CN102063057B - PID control device for closed loop driving of micro-mechanical resonance type device - Google Patents

Abstract

The invention relates to a proportion-integration-differentiation (PID) control device for closed loop driving of a micro-mechanical resonance type device, which forms a closed loop system of the micro-mechanical resonance type device with a multiplying unit, a micro-mechanical resonance type device, a front read-out circuit, a filter and an amplitude extractor. The PID control device is characterized in that: the PID control device consists of two PID controllers and at least one adder; and the input end of the PID control device is connected with the output end of the amplitude extractor, and the input end of the PID control device is connected with the input end of the amplitude extractor. The PID control device ensures that the closed loop system of the micro-mechanical resonance type device simultaneously has the tracking performance and the interference resistance, and is suitable for closed loop driving control of a resonance micro-cantilever, a micro-resonator, a micro-mechanical top, a resonance type micro-accelerometer and other micro-mechanical resonance type devices.

Description

A kind of micromachine resonant device closed loop drives the PID control device of usefulness

Technical field

The present invention relates to a kind of PID (Proportion Integration Differentiation, PID) controller, particularly drive the PID control device of usefulness about a kind of micromachine resonant device closed loop.

Background technology

The micromachine resonant device adopts microelectronic processing technology to process; Its characteristic dimension is a micron dimension; Have that volume is little, cost is low, be suitable for batch machining and be easy to and the integrated advantage of ASIC (Application Specific Integrated Circuit, special IC).The micromachine resonant device generally requires its natural resonance frequency place that is operated in self, to obtain maximum Oscillation Amplitude.At present; The drive system that makes the micromachine resonant device carry out resonance comprises micromachine resonant device open cycle system (hereinafter all is called: " open cycle system ") and micromachine resonant device closed-loop system (hereinafter all is called: " closed-loop system "); The former adopts the open loop type of drive; The parameter that this type of drive can not suppress driving control system changes, the change that brings Oscillation Amplitude easily, so open cycle system can only be applied in the not high occasion of accuracy requirement.Closed-loop system adopts closed-loop drive system, the resonance frequency that this type of drive not only can real-time follow-up micromachine resonant device, but also can make Oscillation Amplitude stable.

Like Fig. 1, shown in Figure 2; Existing closed-loop system comprises a series connection circuit that is made up of the preposition sensing circuit of a micromachine resonant device 1, one 2, a wave filter 3, an amplitude extraction apparatus 4, a single-degree-of-freedom PID control device 5 and a multiplier 6, and the output terminal of wave filter 3 connects the input end of multiplier 6.Wherein, as shown in Figure 2, micromachine resonant device 1 comprises a Drive Structure 101, one a movable resonance structure 102 and a vibration pickup structure 103.Single-degree-of-freedom PID control device 5 comprises a totalizer 501 and a PID controller 502.

During closed-loop system work, an Oscillation Amplitude standard value R is set in advance in totalizer 501 at first.After applying driving voltage on the Drive Structure 101, produce a static driven power F _ElStatic driven power F _ElBe applied on the movable resonance structure 102, make 102 vibrations of movable resonance structure and produce a displacement variable.This displacement variable is transformed into capacitance change through vibration pickup structure 103, and capacitance change is delivered to preposition sensing circuit 2 again.Preposition sensing circuit 2 converts capacitance change into voltage variety, obtaining the vibration information of movable resonance structure 102, and voltage variety is flowed to wave filter 3.Wave filter 3 receives the voltage variety of preposition sensing circuit 2 outputs, and the signal beyond the resonance frequency in the voltage variety is carried out filtering, exports a vibration voltage signal A.Vibration voltage signal A obtains an Oscillation Amplitude B through behind the amplitude extraction apparatus 4, and in the input summer 501.Oscillation Amplitude standard value R and Oscillation Amplitude B that totalizer 501 will be provided with in advance compare, and obtain an Oscillation Amplitude difference C.In the Oscillation Amplitude difference C input PID controller 502, PID controller 502 converts Oscillation Amplitude difference C to Oscillation Amplitude control signal D.Oscillation Amplitude control signal D imports multiplier 6, and simultaneously, wave filter 3 is inputted vibration voltage signal A in multiplier 6.Multiplier 6 utilizes Oscillation Amplitude control signal D to regulate vibration voltage signal A, obtains a driving voltage V, flows to the Drive Structure 101 in the micromachine resonant device 1, thereby has realized whole closed-loop control.This closed loop control method can make micromachine resonant device 1 in its resonance frequency place vibration, keeps the constant amplitude vibration simultaneously.

