CN102096133B - 可调纳米光栅及纳米光栅加速度计及其加工方法 - Google Patents
可调纳米光栅及纳米光栅加速度计及其加工方法 Download PDFInfo
- Publication number
- CN102096133B CN102096133B CN2010106077066A CN201010607706A CN102096133B CN 102096133 B CN102096133 B CN 102096133B CN 2010106077066 A CN2010106077066 A CN 2010106077066A CN 201010607706 A CN201010607706 A CN 201010607706A CN 102096133 B CN102096133 B CN 102096133B
- Authority
- CN
- China
- Prior art keywords
- grating
- accelerometer
- adjustable
- nanometer grating
- nano grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Micromachines (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010106077066A CN102096133B (zh) | 2010-12-27 | 2010-12-27 | 可调纳米光栅及纳米光栅加速度计及其加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010106077066A CN102096133B (zh) | 2010-12-27 | 2010-12-27 | 可调纳米光栅及纳米光栅加速度计及其加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102096133A CN102096133A (zh) | 2011-06-15 |
CN102096133B true CN102096133B (zh) | 2012-07-18 |
Family
ID=44129301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010106077066A Expired - Fee Related CN102096133B (zh) | 2010-12-27 | 2010-12-27 | 可调纳米光栅及纳米光栅加速度计及其加工方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102096133B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102866444B (zh) * | 2012-09-28 | 2014-09-03 | 西安交通大学 | 以时间基准为参照的精密光栅制造方法 |
CN104764521B (zh) * | 2015-03-20 | 2017-12-05 | 西北工业大学 | 一种高灵敏度微振动检测方法 |
CN106199069B (zh) * | 2016-07-15 | 2023-10-10 | 中北大学 | 一种高精度双层纳米光栅三轴加速度检测装置 |
CN107091941B (zh) * | 2017-06-27 | 2023-10-27 | 常州瑞丰特科技有限公司 | 基于反射式光栅尺的高精度加速度传感器 |
CN107449411A (zh) * | 2017-08-28 | 2017-12-08 | 中北大学 | 纳米光栅非谐振式三轴角速率传感器 |
CN108303566B (zh) * | 2018-03-30 | 2024-04-12 | 南京邮电大学 | 基于光栅衍射的加速度传感器 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1346988A (zh) * | 2001-04-30 | 2002-05-01 | 中国科学院长春光学精密机械与物理研究所 | 微型可调谐红外滤光器及其制备工艺 |
CN1731081A (zh) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | 宏/微双重驱动的大行程高速纳米级精度的平面定位系统 |
CN101290215A (zh) * | 2008-06-10 | 2008-10-22 | 浙江大学 | 一种基于pgc解调干涉扫描的微位移传感器 |
CN101424697A (zh) * | 2008-10-31 | 2009-05-06 | 冉曾令 | 光纤珐珀加速度和压力传感器及其制造方法 |
CN101477137A (zh) * | 2009-01-19 | 2009-07-08 | 西北工业大学 | 一种利用光栅检测技术进行加速度测量的装置和方法 |
CN101788570A (zh) * | 2010-01-26 | 2010-07-28 | 浙江大学 | 三明治式光学微机械加速度传感器 |
-
2010
- 2010-12-27 CN CN2010106077066A patent/CN102096133B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1346988A (zh) * | 2001-04-30 | 2002-05-01 | 中国科学院长春光学精密机械与物理研究所 | 微型可调谐红外滤光器及其制备工艺 |
CN1731081A (zh) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | 宏/微双重驱动的大行程高速纳米级精度的平面定位系统 |
CN101290215A (zh) * | 2008-06-10 | 2008-10-22 | 浙江大学 | 一种基于pgc解调干涉扫描的微位移传感器 |
CN101424697A (zh) * | 2008-10-31 | 2009-05-06 | 冉曾令 | 光纤珐珀加速度和压力传感器及其制造方法 |
CN101477137A (zh) * | 2009-01-19 | 2009-07-08 | 西北工业大学 | 一种利用光栅检测技术进行加速度测量的装置和方法 |
