CN102092882A - Method and device for recycling steam condensate - Google Patents

Method and device for recycling steam condensate Download PDF

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Publication number
CN102092882A
CN102092882A CN2009102002602A CN200910200260A CN102092882A CN 102092882 A CN102092882 A CN 102092882A CN 2009102002602 A CN2009102002602 A CN 2009102002602A CN 200910200260 A CN200910200260 A CN 200910200260A CN 102092882 A CN102092882 A CN 102092882A
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China
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water
condensate
former
reclamation
temperature
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CN2009102002602A
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Chinese (zh)
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陈玉峰
周金锋
徐雪峰
张靖华
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Semiconductor Manufacturing International Shanghai Corp
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Semiconductor Manufacturing International Shanghai Corp
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Priority to CN2009102002602A priority Critical patent/CN102092882A/en
Publication of CN102092882A publication Critical patent/CN102092882A/en
Pending legal-status Critical Current

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Abstract

The invention provides a method and a device for recycling steam condensate. The method is characterized in that: when the temperature of raw water in an ultrapure water pretreatment system is lower than the temperature requirement of the ultrapure water pretreatment system on the raw water, the steam condensate is mixed with the raw water, so that the temperature of the raw water is raised; and the mixed water is percolated and treated through a heat exchange system so that the temperature of the mixed water reaches the requirements of water temperature and water quality of ultrapure water pretreatment; therefore, the raw water heating cost of the ultrapure water pretreatment system is reduced, the consumption of municipal steam can be reduced, the raw water consumption of the ultrapure water pretreatment is saved, and meanwhile, the treatment problem of the steam condensate is solved. The method for recycling the waste heat of the wastewater reduces the yield of the produced wastewater, saves the tap water resource, more importantly, reduces the consumption of the municipal steam, and is energy-saving and environmentally-friendly.

