CN102141734A - Gravity compensator and micropositioner adopting same - Google Patents
Gravity compensator and micropositioner adopting same Download PDFInfo
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- CN102141734A CN102141734A CN 201010102422 CN201010102422A CN102141734A CN 102141734 A CN102141734 A CN 102141734A CN 201010102422 CN201010102422 CN 201010102422 CN 201010102422 A CN201010102422 A CN 201010102422A CN 102141734 A CN102141734 A CN 102141734A
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Abstract
The invention relates to a gravity compensator which is used for carrying out vertical gravity compensation to a supported object. The gravity compensator comprises a connecting mechanism, a vertical driving mechanism and a suspension device, wherein the connecting mechanism is connected with the gravity compensator and the supported object, thereby carrying out transmission between the gravity compensator and the supported object; the vertical driving mechanism is connected with the connecting mechanism and used for driving the connecting mechanism to carrying out vertical motion, thereby carrying out vertical compensation to the supported object; and the suspension device is connected with the vertical driving mechanism and leads the vertical driving mechanism to be suspended on a bearing base part so as to lead the vertical driving mechanism to correspondingly move on the bearing base part according to the movement of the supported object. As the suspension device is connected with the bearing base part, the gravity compensator can carrying out motion along with the motion of the supported object to carry out real-time balance to gravity, so that the supported object is in a suspension state, in this case, the motion efficiency and the performance of the supported object are greatly improved.
Description
Technical field
The present invention relates to gravity-compensated device, relate in particular to the gravity-compensated device that is applied to lithographic equipment.
Background technology
Photoetching is meant the figure on a series of mask is transferred to complex techniques process on the silicon chip equivalent layer successively by exposure system.In lithographic equipment, work stage is responsible for the precise motion of silicon chip, generally adopts thick microposition mode, and promptly the coarse motion platform of big stroke is realized length apart from coarse positioning, and micropositioner is then realized nano level accurate location.The effect of micropositioner is the carrying silicon chip, by level to accurately adjusting with vertical six degree of freedom and the location finishes silicon chip to aim at and the leveling and focusing job task.
In the precise motion equipment of micropositioner and so on, object gravity is bigger to the influence of motion, need take measures to compensate.In the lithographic equipment, generally adopt the combination of gravity compensator+vertical motor, the special balance of gravity compensator drives the gravity of object, the most common with gas-powered, also have by magnetic suspension or spring driven, vertical motor then is responsible for driving object and is made catenary motion, carries out decoupling zero control.
The open date is that 2002-1-8, publication number are the United States Patent (USP) of US6337484, with the level and the separately control of catenary motion of micropositioner.Gravity compensator is adopted in vertical driving, comprises a cylinder and a Z to long-range navigation thatch (Lorentz) motor, the two parallel connection, three groups altogether.Cylinder provides stable static force, balance micropositioner gravity, and long-range navigation thatch motor provides dynamic force, drives the micropositioner catenary motion.Design level and rotation air-bearing make it have X, Y, Rx, Ry, Rz direction degree of freedom in the gravity compensator, do the decoupling zero campaign by long-range navigation thatch motor-driven object with respect to lower floor's object.This gravity compensator structure relative complex, gas circuit is more, and seal request is higher, and is higher to the pneumatically supported rigidity requirement of side direction during to acceleration and deceleration in level.A plurality of in addition gravity compensator layouts can not be eliminated the influence of gravity to level and catenary motion fully.
The open date is that 2009-7-8, publication number have adopted high-pressure fluid path and bellows structure for the CN101477316 Chinese patent, has invented the gravity compensator of a kind of level and vertical decoupling zero, is used for balancing gravity, drives micropositioner by the separate type motor again.This gravity compensator structure is very complicated, and design difficulty is big, and can't follow the micropositioner real time kinematics.
At above problem, the present invention proposes a kind of improved gravity compensator.
Summary of the invention
Because the above-mentioned defective of prior art, technical matters to be solved by this invention provides a kind of improved gravity compensator.
