CN102059361A - Diamond wrapping tool with excellent stripping resistance and wear resistance - Google Patents

Diamond wrapping tool with excellent stripping resistance and wear resistance Download PDF

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Publication number
CN102059361A
CN102059361A CN201010529479XA CN201010529479A CN102059361A CN 102059361 A CN102059361 A CN 102059361A CN 201010529479X A CN201010529479X A CN 201010529479XA CN 201010529479 A CN201010529479 A CN 201010529479A CN 102059361 A CN102059361 A CN 102059361A
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layer
diamond
inclination angle
bed thickness
total
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大岛秀夫
松木竜一
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Abstract

The invention provides a diamond wrapping tool with excellent stripping resistance and wear resistance, wherein the diamond wrapping tool exhibits excellent stripping resistance and wear resistance in the high-speed cutting processing of difficult-to-cut materials. The diamond wrapping tool alternately laminates two diamond films with different crystallinities of the A layer and the B layer on a surface of a basic body composed of WC-based hard alloys. With respect to the ratio of the peak maximum 11 of 1333+-5cm-1 to the peak maximum 12 of 1400-1600cm-1 in the Raman spectra, 12/11 of the A layer is larger than 0.7 and smaller than 0.9, and 12/11 of the B layer is smaller than 0.6. In addition, the total layer thickness of the A layer (La) and the total layer thickness of the B layer (Lb) at the basic body side satisfy the formula 0.6<=La/(La+Lb), and at the diamond wrapping surface side satisfy the formula 0.6<=Lb/(La+Lb). Moreover, the B layer at the diamond wrapping surface side has orientation at a (110) crystal surface or a (111) crystal surface, according to the conditions.

Description

The diamond of anti-fissility and excellent in abrasion resistance coats instrument
Technical field
This invention relates to a kind of diamond at the matrix surface cladding diamond film that is made of tungsten carbide base carbide alloy and coats instrument, relates in particular to a kind of CFRP (Carbon Fiber Reinforced Plastics that is higher than metal material at high-speed cutting specific strength, specific rigidity.The carbon fibre reinforced plastics) or during the high hard-cutting materials such as Al alloy of deposition, the excellent anti-fissility of performance and the diamond of excellent abrasive coat instrument in long-term the use.
Background technology
Known in the past have the diamond at the matrix cladding diamond film that is made of tungsten carbide-base (WC yl) carbide alloy to coat instrument, for example known have following diamond to coat instrument: the nuclear that becomes the starting point of adamantine crystalline growth repeatedly at matrix surface adheres to operation and makes the crystalline growth operation of diamond crystalline growth, coat the fine diamond thin of crystallization particle diameter thus, and known the surface accuracy that can obtain excellence in the machining of the Al alloy that uses this coatings instrument arranged.
And, it is also known for the alternatively laminated diamond thin, promptly alternatively laminated is according to the peak strength I of the non-diamond carbon of Raman spectrum 2To adamantine peak strength I 1Strength ratio I 2/ I 1Be layer and the I below 0.7 2/ I 1The diamond that is the layer more than 0.9 coats instrument, and it is also known for when being used in this coating instrument in the machining of Al alloy toughness, anti-damaged property, excellent in abrasion resistance.
Patent documentation 1: the open 2002-79406 communique of Japan Patent
Patent documentation 2: Japan Patent discloses flat 6-297207 communique
The FAization highly significant of cutting apparatus in recent years, strong to the requirement of the saving labourization of machining and energy-conservationization and cost degradation on the other hand, follow this machining condition high speed gradually.The above-mentioned instrument that in the past coated is in the machining that this is used under the usual conditions time, though do not produce special problem, but this is used in general metal material compares, in the time of in the high-speed cutting of the CFRP of specific strength, specific rigidity excellence, hard-cutting materials such as Al alloy that deposition is high, because CFRP is the composite of carbon fibre and epoxylite, so tool wear is strong.In addition, there are the following problems point: because adamantine thermal coefficient of expansion is little, and it is big with the thermal expansion difference of the matrix that constitutes by the WC base cemented carbide, so the high heat during according to machining produces thermal stress at the interface of matrix-diamond film, especially after long-time the use, along with the thickness attenuation that diamond coats, becoming is easy to generate based on the peeling off of the diamond film of above-mentioned stress, and shorten life tools.
