CN102081962B - EDRAM (Enhanced Dynamic Random Access Memory) unit of gain unit, memory and operating method - Google Patents

EDRAM (Enhanced Dynamic Random Access Memory) unit of gain unit, memory and operating method Download PDF

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CN102081962B
CN102081962B CN 200910199380 CN200910199380A CN102081962B CN 102081962 B CN102081962 B CN 102081962B CN 200910199380 CN200910199380 CN 200910199380 CN 200910199380 A CN200910199380 A CN 200910199380A CN 102081962 B CN102081962 B CN 102081962B
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mos transistor
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bit line
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CN102081962A (en
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林殷茵
孟超
董存霖
程宽
马亚楠
严冰
解玉凤
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Fudan University
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Abstract

The invention belongs to the technical field of dynamic random access memories and in particular relates to an EDRAM (Enhanced Dynamic Random Access Memory) unit of a gain unit, a memory and an operating method thereof. Based on a writing MOS (Metal Oxide Semiconductor) transistor, a reading MOS transistor, a writing word line, a writing bit line, a reading word line, a reading bit line and an equivalent parasitic capacitor, the EDRAM unit of the gain unit provided by the invention is obtained by increasing a coupling complementary MOS transistor and a shared bit line which is connected to a fixed voltage such that the EDRAM unit of the gain unit has the characteristics of long data retention time and low refreshing frequency; and the memory formed by the EDRAM unit of the gain unit has the characteristics of high reading speed and low power consumption.

Description

一种增益单元eDRAM单元、存储器及操作方法Gain unit eDRAM unit, memory and operation method

技术领域 technical field

本发明属于动态随机存储器(DRAM)技术领域,具体涉及一种嵌入式动态随机存储器(eDRAM)技术,尤其涉及一种由写MOS晶体管、读MOS晶体管和耦合互补MOS晶体管组成的增益单元eDRAM(Gain Cell eDRAM)单元、存储器及操作方法。The invention belongs to the technical field of dynamic random access memory (DRAM), in particular to an embedded dynamic random access memory (eDRAM) technology, in particular to a gain unit eDRAM (Gain Cell eDRAM) unit, memory and operation method.

背景技术 Background technique

存储器可以分为片外存储器和嵌入式存储器,嵌入式存储器是一种集成在芯片内与芯片系统中各个逻辑、混合信号等IP模块共同组成芯片的基本组成部分。嵌入式存储器包括嵌入式静态随机存储器(eSRAM)和嵌入式动态随机存储器(eDRAM),其中,eDRAM由于其单元只包括一个晶体管和一个电容,相对eSRAM单元的六个晶体管,具有单元面积小的特点。Memory can be divided into off-chip memory and embedded memory. Embedded memory is a basic part of the chip that is integrated in the chip with various logic and mixed signal IP modules in the chip system. Embedded memory includes embedded static random access memory (eSRAM) and embedded dynamic random access memory (eDRAM). Among them, eDRAM has the characteristics of small cell area because its unit only includes one transistor and one capacitor, compared with the six transistors of eSRAM unit .

但是,传统的eDRAM的难点在于其电容的制造一般不与标准MOS工艺兼容,从而DRAM工艺与常规逻辑工艺差异很大,工艺的整合相当困难。因此业界提出了用MOS管自身的寄生电容来等效代替DRAM中电容的思想。However, the difficulty of traditional eDRAM is that the manufacture of its capacitors is generally not compatible with the standard MOS process, so the DRAM process is very different from the conventional logic process, and the integration of the process is quite difficult. Therefore, the industry has proposed the idea of using the parasitic capacitance of the MOS transistor itself to equivalently replace the capacitance in the DRAM.

请参阅图1,图1所示为现有技术的带两个MOS管的增益单元eDRAM单元结构示意图。该eDRAM是由Intel公司在美国专利US7120072中提出的,如图1所示,该Gain Cell eDRAM 100包括写MOS晶体管101、读MOS晶体管102、写字线(Write Word Line,WWL)105、读字线(Read Word Line,RWL)106、写位线(Write Bit Line,WBL)107、读位线(Read BitLine,RBL)108以及等效寄生电容104。其中,写MOS晶体管101的源区连接于读MOS晶体管102的栅极,MN点103为存储节点,等效寄生电容104一端与103连接,另一端接地,因此,MN点的电位的高低能控制读MOS晶体管102的导通与关断;例如,电容104存储电荷时,代表存储“1”,MN点103为高电位,可以控制读MOS晶体管102关断。读MOS晶体管102的一端接RBL,另一端接RWL;写MOS晶体管101的一端接WBL,另一端接读MOS晶体管102的栅极。在该实施例中,等效寄生电容104为写MOS晶体管101的有源区寄生电容或读MOS晶体管102的栅电容,也或者是两者的结合。以下结合操作列表具体说明其操作过程:Please refer to FIG. 1 . FIG. 1 is a schematic structural diagram of a gain unit eDRAM unit with two MOS transistors in the prior art. The eDRAM is proposed by Intel Corporation in U.S. Patent US7120072. As shown in FIG. (Read Word Line, RWL) 106, write bit line (Write Bit Line, WBL) 107, read bit line (Read BitLine, RBL) 108 and equivalent parasitic capacitance 104. Wherein, the source region of the write MOS transistor 101 is connected to the gate of the read MOS transistor 102, the MN point 103 is a storage node, one end of the equivalent parasitic capacitance 104 is connected to 103, and the other end is grounded, therefore, the potential level of the MN point can be controlled On and off of the read MOS transistor 102; for example, when the capacitor 104 stores charges, it means storing “1”, and the MN point 103 is at a high potential, which can control the read MOS transistor 102 to be turned off. One end of the read MOS transistor 102 is connected to RBL, and the other end is connected to RWL; one end of the write MOS transistor 101 is connected to WBL, and the other end is connected to the gate of the read MOS transistor 102 . In this embodiment, the equivalent parasitic capacitance 104 is the parasitic capacitance of the active region of the write MOS transistor 101 or the gate capacitance of the read MOS transistor 102 , or a combination of both. The operation process is described in detail below in conjunction with the operation list:

写操作(Write):写“0”时,RWL、RBL置0电位,读MOS晶体管102不工作;WWL置-400mV,写MOS晶体管101导通,WBL置0V,从而等效寄生电容104放电,存储节点103电位为0。写“1”时,RWL、RBL置0电位,读MOS晶体管102不工作;WWL置-400mV,写MOS晶体管101导通,WBL置1V,从而等效寄生电容104充电,存储节点103电位为高电位。Write operation (Write): When writing "0", RWL and RBL are set to 0 potential, and the read MOS transistor 102 does not work; WWL is set to -400mV, the write MOS transistor 101 is turned on, and WBL is set to 0V, so that the equivalent parasitic capacitance 104 is discharged. The potential of the storage node 103 is 0. When writing "1", RWL and RBL are set to 0 potential, and the read MOS transistor 102 does not work; when WWL is set to -400mV, the write MOS transistor 101 is turned on, and WBL is set to 1V, so that the equivalent parasitic capacitor 104 is charged, and the potential of the storage node 103 is high potential.

