CN102157900A - Mechanical optical gate of superpower laser - Google Patents

Mechanical optical gate of superpower laser Download PDF

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Publication number
CN102157900A
CN102157900A CN 201110065143 CN201110065143A CN102157900A CN 102157900 A CN102157900 A CN 102157900A CN 201110065143 CN201110065143 CN 201110065143 CN 201110065143 A CN201110065143 A CN 201110065143A CN 102157900 A CN102157900 A CN 102157900A
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CN
China
Prior art keywords
optical gate
mirror
straight line
semiconductor laser
mechanical
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CN 201110065143
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Chinese (zh)
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CN102157900B (en
Inventor
李波
王又青
杨扬
贺昌玉
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Publication of CN102157900A publication Critical patent/CN102157900A/en
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Publication of CN102157900B publication Critical patent/CN102157900B/en
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Abstract

The invention discloses a mechanical optical gate of a superpower laser, comprising an optical gate box, a linear cylinder, a linear guide rail and an energy absorbing mechanism, wherein a semi-conductor red light generator is arranged on the optical gate box, an optical gate lens is arranged below the optical gate box, the optical gate lens is arranged under the center of the semi-conductor red light generator, and a red light reflecting mirror forming a 45-degree angle with a horizontal plane is arranged on the optical gate lens; the linear cylinder drives the optical gate lens to move along the linear guide rail; the energy absorbing mechanism is arranged below the optical gate lens and comprises an anti-reflection plate, an absorbing shell and an absorber core in the absorbing shell; and the anti-reflection plate is provided with a long-round open pore corresponding to the center of the semi-conductor red light generator. The mechanical optical gate overcomes the defects of an existing optical gate lens that the orientation is unstable, the movement displacement offset is large, the energy absorbing area is small and the efficiency of primary heat exchange is low; and the mechanical optical gate has the characteristics of high motion sensitivity, stable red light orientation and high energy absorbing efficiency.