Therefore, in long-term the use, expectation can not produce peeling off of diamond film, and the diamond of bringing into play excellent abrasive simultaneously coats instrument.
Present inventors are from aforesaid viewpoint, in order to develop the result that following diamond coating instrument has carried out further investigation, obtained following opinion: the diamond of this exploitation purpose coats instrument especially in the high-speed cutting processing of the high Al alloy of hard-cutting material CFRP or deposition etc., diamond film has wearability, the excellent cutting ability of performance in long-term the use when having excellent anti-fissility.
Diamond of the present invention coats instrument by on the matrix that is made of the WC base cemented carbide (base material) surface, for example (compare with the A layer according to different diamond film A layer and the B layers of diamond gas phase synthesis method alternatively laminated crystallinity such as hot filament method difference, the crystallinity of B layer is high relatively) constitute, but at alternatively laminated A layer, during the B layer, if form alternatively laminated as follows, promptly in WC base cemented carbide matrix (base material) side, the total bed thickness Lb of the total bed thickness La of A layer and B layer satisfies the relation of 0.6≤La/ (La+Lb), and in diamond clad surface side, the total bed thickness Lb of the total bed thickness La of A layer and B layer satisfies the relation of 0.6≤Lb/ (La+Lb), even then the diamond that is made of this alternatively laminated structure coats the long-time use of instrument and also can't see peeling off of diamond thin, it found that in long-term the use brings into play excellent abrasive.
At Fig. 1 the concise and to the point figure that diamond of the present invention coats the lateral section of instrument is shown, but when observing in the lateral section of diamond coating instrument shown in Figure 1, if to forming the A layer of alternatively laminated, the bed thickness of B layer is regulated respectively, so that in the matrix side, the shared bed thickness ratio of the A layer that forms along the bed thickness direction is more than the shared bed thickness ratio of B layer, on the other hand, in diamond clad surface side, the shared bed thickness ratio of the B layer that forms along the bed thickness direction is more than the shared bed thickness ratio of A layer, high heat in the time of then can passing through machining relaxes according to the thermal stress of WC base cemented carbide matrix (base material) with the interface of the thermal expansion difference generation of diamond film, its result, even after long-time the use, also can suppress to produce peeling off of diamond thin, when can seek the long lifetime of instrument, compare the relative high B layer of hardness in diamond clad surface side with the A layer to have at high proportion, in long-time machining, can bring into play sufficient abrasion resistance thus.
And, present inventors have found following content: the diamond film that is formed at the B layer of diamond clad surface side about formation, in the inclination angle number of degrees distribution map of the crystal plane that utilizes the field emission type SEM to measure and make, when (110) face or (111) face are divided the orientation diamond film account for the 50% above number of degrees and are constituted by the inclination angle with 0~10 degree of this inclination angle number of degrees distribution map, the hardness of B layer further improves, its result, wearability further improves.
Summary of the invention
This invention is based on above-mentioned opinion and finishes, and it has following feature:
" (1) a kind of diamond coats instrument; be two kinds of diamond films that coat mutually different A layer of crystallinity and B layer at the matrix surface alternatively laminated that is made of tungsten carbide base carbide alloy; the average bed thickness of one deck of described A layer is that the average bed thickness of one deck of 0.03~5 μ m, described B layer is 0.1~5 μ m; the total of diamond film coats the diamond coating instrument that bed thickness is 10~30 μ m; it is characterized in that
When the diamond film that constitutes above-mentioned A layer and B layer is measured the Raman spectrum of wavelength 514.5nm, the peak maximum I of the 1333 ± 5cm-1 that obtains according to mensuration 1Peak maximum I with 1400~1600cm-1 2Ratio I 2/ I 1, in above-mentioned A layer, be 0.7<I 2/ I 1<0.9, and in above-mentioned B layer, be I 2/ I 1<0.6,
In addition, be formed at the total bed thickness La of the A layer in the diamond film of matrix side and the total bed thickness Lb of B layer and satisfy the relation of 0.6≤La/ (La+Lb), and the total bed thickness Lb that is formed at the total bed thickness La of the A layer in the diamond film of diamond clad surface side and B layer satisfies the relation of 0.6≤Lb/ (La+Lb).