(1)数据保持时(Hold):RWL、RBL置0电位,读MOS晶体管102不工作,WWL置1V,写MOS晶体管101关断,存储节点103的电位不受外界影响。(1) When data is held (Hold): RWL and RBL are set to 0 potential, the read MOS transistor 102 does not work, WWL is set to 1V, the write MOS transistor 101 is turned off, and the potential of the storage node 103 is not affected by the outside world.

(2)读操作(Read):读“0”时,WWL置1V,WBL置0V,写MOS晶体管101关断;RWL偏置小于1V,RBL置0V,此时读MOS晶体管102导通,RWL通过读MOS晶体管对RBL充电,由于读出电路具有钳位作用,RBL的电位能达到200mV,从而可以读出数据“0”。读“1”时,WWL置1V,WBL置0V,写MOS晶体管101关断;RWL偏置小于1V,此时读MOS晶体管102关断,RWL不会通过读MOS晶体管对RBL充电,RBL维持0V电位,从而可以读出数据“1”。(2) Read operation (Read): When reading "0", WWL is set to 1V, WBL is set to 0V, and the write MOS transistor 101 is turned off; RWL bias is less than 1V, and RBL is set to 0V. At this time, the read MOS transistor 102 is turned on, and RWL By reading the MOS transistor to charge RBL, because the readout circuit has a clamping effect, the potential of RBL can reach 200mV, so that the data "0" can be read out. When reading "1", WWL is set to 1V, WBL is set to 0V, and the write MOS transistor 101 is turned off; RWL bias is less than 1V, and the read MOS transistor 102 is turned off at this time, RWL will not charge RBL through the read MOS transistor, and RBL maintains 0V Potential, so that the data "1" can be read.

图1所示的Gain Cell eDRAM单元不需要另外制造电容,采用标准CMOS工艺,并且其结构相对eSRAM更简单,可以实现高密度的嵌入式存储。但是,由于等效寄生电容104为写MOS晶体管101的有源区寄生电容或者读MOS晶体管102的栅电容、或者为写MOS晶体管101的有源区寄生电容和读MOS晶体管102的栅电容的结合,等效寄生电容104的电容值相对较小,且存储节点103受写MOS晶体管101的亚阈值特性影响,有可能漏电严重(如图1中所示的箭头方向产生漏电),从而使得存储节点的电荷泄露很快,较大影响存储单元的数据保持时间。The Gain Cell eDRAM unit shown in Figure 1 does not require additional capacitors, uses a standard CMOS process, and has a simpler structure than eSRAM, enabling high-density embedded storage. However, since the equivalent parasitic capacitance 104 is the active region parasitic capacitance of the write MOS transistor 101 or the gate capacitance of the read MOS transistor 102, or the combination of the active region parasitic capacitance of the write MOS transistor 101 and the gate capacitance of the read MOS transistor 102 , the capacitance value of the equivalent parasitic capacitance 104 is relatively small, and the storage node 103 is affected by the sub-threshold characteristics of the write MOS transistor 101, and the leakage may be serious (leakage occurs in the direction of the arrow as shown in Figure 1), so that the storage node The charge leakage of the battery is very fast, which greatly affects the data retention time of the memory cell.

图2所示为现有技术的带三个MOS管的增益单元eDRAM单元结构示意图。虽然图2的所示单元结构一定程度上解决了带两个MOS管的增益单元eDRAM单元被同一列选中单元耦合串扰的问题,使得数据保持时间有所延长,但由于寄生电容仍然为一个MOS管的有源区电容和另一个MOS管的栅电容之和,相对值还是很小,且存储节点受到写MOS管亚阈值漏电的影响严重,使得存储节点的电荷泄露很快,影响存储单元的数据保持时间。FIG. 2 is a schematic structural diagram of a gain unit eDRAM unit with three MOS transistors in the prior art. Although the unit structure shown in Figure 2 solves to some extent the problem of the gain unit eDRAM unit with two MOS transistors being coupled and crosstalked by the selected unit in the same column, which prolongs the data retention time, but the parasitic capacitance is still one MOS transistor The relative value of the sum of the active area capacitance and the gate capacitance of another MOS transistor is still very small, and the storage node is seriously affected by the subthreshold leakage of the write MOS transistor, which makes the charge leakage of the storage node very fast, affecting the data of the storage unit. keep time.

发明内容 Contents of the invention

本发明要解决的技术问题是,解决增益单元eDRAM单元的存储电荷泄漏较快、数据保持时间短的问题。The technical problem to be solved by the present invention is to solve the problem that the storage charge of the gain unit eDRAM unit leaks quickly and the data retention time is short.

为解决以上技术问题,本发明提供一种增益单元eDRAM单元,包括写MOS晶体管、读MOS晶体管、写字线、写位线、读字线、读位线、耦合互补MOS晶体管和接固定电压的公共位线,所述耦合互补MOS晶体管的源端/漏端连接所述接固定电压的公共位线,所述耦合互补MOS晶体管的栅极连接所述读位线,所述耦合互补MOS晶体管的漏端/源端连接所述写MOS晶体管的漏端/源端以及所述读MOS晶体管的栅极,等效寄生电容形成于所述读MOS晶体管的栅极。In order to solve the above technical problems, the present invention provides a gain unit eDRAM unit, including a write MOS transistor, a read MOS transistor, a write word line, a write bit line, a read word line, a read bit line, a coupled complementary MOS transistor, and a common A bit line, the source terminal/drain terminal of the coupled complementary MOS transistor is connected to the common bit line connected to a fixed voltage, the gate of the coupled complementary MOS transistor is connected to the read bit line, and the drain of the coupled complementary MOS transistor The terminal/source terminal is connected to the drain terminal/source terminal of the write MOS transistor and the gate of the read MOS transistor, and an equivalent parasitic capacitance is formed on the gate of the read MOS transistor.

根据本发明的一实施例,其中,所述写MOS晶体管和读MOS晶体管为PMOS晶体管,所述耦合互补MOS晶体管为NMOS晶体管。According to an embodiment of the present invention, wherein the write MOS transistor and the read MOS transistor are PMOS transistors, and the coupled complementary MOS transistors are NMOS transistors.

