CN102169199A - Surface groove structure based on surface excimer radiation mode - Google Patents
Surface groove structure based on surface excimer radiation mode Download PDFInfo
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- CN102169199A CN102169199A CN2011100917731A CN201110091773A CN102169199A CN 102169199 A CN102169199 A CN 102169199A CN 2011100917731 A CN2011100917731 A CN 2011100917731A CN 201110091773 A CN201110091773 A CN 201110091773A CN 102169199 A CN102169199 A CN 102169199A
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Abstract
The invention relates to a surface groove structure based on a surface excimer radiation mode. The surface groove structure is manufactured by adopting the steps of: firstly confirming a working frequency f for realizing a beaming effect of the surface groove structure; and then selecting a metal plate material; opening a sub-wavelength aperture with a semidiameter r or a long and narrow gap with a width w at the central region of the metal plate; and then, arranging a plurality of periodic groove structures on the exit surface (or simultaneously on the incident surface and the exit surface) of the metal plate, wherein the grooves have the period gp, the depth gd and the width gw; the distance from the first groove to the center of the metal gap is gp1; in addition, medium with a permittivity epsilon and a thickness t is loaded between the adjacent metal grooves. Compared with a traditional sub-wavelength periodic groove structure, the surface groove structure provided by the invention has more compact aperture size and higher directional radiation strength; in addition, the surface excimer radiation mode is supported on the surface, that is the flat surface between the adjacent grooves serves as a secondary radiation source region and the surface electromagnetic energy is secondarily radiated to a free space.
Description
Technical field
The present invention relates to a kind of method for designing that can realize the surface groove structures of efficient pack (beaming) effect, particularly a kind of surface groove structures based on face excimer radiation mode.
Background technology
Recently, scholars such as H.J.Hezec find also can realize the unusual transmission of luminous energy when sub-wavelength aperture (slit) loads ring-like (one dimension) period groove structure on every side at visible light wave range.Moreover, the transmission direction of its transmitted beam also can be controlled effectively, and emission angle is very little, only is 3 °-5 °, presents tangible beaming effect.And according to diffraction theory, when the diameter of aperture during less than lambda1-wavelength, its transmitted light should be uniform at the energy of all angles, and these two kinds of peculiar phenomenons allow the people be difficult to the imagination really, caused many in the world research groups to research boom, and the applied research relevant with this phenomenon ground also like a raging fire launches to its unusual galvanomagnetic effect ultimate principle.This afterwards surface groove structures has been extended to Terahertz, microwave region, and people have successively verified the unusual transmission that loads electromagnetic energy behind the groove structure and the existence of beaming effect phenomenon.Because groove structure makes it obtain redistribution in flute surfaces to the modulation of surperficial electromagnetic energy, exists higher relatively electromagnetic energy at the groove place.These energy meeting secondary under the effect of groove structure is called secondary radiation source by people usually to the free space radiation.The energy that secondary radiation source gives off and the energy that directly sees through sub-wavelength apertures (slit) be in the far field coherence stack, thereby realized the beaming effect.
Present this surface period groove structure, its groove cycle approximates wavelength, and the groove that needs several cycles to arrange could produce the beaming effect, thereby makes that whole groove structure size is very big, and the bore utilization factor is lower.Therefore the surface groove structures that needs a kind of pervasive, compact, high radiance of urgent design.
Summary of the invention
The technical problem to be solved in the present invention: overcome the deficiencies in the prior art, a kind of surface groove structures based on face excimer radiation mode is provided, have high radiance, and compact conformation.
