CN102128847B - Spectrum signal acquisition device for X-ray fluorescence spectrometer - Google Patents
Spectrum signal acquisition device for X-ray fluorescence spectrometer Download PDFInfo
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Abstract
The invention relates to a spectrum signal acquisition device for an X-ray fluorescence spectrometer, which comprises an objective table, an X-ray generating device, a detector, a secondary target platform and a coupled control device, wherein the objective table is used for supporting a sample; the X-ray generating device is used for emitting primary X-rays; the detector is used for detecting fluorescence generated when the sample is irradiated by the X-rays to acquire a corresponding spectrum signal; the secondary target platform is used for placing a secondary target material; the coupled control device is used for controlling the X-ray generating device, so that the primary X-rays emitted by the X-ray generating device irradiate the sample or the secondary target material; and secondary X-rays generated when the secondary target material is irradiated by the primary X-rays irradiates to the sample. The primary X-rays and the secondary X-rays are used together, and a background peak of the fluorescence spectrum signal acquired by the detector is reduced, so that a control system for analyzing the fluorescence spectrum signal can analyze high-content elements and low-content elements in the sample.
Description
Technical field
The present invention relates to the XRF field, relate in particular to a kind of spectral signal deriving means that is used for Xray fluorescence spectrometer.
Background technology
Xray fluorescence spectrometer is a kind of X-ray analytical instrument X, is a kind of common type of X-ray analysis instrument.X ray is with the inner electron of high-velocity electrons bombardment atom, makes it to be in high excited state, and outer field electronic transition simultaneously is to the inner orbit that lacks electronics; In this process, can be accompanied by the energy that discharges with the electromagnetic wave form, this electromagnetic wave energy that releases energy is big, and wavelength is little, and naked eyes are invisible, are referred to as X ray.
If excite the X ray of generation to remove to bombard the inner electron of other atom again as excitaton source (can be referred to as primary X-ray) with high-velocity electrons; Can produce X ray equally; The energy that is this X ray is low than primary X-ray; Wavelength is also longer, and this ray is called secondary x rays or XRF, fluorescent X-ray.The wavelength of XRF is that atomic number with excited species (test substance) is a characteristic, and the material wavelength that atomic number is big more is short more.Various element all has the characteristic X-ray wavelength of fluorescence of itself, and this is the foundation of carrying out qualitative analysis with the Xray fluorescence spectrometer of XRF principle; The characteristic X-ray intensity of fluorescence that the element stimulated emission is come out then depends on the content of this element, and this is the foundation of quantitative test.
Xray fluorescence spectrometer is divided into Wavelength dispersion type and energy dispersion type.
The Wavelength dispersion type x ray XRF is provided with beam splitting system, and its critical piece is the crystal optical splitter, and the effect of crystal optical splitter is through the crystal diffraction phenomenon the X ray of different wave length separately.A kind of specific crystal has certain interplanar distance, thereby is defined in the certain applications scope, so present Wavelength dispersion type x ray XRF is with the element of the crystal analysis different range with different interplanar distances.
Energy dispersion type Xray fluorescence spectrometer utilizes fluorescent X-ray to have the characteristics of different-energy, and it is separated and detection, needn't use analyzing crystal.The great advantage of energy dispersion type Xray fluorescence spectrometer is nearly all element in the working sample simultaneously, so analysis speed is fast.On the other hand, because energy dispersion type Xray fluorescence spectrometer is higher than Wavelength dispersion type x ray XRF to the verification and measurement ratio of X ray, therefore can use low power X-ray generator to come the fluorescence excitation X ray, thereby device volume is also little.In addition, energy dispersion type Xray fluorescence spectrometer does not have the such complex mechanical construction of Wavelength dispersion type x ray XRF, thereby working stability.
