CN104406939A - Plastic fiber surface plasma sensor based on bimetallic grating and application thereof - Google Patents
Plastic fiber surface plasma sensor based on bimetallic grating and application thereof Download PDFInfo
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- CN104406939A CN104406939A CN201410510642.6A CN201410510642A CN104406939A CN 104406939 A CN104406939 A CN 104406939A CN 201410510642 A CN201410510642 A CN 201410510642A CN 104406939 A CN104406939 A CN 104406939A
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Abstract
The invention relates to a plastic fiber surface plasma sensor based on a bimetallic grating, which comprises a plastic fiber as a substrate and the bimetallic grating arranged on upper surface and lower surface of fiber; the plastic fiber is the plastic fiber without a cladding and 1mm of core diameter; the bimetallic grating comprises a dielectric layer with a single surface having a concave-convex periodic structure, a metal thin layer is arranged on the upper surface of the concave-convex periodic structure, so that the grating can be formed; the duty ratio of the formed grating is 1; the metal grating is prepared by using a laser dual-beam interference photolithography; and the period and depth of the grating can be adjustable. The bimetallic grating is produced on the plastic fiber surface, the fiber waveguide coupling and grating coupling are combined, so that the bimetallic grating has plastic fiber transmission advantage and metal grating high excitation efficiency advantage, resonance wavelength is tunable, and the stucrture has important application in refractive index sensing.
Description
Technical field
The present invention relates to a kind of plastic optical fiber surface plasma sensor based on thermometal grating and application thereof, belong to the technical field of sensor.
Background technology
Compared with conventional quartz optical fiber, plastic optical fiber has that core diameter is large, toughness is high, cheap, make simple, easy maintenance, high reliability.Therefore, plastic optical fiber (POF) sensor is a kind of sensor of extensively research both at home and abroad at present.Wherein, the Fibre Optical Sensor based on surface plasma resonance has very important purposes in fields such as microorganism detection, blood analysis, DNA analysis, toxic gas detections.But mainly there is following problem in the domestic and international research for optical fiber at present:
1) problems such as both at home and abroad the optical fiber surface plasmon resonance sensor of report is most based on metal coating structure, and existence and stability is poor, launching efficiency is low and contrast is little;
2) research about plastic optical fiber and metal grating is more, and the research that is applied to sensory field of the two being combined is less.
Summary of the invention
For existing technical deficiency, the invention provides a kind of plastic optical fiber surface plasma sensor based on thermometal grating.
The present invention also provides a kind of method for sensing utilizing the above-mentioned plastic optical fiber surface plasma sensor based on thermometal grating.The present invention has that launching efficiency is high, the advantage such as the sensing of multi-wavelength wide spectral and good stability.
Technical scheme of the present invention is as follows:
Based on a plastic optical fiber surface plasma sensor for thermometal grating, comprise the plastic optical fiber as substrate and the double-level-metal grating being arranged on described optical fiber upper surface and lower surface;
Described plastic optical fiber is remove covering and the plastic optical fiber of core diameter 1mm;
Described double-level-metal grating comprises the dielectric layer that one side has concavo-convex periodic structure, is provided with metal film layer at the upper surface of described concavo-convex periodic structure, forms grating; Wherein the dutycycle of formed grating is 1; Described dutycycle is the Essential Terms of this area, and namely for each screen periods, its projection is identical with the width ratio shared by recessed portion; Wherein, described double-level-metal grating conventionally utilizes double laser beams interference lithography method to be made; In the structure of described double-level-metal grating, vertical range difference between layers controlled by time shutter of photoetching process, and described distance is between layers the degree of depth of described double-level-metal grating.Therefore the screen periods in the grating of double-level-metal described in the present invention and the degree of depth are all adjustable.
Preferred according to the present invention, described plastic optical fiber is the EL2100 plastic optical fiber that Mitsubishi company produces.
Preferred according to the present invention, the parameter of described plastic optical fiber: physical dimension is 980/1000 μm; Fiber core refractive index 1.49, fibre core numerical aperture (NA) is 0.5, cladding index 1.4, transmittance/%*m
-1>=95 (570nm), loss/dB*km
-1≤ 200 (570nm).
Preferred according to the present invention, the dielectric material of described dielectric layer to be model that Allresisit company produces be ARP3500 – 6.
Preferred according to the present invention, being provided with metal film layer at the upper surface of described concavo-convex periodic structure is aluminium film, and its thickness is 100nm.This aluminium film utilizes electron beam deposition device to form in the concaveconvex structure upper surface deposition of aluminum of dielectric layer, and then clone required double-level-metal grating.
Utilize a method for sensing for the above-mentioned plastic optical fiber surface plasma sensor based on thermometal grating, comprise step as follows:
1) wideband light source is coupled to one section of internal-and external diameter through optic fibre input end mouth is in the plastic optical fiber of 980/1000 μm, and have covering constraint under transmit in plastic optical fiber;
2) light is after arrival double-level-metal grating, and light is coupled out plastic optical fiber through plastic optical fiber waveguide-coupled and the grating coupled dual coupling scheme of double-level-metal, and forms plasma resonance effect on the surface of described double-level-metal grating;
3) due to the restriction of matching condition: under different incident wavelength, the coupling efficiency of light is different; Coupling efficiency reaches maximum at a particular wavelength, forms spectral resonance absorption peak; Under varying environment refractive index, resonant wavelength along with the increase of extraneous refractive index is to the significantly movement of long wave direction, thus realizes the measurement of ambient refractive index to external world.
Advantage of the present invention:
(1) the present invention adopts plastic optical fiber as sensor fibre, has the advantage that core diameter is large, toughness is high, cheap, making is simple, easy maintenance, reliability are high;
(2) the present invention utilizes laser interference lithography to make the micro-nano metal grating of plane, and have technique simple, throughput rate is high, low cost and other advantages.
(3) the present invention is by double-level-metal preparing grating on plastic optical fiber surface, and the advantage having plastic optical fiber transmission advantage and metal grating height launching efficiency concurrently is closed in fibre-optic waveguide coupling and grating coupling reef knot.
(4) the micro-nano sensing arrangement of the present invention's making, resonant wavelength is tunable, can realize the sensing of multi-wavelength wide spectral; And refractive index is extremely responsive.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that double laser beams interferometric method prepares micro-nano grating;
Fig. 2 is prepared micro-nano structure pictorial diagram, wherein (a) photo in kind, the 2 d plane picture of microstructure under (b) Scanning Electron microscope;
Fig. 3 is the structural representation of a kind of plastic optical fiber surface plasma sensor based on thermometal grating of the present invention;
Fig. 4 is of the present invention based in the plastic optical fiber surface plasma method for sensing of thermometal grating, the reflected light spectrogram under different screen periods;
Fig. 5 is that the plastic optical fiber surface plasma method for sensing based on thermometal grating of the present invention is applied to refractive index sensing;
In figure 3, A is plastic optical fiber entry port, and B is plastic optical fiber exit ports, and C is double-level-metal grating region.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the invention will be further described, but be not limited thereto.
As shown in Figure 1.
Embodiment 1,
Based on a plastic optical fiber surface plasma sensor for thermometal grating, comprise the plastic optical fiber as substrate and the double-level-metal grating being arranged on described optical fiber upper surface and lower surface;
Described plastic optical fiber is remove covering and the plastic optical fiber of core diameter 1mm;
Described double-level-metal grating comprises the dielectric layer that one side has concavo-convex periodic structure, is provided with metal film layer at the upper surface of described concavo-convex periodic structure, forms grating; Wherein the dutycycle of formed grating is 1; Described dutycycle is the Essential Terms of this area, and namely for each screen periods, its projection is identical with the width ratio shared by recessed portion; Wherein, described double-level-metal grating conventionally utilizes double laser beams interference lithography method to be made; In the structure of described double-level-metal grating, vertical range difference between layers controlled by time shutter of photoetching process, and described distance is between layers the degree of depth of described double-level-metal grating.Therefore the screen periods in the grating of double-level-metal described in the present invention and the degree of depth are all adjustable.Described dielectric layer is the model that Allresisit company produces is the dielectric material of ARP3500 – 6.
Described laser beam is adjusted by beam splitting, forms the two bundle planar light with certain angle in space; Two-beam interacts and interferes in space; The placement of glass plate place scribbles the plastic optical fiber of photoresist ARP3500 – 6 as substrate in FIG; The glass plate being loaded with plastic optical fiber is put into the interference field that two-beam is formed, by adjusting the angle of two interfering beams, control interference fringe spacing, and then realize the control to the dielectric layer plane grating cycle; The aluminium film utilizing electron beam deposition device to be 100nm at dielectric layer concavo-convex periodic structure upper surface deposit thickness, clones required double-level-metal grating.