The technical solution adopted for the present invention to solve the technical problems is: a kind of surface groove structures based on face excimer radiation mode, and step is as follows:
(1) determine that surface groove structures realizes the frequency of operation f of pack (beaming) effect, wavelength is λ;
(2) select sheet metal, the thickness of described sheet metal is h, and the size of h satisfies actual processing request: when only exit facet loads groove structure, and λ＞h＞gd; When loading groove structure simultaneously for exit facet and the plane of incidence, λ＞h＞2 * gd; Gd is the degree of depth of groove;
(3) central authorities at described sheet metal open a sub-wavelength hole, the radius r in hole＜0.5 λ, or open a long and narrow slit, gap width w＜0.2 λ adopts plane wave that this hole or long and narrow slit are encouraged;
(4) for the sheet metal of sub-wavelength apertures, at the exit facet in hole or N the annular period groove structure of arranging around the sub-wavelength apertures at the plane of incidence and exit facet simultaneously; And for the sheet metal in long and narrow slit, at long and narrow slit exit facet or simultaneously in symmetry arrangement N the period groove structure in the two ends, long and narrow slit of the plane of incidence and exit facet; In above-mentioned two kinds of situations, the cycle of groove is gp, and the degree of depth is gd, and width is gw, and first slot trough is gp from the distance of metal slit central authorities
1Described groove cycle gp is 0.4 λ-0.75 λ, and gash depth gd is 0.05 λ-0.25 λ, and groove width gw is 0.05 λ-0.15 λ, first slot trough from metal slit central authorities apart from gp
1＜0.6 λ;
(5) loading specific inductive capacity between the adjacent trenches structure is ε, and thickness is the medium of t; Finish based on the surface groove structures design of face excimer radiation mode this moment.The groove structure of designing passes through the electromagnetic modulation in surface, make the place, plane between adjacent trenches assemble stronger energy relatively, these energy are under the effect of groove structure, and therefore the meeting secondary claims that this radiation is a face excimer radiation mode to the free space radiation;
(6) according to the size of designed groove structure, select suitable manufacturing process.For the groove structure of microscale-nanoscale, need to adopt the micro-nano process technology to make, for millimeter or larger sized groove structure, can utilize processing of digital control wire-electrode cutting or CNC milling machine and printed circuit board (PCB) plate-making technology to make.
Sheet metal in the described step (2) is silver or aluminium, adds at microscale-nanoscale and adopts silver man-hour, adopts aluminium when millimeter or above dimensioned.Sheet metal be shaped as square or rectangle.
The electric field polarization direction of described plane wave excitation is vertical with the trench length direction.
Groove number of cycles N in the described step (4) is the integer greater than 1, and N is big more, the surface electromagnetic wave that can inspire is just many more, thereby can modulate more surface wave and its secondary radiation is gone out, but the N value is too big, the effect of the groove structure performance of edge is very little, almost can ignore, and cause whole groove structure size bigger easily, so the N value selects suitably to get final product, one can be 5＜N＜20.
The DIELECTRIC CONSTANT value of the medium in the described step (5) is 6-15;
Described medium adopts silicon when groove structure is of a size of microscale-nanoscale, thickness is t＜0.15 λ; When groove structure is of a size of millimeter or above size, adopt microwave sheet material, thickness t＜0.15 λ.
The present invention is with the advantage that is had of comparing of prior art:
(1) this surface groove structures of the present invention is compared with traditional surface groove structures, bore obviously reduces, and the exit facet flute surfaces has different surface field modes of resonance, and this mode of resonance helps this groove structure to realize higher directed radiation performance, and compact conformation;
(2) high dielectric constant that the present invention loaded is in the physical separation while that reduces between the adjacent trenches, can also inspire more surface electromagnetic wave, thereby make more surface electrical magnetic energy be modulated, and go out, thereby the energy of increase far-field radiation to the free space secondary radiation by groove;
(3) this period groove structure of the present invention when the plane of incidence loads groove, can excite more surface electromagnetic wave, and more energy is coupled in the aperture (slit), realizes higher unusual transmission.
Description of drawings
Fig. 1 is the surface groove structures sectional view based on face excimer radiation mode;
Fig. 2 is the sub-wavelength slit surface groove structure vertical view based on face excimer radiation mode;
Fig. 3 is the sub-wavelength apertures surface groove structures vertical view based on face excimer radiation mode;
Fig. 4 is the radiation mechanism figure based on the surface groove structures of face excimer radiation mode;
Fig. 5 is the radiation mechanism figure of conventional surface groove structure;
Fig. 1, in 2,3: 1 is elongate slit or sub-wavelength apertures, and 2 is surface groove structures, and 3 is sheet metal, 4 dielectric structures for loading, h is the thickness of sheet metal, and gw is the width of groove, and gp is the cycle of groove, and gd is the degree of depth of groove, gp
1Be the distance of first slot trough from radiating slot, t is the thickness of loaded medium, and r is the radius in aperture, and w is the width of slit.
Among Fig. 4: the plane between the adjacent trenches of designed surface groove structures is the secondary radiation source region, is called face excimer radiation mode, to free space secondary radiation surface electrical magnetic energy; Wherein K represents plane wave wave vector direction, and B represents the polarization direction, magnetic field, and E represents the electric field polarization direction.