Description

A kind of mechanical optical gate of superpower laser
Technical field
The present invention relates to laser, be specially a kind of mechanical optical gate of superpower laser.
Technical background
The machinery optical gate is to closing and open control from resonant cavity axle emitting laser, and laser is exported a kind of device that leads, and is the vitals of axial fast flow gas laser.The machinery optical gate mainly by can control its move on the laser optical path and when changing the completely reflecting mirror of laser optical path, the absorber device that is used to absorb the band refrigerating function of completely reflecting mirror institute reflector laser, simulated laser output the guider of laser direction and the shell of mechanical optical gate form.The performance evaluation of optical gate relates generally to the operating sensitivity of feed mechanism, and energy absorption mechanism absorbs and handle the ability of energy, and the aspects such as guiding stability of guiding mechanism.Wherein the operating sensitivity of feed mechanism depends primarily on the quality of its motion parts and the performance of drive part; Energy absorption mechanism absorbs and the ability of processing energy then depends on the efficient that absorbs energy area and heat exchange; The guiding stability of guiding mechanism then depend on the stability Design of himself and the influencing factor of external environment, the especially rigid shock of the feed mechanism of self to its influence, these factors can directly influence the performance of laser processing.
Existing mechanical optical gate ubiquity guiding is unstable, the moving displacement deviation is big, the inefficient shortcoming of the little one-level heat exchange of energy absorption area.
Summary of the invention
The objective of the invention is to overcome the defective that the existing mechanical optical gate exists, and a kind of mechanical optical gate of the superpower laser stable, that moving displacement control is accurate, the energy absorption area is big, the efficient one-level heat exchange is high that leads is provided.
For realizing this purpose, the mechanical optical gate of the superpower laser that the present invention is designed, comprise the guiding mechanism, feed mechanism and the energy absorption mechanism that set gradually up and down, described guiding mechanism comprises the optical gate box, semiconductor ruddiness generator is installed above the optical gate box, optical gate box below is provided with the optical gate mirror, and the optical gate mirror is positioned under the semiconductor ruddiness generator center, which is provided with the red mirror with horizontal plane angle at 45; Described feed mechanism comprises straight line cylinder and line slideway, and described straight line cylinder drives the optical gate mirror and moves along line slideway; Described energy absorption mechanism is positioned at optical gate mirror below, comprises the antireflection plate, absorbs housing and absorbs the interior absorber core of housing, and described antireflection plate is provided with and the corresponding obround opening in semiconductor ruddiness generator center.
In technique scheme, be separately installed with rubber buffer head on the shell of described optical gate box and the optical gate contiguous block, the cylinder rod end of described straight line cylinder is equipped with buffering O type circle.
Further, the junction of described semiconductor laser installing plate and semiconductor laser folder is provided with locating ring Primary Location relative position relation between the two, is equipped with on the described semiconductor laser folder and adjusts the ruddiness adjustment screw of ruddiness generator at X, Y, Z direction top offset respectively.
Further, one side of described semiconductor laser installing plate and semiconductor laser folder is provided with spring tensioning means, this spring tensioning means comprises spring, steady pin and setting-up piece, described steady pin is fixedlyed connected with the semiconductor laser mounting panel, described setting-up piece is installed in the semiconductor laser folder and goes up in the hole groove that is provided with, one end of spring is fixedly connected on the setting-up piece, and the other end is fixed on the steady pin.
In technique scheme, described straight line cylinder and line slideway are installed on the cylinder block, the location are installed near switch on the described straight line cylinder, and the top of described optical gate mirror moving line is equipped with the location near switch.
Further, be provided with the PLC controller in the described feed mechanism, the input of PLC controller connects the location near switch, and output connects straight line cylinder, and two choke valves of regulating the size of actuating force are installed on the described straight line cylinder.
Further, described optical gate mirror minute surface is parabolic.
Further, the red copper system body that described absorber core is a hollow, its outer wall are helical form, and its inwall bottom is taper.
The outer surface of above-mentioned antireflection plate and absorber core is through the blackout chemical treatment.
The inwall of the outer wall of above-mentioned absorber core and absorption housing constitutes cooling-water duct, absorb the water inlet that lower part of frame is provided with cooling-water duct, the top that absorbs housing is provided with the delivery port of cooling-water duct, and described water inlet goes out also to be provided with the water wheels flowmeter that is used to monitor cooling water flow.
Adopt the present invention of technique scheme to have following useful technique effect:
1, guiding mechanism of the present invention is fixed on semiconductor ruddiness generator on the semiconductor laser folder, semiconductor laser installing plate and housing are fixed, by locating ring Primary Location position relation between the two, adjust the screw fine setting by ruddiness again, the optical path direction that ruddiness is passed through on the optical gate mirror after the reflection to red light mirrorings of 45 degree is consistent with the light direction of superpower laser, has guaranteed the accuracy of high guiding mechanism; And utilize spring tensioning means, guarantee the position of semiconductor laser folder and semiconductor laser installing plate, improved the stability of guiding mechanism;
2, feed mechanism of the present invention is crossed the optical gate mirror location status that gather near switch two location, with PLC controller (Programmable Logic Controller) control feed mechanism, promptly control the straight line cylinder motion and drive the motion of optical gate mirror, the Pneumatic pipe cleaner of straight line cylinder is crossed the choke valve manual adjustments, drive the moving component of lightweight like this with cylinder, can obtain good operating sensitivity, and ball slide block and line slideway are guaranteed kinetic stability, the rigid shock that rubber buffer head reduces optical gate mirror and the relative motion of optical gate mirror contiguous block when stopping, utilize the buffering O type circle of straight line cylinder boom end setting can reach slowly closely at the uniform velocity startup, the rigid shock when having reduced straight line cylinder motion beginning;
