CN102096156A - Online light polarization controller based on optical fiber end face metal wire grating and manufacturing method thereof - Google Patents
Online light polarization controller based on optical fiber end face metal wire grating and manufacturing method thereof Download PDFInfo
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- 230000010287 polarization Effects 0.000 title claims abstract description 73
- 239000013307 optical fiber Substances 0.000 title claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 42
- 239000002184 metal Substances 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title description 4
- 238000000034 method Methods 0.000 claims abstract description 48
- 238000005516 engineering process Methods 0.000 claims abstract description 24
- 239000000835 fiber Substances 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 39
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 238000010276 construction Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 13
- 238000004891 communication Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 238000002164 ion-beam lithography Methods 0.000 claims description 6
- 238000011161 development Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- 238000004090 dissolution Methods 0.000 claims description 4
- 238000001312 dry etching Methods 0.000 claims description 4
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 230000010365 information processing Effects 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 239000002086 nanomaterial Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000007639 printing Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052755 nonmetal Inorganic materials 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 12
- 230000004888 barrier function Effects 0.000 abstract 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 241000218202 Coptis Species 0.000 description 2
- 235000002991 Coptis groenlandica Nutrition 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000004049 embossing Methods 0.000 description 2
- 238000000985 reflectance spectrum Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000255 optical extinction spectrum Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention discloses an online light polarization controller based on an optical fiber end face metal wire grating. The end face of an optical fiber is provided with a metal wire grating; the metal wire grating has a period of 0.05 to 5 microns; the metal wire grating consists of metal films; the metal film has the thickness of 0.01 to 2 microns; and the duty ratio x is an optional value between 0 and 1. The optical fiber is provided with a flat end face and comprises a single-mode optical fiber, a multi-mode optical fiber and a polarization maintaining optical fiber. The method for preparing the metal wire grating is divided into a direct method and an indirect method, wherein the direct method comprises a step of directly preparing a metal wire grating structure on the flat optical fiber end face by utilizing a micro-nano processing technology; and the indirect method comprises the steps of: preparing a nonmetallic structure barrier layer by utilizing the micro-nano processing technology, preparing the metal wire grating structure by utilizing the structure barrier layer, and removing the structure barrier layer. Due to the specific micro-nano processing technology, the metal wire grating is prepared on the flat optical fiber end face, and the polarization of transmission light or reflected light is controlled by the wire grating structure.
Description
Technical field:
The invention belongs to the photoelectron technology field, be specifically related to the polarization selectivity characteristic of wire grating, reach preparation and application based on this a kind of novel online optical polarization controller.Utilize the polarizability of fiber end face wire grating structure control reflected light or transmitted light, thereby a kind of novel online optical polarization controller of designing has important application at aspects such as optical fiber communication, optical information processing, Fibre Optical Sensor and precision optics measurements.
Background technology
Entered since 21 century, because increasing suddenly of quantity of information had higher requirement to the communication technology.Advantages such as optical communication is big because of its bandwidth, reliability is high, cost is low, transmission speed is fast have occupied the leading position in market.The develop rapidly of optical communication system and optical-fiber network has brought the revolution of information age.Wherein Fibre Optical Communication Technology relies on that its message capacity is big, long transmission distance, signal cross-talk is little, security performance good, anti-electromagnetic interference (EMI), transmission quality height,, advantage such as material source abundant little as the fiber size of carrier, in numerous optical communication techniques, show one's talent, become one of main pillar of modern communications.
Along with the develop rapidly of the communication technology, single-channel transfer rate improves constantly in the system, to satisfy the demand of people to communication bandwidth.When transfer rate improves, communication system is to the relevant modulation of the polarization in the polarization mode dispersion in the optical fiber (PMD), the electrooptic modulator (PDM), and a series of infringements that caused by polarization such as (PDG) of the Polarization-Dependent Gain in the image intensifer are also more and more responsive.The dynamic polarization controller that is used for the PMD compensation is the most important device that overcomes these infringements, and it can change any given polarization state into polarization state that any hope obtains.
