CN102142391B - Crystal taking manipulator of solid crystal processing machine - Google Patents
Crystal taking manipulator of solid crystal processing machine Download PDFInfo
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- CN102142391B CN102142391B CN 201010605314 CN201010605314A CN102142391B CN 102142391 B CN102142391 B CN 102142391B CN 201010605314 CN201010605314 CN 201010605314 CN 201010605314 A CN201010605314 A CN 201010605314A CN 102142391 B CN102142391 B CN 102142391B
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- brilliant
- flow sensor
- signal
- comparator
- manipulator
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- 238000012545 processing Methods 0.000 title claims abstract description 27
- 239000007787 solid Substances 0.000 title claims abstract description 26
- 239000013078 crystal Substances 0.000 title abstract 10
- 239000000126 substance Substances 0.000 claims description 19
- 238000004891 communication Methods 0.000 claims description 9
- 230000033001 locomotion Effects 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 26
- 238000012360 testing method Methods 0.000 description 4
- 241000486406 Trachea Species 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 210000003437 trachea Anatomy 0.000 description 2
- 241001385887 Tachys Species 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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Abstract
The invention provides a crystal taking manipulator of a solid crystal processing machine, which comprises an oscillating arm, a suction nozzle, a vacuum air source, a flow sensor, an air pipe and a signal processing device, wherein the suction nozzle is fixed on a free end of the oscillating arm; the flow sensor is communicated between the suction nozzle and the vacuum source; the air pipe is used for communicating the suction nozzle, the flow sensor and the vacuum air source; the flow sensor is used for detecting the quantity of airflow in the air pipe, and outputs an electrical signal; and the signal processing device is used for carrying out comparison processing on the electrical signal output by the flow sensor and then outputting a signal for judging whether crystal leakage exists. When the crystal taking manipulator of the solid crystal processing machine is adopted, the air flow in the air pipe can be detected through the flow sensor so as to know whether a wafer is adsorbed on the suction nozzle; and the detection process is not influenced by the interference of external light during the detection process, so that the crystal taking manipulator of the solid crystal processing machine has higher accuracy for the detection of crystal leakage.
Description
[technical field]
The present invention relates to a kind of solid brilliant equipment, particularly relate to a kind of brilliant manipulator of getting of solid brilliant machine.
[background technology]
The solid brilliant equipment capacity of LED (SMD) requires improving constantly.Height is tachy steroled in the brilliant machine course of work, Gu after the getting brilliant manipulator suction nozzle and grasp wafer of brilliant machine, move to solid brilliant position through the high speed swing arm.Because curved track is moved in the swing arm of getting brilliant manipulator, this moment is if air pressure adjustment is incorrect, cause the suction nozzle vacuum adsorption force not enough or when grabbing crystalline substance the position skew is arranged, be thrown out of before will causing the solid brilliant position of wafer no show.If do not have to detect to judge whether wafer also exists Gu brilliant process continues to accomplish, then form and leak solid some this moment.Whether to leak crystalline substance in order detecting, to get brilliant manipulator and adopt infrared detecting device to judge whether the wafer of suction nozzle also exists usually.Yet infra-red ray detection device is disturbed by extraneous infrared light easily and causes testing result to lose efficacy, and when the wafer transparency was higher, weak output signal also was difficult for differentiating.Therefore, the above-mentioned brilliant accuracy of brilliant manipulator detection leakage of getting is lower.
[summary of the invention]
In view of above-mentioned condition, be necessary to provide a kind of precision that detects crystalline substance with Louing higher get brilliant manipulator.
A kind of brilliant manipulator of getting of consolidating brilliant machine; It comprises swing arm, suction nozzle, vacuum source, flow sensor, tracheae and signal processing apparatus; Suction nozzle is fixed on the free end of this swing arm; Flow sensor is communicated between suction nozzle and the vacuum source; Tracheae is used to be communicated with suction nozzle, flow sensor and vacuum source, and flow sensor is used to detect endotracheal throughput and exports the signal of telecommunication, and the signal of telecommunication that signal processing apparatus is used for flow sensor output compares the judgement the signal whether output of processing back leaks crystalline substance.