(2) diamond as above-mentioned (1) record coats instrument, it is characterized in that,
At least the B layer that is formed at diamond clad surface side in the above-mentioned B layer is shown with inclination angle number of degrees distribution graph,
Wherein, the following making of described inclination angle number of degrees distribution map: use the field emission type SEM that the crystal grain in the measurement range that is present in the vertical film cross section abradant surface of relative matrix surface is shone electron ray respectively, measure the crystal plane of described crystal grain, (110) face reaches, (111) normal of face is to the inclination angle of the normal formation of described matrix surface, divide the mensuration inclination angle that is in the described mensuration inclination angle in 0~45 degree scope by 0.25 degree spacing, total is present in the number of degrees in each zoning and forms inclination angle number of degrees distribution map simultaneously
At this moment, arbitrary at least face about (110) face or (111) face is expressed as follows inclination angle number of degrees distribution map, when promptly there was peak-peak in place, the zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for 50% above ratio of the number of degrees integral body in the number of degrees distribution map of inclination angle.”
Then, the clad that the diamond of this invention is coated instrument is elaborated.
By the A layer in the diamond film of alternatively laminated, when measuring the Raman spectrum of wavelength 514.5nm, the peak maximum I of the 1333 ± 5cm-1 that obtains according to mensuration 1Peak maximum I with 1400~1600cm-1 2Ratio I 2/ I 1Be 0.7<I 2/ I 1<0.9, to compare with B layer described later, crystallinity is low relatively and be made of microdiamond.
This crystallinity is low and by the A layer that microdiamond constitutes, and for example can carry out film forming under the following conditions:
Filament temperature: 2000~2300 ℃,
Filament-substrate interval: 10~30mm,
Substrate temperature: 750~950 ℃,
Reaction pressure: 0.9~1.6kPa,
Reacting gas (CH 4/ H 2Than): 0.025~0.08.
And, this A layer is compared with the B layer, because it is little with the coefficient of thermal expansion differences of the matrix that constitutes by the WC base cemented carbide, be difficult to produce big thermal stress at its interface, and the A layer relaxes the effect of the thermal stress that produces at the interface with matrix greater than the B layer, even so add in the high-speed cutting that produces hard-cutting material under the high hot condition in man-hour, peeling off also of diamond film is suppressed, if but one deck average film thickness of A layer is less than 0.03 μ m, then can't give full play to thermal stress abirritation with the interface of matrix, on the other hand, if one deck average film thickness of A layer surpasses 5 μ m, then coat whole hardness as diamond and descend, show the tendency that wearability descends, therefore one deck average film thickness with the A layer is decided to be 0.03~5 μ m.
In addition, in this invention, in order further to bring into play effect according to the alternatively laminated of A layer and B layer, as shown in Figure 1, with the total bed thickness Lb that is formed at the total bed thickness La of the A layer in the diamond film of matrix side and B layer be decided to be satisfy 0.6≤La/ (La+Lb) relation (promptly, to be made as greater than the shared bed thickness ratio of B layer along the shared bed thickness ratio of A layer that the bed thickness direction forms), and further improve the anti-fissility of diamond film to matrix.
If the value of La/ (La+Lb) less than 0.6, though then diamond coats the hardness with excellence, can't be brought into play sufficient anti-fissility in the high-speed cutting of hard-cutting material, therefore the value with La/ (La+Lb) is decided to be more than 0.6.
And, with the B layer of the diamond film of A layer alternatively laminated, when measuring the Raman spectrum of wavelength 514.5nm, the peak maximum I of the 1333 ± 5cm-1 that obtains according to mensuration 1Peak maximum I with 1400~1600cm-1 2Ratio I 2/ I 1Be 0.6>I 2/ I 1, to compare with the A layer, crystallinity is high and be made of the coarse gold hard rock.
This crystallinity is high and by the B layer that the coarse gold hard rock constitutes, and for example can carry out film forming under the following conditions:
Filament temperature: 2000~2400 ℃,
Filament-substrate interval: 10~30mm,
Substrate temperature: 700~900 ℃,
Reaction pressure: 2.0~6.67kPa,
Reacting gas (CH 4/ H 2Than): 0.005~0.05.