根据本发明的又一实施例,其中,所述写MOS晶体管和读MOS晶体管为NMOS晶体管,所述耦合互补MOS晶体管为PMOS晶体管。According to yet another embodiment of the present invention, wherein the write MOS transistor and the read MOS transistor are NMOS transistors, and the coupled complementary MOS transistors are PMOS transistors.

根据本发明所提供的增益单元eDRAM单元,其中,所述等效寄生电容为写MOS晶体管的有源区寄生电容、读MOS晶体管的栅电容、耦合互补MOS晶体管的有源区寄生电容三者的并联组合。所述耦合互补MOS晶体管与写MOS晶体管具有基本相同的结构参数。所述写MOS晶体管、耦合互补MOS晶体管上分别置衬底偏压,以同时减少写MOS晶体管和耦合互补MOS晶体管的亚阈值漏电。According to the gain unit eDRAM unit provided by the present invention, the equivalent parasitic capacitance is the parasitic capacitance of the active region of the writing MOS transistor, the gate capacitance of the reading MOS transistor, and the parasitic capacitance of the active region of the coupling complementary MOS transistor Parallel combination. The coupling complementary MOS transistor has substantially the same structural parameters as the writing MOS transistor. The writing MOS transistor and the coupling complementary MOS transistor are respectively provided with substrate bias to simultaneously reduce the subthreshold leakage of the writing MOS transistor and the coupling complementary MOS transistor.

本发明同时提供以上所述增益单元eDRAM单元的操作方法,在数据保持操作时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,接固定电压的公共位线置为固定电位;相对于等效寄生电容,通过写MOS管的亚阈值漏电流与通过耦合互补MOS晶体管的亚阈值漏电流的方向相反。The present invention also provides the operation method of the above-mentioned gain unit eDRAM unit. During the data retention operation, the write word line is set to the first potential that closes the write MOS transistor, the write bit line is set to 0 potential, and the read bit line is set to make the coupling complementary The second potential where the MOS transistor is turned off, the read word line is set to 0 potential or the second potential, and the common bit line connected to a fixed voltage is set to a fixed potential; relative to the equivalent parasitic capacitance, the subthreshold leakage current through the write MOS transistor is coupled with the through coupling The direction of the subthreshold leakage current of complementary MOS transistors is opposite.

根据本发明所提供的操作方法,其中,写操作:写“1”时,写字线置为使写MOS晶体管导通的第三电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,写位线置为第一电位,等效寄生电容通过写MOS晶体管被充电至第一电位;写“0”时,写字线置为使写MOS晶体管导通的第三电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,写位线置为0电位,等效寄生电容通过写MOS晶体管被放电至0电位。所述固定电位接近于第一电位。According to the operation method provided by the present invention, wherein, write operation: when writing "1", the write word line is set to the third potential that enables the write MOS transistor to be turned on, and the read bit line is set to the second potential that causes the coupled complementary MOS transistor to be turned off , the read word line is set to 0 potential or the second potential, the write bit line is set to the first potential, and the equivalent parasitic capacitance is charged to the first potential through the write MOS transistor; when writing "0", the write word line is set to make the write MOS transistor The third potential that is turned on, the read bit line is set to the second potential that makes the coupling complementary MOS transistor off, the read word line is set to 0 potential or the second potential, the write bit line is set to 0 potential, and the equivalent parasitic capacitance passes through the write MOS transistor is discharged to 0 potential. The fixed potential is close to the first potential.

根据本发明所提供的操作方法,其中,读操作:读“1”时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读字线置第一电位,读位线在读操作前被预充至0电位并在读操作时保持0电位;读“0”时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读字线置第一电位,读位线的电位从0电位上升至外围读出放大电路所钳位的电位。According to the operation method provided by the present invention, wherein, the read operation: when reading "1", the write word line is set to the first potential that closes the write MOS transistor, the write bit line is set to 0 potential, the read word line is set to the first potential, and the read word line is set to the first potential. The bit line is precharged to 0 potential before the read operation and maintains 0 potential during the read operation; when reading "0", the write word line is set to the first potential that makes the write MOS transistor off, the write bit line is set to 0 potential, and the read word line is set to The first potential, the potential of the read bit line rises from 0 potential to the potential clamped by the peripheral sense amplifier circuit.

根据本发明所提供的操作方法,其中,刷新操作时,采用先读后写的模式。According to the operation method provided by the present invention, in the refresh operation, the mode of reading first and then writing is adopted.

本发明同时提供一种增益单元eDRAM,其包括:The present invention also provides a gain unit eDRAM, which includes:

增益单元eDRAM阵列,其前述的增益单元eDRAM单元按行和列的形式排列而成;Gain unit eDRAM array, the aforementioned gain unit eDRAM units are arranged in the form of rows and columns;

行译码器;row decoder;

列译码器;column decoder;

灵敏放大器;Sensitive amplifier;

字线驱动模块;word line drive module;

位线驱动模块;bit line driver module;

公共位线驱动模块,用于产生所有单元公共位线上的固定电压;以及a common bit line driver module for generating a fixed voltage on the common bit line of all cells; and

逻辑控制模块,用于控制所述字线驱动模块和所述位线驱动模块在读操作、写操作、数据保持操作以及刷新操作中的时序。The logic control module is used to control the timing of the word line driving module and the bit line driving module in read operation, write operation, data hold operation and refresh operation.

本发明的技术效果是,通过增加耦合互补MOS晶体管和接到固定电压的公共位线,增大用于存储数据的等效寄生电容;并在数据保持时,通过与写MOS管的亚阈值漏电方向相反的耦合互补MOS晶体管的亚阈值电流来补偿写MOS管的亚阈值漏电造成的存储节点的电荷泄漏。因此,该增益单元eDRAM单元具有数据保持时间长、刷新频率低的特点,由该增益单元eDRAM单元形成的存储器具有功耗低的特点。而且由于存储单元保持数据相同时间后,读晶体管的栅极,即存储节点的电平更接近初始写入电平,这样能更快的根据读MOS管是否导通把读字线上的电压耦合到读位线上或者继续保持预充电的0电平,提高了数据读取速度。The technical effect of the present invention is to increase the equivalent parasitic capacitance for storing data by increasing the coupling complementary MOS transistor and the common bit line connected to the fixed voltage; The subthreshold current of the complementary MOS transistor is coupled in the opposite direction to compensate the charge leakage of the storage node caused by the subthreshold leakage of the write MOS transistor. Therefore, the gain unit eDRAM unit has the characteristics of long data retention time and low refresh frequency, and the memory formed by the gain unit eDRAM unit has the characteristic of low power consumption. Moreover, after the memory cell keeps the data for the same time, the gate of the read transistor, that is, the level of the storage node is closer to the initial write level, so that the voltage on the read word line can be coupled faster according to whether the read MOS transistor is turned on. To the read bit line or continue to maintain the precharged 0 level, which improves the data read speed.