As shown in Figure 2: prepared micro-nano structure pictorial diagram, wherein (a) photo in kind, the 2 d plane picture of microstructure under (b) Scanning Electron microscope.Due to the diffraction effect of made micro-nano grating pair light, in a figure on glass plate, there is obvious color fringe, specifically as shown in Fig. 2 black and white vitta.
Embodiment 2,
As described in Example 1 based on a plastic optical fiber surface plasma sensor for thermometal grating, its difference is, described plastic optical fiber is the EL2100 plastic optical fiber that Mitsubishi company produces.
The parameter of described plastic optical fiber: physical dimension is 980/1000 μm; Fiber core refractive index 1.49, fibre core numerical aperture (NA) is 0.5, cladding index 1.4, transmittance/%*m
-1>=95 (570nm), loss/dB*km
-1≤ 200 (570nm).
Embodiment 3,
A kind of plastic optical fiber surface plasma sensor based on thermometal grating as described in embodiment 1,2, its difference is, being provided with metal film layer at the upper surface of described concavo-convex periodic structure is aluminium film, and its thickness is 100nm.This aluminium film utilizes electron beam deposition device to form in the concaveconvex structure upper surface deposition of aluminum of dielectric layer, and then clone required double-level-metal grating.
Embodiment 4,
Utilization based on a method for sensing for the plastic optical fiber surface plasma sensor of thermometal grating, comprises step as follows as described in embodiment 1-3:
1) wideband light source is coupled to one section of internal-and external diameter through optic fibre input end mouth is in the plastic optical fiber of 980/1000 μm, and have covering constraint under transmit in plastic optical fiber;
2) light is after arrival double-level-metal grating, and light is coupled out plastic optical fiber through plastic optical fiber waveguide-coupled and the grating coupled dual coupling scheme of double-level-metal, and forms plasma resonance effect on the surface of described double-level-metal grating;
3) due to the restriction of matching condition: under different incident wavelength, the coupling efficiency of light is different; Coupling efficiency reaches maximum at a particular wavelength, forms spectral resonance absorption peak; Under varying environment refractive index, resonant wavelength along with the increase of extraneous refractive index is to the significantly movement of long wave direction, thus realizes the measurement of ambient refractive index to external world.
As shown in Figure 3, principle of work of the present invention: it is in the plastic optical fiber of 980/1000 μm that wideband light source is coupled to one section of internal-and external diameter through fiber port A, fiber core refractive index 1.49, and fibre core numerical aperture (NA) is 0.5, cladding index 1.4, transmittance/%*m
-1>=95 (570nm), loss/dB*km
-1≤ 200 (570nm); Light transmits under the constraint of covering in plastic optical fiber, after metal grating region C prepared by light arrives, the fibre cladding in this region utilizes acetone etch to peel off, and on this region surface makes double-level-metal grating, light forms evanescent wave be coupled out plastic optical fiber core according to matching condition in this region; Due to the restriction of matching condition, the coupling efficiency of the light of different wave length is different, coupling efficiency reaches maximum at a particular wavelength, and forms surface plasma resonance effect on metal grating surface at this wavelength, therefore goes out to detect from spectral resonance absorption peak at output terminal B.According to matching condition, resonant wavelength is subject to the sensitive modulation of the outer medium refraction index of grating.Therefore, the change of extraneous refractive index can cause the obvious movement of resonant wavelength, thus refractive index carries out accurately detecting to external world.
Fig. 4 is of the present invention based in the plastic optical fiber surface plasma method for sensing of thermometal grating, and resonant wavelength is by the reflected light spectrogram of screen periods modulation.Can find out, when extraneous refractive index is certain, when screen periods is increased to the process of 1 μm from 0.4 μm, the position of resonance wavelength increases to 1.398 μm from 0.624 μm. therefore, by controlling the cycle of grating, the Application in Sensing of any wave band can be realized.
Fig. 5 is the reflectance spectrum of micro-nano structure of the present invention under varying environment refractive index.Screen periods is 1 μm.When extraneous refractive index is increased to the process of 1.49 from 1.33, the position of resonant wavelength increases to 1.501 μm from 1.398 μm, and this shows that, under different refractive index environment, resonant wavelength is to the significantly movement of long wave direction.The sensitivity of definition sensor is: σ=Δ λ/Δ n, the sensitivity obtaining this sensor construction is 643.75nm/RIU.
