CN102148278A - Light trapping structure of high-efficiency solar battery and manufacturing method thereof - Google Patents
Light trapping structure of high-efficiency solar battery and manufacturing method thereof Download PDFInfo
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- CN102148278A CN102148278A CN2011100664352A CN201110066435A CN102148278A CN 102148278 A CN102148278 A CN 102148278A CN 2011100664352 A CN2011100664352 A CN 2011100664352A CN 201110066435 A CN201110066435 A CN 201110066435A CN 102148278 A CN102148278 A CN 102148278A
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Abstract
The invention discloses a light trapping structure of a high-efficiency solar battery and a manufacturing method thereof. The structure comprises a solar battery diffuser film, wherein a plurality of cylindrical two-dimensional photonic crystals are arranged on the solar battery diffuser film; the solar battery diffuser film is divided into a plurality of microcells through the cylindrical two-dimensional photonic crystals; buried gate electrodes are arranged on the edges near the microcells on the solar battery diffuser film, and interconnection among internal electrodes is realized through the buried gate electrodes; micro permeable mirrors are arranged on the divided microcells; the micro permeable mirrors form an array structure; a one-dimensional photonic crystal omnidirectional reflecting mirror is arranged on the back side of the solar battery diffuser film; and each micro permeable mirror is provided with a reflection film. By the structure and the method, the photoelectric conversion efficiency of an incidence light field inside a battery can be improved, an effective light trapping effect is achieved, the light field and excited photo-generated carriers are effectively controlled and managed at the same time, and an extremely favorable condition is provided for sufficient utilization of the incidence light field and efficient collection of the photo-generated carriers, so that the photoelectric conversion efficiency of the battery can be maximized.
Description
Technical field
The present invention relates to a kind of high performance solar batteries light trapping structure and preparation method thereof.
Background technology
Solar cell is the main form that solar energy utilizes, and has characteristics such as reserves are abundant, cleaning, broad covered area because of solar energy, so solar cell also is considered to the new forms of energy form of tool potentiality.At present, developed the solar cell of various ways, and part industrialization, but majority still is in the laboratory development stage.Research direction from present various solar cells, photoelectric conversion efficiency is still the major issue that this field is paid close attention to the most, because it is the principal element of decision battery cost, be the key parameter of vying each other between all kinds of batteries, so all be one of most important research contents of solar cell all the time.
At present, people have proposed the photoelectric conversion efficiency that multiple effective ways improve battery, as stacked heterojunction structure, and quantum-dot structure, Wavelength transformational structure and light trapping structure etc.
Wherein light trapping structure can be divided into following a few class:
1, upper surface texturing design.Usually adopt " V-type groove ", " inverted pyramid " or " pyramid " structure, the light that these structures can be come the lower surface reflection, again reflected back inside battery is developed the dark final result portion back of the body field battery of the back side point contact battery of emitter junction passivation battery, Stanford University and Germany Fraunho Application Research Society for Advancement (Fraunhofer) solar energy research institute etc. as University of New South Wales (UNSW).The battery upper surface being carried out the pattern structure, strengthen and fall into light effect, almost is one of basic structure of all high-efficiency batteries.Based on cost consideration, the upper surface light trapping structure of matured product employing at present forms " pyramid " structure through chemical corrosion.
2, lower surface catoptric arrangement design.Lower surface often adopts metal film speculum or other material to constitute be all-trans membrane structure, " inverted pyramid " structure, optical grating construction etc., and reveal the bottom surface that reduces light.The back side point of developing emitter junction passivation battery and Stanford University as UNSW contacts battery, all adopts the aluminium film as speculum; Shanghai University of Science and Technology in 2010 has reported at lower surface and has adopted optical grating construction to fall into the experimental result etc. of light.In the catoptric arrangement of these lower surfaces, relatively more commonly used is the total reflection film structure that metal or other material constitute.