Further; This signal processing apparatus comprises first comparator and second comparator that is connected with this flow sensor communication; Whether the signal of telecommunication of this flow sensor output relatively obtains this suction nozzle and touches with wafer and judge signal completely in the back through this first comparator, the signal of telecommunication of this flow sensor output through this second comparator relatively after acquisition whether leak the judgement signal of crystalline substance.
Further; This signal processing apparatus comprises first comparator and second comparator that is connected with this flow sensor communication; Whether the signal of telecommunication of this flow sensor output relatively obtains this suction nozzle and touches with wafer and judge signal completely in the back through this first comparator, the signal of telecommunication of this flow sensor output through this second comparator relatively after acquisition whether leak the judgement signal of crystalline substance.
Further, this signal processing apparatus also comprises first potentiometer that is electrically connected with this first comparator, and this first potentiometer is used to regulate the signal of telecommunication comparison value of this first comparator.
Further, this signal processing apparatus also comprises second potentiometer that is electrically connected with this second comparator, and this second potentiometer is used to regulate the signal of telecommunication comparison value of this second comparator.
Further, this signal processing apparatus also comprises the output that is connected with this first comparator and the second comparator communication.
Further, the brilliant manipulator of getting of this solid brilliant machine also comprises the air valve that is communicated between this suction nozzle and this flow sensor, and this air valve is used for cutting off the air-flow of this tracheae.
Further, the brilliant manipulator of getting of this solid brilliant machine also comprises the filter that is communicated between air valve and this flow sensor, and this filter is used for the impurity of filtered airflow.
Further, the brilliant manipulator of getting of this solid brilliant machine also comprises the cylinder that is communicated between this flow sensor and this vacuum source and is used to provide air-breathing power.
Further, the brilliant manipulator of getting of this solid brilliant machine also comprises the swing arm motor that is used to drive this swing arm rotation.
The getting brilliant manipulator and can detect endotracheal gas flow of above-mentioned solid brilliant machine through flow sensor; Thereby learn whether suction nozzle is adsorbed with wafer; Do not receive ambient light in the testing process and disturb, therefore, the accuracy of getting brilliant manipulator detection leakage crystalline substance of above-mentioned solid brilliant machine is higher.
[description of drawings]
Fig. 1 is the floor map of getting brilliant manipulator of the solid brilliant machine of embodiment one;
Fig. 2 is a partial perspective view of getting brilliant manipulator shown in Figure 1;
Fig. 3 is the view that brilliant manipulator is got crystalline substance of getting shown in Figure 1;
Fig. 4 is a control signal sequential chart of getting brilliant manipulator shown in Figure 1;
Fig. 5 is a schematic diagram of getting the processing module of brilliant manipulator shown in Figure 1.
[embodiment]
Below main accompanying drawings practical implementation of the present invention.
See also Fig. 1 and Fig. 2, the brilliant manipulator 100 of getting of the solid brilliant machine of embodiment one is used for wafer 200 is grabbed solid brilliant workbench 400 from grabbing brilliant workbench 300.Get brilliant manipulator 100 and comprise swing arm 110, mouth 120, tracheae 130, air valve 140, filter 150, flow sensor 160, cylinder 170 and vacuum source 180.Suction nozzle 120 is fixed on the free end of swing arm 110.Tracheae 130 is a plurality of, and it is communicated with suction nozzle 120, air valve 140, filter 150, flow sensor 160, cylinder 170 and vacuum source 180 successively.
See also Fig. 3, get brilliant manipulator 100 and also comprise the drive unit (figure is mark not) that drives swing arm 110 motions, this drive unit comprises swing arm motor (figure is mark not) and control motor (figure is mark not).The swing arm motor is used to drive swing arm 110 and rotates, and the control motor is used to drive swing arm stretching motion about in the of 110.Grab brilliant workbench 300 and comprise wafer central 310, thimble (figure does not show) and thimble motor (figure is mark not).The thimble motor is used to drive thimble and ejects from the center position of the diaphragm lower wafer 200 of wafer central 310.