Description

Reclamation of condensate water is utilized method and device
Technical field
The present invention relates to recovering and utilizing steam condensate and device, particularly a kind of recovering and utilizing steam condensate and device that is used for the ultrapure water pretreatment system.
Background technology
In semiconductor production process, need to use ultrapure water or highly purified deionized water.Semiconductor production is different from general pure water preparation with pure water, and it has more strict regulation to water quality, belongs to the ultrapure water category.Adopt reverse osmosis to do pre-treatment and mix electric deionizer again, this is to produce the both economical technology with environmental protection of ultrapure water at present, does not need to regenerate with soda acid just can produce ultrapure water continuously, and environment is not had destructiveness.
Wherein the optimal temperature of reverse osmosis system is about 22 degrees centigrade, and in winter, the temperature of former water water inlet is often far below 22 degrees centigrade, if guarantee 22 degrees centigrade water temperature, and must be to former hydromining with the measure of heating.In the prior art, selected mode steam heating of heating, for than the big yield system, energy expenditure is very big, and per 1 ton of water is heated to 0.4 ton of the municipal steam that 20 degree need expend 180 degree from 10 degree, amounts to 90 yuan of Renminbi.Steam condensate per ton is reduced to 20 heats that contain of degree from 60 degree and is equivalent to 1.61 tons of municipal steam, amounts to 362 yuan of Renminbi.
The use municipal administration of semiconductor production district is vapor heated can to produce a large amount of steam condensates simultaneously, and the water quality of steam condensate is near distilled water, and temperature is 60-80 degree centigrade.Traditional vapor condensation water treatment method is directly water of condensation to be entered in the cooling tower to cool off, and energy is wasted.
Summary of the invention
The technical problem to be solved in the present invention is to be when the inflow temperature of ultrapure water pretreatment system Central Plains water is lower than 22 degrees centigrade, heats the consumption of mass consumption steam after need becoming hot water by steam heat-exchanging to former water.
For solving above-mentioned technical problem, the invention provides a kind of recovering and utilizing steam condensate, steam condensate is mixed with former water in the ultrapure water pretreatment system, reach the effect of intensification, saved the pretreated former water consumption of ultrapure water when cutting down the consumption of energy.
This recovering and utilizing steam condensate may further comprise the steps:
(1) steam condensate is mixed with former water, carry out heat exchange, realize that the temperature of former water raises;
(2) mixed water is filtered assurance water quality by filtration unit;
(3) water after will filtering heats by the second road heat exchange system, feeds in the ultrapure water pretreatment system after reaching 20 degrees centigrade.
Optionally, described former water is tap water, and temperature is greater than 0 degree centigrade, less than 22 degrees centigrade.
Optionally, described filtration unit is for removing the impurity in anhydrating by sand filtration.
Optionally, the mode of described mixed former water reheat employing hot water heating.
A kind of reclamation of condensate water use device is used for the ultrapure water pretreatment system, it is characterized in that, this recycle device comprises: condensate draining is used to collect steam condensate and is liquid water with water vapor condensation; Former tank, the outlet of former tank import and condensate draining is connected, and is used for depositing former water and mixes with water of condensation that condensate draining feeds; Filtration unit, the filtration unit import goes out to be communicated with former tank, is used for the mixed water of former tank is filtered; Heat exchange system is communicated with the filtration unit outlet, is used for the water after filtering is heated to 22 degrees centigrade, and the water of reserving through heat exchange system enters the ultrapure water pretreatment system.
A kind of heating means of former water, described former water are by heating with steam condensate blended mode.
Compared with prior art, the present invention has the following advantages:
Reclamation of condensate water of the present invention is utilized method, reduced in the ultrapure water pretreatment system consumption of steam when former water water temperature is lower than 22 degrees centigrade, reduce energy consumption, saved the pretreated former water consumption of ultrapure water, and the handling problem that has solved steam condensate.
Description of drawings
Fig. 1 utilizes method for reclamation of condensate water;
Fig. 2 is the reclamation of condensate water use device;
Fig. 3 is a kind of heating means of former water.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
A lot of details have been set forth in the following description so that fully understand the present invention.But the present invention can implement much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of intension of the present invention.Therefore the present invention is not subjected to the restriction of following public embodiment.
Embodiment 1
At first, the invention provides a kind of reclamation of condensate water and utilize method, shown in 1, step S101 provides steam condensate with reference to the accompanying drawings; Step S102 feeds steam condensate in the former tank and to mix with former water; S103 filters by sand filtering device; S104 carries out heat exchange by heat exchange system; S105 feeds the ultrapure water pretreatment system.
Steam condensate is collected in the former tank of ultrapure water pretreatment system, the temperature of steam condensate is 60-80 degree centigrade, thereby mix with former water in the former tank and to make former water reach the effect of intensification, the volume ratio of steam condensate and former water is more than or equal to 1: 10, because the water-quality ratio tap water of steam condensate is good near distilled water, so can directly mix with the former water in the pretreatment system;
This former tank mix after heating up former water in the mode of fluid communication by filtration unit, filtering effect not only is further to reduce the turbidity of water, and organism, bacterium etc. will reduce with the turbidity of water and partly be removed in the water;
To be connected with heat exchange system by the water of filtration unit and carry out heat exchange, the effect of heat exchange is that the former water that will also not reach 22 degrees centigrade after mixing continues heating, and the water after the heat exchange system heating is as the initial former water of ultrapure water pretreatment system.Experimental data shows, the consumption of ultrapure water is 5000 cubic metres of calculating according to every day, if directly use municipal steam heating, be heated to 22 ℃ from 5 ℃, the municipal steam consumption of every day is 140.83 tons, and the expense of municipal administration every day steam is 38445.61 yuans, that is to say, adopt present embodiment can save 140.83 tons of municipal steam every day, save about 500 tons of tap water.
Embodiment 2
Present embodiment provides a kind of recycle device of steam condensate, is used for the ultrapure water pretreatment system, and shown in 2, this reclamation set comprises with reference to the accompanying drawings: condensate draining 1, former tank 2, filtration unit 3, heat exchange system 4.Its structure is: condensate draining 1, and being used for water vapor condensation is liquid water; Its outlet is connected with former tank 2 imports, and its Central Plains tank 2 is used for depositing tap water and mixes with water of condensation that condensate draining feeds, is provided with first control valve 5 described communicating pipe.Former tank 2 outlets are communicated with filtration unit 3 imports, and filtration unit is to be used for the mixed water of former tank is filtered, and is provided with second control valve 6 described communicating pipe.Filtration unit 3 outlets are connected with heat exchange system 4, and heat exchange system is used for the water after filtering is heated to 22 degrees centigrade, is provided with the 3rd control valve 7 described communicating pipe.The water outlet of heat exchange system feeds in the ultrapure water pretreatment system.First control valve, second control valve, the 3rd control valve are controlled its opening and closing of place pipeline separately.
At first, condensate draining 1 is collected steam condensate, is liquid water of condensation with the gasiform steam reforming.
Condensate draining 1 is connected with former tank 2, is provided with first control valve 5 described communicating pipe.After first control valve 5 was opened, the steam condensate in the condensate draining 1 fed in the former tank 2, directly mixed with former water in the former tank 2, made former water in the former tank 2 reach the effect of intensification.The blending ratio of steam condensate and former water was more than or equal to 1: 10 in former tank 2, and after feeding the steam condensate of capacity in the former tank 2, first control valve 5 is closed.What the former wet concentration in the former tank 2 was used is tap water.
Former tank 2 is connected with filtration unit 3, is provided with second control valve 6 described communicating pipe.After second control valve 6 was opened, the former water that mixes in the former tank 2 after heating up fed filtration unit 3, thereby reduces the turbidity of water, and the microorganism in the water and bacterium also reduce along with the reduction of turbidity.Selected filtration unit is sand filtration.
Filtration unit 3 is connected with heat exchange system 4, is provided with the 3rd control valve 7 described communicating pipe.After the 3rd control valve 7 is opened, the former water heat temperature raising after heat exchange system 4 will be filtered.Selected heat exchange system is the hot water heating.
The water outlet of heat exchange system 4 feeds in the ultrapure water pretreatment system.
Embodiment 3
The present invention also provides a kind of heating means of former water.With reference to the accompanying drawings shown in 3, described former water be by with steam condensate blended mode Hybrid Heating in former tank 1.
Though the present invention discloses as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.