The effect of above-mentioned light trapping structure is: by the control of light path, prolonged the reaction time of light and light absorbent.But light trapping structure itself does not have the management role of light field and photo-generated carrier, so can not reach optimum sunken light effect.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of high performance solar batteries light trapping structure that improves the photoelectric conversion efficiency that incides the inside battery light field and preparation method thereof, this structure has not only played the effect that effectively falls into light, and light field and the photo-generated carrier that excites thereof effective control and management have been carried out simultaneously, provide very advantageous conditions for making full use of incident field and efficiently collecting photo-generated carrier, thereby can make the photoelectric conversion efficiency maximization of battery.
Technical solution of the present invention is:
A kind of high performance solar batteries light trapping structure, comprise solar cell diffusion sheet 3, its special character is the 2 D photon crystal 4 that is provided with a plurality of cylindricalitys on solar cell diffusion sheet 3,2 D photon crystal 4 by cylindricality is divided a plurality of microcells 301 on solar cell diffusion sheet 3, establish buried gate electrode and realize interconnected between internal electrode in the edge of corresponding microcell 301 on the solar cell diffusion sheet 3 by buried gate electrode, on the microcell of dividing 301, be provided with miniature pellicle mirror 6, described miniature pellicle mirror 6 forms array structure, be provided with 1-D photon crystal omnidirectional reflection 1 at solar cell diffusion sheet 3 back sides, on miniature pellicle mirror 6, establish anti-reflection film.
Above-mentioned miniature pellicle mirror 6 is a single or multiple lift.
Above-mentioned microcell 301 diameters are 1～2 times of minority diffusion length in the solar cell diffusion sheet 3.
Above-mentioned miniature pellicle mirror 6 diameters are 1～1.5 times of microcell 301 diameters.
Above-mentioned microcell 301 diameters are 100mm～500mm.
Above-mentioned miniature pellicle mirror 6 is triangular crystal lattice or tetragonal is arranged.
A kind of preparation method of high performance solar batteries light trapping structure, its special character is that step is as follows:
1) chip is prepared, and gets the solar cell diffusion sheet, carries out the technological parameter test;
2) carry out the making of annular 2 D photon crystal on the solar cell diffusion sheet, the complete band gap by 2 D photon crystal forms the 2 D photon crystal total reflective mirror, and the solar cell diffusion sheet is divided into a plurality of microcells;
3) on the solar cell diffusion sheet, make buried gate electrode;
4) make the 1-D photon crystal omnidirectional reflector at the solar cell diffusion sheet back side;
5) at the miniature pellicle mirror of the positive making of solar cell diffusion sheet;
6) on miniature pellicle mirror, make anti-reflection film.
Above-mentioned miniature pellicle mirror is a single or multiple lift.
Above-mentioned site diameter is 1～2 times of minority diffusion length in the solar cell diffusion sheet, and described miniature pellicle mirror diameter is 1～1.5 times of site diameter.
Above-mentioned site diameter is 100mm～500mm.
The present invention mainly adopts conventional semiconductor technology and micro-optical device processing technology, realizes the preparation of solar cell light trapping structure as photoetching, ion beam etching and thin film deposition processes.This structure has following beneficial effect:
1, vertically light is managed and fallen into to light field
Adopt miniature pellicle mirror array and 1-D photon crystal omnidirectional reflector to realize the management and the sunken light of light field.At first, utilize the optically focused character of the miniature pellicle mirror array in battery top, realize the subregion and the focusing of incident field.Then, the light field after the focusing arrives battery bottom through PN junction, by 1-D photon crystal omnidirectional reflection reflected back inside battery.At last, after the light field of reflected back inside battery propagates into the battery top, through miniature pellicle mirror reflected back inside battery again.This vertical reflex mechanism has just constituted vertical light trapping structure.Adopt the 1-D photon crystal omnidirectional reflector to substitute metallic film speculum commonly used, can effectively reduce the reflection loss of bottom surface.Above miniature pellicle mirror, still adopt the anti-reflection film structure to strengthen the introducing of incident field; Miniature pellicle mirror is very little to the influence of the incident field at top, but can play good reflex to the reflection light field of bottom surface.