As shown in Figure 3, set: the equivalent transfer function from Oscillation Amplitude control signal D to the amplitude extraction apparatus the Oscillation Amplitude B of 4 outputs is P (s), the transport function G from Oscillation Amplitude standard value R to the amplitude extraction apparatus the Oscillation Amplitude B of 4 outputs ₁(s) be:

$G_1\left(s\right)=\frac{P\left(s\right)C\left(s\right)}{P\left(s\right)C\left(s\right)+1}---\left(1\right)$

G ₁(s) tracking characteristics of the whole closed-loop system of embodiment.

Transport function G from perturbation amplitude value d to the amplitude extraction apparatus the Oscillation Amplitude B of 4 outputs ₂(s) be:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}---\left(2\right)$

G ₂(s) the disturbance rejection characteristic of the whole closed-loop system of embodiment.

Wherein, control function is in the PID controller 502:

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s---\left(3\right)$

In the formula (3), K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

Before using closed-loop system, need regulate the parameter of single-degree-of-freedom PID control device 5.Make the loop of closed-loop system satisfy tracking characteristics if regulate the parameter of PID control device 5 earlier, promptly regulate formula (1), this moment, the disturbance characteristic of closed-loop system was confirmed thereupon, and can not regulate.Make the loop of closed-loop system satisfy the disturbance characteristic if regulate the parameter of PID control device 5 earlier, promptly regulate formula (2), this moment, the tracking characteristics of closed-loop system was confirmed thereupon, and can not regulate.That is to say that single-degree-of-freedom PID control device 5 can not be regulated tracking characteristics and disturbance rejection characteristic simultaneously.

The PID control device of present disclosed employing single-degree-of-freedom control mode has: Chinese patent CN1299427C and Korea S document W.T.Sung, S.Sung, J.Y.Lee; T.Kang, Y.J.Lee and J.G.Lee, " Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test; " J.Micromech.Microeng.vol.18; May, 2008, the two has all adopted single-degree-of-freedom PI controller; And only proportional and two parameters of integration can regulate, but the two is limited to the regulating power of tracking characteristics.China document J.Cui, X.Z.Chi, H.T.Ding; L.T.Lin, Z.C.Yang and G.Z.Yan, " Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes; " Journal of Micromechanics and Microengineering; Vol.19, Dec 2009, and each item transient state index has been carried out labor; Improve tracking characteristics through the adjustment control parameter, but still can not take into account the disturbance rejection performance.

Summary of the invention

To the problems referred to above, the purpose of this invention is to provide the PID control device that micromachine resonant device closed loop that a kind of closed-loop system that makes the micromachine resonant device satisfies tracking performance and interference free performance simultaneously drives usefulness.

For realizing above-mentioned purpose; The present invention takes following technical scheme: a kind of micromachine resonant device closed loop drives the PID control device of usefulness; Itself and a multiplier, a micromachine resonant device, a preposition sensing circuit, a wave filter and an amplitude extraction apparatus constitute a micromachine resonant device closed-loop system; It is characterized in that: said PID control device is made up of two PID controllers and at least one totalizer; The input end of said PID control device connects the output terminal of said amplitude extraction apparatus, and the output terminal of said PID control device connects the input end of said amplitude extraction apparatus.

Two said PID controllers are a PID controller and the 2nd PID controller, and said totalizer comprises first adder and second adder; Wherein, said first adder, a PID controller and second adder are connected in series, and the output terminal of said the 2nd PID controller connects the input end of said second adder; The output terminal of said amplitude extraction apparatus connects the input end of said first adder and the 2nd PID controller; Be provided with an Oscillation Amplitude standard value in the said first adder in advance, be provided with transport function C in first and second PID controller respectively in advance ₁(s), C ₂(s); Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)C_1\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

$C_1\left(s\right)=\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s;$

$C_2\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s;$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

The span of said α and β is closed interval [0,1].