Claims (8)

1. a reclamation of condensate water is utilized method, may further comprise the steps:
(1) steam condensate is mixed with former water, carry out heat exchange, realize that the temperature of former water raises;
(2) mixed water is filtered assurance water quality by filtration unit;
(3) water after will filtering heats by the second road heat exchange system, feeds in the ultrapure water pretreatment system after reaching 22 degrees centigrade of ultrapure water default temperature.
2. reclamation of condensate water according to claim 1 is utilized method, it is characterized in that, described former water is tap water, and temperature is greater than 0 degree centigrade, less than 20 degrees centigrade.
3. reclamation of condensate water according to claim 1 is utilized method, it is characterized in that, described filtration unit is sand filtration.
4. reclamation of condensate water according to claim 1 is utilized method, it is characterized in that, the mode of hot water heating is adopted in described heat exchange.
5. a reclamation of condensate water use device is used for the ultrapure water pretreatment system, it is characterized in that, this recycle device comprises: condensate draining, and being used for water vapor condensation is liquid water; Former tank, the outlet of former tank import and condensate draining is connected, and is used for depositing former water and mixes with water of condensation that condensate draining feeds; Filtration unit, the filtration unit import goes out to be communicated with former tank, is used for the mixed water of former tank is filtered; The second road heat exchange system is communicated with the filtration unit outlet, is used for the water after filtering is heated to 22 degrees centigrade of ultrapure water default temperature, and the water of reserving through heat exchange system enters the ultrapure water pretreatment system.
6. reclamation of condensate water use device according to claim 5 is characterized in that, described former water is tap water, and temperature is greater than 0 degree centigrade, less than 20 degrees centigrade.
7. reclamation of condensate water use device according to claim 5 is characterized in that, described filtration unit is sand filtration.
8. the heating means of a former water is characterized in that, described former water is by heating with steam condensate blended mode.
CN2009102002602A 2009-12-10 2009-12-10 Method and device for recycling steam condensate Pending CN102092882A (en)

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Application Number Priority Date Filing Date Title
CN2009102002602A CN102092882A (en) 2009-12-10 2009-12-10 Method and device for recycling steam condensate

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Application Number Priority Date Filing Date Title
CN2009102002602A CN102092882A (en) 2009-12-10 2009-12-10 Method and device for recycling steam condensate

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CN102092882A true CN102092882A (en) 2011-06-15

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CN2009102002602A Pending CN102092882A (en) 2009-12-10 2009-12-10 Method and device for recycling steam condensate

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102849871A (en) * 2011-06-30 2013-01-02 宝山钢铁股份有限公司 STD type technology and system for recovering condensate water of coal moisture control
CN104344395A (en) * 2013-07-24 2015-02-11 陈克秀 Novel power-plant raw water and boiler raw water heating system and method
EP3183955A1 (en) * 2015-12-21 2017-06-28 Tetra Laval Holdings & Finance S.A. A heat exchanger arrangement and method for providing process water to a piston pump or a homogenizer
CN111392842A (en) * 2020-04-03 2020-07-10 内蒙古红太阳食品有限公司 Method for recycling water recovered by concentrating and condensing yeast extract enzymatic hydrolysate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102849871A (en) * 2011-06-30 2013-01-02 宝山钢铁股份有限公司 STD type technology and system for recovering condensate water of coal moisture control
CN102849871B (en) * 2011-06-30 2013-12-25 宝山钢铁股份有限公司 STD type technology and system for recovering condensate water of coal moisture control
CN104344395A (en) * 2013-07-24 2015-02-11 陈克秀 Novel power-plant raw water and boiler raw water heating system and method
EP3183955A1 (en) * 2015-12-21 2017-06-28 Tetra Laval Holdings & Finance S.A. A heat exchanger arrangement and method for providing process water to a piston pump or a homogenizer
CN111392842A (en) * 2020-04-03 2020-07-10 内蒙古红太阳食品有限公司 Method for recycling water recovered by concentrating and condensing yeast extract enzymatic hydrolysate

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Application publication date: 20110615