The existing energy dispersion type Xray fluorescence spectrometer that is used for comprises spectral signal deriving means and the control system that is used to analyze spectral signal.Wherein, the spectral signal deriving means comprises objective table, is used to carry sample; X-ray generator is used to launch primary X-ray; Detector is used to survey the fluorescence spectrum signal that produces when said sample receives x-ray bombardment.Be used to analyze the control system of spectral signal, be used to receive the fluorescence spectrum signal that said sample that said detector detects produces, analyze element and content in the said sample.The primary X-ray that the existing spectral signal deriving means that is used for Xray fluorescence spectrometer utilizes X-ray generator to produce directly removes to shine sample; But the primary X-ray that X-ray generator produces is a continuous exciting source; When directly going to shine the sample on the objective table with it; Sample produces the fluorescence spectrum signal and has background peaks under the irradiation of primary X-ray; If when contained element is low-down in certain sample; Directly with the sample on the primary X-ray deexcitation objective table of X-ray generator emission, the fluorescence spectrum signal that the control system pick-up probe obtains and when this fluorescence spectrum signal analysis drawn spectrogram can let the spectrum of trace element be submerged in the content that can't test out it in the background peaks of fluorescence.
A lot of patents about energy dispersion type Xray fluorescence spectrometer are arranged both at home and abroad, and for example, the patent No. is the Chinese utility model patent of ZL200620013698.1, but these patents all do not solve the above-described problem of prior art.
Summary of the invention
The technical matters that the present invention solves is that the spectral signal that the spectral signal deriving means that is used for Xray fluorescence spectrometer of prior art obtains has background peaks, makes control system can't detect the shortcoming of low content element and content thereof.
For addressing the above problem, the present invention provides a kind of spectral signal deriving means that is used for Xray fluorescence spectrometer, comprising:
Objective table is used to carry sample;
X-ray generator is used to launch primary X-ray;
Detector is used to survey the line fluorescence that produces when said sample receives x-ray bombardment, obtains corresponding spectral signal;
Secondary target platform is used to place the secondary target;
The coupling control device is used to control the primary X-ray that said X-ray generator makes its emission and shines said sample or said secondary target, and the secondary x rays that said secondary target produces when receiving said primary X-ray irradiation exposes to said sample.
Optional, said coupling control device comprises motor and the rotating mechanism that is connected with motor, is rotated by the said rotating mechanism of said motor-driven, said X-ray generator rotates under the driving of rotating mechanism.
Optional, said rotating mechanism is the worm gear wheelwork, and this worm gear wheelwork comprises worm gear and worm screw, and by said motor-driven worm screw, said worm screw drives worm gear and rotates; Said X-ray generator is arranged on the said worm gear.
Optional, also comprising stepper motor and slide block, said secondary target platform slides and is located on the said slide block, and said stepper motor is used to drive said secondary target platform and on said slide block, slides.
Optional; Said coupling control device also comprises first optoelectronic switch and second optoelectronic switch; Be located at respectively on the said worm gear, when X-ray generator was in the position of sample emission primary X-ray on objective table, first optoelectronic switch was controlled said motor and is quit work; X-ray generator is in when the position of secondary target emission primary X-ray, and second optoelectronic switch is controlled said motor and quit work.
The present invention also provides the analytical approach of element in a kind of sample, comprising:
To said sample emission primary X-ray, survey the fluorescence that produces when said sample is shone by said primary X-ray;
To said sample emission secondary x rays, survey the fluorescence that produces when said sample is shone by said secondary x rays;
The fluorescence that produces when receiving said primary X-ray and secondary x rays irradiation according to the said said sample that detects obtains corresponding spectral signal and analyzes element and the content in the said sample.
Compared with prior art, the present invention has the following advantages:
The spectral signal deriving means that is used for Xray fluorescence spectrometer of the present invention uses primary X-ray and secondary x rays together; The fluorescence spectrum signal background peak that detector obtains reduces, thereby can make the control system of analysis of fluorescence spectral signal can analyze the element of high-load in the sample and the element of low content; Wherein, The primary X-ray that X-ray generator produces is a continuous exciting source; Primary X-ray (continuous exciting source) direct irradiation sample through the X-ray generator generation; Detector obtains sample at the primary X-ray irradiation fluorescence of generation down, is used for analyzing the fluorescence spectrum signal that the control system pick-up probe of spectral signal obtains, and can detect the element of the high-load in the sample; The primary X-ray that produces with X-ray generator removes to shine the secondary target; The secondary x rays (monochromatic excitation source) that under the irradiation of primary X-ray, produces with the secondary target shines sample; Detector obtains the fluorescence that sample produces under the secondary x rays irradiation; Be used for analyzing the fluorescence spectrum signal that the control system pick-up probe of spectral signal obtains, can detect the low content element in the sample; Thereby spectral signal deriving means and the control system collaborative work that is used for Xray fluorescence spectrometer of the present invention can be accomplished the test to high-load in the sample and low content element, improved the accuracy and the efficient of test greatly.
