CN102076878B - 电源装置 - Google Patents

电源装置 Download PDF

Info

Publication number
CN102076878B
CN102076878B CN2009801255039A CN200980125503A CN102076878B CN 102076878 B CN102076878 B CN 102076878B CN 2009801255039 A CN2009801255039 A CN 2009801255039A CN 200980125503 A CN200980125503 A CN 200980125503A CN 102076878 B CN102076878 B CN 102076878B
Authority
CN
China
Prior art keywords
aforementioned
potential
power supply
electrode
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2009801255039A
Other languages
English (en)
Chinese (zh)
Other versions
CN102076878A (zh
Inventor
堀下芳邦
松原忍
小野敦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN102076878A publication Critical patent/CN102076878A/zh
Application granted granted Critical
Publication of CN102076878B publication Critical patent/CN102076878B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Dc-Dc Converters (AREA)
CN2009801255039A 2008-06-30 2009-06-17 电源装置 Active CN102076878B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008170807A JP5500794B2 (ja) 2008-06-30 2008-06-30 電源装置
JP2008-170807 2008-06-30
PCT/JP2009/060989 WO2010001724A1 (ja) 2008-06-30 2009-06-17 電源装置

Publications (2)

Publication Number Publication Date
CN102076878A CN102076878A (zh) 2011-05-25
CN102076878B true CN102076878B (zh) 2013-01-16

Family

ID=41465825

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801255039A Active CN102076878B (zh) 2008-06-30 2009-06-17 电源装置

Country Status (6)

Country Link
US (1) US20110120861A1 (cg-RX-API-DMAC10.html)
JP (1) JP5500794B2 (cg-RX-API-DMAC10.html)
KR (2) KR20130080055A (cg-RX-API-DMAC10.html)
CN (1) CN102076878B (cg-RX-API-DMAC10.html)
TW (1) TW201006317A (cg-RX-API-DMAC10.html)
WO (1) WO2010001724A1 (cg-RX-API-DMAC10.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9039871B2 (en) * 2007-11-16 2015-05-26 Advanced Energy Industries, Inc. Methods and apparatus for applying periodic voltage using direct current
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
WO2012023276A1 (ja) * 2010-08-18 2012-02-23 株式会社アルバック 直流電源装置
US9287098B2 (en) 2012-11-01 2016-03-15 Advanced Energy Industries, Inc. Charge removal from electrodes in unipolar sputtering system
US9226380B2 (en) 2012-11-01 2015-12-29 Advanced Energy Industries, Inc. Adjustable non-dissipative voltage boosting snubber network
US9129776B2 (en) * 2012-11-01 2015-09-08 Advanced Energy Industries, Inc. Differing boost voltages applied to two or more anodeless electrodes for plasma processing
JP2022080674A (ja) * 2020-11-18 2022-05-30 東京エレクトロン株式会社 プラズマ処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1248298A (zh) * 1997-02-20 2000-03-22 芝浦机械电子装置股份有限公司 用于溅射的电源装置和使用该装置的溅射设备
CN1653206A (zh) * 2002-05-17 2005-08-10 应用菲林公司 用于控制溅射沉积过程的系统和装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4233720C2 (de) * 1992-10-07 2001-05-17 Leybold Ag Einrichtung für die Verhinderung von Überschlägen in Vakuum-Zerstäubungsanlagen
DE4446532A1 (de) * 1994-12-24 1996-06-27 Bosch Gmbh Robert Stromversorgungsschaltung
JP3028292B2 (ja) * 1995-10-20 2000-04-04 株式会社ハイデン研究所 正負パルス式高電圧電源
DE19651811B4 (de) * 1996-12-13 2006-08-31 Unaxis Deutschland Holding Gmbh Vorrichtung zum Belegen eines Substrats mit dünnen Schichten
JP2005133110A (ja) * 2003-10-28 2005-05-26 Konica Minolta Opto Inc スパッタリング装置
JP5016819B2 (ja) * 2006-01-11 2012-09-05 株式会社アルバック スパッタリング方法及びスパッタリング装置
JP4320019B2 (ja) * 2006-01-11 2009-08-26 株式会社アルバック スパッタリング装置
EP2102888B1 (en) * 2006-12-12 2015-07-29 Oerlikon Advanced Technologies AG Arc suppression and pulsing in high power impulse magnetron sputtering (hipims)

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1248298A (zh) * 1997-02-20 2000-03-22 芝浦机械电子装置股份有限公司 用于溅射的电源装置和使用该装置的溅射设备
CN1653206A (zh) * 2002-05-17 2005-08-10 应用菲林公司 用于控制溅射沉积过程的系统和装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2005-133110A 2005.05.26
JP特开2007-186726A 2007.07.26

Also Published As

Publication number Publication date
KR20110027819A (ko) 2011-03-16
JP2010007162A (ja) 2010-01-14
KR101298166B1 (ko) 2013-08-21
TW201006317A (en) 2010-02-01
US20110120861A1 (en) 2011-05-26
KR20130080055A (ko) 2013-07-11
WO2010001724A1 (ja) 2010-01-07
CN102076878A (zh) 2011-05-25
JP5500794B2 (ja) 2014-05-21

Similar Documents

Publication Publication Date Title
CN102084024B (zh) 电源装置
US8467211B2 (en) Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies
KR101181875B1 (ko) 바이폴라 펄스 전원 및 이 바이폴라 펄스 전원을 복수대 병렬 접속하여 구성되는 전원 장치
CN102076878A (zh) 电源装置
US8404089B2 (en) Sputtering method
CN103069928B (zh) 直流电源装置
JP5322234B2 (ja) スパッタリング方法及びスパッタリング装置
JP5186281B2 (ja) バイポーラパルス電源及びこのバイポーラパルス電源を複数台並列接続してなる電源装置
CN101784694B (zh) 溅射方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant