CN102121899B - Surface plasma resonance sensor - Google Patents
Surface plasma resonance sensor Download PDFInfo
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- CN102121899B CN102121899B CN 201010002516 CN201010002516A CN102121899B CN 102121899 B CN102121899 B CN 102121899B CN 201010002516 CN201010002516 CN 201010002516 CN 201010002516 A CN201010002516 A CN 201010002516A CN 102121899 B CN102121899 B CN 102121899B
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- optical fiber
- surface plasma
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Abstract
The invention discloses a surface plasma resonance sensor, in particular to a portable surface plasma resonance sensor with an optical fiber sensing unit of which the surface plasma resonance wavelength is positioned within a transmission waveband of a monomode optical fiber or a multimode optical fiber. The surface plasma resonance sensor comprises a light source unit, an optical fiber sensing unit, an optical sensor, a plurality of optical fibers and an operation display unit, wherein the optical fiber sensing unit is provided with a groove, a cladding layer, a core layer, a first metal layer and a plurality of dielectric film layers, wherein the first metal layer is positioned above the groove; the plurality of dielectric film layers are formed on the first metal layer; a light source provided by the light source unit can generate an optical signal after passing the optical fiber sensing unit; and the optical sensor correspondingly converts the optical signal into an electric signal to be used for the operation of the operation display unit.
Description
Technical field
The present invention relates to a kind of surface plasma body resonant vibration sensing instrument, refer to a kind of easy to carryly especially, and the surface plasma body resonant vibration wavelength of its optical fiber sensing cell is the surface plasma body resonant vibration sensing instrument that is positioned at the transmission wave band of single-mode fiber or multimode optical fiber.
Background technology
For the application of medical treatment detection or environment measuring, the kind and the concentration that detect biomolecule quickly and accurately are very important.Especially in the occasion that environment is poisoned, treatment people must detect kind and the concentration of the objectionable impurities at disaster scene earlier, and they could determine follow-up relevant handling procedure according to testing result, to lower the risk of handling.So simple and easy degree and the portability of the degree of accuracy of analytical instrument, sensitivity, operating process are all extremely important.
At present, industry has used a kind of surface plasma body resonant vibration sensing instrument that utilizes surface plasma body resonant vibration effect (Surface PlasmonResonance Effect) principle to detect to detect kind and the concentration of the biomolecule of trace.This kind surface plasma body resonant vibration effect sensing instrument has: 1. the sensing required time is short; 2. do not need in advance determinand to be carried out mark (1able-free); 3. required sample size is few; 4. can online real-time sensing determinand and its ligand (ligand) between reciprocation; And 5. sensing sensitivity advantages of higher.
Fig. 1 is the synoptic diagram of known surface plasma body resonant vibration sensing instrument, and it comprises incident light source 11, incident light processing unit 12, prism 13, metal level 14, optical sensor 15, determinand load bearing unit 16 and spectrometer 17.Wherein, incident light source 11 is to be laser diode, and incident light processing unit 12 then comprises beam expander 121, polariscope 122, spectroscope 123 and focus lamp 124.So after incident light source 11 light that produces was through incident light processing unit 12, it just had specific frequency, mode and polarised direction, for the usefulness of detection.In addition, metal level 14 is to be positioned at the back side of prism 13 and is that the mode of using evaporation or sputter forms gold or silver-colored particle deposition in prism 13 surfaces.When detecting, the light that incident light source 11 produces is earlier by incident light processing unit 12, first side 131 of entrance prism 13 again.This light is then reflected by metal level 14, and penetrates from second side 132 of prism 13, enters optical sensor 15 again.At last, optical sensor 15 is an electric signal with its light signal corresponding conversion that receives and provides it to spectrometer 17 to analyze the variation of its spectral distribution.