According to an aspect of the present invention, provide a kind of gravity compensator, it carries out vertical gravity compensation to being subjected to supporting object.Described gravity compensator comprises: bindiny mechanism, and it connects described gravity compensator and describedly is subjected to supporting object, thereby carries out transmission between them; Be connected to the vertical driving mechanism of described bindiny mechanism, the described bindiny mechanism of described vertical drive mechanism carries out catenary motion, thereby the described supporting object that is subjected to is carried out vertical compensation; Be connected to the levitation device of described vertical driving mechanism, described levitation device makes described vertical driving mechanism float on the carrying base portion, so that described vertical mechanism can be subjected to moving of supporting object and make corresponding mobile on described carrying base portion according to described.
Among some embodiment, described gravity compensator also comprises the level that is connected to described vertical driving mechanism to driving mechanism, with drive described gravity compensator do level to motion, thereby to described be subjected to supporting object carry out level to compensation.
Among some embodiment, described bindiny mechanism is the spherical linkage that comprises hinge outer cover, hinge screw and the spherical air-bearing bearing between them, and described spherical linkage has Rx, Ry, Rz three degree of freedom.
Among some embodiment, described vertical driving mechanism is a voice coil motor.
Among some embodiment, described vertical driving mechanism is the cylinder that contains air-bearing.
Among some embodiment, described level is a long-range navigation thatch motor to driving mechanism, and the mover of described motor is fixed on the described vertical driving mechanism by connecting link, and its stator is connected with fixed part.
Among some embodiment, described levitation device is that gas suspension or magnet suspend.
According to a further aspect in the invention, provide a kind of 6-freedom micro-motion platform, having comprised: horizontal drive motor, the mover of described horizontal drive motor are fixed on the described micropositioner, and its stator is fixed on the plummer of described micropositioner; Vertical drive motor, the mover of described vertical drive motor are fixed on the described micropositioner, and its stator is fixed on the described plummer; Reach gravity compensator as the aforementioned.
Among some embodiment, described micropositioner only comprises a described gravity compensator, and described gravity compensator be positioned at described micropositioner barycenter under.
Among some embodiment, between the mover of described horizontal drive motor and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of counterparty to the above micropositioner; And, between described vertical drive motor mover and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of counterparty, so that the tangential movement of described micropositioner and catenary motion are full decoupled to the above micropositioner.
Owing to adopt levitation device to be connected with the carrying base portion according to gravity compensator of the present invention, therefore can move along with the motion that is subjected to supporting object, gravity is carried out real-time balance, make supporting object be in suspended state, thereby the sport efficiency of supporting object and performance are improved greatly.
The present invention also provides a kind of 6-freedom micro-motion platform, adopts an aforementioned gravity compensator, is placed under the micropositioner barycenter, and the decoupling performance of micropositioner motion is improved greatly.Drive the micropositioner motion and comprise horizontal drive motor and vertical drive motor, between the mover of all motors and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of counterparty to the above micropositioner, so tangential movement and catenary motion are full decoupled, its effect is better than the layout of three gravity compensators.
Description of drawings
Reference is the description and the accompanying drawing of preferred embodiment hereinafter, can understand the present invention and purpose and advantage best, wherein:
Fig. 1 is the cut-open view of gravity compensator 1;
Fig. 2 is the cut-open view of gravity compensator 1 ';
Fig. 3 is the cut-open view of gravity compensator 2;
Fig. 4 is the cut-open view of gravity compensator 2 ';
Fig. 5 is the cut-open view of micropositioner 201;
Fig. 6 is the vertical view of micropositioner 201;
Fig. 7 is the cut-open view of the micropositioner of employing gravity compensator 2 '.
Embodiment
Referring to the accompanying drawing of the embodiment of the invention, hereinafter the present invention will be described in more detail.Yet the present invention can realize with many different forms, and should not be construed as the restriction of the embodiment that is subjected in this proposition.On the contrary, it is abundant and complete open in order to reach proposing these embodiment, and makes those skilled in the art understand scope of the present invention fully.