At present, Shang Yong Polarization Controller can be divided three classes according to its know-why: a kind ofly be made up of the wave plate that a plurality of delays are fixed, the position angle is variable; Another kind of wave plate adjustable by single delay, that the position angle is variable is formed; Also have and a kind ofly fix, postpone adjustable wave plate by a plurality of position angles and form.Typical Polarization Controller is formed (as Fig. 2) by three rotatable wave plates, and λ/2 wave plates are in the middle of two λ/4 wave plates, and each wave plate all can freely rotate with respect to other wave plate along optical axis.The effect of first λ/4 wave plates is to change any input polarization light into linearly polarized light, λ/2 wave plates rotate to the polarization direction that arbitrary hope obtains with this linearly polarized light then, so second λ/4 wave plate just can change this polarized light into output polarization attitude that any hope obtains.In this implementation method, the delay of wave plate is fixed, but the relative angle of wave plate is variable.
Though this method is applied in the product of commercialization and quite becomes effective, still there are many deficiencies in this technology.The first, the collimation of light, to axle, focus on and to waste time and energy.The second, elements such as wave plate, lenticule are all expensive, and need plating anti-reflection film, rubbing down oblique angle to reduce back-reflection.The 3rd, because the inevitably output that light will be coupled, and then its focusing entered another root optical fiber from an optical fiber, cause the insertion loss big.The 4th, wave plate is to wavelength sensitive (any mark wave plate is established a capital really at certain fixed wave length), thereby makes corresponding Polarization Controller also to wavelength sensitive.The 5th, use motor or other mechanical devices rotating wave plate, all can limit the control rate of Polarization Controller.
Meanwhile, the body piece type polarizer development based on the wire grating technology reaches its maturity.The wire grating polarizer is a kind of polarizer of broadband, by the certain structure design, but operation wavelength covering wide wave band.Up to the present, at radiowave, microwave and far infrared band, the sub-wavelength metal wire-grid polarizer has all obtained widespread use.Along with the development of nanofabrication technique, it is littler to prepare structure, is applied near infrared, wire grating polarizer visible even ultraviolet band has also become possibility.
Summary of the invention
The present invention seeks to: propose a kind of online optical polarization controller and method for making thereof,, the wire grating polarizer is combined with optical fiber, prepare novel online optical polarization controller from the wire grating technology based on the fiber end face wire grating.
Technical scheme of the present invention is: based on the online optical polarization controller of fiber end face wire grating, fiber end face is provided with wire grating, and the wire grating cycle is the 0.05-5 micron, and forming wire grating is metal film, metal film thickness is the 0.01-2 micron, and dutycycle x is the arbitrary value between 0＜x＜1.
Optical fiber has smooth fiber end face, and optical fiber comprises single-mode fiber, multimode optical fiber, polarization maintaining optical fibre.
The material of wire grating comprises metals such as gold, silver, aluminium, copper, platinum, chromium, and the wire grid construction cycle especially is the 0.1-3 micron, and dutycycle x is the arbitrary value between 0.3 to 0.7, and the metal film thickness of wiregrating is the 0.05-1 micron, and the wire grid construction zone covers fiber core.
Structural region covers fiber core.The present invention utilizes the micro-nano process technology to prepare wire grating at fiber end face directly or indirectly, utilizes selective reflecting or the transmission effect of wire grating to specific polarization light, realizes the polarizability control to the reflected light or the transmitted light of specific light wave band.
Preparation method based on the online optical polarization controller of fiber end face wire grating comprises:
(1) making of fiber end face wire grating.Utilize the micro-nano process technology, make wire grating at optical fiber surface by direct or indirect method.Direct method comprises focused-ion-beam lithography (FIB), micro-nano shutter craft of orientated deposition techniques, and soft template is printed metal; Indirect method comprises nano impression, photoetching technique, holographic interference and electron-beam direct writing (EBL).Specify: the focused-ion-beam lithography technology in the direct method focuses on the metallic diaphragm that gallium ion beam sputters away the fiber end face target area for utilizing, and obtains the wire grating structure; Micro-nano shutter craft of orientated deposition techniques is to utilize the space occlusion effect of shutter, directly at fiber end face orientated deposition wire grating; The soft template printing technique is the micro-nano structure surface depositing metal membrane layer in soft template, prints and shifts wire grating to fiber end face.Indirect method can also be divided into two classes, the one, on the metallic diaphragm of fiber end face deposition, utilize the micro-nano process technology to prepare structure retaining layer, and utilize wet etching or dry etching to etch away the metal of groove as stopping, and finally wash away the retaining layer, obtain the wire grating structure; Another kind of scheme is a preparation microstructure retaining layer earlier, and plated metal again washes away the retaining layer then and deposits metal on it, promptly obtains the metal target wire grid construction.