2, laterally the light measure is managed and fallen into to light field
Light field through behind the miniature pellicle mirror optically focused in the process that propagate the bottom surface, when propagating into the microcell edge, the reflection that is subjected to the 2 D photon crystal total reflective mirror can come back to microcell inside.The microcell edge adopts the 2 D photon crystal of medium cylindricality formula, finishes by its band gap that effect forms horizontal light trapping structure to reflection of light.
3, the optically focused effect of miniature pellicle mirror is for to have created condition at the low or unglazed subregion extraction electrode of photon density.Compare with drawing the electrode mode usually, this has increased light receiving area with regard to equivalence.Because electrode retaining collar is around the microcell edge, electrode is to collect nearby near the bigger zone of photoproduction carrier concentration, the initial position of photo-generated carrier is near the diffusion length of electrode, thereby reduced the recombination losses that charge carrier produces when electrode movement, improved the quantum efficiency in the cell body.
Realized the purpose of three-dimensional sunken light fully by above measure, and the partition management by light field,, and improved the quantum efficiency in the cell body for effective management photo-generated carrier has been created advantage.This structure has not only played the effect that effectively falls into light, and light field and the photo-generated carrier that excites thereof effectively controlled simultaneously and manage, provide very advantageous conditions for making full use of incident field and efficiently collecting photo-generated carrier, thereby can make the photoelectric conversion efficiency maximization of battery.After testing, utilize this light trapping structure can make efficiency of solar cell improve 3 ~ 5% at least, cost reduces by 15 ~ 30%.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the vertical view of Fig. 1 (removing anti-reflection film and miniature pellicle mirror);
Fig. 3 is the structural representation of miniature pellicle mirror (individual layer) among Fig. 1;
Fig. 4 is the structural representation of miniature pellicle mirror (two-layer) among Fig. 1;
Fig. 5 is the upward view of miniature pellicle mirror among Fig. 1 (triangular crystal lattice array);
Fig. 6 is the upward view of miniature pellicle mirror among Fig. 1 (tetragonal array).
Embodiment
Embodiment 1
As Fig. 1, Fig. 2, Fig. 3 and shown in Figure 5, this high performance solar batteries light trapping structure, comprise solar cell diffusion sheet 3, on solar cell diffusion sheet 3, establish annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, microcell 301 diameters are 1 times of solar cell diffusion sheet 3 minority diffusion lengths, microcell 301 diameters are 100mm in this example, a plurality of microcells 301 are the triangular crystal lattice array format, be provided with buried gate electrode (being top electrode 5 and bottom electrode 2) and realize interconnected between internal electrodes in the edge of the corresponding microcell 301 of substrate 3 front and backs by top electrode 5 and bottom electrode 2, on the microcell of dividing 301, be provided with the miniature pellicle mirror 6 of individual layer, the diameter of described miniature pellicle mirror 6 is 1 times of microcell 301 diameters, described miniature pellicle mirror forms the triangular crystal lattice array structure, establish 1-D photon crystal omnidirectional reflection 1 at substrate 4 back sides, on miniature pellicle mirror 6, establish anti-reflection film 7.
The preparation method of above-mentioned high performance solar batteries light trapping structure, its step is as follows:
1) chip is prepared, and gets solar cell diffusion sheet 3, carries out the technological parameter test.
2) on solar cell diffusion sheet 3, utilize uv excimer laser punching technology to adopt the form of medium post to carry out the making of annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, a plurality of microcells 301 are the triangular crystal lattice array format, described site diameter is 1 times of solar cell diffusion sheet 3 minority diffusion lengths, and microcell 301 diameters are 100mm in this example.
3) corresponding microcell edge makes buried gate electrode, i.e. top electrode 5 and bottom electrode 2 on solar cell diffusion sheet 3; Realize between internal electrode interconnected by top electrode 5 and bottom electrode 2.