Refer now to Fig. 1 gravity compensator 1 according to an embodiment of the invention is described.Fig. 1 is the cut-open view of gravity compensator 1.As shown in Figure 1,101 for being subjected to supporting object, and its below is to being subjected to supporting object 101 to carry out the gravity compensator 1 of gravity compensation.The body of gravity compensator 1 is connected with being subjected to supporting object 101 by spherical linkage 102, thereby carries out transmission between them.Spherical linkage 102 comprises the hinge outer cover 102a and the hinge screw 102b of smooth connection each other, can rotate around any direction thus and has Rx, Ry, Rz three degree of freedom.Spherical linkage 102 is the example of bindiny mechanism.
When the barycenter 101a that is subjected to supporting object 101 with respect to himself rotatablely moved (Rz direction) or banking motion (Rx, Ry direction) as the plane, barycenter 101a did not move in the space, and correspondingly the position of gravity in the space do not change.This moment, gravity compensator 1 was not done any moving, and only changed itself and the angle that is subjected to supporting object 101 by spherical linkage 102.When supporting object 101 is done X, Y, Z translation motion, the position of barycenter 101a in the space will change, and gravity position also will change.Gravity compensator 1 must be followed supporting object 101 and done corresponding motion this moment, with guarantee balancing force that gravity compensator 1 produces all the time with supporting object 101 gravitational equilibriums, promptly equal and opposite in direction and direction are opposite.For X, Y direction, gravity compensator 1 relies on its bottom levitation device 105 and the constraint of carrying base portion, can follow supporting object 101 at an easy rate and do translation motion.For the Z direction, the movable information of supporting object 101 need be passed to voice coil motor 103 in advance, so that gravity compensator 1 is synchronized with the movement with supporting object 101, realize gravity enforcement compensation.Can realize being synchronized with the movement by the known feedforward control of industry, not give unnecessary details at this.
Refer now to Fig. 2 gravity compensator 1 ' according to another embodiment of the present invention is described.Fig. 2 is the cut-open view of gravity compensator 1 '.In the present embodiment, gravity compensator 1 ' is basic identical with the structure of gravity compensator 1, and institute's difference is that gravity compensator 1 ' comprises that also level is to driving mechanism.Thus, in the following drawings, identical or corresponding label refers to identical or corresponding element among Fig. 1, and has saved these detailed descriptions identical or respective element.
Gravity compensator 1 ' comprises that also level is to driving mechanism.In the present embodiment, long-range navigation thatch motor 107 as level to driving mechanism.The mover 107b of long-range navigation thatch motor 107 is fixed on the vertical driving mechanism of gravity compensator 1 by connecting link 106, and its stator 107a is fixed on the assemble mechanism 108, and assemble mechanism 108 is connected with fixed part by supporting mechanism 109.The special gravity compensators that drive of long-range navigation thatch motor 107 are done surface level X, Y, Rz motion, thus to described be subjected to supporting object carry out level to compensation.The barycenter of gravity compensator 1 ' is in the driving plane of long-range navigation thatch motor 107.
When the barycenter 101a that is subjected to supporting object 101 with respect to himself rotatablely moved (Rz direction) or banking motion (Rx, Ry direction) as the plane, barycenter 101a did not move in the space, and correspondingly the position of gravity in the space do not change.This moment, gravity compensator 1 ' was not done any moving, and only changed itself and the angle that is subjected to supporting object 101 by spherical linkage 102.When supporting object 101 is done X, Y, Z translation motion, the position of barycenter 101a in the space will change, and gravity position also will change.Gravity compensator 1 ' must be followed supporting object 101 and done corresponding motion this moment, with guarantee balancing force that gravity compensator 1 ' produces all the time with supporting object 101 gravitational equilibriums, promptly equal and opposite in direction and direction are opposite.In order to realize synchronously, the movable information (X, Y, Z direction) of supporting object 101 need be passed in advance voice coil motor 103 (Z direction) and long-range navigation thatch motor 107 (X, Y direction), so that gravity compensator 1 ' is synchronized with the movement with supporting object 101, realize the gravity real-Time Compensation.