3, energy absorption mechanism of the present invention, utilize the total reflection paraboloidal mirror of optical gate mirror to change laser optical path, and circular light spot is focused into a line segment, and make its focus be sitting at obround opening place on the antireflection plate, laser by the obround opening on the antireflection plate after, become divergent shape to incide the absorber in-core and absorb, can absorb effectively, even reflection is arranged, reverberation also has only seldom can overflow the absorption housing, has guaranteed the high efficiency of energy absorption; Simultaneously, the outer wall that absorbs housing is processed into helical structure, can guarantee to absorb the high efficiency of heat exchange between housing and cooling water; And the cooling device that the optical gate mirror is provided with, the stability and the durability of lifting optical gate mirror.The water wheels flowmeter of introducing, optical gate mirror temperature switch, absorption case temperature switch and cooling water cooling-water temperature sensor connect the PLC controller and carry out data monitoring, guarantee energy absorption mechanism stable and high effective operation more.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present invention;
Fig. 2 is that the C-C of Fig. 1 is to cutaway view;
Fig. 3 is that the B-B of Fig. 2 is to cutaway view;
Fig. 4 is the guiding mechanism structural representation among the present invention;
Fig. 5 is the partial sectional view of Fig. 4 medi-spring take-up device;
Fig. 6 is the feed mechanism structural representation among the present invention
Fig. 7 is an energy absorption mechanism structural representation of the present invention;
Fig. 8 is vertical sectional structure schematic diagram of Fig. 7;
Fig. 9 is an absorber cored structure schematic diagram in the energy absorption mechanism;
Among the figure, 1 is the optical gate box, 2 is the optical gate mirror, 3 is optical gate mirror contiguous block, 4 is straight line cylinder, 5 is line slideway, 6 is the semiconductor laser installing plate, 7 are the semiconductor laser folder, 8 is semiconductor ruddiness generator, 9 for locating near switch, 10 is spring tensioning means, 11 is choke valve, 12 for locating near switch, 13 for absorbing the case temperature switch, 14 is temperature sensor, 15 is the antireflection plate, 16 is the absorber core, 17 for absorbing housing, 18 is the water wheels flowmeter, 19 is locating ring, 20 is rubber buffer head, 21 is optical gate mirror temperature switch, 22 is red mirror, 23 are ruddiness adjustment screw, 24 is spring, 25 is ruddiness spring setting-up piece, 26 is ruddiness spring steady pin, 27 is cylinder rod, 28 are buffering O type circle, 29 is to survey piece near switch.
Embodiment
The present invention is described in further detail below in conjunction with drawings and Examples:
The mechanical optical gate of the superpower laser shown in Fig. 1-9, comprise the guiding mechanism, feed mechanism and the energy absorption mechanism that set gradually up and down, described guiding mechanism comprises optical gate box 1, semiconductor ruddiness generator 8 is installed above the optical gate box 1, optical gate box 1 below is provided with optical gate mirror 2, optical gate mirror 28 is positioned under the semiconductor ruddiness generator center, which is provided with the red mirror 22 with horizontal plane angle at 45; Described feed mechanism comprises straight line cylinder 4 and line slideway 5, and described straight line cylinder 4 drives optical gate mirror 2 and moves along line slideway 5; Described energy absorption mechanism is positioned at optical gate mirror 2 belows, comprises antireflection plate 15, absorbs the absorber core 16 in housing 17 and the absorption housing 17, and described antireflection plate 15 is provided with and the corresponding obround opening in semiconductor ruddiness generator 8 centers.
Cylinder rod 27 ends of straight line cylinder 4 are equipped with buffering O type circle, one the first from left right side clamps cylinder rod 27, cylinder rod 27 is fixed between optical gate mirror 2 and the optical gate mirror contiguous block 3, rigid shock when reducing to move beginning: when optical gate to reaching a moment of state setting in motion, cylinder rod 27 is connected buffering O type circle with optical gate mirror 2 contiguous blocks to right cylinder bar 27 and compresses, and moving component is cushioned; When the moment of optical gate from the state setting in motion that puts in place to the pass, 2 pairs of left hand cylinder bars 27 of cylinder rod 27 and optical gate mirror are connected buffering O type circle 28 and compress, and moving component is cushioned, and have improved the stability of feed mechanism.Be separately installed with rubber buffer head 20 on the shell of described optical gate box 1 and the optical gate contiguous block 3, when moving to, optical gate reaches the moment that a state stops, rubber buffer head 22 on the right part optical gate mirror contiguous block 3 that moves with moving component contacts with optical gate box 1 and compresses, and moving component is cushioned; Close the moment that the state of putting in place stops when optical gate moves to, moving component contact with rubber buffer head 22 on the left part light optical gate box 1 and compresses, and the moving component acquisition cushions, and has further improved the stability of feed mechanism.
The junction of semiconductor laser installing plate 6 and semiconductor laser folder 7 is provided with locating ring 19 Primary Location relative position relation between the two, be equipped with on the semiconductor laser folder 7 and adjust the ruddiness generator respectively at X, Y, the ruddiness of Z direction top offset fine setting is adjusted screw 23, the ruddiness of described adjustment directions X top offset is adjusted screw 23 lower ends and is passed semiconductor laser folder 7, the top bulb heads in the section that is provided with on the correspondence position Y direction on the semiconductor laser installing plate 6 elongated slot triangular in shape, this has just limited semiconductor ruddiness generator 8 and has carried out the rotation of Z direction, and makes the rotation of directions X adjustable; The ruddiness of described adjustment Y direction top offset is adjusted screw 23 lower ends and is passed semiconductor laser folder 7, and the top bulb withstands on the plane of semiconductor laser installing plate 6, and this just makes the rotation of semiconductor ruddiness generator 8 on the Y direction adjustable; The ruddiness of described adjustment Z direction top offset is adjusted screw 23 lower ends and is passed semiconductor laser folder 7, the top bulb heads in the circular hole that correspondence position is provided with on the semiconductor laser installing plate 6, this has just limited semiconductor ruddiness generator 8 and has carried out moving of directions X, Y direction, and makes the mobile adjustable of Z direction; Regulate the ruddiness at 3 places and adjust screw 23, the ruddiness that semiconductor ruddiness generator 8 is penetrated can vertically be penetrated on the red mirror 22 that becomes miter angle with horizontal plane, and become horizontal direction to reflect away, promptly consistent with the light direction of the laser of horizontal direction, this structure has effectively guaranteed the accuracy of guiding mechanism.