When getting brilliant manipulator 100 and grasping wafers 200, swing arm motor driven swing arm 110 is being grabbed brilliant workbench 300 and is being consolidated between the brilliant workbench 400 reciprocatingly, and promptly movement locus 5,8.Thimble motor driven thimble ejects from the center position of the ring diaphragm lower wafer 200 of wafer 310, pierces through and wafer 200 is ejected, and promptly movement locus is 1,3.Control motor control swing arm 110 moves both vertically up and down, grabs crystalline substance grabbing brilliant workbench 300 completion, and promptly movement locus 2,4.At last, wafer 200 is placed on the solid crystalline substance of completion on the solid brilliant workbench 400, promptly movement locus 6,7.
See also Fig. 4, when getting brilliant manipulator 100 and detecting wafers 200, reach " preparing solid crystalline substance " two time points " crystalline substance is grabbed in preparation " and read the b signal, the brilliant signal of promptly said leakage, a signal is the control signal of air valve 140.Concrete testing process is following: it is 1 when the generation leakage is brilliant that brilliant signal is leaked in setting, i.e. no wafer 200 on this moment suction nozzle 120; When leaking crystalline substance is 0, and promptly this has wafer 200 on suction nozzle 120 constantly.By the 1 entering stage 2 of stage: the air valve 140 of control suction nozzle 120 vacuum is opened; After doing slightly to postpone, get into " crystalline substance is grabbed in preparation ", read this latter stage in stage and once leak brilliant signal; At this moment: if no wafer 200 on the suction nozzle 120; Flow sensor 160 has detected the air communication mistake, judges that the brilliant signal of this hourglass is 1, and program continues operation; If detect airless and pass through, explain to be stained with wafer 200 on the suction nozzle 120 or suction nozzle 120 is blocked, be judged to be unusually.Run to the stage 5 by the stage 3, read Lou brilliant signal in 5 latter stages of stage for the second time, at this moment: if suction nozzle 120 has been grabbed wafer 200, flow sensor 160 detects airless to be passed through, and judges that leaking brilliant signal is 0, and program continues to move to and begins second round; If detected the air communication mistake, explain crystalline substance take place to leak that judgement is unusual and solid again brilliant in this position.
See also Fig. 5, get brilliant manipulator 100 and also comprise signal processing apparatus 190, after the voltage signal that signal processing apparatus 190 is used for flow sensor 160 output compared processing, whether output leaked brilliant judgement signal.Signal processing apparatus 190 comprises output 191, first comparator 192, second comparator 193, first potentiometer 194 and second potentiometer 195.First comparator 192 and second comparator 193 are connected with flow sensor 160 communications.First potentiometer 194 and second potentiometer 195 are electrically connected with first comparator 192 and second comparator 193 respectively.First potentiometer 194 is used to regulate the voltage comparison value of first comparator 192.Second potentiometer 195 is used to regulate the voltage comparison value of second comparator 193.Output 191 is connected with first comparator 192 and 193 communications of second comparator.In the present embodiment, output 191 is the I/O interface of computer.
Direct voltage output signal behind the gas flow that flow sensor 160 detects in the tracheae 130 can get high-low level after the employing general comparator compares.Wherein, obtain suction nozzle 120 after relatively through first comparator 192 and whether touch with wafer 200 and judge signal completely, through second comparator 193 relatively back acquisition suction nozzle 120 whether leak the judgement signal of crystalline substance.In the practical application, need be according to the actual pressure size of tracheae 130 and big or small manual adjustments first potentiometer 194 and second potentiometer 195 in suction nozzle hole 121, to reach higher effect and sensitivity.
The brilliant manipulator 100 of getting of above-mentioned solid brilliant machine can be through the gas flow in the flow sensor 160 detection tracheaes 130; Thereby learn whether suction nozzle 120 is adsorbed with wafer 200; Do not receive ambient light in the testing process and disturb, therefore, the accuracy of getting brilliant manipulator 100 detection leakage crystalline substances of above-mentioned solid brilliant machine is higher.
After being appreciated that the gas flow in the flow sensor 160 detection tracheaes 130, be not limited to output voltage signal; Also exportable other signal of telecommunication; For example, current signal, simultaneously; The signal of telecommunication of first comparator 192,160 outputs of second comparator, 193 handled flow sensors, the signal of telecommunication comparison value of the corresponding adjusting of first potentiometer 194 and second potentiometer 195 first comparator 192, second comparator 193.