And, this B layer is compared excellent in abrasion resistance with the A layer, if but one deck average film thickness of B layer is less than 0.1 μ m, then can't continue to keep excellent abrasive in long-term the use, on the other hand, if one deck average film thickness of B layer surpasses 5 μ m, then the flatness because of thickization of crystal grain surface descends, becoming, it is damaged to be easy to generate, and causes the decline of finished surface precision, and therefore one deck average film thickness with the B layer is decided to be 0.1~5 μ m.
In addition, in this invention, the B layer by alternatively laminated, has not only suppressed thickization of crystal grain of B layer by sandwiching the A layer thus, and the expansion of the crackle that produces at the B layer etc. obtains stoping by the A layer, and anti-damaged property also is improved.
In addition, in this invention, in order further to bring into play effect according to the alternatively laminated of A layer and B layer, as shown in Figure 1, following film forming, the relation that the total bed thickness Lb that promptly is formed at the total bed thickness La of the A layer in the diamond film of diamond clad surface side and B layer satisfies 0.6≤Lb/ (La+Lb) (promptly, to be made as greater than the shared bed thickness ratio of A layer along the shared bed thickness ratio of B layer that the bed thickness direction forms), avoid the decline of anti-damaged property, finished surface precision and further improve the wearability of diamond film.
If the value of the Lb/ (La+Lb) in the diamond film of diamond clad surface side less than 0.6, then in the high-speed cutting of hard-cutting material, can't be brought into play excellent abrasive in long-term the use, therefore the value with Lb/ (La+Lb) is decided to be more than 0.6.
And, at least the B layer that is formed at diamond clad surface side in the above-mentioned B layer is shown with inclination angle number of degrees distribution graph, wherein, the following making of described inclination angle number of degrees distribution map: use the field emission type SEM that the crystal grain in the measurement range that is present in the vertical film cross section abradant surface of relative matrix surface is shone electron ray respectively, crystal plane (110) face of measuring described crystal grain reaches the inclination angle of the normal of (111) face to the normal formation of described matrix surface, divide the mensuration inclination angle that is in the described mensuration inclination angle in 0~45 degree scope by 0.25 degree spacing, total is present in the number of degrees in each zoning and forms inclination angle number of degrees distribution map simultaneously, at this moment, about (110) face or (111) face arbitrary at least, be expressed as follows inclination angle number of degrees distribution map, when promptly there is peak-peak in place, the zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounts for 50% above ratio of the number of degrees integral body in the number of degrees distribution map of inclination angle, and the B layer that is made of the coarse gold hard rock with this orientation has excellent high rigidity and hear resistance concurrently.
In this invention, if the total of the diamond film that is made of the alternatively laminated structure of A layer and B layer coats bed thickness less than 10 μ m, then in the high-speed cutting of hard-cutting material, can't in long-term the use, bring into play excellent abrasive, on the other hand, surpass 30 μ m, then produce danger damaged, that peel off and improve if the total of diamond film coats bed thickness, and the finished surface precision is also showed the tendency that descends, and therefore the total coating bed thickness with diamond film is decided to be 10~30 μ m.
The invention effect
The diamond of this invention coats the A layer that is made of microdiamond of instrument and forms the alternatively laminated structure by the B layer that the coarse gold hard rock constitutes, in addition, in the matrix side, the ratio of the total bed thickness La of A layer increases, on the other hand, in diamond clad surface side, the ratio of the total bed thickness Lb of B layer increases, therefore can seek tool base-diamond film stress at the interface relaxes, and possesses following characteristic: anti-fissility excellence, prevent thickization of crystal grain, do not have the decline that is cut the materials processing surface accuracy, anti-crack propagation excellence.
In addition, the B layer has (110) or (111) orientation, and therefore the diamond coating instrument of this invention has excellent high rigidity and hear resistance concurrently.
Thereby,, when also possessing excellent anti-fissility, anti-damaged property, in long-term the use, bringing into play excellent abrasive even when the diamond coating instrument that will invent is used in the high-speed cutting processing of hard-cutting materials such as CFRP, Al alloy.
Description of drawings
Fig. 1 represents that diamond of the present invention coats the concise and to the point figure of the lateral section of instrument.
Fig. 2 represents the inclination angle number of degrees distribution map about B layer (110) face that is formed at diamond clad surface side of slotting cutter 1 of the present invention.