When gravity compensator only comprises vertical driving mechanism, only Z is compensated other direction X, Y, Rx, the described motion that is subjected to supporting object of the equal passive adaptation of Ry, Rz to motion.When gravity compensator also comprised the plane driving mechanism, ACTIVE CONTROL comprised X, Y, three directions of Z, other Rx, Ry, Rz passive adaptation so.
Refer now to Fig. 3 explanation gravity compensator 2 according to yet another embodiment of the invention.Fig. 3 is the cut-open view of gravity compensator 2.In the present embodiment, gravity compensator 2 is basic identical with the structure of gravity compensator 1 ', and institute's difference is, adopts cylinder as vertical driving mechanism.Thus, in the following drawings, identical or corresponding label refers to identical or corresponding element among Fig. 1-2, and has saved these detailed descriptions identical or respective element.
In the gravity compensator 2, spherical linkage 202 can rotate around any direction, has Rx, Ry, Rz three degree of freedom, between hinge outer cover 202a and the hinge screw 202b spherical air-bearing bearing 203 is arranged, and realizes not having the friction rotation.
The cylinder 204 that is used as vertical driving mechanism is positioned under the spherical linkage 202 and with it and is connected.Cylinder 204 comprises piston 204a, outer cover 204b, interior pressure chamber 204c.Cylinder piston 204a can be along Z to back and forth movement, between itself and the cylinder clothing 204b air-bearing 205 is arranged, and can make piston 204a not have frictional movement.Outer cover 204b is connected to levitation device 105.Pressure gas from the source of the gas (not shown) enters pressure chamber 204c in the cylinder, can promote piston 204a by the pressure adjusting and move up and down.Pressure gas among the 204c enters internal piston gas circuit main channel 206 simultaneously, enter respectively in spherical air-bearing bearing 203 and the side direction air-bearing 205 by gas circuit branch 207 again, air supporting pressure is provided, and making not have between friction rotation and 204a and the 204b between 202a and the 202b does not have frictional movement.
The function of levitation device 105 and plane compensation motor 107 and the corresponding component of structure and gravity compensator 1 ' are identical.Particularly, the levitation device 105 of gravity compensator 2 adopts the gas suspension mode, is gas foot 105.The six-freedom degree of gravity compensator 2 is all made frictionless motion by air supporting like this.
Similarly, when being subjected to supporting object 101 to do X, Y, Z translation motion, 101 movable information (X, Y, Z direction) need be passed in advance cylinder 204 (Z direction) and long-range navigation thatch motor 107 (X, Y direction), make feedforward control, so that gravity compensator 2 is synchronized with the movement with supporting object 101, realize gravity enforcement compensation.Cylinder 204 needs higher response speed, and pressure is accurately adjustable.
Refer now to Fig. 4 gravity compensator 2 ' according to another embodiment of the present invention is described.Fig. 4 is the cut-open view of gravity compensator 2 '.In the present embodiment, gravity compensator 2 ' is basic identical with the structure of gravity compensator 2, and institute's difference is that gravity compensator 2 ' does not comprise long-range navigation thatch motor 107.
When being subjected to supporting object 101 to do X, Y to tangential movement, because gas foot 105 retrains in the bottom, the integral body of gravity compensator 2 ' relies on the acting force of spherical air-bearing bearing 203 and side direction air-bearing 205, can follow be synchronized with the movement by supporting object 101.
Refer now to the micropositioner 201 of Fig. 5 explanation according to employing gravity compensator 2 of the present invention.Fig. 5 is the cut-open view of micropositioner 201.Micropositioner 201 is a single layer structure, barycenter 201a.Plummer 200 is responsible for supporting micropositioner 201, gravity compensator 2 and related driving device.Described gravity compensator 2 is a structure among Fig. 3, be positioned at micropositioner barycenter 201a under, be responsible for the gravity of balance micropositioner 201.Gravity compensator 2 is connected with micropositioner 201 by spherical linkage 202, and its gas foot 105 floats on the plummer 200, and its horizontal drive mechanism long-range navigation thatch motor 107 is fixed on the plummer 200 by assemble mechanism 108 and supporting mechanism 109.