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned; but not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technical scheme of the present invention, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection scope of the present invention.
Claims (6)
1., based on a plastic optical fiber surface plasma sensor for thermometal grating, it is characterized in that, this sensor comprise as substrate plastic optical fiber and be arranged on the double-level-metal grating of described optical fiber upper surface and lower surface;
Described plastic optical fiber is remove covering and the plastic optical fiber of core diameter 1mm;
Described double-level-metal grating comprises the dielectric layer that one side has concavo-convex periodic structure, is provided with metal film layer at the upper surface of described concavo-convex periodic structure, forms grating; Wherein the dutycycle of formed grating is 1.
2. a kind of plastic optical fiber surface plasma sensor based on thermometal grating according to claim 1, is characterized in that, described plastic optical fiber is the EL2100 plastic optical fiber that Mitsubishi company produces.
3. a kind of plastic optical fiber surface plasma sensor based on thermometal grating according to claim 1, is characterized in that, the parameter of described plastic optical fiber: physical dimension is 980/1000 μm; Fiber core refractive index 1.49, fibre core numerical aperture (NA) is 0.5, cladding index 1.4, transmittance/%*m
-1>=95 (570nm), loss/dB*km
-1≤ 200 (570nm).
4. a kind of plastic optical fiber surface plasma sensor based on thermometal grating according to claim 1, is characterized in that, described dielectric layer is the model that Allresisit company produces is the dielectric material of ARP3500 – 6.
5. a kind of plastic optical fiber surface plasma sensor based on thermometal grating according to claim 1, it is characterized in that, being provided with metal film layer at the upper surface of described concavo-convex periodic structure is aluminium film, and its thickness is 100nm.
6. utilization is based on a method for sensing for the plastic optical fiber surface plasma sensor of thermometal grating as described in claim 1-5 any one, comprises step as follows:
1) wideband light source is coupled to one section of internal-and external diameter through optic fibre input end mouth is in the plastic optical fiber of 980/1000 μm, and have covering constraint under transmit in plastic optical fiber;
2) light is after arrival double-level-metal grating, and light is coupled out plastic optical fiber through plastic optical fiber waveguide-coupled and the grating coupled dual coupling scheme of double-level-metal, and forms plasma resonance effect on the surface of described double-level-metal grating;
3) due to the restriction of matching condition: under different incident wavelength, the coupling efficiency of light is different; Coupling efficiency reaches maximum at a particular wavelength, forms spectral resonance absorption peak; Under varying environment refractive index, resonant wavelength along with the increase of extraneous refractive index is to the significantly movement of long wave direction, thus realizes the measurement of ambient refractive index to external world.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105259141A (en) * | 2015-10-30 | 2016-01-20 | 山东大学 | Surface plasma resonance high-refractive-index sensor based on porous aluminum membrane structure and application thereof |
| CN107478605A (en) * | 2017-07-17 | 2017-12-15 | 吉林大学 | A kind of U-shaped plastic optical fiber long-period gratings surface plasma liquid refractive index sensor |
| CN108872155A (en) * | 2018-04-29 | 2018-11-23 | 河南工业大学 | A kind of preparation method of magneto-optic optical fiber primary surface Air plasma mass sensor |
-
2014
- 2014-09-28 CN CN201410510642.6A patent/CN104406939A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| DEJUN FENG等: "《Design of Infrared SPR Sensor Based on Bimetallic Nanowire Gratings on Plastic Optical Fiber Surface》", 《IEEE SENSORS JOURNAL》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105259141A (en) * | 2015-10-30 | 2016-01-20 | 山东大学 | Surface plasma resonance high-refractive-index sensor based on porous aluminum membrane structure and application thereof |
| CN105259141B (en) * | 2015-10-30 | 2018-08-03 | 山东大学苏州研究院 | It is a kind of based on the surface plasma resonance high refractive index sensor of porous aluminium structure and its application |
| CN107478605A (en) * | 2017-07-17 | 2017-12-15 | 吉林大学 | A kind of U-shaped plastic optical fiber long-period gratings surface plasma liquid refractive index sensor |
| CN108872155A (en) * | 2018-04-29 | 2018-11-23 | 河南工业大学 | A kind of preparation method of magneto-optic optical fiber primary surface Air plasma mass sensor |
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