Fig. 3 represents the inclination angle number of degrees distribution map about B layer (111) face that is formed at diamond clad surface side of slotting cutter 5 of the present invention.
The specific embodiment
Then, specify the diamond coating instrument of this invention according to embodiment.
[embodiment 1]
As material powder, prepare to have average grain diameter: the middle coarse grain WC powder of 5.5 μ m, with the particulate WC powder of 0.8 μ m, with the TaC powder of 1.3 μ m, with the NbC powder of 1.2 μ m, with the ZrC powder of 1.2 μ m, with the Cr of 2.3 μ m 3C 2Powder, VC powder with 1.5 μ m, (Ti with 1.0 μ m, W) C[by quality ratio, TiC/WC=50/50] powder, and the Co powder of same 1.8 μ m, these material powders are fitted in the cooperation shown in the table 1 respectively to be formed, adding paraffin ball milling in acetone in addition mixed 24 hours, be shaped to the various pressed compacts of reservation shape after the drying under reduced pressure with the pressure extrusion of 100MPa, these pressed compacts programming rate with 7 ℃/minute in the vacuum atmosphere of 6Pa is warming up to 1370~1470 ℃ of predetermined temperatures in the scope, after this temperature keeps 1 hour, carrying out sintering and form diameter under the cold condition of stove is that the tool base of 13mm forms and uses the pole sintered body, in addition, diameter * length of having made blade part respectively with grinding from described pole sintered body is the size of 10mm * 22mm, and WC base cemented carbide system tool base (slotting cutter) C-1~C-8 with 2 sword quadrangle shapes of helical angle 30 degree.
Then, ultrasonic wave cleans the surface of these tool base (slotting cutter) C-1~C-8 in acetone, carry out after dry based on the etching of acid solution and/or based on the etch processes of aqueous slkali, use diamond dust mud liquid in ultrasonic cleaner, to carry out after ultrasonic wave handles in addition
(a1) at first, exist
Filament temperature: 2200 ℃,
Filament-substrate interval: 15mm,
Substrate temperature: 850 ℃,
Reaction pressure: 0.9kPa,
Reacting gas: CH 4/ H 2=0.05 (wherein being volume ratio)
Condition under, the A layer that is made of microdiamond at the tool base surface filming is (according to the peak strength ratio of Raman spectrum: 0.7<I 2/ I 1<0.9),
(b1) then, exist
Filament temperature: 2200 ℃,
Filament-substrate interval: 15mm,
Substrate temperature: 800 ℃,
Reaction pressure: 4kPa,
Reacting gas: CH 4/ H 2=0.035 (wherein being volume ratio)
Condition under, the B layer that film forming is made of the coarse gold hard rock on above-mentioned A layer is (according to the peak strength of Raman spectrum ratio: I 2/ I 1<0.6),
(c1) A layer, B layer one deck thickness separately adjusted, so that satisfy 0.6≤La/ (La+Lb) in the matrix side, and satisfy 0.6≤Lb/ (La+Lb) in diamond clad surface side, simultaneously above-mentioned (a1), (b1) are carried out desired times repeatedly, shown in the film forming table 2, desirable lamination number, desirable total coat the diamond thin of bed thickness, thereby made the diamond of the present invention that coats instrument as diamond of the present invention respectively and coated slotting cutter (below, be called slotting cutter of the present invention) 1~8.
With purpose relatively, under the surface to above-mentioned tool base (slotting cutter) C-1~C-8 imposes state with above-mentioned same coating pre-treatment, made comparison slotting cutter 1 respectively with the condition film forming diamond thin identical with (a1) of the foregoing description 1, comparison slotting cutter 2 with the condition film forming diamond thin identical with (b1) of the foregoing description 1, (a1) with the foregoing description 1, (b1) carry out desired times (wherein, the value of La/ (La+Lb) or Lb/ (La+Lb) is in the almost certain value of film thickness direction) repeatedly and the desirable lamination number of film forming, desirable total coats the comparison slotting cutter 3~8 of the diamond thin of bed thickness.
One deck thickness, lamination number, total at each film table 3 illustrate coat bed thickness.