Equally, the analytical approach of element in the sample of the present invention is used primary X-ray and secondary x rays together, can detect the element and the low content element of the high-load in the sample.
Description of drawings
Fig. 1 is the structure and the principle of work synoptic diagram of the spectral signal deriving means that is used for the X XRF of the specific embodiment of the invention.
Fig. 2 is the X-ray generator working state schematic representation of the specific embodiment of the invention.
Fig. 3 is the schematic side view of the gearing of the specific embodiment of the invention.
Fig. 4 is the schematic top plan view of the gearing of the specific embodiment of the invention.
Embodiment
The spectral signal deriving means that is used for the X XRF of the specific embodiment of the invention; On the spectral signal deriving means basis of the existing X of being used for XRF, increased secondary target platform; Can place the secondary target on the secondary target platform; With monochromatic excitation source and continuous exciting source coupling, wherein, the primary X-ray that X-ray generator produces is a continuous exciting source; Primary X-ray (continuous exciting source) direct irradiation sample through the X-ray generator generation; Detector obtains sample at the primary X-ray irradiation fluorescence of generation down, is used for analyzing the fluorescence spectrum signal that the control system pick-up probe of spectral signal obtains, and can detect the element of the high-load in the sample; The primary X-ray that produces with X-ray generator removes to shine the secondary target; The secondary x rays (monochromatic excitation source) that under the irradiation of primary X-ray, produces with the secondary target shines sample; Can reduce background peaks, improve the detection limit of trace element, detector obtains the fluorescence that sample produces under the secondary x rays irradiation; Be used for analyzing the fluorescence spectrum signal that the control system pick-up probe of spectral signal obtains, can detect the low content element in the sample.Mass content with plumbous in the specimen is an example; The existing spectral signal deriving means that is used for the X XRF is with control system operational analysis sample element; Plumbous detection limit is more than the 100ppm (1,000,000/), and the present invention is used for the spectral signal deriving means of X XRF and has utilized the secondary target, element in control system operational analysis sample; Detection limit plumbous in the sample can be between 10-20ppm; Need to prove that detection limit is meant in a sample and contains a kind of element, when content arrives to a certain degree, could be come out by instrument test.
Fig. 1 is the structure and the principle of work synoptic diagram of the spectral signal deriving means that is used for Xray fluorescence spectrometer of the specific embodiment of the invention.With reference to figure 1; The spectral signal deriving means of the X of being used for XRF of the present invention comprises: X-ray generator 10; Be used to launch primary X-ray, the X-ray generator of the specific embodiment of the invention comprises X-ray tube and high pressure generator, and both use the generation primary X-ray together; Objective table 20 is used to carry sample; Detector 40 is used to survey the fluorescence that produces when said sample receives x-ray bombardment, obtains corresponding spectral signal; Secondary target platform 50 is used to place the secondary target; Coupling control device 60 is used to control said X-ray generator 10 and makes the primary X-ray of its emission shine said sample or said secondary target, and the secondary x rays that said secondary target produces when shone by said primary X-ray exposes to said sample.Said X-ray generator 10 can be able to and can changed between the position that is placed on the secondary target emission primary X-ray on the secondary target platform 50 to the position that is placed on the sample emission primary X-ray on the objective table 20 under the control of said coupling control device 60.
The spectral signal deriving means that is used for Xray fluorescence spectrometer of the specific embodiment of the invention also comprises: first collimating apparatus 30; Between said X-ray generator 10 and said objective table 20; Be used for the primary X-ray of the said X-ray generator emission of collimation, add first collimating apparatus, can make the primary X-ray of X-ray generator emission more shine sample; Reduce the scattering of primary X-ray, improve the exposure rate of primary X-ray irradiation sample; And second collimating apparatus 70 between secondary target platform 50 and objective table 20; The secondary x rays that is used for the emission of collimation secondary target; Add second collimating apparatus; The secondary x rays that the secondary target is launched when the irradiation of the primary X-ray that receives the X-ray generator emission more shines sample, reduces the scattering of secondary x rays, improves the exposure rate of secondary x rays irradiation sample.