But, because this kind surface plasma body resonant vibration sensing instrument is bulky, and the relative position between its each element must accurately be kept, otherwise just can't correctly be positioned at the metal layer reflection at its prism back side from the light of its incident light processing unit institute outgoing, just can't arrive its optical sensor smoothly.Therefore, this kind surface plasma body resonant vibration sensing instrument is extremely low and easily because accident collision damages, it also is not suitable for allowing the disaster treatment people carry to the disaster scene for the tolerance of vibration.
In addition, because the surface plasma body resonant vibration wavelength of the optical fiber sensing cell of present employed surface plasma body resonant vibration sensing instrument and the transmission wave band of single-mode fiber or multimode optical fiber still have no small gap, so that the surface plasma body resonant vibration signal that the optical fiber sensing cell produces can't transmit in the single-mode fiber (or multimode optical fiber) that is connected with the optical fiber sensing cell effectively, cause the generation of loss of signal, and then reduce detection efficiency and the accuracy of known surface plasma body resonant vibration sensing instrument.
Therefore, the industry utmost point needs a kind of easy to carry, and the surface plasma body resonant vibration wavelength of its optical fiber sensing cell is the surface plasma body resonant vibration sensing instrument that is positioned at the transmission wave band of single-mode fiber or multimode optical fiber, so that the disaster treatment people can carry and detect quickly and accurately at the disaster scene, and have higher detection efficient and accuracy.
Summary of the invention
The objective of the invention is to disclose a kind of surface plasma body resonant vibration sensing instrument, it is easy to carry, simple to operate rapidly, detection efficiency and accuracy are higher, and the surface plasma body resonant vibration wavelength of its optical fiber sensing cell is the transmission wave band that is positioned at single-mode fiber or multimode optical fiber.
For reaching above-mentioned purpose, technical solution of the present invention is:
A kind of surface plasma body resonant vibration sensing instrument is to comprise: a light source cell is in order to a light source to be provided; One has the optical fiber sensing cell of a groove, a coating layer, a core layer, a first metal layer and most layer dielectric film layers, and this coating layer is surrounded in it this core layer, and this light source also produces a light signal by this optical fiber sensing cell; One optical sensor is to be an electric signal in order to this light signal and the corresponding conversion of sensing by this optical fiber sensing cell; Many optical fiber are to connect this light source cell, this optical fiber sensing cell and this optical sensor respectively; And a computing display unit that connects this optical sensor, this computing display unit is accepted this electric signal of optical sensor since then and is shown the result of computing gained.Wherein, this first metal layer is to be positioned on this groove, and these dielectric film layers then are formed on this first metal layer.
Surface plasma body resonant vibration sensing instrument of the present invention can use the light source cell of any kind of, and it is preferably laser diode (Laser Diode) or light emitting diode (LED).Surface plasma body resonant vibration sensing instrument of the present invention can have the optical sensor of any kind of, and it is preferably optical diode sensor or charge coupled sensor (CCD Detector).The groove of the optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention can utilize any process to make, and it is preferably and utilizes side grinding (sidepolish) technology or etch process to form.The optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention can have most layer dielectric film layers of any number of plies, and its number of plies is preferable between 3 to 5 layers.The optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention can have the surface plasma body resonant vibration wavelength of any numerical value, and its surface plasma body resonant vibration wavelength is preferable between between the 840nm to 860nm or between the 1300nm to 1320nm.Surface plasma body resonant vibration sensing instrument of the present invention can also comprise the temperature sensor of an any kind of, and to measure the temperature of sample cell, this temperature sensor is preferably dipole thermometer.Surface plasma body resonant vibration sensing instrument of the present invention can also comprise the temperature controller of an any kind of, and to keep the temperature of sample cell, this temperature controller is preferably electric resistance heater or thermoelectric cooling module (TE cooler).Surface plasma body resonant vibration sensing instrument of the present invention can use the optical fiber of any kind of, and it is preferably single-mode fiber or multimode optical fiber.Surface plasma body resonant vibration sensing instrument of the present invention can also comprise the joints of optical fibre of most any kinds, and these optical fiber are connected in this optical fiber sensing cell, it is preferably the FC type joints of optical fibre, the ST type joints of optical fibre or the LC type joints of optical fibre.Surface plasma body resonant vibration sensing instrument of the present invention can also comprise the power supply unit of an any kind of, and it is preferably an electric battery or a plug.