One side of semiconductor laser installing plate 6 and semiconductor laser folder 7 is provided with spring tensioning means 10, it comprises spring 24, setting-up piece 25 and steady pin 26, described steady pin 26 is fixedlyed connected with semiconductor laser mounting panel 6, described setting-up piece 25 is installed in the hole groove that is provided with on the semiconductor laser folder 7, one end of spring 24 is fixedly connected on the setting-up piece 25, the other end is fixed on the steady pin 26, utilizes the pulling force of spring 24 that ruddiness spring setting-up piece 25 is pressed in the correspondence hole groove of semiconductor laser folder 7.Such tension structure, after can stoping the ruddiness direction to be reconciled to finish, the direction of ruddiness produces change, even and produce change, also can make its quick homing, further improved the stability of guiding mechanism.
Straight line cylinder 4 and line slideway 5 are installed on the cylinder block of below of optical gate box 1, the cylinder rod of straight line cylinder 4 connects the optical gate mirror by optical gate mirror contiguous block 3, between line slideway 5 and the optical gate mirror contiguous block 3 the ball slide block is installed, the motion that is fixed together of ball slide block and moving component, utilize the linearity of line slideway 5 to guarantee the linearity of moving component in motion process in the motion process, prove by experiment, this can reduce beating in the motion process to greatest extent, improves the stability of motion.
The location is installed near switch 12 on the straight line cylinder 4, the top of described optical gate mirror moving line is equipped with the location near switch 9.Be provided with the PLC controller in the described feed mechanism, the input of PLC controller connects the location near switch 9, output connects straight line cylinder 5, two choke valves 11 are installed on the described straight line cylinder 5, by locating near switch 9 and the location status of location near the optical gate mirror 2 of switch 12 collections, carry out motion control with the PLC controller, promptly control straight line cylinder 4 motions and drive optical gate mirror 2 and 3 motions of optical gate mirror contiguous block, Pneumatic pipe cleaner is crossed choke valve 11 manual adjustments, drive the moving component of lightweight like this with line slideway 5, can obtain good operating sensitivity, and utilize ball slide block and line slideway 5 to guarantee kinetic stability.
Be provided with absorber core 16 in the absorption housing of energy absorption mechanism, absorber core 16 outer walls are helical form, and the bottom is taper; Absorber core 16 outer walls constitute described cooling-water duct with the inwall that absorbs housing 17; Perforate on the described antireflection plate 15 is a Long Circle; The outer wall of absorber core 16 is processed into helical structure, inwall with absorbing housing 17 has formed spiral helicine cooling-water duct, has increased the distance of flow of cooling water, increased cooling water in the time that absorbs the enclosure interior heat exchange, made the cooling of absorption housing more abundant.The following water inlet of described absorption housing 17 goes out also to be provided with the water wheels flowmeter 18 that is used to monitor cooling water flow.When specifically implementing, cooling water is entered by the following water inlet that absorbs housing through water wheels flowmeter 18 earlier, and again by spiral helicine cooling-water duct, the upper water-out mouth by absorption housing 17 from bottom to top flows out.Because the distributivity of energy absorption, absorber core 16 bottoms are faster than the trend of top temperature rise.Cooling water enters cooling from the bottom, can more effectively carry out heat exchange, and guarantees the no bubble that is full of of the interior cooling water of water channel.The introducing of water wheels flowmeter 18 then can be better monitors the flow of cooling water, guarantees the stable operation of energy absorption mechanism.
Optical gate mirror 2 minute surfaces are parabolic, and laser is through the parabolic focus reflection of the total reflection of optical gate mirror 2, and circular light spot is focused into the line style hot spot, and focus is positioned at the obround opening place of antireflection plate 15.Laser becomes the inwall that is incident to absorber core 16 of divergent shape by the obround opening of antireflection plate 15.Because the restriction of absorber core 16 dispersion angles, under the situation that does not strengthen absorber core 16 length, most laser can arrive the bottom of absorber core 16, therefore taper is processed in the bottom of absorber core 16, promptly strengthened the absorption area of absorber core 16 bottoms under the equal length, also can carry out the more spread reflection of wide-angle, so that the absorption again at absorber core 16 other positions of inwall to unabsorbed laser.This structure has promptly guaranteed the maximization that absorption area utilizes, and has also guaranteed to have only the light of minute quantity to spill into the absorber core by antireflection plate 15 long and narrow obround openings again.The outer surface of antireflection plate 15 and absorber core 16 has improved the absorptivity to light to greatest extent through the blackout chemical treatment simultaneously, has reduced the reflection of light rate.Guaranteed the high efficiency of energy absorption.
Be separately installed with optical gate mirror temperature switch 21 and absorb case temperature switch 13 on optical gate mirror 2 and the absorption housing 17, the water inlet of described cooling-water duct is provided with platinum resistance type temperature sensor 14, this temperature sensor 14 monitor temperature data that are connected with described PLC controller.This design can better monitor the temperature regime of each several part, thereby guarantees the stable operation of energy absorption mechanism.