The general operation step of first kind of scheme of indirect method is as follows:
(g) in fiber end face deposition layer of metal film (thickness 0.01-1 micron).
(h) coat photoresist or resist layer at this fiber end face
(i) utilize the micro-nano process technology to photoresist or resist layer patterning
(j) development is removed photoresist or is removed residual
(k) utilize wet etching or dry etching to etch away the metal that the top does not have photoresist to cover
(l) remove remaining photoresist layer with dissolution with solvents, can obtain required optical grating construction
The operation steps of second kind of scheme comprises;
(f) coat photoresist or resist layer at fiber end face
(g) utilize the micro-nano process technology to photoresist or resist layer patterning
(h) development is removed photoresist or is removed residual
(i) at the metal film of patterned surfaces deposition specific thicknesses (0.01-1 micron)
(j) remove photoresist layer with dissolution with solvents, can obtain required optical grating construction
The wire grating cycle is the 0.05-5 micron, and dutycycle x is the arbitrary value between 0＜x＜1, and metal film thickness is the 0.01-1 micron.
(2) the structure setting of online optical polarization controller.The fused fiber splice with wire grating structure for preparing is entered light path.Shown in Fig. 1 (a), comprise in the light path: Polarization Controller, circulator and end face have the optical fiber of wire grating structure.
For the wire grating of cycle much smaller than lambda1-wavelength, the transverse magnetic wave TM polarized light (being parallel to grating vector) of incident is different with transverse electric mode TE polarized light (perpendicular to grating vector) (as Fig. 3) boundary condition, and equivalent refractive index is also different.As shown in Figure 3, metal wire presents metallicity for the TE polarization, makes the TE polarized light reflect; And, showing dielectricity owing to the clearance isolates metal wire for the TM polarized light, this moment, transmission can take place in TM light.Result of calculation (as Fig. 4) based on the rigorous coupled wave theory shows that also under certain aforementioned cycle, dutycycle condition, wavelength TE polarized light in the 1.5-1.6 micrometer range almost completely is reflected, and the almost completely transmission of TM polarized light.
In the light path shown in Fig. 1 (a), a branch of light promptly obtains specific polarizability through behind the Polarization Controller, and the TM light component through behind the wire grating transmission takes place, and the one section optical fiber that can be coupled behind the optical fiber of wire grating structure is drawn the TM transmitted light; TE light is then reflected fully by wire grating, and the TE light of reflection can record at the circulator end.Therefore, utilize this device can control transmission or polarization of reflected light attitude effectively.Polarization Controller shown in Fig. 1 (a) can be traditional Polarization Controller, also can be that another optical fiber with wire grating structure is (as Fig. 1 (b), (c)), and by regulating the angle of wiregrating on two sections optical fiber, be the relativeness of two polarizers of scalable, thus control transmission or catoptrical characteristic: and in Fig. 1 (b), the wiregrating of front and back is parallel to each other in the light path, then has only the TM transmittance, no reflection events light; In Fig. 1 (c), the wiregrating before and after in the light path is vertical mutually, then only with respect to the TE light reflection of back wiregrating, and no transmitted light.
(3) can utilize this optical polarization controller that the susceptibility of polarization state is prepared sensor.After optical fiber between two polarizers was subjected to ectocine, the transmission polarization state of light can change in the optical fiber, and then transmitted light or catoptrical light intensity can correspondingly change.Based on this principle, this device can be used as the sensor that monitoring influences the physical quantity of polarization state such as pressure, electric field, magnetic field etc.
The invention has the beneficial effects as follows: the online optical polarization controller that the present invention proposes is compared with traditional product, has remarkable advantage:
(1) this Polarization Controller compatibility the repertoire of existing product, and have the ability of wideband operation.This is most important for dense wave division multipurpose (DWDM) system.Wide bandwidth of operation makes Polarization Controller have identical serviceability at different channels, has so not only simplified system design, has reduced manufacturing cost, and makes system bandwidth be expanded into possibility.