The invention has the advantages that:
Because surface plasma body resonant vibration sensing instrument of the present invention is to utilize multimode optical fiber to transmit light signal between light source cell, optical fiber sensing cell and optical sensor, propagates but not allow light signal directly be exposed in the atmosphere.So, surface plasma body resonant vibration sensing instrument of the present invention can bear to a certain degree collision and the stability of its light path of induced damage resistive not, and therefore the overall volume of surface plasma body resonant vibration sensing instrument of the present invention also can dwindle further, and its portability is increased further.In addition, since on the groove of the optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention except forming a first metal layer, also form most layer dielectric film layers on this first metal layer, make the surface plasma body resonant vibration wavelength of optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention to be adjusted in the transmission wave band of single-mode fiber or multimode optical fiber by the mode of rete design, to lower because of the loss of signal that difference was caused between the transmission wave band of the surface plasma body resonant vibration wavelength that is present in the optical fiber sensing cell and single-mode fiber or multimode optical fiber.
Description of drawings
Fig. 1 is the synoptic diagram of known surface plasma body resonant vibration sensing instrument;
Fig. 2 A is the synoptic diagram of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention;
Fig. 2 B is the synoptic diagram of the optical fiber sensing cell in the surface plasma body resonant vibration sensing instrument of one embodiment of the invention;
Fig. 2 C is the diagrammatic cross-section of the optical fiber sensing cell in the surface plasma body resonant vibration sensing instrument of one embodiment of the invention;
Fig. 3 shows to use the surface plasma resonance optical spectrum figure of the same sample gained of optical fiber sensing cell sensing of the surface plasma body resonant vibration sensing instrument of the optical fiber sensing cell of any dielectric film layer of tool and one embodiment of the invention not respectively;
The surface plasma body resonant vibration sensing instrument that Fig. 4 is to use one embodiment of the invention is the synoptic diagram of the testing result of the glucose solution gained of sensing variable concentrations respectively.
The main element symbol description:
11 incident light sources, 12 incident light processing units
121 beam expander, 122 polariscopes
123 spectroscopes, 124 focus lamps
13 prisms, 131 first sides
132 second sides, 14 metal levels
15 optical sensors, 16 determinand load bearing units
2 surface plasma body resonant vibration sensing instrument, 21 shells
22 light source cells, 23 sample cells
24 optical fiber sensing cells, 241 grooves
242 coating layers, 243 core layers
244 the first metal layers, 245 dielectric film layers
2,451 first silica membrane layers, 2452 titanium deoxid film layer
2,453 second silica membrane layers, 246 second metal level
25 optical sensors, 26 solution accumulator tanks
261,262 conduits, 263 inlets
27 computing display units, 271 key groups
272 display screens 281,282 optical fiber
29 power supply units
Embodiment
See also Fig. 2 A, Fig. 2 B and Fig. 2 C, wherein Fig. 2 A is the synoptic diagram of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention, Fig. 2 B is the synoptic diagram for the optical fiber sensing cell in the surface plasma body resonant vibration sensing instrument of one embodiment of the invention, Fig. 2 C then is the diagrammatic cross-section of the optical fiber sensing cell in the surface plasma body resonant vibration sensing instrument of one embodiment of the invention, and is CC ' the profile line gained along Fig. 2 B.Shown in Fig. 2 A and Fig. 2 B, the surface plasma body resonant vibration sensing instrument 2 of one embodiment of the invention has a shell 21, a light source cell 22, sample groove 23, an optical fiber sensing cell 24, an optical sensor 25, a solution accumulator tank 26, a computing display unit 27, many optical fiber 281,282 and one power supply unit 29.Wherein, optical fiber sensing cell 24 is to be positioned at sample cell 23 and to comprise a groove 241, a coating layer 242, a core layer 243, a first metal layer 244, most layer dielectric film layer 245 and one second metal level 246.