Two said PID controllers are a PID controller and the 2nd PID controller; Wherein, a said PID controller, totalizer and the 2nd PID controller are connected in series, and the output terminal of said amplitude extraction apparatus connects the input end of totalizer; One Oscillation Amplitude standard value is arranged in the said totalizer through a said PID controller in advance, is provided with transport function C in first and second PID controller respectively in advance ₁(s), C (s); Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)C\left(s\right)C_1\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

$C_1\left(s\right)=\frac{\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s}{K_p+\frac{K_i}{s}+K_{d}s}$

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

The span of said α and β is closed interval [0,1].

Two said PID controllers comprise a PID controller and the 2nd PID controller, and said totalizer comprises first adder and second adder; Wherein, first adder, a PID controller and second adder are connected in series; The input end of said the 2nd PID controller connects the input end of said first adder, and output terminal connects the input end of said second adder; The output terminal of said amplitude extraction apparatus connects the input end of said first adder; One Oscillation Amplitude standard value is set in the said first adder in advance, is provided with transport function C (s), C in first and second PID controller respectively in advance ₁(s); Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)[C\left(s\right)-C_1\left(s\right)]}{P\left(s\right)C\left(s\right)+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s$

$C_1\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

The span of said α and β is closed interval [0,1].

The present invention is owing to take above technical scheme; It has the following advantages: 1, the present invention is owing to the two degrees of freedom PID control device that comprises two PID controllers closed-loop system being provided with; And corresponding transport function is set in the PID controller respectively; If regulate the parameter be arranged on transport function in the PID controller, just can regulate and the tracking characteristics of definite micromachine resonant device closed-loop system; If directly regulate the Oscillation Amplitude standard value of input two degrees of freedom PID control device and the Oscillation Amplitude of amplitude extraction apparatus output; Just can confirm the disturbance rejection performance of closed-loop system; That is to say; Two degrees of freedom PID control device of the present invention reduces the tracking characteristics of closed-loop system and the related of noiseproof feature greatly, therefore can take into account tracking characteristics and disturbance rejection performance.The present invention is applicable to the decline closed loop drive controlling of micromachine resonant devices such as accelerometer of resonant-type tiny cantilever beam, micro-resonator, micromechanical gyro resonant.

Description of drawings

Fig. 1 is the closed-loop system structural representation of existing single-degree-of-freedom PID controller

Fig. 2 is the structural representation of micromachine resonant device in the existing closed-loop system

Fig. 3 is the theory diagram of Fig. 1

Fig. 4 is the structural representation of the embodiment of the invention 1

Fig. 5 is the theory diagram of the embodiment of the invention 1

Fig. 6 is the structural representation of the embodiment of the invention 2

Fig. 7 is the theory diagram of the embodiment of the invention 2

Fig. 8 is the structural representation of the embodiment of the invention 3

Fig. 9 is the theory diagram of the embodiment of the invention 3

Embodiment

Below in conjunction with accompanying drawing and embodiment the present invention is carried out detailed description.

The invention provides a kind of two degrees of freedom PID control device, it not only can improve the tracking characteristics of closed-loop system, and can satisfy interference free performance simultaneously, enumerates three specific embodiments below the present invention is carried out more detailed explanation.

Embodiment 1:

As shown in Figure 4, the two degrees of freedom PID control device 7 of present embodiment comprises first adder 701, second adder 702, a PID controller 703 and the 2nd PID controller 704.Wherein, first adder 701, a PID controller 703 and second adder 702 are connected in series, and the output terminal of the 2nd PID controller 704 connects the input end of second adder 702; The output terminal of amplitude extraction apparatus 4 connects the input end of first adder 701 and the 2nd PID controller 704.Oscillation Amplitude standard value R is arranged in the first adder 701 in advance, and the funtcional relationship between the Oscillation Amplitude B of Oscillation Amplitude standard value R and 4 outputs of amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)C_1\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}---\left(4\right)$

Formula (4) can be used for estimating the tracking characteristics of closed-loop system.