Then, B layer that is formed at diamond clad surface side and the above-mentioned relatively coarse gold diamond thin film of slotting cutter 2~8 to the invention described above slotting cutter 1~8 have been made inclination angle number of degrees distribution map, the following making of this inclination angle number of degrees distribution map: use the field emission type SEM that the crystal grain in the measurement range that is present in the vertical film cross section abradant surface of relative matrix surface is shone electron ray respectively, crystal plane (110) face of measuring described crystal grain reaches the inclination angle of the normal of (111) face to the normal formation of matrix surface, when dividing the mensuration inclination angle that is in the described mensuration inclination angle in 0~45 degree scope by 0.25 degree spacing, total is present in the number of degrees in each zoning and forms.
As an example, the inclination angle number of degrees distribution map about (110) face of the B layer that is formed at diamond clad surface side of slotting cutter 1 of the present invention is shown at Fig. 2, but the inclination angle number of degrees distribution map of (110) face of the coarse gold diamond thin film of slotting cutter 1~8 of the present invention and comparison slotting cutter 2~8 is all represented inclination angle number of degrees distribution map much at one, when there was peak-peak in the place, zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for the ratio more than 50% of the number of degrees integral body in the number of degrees distribution map of inclination angle.
As an example, the inclination angle number of degrees distribution map about (111) face of the B layer that is formed at diamond clad surface side of slotting cutter 5 of the present invention is shown at Fig. 3, but the inclination angle number of degrees distribution map of (111) face of the coarse gold diamond thin film of slotting cutter 1~8 of the present invention and comparison slotting cutter 2~8 is all represented inclination angle number of degrees distribution map much at one, when there was peak-peak in the place, zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for the ratio more than 50% of the number of degrees integral body in the number of degrees distribution map of inclination angle.
In the zoning, inclination angle that has peak-peak that the expression of table 2, table 3 is measured about the coarse gold diamond thin film of slotting cutter 1~8 of the present invention and above-mentioned relatively slotting cutter 1~8, be present in number of degrees ratio in 0~10 degree scope etc.
And, the coarse gold diamond thin film of slotting cutter 1~8 of the present invention and comparison slotting cutter 2~4 is measured the result of average diamond particle diameter, in the coarse gold diamond thin film that compares slotting cutter 2~8, average diamond particle diameter is 2.9~7.5 μ m, on the other hand, in the coarse gold diamond thin film (B layer) of slotting cutter 1~8 of the present invention, average diamond particle diameter is 0.8~1.8 μ m, therefore as can be known, in coarse gold diamond thin film of the present invention (B layer), fully suppressed thickization of diamond crystals.
Then, the invention described above slotting cutter 1~8 and above-mentioned relatively slotting cutter 1~8 are carried out following condition (machining condition A) respectively, promptly
Carbon fibre and thermmohardening type epoxylite have the material-planar dimension that is cut of orthogonal layers laminated structure: the sheet material of the carbon fibre fortified resin composite (CFRP) of 100mm * 250mm, thickness: 5mm,
Cutting speed: 240m/min.,
Groove depth (cutting-in amount): radially (ae) 2.5mm, axially (ap) 8mm,
Table feed speed: 1500mm/ minute,
The dry type high speed side machining test of above-mentioned CFRP under the air-supply condition,
And following condition (machining condition B), promptly
Be cut material-planar dimension: sheet material 100mm * 250mm, thickness: 50mm, JISADC12,
Cutting speed: 420m/min.,
Groove depth (cutting-in amount): radially (ae) 2.5mm, axially (ap) 8mm,
Table feed speed: 1200mm/ minute,
The dry type high speed side machining test of the above-mentioned Al alloy under the air-supply condition all is determined at the cutting slot length till blade part produces the cutting slot length till damaged or is being cut the material production burr in machining test arbitrarily.
These measurement results are shown in table 4 respectively.
[table 1]
Figure BSA00000335264800111
Figure BSA00000335264800121
Figure BSA00000335264800131
[table 4]
Figure BSA00000335264800141
The processing length that reaches till the life-span such as damaged is peeled off, produced to consequent numeric representation because of generation.
[embodiment 2]
Use the pole sintered body of the diameter of manufacturing in the foregoing description 1 as 13mm, made following WC base cemented carbide system tool base (drill bit) D-1~D-8 from this pole sintered body respectively with grinding: the diameter * length of groove formation portion is the size of 10mm * 22mm and all has 2 tooth shape shapes that helical angle 30 is spent.