(2) this Polarization Controller, with respect to traditional devices, structure is greatly simplified, and has improved the stability and the reliability of system, and can realize the control respectively of transmitted light and reflected light polarizability as required flexibly.
(3) this Polarization Controller, owing to adopted all optical fibre structure, reaction velocity is fast, can carry out real-time follow-up to fast-changing polarization state.Because polarization state is for the susceptibility of external environment factor in the optical fiber, this Polarization Controller is applicable to the real-time sensing of polarization related physical quantity.
(4) this Polarization Controller is simple in structure, and cost of manufacture is low, is applicable to production in enormous quantities, can extensively should be in scientific research and productive life.
Description of drawings
Fig. 1 is based on the light path setting of the online optical polarization controller of fiber end face wire grating.Fig. 1 (a) is by a Polarization Controller, and a circulator and terminal optical fiber with wire grating structure are formed; In Fig. 1 (b) light path two sections optical fiber with structure are arranged, the situation when its terminal wire grating is parallel to each other; In Fig. 1 (c) light path two sections optical fiber with structure are arranged, the situation when its terminal wire grating is vertical mutually.
The composition of Fig. 2 typical case Polarization Controller: three rotatable wave plates, λ/2 wave plates are in the middle of two λ/4 wave plates.
The principle of work of Fig. 3 wire grating polarizer: the wide part of the TE of incident is reflected, the wide part transmission of TM.
Fig. 4 utilize that rigorous coupled wave (RCWA) method calculates under certain aforementioned cycle, dutycycle condition, TE and TM polarization state optical transmission and reflectance spectrum in the 1.5-1.6 micrometer range.The transmitted spectrum of Fig. 4 (a) TE and TM polarization state light; The reflectance spectrum of Fig. 4 (b) TE and TM polarization state light.
Fig. 5 utilizes the FIB mode, the wire grating structure that obtains at fibre core place, optical fiber cross section.Fig. 5 (a) is the photo of wire grating; Fig. 5 (b) has the optical fiber cross-section photograph of wire grid construction for the fibre core place.
The resist wire grid construction SEM photo that Fig. 6 (a) utilizes nanometer embossing to obtain at fiber end face; Wash away the nano silver wire grid that resist structure obtains behind Fig. 6 (b) plated metal silver.
The index path that Fig. 7 exerts pressure between two Polarization Controllers.
Change the variation of reflective light intensity among Fig. 8 embodiment 2 with institute's applied pressure between two Polarization Controllers.
Embodiment
Further illustrate the inventive method and application below by embodiment, rather than will limit the present invention with these embodiment.
Embodiment 1
Obtaining smooth fiber end face, and plate the golden film of 0.07 micron thickness at fiber end face with sputtering method with optical fiber cutter cuttings single-mode fiber.Utilize (the Strata FIB 201 of focused-ion-beam lithography system, FEI Co., 30keV gallium ion source), under the condition of 7pA line, sputter away the metallic diaphragm of fiber end face target area with the focusing gallium ion beam, thereby obtaining area at the fibre core place of optical fiber is 10 microns * 10 microns, and the cycle is 0.2 micron, and dutycycle is 0.5 gold thread grid.This gold thread grid optical fiber is inserted light path shown in Fig. 1 (a), and recording this online light polarizer is 14dB to TE polarization of reflected light contrast.
If the film effect that silver-plated, aluminium is 0.15 micron is identical.
Dutycycle x gets 0.4 or 0.7 respectively, and light polarizer is 15dB to TE polarization of reflected light contrast.If the wire grid construction cycle is 2 microns, dutycycle x gets 0.4 or 0.7 respectively, light polarizer to TE polarization of reflected light contrast for being respectively 9dB and 11dB.
