveguide.
Optical waveguide of the present invention is worked as SiO
2/ TiO
2The film number of plies is during greater than 12 layers, and transmission spectrum is little with the variation of the film number of plies, changes SiO
2And TiO
2The thickness of the every tunic of film is worked as SiO
2The every tunic of film is thick to be 263nm, TiO
2The every layer film thickness of film is 164nm, makes its forbidden photon band just be in 1550nm and 775nm wave band, and the light wave that forbidden photon band can stop frequency to fall within it enters other media from the PPLN waveguide, as shown in Figure 3, and central wavelength lambda in the transmission spectrum
0Be 1550nm, this 1-D photon crystal has reflectivity close to 1 to the light of 1550nm and 775nm wave band, when the light of 1550nm during in designed period polarized counter-rotating potassium niobate optical waveguide transmission, because frequency-doubled effect produces the frequency doubled light of 775nm, 1-D photon crystal has very high reflection to this two-beam, simultaneously its mould field is limited, this two-beam has minimum loss in this waveguide, the mould field energy of two-beam is mated enough well, so this optical waveguide loss is low, conversion efficiency is high.
The present invention not only is confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; can adopt other multiple embodiment to implement the present invention; therefore; every employing of the present invention meter structure and thinking; make some simple meters that change or change, all fall into the scope of protection of the invention.
Claims (1)
1. period polarized counter-rotating lithium niobate fiber waveguide, comprise substrate (2) and be positioned at ducting layer (1) on the substrate, it is characterized in that, it also comprises photonic crystal (3) and lower photonic crystal (4), lower photonic crystal (4) grows between substrate (2) and the ducting layer (1), upper photonic crystal (3) grows on the ducting layer (1), and described upper photonic crystal (3) and lower photonic crystal (4) can make fundamental light wave length and the frequency doubled light wavelength of described period polarized counter-rotating lithium niobate fiber waveguide all be in the forbidden photon band;
Described upper photonic crystal (3) and described lower photonic crystal (4) are 1-D photon crystal, and are multilayer SiO
2/ TiO
2Film, SiO
2The every tunic of film is thick to be 263nm, TiO
2The every layer film thickness of film is 164nm, makes its forbidden photon band just be in 1550nm and 775nm wave band.
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CN110286439B (en) * | 2019-07-02 | 2020-07-24 | 山东大学 | Method for forming optical waveguide quantum chip on gradient periodic polarization lithium tantalate by adopting proton exchange method |
CN110212401B (en) * | 2019-08-01 | 2019-11-19 | 南京南智先进光电集成技术研究院有限公司 | A kind of on piece distributed feed-back optical parametric oscillator |
CN112186478A (en) * | 2020-09-11 | 2021-01-05 | 天津大学 | Laser with adjustable power proportion and pulse interval and method |
CN112269225B (en) * | 2020-10-16 | 2022-04-01 | 南京南智先进光电集成技术研究院有限公司 | Wet etching method of lithium niobate thin film waveguide and lithium niobate thin film waveguide |
Citations (2)
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CN1812211A (en) * | 2005-01-26 | 2006-08-02 | 北京大学 | Optical diode based on two-dimensional photon crystal and preparation method |
CN101661133A (en) * | 2008-08-26 | 2010-03-03 | 华为技术有限公司 | An optical waveguide, method for preparing same and wavelength converter |
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CN1812211A (en) * | 2005-01-26 | 2006-08-02 | 北京大学 | Optical diode based on two-dimensional photon crystal and preparation method |
CN101661133A (en) * | 2008-08-26 | 2010-03-03 | 华为技术有限公司 | An optical waveguide, method for preparing same and wavelength converter |
Non-Patent Citations (2)
Title |
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周敏娟等.基于铌酸锂光波导的全光波长转换.《光通信研究》.2006,(第2期),第68-70页. * |
王健等.周期域反转铌酸锂可调谐波长转换器的皮秒脉冲实验.《光学学报》.2006,第26卷(第10期),第1453-1458页. * |
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