Claims (10)

1. the mechanical optical gate of a superpower laser comprises the guiding mechanism, feed mechanism and the energy absorption mechanism that set gradually up and down, it is characterized in that:
Described guiding mechanism comprises the optical gate box, and semiconductor ruddiness generator is installed above the optical gate box, and optical gate box below is provided with the optical gate mirror, and the optical gate mirror is positioned under the semiconductor ruddiness generator center, which is provided with the red mirror with horizontal plane angle at 45;
Described feed mechanism comprises straight line cylinder and line slideway, and described straight line cylinder drives the optical gate mirror and moves along line slideway;
Described energy absorption mechanism is positioned at optical gate mirror below, comprises the antireflection plate, absorbs housing and absorbs the interior absorber core of housing, and described antireflection plate is provided with and the corresponding obround opening in semiconductor ruddiness generator center.
2. the mechanical optical gate of superpower laser according to claim 1 is characterized in that: be separately installed with rubber buffer head on the shell of described optical gate box and the optical gate contiguous block, the cylinder rod end of described straight line cylinder is equipped with buffering O type circle.
3. the mechanical optical gate of superpower laser according to claim 1, it is characterized in that: the junction of described semiconductor laser installing plate and semiconductor laser folder is provided with locating ring Primary Location relative position relation between the two, is equipped with on the described semiconductor laser folder and adjusts the ruddiness adjustment screw of ruddiness generator at X, Y, Z direction top offset respectively.
4. the mechanical optical gate of superpower laser according to claim 1, it is characterized in that: a side of described semiconductor laser installing plate and semiconductor laser folder is provided with spring tensioning means, this spring tensioning means comprises spring, steady pin and setting-up piece, described steady pin is fixedlyed connected with the semiconductor laser mounting panel, described setting-up piece is installed in the semiconductor laser folder and goes up in the hole groove that is provided with, one end of spring is fixedly connected on the setting-up piece, and the other end is fixed on the steady pin.
5. the mechanical optical gate of superpower laser according to claim 1, it is characterized in that: described straight line cylinder and line slideway are installed on the cylinder block, the location is installed near switch on the described straight line cylinder, the top of described optical gate mirror moving line is equipped with the location near switch.
6. the mechanical optical gate of superpower laser according to claim 1 or 5, it is characterized in that: be provided with the PLC controller in the described feed mechanism, the input of PLC controller connects the location near switch, output connects straight line cylinder, and two choke valves of regulating the size of actuating force are installed on the described straight line cylinder.
7. the mechanical optical gate of superpower laser according to claim 1 is characterized in that: described optical gate mirror minute surface is for parabolic.
8. the mechanical optical gate of superpower laser according to claim 1, it is characterized in that: the red copper system body that described absorber core is a hollow, its outer wall are helical form, its inwall bottom is taper.
9. the mechanical optical gate of superpower laser according to claim 1 is characterized in that: the outer surface process blackout chemical treatment of described antireflection plate and absorber core.
10. the mechanical optical gate of superpower laser according to claim 1, it is characterized in that: the inwall of the outer wall of described absorber core and absorption housing constitutes cooling-water duct, absorb the water inlet that lower part of frame is provided with cooling-water duct, the top that absorbs housing is provided with the delivery port of cooling-water duct, and described water inlet goes out also to be provided with the water wheels flowmeter that is used to monitor cooling water flow.
CN2011100651437A 2011-03-17 2011-03-17 Mechanical optical gate of superpower laser Expired - Fee Related CN102157900B (en)