Embodiment 2
, to obtain smooth fiber end face fiber end face is contacted with the anticorrosive additive material of ultra-violet curing with optical fiber cutter cutting multimode optical fiber, make this fiber end face adhere to the resist film that a layer thickness is about 0.2 micron.This optical fiber is fixed on the anchor clamps, make be stained with ultra-violet curing glue one upside down, control anchor clamps and slowly move down, the position of regulating optical fiber makes fiber end face contact fully with the optical grating construction surface maintenance of the soft template of tiling, but do not press tension.Then whole device is placed N
2Environment keeps carrying out uv-exposure (power 20mw/cm down
2, time 10min).Treat after exposure is finished optical fiber to be separated with soft template, and fall the residual layer (about 0.06 micron) of groove with reactive ion beam etching (RIBE) after, promptly obtain resist wire grid construction (as Fig. 6 (a)) at fiber end face.
The control fiber end face is towards evaporation source, and fiber end face is vertical with the metal deposition direction, the silverskin that the thermal evaporation deposition is 0.12 micron; Utilize acetone solvent with remaining resist wire grid construction and deposit thereon that argent washes away together then.So promptly utilize nanometer embossing to prepare the wire grating structure at fiber end face by indirect method.(as Fig. 6 (b)) architectural feature is: nano silver wire grid structure, 0.2 micron of cycle, 0.12 micron of height, dutycycle are 0.5.
Use the metal film of thermal evaporation deposited copper or chromium, thickness 0.6-1 micron, the wire grating cycle is 2 microns, and dutycycle x is 0.6, also can obtain similar wire grid construction.
Embodiment 3
(behind the polarizer of light through two quadratures, its output intensity I=sin
2(δ/2), wherein δ is a phase differential.According to elasto-optical effect: transparent isotropic medium can become anisotropy under the effect of mechanical stress, pressure is big more, and then anisotropy is strong more, and promptly Δ n is big more, and δ ∝ Δ n, therefore along with the variation of stress application, respective change also can take place in output intensity.For optical fiber, the phase differential δ that stress caused=8CF/ λ r, wherein F is a stress, and C is a photoelastic coefficient, and λ is an optical wavelength, and r is a fiber radius.Therefore, change output intensity I=sin with pressure
2(4CF/ λ r) is the variation of sin function along with pressure.)
Utilize the optical system for testing shown in the embodiment 1, with 1.55 microns laser (Santec TSL-210) as light source, on one section optical fiber between two polarizers, exert pressure (as Fig. 7), along with stressed variation (0-9kg), monitor TE mould intensity variations with a photo-detector (HP8153A) at reflection end.Reflective light intensity is followed the increase of pressure and is changed (as Fig. 8), and spectral line is similar with theory expectation, thereby has finished a kind of preparation of pressure transducer.By the method for outer difference analysis, can further improve the precision and the stability of sensing.
Claims (9)
1. based on the online optical polarization controller of fiber end face wire grating, it is characterized in that fiber end face is provided with wire grating, the cycle of wire grating is the 0.05-5 micron, and forming wire grating is metal film, metal film thickness is the 0.01-2 micron, and dutycycle x is the arbitrary value between 0＜x＜1.
2. the online optical polarization controller based on the fiber end face wire grating according to claim 1 is characterized in that optical fiber has smooth fiber end face, and optical fiber comprises single-mode fiber, multimode optical fiber, polarization maintaining optical fibre.
3. the online optical polarization controller based on the fiber end face wire grating according to claim 1, the material that it is characterized in that wire grating comprises metals such as gold, silver, aluminium, copper, platinum, chromium, the wire grid construction cycle is the 0.1-3 micron, dutycycle x is the arbitrary value between 0.3 to 0.7, the metal film thickness of wiregrating is the 0.05-1 micron, and the wire grid construction zone covers fiber core.
4. preparation method based on the online optical polarization controller of fiber end face wire grating, it is characterized by: the wire grating preparation method is divided into direct method and indirect method two classes, and direct method is for to utilize the micro-nano process technology directly to prepare the wire grating structure at smooth fiber end face; Indirect method prepares nonmetal structure retaining layer for utilizing the micro-nano process technology earlier, utilizes structure retaining layer preparation wire grating structure, removes structure retaining layer then.