附图说明 Description of drawings

图1是现有技术的带两个MOS管的增益单元eDRAM单元结构示意图;FIG. 1 is a schematic structural diagram of a gain unit eDRAM unit with two MOS transistors in the prior art;

图2是现有技术的带三个MOS管的增益单元eDRAM单元结构示意图;FIG. 2 is a schematic structural diagram of a gain unit eDRAM unit with three MOS transistors in the prior art;

图3是本发明第一实施例的增益单元eDRAM单元结构示意图;3 is a schematic structural diagram of a gain unit eDRAM unit according to the first embodiment of the present invention;

图4是图3所示实施例增益单元eDRAM单元400的操作列表示意图;FIG. 4 is a schematic diagram of an operation list of the gain unit eDRAM unit 400 of the embodiment shown in FIG. 3;

图5是本发明第二实施例的增益单元eDRAM单元结构示意图。FIG. 5 is a schematic structural diagram of a gain unit eDRAM unit according to a second embodiment of the present invention.

图6是本发明提供的、由图3所示实施例增益单元eDRAM单元排列组成的增益单元eDRAM存储器结构示意图。FIG. 6 is a schematic structural diagram of a gain unit eDRAM memory provided by the present invention, which is composed of the arrangement of gain unit eDRAM units shown in FIG. 3 .

具体实施方式 Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面结合附图对本发明作进一步的详细描述。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.

图3所示为本发明第一实施例的增益单元eDRAM单元结构示意图。如图3所示,该增益单元eDRAM单元400包括写MOS晶体管401、读MOS晶体管402、耦合互补MOS晶体管403、写字线(Write Word Line,WWL)406、写位线(Write Bit Line,WBL)407、读字线(Read Word Line,RWL)408、读位线(Read Bit Line,RBL)409、接固定电压的公共位线(Common Bit Line,CBL)410。其中,写MOS晶体管401的栅极连接至WWL,从而写MOS晶体管401受WWL控制;MOS晶体管401的源端(或者漏端)接WBL,MOS晶体管401的漏端(或者源端)接读MOS晶体管402的栅极;读MOS晶体管402的源端(或者漏端)接RWL,读MOS晶体管402的漏端(或者源端)接RBL、并同时连接耦合互补MOS晶体管403的栅极,耦合互补晶体管403的源端(或者漏端)接CBL,耦合互补晶体管403的漏端(或者源端)连接至读MOS晶体管402的栅极或者写MOS管401的漏端(或者源端)。因此,根据MOS晶体的寄生电容可知,会在读MOS晶体管402的栅极或者写MOS管401的漏端(或者源端)或者耦合互补MOS晶体管403的漏端(或者源端)与地之间存在一个等效寄生电容,即图3中所示的等效寄生电容405。该等效寄生电容405用虚线表示,是因为该电容并不是独立存在的电容器件,而是写MOS晶体管401的有源区寄生电容、读MOS晶体管402的栅电容、耦合互补MOS晶体管403的有源区寄生电容三者的并联组合。由于耦合互补MOS晶体管403的加入,等效寄生电容405的电容值大于图1所示现有技术中的等效寄生电容104的电容值。该等效寄生电容405可以存储电荷,等同实现DRAM(动态随机存储器)单元中的电容器件的功能,因此,位置404可以定义为存储节点。在一实例中,当等效寄生电容405存储电荷时,存储节点404是高电位,代表该eDRAM单元存储数据“1”,当等效寄生电容405释放电荷时,存储节点404是低电位,代表该eDRAM单元存储数据“0”。当然,也可以选择相反的形式来定义存储状态。在该图3所示实施例中,写MOS晶体管401、读MOS晶体管402为PMOS晶体管,当其栅电压为负电压信号时,可以使晶体管401和402导通。而耦合互补MOS晶体管403为NMOS晶体管,当其栅电压为正电压信号时,可以使晶体管403导通。与传统的eDRAM单元相同,该单元400不需要专门的电容器件制备工艺,易于标准CMOS工艺兼容。FIG. 3 is a schematic structural diagram of a gain unit eDRAM unit according to the first embodiment of the present invention. As shown in Figure 3, the gain unit eDRAM unit 400 includes a write MOS transistor 401, a read MOS transistor 402, a coupled complementary MOS transistor 403, a write word line (Write Word Line, WWL) 406, a write bit line (Write Bit Line, WBL) 407. Read Word Line (Read Word Line, RWL) 408. Read Bit Line (Read Bit Line, RBL) 409. Common Bit Line (Common Bit Line, CBL) 410 connected to a fixed voltage. Wherein, the gate of the write MOS transistor 401 is connected to WWL, so that the write MOS transistor 401 is controlled by WWL; the source (or drain) of the MOS transistor 401 is connected to WBL, and the drain (or source) of the MOS transistor 401 is connected to the read MOS The gate of the transistor 402; the source terminal (or drain terminal) of the read MOS transistor 402 is connected to RWL, the drain terminal (or source terminal) of the read MOS transistor 402 is connected to RBL, and is connected to the gate of the coupled complementary MOS transistor 403 at the same time, and the coupled complementary The source terminal (or drain terminal) of transistor 403 is connected to CBL, and the drain terminal (or source terminal) of coupled complementary transistor 403 is connected to the gate of read MOS transistor 402 or the drain terminal (or source terminal) of write MOS transistor 401 . Therefore, according to the parasitic capacitance of the MOS crystal, it can be known that there will be between the gate of the read MOS transistor 402 or the drain (or source) of the write MOS transistor 401 or the drain (or source) of the complementary MOS transistor 403 and the ground. An equivalent parasitic capacitance, that is, the equivalent parasitic capacitance 405 shown in FIG. 3 . The equivalent parasitic capacitance 405 is represented by a dotted line, because the capacitance is not an independent capacitive device, but the parasitic capacitance of the active region of the write MOS transistor 401, the gate capacitance of the read MOS transistor 402, and the active region of the coupled complementary MOS transistor 403. The parallel combination of the parasitic capacitance of the source region. Due to the addition of the coupling complementary MOS transistor 403 , the capacitance value of the equivalent parasitic capacitance 405 is greater than the capacitance value of the equivalent parasitic capacitance 104 in the prior art shown in FIG. 1 . The equivalent parasitic capacitance 405 can store charges, which is equivalent to realizing the function of a capacitive device in a DRAM (Dynamic Random Access Memory) unit. Therefore, the position 404 can be defined as a storage node. In one example, when the equivalent parasitic capacitance 405 stores charges, the storage node 404 is at a high potential, representing that the eDRAM cell stores data “1”, and when the equivalent parasitic capacitance 405 releases charges, the storage node 404 is at a low potential, representing The eDRAM cell stores data "0". Of course, the opposite form can also be chosen to define the storage state. In the embodiment shown in FIG. 3 , the write MOS transistor 401 and the read MOS transistor 402 are PMOS transistors, and when the gate voltage thereof is a negative voltage signal, the transistors 401 and 402 can be turned on. The coupled complementary MOS transistor 403 is an NMOS transistor, and when its gate voltage is a positive voltage signal, the transistor 403 can be turned on. Same as the traditional eDRAM cell, the cell 400 does not require special fabrication process of capacitor device, and is easy to be compatible with standard CMOS process.