Said coupling control device 60 can be to drive the mechanical hook-up that X-ray generator rotates; For example coupling control device 60 can comprise: motor (not shown) and the rotating mechanism (not shown) that is connected with motor; Wherein said X-ray generator 10 is connected with said rotating mechanism; Under the driving of rotating mechanism; With reference to figure 2 is the X-ray generator working state schematic representation of the specific embodiment of the invention, and X-ray generator 10 is the rotation alpha angle counterclockwise, thereby the primary X-ray of X-ray generator emission can shine the secondary target; The secondary target produces secondary x rays (monochromatic excitation source) under the exciting of primary X-ray; Sample on the secondary x rays irradiation objective table 20, sample produces fluorescence under the exciting of secondary x rays (monochromatic excitation source), and detector 40 also receives the fluorescence that sample produces under the exciting of secondary x rays.
Said rotating mechanism can be the worm gear wheelwork, and this worm gear wheelwork comprises worm gear and worm screw, and said motor-driven worm screw drives worm gear by worm screw and rotates; Said X-ray generator is arranged on the said worm gear.When needs used the secondary target, the motor-driven worm screw was rotated, and worm screw drives the worm gear rotation, makes the X-ray generator that is positioned on the worm gear turn to the secondary target on the said secondary target platform 50, made X-ray generator to secondary target emission primary X-ray.The secondary x rays that the angle of primary X-ray irradiation secondary target is produced the secondary target with and intensity influential; In concrete the application; Can select suitable irradiating angle, in this specific embodiment, the maximum rotation stroke of worm gear wheelwork is 45 °; When worm gear goes to maximum travel position, the secondary target emission primary X-ray of X-ray generator on secondary target platform.This coupling control device 60 also comprises the first optoelectronic switch (not shown) and the second optoelectronic switch (not shown); Be located on the worm gear respectively; When X-ray generator is in the position of sample emission primary X-ray on objective table; First optoelectronic switch control motor quits work, and X-ray generator can be launched primary X-ray to sample, and X-ray generator is in when the position of secondary target emission primary X-ray; Second optoelectronic switch control motor quits work, and X-ray generator can be to secondary target emission primary X-ray.In practical implementation of the present invention; Said worm gear is that 0 ° position is provided with first optoelectronic switch in rotational travel; In rotational travel is that 45 ° position is provided with second optoelectronic switch, and when worm gear when to turn to rotational travel be 0 ° position, first optoelectronic switch control motor quits work; X-ray generator is launched primary X-ray to sample; When worm gear when to turn to rotational travel be 45 ° position, second optoelectronic switch control motor quits work, and X-ray generator is to secondary target emission primary X-ray.In specific embodiment of the present invention, the unlatching of motor can be by the control system control that is used with the spectral signal deriving means, also can manual control.
Need to prove that the used worm gear wheelwork of the present invention is known worm gear wheelwork, so the present invention does not do detailed introduction to this worm gear wheelwork.
The spectral signal deriving means of the X of being used for XRF of the present invention can also comprise gearing; With reference to figure 3, Fig. 4; Fig. 3 is the schematic side view of the gearing of the specific embodiment of the invention, and Fig. 4 is the schematic top plan view of the gearing of the specific embodiment of the invention.In specific embodiment of the present invention, said gearing comprises stepper motor 81, slide block 82; Said secondary target platform 50 slidably is located on the slide block 82, and under the driving of stepper motor 81, secondary target platform 50 can slide on slide block 82; In addition, said stepper motor 81 comprises driving shaft 811, and this driving shaft 811 is spirally connected through nut 831 with said secondary target platform 50; In other embodiment, driving shaft 811 can be connected fixing through other modes with said secondary target platform 50.Said stepper motor 81 is known stepper motor, has fixing step number, does not do detailed introduction at this.
Because the secondary x rays that the secondary target is launched can only detect in the sample than the little element of secondary target atom ordinal number; Therefore the said secondary target 51 that is positioned on the secondary target platform 50 can be for a plurality of; Secondary target platform 50 can move under the drive of gearing, to reach the purpose of switching the secondary target 51 on the secondary target platform 50.With reference to figure 4, five secondary targets 51 are arranged in this specific embodiment, can detect trace elements different in the sample and content thereof.When needs switched the secondary target, stepper motor 81 drove secondary target platform 50 and moves the purpose that reaches switching secondary target.