Then, blade to these tool base (drill bit) D-1~D-8 imposes honing, and impose after the coating pre-treatment identical with the foregoing description 1, when separately one deck thickness of A layer, B layer adjusted on the surface of tool base (drill bit) D-1~D-8 with the condition identical with (a1)~(c1) of the foregoing description 1, shown in the film forming table 5, desirable lamination number, desirable total coat the diamond thin of bed thickness, thereby made the diamond of the present invention that coats instrument as diamond of the present invention respectively and coated drill bit (below, be called drill bit of the present invention) 1~8.
With purpose relatively, surface to above-mentioned tool base (drill bit) D-1~D-8 imposes honing, and impose after the coating pre-treatment identical with the foregoing description 1, made comparison drill bit 1 respectively with the condition film forming diamond thin identical with (a1) of the foregoing description 1, comparison drill bit 2 with the condition film forming diamond thin identical with (b1) of the foregoing description 1, (a1) with the foregoing description 1, (b1) carry out desired times (wherein, the value of La/ (La+Lb) or Lb/ (La+Lb) is a value almost certain on film thickness direction) repeatedly and the desirable lamination number of film forming, desirable total coats the comparison drill bit 3~8 of the diamond thin of bed thickness.
One deck thickness, lamination number, total at each film of table 6 expression coat bed thickness.
Then, B layer that is formed at diamond clad surface side and the above-mentioned relatively coarse gold diamond thin film of slotting cutter 2~8 to the invention described above slotting cutter 1~8 have been made inclination angle number of degrees distribution map, the following making of this inclination angle number of degrees distribution map: use the field emission type SEM that the crystal grain in the measurement range that is present in the vertical film cross section abradant surface of relative matrix surface is shone electron ray respectively, crystal plane (110) face of measuring described crystal grain reaches the inclination angle of the normal of (111) face to the normal formation of matrix surface, when dividing the mensuration inclination angle that is in the described mensuration inclination angle in 0~45 degree scope by 0.25 degree spacing, total is present in the number of degrees in each zoning and forms.
The inclination angle number of degrees distribution map of (110) face of the coarse gold diamond thin film of drill bit 1~8 of the present invention and comparison drill bit 2~8 is all represented inclination angle number of degrees distribution map much at one, when there was peak-peak in the place, zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for the ratio more than 50% of the number of degrees integral body in the number of degrees distribution map of inclination angle.
And, the inclination angle number of degrees distribution map of (111) face of the coarse gold diamond thin film of drill bit 1~8 of the present invention and comparison drill bit 2~8 is all represented inclination angle number of degrees distribution map much at one, when there was peak-peak in the place, zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for the ratio more than 50% of the number of degrees integral body in the number of degrees distribution map of inclination angle.
In the zoning, inclination angle that has peak-peak that the expression of table 5, table 6 is measured about the coarse gold diamond thin film of drill bit 1~8 of the present invention and above-mentioned relatively drill bit 1~8, be present in number of degrees ratio in 0~10 degree scope etc.
Then, the invention described above drill bit 1~8 and above-mentioned relatively drill bit 1~8 are carried out following condition (machining condition C) respectively, promptly
Carbon fibre and thermmohardening type epoxylite have the material-planar dimension that is cut of orthogonal layers laminated structure: the sheet material of the carbon fibre fortified resin composite (CFRP) of 100mm * 250mm, thickness: 8mm,
Cutting speed: 180m/min.,
Feed speed: 0.06mm/rev,
Through hole: (8mm),
The dry type high speed perforate machining test of above-mentioned CFRP under the air-supply condition,
And following condition (machining condition D), promptly
Be cut material-planar dimension: sheet material 100mm * 250mm, thickness: 15mm, JISADC12,
Cutting speed: 220m/min.,
Feed speed: 0.09mm/rev,
Through hole: (15mm),
The dry type high speed perforate machining test of the above-mentioned Al alloy under the air-supply condition is all measured the perforate that becomes till can't cutting according to the smear metal obstruction in any dry type high speed perforate machining test and is added number.
This measurement result is shown in table 7 respectively.
Figure BSA00000335264800171
[table 7]
Figure BSA00000335264800191
Consequent numeric representation is peeled off, is produced the perforate that reaches till the life-span such as damaged because of generation and adds number (hole).