以下结合图4所示的操作列表对图3实施例的增益单元eDRAM单元的操作方法进行说明。The operation method of the gain unit eDRAM unit in the embodiment of FIG. 3 will be described below in conjunction with the operation list shown in FIG. 4 .

图4所示为图3所示实施例增益单元eDRAM单元400的操作列表示意图。以下结合操作列表具体说明其写操作、读操作、数据保持操作以及刷新操作过程:FIG. 4 is a schematic diagram of an operation list of the gain unit eDRAM unit 400 of the embodiment shown in FIG. 3 . The following combined operation list specifically describes its write operation, read operation, data retention operation and refresh operation process:

(1)写操作(Write):写“1”时,WWL置为(-V1)伏(V),例如,-V1设置为-400毫伏,写MOS晶体管400导通,RWL和RBL分别置为0V,WBL置为VDD,从而等效寄生电容405通过写MOS晶体管401被WBL充电,存储节点404电位接近高电平VDD。写“0”时,WWL置为(-V1)V,写MOS晶体管400导通,RWL和RBL分别置为0V,WBL也置为0V,从而等效寄生电容405通过写MOS晶体管401对WBL放电,存储节点404电位接近低电平0。(1) Write operation (Write): When writing "1", WWL is set to (-V1) volts (V), for example, -V1 is set to -400 millivolts, the write MOS transistor 400 is turned on, and RWL and RBL are respectively set to is 0V, WBL is set to VDD, so that the equivalent parasitic capacitance 405 is charged by WBL through the write MOS transistor 401, and the potential of the storage node 404 is close to the high level VDD. When writing "0", WWL is set to (-V1)V, the write MOS transistor 400 is turned on, RWL and RBL are respectively set to 0V, and WBL is also set to 0V, so that the equivalent parasitic capacitance 405 discharges WBL through the write MOS transistor 401 , the potential of the storage node 404 is close to low level 0.

(2)数据保持操作(Hold):WWL置VDD,WBL置0,RWL和RBL也分别置0,写MOS晶体管401和耦合互补MOS晶体管403关断,读MOS晶体管不工作,存储节点404的电位几乎不变。需要说明的是,由于耦合互补MOS晶体管403的引入,CBL410所置的固定电压为较高电压,其足以通过耦合互补MOS晶体管403的亚阈值漏电来补偿通过写MOS晶体管401的亚阈值漏电所导致的存储节点电位降低。较佳地,CBL410的固定电压选择与Vdd(即存储节点404的电位)大约相等。在该实施例,可以形成如图所示方向的写MOS晶体管401的亚阈值漏电和耦合互补MOS晶体管403的亚阈值漏电,尤其是在存储“1”时,(这是因为增益单元eDRAM的数据保持时间主要由存储“1”的单元决定,数据“0”的上升相比数据1的下降速率缓慢得多;例如,观察读MOS晶体管,假设阈值电压为-0.3V,只要存储“1”的单元的存储节点从1.2V下降到0.9V,就会发生错误,而对存储“0”的单元存储节点只有从大约0V(在较佳情况下,会由于写操作完成时写字线拉高而被耦合到200mV左右)上升到0.9V才会发生错误,因而可以很明显的看到存储“1”的减弱速率更是决定性因素)。由上可知,相比现有技术的eDRAM单元中的存储电位因在保持操作过程中的写MOS晶体管的亚阈值漏电所导致的电位下降,该实施例的存储节点404的电位在数据保持操作过程的电位下降相对更加缓慢,eDRAM单元400的数据保持时间增长,从而可以大大减少刷新操作的次数。(2) Data holding operation (Hold): WWL is set to VDD, WBL is set to 0, RWL and RBL are also set to 0 respectively, the write MOS transistor 401 and the coupled complementary MOS transistor 403 are turned off, the read MOS transistor does not work, and the potential of the storage node 404 Almost unchanged. It should be noted that due to the introduction of the coupling complementary MOS transistor 403, the fixed voltage set by the CBL410 is a relatively high voltage, which is sufficient to compensate for the subthreshold leakage caused by the write MOS transistor 401 through the subthreshold leakage of the coupling complementary MOS transistor 403. The potential of the storage node decreases. Preferably, the fixed voltage selection of CBL 410 is approximately equal to Vdd (ie, the potential of storage node 404 ). In this embodiment, the subthreshold leakage of the write MOS transistor 401 and the subthreshold leakage of the coupling complementary MOS transistor 403 can be formed in the direction shown in the figure, especially when storing "1", (this is because the data of the gain unit eDRAM The hold time is mainly determined by the cell storing "1", and the rising rate of data "0" is much slower than the falling rate of data 1; When the storage node of the cell drops from 1.2V to 0.9V, an error will occur, and the storage node of the cell storing "0" will only go from about 0V (in a better case, it will be blocked by the write word line when the write operation is completed). Coupled to about 200mV) rises to 0.9V to make an error, so it can be clearly seen that the weakening rate of the stored "1" is even more decisive). It can be seen from the above that, compared with the storage potential in the eDRAM cell of the prior art due to the potential drop caused by the subthreshold leakage of the write MOS transistor during the hold operation, the potential of the storage node 404 in this embodiment is lower during the data hold operation. The potential drop of the eDRAM unit 400 is relatively slower, and the data retention time of the eDRAM unit 400 is increased, so that the number of refresh operations can be greatly reduced.