And shown in Fig. 2 B, coating layer 242 is that core layer 243 is surrounded in it, and the first metal layer 244 is to be positioned on the groove 241, and 245 on most layer dielectric film layers are formed on the first metal layer 244.In addition, shown in Fig. 2 C, most layer dielectric film layers 245 are to comprise 3 layers of dielectric film layer, namely the first silica membrane layer 2451, be positioned at the titanium deoxid film layer 2452 on the first silica membrane layer 2451 and be positioned at the second silica membrane layer 2453 on the titanium deoxid film layer 2452.In the present embodiment, the thickness of the first silica membrane layer 2451 is about 30nm, and the thickness of titanium deoxid film layer 2452 is about 60nm, and the thickness of the second silica membrane layer 2453 then is about 30nm.Generally speaking, the material of the first metal layer 244 and second metal level 246 is to be gold or silver-colored.
In this enforcement, light source cell 22 is to be laser diode, and the light source that light source cell 22 produces is to be passed to the optical fiber sensing cell 24 that is positioned at sample cell 23 by multimode optical fiber 281.Afterwards, then be passed to optical sensor 25 by another multimode optical fiber 282 by optical fiber sensing cell 24 and the light signal that has a testing sample relevant information.Then, optical sensor 25 is an electric signal with this light signal corresponding conversion just, and with this electrical signal transfer to computing display unit 27, further to calculate.
In the present embodiment, computing display unit 27 is to accept the steering order that comes from the outside in order to the running of the surface plasma body resonant vibration sensing instrument 2 of controlling one embodiment of the invention and by the key groups 271 that is positioned at shell 21 surfaces.In addition, computing display unit 27 and the results are shown in of its computing is arranged in the display screen 272 on shell 21 surfaces.Required electric power during as for surface plasma body resonant vibration sensing instrument 2 running of one embodiment of the invention, then provided by power supply unit 29, it can be plug or an electric battery (being applied to use the place of civil power, as outdoor detection occasion) of a cooperation one transformer.
In addition, solution accumulator tank 26 accommodates the solution that the suitable detection environment can be provided, this solution also flows into respectively and flows out sample cell 23 via conduit 261 and conduit 262, so that be in the steady state (SS) state of specified temp, specific pH value or specific refractive index (as be in) in the sample cell 23.This solution generally comprises a damping fluid, and as normal saline solution or deionized water etc., and this solution can be injected into solution accumulator tank 26 via the inlet 263 that is arranged in shell 21 surfaces.In addition, solution accumulator tank 26 has more a manifold valves (not shown), to control flowing of this solution.
For another example shown in Fig. 2 B, the optical fiber sensing cell 24 of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention is through surface grinding (side-polish) technology with multimode optical fiber, making it have a groove 241 (its length is about 5mm, and its degree of depth then is about 62.5 μ m) forms.Because the degree of depth of groove 241 is greater than the thickness of the coating layer 242 of multimode optical fiber, so the core layer 243 of multimode optical fiber just comes out.But be noted that the length of groove 241 and the degree of depth are not as limit, it can change to some extent according to the kind of the sample of required detection and testing environment (as the refractive index of solution).