4) adopt membrane deposition method to utilize MgF2(also can adopt SiO2, Al2O3, Si3N4, Ta2O5, ZnS, SiOx or TiO2) at solar cell diffusion sheet 3 back sides making 1-D photon crystal omnidirectional reflector 1.
5) adopt planar technique ion method (also can adopt exchange process, photosensitive glass method, holography method, Fresnel zone lens method, sol-gel process, photoresist fusion method, reactive ion etching method, electron beam lithography or laser ablation method) at the solar cell diffusion sheet 3 positive miniature pellicle mirrors 6 of individual layer of making, the diameter of miniature pellicle mirror 6 is 1 times of site diameter.
6) adopt MgF2(also can adopt SiO2 or Si3N4) making anti-reflection film 7 on miniature pellicle mirror.
As Fig. 1, Fig. 2, Fig. 3 and shown in Figure 5, this high performance solar batteries light trapping structure, comprise solar cell diffusion sheet 3, on solar cell diffusion sheet 3, establish annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, a plurality of microcells 301 are the triangular crystal lattice array format, microcell 301 diameters are 2 times of solar cell diffusion sheet 3 minority diffusion lengths, microcell 301 diameters are 500mm in this example, be provided with buried gate electrode (being top electrode 5 and bottom electrode 2) and realize interconnected between internal electrodes in the edge of the corresponding microcell 301 of substrate 3 front and backs by top electrode 5 and bottom electrode 2, on the microcell of dividing 301, be provided with the miniature pellicle mirror 6 of individual layer, the diameter of described miniature pellicle mirror 6 is 1.5 times of microcell 301 diameters, described miniature pellicle mirror forms the triangular crystal lattice array structure, establish 1-D photon crystal omnidirectional reflection 1 at substrate 4 back sides, on miniature pellicle mirror 6, establish anti-reflection film 7.
The preparation method of above-mentioned high performance solar batteries light trapping structure, its step is as follows:
1) chip is prepared, and gets solar cell diffusion sheet 3, carries out the technological parameter test.
2) on solar cell diffusion sheet 3, utilize uv excimer laser punching technology to adopt the form of medium post to carry out the making of annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, a plurality of microcells 301 are the triangular crystal lattice array format, described site diameter is 2 times of solar cell diffusion sheet 3 minority diffusion lengths, and microcell 301 diameters are 500mm in this example.
3) corresponding microcell edge makes buried gate electrode, i.e. top electrode 5 and bottom electrode 2 on solar cell diffusion sheet 3; Realize between internal electrode interconnected by top electrode 5 and bottom electrode 2.
4) adopt membrane deposition method to utilize MgF2(also can adopt SiO2, Al2O3, Si3N4, Ta2O5, ZnS, SiOx or TiO2) at solar cell diffusion sheet 3 back sides making 1-D photon crystal omnidirectional reflector 1.
5) adopt planar technique ion method (also can adopt exchange process, photosensitive glass method, holography method, Fresnel zone lens method, sol-gel process, photoresist fusion method, reactive ion etching method, electron beam lithography or laser ablation method) at the solar cell diffusion sheet 3 positive miniature pellicle mirrors 6 of individual layer of making, the diameter of miniature pellicle mirror 6 is 1.5 times of site diameter.
6) adopt MgF2(also can adopt SiO2 or Si3N4) making anti-reflection film 7 on miniature pellicle mirror.
Embodiment 3
As Fig. 1, Fig. 2, Fig. 3 and shown in Figure 5, this high performance solar batteries light trapping structure, comprise solar cell diffusion sheet 3, on solar cell diffusion sheet 3, establish annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, a plurality of microcells 301 are the triangular crystal lattice array format, microcell 301 diameters are 1.5 times of solar cell diffusion sheet 3 minority diffusion lengths, microcell 301 diameters are 300mm in this example, be provided with buried gate electrode (being top electrode 5 and bottom electrode 2) and realize interconnected between internal electrodes in the edge of the corresponding microcell 301 of substrate 3 front and backs by top electrode 5 and bottom electrode 2, on the microcell of dividing 301, be provided with the miniature pellicle mirror 6 of individual layer, the diameter of described miniature pellicle mirror 6 is 1.2 times of microcell 301 diameters, described miniature pellicle mirror forms the triangular crystal lattice array structure, establish 1-D photon crystal omnidirectional reflection 1 at substrate 4 back sides, on miniature pellicle mirror 6, establish anti-reflection film 7.