Being provided with transport function in advance in the one PID controller 703 is:

$C_1\left(s\right)=\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s---\left(5\right)$

Being provided with transport function in advance in the 2nd PID controller 704 is:

$C_2\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s---\left(6\right)$

From perturbation amplitude value d be to the transport function the Oscillation Amplitude B:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}---\left(7\right)$

Formula (7) can be used for estimating the disturbance rejection characteristic of whole closed-loop system, and α in formula (5) and (6) and β are the adjustment factor of two degrees of freedom PID control device 7 of the present invention, and the span of the two is closed interval [0,1].

Like Fig. 2, Fig. 4, shown in Figure 5, during the work of the closed-loop system of present embodiment, an Oscillation Amplitude standard value R is set in advance in totalizer 501 at first.After applying driving voltage on the Drive Structure 101 of micromachine resonant device 1, produce static driven power F _El, be applied on the movable resonance structure 102.Movable resonance structure 102 produces displacement variable because of vibration, and this displacement variable is transformed into capacitance change through vibration pickup structure 103.Capacitance change is delivered to preposition sensing circuit 2 and wave filter 3 more successively, wave filter 3 output vibration voltage signal A.This vibration voltage signal A input range extraction apparatus 4 extracts Oscillation Amplitude B by amplitude extraction apparatus 4 from vibration voltage signal A afterwards, input first adder 701.

Oscillation Amplitude standard value R and Oscillation Amplitude B that first adder 701 will be provided with in advance compare, and obtain an Oscillation Amplitude difference C.Oscillation Amplitude difference C imports first and second PID controller 703,704 respectively, calculates an Oscillation Amplitude control signal F1 by a PID controller 703, calculates an Oscillation Amplitude control signal F2 by the 2nd PID controller 704.Oscillation Amplitude control signal F1, F2 all import second adder 702, by second adder 702 Oscillation Amplitude control signal F1, F2 are subtracted each other, and obtain an Oscillation Amplitude control signal difference DELTA F.After Oscillation Amplitude control signal difference DELTA F and perturbation amplitude value d all import a totalizer 10 stacks, input multiplier 6.Multiplier 6 utilizes Oscillation Amplitude control signal difference DELTA F and the perturbation amplitude value d after the stack, regulates vibration voltage signal A, obtains a driving voltage V.Driving voltage V flows to the Drive Structure 101 in the micromachine resonant device 1, thereby has realized whole closed-loop control.

The closed loop control method of present embodiment can make micromachine resonant device 1 in its resonance frequency place vibration, and keeps the constant amplitude vibration.Owing to adopted two degrees of freedom PID control device 7; The tracking characteristics of closed-loop system and noiseproof feature can be met simultaneously; Be embodied in: when regulating the parameter of two degrees of freedom PID control device 7; At first, regulate formula (7) earlier, can make closed-loop system have certain noiseproof feature according to the control method of conventional single-degree-of-freedom PID controller.Then, through regulating the adjustment factor α and the β of two degrees of freedom PID control device 7, promptly α and the β in formula (5) and (6) can make the loop of closed-loop system formation satisfy the tracking characteristics requirement.Can know that by formula (4) and (7) compare with conventional single-degree-of-freedom PID control device 5, two degrees of freedom PID control device 7 can make tracking characteristics and the related of noiseproof feature reduce greatly, and then has taken into account tracking characteristics and disturbance rejection characteristic.

Embodiment 2:

As shown in Figure 6, the two degrees of freedom PID control device 8 of present embodiment comprises a PID controller 801, the 2nd PID controller 802 and a totalizer 803.Wherein, a PID controller 801, totalizer 803 and the 2nd PID controller 802 are connected in series, and the output terminal of amplitude extraction apparatus 4 connects the input end of totalizer 803.Oscillation Amplitude standard value R is arranged in the totalizer 803 through a PID controller 801 in advance, and the functional relation between the Oscillation Amplitude B of Oscillation Amplitude standard value R and 4 outputs of amplitude extraction apparatus is:

$G_1\left(s\right)=\frac{P\left(s\right)C\left(s\right)C_1\left(s\right)}{P\left(s\right)C\left(s\right)+1}---\left(9\right)$

Formula (9) can be used for estimating the tracking characteristics of closed-loop system.