In addition, the optical fiber sensing cell 24 of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention is to utilize dc sputtering (DC sputtering) or other method in surface deposition one the first metal layer 244 (its thickness is about 40nm) of groove 241.Subsequently, be adjusted to for the surface plasma body resonant vibration wavelength with the optical fiber sensing cell of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention in the transmission wave band of single-mode fiber or multimode optical fiber (namely between between the 840nm to 860nm or between the 1300nm to 1320nm), recycling dc sputtering (DC sputtering) or other method form most layer dielectric film layers 245 on the first metal layer 244.Be noted that, though in this enforcement, most layer dielectric film layers 245 are to comprise 3 layers of dielectric film layer (the first silica membrane layer 2451, titanium deoxid film layer 2452 and the second silica membrane layer 2453), but under different applicable cases, most layer dielectric film layers 245 still can be the dielectric film layer with different numbers of plies, and are repeatedly formed layer by layer by the dielectric film of unlike material.
At last, for the intensity that improves surface plasma body resonant vibration (SPR effect) effect and the degree of stability of sample combination, the optical fiber sensing cell 24 recycling dc sputterings (DC sputtering) of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention or other method form one second metal level 246 on most layer dielectric film layers 245.
Then, the trace routine of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention will cooperate Fig. 2 A to Fig. 2 C to be described in down:
At first, the optical fiber sensing cell 24 that will have testing sample is placed in the sample cell 23, and the joints of optical fibre (not shown) that recycling is positioned at its two ends makes it be connected to multimode optical fiber 281 and multimode optical fiber 282.So, the light source that light source cell 22 produces just can be by being arranged in the optical fiber sensing cell 24 of sample cell 23, and arrive optical sensor 25.
Then, start the pump (not shown), the solution that is stored in solution accumulator tank 26 is originally flowed into and outflow sample cell 23 via conduit 261 and conduit 262 constantly, form a circulation system.In addition, the inboard of this solution accumulator tank 26 has a dipole thermometer (not shown) and a thermoelectric cooling module (not shown), with the temperature that measures solution respectively and keep the stable of its temperature.After the temperature convergence of solution was stable, computing display unit 27 was just opened light source cell 22, makes it launch a light source with particular frequency range and intensity, and this light source just arrives the optical fiber sensing cell 24 that is arranged in sample cell 23 via multimode optical fiber 281.
At this moment, owing to be positioned at the cause of testing sample on second metal level, 246 surfaces of optical fiber sensing cell 24, surface plasma body resonant vibration effect (SurfacePlasmon Resonance effect) just takes place in this optical fiber sensing cell 24, namely when this light source by behind the optical fiber sensing cell 24, its spectral distribution (spectrum distribution) can be because the acting force between the kind of testing sample, concentration or itself and second metal level 246 different and variation that generation is corresponding.
As previously mentioned, after this light source passed through optical fiber sensing cell 24, its spectral distribution changed, and arrived optical sensor 25 via multimode optical fiber 282.The light signal corresponding conversion that optical sensor 25 just receives it is an electric signal, and this electric signal is offered connected computing display unit 27.When through after the suitable operation program, the pattern that computing display unit 27 just can set in advance according to the user shows that the spectrum distribution pattern is in display screen 272.Or through with the data that are stored in its internal memory in advance relatively after, show that directly the kind of this testing sample or concentration are in display screen 272.
As shown in Figure 3, it shows and to use the surface plasma resonance optical spectrum figure of the same sample gained of optical fiber sensing cell sensing of the surface plasma body resonant vibration sensing instrument of the optical fiber sensing cell of any dielectric film layer of tool and one embodiment of the invention not respectively.Wherein, curve A is to show to use the not result of the optical fiber sensing cell sensing gained of any dielectric film layer of tool that curve B then shows the result of the optical fiber sensing cell sensing gained of the surface plasma body resonant vibration sensing instrument that uses one embodiment of the invention.It should be noted that except the difference that has or not the dielectric film layer, the other parts of these two kinds of optical fiber sensing cells are all identical.