The preparation method of above-mentioned high performance solar batteries light trapping structure, its step is as follows:
1) chip is prepared, and gets solar cell diffusion sheet 3, carries out the technological parameter test.
2) on solar cell diffusion sheet 3, utilize uv excimer laser punching technology to adopt the form of medium post to carry out the making of annular 2 D photon crystal 4, form the 2 D photon crystal total reflective mirror by the 2 D photon crystal complete band gap, utilize the 2 D photon crystal total reflective mirror on solar cell diffusion sheet 3, to divide a plurality of microcells 301, a plurality of microcells 301 are the triangular crystal lattice array format, described site diameter is 1.5 times of solar cell diffusion sheet 3 minority diffusion lengths, and microcell 301 diameters are 300mm in this example.
3) corresponding microcell edge makes buried gate electrode, i.e. top electrode 5 and bottom electrode 2 on solar cell diffusion sheet 3; Realize between internal electrode interconnected by top electrode 5 and bottom electrode 2.
4) adopt membrane deposition method to utilize MgF2(also can adopt SiO2, Al2O3, Si3N4, Ta2O5, ZnS, SiOx or TiO2) at solar cell diffusion sheet 3 back sides making 1-D photon crystal omnidirectional reflector 1.
5) adopt planar technique ion method (also can adopt exchange process, photosensitive glass method, holography method, Fresnel zone lens method, sol-gel process, photoresist fusion method, reactive ion etching method, electron beam lithography or laser ablation method) at the solar cell diffusion sheet 3 positive miniature pellicle mirrors 6 of individual layer of making, the diameter of miniature pellicle mirror 6 is 1.2 times of site diameter.
6) adopt MgF2(also can adopt SiO2 or Si3N4) making anti-reflection film 7 on miniature pellicle mirror.
Embodiment 4
As Fig. 4, shown in Figure 6, described miniature pellicle mirror 6 is double-deck, and a plurality of microcells 301 are square lattice array form, and other is with embodiment 1～embodiment 3.
Claims (10)
1. high performance solar batteries light trapping structure, comprise solar cell diffusion sheet (3), it is characterized in that on solar cell diffusion sheet (3), being provided with the 2 D photon crystal (4) of a plurality of cylindricalitys, 2 D photon crystal (4) by cylindricality is gone up division a plurality of microcells (301) at solar cell diffusion sheet (3), establish buried gate electrode and realize interconnected between internal electrode in the edge that solar cell diffusion sheet (3) is gone up corresponding microcell (301) by buried gate electrode, on the microcell of dividing (301), be provided with miniature pellicle mirror (6), described miniature pellicle mirror (6) forms array structure, be provided with 1-D photon crystal omnidirectional reflection (1) at solar cell diffusion sheet (3) back side, on miniature pellicle mirror (6), establish anti-reflection film.
2. high performance solar batteries light trapping structure according to claim 1 is characterized in that described miniature pellicle mirror (6) is a single or multiple lift.
3. high performance solar batteries light trapping structure according to claim 1 is characterized in that described microcell (301) diameter is 1～2 times of the middle minority diffusion length of solar cell diffusion sheet (3).
4. high performance solar batteries light trapping structure according to claim 1 is characterized in that described miniature pellicle mirror (6) diameter is 1～1.5 times of microcell (301) diameter.
5. according to claim 1 or 3 or 4 described high performance solar batteries light trapping structures, it is characterized in that described microcell (301) diameter is 100mm～500mm.
6. high performance solar batteries light trapping structure according to claim 1 is characterized in that described miniature pellicle mirror (6) is triangular crystal lattice or tetragonal is arranged.