Being provided with transport function in advance in the one PID controller 801 is:

$C_1\left(s\right)=\frac{\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s}{K_p+\frac{K_i}{s}+K_{d}s}---\left(10\right)$

Being provided with transport function in the 2nd PID controller 802 in advance is formula (3):

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s$

Perturbation amplitude value d to the transport function between the Oscillation Amplitude B is:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}---\left(11\right)$

Formula (11) can be used for estimating the disturbance rejection characteristic of whole closed-loop system, and α in the formula (10) and β are the adjustment factor of two degrees of freedom PID control device 8 of the present invention, and the span of the two is closed interval [0,1].

Like Fig. 2, Fig. 6, shown in Figure 7, during the work of the closed-loop system of present embodiment, at first Oscillation Amplitude standard value R is obtained a filtered Oscillation Amplitude control signal R1 through a PID controller 801, and in the input summer 803.After applying driving voltage on the Drive Structure 101 of micromachine resonant device 1, produce static driven power F _El, be applied on the movable resonance structure 102.Movable resonance structure 102 produces displacement variable because of vibration, and this displacement variable is transformed into capacitance change through vibration pickup structure 103.Capacitance change is delivered to preposition sensing circuit 2 and wave filter 3 more successively, wave filter 3 output vibration voltage signal A.This vibration voltage signal A input range extraction apparatus 4 extracts Oscillation Amplitude B by amplitude extraction apparatus 4 from vibration voltage signal A, input summer 803 afterwards.

Totalizer 803 will compare through a PID controller 801 filtered Oscillation Amplitude control signal R1 and Oscillation Amplitude B, obtain an Oscillation Amplitude difference C.Oscillation Amplitude difference C imports the 2nd PID controller 802, calculates an Oscillation Amplitude control signal F1 by the 2nd PID controller 802.After Oscillation Amplitude control signal F1 and perturbation amplitude value d all import a totalizer 10 stacks, input multiplier 6.Multiplier 6 utilizes Oscillation Amplitude control signal F1 and the perturbation amplitude value d after the stack, regulates vibration voltage signal A, obtains a driving voltage V.Driving voltage V flows to the Drive Structure 101 in the micromachine resonant device 1, thereby has realized whole closed-loop control.

The closed loop control method of present embodiment can make the micromachine resonant device in its resonance frequency place vibration, and keeps the constant amplitude vibration.Owing to adopted two degrees of freedom PID control device 8; The tracking characteristics of closed-loop system and noiseproof feature can be met simultaneously; Be embodied in: when regulating the parameter of two degrees of freedom PID control device 8; At first, regulate formula (11) earlier, can make closed-loop system have certain noiseproof feature according to the control method of conventional single-degree-of-freedom PID controller 5.Then, through regulating the adjustment factor α and the β of two degrees of freedom PID control device 8, promptly α and the β in the formula (10) can make the loop of closed-loop system satisfy the tracking characteristics requirement.Can know that by formula (9) and (11) compare with conventional single-degree-of-freedom PID control device 5, two degrees of freedom PID control device 8 can make tracking characteristics and the related of noiseproof feature reduce greatly, and then has taken into account tracking characteristics and disturbance rejection performance.

Embodiment 3:

Like Fig. 8, shown in Figure 9, the two degrees of freedom PID control device 9 of present embodiment comprises a PID controller 901, the 2nd PID controller 902, first adder 903 and second adder 904.Wherein, First adder 903, a PID controller 901 and second adder 904 are connected in series; The input end of the 2nd PID controller 902 connects the input end of first adder 903; Output terminal connects the input end of second adder 904, and the output terminal of amplitude extraction apparatus 4 connects the input end of first adder 903.Oscillation Amplitude standard value R is arranged in the first adder 903 in advance, and the functional relation between the Oscillation Amplitude B of Oscillation Amplitude standard value R and 4 outputs of amplitude extraction apparatus is:

$G_1\left(s\right)=\frac{P\left(s\right)[C\left(s\right)-C_1\left(s\right)]}{P\left(s\right)C\left(s\right)+1}---\left(12\right)$

Formula (12) can be used for estimating the tracking characteristics of closed-loop system.

Being provided with transport function in the one PID controller 901 in advance is formula (3):

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s$

Being provided with transport function in advance in the 2nd PID controller 902 is:

$C_1\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s---\left(13\right)$

Perturbation amplitude value d is formula (11) to the transport function between the Oscillation Amplitude B:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

Formula (11) can be used for estimating the disturbance rejection characteristic of whole closed-loop system, and α in the formula (13) and β are the adjustment factor of two degrees of freedom PID control device 9 of the present invention, and the span of the two is closed interval [0,1].

