CN102122070B - Design method of reflective optical integrator based on planar mirror array - Google Patents
Design method of reflective optical integrator based on planar mirror array Download PDFInfo
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Abstract
The invention belongs to the technical field of optical device designs, in particular relates to a design method of a reflective optical integrator based on a planar mirror array. The method comprises the following steps of: confirming the center of integrator plane units; confirming the directions of the integrator plane units; confirming the position parameter and the direction parameter of an integrator array in a Y direction; confirming the position parameter and the direction parameter of the integrator array in an X direction; establishing an integrator model; and designing a processing path according to the designed integrator model and carrying out ultrafine turning and processing. Compared with a traditional transmission-type integrator, the reflective integrator designed by using the method provided by the invention has simple structure, good stability and superior uniformly distributed illumination intensity under the condition of the same incident light energy.
Description
Technical field
The invention belongs to the optical device designs technical field, be specifically related to a kind of optical integrator.
Background technology
The integration illumination is integrated into the uniform light of irradiation to rambling light through optical system exactly, perhaps realizes brightness raising and even, can be widely used in fields such as green energy resource, space technology.Optical integrator is most important optical device in the integration illumination.According to the propagation law of light, optical integrator can be divided into refractive (transmission-type) and reflection-type.The optical integrator of refractive such as microlens array, general refractive optical integrator is used for coaxial system, and the shortcoming of coaxial system is exactly optical path length, causes the appearance profile of optical system big.Utilize microlens array to finish the mode of all light that all only generally adopts at present of light beam, so but owing to utilized lens can introduce some shortcomings of lens, big as aberration, light loss is serious etc., these shortcomings can influence the homogeneity of the light beam of receiving plane.And the reflection-type integrator adopts from the axle mode, reduced optical path length, take up room little.The more important thing is that integrator has replaced refracting telescope with catoptron, thereby reduced the influence of aberration to light path, also reduced the absorption loss of refractive material to optical radiation energy simultaneously, increased energy utilization ratio.
Because reflection-type integrator contour structures complexity, processing are difficult for realizing that there be limited evidence currently of uses.But along with development and the maturation of nanotechnolgy, especially adopt the development with the servo single-point diamond cutting technology of cutter, for the processing of complicated shape optical device provides strong instrument, for the application of reflection-type integrator provides guarantee.Therefore, the numerous application advantages in view of the reflection-type integrator are necessary to carry out the research of reflection-type integrator design aspect.
Summary of the invention
The objective of the invention is to propose a kind of reflection-type integrator design method of simple possible.The planar array that the present invention adopts a plurality of planes to form is carried out the reflection-type integrator design, and the reflection that will be parallel to the light process integrator of optical axis converges on the square plane, and realizes the good homogeneous illumination.Technical scheme of the present invention is as follows:
A kind of reflection-type optical integrator design method based on the level crossing array, this kind reflection-type optical integrator comprises a plane reflection lens array, planar central with plane mirror array center place is true origin, opposite direction with directional light incident is the Z axle, set up rectangular coordinate system, after the directional light process reflection of integrator of Z axle, arrive receiving plane; The structural parameters of integrator comprise that each flat unit is along the length of side of X-axis and Y-axis, the length of side 2d of receiving plane and the focal distance f of integrator, the location parameter of each flat unit comprises the coordinate of unit center point, respectively around the anglec of rotation of X-axis and Y-axis and around the coordinate of the rotation center of X-axis and Y-axis rotation, its method for designing comprises:
The first step. determining of integrator flat unit center:
(1) determines paraboloidal focal distance f according to the distance of receiving plane and reflecting surface, thereby obtain paraboloidal equation: X
2+ Y
2=4fZ,
(2) determine to be positioned at the length of side of the integrator unit at true origin place according to the size of receiving plane, both numerical value equates,
(3) parabola in (1) is divided into a series of grids at the XOY face, the boundary line of grid is parallel to X-axis and Y-axis, with on the grid each the point as the projection of integrator unit center on the XOY face, the integrator unit center at initial point place is (0,0,0), position according to the point on ray tracing and the grid, determine the position at each integrator unit center, for each integrator unit center, respectively according to following location parameter and the direction parameter of second step to the 4th mode that goes on foot along Y-direction and its corresponding each flat unit of directions X iterative computation;
Second step. for each integrator unit center, establish its coordinate on the XOY face and be respectively X
0And Y
0, its tangent line vector on parabola is K[k
1, k
2], k
1=-X
0/ (2f), k
2=-Y
0/ (2f), and it is vertical with parabolic tangential direction to establish the direction of method vector of flat unit, determines the normal vector [a, b, c] of its corresponding flat unit according to following method,
Thereby determine the direction of flat unit;
The 3rd step. determine location parameter and the direction parameter of integrator array on Y-direction: establish A
iBe previous flat unit and the marginal point of current flat unit on Y-direction, then A
iBe known; A
I+1Be a bit that current flat unit is connected with this marginal point, A
i=A is according to A
i(X
i, Y
i, Z
i) and the integrator unit center can determine that the center of the flat unit on the Y-direction is at the coordinate figure Z of Z direction
1=a* (X
0-X
i)+b* (Y
0-Y
i)+Z
i, again according to the normal vector of flat unit, try to achieve the flat unit centre coordinate value P on the Y-direction
1(X
1, Y
1, Z
1), so just obtained location parameter and the direction parameter of flat unit on Y-direction.
The 4th step. determine location parameter and the direction parameter of integrator array on directions X: establish B
iBe previous flat unit and the marginal point of current flat unit on directions X, then B
iBe known; B
I+1Be a bit that current flat unit is connected with this marginal point, B
i=B is according to B
i(X
i, Y
i, Z
i) and the integrator unit center can determine that flat unit center on the directions X is at the coordinate figure Z of Z direction
2=a* (X
i-X
0)+b* (Y
i-Y
0)+Z
i, again according to the normal vector of flat unit, try to achieve the planar central coordinate figure P on the directions X
2(X
2, Y
2, Z
2), so just obtained location parameter and the direction parameter of flat unit on directions X;
The 5th step. set up the integrator model:
(1) determines the location parameter of integrator: according to position and the direction of integrator unit in directions X and Y-direction, can calculate the corner a of planar array on X and Y-direction respectively
0=pi/2-arccos (a) and b
0=pi/2-arccos (b), wherein, a
0Represent the plane around the corner of Y-axis; b
0Represent the plane around the corner of X-axis;
(2) determine the structural parameters of integrator: try to achieve flat unit respectively at the rectangle length of side d of X-axis and Y-axis
1=d/cos (a) and d
2=d/cos (b), wherein d
1Represent the length of flat unit on X-direction; d
2Represent the length of flat unit on Y direction;
(3) obtain integrator model on the X-axis positive dirction according to the method described above, this integrator model is carried out symmetry expansion about Y-axis at directions X, just obtained an integrator model about the Y-axis symmetry;
(4) remove near the planar array that is positioned on the integrator model about the Y-axis symmetry integrator center, to realize the purpose of off axis reflector;
The 6th step. according to designed integrator modelling machining path, carry out ultra-precise cutting processing.
The optical integrator of conventional refractive needs convergent lens that the light beam of second microlens array is assembled, and could realize the purpose of even light.The optical integrator of the refractive of comparing, the reflective optic integrator of the present invention's design does not just need convergent lens, directly can form even illumination profile at receiving plane, only needs a catoptron can realize the effect of refractive integrator.The reflection-type integrator of the present invention's design is simpler than traditional transmission-type integrator structure, and good stability, under the energy situation of identical incident light, being evenly distributed of more outstanding intensity of illumination arranged, especially the light intensity distributions of receiving plane edge is more stable.And because reduced aberration and transmission loss, arrive the receiving plane energy and also have increased significantly.
Description of drawings
The one-piece construction figure of Fig. 1 integrator of the present invention.
Fig. 2 designs overall flow figure.
The flat unit of Fig. 3 integrator center.
Fig. 4 integrator is along the unit of directions X.
Fig. 5 integrator is along the unit of Y-direction.
The line drawing of Fig. 6 integrator.
The integrator model of Fig. 7 (a) on the X-axis positive dirction; (b) about the integrator model of Y-axis symmetry; (c) remove near the planar array that is positioned on the integrator model integrator center.
Embodiment
The integrator of the present invention's design is made up of the plane mirror array, as shown in Figure 1.Planar central with the integrator center is true origin, is the Z axle with the opposite direction of directional light incident, sets up rectangular coordinate system as shown in Figure 1.The location parameter of integrator comprises that the coordinate, each flat unit of unit center point are along the length of side of X-axis and Y-axis, the length of side of receiving plane and the focal length of integrator.The direction parameter of each flat unit comprises that flat unit is respectively around the anglec of rotation of X-axis and Y-axis and around the coordinate of the rotation center of X-axis and Y-axis rotation.
Fig. 1 is the one-piece construction figure of integrator, after the directional light process reflection of integrator of Z axle, arrives receiving plane.If will realize the even light of integrator, key is exactly the position of wanting each unit of accurate Calculation, namely determines the size of planar array unit according to the size of receiving plane, and planar array is centered on the effect of all light that X-axis and Y-axis are carried out the rotation realization integrator of special angle.Referring to Fig. 2, the design key step of integrator of the present invention is as follows.
1. be positioned at the determining of integrator unit at true origin place.Need determine according to the focal length of integrator and the size of receiving plane.
2. finish the integrator unit CALCULATION OF PARAMETERS on the Y direction, mainly determine integrator unit centre coordinate, the corner around X-axis on Y direction, the coordinate of rotation center and the length of side of integrator unit.
3. finish the integrator unit CALCULATION OF PARAMETERS on the X-direction successively, mainly determine integrator unit centre coordinate, the corner around Y-axis on X-direction, the coordinate of rotation center and the length of side of integrator unit.
4. according to the center of integrator unit, in 3D software, set up model with the anglec of rotation of X-axis and Y-axis and the coordinate of rotation center and the length of side of integrator respectively, finish the foundation of processing model.
5. determined after the stereoscopic model of integrator, can process the material object of integrator according to the ultra-precise cutting technology, and can the control surface roughness in tens nanometer range.
The definite concrete implementation step at the integrator flat unit center of mentioning in the invention process process is:
(1) determines paraboloidal focal distance f according to the distance of receiving plane and reflecting surface, thereby obtain paraboloidal equation: X
2+ Y
2=4fZ,
(2) determine to be positioned at the length of side of the integrator unit at true origin place according to the size of receiving plane, both numerical value equates,
(3) parabola in (1) is divided into a series of grids at the XOY face, the boundary line of grid is parallel to X-axis and Y-axis, point on the grid is the projection of planar array center on the XOY face, that is to say that the coordinate of planar array center on X and Y-direction is definite.The integrator unit center at initial initial point place is (0,0,0), in order to determine the position at other integrator unit centers, needs to determine the coordinate of integrator flat unit center on the Z direction.In case determined the integrator unit centre coordinate, also just determined the location parameter of integrator unit.
The concrete implementation step of the location parameter of the flat unit of the integrator on the Y direction of mentioning in the invention process process and definite method of direction parameter is:
(1) determine the direction of flat unit, method is to determine that in the tangential direction at this some place the direction of this flat unit method vector is vertical with parabolic tangential direction according to parabola.X according to the center of known integrator flat unit
0And Y
0, can obtain the method vector K[k that this plane is located
1, k
2], have:
k
1＝-X
0/(2f) (1)
k
2＝-Y
0/(2f) (2)
Normalized obtains the normal vector K ' [a, b, c] on plane.
So just obtain the normal vector of flat unit, thereby determined the direction of this flat unit.
(2) serial relation of foundation and a last flat unit, the continuity of assurance integrator is established A
iBe the marginal point of a last face, A
I+1Be coupled a bit, so satisfy:
A
i＝A
i+1 (6)
According to A
i(X
i, Y
i, Z
i) and O (X
0, Y
0, Z
0) can determine the planar central P that asks at the coordinate figure Z of Z direction:
Z
1＝a*(X
0-X
i)+b*(Y
0-Y
i)+Z
i (7)
Solving equation group (4), (5), (6) and (8) can obtain its center coordinate figure P
1(X
1, Y
1, Z
1), so just obtained the location parameter P on this plane
1With direction parameter K '.
The concrete implementation step of the location parameter of the integrator unit on the X-direction of mentioning in the invention process process and definite method of direction parameter is:
(1) according to the X at the center of known integrator flat unit
0And Y
0, can obtain the method vector K[k that this plane is located
1, k
2],
k
1＝-X
0/(2f) (8)
k
2＝-Y
0/(2f) (9)
Normalized obtains the normal vector K ' [a, b, c] on plane.