Continuation is with reference to figure 2, and the spectral signal deriving means that is used for the X XRF of the specific embodiment of the invention can also comprise optical filter 31, is located between first collimating apparatus 30 and the said X-ray generator 10 the low-energy primary X-ray of filtering.
Need to prove; The spectral signal deriving means of the X of being used for XRF of the present invention can be used with control system usually; Wherein this control system is used to receive the fluorescence spectrum signal that sample that said detector detects produces; Analyze element and content in the said sample, control system can be central processing unit (CPU), microcontroller (MCU) etc.; This control system can also be preset the time of X-ray generator emission primary X-ray irradiation sample and the time of secondary x rays irradiation sample, and the time of the time of primary X-ray irradiation sample and secondary x rays irradiation sample is as the criterion with the ultimate analysis of satisfying in the sample.This control system can also be controlled said coupling control device: after the primary X-ray of X-ray generator emission is to sample irradiation a period of time (preset time); Control system control coupling control device makes it can control X-ray generator and turns to secondary target platform, thereby makes X-ray generator launch primary X-ray to the secondary target that is placed on the secondary target platform 50; Perhaps; After the primary X-ray of X-ray generator emission shines a period of time to the secondary target; Control system control coupling control device makes it can control X-ray generator and turns to objective table, thereby makes X-ray generator launch primary X-ray to the sample that is placed on the objective table.In other embodiments, the time of the time of X-ray generator emission primary X-ray irradiation sample and secondary x rays irradiation sample also can directly be controlled by the coupling control device.
When the spectral signal deriving means that is used for the X XRF of the present invention, element in control system operational analysis sample, the primary X-ray (continuous exciting source) of said X-ray generator emission; When this primary X-ray (continuous exciting source) shines the sample on the objective table; Sample produces XRF under the exciting of primary X-ray, detector receives this fluorescence, and gives control system with data transmission; Data are selected and handled by this control system; Draw the energy spectrogram, can know the element of high-load in the sample through this energy spectrogram, in this analytical procedure; Because the primary X-ray of X-ray generator emission is a continuous exciting source; Therefore in the energy spectrogram, have background peaks, if when the content of some elements in the sample hangs down very much, this micro-spectrogram is submerged in the background peaks can't measure their content.Therefore the present invention has increased the secondary target; The secondary x rays (monochromatic excitation source) that the secondary target produces under the exciting of the primary X-ray of X-ray generator emission; The fluorescence that sample produces under the irradiation of secondary x rays (monochromatic excitation source); Can reduce background peaks, improve the detection limit of trace element, can detect low content element and content thereof in the sample.But; The secondary x rays (monochromatic excitation source) that the secondary target produces can not the big sample of rate of induced polarization target atom ordinal number; So can not be used for doing conventional sense and full element scanning; So when doing conventional sense, need the direct excited sample coupling of primary X-ray of launching with X-ray generator with full element scanning.Thereby the spectral signal deriving means of the X of being used for XRF of the present invention uses with control system and can reach with same instrument; One-shot measurement is just accomplished the test to high-load in the sample and low content element, has improved the accuracy and the efficient of test greatly.
In addition, the present invention utilizes control system control coupling control device, X-ray generator, can carry out the switching of two light paths fast, and control is simple, convenient.And the present invention utilizes stepper motor to carry out the switching of target, can carry out the selection of different targets fast, can place a lot of targets as requested.Further, two light paths have all been used collimating apparatus, and it is not influenced mutually, and are safe and reliable.
Embodiment of the present invention also provides the analytical approach of element in a kind of sample, comprising:
To said sample emission primary X-ray, survey the fluorescence that produces when said sample is shone by said primary X-ray; To said sample emission secondary x rays, survey the fluorescence that produces when said sample is shone by said secondary x rays; The fluorescence that produces when receiving said primary X-ray and secondary x rays irradiation according to the said said sample that detects obtains corresponding spectral signal and analyzes element and the content in the said sample.Wherein, said secondary x rays is produced under the irradiation of primary X-ray by the secondary target.
The analytical approach of element in the sample of the present invention is used primary X-ray and secondary x rays together, can detect the element and the low content element of the high-load in the sample.