(3)读操作(Read):读“1”时,WWL接VDD,WBL接0,RWL接VDD,RBL先预充至0,此时写MOS晶体管401关断,如果存储节点404为“1”,读MOS晶体管402关断,读位线RBL维持0电平。读“0”时,WWL接VDD,WBL接0,RWL接VDD,RBL在读操作前被预充至0电位,此时写MOS晶体管401关断,如果存储节点404为“0”,读MOS晶体管402导通,读位线RBL电压从0上升,由于eDRAM存储单元400的外围读出放大电路的钳位作用,RBL的电位可达到V2(外围读出放大电路所钳位的电压)。需要说明的是,V2可以设置为略小于耦合互补MOS晶体管403导通的阈值电压,例如,当Vdd为1.2V时,耦合互补MOS晶体管403的阈值电压Vth为0.3~0.4V,V2设置为0.3V,即使RBL电位为V2,由于写操作完成时写字线拉高存储节点电压会被耦合到200mV左右,故耦合互补MOS晶体管403也不会导通。因此也不会影响存储节点404的电位。由上可知,根据RBL上的不同电压可以分辨增益单元eDRAM单元400所存储的数据状态。(3) Read operation (Read): When reading "1", WWL is connected to VDD, WBL is connected to 0, RWL is connected to VDD, RBL is precharged to 0 first, and the write MOS transistor 401 is turned off at this time. If the storage node 404 is "1" ”, the read MOS transistor 402 is turned off, and the read bit line RBL maintains 0 level. When reading "0", WWL is connected to VDD, WBL is connected to 0, RWL is connected to VDD, and RBL is precharged to 0 potential before the read operation. At this time, the write MOS transistor 401 is turned off. If the storage node 404 is "0", the read MOS transistor 402 is turned on, the voltage of the read bit line RBL rises from 0, and due to the clamping effect of the peripheral sense amplifier circuit of the eDRAM storage unit 400, the potential of RBL can reach V2 (the voltage clamped by the peripheral sense amplifier circuit). It should be noted that V2 can be set to be slightly lower than the threshold voltage at which the coupled complementary MOS transistor 403 is turned on. For example, when Vdd is 1.2V, the threshold voltage Vth of the coupled complementary MOS transistor 403 is 0.3~0.4V, and V2 is set to 0.3 V, even if the potential of RBL is V2, the voltage of the storage node will be coupled to about 200mV when the writing word line is pulled up when the writing operation is completed, so the coupled complementary MOS transistor 403 will not be turned on. Therefore, the potential of the storage node 404 is not affected. It can be known from the above that the data state stored in the gain unit eDRAM unit 400 can be distinguished according to different voltages on the RBL.

(4)刷新操作:由上可知,虽然,该增益单元eDRAM单元400的数据保持特性相对大大提高,但由于存储节点404存在写MOS晶体管401管和读MOS晶体402管的亚阈值漏电以及读MOS晶体管402管的栅漏电,即使401管、403管的亚阈值漏电方向相对存储节点的方向相反、大小相当,但整体来看,仍不可避免有少量漏电。因此也需要对增益单元eDRAM单元400定期进行刷新操作。不过该刷新频率较低,在刷新操作时,采用先读后写的模式。(4) Refresh operation: As can be seen from the above, although the data retention characteristics of the gain unit eDRAM unit 400 are relatively greatly improved, due to the subthreshold leakage of the write MOS transistor 401 and the read MOS transistor 402 in the storage node 404 and the read MOS The gate leakage of the transistor 402, even though the direction of the subthreshold leakage of the transistor 401 and 403 is opposite to that of the storage node, and the magnitude is the same, but overall, there is still a small amount of leakage unavoidable. Therefore, it is also necessary to periodically refresh the gain cell eDRAM unit 400 . However, the refresh frequency is low, and the mode of reading first and then writing is adopted during the refresh operation.

以上操作过程中,CBL410均置固定电压。During the above operations, CBL410 is set to a fixed voltage.

因此,由以上可知,一方面,由于等效寄生电容404的电容值的增加,一定程度上使得存储节点的初始电荷量更高,在电荷泄露速度相同的情况下,数据保持时间可以更长。另外一方面,增益单元eDRAM的存储结构的漏电途径主要包括三部分:亚阈值漏电、PN结漏电和栅极漏电,其中,亚阈值漏电占绝大部分,PN结漏电占较小部分,栅极漏电几乎忽略不计。本发明提供的eDRAM单元400,由于耦合互补MOS管和写MOS管的亚阈值漏电方向相反、大小数量级相同,因此会部分相互抵偿,因而本发明提供的eDRAM单元电荷泄露的更慢,使得在存储节点初始电荷量相同的情况下,数据保持时间可以更长。Therefore, it can be seen from the above that, on the one hand, due to the increase of the capacitance value of the equivalent parasitic capacitance 404, the initial charge amount of the storage node is higher to some extent, and the data retention time can be longer under the condition of the same charge leakage rate. On the other hand, the leakage path of the storage structure of the gain unit eDRAM mainly includes three parts: subthreshold leakage, PN junction leakage and gate leakage. Leakage is almost negligible. In the eDRAM unit 400 provided by the present invention, since the subthreshold leakage directions of the coupled complementary MOS transistor and the write MOS transistor are opposite and the order of magnitude is the same, they will partially offset each other. Therefore, the charge leakage of the eDRAM unit provided by the present invention is slower. When the initial charge of the node is the same, the data retention time can be longer.

进一步,由于存储节点的电容增大以及亚阈值漏电抵消,使得相比现有图1和图2所示结构,在存储单元保持数据相同时间后,读晶体管的栅极,即存储节点的电平更接近初始写入电平,这样就能更快的根据读MOS管是否导通把读字线上的电压耦合到读位线上或者继续保持预充电的0电平,提高了数据读取速度。Further, due to the increase in the capacitance of the storage node and the offset of subthreshold leakage, compared with the existing structures shown in Figures 1 and 2, after the storage unit retains data for the same time, the gate of the read transistor, that is, the level of the storage node It is closer to the initial write level, so that the voltage on the read word line can be coupled to the read bit line according to whether the read MOS tube is turned on faster or continue to maintain the precharged 0 level, which improves the data read speed .

再进一步,本发明提供的eDRAM单元的RWL和RBL则在保持时接低电平,再加上数据保持时间较长、使得刷新功耗大幅降低,因而在eDRAM阵列的操作总功耗上有显著优势。Furthermore, the RWL and RBL of the eDRAM unit provided by the present invention are connected to a low level when maintaining, and the data retention time is longer, so that the refresh power consumption is greatly reduced, so there is a significant difference in the total power consumption of the operation of the eDRAM array. Advantage.