Among Fig. 5: the groove place of conventional surface groove structure is the secondary radiation source region, to free space secondary radiation surface electrical magnetic energy.Wherein K represents plane wave wave vector direction, and B represents the polarization direction, magnetic field, and E represents the electric field polarization direction.
Embodiment
The present invention is described in detail below in conjunction with the drawings and the specific embodiments, but protection scope of the present invention is not limited in following embodiment, should comprise the full content in claims.And those skilled in the art can realize full content the claim from following embodiment.
A kind of surface groove structures based on face excimer radiation mode that the present invention proposes promptly loads the medium of high-k, as Figure 1-3 on the face between groove is adjacent.A kind of difference electromagnetic resonance pattern on conventional trench structures surface is in the past supported on this groove structure surface in addition, it is face excimer radiation mode, it is as a secondary radiation source (see figure 4) the plane of adjacent trenches structure, to the free space emittance, conventional trench structures then is to have formed a secondary radiation source in groove, as shown in Figure 5.The medium that loads can significantly reduce the cycle of groove, thereby dwindles the bore of whole surface groove structures, and this outside excimer radiation mode can realize pack (beaming) effect in far field, and can also improve the directed radiation performance of this surface groove structures.
Below by several embodiment, further specify implementation procedure of the present invention.
(1) select surface groove structures to realize that the frequency of operation of beaming effect is 14.5GHz, can get its wavelength is 20.69mm;
(2) owing to this groove structure work microwave region, physical dimension is the millimeter level, so the selection metallic sheet material is an aluminium;
(3) open the long and narrow finedraw of width w=1.5mm in sheet metal central authorities;
(4) at the plane of incidence and the exit facet of sheet metal, the surface groove structures of the two ends symmetry arrangement cycle N=5 of slit, the degree of depth gd of groove is 2.9mm, the width gw of groove is 3.8mm, the cycle gp of groove is 11.5mm, and the distance of first slot trough gap crack central authorities is gp1=9.4mm.Can judge that the thickness h of sheet metal can be designed to 9mm this moment.The plane wave vertical incidence, the vertical and groove direction of electric field polarization direction;
(5) load DIELECTRIC CONSTANT=9.8 between adjacent trenches, thickness is the dielectric material Rogers TMM 10i of 1.5mm, and so far, a kind of surface groove structures design based on face excimer radiation mode is finished;
(6) utilize processing of existing digital control wire-electrode cutting or CNC milling machine and printed circuit board (PCB) plate-making technology that designed this surface groove structures based on face excimer radiation mode is made.
The present invention only has been first embodiment, but this structure is not limited to one dimension straight flute structure, also go for the two-dimensional annular groove structure, same its suitable wave band covers visible light wave range from microwave region, implementation process to narrate above similar, those skilled in the art can realize fully according to top narration.
Claims (7)
1. surface groove structures based on face excimer radiation mode is characterized in that: being produced as follows of described surface groove structures:
(1) determine that surface groove structures realizes the frequency of operation f of bunching effect, wavelength is λ;
(2) select sheet metal, the thickness of described sheet metal is h, and the size of h satisfies actual processing request: when only exit facet loads groove structure, and λ＞h＞gd; When loading groove structure simultaneously for exit facet and the plane of incidence, λ＞h＞2 * gd; Gd is the degree of depth of groove;
(3) central authorities at described sheet metal open a sub-wavelength hole, the radius r in hole＜0.5 λ, or open a long and narrow slit, gap width w＜0.2 λ adopts plane wave that this hole or long and narrow slit are encouraged;
(4) for the sheet metal of sub-wavelength apertures, at the exit facet in hole or N the annular period groove structure of arranging around the sub-wavelength apertures at the plane of incidence and exit facet simultaneously; And for the sheet metal in long and narrow slit, at the exit facet in long and narrow slit or simultaneously in symmetry arrangement N the period groove structure in the two ends, long and narrow slit of the plane of incidence and exit facet; In above-mentioned two kinds of situations, the cycle of groove is gp, and the degree of depth is gd, and width is gw, and first slot trough is gp from the distance of metal slit central authorities
1Described groove cycle gp is 0.4 λ-0.75 λ, and gash depth gd is 0.05 λ-0.25 λ, and groove width gw is 0.05 λ-0.15 λ, first slot trough from metal slit central authorities apart from gp
1＜0.6 λ;
(5) loading specific inductive capacity between the adjacent trenches structure is ε, and thickness is the medium of t; Finish based on the surface groove structures design of face excimer radiation mode this moment;
(6) according to the size of designed groove structure, select suitable manufacturing process.For the groove structure of microscale-nanoscale, need to adopt the micro-nano process technology to make, for millimeter or larger sized groove structure, can utilize processing of digital control wire-electrode cutting or CNC milling machine and printed circuit board (PCB) plate-making technology to make.