When the closed-loop system of present embodiment is worked, at first Oscillation Amplitude standard value R is obtained an Oscillation Amplitude control signal F2 through the 2nd PID controller 902, and in the input second adder 904.After applying driving voltage on the Drive Structure 101 of micromachine resonant device 1, produce static driven power F _El, be applied on the movable resonance structure 102.Movable resonance structure 102 produces displacement variable because of vibration, and this displacement variable is transformed into capacitance change through vibration pickup structure 103.Capacitance change is delivered to preposition sensing circuit 2 and wave filter 3 more successively, wave filter 3 output vibration voltage signal A.This vibration voltage signal A input range extraction apparatus 4 extracts Oscillation Amplitude B by amplitude extraction apparatus 4 from vibration voltage signal A afterwards, input first adder 903.

First adder 903 compares Oscillation Amplitude standard value R and Oscillation Amplitude B, obtains an Oscillation Amplitude difference C.Oscillation Amplitude difference C imports a PID controller 901; Calculate an Oscillation Amplitude control signal F1 by a PID controller 901; Oscillation Amplitude control signal F1, F2 all import second adder 904; By second adder 904 Oscillation Amplitude control signal F1, F2 are subtracted each other, obtain Oscillation Amplitude control signal difference DELTA F.After Oscillation Amplitude control signal difference DELTA F and perturbation amplitude value d all import a totalizer 10 stacks, input multiplier 6.Multiplier 6 utilizes Oscillation Amplitude control signal difference DELTA F and the perturbation amplitude value d after the stack, regulates vibration voltage signal A, obtains a driving voltage V.Driving voltage V flows to the Drive Structure 101 in the micromachine resonant device 1, thereby has realized whole closed-loop control.

The closed loop control method of present embodiment can make micromachine resonant device 1 in its resonance frequency place vibration, and keeps the constant amplitude vibration.Owing to adopted two degrees of freedom PID control device 9; Closed-loop system can satisfy tracking characteristics and noiseproof feature simultaneously; Be embodied in: when regulating the parameter of two degrees of freedom PID control device 9; At first, regulate formula (11) earlier, can make closed-loop system have certain noiseproof feature according to the control method of conventional single-degree-of-freedom PID controller 5.Then, through regulating the adjustment factor α and the β of two degrees of freedom PID control device 8, promptly α and the β in the formula (13) can make the loop of closed-loop system satisfy the tracking characteristics requirement.Can know that by formula (11) and (12) compare with conventional single-degree-of-freedom PID control device 5, two degrees of freedom PID control device 8 can make tracking characteristics and the related of noiseproof feature reduce greatly, and then has taken into account tracking characteristics and disturbance rejection performance.

Among above-mentioned each embodiment, the structure of each parts, the position is set and connects and all can change to some extent, on the basis of technical scheme of the present invention,, should not get rid of outside protection scope of the present invention improvement and the equivalents that individual component is carried out.

Claims (9)

1. a micromachine resonant device closed loop drives the PID control device of usefulness; Itself and a multiplier, a micromachine resonant device, a preposition sensing circuit, a wave filter and an amplitude extraction apparatus constitute a micromachine resonant device closed-loop system; It is characterized in that: said PID control device is made up of two PID controllers and at least one totalizer; The input end of said PID control device connects the output terminal of said amplitude extraction apparatus, and the output terminal of said PID control device connects the input end of said amplitude extraction apparatus;

Two said PID controllers are a PID controller and the 2nd PID controller, and said totalizer comprises first adder and second adder; Wherein, said first adder, a PID controller and second adder are connected in series, and the output terminal of said the 2nd PID controller connects the input end of said second adder; The output terminal of said amplitude extraction apparatus connects the input end of said first adder and the 2nd PID controller; Be provided with an Oscillation Amplitude standard value in the said first adder in advance, be provided with transport function C in first and second PID controller respectively in advance ₁(s), C ₂(s);

Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)C_1\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)[C_1\left(s\right)+C_2\left(s\right)]+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

2. a kind of micromachine resonant device closed loop as claimed in claim 1 drives the PID control device of usefulness, it is characterized in that:

$C_1\left(s\right)=\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s;$

$C_2\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s;$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

3. a kind of micromachine resonant device closed loop as claimed in claim 2 drives the PID control device of usefulness, and it is characterized in that: the span of said α and β is closed interval [0,1].