图5所示为本发明第二实施例的增益单元eDRAM单元结构示意图。对比图3所示实施例的增益单元eDRAM单元结构,该增益单元eDRAM单元500同样包括:写MOS晶体管501、读MOS晶体管502、耦合互补MOS晶体管503、写字线(Write Word Line,WWL)506、写位线(Write Bit Line,WBL)507、读字线(Read Word Line,RWL)508、读位线(ReadBit Line,RBL)509、接固定电压的公共位线(Common Bit Line,CBL)510。等效寄生电容505同样写MOS晶体管501的有源区寄生电容、读MOS晶体管502的栅电容、耦合互补MOS晶体管503的有源区寄生电容三者的并联组合,存储节点504的电位反映增益单元eDRAM单元500的数据存储状态。与图3所示实施例的区别是:写MOS晶体管501、读MOS晶体管502为NMOS晶体管,当其栅电压为正电压信号时,可以使晶体管501和502导通。而耦合互补MOS晶体管503为PMOS晶体管,当其栅电压为负电压信号时,可以使晶体管503导通。该图5所示实施例的增益单元eDRAM单元500与图3所示实施例的增益单元eDRAM单元400的工作原理基本相同,在此不再作一一详述。FIG. 5 is a schematic structural diagram of a gain unit eDRAM unit according to a second embodiment of the present invention. Compared with the gain unit eDRAM unit structure of the embodiment shown in FIG. 3, the gain unit eDRAM unit 500 also includes: a write MOS transistor 501, a read MOS transistor 502, a coupled complementary MOS transistor 503, a write word line (Write Word Line, WWL) 506, Write Bit Line (WBL) 507, Read Word Line (RWL) 508, Read Bit Line (RBL) 509, Common Bit Line (CBL) 510 connected to a fixed voltage . The equivalent parasitic capacitance 505 is also the parallel combination of the parasitic capacitance of the active area of the write MOS transistor 501, the gate capacitance of the read MOS transistor 502, and the parasitic capacitance of the active area of the coupling complementary MOS transistor 503, and the potential of the storage node 504 reflects the gain unit The data storage state of the eDRAM cell 500 . The difference from the embodiment shown in FIG. 3 is that the write MOS transistor 501 and the read MOS transistor 502 are NMOS transistors, and when the gate voltage is a positive voltage signal, the transistors 501 and 502 can be turned on. The coupled complementary MOS transistor 503 is a PMOS transistor, and when its gate voltage is a negative voltage signal, the transistor 503 can be turned on. The working principle of the gain unit eDRAM unit 500 in the embodiment shown in FIG. 5 is basically the same as that of the gain unit eDRAM unit 400 in the embodiment shown in FIG. 3 , and will not be described in detail here.

需要进一步说明的是,为进一步提高本发明增益单元eDRAM单元的数据保持时间,可以设计耦合互补MOS晶体管与写MOS晶体管具有基本相同的结构参数(例如MOS管宽长比等),从而使分别流过写MOS晶体管的亚阈值漏电和流过的耦合互补MOS晶体管的亚阈值漏电在大小上更加接近。另外,还可以,在写MOS晶体管、耦合互补MOS晶体管上分别置衬底偏压,以同时减少写MOS晶体管和耦合互补MOS晶体管的亚阈值漏电。It should be further explained that, in order to further improve the data retention time of the gain unit eDRAM unit of the present invention, the coupling complementary MOS transistor and the writing MOS transistor can be designed to have substantially the same structural parameters (such as the MOS tube width-to-length ratio, etc.), so that the respective flow The subthreshold leakage of the overwriting MOS transistor and the subthreshold leakage of the flowing coupled complementary MOS transistor are closer in magnitude. In addition, it is also possible to respectively set substrate bias voltages on the writing MOS transistor and the coupling complementary MOS transistor, so as to simultaneously reduce the subthreshold leakage of the writing MOS transistor and the coupling complementary MOS transistor.

图6所示为本发明提供的、由图3所示实施例增益单元eDRAM单元排列组成的增益单元eDRAM存储器结构示意图。该增益单eDRAM存储器包括增益单元阵列,增益单元阵列是由增益单元按行和列的形式排列而成。字线和位线交叉排列,增益单元置于交叉排列点。该增益单元eDRAM存储器还包括行译码器、列译码器、灵敏放大器、字线驱动模块、位线驱动模块、公共位线驱动模块和逻辑控制模块。逻辑控制模块的功能是控制字线驱动模块和位线驱动模块在读操作、写操作、数据保持操作以及刷新操作中的时序。其中选中行选中列的位线电压变化可通过灵敏放大器分辨,并与Vref(参考电压)比较,得到读出数据。行地址数输入行译码器,用于选中阵列中的WWL和RWL,列地址输入列译码器,公共位线驱动模块用于产生所有单元公共位线上的固定电压,该固定电压为较高电平。FIG. 6 is a schematic structural diagram of a gain unit eDRAM memory provided by the present invention, which is composed of the array of gain unit eDRAM units shown in FIG. 3 . The single-gain eDRAM memory includes a gain unit array, and the gain unit array is formed by arranging the gain units in the form of rows and columns. The word lines and the bit lines are arranged crosswise, and the gain unit is placed at the point of the crosswise arrangement. The gain unit eDRAM memory also includes a row decoder, a column decoder, a sense amplifier, a word line driver module, a bit line driver module, a common bit line driver module and a logic control module. The function of the logic control module is to control the timing of the word line driver module and the bit line driver module in read operation, write operation, data hold operation and refresh operation. The change of the bit line voltage of the selected row and selected column can be distinguished by the sense amplifier and compared with Vref (reference voltage) to obtain the readout data. The number of row addresses is input to the row decoder, which is used to select WWL and RWL in the array, the column address is input to the column decoder, and the common bit line driver module is used to generate a fixed voltage on the common bit line of all units. high level.

在不脱离本发明的精神和范围的情况下,本领域技术人员可以做出对增益单元eDRAM单元中的具体器件的等同功能的替换,例如耦合互补MOS晶体管替换为用于耦合互补的三极管等。应当理解,除了如所附的权利要求所限定的,本发明不限于在说明书中所述的具体实施例。Without departing from the spirit and scope of the present invention, those skilled in the art can make functional equivalent replacements for specific devices in the gain unit eDRAM unit, for example, replacing the coupling complementary MOS transistor with a complementary coupling triode, etc. It should be understood that the invention is not limited to the specific embodiments described in the specification, except as defined in the appended claims.

尽管对本发明的描述是以参考实例和较佳实施例的方式做出的,但是本领域的技术人员将认知到,在不脱离本发明的范围和精神的前提下,可以在形式或者细节上做出改变。Although the present invention has been described by way of reference to examples and preferred embodiments, workers skilled in the art will recognize that changes may be made in form or detail without departing from the scope and spirit of the invention. make change.