7. the preparation method of a high performance solar batteries light trapping structure is characterized in that step is as follows:
(1) chip is prepared, and gets the solar cell diffusion sheet, carries out the technological parameter test;
(2) carry out the making of annular 2 D photon crystal on the solar cell diffusion sheet, the complete band gap by 2 D photon crystal forms the 2 D photon crystal total reflective mirror, and the solar cell diffusion sheet is divided into a plurality of microcells;
(3) on the solar cell diffusion sheet, make buried gate electrode;
(4) make the 1-D photon crystal omnidirectional reflector at the solar cell diffusion sheet back side;
(5) at the miniature pellicle mirror of the positive making of solar cell diffusion sheet;
(6) on miniature pellicle mirror, make anti-reflection film.
8. the preparation method of high performance solar batteries light trapping structure according to claim 7 is characterized in that described miniature pellicle mirror is a single or multiple lift.
9. the preparation method of high performance solar batteries light trapping structure according to claim 7 is characterized in that described site diameter is 1～2 times of minority diffusion length in the solar cell diffusion sheet 3, and described miniature pellicle mirror 6 diameters are 1～1.5 times of site diameter.
10. according to the preparation method of claim 7 or 9 described high performance solar batteries light trapping structures, it is characterized in that described site diameter is 100mm～500mm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102709345A (en) * | 2012-05-19 | 2012-10-03 | 渤海大学 | Superfine crystal silicon battery structure |
| CN112904545A (en) * | 2021-01-14 | 2021-06-04 | 合肥工业大学 | Secondary condenser based on one-dimensional photonic crystal omnidirectional reflector |
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| CN101552322A (en) * | 2009-04-30 | 2009-10-07 | 苏州大学 | Solar cell with zinc oxide based organic/inorganic hybrid nanostructure |
| US20100326513A1 (en) * | 2009-06-29 | 2010-12-30 | Samsung Sdi Co., Ltd. | Inverse opal structure having dual porosity, method of manufacturing the same, dye-sensitized solar cell, and method of manufacturing the dye-sensitized solar cell |
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| CN101515607A (en) * | 2009-03-27 | 2009-08-26 | 苏州大学 | Solar cell of III-V nitride-based organic/inorganic hybrid nanostructure |
| CN101552322A (en) * | 2009-04-30 | 2009-10-07 | 苏州大学 | Solar cell with zinc oxide based organic/inorganic hybrid nanostructure |
| US20100326513A1 (en) * | 2009-06-29 | 2010-12-30 | Samsung Sdi Co., Ltd. | Inverse opal structure having dual porosity, method of manufacturing the same, dye-sensitized solar cell, and method of manufacturing the dye-sensitized solar cell |
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| CN102709345A (en) * | 2012-05-19 | 2012-10-03 | 渤海大学 | Superfine crystal silicon battery structure |
| CN102709345B (en) * | 2012-05-19 | 2014-07-02 | 渤海大学 | Superfine crystal silicon battery structure |
| CN112904545A (en) * | 2021-01-14 | 2021-06-04 | 合肥工业大学 | Secondary condenser based on one-dimensional photonic crystal omnidirectional reflector |
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Inventor after: Lu Xiaodong Inventor after: Lun Shuxian Inventor after: Guo Yandong Inventor after: Yu Zhongdang Inventor after: Wang Wei Inventor after: Guo Zhaozheng Inventor after: Chi Feng Inventor before: Lu Xiaodong Inventor before: Lun Shuxian Inventor before: Yu Zhongdang Inventor before: Wang Wei Inventor before: Chi Feng |
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Free format text: CORRECT: INVENTOR; FROM: LU XIAODONG LUN SHUXIAN YU ZHONGDANG WANG WEI CHI FENG TO: LU XIAODONG LUNSHUXIAN GUO YANDONG YU ZHONGDANG WANG WEI GUO ZHAOZHENG CHI FENG |
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Granted publication date: 20120627 Termination date: 20130319 |