Though the present invention discloses as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art are not breaking away from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (6)
1. spectral signal deriving means that is used for Xray fluorescence spectrometer comprises:
Objective table is used to carry sample;
X-ray generator is used to launch primary X-ray;
Detector is used to survey the fluorescence that produces when said sample receives x-ray bombardment, obtains corresponding spectral signal;
It is characterized in that, also comprise:
Secondary target platform is used to place the secondary target;
The coupling control device is used to control the primary X-ray that said X-ray generator makes its emission and shines said sample or said secondary target, and the secondary x rays that said secondary target produces when receiving said primary X-ray irradiation exposes to said sample;
Said coupling control device comprises motor and the rotating mechanism that is connected with motor, is rotated by the said rotating mechanism of said motor-driven, and said X-ray generator rotates under the driving of rotating mechanism;
Said rotating mechanism is the worm gear wheelwork, and this worm gear wheelwork comprises worm gear and worm screw, and by said motor-driven worm screw, said worm screw drives worm gear and rotates; Said X-ray generator is arranged on the said worm gear;
Said coupling control device also comprises first optoelectronic switch and second optoelectronic switch; Be located at respectively on the said worm gear; When X-ray generator is in the position of sample emission primary X-ray on objective table; First optoelectronic switch is controlled said motor and is quit work, and X-ray generator is in when the position of secondary target emission primary X-ray, and second optoelectronic switch is controlled said motor and quit work.
2. the spectral signal deriving means that is used for Xray fluorescence spectrometer as claimed in claim 1; It is characterized in that; Also comprise stepper motor and slide block, said secondary target platform slides and is located on the said slide block, and said stepper motor is used to drive said secondary target platform and on said slide block, slides.
3. the spectral signal deriving means that is used for Xray fluorescence spectrometer as claimed in claim 1; It is characterized in that; The maximum rotation stroke of said worm gear wheelwork is 45 °; Said worm gear is that 0 ° position is provided with said first optoelectronic switch in rotational travel, is that 45 ° position is provided with said second optoelectronic switch in rotational travel.
4. the spectral signal deriving means that is used for Xray fluorescence spectrometer as claimed in claim 1 is characterized in that, the said secondary target that is positioned on the secondary target platform is a plurality of, and the atomic number of said a plurality of secondary targets is different.
5. the spectral signal deriving means that is used for Xray fluorescence spectrometer as claimed in claim 1; It is characterized in that; Also comprise first collimating apparatus, between said X-ray generator and said objective table, be used for the primary X-ray of the said X-ray generator emission of collimation.
6. the spectral signal deriving means that is used for Xray fluorescence spectrometer as claimed in claim 1 is characterized in that, also comprises second collimating apparatus, between said secondary target platform and said objective table, is used for the secondary x rays that collimation secondary target produces.
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| CN102841108B (en) * | 2012-03-09 | 2014-12-17 | 深圳市华唯计量技术开发有限公司 | Polarization secondary target energy dispersion type X-ray fluorescent spectrograph |
| CN104198508B (en) * | 2014-09-30 | 2017-12-08 | 江苏天瑞仪器股份有限公司 | A kind of food heavy metal detector with optical filter handoff functionality |
| CN104502387B (en) * | 2014-12-31 | 2018-03-30 | 江苏天瑞仪器股份有限公司 | A kind of X fluorescence spectrum analysis automatic calibration method and caliberating device |
| CN105510369B (en) * | 2015-12-22 | 2019-11-22 | 北京安科慧生科技有限公司 | A kind of dedicated x-ray fluorescence energy disperse spectroscopy of high-precision cement industry |
| CN105866157B (en) * | 2016-05-26 | 2018-08-10 | 深圳市华唯计量技术开发有限公司 | A kind of PM2.5 heavy metals on-line checking X fluorescence spectrometer |
| CN107797155A (en) * | 2016-08-31 | 2018-03-13 | 合肥美亚光电技术股份有限公司 | Compton backscattering detection means |
| CN107664538A (en) * | 2017-10-16 | 2018-02-06 | 中国科学院上海硅酸盐研究所 | Optic temperature sensor based on novel oxidized titanium-based glass up-conversion luminescence performance |
| CN110083091A (en) * | 2019-04-11 | 2019-08-02 | 成都理工大学 | The EDXRF secondary target automatic control device of multipotency X-ray |
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