Fig. 6 is the vertical view of micropositioner 201.As shown in Figure 6, respectively three of horizontal drive motor 300 and vertical drive motor 400, horizontal electric mover 301a, 301b, 301c are the L type and distribute, vertical electric mover 401a, 401b, 401c are equilateral triangle and distribute, level and vertical driving center overlap with micropositioner barycenter 201a, make barycenter and drive.Three horizontal drive motor combination can make micropositioner 201 do X, Y, the motion of Rz direction, and three vertical drive motor combinations can make micropositioner 201 do Z, Rx, the motion of Ry direction.Gravity compensator 2 should be synchronized with the movement with micropositioner 201.
Refer now to the micropositioner of Fig. 7 explanation according to employing gravity compensator 2 ' of the present invention.Fig. 7 is the cut-open view of the micropositioner of employing gravity compensator 2 '.In the present embodiment, the structure of described micropositioner and micropositioner 201 are basic identical, and institute's difference is, adopts gravity compensator 2 ' to replace gravity compensator 2.Thus, identical or corresponding label refers to identical or corresponding element among Fig. 1-6, and has saved these detailed descriptions identical or respective element.
Micropositioner embodiment described above is an example with aforesaid gravity compensator 2 and 2 ', and the micropositioner that adopts gravity compensator of the present invention is described.Yet aforesaid gravity compensator 1 and 1 ' can be applicable to micropositioner equally.
Can see that from Fig. 5-7 micropositioner is connected with following plummer 200 no any mechanisms, no decoupling zero plate, no decoupling zero flexible block can vibration isolation, can realize tangential movement and catenary motion decoupling zero again.
The present invention has following advantage.
(1) owing to adopts levitation device to be connected with the carrying base portion according to gravity compensator of the present invention, therefore can move along with the motion that is subjected to supporting object, gravity is carried out real-time balance, make supporting object be in suspended state, thereby the sport efficiency of supporting object and performance are improved greatly.
(2) owing to adopt levitation device, gravity compensator and floated on the carrying base portion by supporting object can reduce friction of motion, and also vibration isolation is effectively simultaneously eliminated external vibration to being subjected to the interference of supporting object, improves the exercise performance that is subjected to supporting object.
(3) gravity compensator of the present invention comprises that also level is to driving mechanism, do surface level X, Y, Rz motion with special driving gravity compensator, carry out the ACTIVE CONTROL of X, Y, three directions of Z with vertical driving mechanism, thereby can compensate the supporting object that is subjected to of six-freedom motion.
(4) can be owing to gravity compensator of the present invention along with the motion campaign that is subjected to supporting object, therefore adopt the micropositioner of gravity compensator of the present invention only to need a gravity compensator that is placed under the micropositioner barycenter, need not the decoupling zero flexible block.The decoupling performance of micropositioner motion is greatly improved.
(5) adopt gravity compensator of the present invention, the gap between appropriate design level and vertical drive motor mover and the stator can make level and catenary motion full decoupled again.Micropositioner system (comprising individual layer micropositioner, gravity compensator, level and vertical electric mover) is contactless fully with following plummer (the horizontal drive motor stator that comprises the vertical motor stator of level, gravity compensator), both eliminate resistances such as friction force, also isolated the vibration that plummer brings.Level and vertical drive motor power output all as the power of micropositioner motion, need not to compensate any resistance, and the control effect is very good.
Claims (10)
1. gravity compensator, it carries out vertical gravity compensation to being subjected to supporting object, it is characterized in that, comprising:
Bindiny mechanism, it connects described gravity compensator and describedly is subjected to supporting object, thereby carries out transmission between them;
Be connected to the vertical driving mechanism of described bindiny mechanism, the described bindiny mechanism of described vertical drive mechanism carries out catenary motion, thereby the described supporting object that is subjected to is carried out vertical compensation;
Be connected to the levitation device of described vertical driving mechanism, described levitation device makes described vertical driving mechanism float on the carrying base portion, so that described vertical mechanism can be subjected to moving of supporting object and make corresponding mobile on described carrying base portion according to described.