4. a micromachine resonant device closed loop drives the PID control device of usefulness; Itself and a multiplier, a micromachine resonant device, a preposition sensing circuit, a wave filter and an amplitude extraction apparatus constitute a micromachine resonant device closed-loop system; It is characterized in that: said PID control device is made up of two PID controllers and at least one totalizer; The input end of said PID control device connects the output terminal of said amplitude extraction apparatus, and the output terminal of said PID control device connects the input end of said amplitude extraction apparatus;

Two said PID controllers are a PID controller and the 2nd PID controller; Wherein, a said PID controller, totalizer and the 2nd PID controller are connected in series, and the output terminal of said amplitude extraction apparatus connects the input end of totalizer; One Oscillation Amplitude standard value is arranged in the said totalizer through a said PID controller in advance, is provided with transport function C in first and second PID controller respectively in advance ₁(s), C (s);

Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)C\left(s\right)C_1\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

5. a kind of micromachine resonant device closed loop as claimed in claim 4 drives the PID control device of usefulness, it is characterized in that:

$C_1\left(s\right)=\frac{\mathrm{\α}{K}_p+\frac{K_i}{s}+\mathrm{\β}{K}_{d}s}{K_p+\frac{K_i}{s}+K_{d}s}$

$C\left(s\right)=K_p+\frac{K_i}{s}+K_{d}s$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

6. a kind of micromachine resonant device closed loop as claimed in claim 5 drives the PID control device of usefulness, and it is characterized in that: the span of said α and β is closed interval [0,1].

7. a micromachine resonant device closed loop drives the PID control device of usefulness; Itself and a multiplier, a micromachine resonant device, a preposition sensing circuit, a wave filter and an amplitude extraction apparatus constitute a micromachine resonant device closed-loop system; It is characterized in that: said PID control device is made up of two PID controllers and at least one totalizer; The input end of said PID control device connects the output terminal of said amplitude extraction apparatus, and the output terminal of said PID control device connects the input end of said amplitude extraction apparatus;

Two said PID controllers are a PID controller and the 2nd PID controller, and said totalizer comprises first adder and second adder; Wherein, first adder, a PID controller and second adder are connected in series; The input end of said the 2nd PID controller connects the input end of said first adder, and output terminal connects the input end of said second adder; The output terminal of said amplitude extraction apparatus connects the input end of said first adder; One Oscillation Amplitude standard value is set in the said first adder in advance, is provided with transport function C (s), C in first and second PID controller respectively in advance ₁(s);

Funtcional relationship between the Oscillation Amplitude of said Oscillation Amplitude standard value and the output of said amplitude extraction apparatus satisfies:

$G_1\left(s\right)=\frac{P\left(s\right)[C\left(s\right)-C_1\left(s\right)]}{P\left(s\right)C\left(s\right)+1}$

The Oscillation Amplitude and the funtcional relationship between the perturbation amplitude value of said amplitude extraction apparatus output satisfy:

$G_2\left(s\right)=\frac{P\left(s\right)}{P\left(s\right)C\left(s\right)+1}$

In the formula, P (s) is the equivalent transfer function between the Oscillation Amplitude exported of Oscillation Amplitude control signal and the said amplitude extraction apparatus of said PID control device output.

8. a kind of micromachine resonant device closed loop as claimed in claim 7 drives the PID control device of usefulness, it is characterized in that:

$C\left(s\right)=K_p+\frac{K_i}{s}{+K}_{d}s$

$C_1\left(s\right)=(1-\mathrm{\α})K_p+\frac{K_i}{s}+(1-\mathrm{\β})K_{d}s$

Wherein, α and β are the adjustment factor of said PID control device, K _pBe proportional control factor, K _iBe integration adjustment factor, K _dBe the differential adjustment factor, s is a Laplace operator.

9. a kind of micromachine resonant device closed loop as claimed in claim 8 drives the PID control device of usefulness, and it is characterized in that: the span of said α and β is closed interval [0,1].

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