The above embodiment has only expressed several kinds of execution modes of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the present invention's design, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with accompanying claims.
Claims (9)
1. a solid brilliant machine gets brilliant manipulator; It is characterized in that; Comprise swing arm, suction nozzle, vacuum source, flow sensor, tracheae and signal processing apparatus; This suction nozzle is fixed on the free end of this swing arm; This flow sensor is communicated between this suction nozzle and this vacuum source, and this tracheae is used to be communicated with this suction nozzle, flow sensor and vacuum source, and this flow sensor is used for detecting this endotracheal throughput and exporting the signal of telecommunication; This signal processing apparatus is used for the signal of telecommunication of this flow sensor output is compared the judgement the signal whether output of processing back leaks crystalline substance; This signal processing apparatus comprises first comparator and second comparator that is connected with this flow sensor communication, and whether the signal of telecommunication of this flow sensor output relatively obtains this suction nozzle and touch with wafer and judge signal completely in the back through this first comparator, the signal of telecommunication of this flow sensor output through this second comparator relatively after acquisition whether leak the judgement signal of crystalline substance.
2. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that this signal processing apparatus also comprises first potentiometer that is electrically connected with this first comparator, and this first potentiometer is used to regulate the signal of telecommunication comparison value of this first comparator.
3. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that this signal processing apparatus also comprises second potentiometer that is electrically connected with this second comparator, and this second potentiometer is used to regulate the signal of telecommunication comparison value of this second comparator.
4. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that this signal processing apparatus also comprises the output that is connected with this first comparator and the second comparator communication.
5. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that also comprise the air valve that is communicated between this suction nozzle and this flow sensor, this air valve is used for cutting off the air-flow of this tracheae.
6. the brilliant manipulator of getting of consolidating brilliant machine according to claim 5 is characterized in that also comprise the filter that is communicated between air valve and this flow sensor, this filter is used for the impurity of filtered airflow.
7. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that, also comprises the cylinder that is communicated between this flow sensor and this vacuum source and is used to provide air-breathing power.
8. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that, also comprises being used to drive the swing arm motor that this swing arm is rotated.
9. the brilliant manipulator of getting of consolidating brilliant machine according to claim 1 is characterized in that, also comprises the control motor that is used to drive this swing arm stretching motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010605314 CN102142391B (en) | 2010-12-24 | 2010-12-24 | Crystal taking manipulator of solid crystal processing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010605314 CN102142391B (en) | 2010-12-24 | 2010-12-24 | Crystal taking manipulator of solid crystal processing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102142391A CN102142391A (en) | 2011-08-03 |
| CN102142391B true CN102142391B (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201010605314 Expired - Fee Related CN102142391B (en) | 2010-12-24 | 2010-12-24 | Crystal taking manipulator of solid crystal processing machine |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103802098B (en) * | 2012-11-08 | 2015-06-10 | 沈阳新松机器人自动化股份有限公司 | Vacuum adsorption type manipulator |
| CN103151273B (en) * | 2013-03-22 | 2016-08-10 | 江苏艾科瑞思封装自动化设备有限公司 | Diode encapsulation device |
| CN104934355A (en) * | 2015-06-15 | 2015-09-23 | 桂林斯壮微电子有限责任公司 | Crystal-leakage detection device and detection method thereof |
| CN106768991B (en) * | 2017-03-10 | 2020-04-07 | 东莞市凯格精机股份有限公司 | Method for finely detecting working state of suction nozzle |