2. gravity compensator as claimed in claim 1, it is characterized in that, described gravity compensator also comprises the level that is connected to described vertical driving mechanism to driving mechanism, with drive described gravity compensator do level to motion, thereby to described be subjected to supporting object carry out level to compensation.
3. gravity compensator as claimed in claim 2 is characterized in that, described bindiny mechanism is the spherical linkage that comprises hinge outer cover, hinge screw and the spherical air-bearing bearing between them, and described spherical linkage has Rx, Ry, Rz three degree of freedom.
4. gravity compensator as claimed in claim 3, described vertical driving mechanism is a voice coil motor.
5. gravity compensator as claimed in claim 3, described vertical driving mechanism is the cylinder that contains air-bearing.
6. gravity compensator as claimed in claim 3, described level is a long-range navigation thatch motor to driving mechanism, the mover of described motor is fixed on the described vertical driving mechanism by connecting link, and its stator is connected with fixed part.
7. as each described gravity compensator of the aforementioned right of claim, described levitation device is that gas suspension or magnet suspend.
8. a 6-freedom micro-motion platform is characterized in that, comprising:
Horizontal drive motor, the mover of described horizontal drive motor are fixed on the described micropositioner, and its stator is fixed on the plummer of described micropositioner;
Vertical drive motor, the mover of described vertical drive motor are fixed on the described micropositioner, and its stator is fixed on the described plummer; And
Each described gravity compensator of claim as described above.
9. micropositioner as claimed in claim 8 is characterized in that, described micropositioner only comprises a described gravity compensator, and described gravity compensator be positioned at described micropositioner barycenter under.
10. micropositioner as claimed in claim 8 is characterized in that, between the mover of described horizontal drive motor and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of counterparty to the above micropositioner; And, between described vertical drive motor mover and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of counterparty, so that the tangential movement of described micropositioner and catenary motion are full decoupled to the above micropositioner.
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| CN 201010102422 CN102141734B (en) | 2010-01-28 | 2010-01-28 | Gravity compensator and micropositioner adopting same |
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| CN 201010102422 CN102141734B (en) | 2010-01-28 | 2010-01-28 | Gravity compensator and micropositioner adopting same |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108369386A (en) * | 2015-12-17 | 2018-08-03 | 卡尔蔡司Smt有限责任公司 | The device of adjustment component |
| CN108896409A (en) * | 2018-06-12 | 2018-11-27 | 河海大学 | A kind of 3 points of curved pilot systems of floated level and test method of the fracture of test material I type |
| CN114995525A (en) * | 2022-08-01 | 2022-09-02 | 上海隐冠半导体技术有限公司 | Motion platform and energy storage state adjusting method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI242113B (en) * | 1998-07-17 | 2005-10-21 | Asml Netherlands Bv | Positioning device and lithographic projection apparatus comprising such a device |
| CN100578362C (en) * | 2007-06-29 | 2010-01-06 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN100573340C (en) * | 2008-08-07 | 2009-12-23 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding 6-freedom micro-motion platform |
| CN101477316B (en) * | 2009-01-22 | 2011-02-02 | 上海微电子装备有限公司 | Gravity compensator |
| CN101581347B (en) * | 2009-06-23 | 2011-01-19 | 上海微电子装备有限公司 | Vibration reduction support device and photoetching machine using same |
-
2010
- 2010-01-28 CN CN 201010102422 patent/CN102141734B/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108369386A (en) * | 2015-12-17 | 2018-08-03 | 卡尔蔡司Smt有限责任公司 | The device of adjustment component |
| CN108896409A (en) * | 2018-06-12 | 2018-11-27 | 河海大学 | A kind of 3 points of curved pilot systems of floated level and test method of the fracture of test material I type |
| CN114995525A (en) * | 2022-08-01 | 2022-09-02 | 上海隐冠半导体技术有限公司 | Motion platform and energy storage state adjusting method |
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| CN102141734B (en) | 2013-01-16 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |