CN102059225A - Wafer protecting device of cleaning machine - Google Patents
Wafer protecting device of cleaning machine Download PDFInfo
- Publication number
- CN102059225A CN102059225A CN 201010554253 CN201010554253A CN102059225A CN 102059225 A CN102059225 A CN 102059225A CN 201010554253 CN201010554253 CN 201010554253 CN 201010554253 A CN201010554253 A CN 201010554253A CN 102059225 A CN102059225 A CN 102059225A
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- China
- Prior art keywords
- wafer
- disk
- cleaning machine
- chassis
- seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a wafer protecting device of a cleaning machine. The device comprises a fixed limit seat arranged on the outer side of the edge of a wafer, wherein a moveable seat connected with the fixed limit seat through a pin shaft is arranged on the fixed limit seat; the upper end of the moveable seat is positioned over the edge of the wafer; and the lower end of the moveable seat is suspended below the pin shaft. The device has a reasonable structure, solves the problem that the wafer is thrown off due to over high centrifugal force and incapability of keeping a vacuum environment during rotation because when the wafer is not straightly placed by a part of workers originally, and solves the problem that the vacuum degree of a chassis is affected when water on the chassis is not completely blown off by a part of workers. The vacuum function of the original chassis can still be used, so multi-protection is realized in the whole cleaning process, the safety of product quality is guaranteed, and the original accidental wafer-throwing problem is solved.
Description
Technical field
The present invention relates to a kind of cleaning machine servicing unit.
Background technology
Original cleaning machine is that absorption affinity by vacuum can not be thrown out of disk in the process of rotation to the protection of disk; but in the actual application; disk still can be because of receiving chassis vacuum; and put the influence of disk position etc. and produce vacuum and can't can inhale to such an extent that live fully, have still finally that disk is thrown out of situation take place.When originally waiting the equipment vacuum to report to the police, reality at this moment disk has been thrown out of, and unusually takes place.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructurely, disk is protected in the process of whole cleaning, also do not influence the cleaning machine disk protective device of original vacuum suction function simultaneously.
Technical solution of the present invention is:
A kind of cleaning machine disk protective device; it is characterized in that: comprise the fixedly limit base that is arranged on the outside, disk edge; the fixedly sliding seat that dress is connected with fixing limit base by bearing pin on the limit base, and the upper end of sliding seat is positioned at the top at disk edge, and the lower end of sliding seat is suspended in the below of bearing pin.
The upper end of sliding seat is the crotch form that compresses disk.
The present invention is rational in infrastructure, has solved the prior partial personnel and has failed just to put when putting disk, causes in the rotary course centrifugal force excessive, vacuum can not be protected, and the problem of getting rid of sheet, simultaneously also having solved some of the staff blows untotally sometimes to the water on chassis, and influenced the problem of chassis vacuum; Adding original chassis vacuum function and still can use, like this, is multiple protective in whole cleaning process exactly, has guaranteed the safety of product quality, has solved original sheet problem of getting rid of unexpectedly.
Description of drawings
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is the structural representation of sliding seat.
Fig. 3 is the fixing structural representation of limit base.
Fig. 4 is an installment state schematic diagram of the present invention.
The specific embodiment:
A kind of cleaning machine disk protective device; comprise the fixedly limit base 2 that is arranged on the outside, disk 1 edge; the fixedly sliding seat 4 that dress is connected with fixing limit base by bearing pin 3 on the limit base 2, and the upper end of sliding seat is positioned at the top at disk edge, and the lower end of sliding seat is suspended in the below of bearing pin.The upper end 5 of sliding seat is the crotch form that compresses disk.
Claims (2)
1. cleaning machine disk protective device; it is characterized in that: comprise the fixedly limit base that is arranged on the outside, disk edge; the fixedly sliding seat that dress is connected with fixing limit base by bearing pin on the limit base, and the upper end of sliding seat is positioned at the top at disk edge, and the lower end of sliding seat is suspended in the below of bearing pin.
2. cleaning machine disk protective device according to claim 1 is characterized in that: the upper end of sliding seat is the crotch form that compresses disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010554253 CN102059225A (en) | 2010-11-23 | 2010-11-23 | Wafer protecting device of cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010554253 CN102059225A (en) | 2010-11-23 | 2010-11-23 | Wafer protecting device of cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102059225A true CN102059225A (en) | 2011-05-18 |
Family
ID=43994836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010554253 Pending CN102059225A (en) | 2010-11-23 | 2010-11-23 | Wafer protecting device of cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102059225A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020066475A1 (en) * | 2000-06-26 | 2002-06-06 | Steven Verhaverbeke | Chuck for holding wafer |
| CN1534755A (en) * | 2003-03-27 | 2004-10-06 | 台湾积体电路制造股份有限公司 | Clamping device holding pin, roller clamping device and clamping roller for chip |
| CN2650897Y (en) * | 2003-08-11 | 2004-10-27 | 吴永清 | Wafer cleaner |
| CN101366110A (en) * | 2005-11-23 | 2009-02-11 | 材料及技术公司 | Device and method for holding a substrate |
| CN101383271A (en) * | 2003-08-07 | 2009-03-11 | 株式会社荏原制作所 | Substrate processing apparatus, substrate processing method, and substrate holding apparatus |
| CN201895006U (en) * | 2010-11-23 | 2011-07-13 | 南通富士通微电子股份有限公司 | Wafer protection device of cleaning machine |
-
2010
- 2010-11-23 CN CN 201010554253 patent/CN102059225A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020066475A1 (en) * | 2000-06-26 | 2002-06-06 | Steven Verhaverbeke | Chuck for holding wafer |
| CN1534755A (en) * | 2003-03-27 | 2004-10-06 | 台湾积体电路制造股份有限公司 | Clamping device holding pin, roller clamping device and clamping roller for chip |
| CN101383271A (en) * | 2003-08-07 | 2009-03-11 | 株式会社荏原制作所 | Substrate processing apparatus, substrate processing method, and substrate holding apparatus |
| CN2650897Y (en) * | 2003-08-11 | 2004-10-27 | 吴永清 | Wafer cleaner |
| CN101366110A (en) * | 2005-11-23 | 2009-02-11 | 材料及技术公司 | Device and method for holding a substrate |
| CN201895006U (en) * | 2010-11-23 | 2011-07-13 | 南通富士通微电子股份有限公司 | Wafer protection device of cleaning machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110518 |