| CN107403749B (en) * | 2017-08-03 | 2023-04-25 | 宁波知了智能科技有限公司 | Crystal taking device of direct-drive motor |
| US11101163B2 (en) * | 2018-01-30 | 2021-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for automated robotic arm sensing |
| CN109823612A (en) * | 2019-03-27 | 2019-05-31 | 广东蓝碟羽水晶饰品有限公司 | A kind of automatic absorbing counting device of rhinestone |
| CN112234011A (en) * | 2020-09-03 | 2021-01-15 | 北京烁科精微电子装备有限公司 | Position detection device and position detection method |
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| CN1797731A (en) * | 2004-12-22 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Detection equipment for preventing manipulator of delivering / fetching wafers from impacting wafer |
| CN201054346Y (en) * | 2007-06-04 | 2008-04-30 | 大赢数控设备(深圳)有限公司 | A mechanical structure for taking solid crystal for solid crystal processing machine |
| CN101281878A (en) * | 2008-04-30 | 2008-10-08 | 先进光电器材（深圳）有限公司 | Control device for driving crystal-fetching arm of crystal-storing machine |
| CN101393880A (en) * | 2008-10-29 | 2009-03-25 | 南昌慧翔自控科技有限公司 | Method for picture-in-picture observation and automatically wafer quality determination |
| CN101447405A (en) * | 2007-11-30 | 2009-06-03 | 诺发系统有限公司 | Wafer position correction with a dual, side-by-side wafer transfer robot |
| CN201315317Y (en) * | 2008-10-14 | 2009-09-23 | 南昌慧翔自控科技有限公司 | Device for rapidly and exactly positioning die bonder |
| CN101664932A (en) * | 2009-09-23 | 2010-03-10 | 清华大学 | Robot arm |
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2010
- 2010-12-24 CN CN 201010605314 patent/CN102142391B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1797731A (en) * | 2004-12-22 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Detection equipment for preventing manipulator of delivering / fetching wafers from impacting wafer |
| CN201054346Y (en) * | 2007-06-04 | 2008-04-30 | 大赢数控设备(深圳)有限公司 | A mechanical structure for taking solid crystal for solid crystal processing machine |
| CN101447405A (en) * | 2007-11-30 | 2009-06-03 | 诺发系统有限公司 | Wafer position correction with a dual, side-by-side wafer transfer robot |
| CN101281878A (en) * | 2008-04-30 | 2008-10-08 | 先进光电器材（深圳）有限公司 | Control device for driving crystal-fetching arm of crystal-storing machine |
| CN201315317Y (en) * | 2008-10-14 | 2009-09-23 | 南昌慧翔自控科技有限公司 | Device for rapidly and exactly positioning die bonder |
| CN101393880A (en) * | 2008-10-29 | 2009-03-25 | 南昌慧翔自控科技有限公司 | Method for picture-in-picture observation and automatically wafer quality determination |
| CN101664932A (en) * | 2009-09-23 | 2010-03-10 | 清华大学 | Robot arm |
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| CN102142391A (en) | 2011-08-03 |
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| C06 | Publication | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shenzhen Han's Photoelectric Equipment Co., Ltd. Assignor: Shenzhen Han Photoelectric Equipment Co., Ltd.|Shenzhen Han Chinese laser, Polytron Technologies Inc|Shenzhen Han Numerical Control Technology Co., Ltd. Contract record no.: 2012440020094 Denomination of invention: Crystal taking manipulator of solid crystal processing machine License type: Exclusive License Open date: 20110803 Record date: 20120507 |
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| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20110803 Assignee: Shenzhen Han's Photoelectric Equipment Co., Ltd. Assignor: Shenzhen Han Photoelectric Equipment Co., Ltd.|Shenzhen Han Chinese laser, Polytron Technologies Inc|Shenzhen Han Numerical Control Technology Co., Ltd. Contract record no.: 2012440020094 Denomination of invention: Crystal taking manipulator of solid crystal processing machine License type: Exclusive License Record date: 20120507 |
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| CP01 | Change in the name or title of a patent holder |
Address after: 518000 Shenzhen Province, Nanshan District high tech park, North West New Road, No. 9 Patentee after: Shenzhen Han's Photoelectric Equipment Co., Ltd. Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Patentee after: Shenzhen Dazu Digital Control Science & Technology Co., Ltd. Address before: 518000 Shenzhen Province, Nanshan District high tech park, North West New Road, No. 9 Patentee before: Shenzhen Han's Photoelectric Equipment Co., Ltd. Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen Patentee before: Shenzhen Dazu Digital Control Science & Technology Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20181224 |