Claims (8)

1.一种增益单元eDRAM单元,包括写MOS晶体管、读MOS晶体管、写字线、写位线、读字线、读位线,其中,所述MOS晶体管的栅极连接至所述写字线,所述写MOS晶体管的源端/漏端连接所述写位线,所述写MOS晶体管的漏端/源端连接所述读MOS晶体管的栅极,所述读MOS晶体管的源端/漏端连接所述写字线,所述读MOS晶体管的漏端/源端连接所述读位线,其特征在于,还包括耦合互补MOS晶体管和接固定电压的公共位线,所述耦合互补MOS晶体管的源端/漏端连接所述接固定电压的公共位线,所述耦合互补MOS晶体管的栅极连接所述读位线,所述耦合互补MOS晶体管的漏端/源端连接所述写MOS晶体管的漏端/源端以及所述读MOS晶体管的栅极;1. A gain unit eDRAM unit, comprising a write MOS transistor, a read MOS transistor, a write word line, a write bit line, a read word line, and a read bit line, wherein the gate of the MOS transistor is connected to the write word line, the The source/drain of the write MOS transistor is connected to the write bit line, the drain/source of the write MOS transistor is connected to the gate of the read MOS transistor, and the source/drain of the read MOS transistor is connected to The write word line, the drain terminal/source terminal of the read MOS transistor is connected to the read bit line, and it is characterized in that it also includes a common bit line coupled to a complementary MOS transistor and a fixed voltage, and the source of the coupled complementary MOS transistor The terminal/drain terminal is connected to the common bit line connected to a fixed voltage, the gate of the coupled complementary MOS transistor is connected to the read bit line, and the drain terminal/source terminal of the coupled complementary MOS transistor is connected to the write MOS transistor. a drain terminal/source terminal and a gate of the read MOS transistor; 其中,写MOS晶体管的有源区寄生电容、读MOS晶体管的栅电容、耦合互补MOS晶体管的有源区寄生电容三者的并联组合形成用于存储数据的等效寄生电容。The parasitic capacitance of the active area of the writing MOS transistor, the gate capacitance of the reading MOS transistor, and the parasitic capacitance of the active area of the coupling complementary MOS transistor form an equivalent parasitic capacitance for storing data. 2.根据权利要求1所述的增益单元eDRAM单元,其特征在于,所述写MOS晶体管和读MOS晶体管为PMOS晶体管,所述耦合互补MOS晶体管为NMOS晶体管;或者所述写MOS晶体管和读MOS晶体管为NMOS晶体管,所述耦合互补MOS晶体管为PMOS晶体管。2. The gain unit eDRAM unit according to claim 1, wherein the write MOS transistor and the read MOS transistor are PMOS transistors, and the coupled complementary MOS transistor is an NMOS transistor; or the write MOS transistor and the read MOS transistor The transistor is an NMOS transistor, and the coupled complementary MOS transistor is a PMOS transistor. 3.根据权利要求1所述的增益单元eDRAM单元,其特征在于,所述耦合互补MOS晶体管与写MOS晶体管具有基本相同的结构参数。3 . The gain unit eDRAM unit according to claim 1 , wherein the coupling complementary MOS transistor and the write MOS transistor have substantially the same structural parameters. 4 . 4.根据权利要求1所述的增益单元eDRAM单元,其特征在于,所述写MOS晶体管、耦合互补MOS晶体管上分别置衬底偏压,以同时减少写MOS晶体管和耦合互补MOS晶体管的亚阈值漏电。4. The gain cell eDRAM unit according to claim 1, wherein the write MOS transistor and the coupled complementary MOS transistor are respectively provided with substrate bias voltages to simultaneously reduce the subthreshold of the write MOS transistor and the coupled complementary MOS transistor Leakage. 5.一种如权利要求1所述的增益单元eDRAM单元的操作方法,其特征在于,数据保持操作时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,接固定电压的公共位线置为固定电位;通过写MOS管的亚阈值漏电流相对所述等效寄生电容的方向与通过耦合互补MOS晶体管的亚阈值漏电流相对所述等效寄生电容的方向相反。5. A method of operating the gain unit eDRAM unit as claimed in claim 1, wherein, during data retention operation, the write word line is set to the first potential that writes the MOS transistor to be closed, the write bit line is set to 0 potential, and the read bit line is set to 0 potential. The bit line is set to the second potential that makes the coupling complementary MOS transistor close, the read word line is set to 0 potential or the second potential, and the common bit line connected to a fixed voltage is set to a fixed potential; the subthreshold leakage current of the write MOS transistor is relatively The direction of the equivalent parasitic capacitance is opposite to the direction of the subthreshold leakage current through the coupled complementary MOS transistor relative to the equivalent parasitic capacitance. 6.根据权利要求5所述的操作方法,其特征在于,写操作:写“1”时,写字线置为使写MOS晶体管导通的第三电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,写位线置为第一电位,等效寄生电容通过写MOS晶体管被充电至第一电位;写“0”时,写字线置为使写MOS晶体管导通的第三电位,读位线置为使耦合互补MOS晶体管关闭的第二电位,读字线置0电位或者第二电位,写位线置为0电位,等效寄生电容通过写MOS晶体管被放电至0电位;6. The operation method according to claim 5, characterized in that, write operation: when writing "1", the write word line is set to the third potential that makes the write MOS transistor conductive, and the read bit line is set to make the coupling complementary MOS transistor The second potential is turned off, the read word line is set to 0 potential or the second potential, the write bit line is set to the first potential, and the equivalent parasitic capacitance is charged to the first potential through the write MOS transistor; when writing "0", the write word line is set to the first potential. In order to make the write MOS transistor turn on the third potential, the read bit line is set to the second potential to turn off the coupled complementary MOS transistor, the read word line is set to 0 potential or the second potential, and the write bit line is set to 0 potential, which is equivalent to parasitic The capacitor is discharged to 0 potential through the write MOS transistor; 所述固定电位接近于第一电位。The fixed potential is close to the first potential. 7.根据权利要求5所述的操作方法,其特征在于,读操作:读“1”时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读字线置第一电位,读位线在读操作前被预充至0电位并在读操作时保持0电位;读“0”时,写字线置为使写MOS晶体管关闭的第一电位,写位线置0电位,读字线置第一电位,读位线的电位从0电位上升至外围读出放大电路所钳位的电位。7. The operation method according to claim 5, characterized in that, read operation: when reading "1", the write word line is set to the first potential that makes the write MOS transistor closed, the write bit line is set to 0 potential, and the read word line is set to 0 potential. The first potential, the read bit line is precharged to 0 potential before the read operation and remains at 0 potential during the read operation; when reading "0", the write word line is set to the first potential that turns off the write MOS transistor, and the write bit line is set to 0 potential , the read word line is set to the first potential, and the potential of the read bit line rises from 0 potential to the potential clamped by the peripheral sense amplifier circuit. 8.根据权利要求5所述的操作方法,其特征在于,刷新操作时,采用先读后写的模式。8. The operation method according to claim 5, characterized in that, during the refresh operation, a mode of reading first and then writing is adopted.
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