As can be seen from Figure 3, the surface plasma body resonant vibration wavelength shown in the curve A is between between the 650nm to 670nm, and the surface plasma body resonant vibration wavelength shown in the curve B is then between the 800nm to 820nm.In addition, the transmission wave band of multimode optical fiber generally is between between the 840nm to 860nm.So, compared to the surface plasma body resonant vibration wavelength of the optical fiber sensing cell of any dielectric film layer of tool not, the surface plasma body resonant vibration wavelength of the optical fiber sensing cell of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention is more near the transmission wave band of multimode optical fiber.That is to say, if again (as thicknesses of layers or the number of plies that changes each dielectric film layer) adjusted in the rete design of most layer dielectric film layers, the surface plasma body resonant vibration wavelength of the optical fiber sensing cell of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention certainly will be able to be positioned at the transmission wave band of multimode optical fiber.
Please consult Fig. 4 again, its surface plasma body resonant vibration sensing instrument that is to use one embodiment of the invention is the synoptic diagram of the testing result of the glucose solution gained of sensing variable concentrations respectively.Wherein, curve C is the testing result that represents deionized water, curve D is the testing result that represents the glucose solution of concentration 2%, curve E is the testing result that represents the glucose solution of concentration 4%, curve F is the testing result that represents the glucose solution of concentration 6%, curve G is the testing result that represents the glucose solution of concentration 8%, and curve H then represents the testing result of the glucose solution of concentration 10%.As can be seen from Figure 4, no matter be used for the glucose solution of which kind of concentration of sensing, the surface plasma body resonant vibration wavelength of the optical fiber sensing cell of the surface plasma body resonant vibration sensing instrument of one embodiment of the invention all is adjacent to, even be positioned at the transmission wave band (1300nm to 1320nm) of single-mode fiber.In addition, because each curve can come out by identification from Fig. 4 significantly, so the surface plasma body resonant vibration sensing instrument of one embodiment of the invention also has certain identification effect for the glucose solution of variable concentrations.
In sum, because surface plasma body resonant vibration sensing instrument of the present invention is to utilize multimode optical fiber to transmit light signal between light source cell, optical fiber sensing cell and optical sensor, propagate but not allow light signal directly be exposed in the atmosphere.So, surface plasma body resonant vibration sensing instrument of the present invention can bear to a certain degree collision and the stability of its light path of induced damage resistive not, and therefore the overall volume of surface plasma body resonant vibration sensing instrument of the present invention also can dwindle further, and its portability is increased further.In addition, since on the groove of the optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention except forming a first metal layer, more form most layer dielectric film layers on this first metal layer, make the surface plasma body resonant vibration wavelength of optical fiber sensing cell of surface plasma body resonant vibration sensing instrument of the present invention to be adjusted in the transmission wave band of single-mode fiber or multimode optical fiber by the mode of rete design, to lower because of the loss of signal that difference was caused between the transmission wave band of the surface plasma body resonant vibration wavelength that is present in the optical fiber sensing cell and single-mode fiber or multimode optical fiber.
Above-described embodiment only is to give an example for convenience of description, and the interest field that the present invention advocates should be as the criterion so that the protection domain of claims is described certainly, but not only limits to above-described embodiment.
Claims (9)
1. a surface plasma body resonant vibration sensing instrument is characterized in that, comprising:
One light source cell is in order to provide a light source;
One has the optical fiber sensing cell of a groove, a coating layer, a core layer, a first metal layer, one second metal level and most layer dielectric film layers, and this coating layer is surrounded in it this core layer, and this light source produces a light signal by this optical fiber sensing cell;
One optical sensor is an electric signal in order to this light signal and the corresponding conversion of sensing by this optical fiber sensing cell;
Many optical fiber connect this light source cell, this optical fiber sensing cell and this optical sensor respectively; And
One connects the computing display unit of this optical sensor, and this computing display unit is accepted from this electric signal of this optical sensor and shown the result of computing gained;
Wherein, this first metal layer is positioned on this groove, and this majority layer dielectric film layer then is formed on this first metal layer, and this second metal level then is formed on this majority layer dielectric film layer.
2. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, also comprises sample groove, includes the solution of a damping fluid in order to ccontaining this optical fiber sensing cell and one.
3. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, described light source cell is laser diode, and this optical sensor then is the optical diode sensor.
4. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, describedly should comprise at least three layers of dielectric film layer by majority layer dielectric film layer.
5. surface plasma body resonant vibration sensing instrument as claimed in claim 1, it is characterized in that the described one first silica membrane layer, that should majority layer dielectric film layer comprises is positioned at titanium deoxid film layer and on this first silica membrane layer and is positioned at the second silica membrane layer on this titanium deoxid film layer.
6. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, the material of described the first metal layer and this second metal level is gold or silver-colored.
7. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, described groove is that an optical fiber is made through the side grinding technics.
8. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, described these many optical fiber are multimode optical fiber or single-mode fiber.
9. surface plasma body resonant vibration sensing instrument as claimed in claim 1 is characterized in that, the surface plasma body resonant vibration wavelength of described optical fiber sensing cell is between between the 840nm to 860nm or between the 1300nm to 1320nm.
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| CN102692397B (en) * | 2012-06-15 | 2015-02-04 | 重庆绿色智能技术研究院 | Portable optical fiber surface plasmons resonance (SPR) food safety detector |
| US9588044B2 (en) * | 2015-07-16 | 2017-03-07 | Globalfoundries Inc. | Inline buried metal void detection by surface plasmon resonance (SPR) |
| CN112180514B (en) * | 2020-10-09 | 2023-08-01 | 温州大学 | Optical fiber surface waveguide mode resonance generating device and regulating and controlling method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5606633A (en) * | 1995-06-26 | 1997-02-25 | American Research Corporation Of Virginia | Chemical detector employing surface plasmon resonance excited using an optical waveguide configured as an asymmetric waveguide coupler |
| TWI294963B (en) * | 2006-01-03 | 2008-03-21 | Forward Electronics Co Ltd | |
| CN101598665A (en) * | 2009-06-03 | 2009-12-09 | 南京航空航天大学 | Glass prism SPR sensor detection system based on build-in modulating layer |
| KR20100002960A (en) * | 2008-06-30 | 2010-01-07 | 재단법인서울대학교산학협력재단 | Surface plasmon resonance sensor chip, method for manufacturing the same, surface plasmon resonance sensor system, and method for detecting analyzed material with surface plasmon resonance sensor system |
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| CN101190829B (en) * | 2006-11-29 | 2010-09-01 | 河南农业大学 | Method for preparing optical fiber SPR sensor gold film by microwave radiation assisted chemical plating |
| CN101493405A (en) * | 2008-01-25 | 2009-07-29 | 中国科学院西安光学精密机械研究所 | Plasma resonance sensing probe |
| CN101413886B (en) * | 2008-11-21 | 2011-01-12 | 浙江大学 | Apparatus for detecting liquid refractive index by plasma resonance optical fiber sensor |
| TWI424155B (en) * | 2009-12-31 | 2014-01-21 | Forward Electronics Co Ltd | Surface plasmon resonance sensor |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5606633A (en) * | 1995-06-26 | 1997-02-25 | American Research Corporation Of Virginia | Chemical detector employing surface plasmon resonance excited using an optical waveguide configured as an asymmetric waveguide coupler |
| TWI294963B (en) * | 2006-01-03 | 2008-03-21 | Forward Electronics Co Ltd | |
| KR20100002960A (en) * | 2008-06-30 | 2010-01-07 | 재단법인서울대학교산학협력재단 | Surface plasmon resonance sensor chip, method for manufacturing the same, surface plasmon resonance sensor system, and method for detecting analyzed material with surface plasmon resonance sensor system |
| CN101598665A (en) * | 2009-06-03 | 2009-12-09 | 南京航空航天大学 | Glass prism SPR sensor detection system based on build-in modulating layer |
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