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CN102157900B CN102157900B (en) 2012-11-21

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102510006A (en) * 2011-11-21 2012-06-20 中国科学院半导体研究所 Optical shutter device for high-power laser
CN109861063A (en) * 2019-04-09 2019-06-07 武汉锐科光纤激光技术股份有限公司 A kind of laser strike-machine device
CN110497083A (en) * 2019-09-10 2019-11-26 深圳市鸿合激光科技有限公司 A kind of laser process equipment

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Publication number Priority date Publication date Assignee Title
EP0899595A2 (en) * 1997-07-05 1999-03-03 Lumonics Ltd. Method and apparatus for actuating a shutter
CN201348677Y (en) * 2009-01-16 2009-11-18 北京工业大学 Optical gate of fast response laser capable of bearing high power
CN201359657Y (en) * 2009-03-04 2009-12-09 南京通快激光设备有限公司 Mechanical optical shutter of high-power carbon dioxide laser
CN201387509Y (en) * 2009-03-30 2010-01-20 深圳市大族激光科技股份有限公司 Laser optical shutter retaining device
CN201625838U (en) * 2009-12-09 2010-11-10 深圳市大族激光科技股份有限公司 Laser mechanical optical gate and absorber thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0899595A2 (en) * 1997-07-05 1999-03-03 Lumonics Ltd. Method and apparatus for actuating a shutter
CN201348677Y (en) * 2009-01-16 2009-11-18 北京工业大学 Optical gate of fast response laser capable of bearing high power
CN201359657Y (en) * 2009-03-04 2009-12-09 南京通快激光设备有限公司 Mechanical optical shutter of high-power carbon dioxide laser
CN201387509Y (en) * 2009-03-30 2010-01-20 深圳市大族激光科技股份有限公司 Laser optical shutter retaining device
CN201625838U (en) * 2009-12-09 2010-11-10 深圳市大族激光科技股份有限公司 Laser mechanical optical gate and absorber thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102510006A (en) * 2011-11-21 2012-06-20 中国科学院半导体研究所 Optical shutter device for high-power laser
CN102510006B (en) * 2011-11-21 2013-01-23 中国科学院半导体研究所 Optical shutter device for high-power laser
CN109861063A (en) * 2019-04-09 2019-06-07 武汉锐科光纤激光技术股份有限公司 A kind of laser strike-machine device
CN109861063B (en) * 2019-04-09 2024-02-13 武汉锐科光纤激光技术股份有限公司 Laser copying device
CN110497083A (en) * 2019-09-10 2019-11-26 深圳市鸿合激光科技有限公司 A kind of laser process equipment

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