So just determined the direction K ' of this flat unit.
(3) in order to guarantee the continuity of integrator unit, need set up the relation of the position coordinates of this flat unit and a last flat unit.If B
iBe the marginal point of a last face, B
I+1Be coupled a bit, so satisfy:
B
i＝B
i+1 (13)
B by a last plane
i(X
i, Y
i, Z
i) and O
2(X
0, Y
0, Z
0) can determine the face center P on the plane of asking
2Coordinate figure in the Z direction:
Z
2＝a*(X
i-X
0)+b*(Y
i-Y
0)+Z
0 (14)
According to formula (11), (12), (13), (15) can obtain its center coordinate figure P
2(X
2, Y
2, Z
2).So just obtained the location parameter P of the flat unit of asking
2With direction parameter K '.
The integrator model of mentioning in the invention process process determines that the concrete implementation step of method is:
(1) determine the location parameter of integrator, according to position and the direction of integrator unit in directions X and Y-direction, can calculate the corner of planar array on X and Y-direction respectively:
a
0＝π/2-arccos(-a) (15)
b
0＝π/2-arccos(-b) (16)
A wherein
0Represent the plane around the corner of Y-axis; b
0Represent the plane around the corner of X-axis.
(2) determine the structural parameters of integrator, flat unit is in the rectangle length of side of X-axis and Y-axis:
d
1＝d/cos(a) (17)
d
2＝d/cos(b) (18)
D wherein
1Represent the length of plane on X-direction; d
2Represent the length of plane on Y direction.Can obtain the integrator profile figure shown in Fig. 7 (a).
(3) obtain integrator model on the X-axis positive dirction according to the method described above, as Fig. 7 (a), with this integrator on directions X about the Y-axis symmetry, just obtained an integrator model 7 (b) about the Y-axis symmetry.
(4) remove near the planar array that is positioned on the integrator model integrator center, to realize the purpose of off axis reflector, as Fig. 7 (c).
The method that reflection integrator of the present invention is used in the solar simulator design is as follows: according to the definite size that reflects integrator integral body of the size of incident light bore, obtain integrator overall profile figure according to the integrator principle.Light source is xenon short-act lamp in solar simulator, needs to converge on the off axis paraboloid mirror through condenser, and the collimation of process off axis paraboloid mirror obtains directional light, reenters to be mapped on the reflection integrator, realizes ray homogenization.
In order to contrast the performance of two kinds of integrators, of the present invention the incident light incident of identical energy is adopted in the emulation of two kinds of integrators, be the square directional light of 21 * 21mm, wherein the power of every light is 1W/cm
2From two integrator receiving planes to recently, the integrator of reflection-type distributes better than the irradiance homogeneity of the integrator of transmission-type, the maximal value of the power of its receiving plane is 1.49 * 10
2W/cm
2, and the maximal value of the power of the integrator of the refractive under the same terms only is 0.215W/cm
2Can see by contrast, the reflection-type integrator of the present invention's design is simpler than traditional transmission-type integrator structure, and good stability, under the energy situation of identical incident light, being evenly distributed of more outstanding intensity of illumination arranged, and especially the light intensity distributions of receiving plane edge is more stable.And because reduced aberration and transmission loss, arrive the receiving plane energy and also have increased significantly.