2. a kind of surface groove structures according to claim 1 based on face excimer radiation mode, it is characterized in that described: the sheet metal in the described step (2) is silver or aluminium, add employing in man-hour silver at microscale-nanoscale, when millimeter or above dimensioned, adopt aluminium.
3. a kind of surface groove structures based on face excimer radiation mode according to claim 1 and 2 is characterized in that described: the sheet metal in the described step (2) be shaped as square or rectangle.
4. a kind of surface groove structures based on face excimer radiation mode according to claim 1 is characterized in that: the electric field polarization direction of described plane wave excitation is vertical with the trench length direction.
5. according to a kind of surface groove structures described in the claim 1, it is characterized in that the value of the groove number of cycles N in the described step (4) is: 5＜N＜20 based on face excimer radiation mode.
6. according to a kind of surface groove structures based on face excimer radiation mode described in the claim 1, it is characterized in that: the DIELECTRIC CONSTANT value of the medium in the described step (5) is 6-15.
7. according to a kind of surface groove structures based on face excimer radiation mode described in the claim 1, it is characterized in that: described medium adopts silicon when groove structure is of a size of microscale-nanoscale, thickness is t＜0.15 λ; When groove structure is of a size of millimeter or above size, adopt microwave sheet material, thickness t＜0.15 λ.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011100917731A CN102169199A (en) | 2011-04-13 | 2011-04-13 | Surface groove structure based on surface excimer radiation mode |
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| CN2011100917731A CN102169199A (en) | 2011-04-13 | 2011-04-13 | Surface groove structure based on surface excimer radiation mode |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236643A (en) * | 2013-04-18 | 2013-08-07 | 北京大学 | One-way exciter with surface plasmons for wideband |
| CN108459364A (en) * | 2018-05-30 | 2018-08-28 | 深圳通感微电子有限公司 | A kind of electromagnetic wave collimating structure |
| CN108802038A (en) * | 2018-08-28 | 2018-11-13 | 京东方科技集团股份有限公司 | Light source assembly and micro-total analysis system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101719596A (en) * | 2009-12-25 | 2010-06-02 | 中国科学院光电技术研究所 | Single-feed source periodically arranged groove slot panel antenna |
| CN101719597A (en) * | 2009-12-30 | 2010-06-02 | 中国科学院光电技术研究所 | Medium loading type period groove slot antenna |
-
2011
- 2011-04-13 CN CN2011100917731A patent/CN102169199A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101719596A (en) * | 2009-12-25 | 2010-06-02 | 中国科学院光电技术研究所 | Single-feed source periodically arranged groove slot panel antenna |
| CN101719597A (en) * | 2009-12-30 | 2010-06-02 | 中国科学院光电技术研究所 | Medium loading type period groove slot antenna |
Non-Patent Citations (1)
| Title |
|---|
| S. SENA AKARCA-BIYIKLI ET AL: "Enhanced transmission of microwave radiation in one-dimensional metallic gratings with subwavelength aperture", 《APPLIED PHYSICS LETTERS》, vol. 85, no. 7, 16 August 2004 (2004-08-16), pages 1198 - 1110 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236643A (en) * | 2013-04-18 | 2013-08-07 | 北京大学 | One-way exciter with surface plasmons for wideband |
| CN108459364A (en) * | 2018-05-30 | 2018-08-28 | 深圳通感微电子有限公司 | A kind of electromagnetic wave collimating structure |
| CN108802038A (en) * | 2018-08-28 | 2018-11-13 | 京东方科技集团股份有限公司 | Light source assembly and micro-total analysis system |
| US11213822B2 (en) | 2018-08-28 | 2022-01-04 | Boe Technology Group Co., Ltd. | Light source assembly and micro total analysis system |
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Application publication date: 20110831 |