CN101788570A (zh) * | 2010-01-26 | 2010-07-28 | 浙江大学 | 三明治式光学微机械加速度传感器 |
Non-Patent Citations (2)
Title |
---|
徐宗伟等.基于聚焦离子束注入的微纳加工技术研究.《电子显微学报》.2009,第28卷(第1期), * |
徐宗伟等.基于聚焦离子束铣削的复杂微纳结构制备.《天津大学学报》.2009,第42卷(第1期), * |
Also Published As
Publication number | Publication date |
---|---|
CN102096133A (zh) | 2011-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102096133B (zh) | 可调纳米光栅及纳米光栅加速度计及其加工方法 | |
CN106289068B (zh) | 一种二自由度外差光栅干涉仪位移测量方法 | |
CN102944176B (zh) | 一种外差光栅干涉仪位移测量系统 | |
CN101960252B (zh) | 采用导模谐振的角传感器、系统 | |
CN103604376B (zh) | 抗光学混叠的双频激光光栅干涉三维测量方法及系统 | |
CN101788570B (zh) | 三明治式光学微机械加速度传感器 | |
CN103604375A (zh) | 抗光学混叠的双频激光光栅干涉二维测量方法及系统 | |
CN106199069B (zh) | 一种高精度双层纳米光栅三轴加速度检测装置 | |
CN102589446A (zh) | 一种高精度微位移测量装置及方法 | |
CN110940830B (zh) | 一种基于二维光栅和四象限探测器的两轴加速度计结构 | |
CN106813578A (zh) | 一种二维光栅测量系统 | |
CN104330147A (zh) | 微悬臂梁热振动信号测量装置 | |
CN102359814B (zh) | 三维激光运动姿态测量系统及方法 | |
CN101788267A (zh) | 基于两组亚波长光栅的光学微位移传感器 | |
CN101213418A (zh) | 用于测量工件厚度的衍射方法 | |
CN112082490B (zh) | 一种基于Talbot像和COMS相机结构的位移传感器 | |
CN105627949A (zh) | 光学传感式三维高精度接触扫描测量探头 | |
CN104406526A (zh) | 脉冲微位移传感器及其测量位移的方法 | |
US8804130B2 (en) | Displacement measuring device and displacement measuring method | |
CN104406525A (zh) | 光栅组微位移传感器及其测量位移的方法 | |
US11733034B2 (en) | Fast measurement method for micro-nano deep groove structure based on white light interference | |
CN103674220A (zh) | 测振系统 | |
CN113916209B (zh) | 一种基于双层光栅近场泰伯效应的微机械陀螺 | |
CN102865999A (zh) | Led光学特性检测方法及检测装置 | |
KR101091111B1 (ko) | 광축주사 과정을 제거한 공초점 현미경 및 초점검출 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: NANJING MILITARY REPRESENTATIVE BUREAU, MINISTRY O |
|
C41 | Transfer of patent application or patent right or utility model | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Zhou Zhen Inventor after: Yao Baoyin Inventor after: Zou Yan Inventor after: Liu Huilan Inventor after: Feng Lishuang Inventor after: Chi Yuanyuan Inventor before: Feng Lishuang Inventor before: Zhou Zhen Inventor before: Yao Baoyin Inventor before: Liu Huilan Inventor before: Chi Yuanyuan |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: FENG LISHUANG ZHOU ZHEN YAO BAOYIN LIU HUILAN CHI YUANYUAN TO: ZHOU ZHEN YAO BAOYIN ZOU YAN LIU HUILAN FENG LISHUANG CHI YUANYUAN |
|
TA01 | Transfer of patent application right |
Effective date of registration: 20110901 Address after: 100083 Beijing, Haidian District, Xueyuan Road, Haidian District No. 37 Applicant after: Beihang University Co-applicant after: Nanjing Military Representative Office, PLA General Armament Department Address before: 100083 Beijing, Haidian District, Xueyuan Road, Haidian District No. 37 Applicant before: Beihang University |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120718 Termination date: 20121227 |