Claims (1)
1. reflection-type optical integrator design method based on the level crossing array, this kind reflection-type optical integrator comprises a plane reflection lens array, planar central with plane mirror array center place is true origin, opposite direction with directional light incident is the Z axle, set up rectangular coordinate system, after the directional light process reflection of integrator of Z axle, arrive receiving plane; The structural parameters of integrator comprise that each flat unit is along the length of side of X-axis and Y-axis, the length of side 2d of receiving plane and the focal distance f of integrator, the location parameter of each flat unit comprises the coordinate of unit center point, respectively around the anglec of rotation of X-axis and Y-axis and around the coordinate of the rotation center of X-axis and Y-axis rotation, its method for designing comprises:
The first step. determining of integrator flat unit center:
(1) determines the focal distance f of integrator according to the distance of receiving plane and reflecting surface, thereby obtain paraboloidal equation: X
2+ Y
2=4fZ,
(2) determine to be positioned at the length of side of the integrator unit at true origin place according to the size of receiving plane, both numerical value equates,
(3) parabola in (1) is divided into a series of grids at the XOY face, the boundary line of grid is parallel to X-axis and Y-axis, with on the grid each the point as the projection of integrator unit center on the XOY face, the integrator unit center at initial point place is (0,0,0), position according to the point on ray tracing and the grid, determine the position at each integrator unit center, for each integrator unit center, respectively according to following location parameter and the direction parameter of second step to the 4th mode that goes on foot along Y-direction and its corresponding each flat unit of directions X iterative computation;
Second step. for each integrator unit center, establish its coordinate on the XOY face and be respectively X
0And Y
0, its tangent line vector on parabola is K[k
1, k
2], k
1=-X
0/ (2f), k
2=-Y
0/ (2f), and it is vertical with parabolic tangential direction to establish the direction of method vector of flat unit, determines the normal vector [a, b, c] of its corresponding flat unit according to following method,
Thereby determine the direction of flat unit;
The 3rd step. determine location parameter and the direction parameter of integrator array on Y-direction: establish A
iBe previous flat unit and the marginal point of current flat unit on Y-direction, then A
iBe known; A
I+1Be a bit that current flat unit is connected with this marginal point, A
i=A is according to A
i(X
i, Y
i, Z
i) and the integrator unit center can determine that the center of the flat unit on the Y-direction is at the coordinate figure Z of Z direction
1=a* (X
0-X
i)+b* (Y
0-Y
i)+Z
i, again according to the normal vector of flat unit, try to achieve the flat unit centre coordinate value P on the Y-direction
1(X
1, Y
1, Z
1), so just obtained location parameter and the direction parameter of flat unit on Y-direction;
The 4th step. determine location parameter and the direction parameter of integrator array on directions X: establish B
iBe previous flat unit and the marginal point of current flat unit on directions X, then B
iBe known; B
I+1Be a bit that current flat unit is connected with this marginal point, B
i=B is according to B
i(X
i, Y
i, Z
i) and the integrator unit center can determine that flat unit center on the directions X is at the coordinate figure Z of Z direction
2=a* (X
i-X
0)+b* (Y
i-Y
0)+Z
i, again according to the normal vector of flat unit, try to achieve the planar central coordinate figure P on the directions X
2(X
2, Y
2, Z
2), so just obtained location parameter and the direction parameter of flat unit on directions X;
The 5th step. set up the integrator model:
(1) determines the location parameter of integrator: according to position and the direction of integrator unit in directions X and Y-direction, can calculate the corner a of planar array on X and Y-direction respectively
0=pi/2-arccos (a) and b
0=pi/2-arccos (b), wherein, a
0Represent the plane around the corner of Y-axis; b
0Represent the plane around the corner of X-axis;
(2) determine the structural parameters of integrator: try to achieve flat unit respectively at the rectangle length of side d of X-axis and Y-axis
1=d/cos (a) and d
2=d/cos (b), wherein d
1Represent the length of flat unit on X-direction; d
2Represent the length of flat unit on Y direction;
(3) obtain integrator model on the X-axis positive dirction according to the method described above, this integrator model is carried out symmetry expansion about Y-axis at directions X, just obtained an integrator model about the Y-axis symmetry;
(4) remove near the planar array that is positioned on the integrator model about the Y-axis symmetry integrator center, to realize the purpose of off axis reflector;
The 6th step. according to designed integrator modelling machining path, carry out ultra-precise cutting processing.
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| CN1549047A (en) * | 2003-05-15 | 2004-11-24 | 乐金电子（沈阳）有限公司 | Integrator and projector using the same principle |
| CN1894604A (en) * | 2003-12-10 | 2007-01-10 | 皇家飞利浦电子股份有限公司 | Optical integrator |
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| CN1549047A (en) * | 2003-05-15 | 2004-11-24 | 乐金电子（沈阳）有限公司 | Integrator and projector using the same principle |
| CN1894604A (en) * | 2003-12-10 | 2007-01-10 | 皇家飞利浦电子股份有限公司 | Optical integrator |
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