5. the preparation method of the online optical polarization controller based on the fiber end face wire grating according to claim 4, it is characterized by: the micro-nano process technology comprises metallic diaphragm with focused-ion-beam lithography (FIB) formation wire grating, micro-nano shutter craft of orientated deposition techniques, and soft template is printed wire grating; Indirect method comprises nano impression, photoetching technique, holographic interference and electron-beam direct writing (EBL).Direct method comprises focused-ion-beam lithography (FIB), micro-nano shutter craft of orientated deposition techniques, and soft template is printed wire grating; Indirect method comprises nano impression, photoetching technique, holographic interference and electron-beam direct writing (EBL).
6. the preparation method of the online optical polarization controller based on the fiber end face wire grating according to claim 4, it is characterized by: the focused-ion-beam lithography technology in the direct method focuses on the metallic diaphragm that gallium ion beam sputters away the fiber end face target area for utilizing, and obtains the wire grating structure; Micro-nano shutter craft of orientated deposition techniques is to utilize the space occlusion effect of shutter, directly at fiber end face orientated deposition wire grating; The soft template printing technique is the micro-nano structure surface depositing metal membrane layer in soft template, prints and shifts wire grating to fiber end face.
7. the preparation method of the online optical polarization controller based on the fiber end face wire grating according to claim 4, it is characterized by: indirect method is to utilize the micro-nano process technology to prepare structure retaining layer on the metallic diaphragm of fiber end face deposition, and utilize wet etching or dry etching to etch away the metal of groove as stopping, finally wash away the retaining layer, obtain the wire grating structure; The concrete operations step of the indirect method of described online optical polarization controller based on the fiber end face wire grating is as follows:
(a) in fiber end face deposition layer of metal film (thickness 0.01-1 micron).
(b) coat photoresist or resist layer at this fiber end face
(c) utilize the micro-nano process technology to photoresist or resist layer patterning
(d) development is removed photoresist or is removed residual
(e) utilize wet etching or dry etching to etch away the metal that the top does not have photoresist to cover
(f) remove remaining photoresist layer with dissolution with solvents, can obtain required optical grating construction
8. the preparation method of the online optical polarization controller based on the fiber end face wire grating according to claim 4, it is characterized by preparation microstructure retaining layer earlier, plated metal again, wash away retaining layer then and deposit metal on it, promptly obtain the metal target wire grid construction, the preparation process of described online optical polarization controller indirect method based on the fiber end face wire grating comprises;
(a) coat photoresist or resist layer at fiber end face,
(b) utilize the micro-nano process technology to photoresist or resist layer patterning,
(c) develop remove photoresist or remove residual,
(d) at the metal film of patterned surfaces deposition specific thicknesses,
(e) remove photoresist layer with dissolution with solvents, can obtain required optical grating construction.
9. should be based on the application of online optical polarization controller in optical fiber communication, optical information processing system, Fibre Optical Sensor and precision optics measuring system of fiber end face wire grating.The fused fiber splice with wire grating structure that the structure of online optical polarization controller is set to prepare enters light path, and shown in Fig. 1 (a), comprise in the light path: Polarization Controller, circulator and end face have the optical fiber of wire grating structure.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104165841A (en) * | 2013-05-16 | 2014-11-26 | 上海交通大学 | Integrated structure of optical fiber provided with label-free optical sensing element on one end face and microfluid |
| CN106324742A (en) * | 2016-10-08 | 2017-01-11 | 深圳市华星光电技术有限公司 | Manufacturing method of metal wire grating polarizer |
| WO2024095488A1 (en) * | 2022-11-04 | 2024-05-10 | 国立大学法人東北大学 | Bundled fiber, polarized light sensor, optical encoder, optical scattering detection sensor, and method for manufacturing bundled fiber |
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| CN104165841A (en) * | 2013-05-16 | 2014-11-26 | 上海交通大学 | Integrated structure of optical fiber provided with label-free optical sensing element on one end face and microfluid |
| CN106324742A (en) * | 2016-10-08 | 2017-01-11 | 深圳市华星光电技术有限公司 | Manufacturing method of metal wire grating polarizer |
| WO2024095488A1 (en) * | 2022-11-04 | 2024-05-10 | 国立大学法人東北大学 | Bundled fiber, polarized light sensor, optical encoder, optical scattering detection sensor, and method for manufacturing bundled fiber |
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