From the result shown in table 2~7, coat the A layer that constitutes by microdiamond of the slotting cutter of the present invention 1~8 of instrument and drill bit of the present invention 1~8 and form the alternatively laminated structure as diamond of the present invention by the B layer that the coarse gold hard rock constitutes, in addition, in the matrix side, the ratio of the total bed thickness La of A layer increases, on the other hand, in diamond clad surface side, the ratio of the total bed thickness Lb of B layer increases, so tool base-diamond film anti-fissility excellence at the interface, and prevent thickization of crystal grain, thereby it is also excellent not only to be cut materials processing surface accuracy excellence but also anti-damaged property, even at CFRP, when using in the high-speed cutting processing of hard-cutting materials such as Al alloy, in long-term the use, also bring into play excellent abrasive.
Relative therewith, even only by the microdiamond film, the comparison diamond that the coarse gold diamond thin film constitutes coats instrument or microdiamond and the adamantine alternatively laminated structure of coarse grain, La/ (La+Lb), the value of Lb/ (La+Lb) is on film thickness direction also in much at one the comparison diamond coating instrument, produce peeling off of diamond thin, damaged, it is also insufficient to be cut the materials processing surface accuracy, at CFRP, when using in the high-speed cutting processing of hard-cutting materials such as Al alloy, can't bring into play excellent abrasive in long-term the use, also shorten life tools.
Industrial applicibility
As mentioned above, the cutting processing that the diamond coating tool of this invention can carry out under the usual conditions is self-evident, be higher than in the high-speed cutting of high Al alloy of the CFRP of metal material or deposition etc. at specific strength, specific rigidity, also have excellent anti-fissility, anti-damaged property, in long-term use, bring into play the wearability of excellence, therefore can fully contentedly correspondingly cut the FAization of processing unit (plant) and cut saving labourization and energy-saving even the cost degradation of processing.

Claims (2)

1. a diamond coats instrument, be two kinds of diamond films that coat mutually different A layer of crystallinity and B layer at the matrix surface alternatively laminated that constitutes by tungsten carbide base carbide alloy, the average bed thickness of one deck of described A layer is that the average bed thickness of one deck of 0.03~5 μ m, described B layer is 0.1~5 μ m, the total of diamond film coats the diamond coating instrument that bed thickness is 10~30 μ m, it is characterized in that
When the diamond film that constitutes above-mentioned A layer and B layer is measured the Raman spectrum of wavelength 514.5nm, the peak maximum I of the 1333 ± 5cm-1 that obtains according to mensuration 1Peak maximum I with 1400~1600cm-1 2Ratio I 2/ I 1, in above-mentioned A layer, be 0.7<I 2/ I 1<0.9, and in above-mentioned B layer, be I 2/ I 1<0.6,
In addition, be formed at the total bed thickness La of the A layer in the diamond film of matrix side and the total bed thickness Lb of B layer and satisfy the relation of 0.6≤La/ (La+Lb), and the total bed thickness Lb that is formed at the total bed thickness La of the A layer in the diamond film of diamond clad surface side and B layer satisfies the relation of 0.6≤Lb/ (La+Lb).
2. diamond as claimed in claim 1 coats instrument, it is characterized in that,
At least the B layer that is formed at diamond clad surface side in the above-mentioned B layer is shown with inclination angle number of degrees distribution graph,
Wherein, the following making of described inclination angle number of degrees distribution map: use the field emission type SEM that the crystal grain in the measurement range that is present in the vertical film cross section abradant surface of relative matrix surface is shone electron ray respectively, measure the crystal plane of described crystal grain, (110) face reaches, (111) normal of face is to the inclination angle of the normal formation of described matrix surface, divide the mensuration inclination angle that is in the described mensuration inclination angle in 0~45 degree scope by 0.25 degree spacing, total is present in the number of degrees in each zoning and forms inclination angle number of degrees distribution map simultaneously
At this moment, be expressed as follows inclination angle number of degrees distribution map about the arbitrary at least face in (110) face or (111) face, when promptly there was peak-peak in place, the zoning, inclination angle in 0~10 degree scope, the total that is present in the number of degrees in described 0~10 degree scope accounted for 50% above ratio of the number of degrees integral body in the number of degrees distribution map of inclination angle.
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