CN102053507A - Cleaning system and cleaning method of developing solution circulation process equipment - Google Patents
Cleaning system and cleaning method of developing solution circulation process equipment Download PDFInfo
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- CN102053507A CN102053507A CN 201010510959 CN201010510959A CN102053507A CN 102053507 A CN102053507 A CN 102053507A CN 201010510959 CN201010510959 CN 201010510959 CN 201010510959 A CN201010510959 A CN 201010510959A CN 102053507 A CN102053507 A CN 102053507A
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Abstract
The invention discloses a cleaning system and a cleaning method of developing solution circulation process equipment. The cleaning system of the developing solution circulation process equipment comprises a developing tank, a concentration tank, a circulation power pump and a microfiltration film pipe fitting adopting cross filtration, wherein the developing tank is connected to the concentration tank; the concentration tank is connected to the circulation power pump; the circulation power pump is connected to one end of the microfiltration film pipe fitting through the water outlet pipeline of the pump; the other end of the microfiltration film pipe fitting is connected to the concentration tank through a strong water return pipeline; and the microfiltration film pipe fitting is connected to the developing tank through a filter liquor return pipeline. Particularly, a back washing device, a medicine washing device and a water washing device are fully designed in the cleaning system for the cleaning of the microfiltration film pipe fitting, so as to prevent a microfiltration film from being blocked and maintain the optimum filtration function of the microfiltration film pipe fitting; and meanwhile, a film pipe protecting device is further arranged in the cleaning system, whether the microfiltration film pipe fitting needs cleaning is judged by a controller, and the corresponding cleaning mode is selected through the controller, so as to control the start-up of different cleaning devices.
Description
Technical field
The present invention relates to the sewage treatment area technology, refer in particular to a kind of purging system and cleaning method thereof of developer solution circular treatment equipment.
Background technology
Development waste liquid belongs to the photosensitive material refuse, lists " national hazardous waste register " in and is numbered the good hazardous waste of HW16.Owing to contain sulfuric acid, nitric acid and benzene, methyl alcohol, boric acid, p-dihydroxy-benzene, four alkane ammonium oxyhydroxide chemical substances such as (hereinafter referred to as TAAH) in the waste developing solution; also contain lysed photoresist; these chemical substances all have very large harm to environment to the mankind; therefore recycling development waste liquid is the protection to environment, also is an important behave of saving the development cost.But lysed photoresist is difficult for removing, it is dissolved in directly influences the recycling of developer solution in the developer solution, therefore, people had invented some equipment afterwards, it can be removed the photoresist in the developer solution, but do not change other chemical constitutions of developer solution inside, make aforementioned waste developing solution to recycle.
In the developer solution disposal route of existing typical, have following several:
For example the patent No. is to use biological method that waste developing solution is handled in 200510028668.8 the Chinese invention patent " bioremediation of waste developing solution, waste fixer solution ", but, this method processing time is long, treatment capacity is little, can not handle continuously, the cultivation complex procedures of microorganism, and this method only is used to handle developer solution, do not relate to recyclingly, be not suitable for generally using;
Again for example, the patent No. is the processing to developer solution of 200580047345.1 Chinese invention patent " disposal route of development waste liquid ", its requirement to development waste liquid is very high, require the content of a kind of metallic impurity in the waste liquid not to be higher than 50ppm with respect to tetra-allkylammonium, require each metal ion content not to be higher than 120ppm with respect to tetra-allkylammonium, if just being higher than, needs so, cause this invention to have bigger limitation with very pure tetra-allkylammonium dilution;
For another example; the patent No. is 200480002989.4 Chinese invention patent " developing apparatus; developing method and developer circulating method " in; it is to use the ultra-filtration filters system that developer solution is divided into filtrate and concentrate; this equipment can effectively be removed photoresist; and developer solution recycled; and its developing process and development waste liquid processing procedure are carried out simultaneously; be fit to the workflow management of factory; but the ultra filtration membrane that uses in its invention stops up difficult the cleaning easily; life-span is short, is subject to microbial contaminations such as bacterium, and; when emergency case such as outage suddenly takes place or when the dense water side of film pipe or filtrate side generation negative pressure; this equipment does not possess effective means or its ultra filtration membrane of technical protection, thereby causes its ultra filtration membrane impaired, and; in this technology; cleaning device and method at filter membrane are more single, have to clean halfway phenomenon, cause aforementioned ultra filtration membrane very easily to stop up and influence its use and life-span; so, cause the use of film and maintenance cost all very high.
Summary of the invention
Fundamental purpose of the present invention provides a kind of purging system and cleaning method thereof of developer solution circular treatment equipment, it can regularly carry out backwash to the microfiltration membranes pipe fitting according to setting, also Intelligence Selection carries out that medicine is washed and the washing pattern is cleaned the microfiltration membranes pipe fitting pointedly according to actual needs, solve the cleaning problem of filter membrane in the developer solution circular treatment equipment, avoid filter membrane to stop up.
Another object of the present invention provides a kind of purging system and cleaning method thereof of developer solution circular treatment equipment, and it has film protection of pipe device, can prevent effectively that film Guan Yinnong water side or filtrate side from producing negative pressure and be damaged.
For achieving the above object, the present invention adopts following technical scheme:
A kind of purging system of developer solution circular treatment equipment, include developing trough, thickener, the circulation power pump, and the microfiltration membranes pipe fitting and the filtrate pipe that adopt cross-flow filtration, wherein, this developing trough is that duct type is connected in thickener, this thickener is connected in the circulation power pump, this circulation power pump is connected in an end of microfiltration membranes pipe fitting by the water pump outlet pipe road, and the other end of this microfiltration membranes pipe fitting system is connected in aforementioned thickener by the concentrate recirculation pipeline, and, this filtrate pipe is connected in developing trough by the filtrate reflux line, the present invention is directed to aforementioned microfiltration membranes pipe fitting and be provided with a purging system, this purging system includes the backwash device, the medicine cleaning device, water washing device, film protection of pipe device and cleaning model control device;
Wherein, this backwash device includes the pneumatic control valve that cleans bumper post and be connected in this cleaning bumper post side openings place, and this pneumatic control valve is a normally closed switch; This cleaning bumper post is arranged on the aforementioned filtrate reflux line, and at this backwash device, is provided with a backwash reflux line that is connected between aforementioned water pump outlet pipe road and the thickener;
This medicine cleaning device includes the cleaning medicine-chest, and this cleaning medicine-chest one end is connected with the drug delivery pipeline, and this drug delivery pipeline is connected on the aforementioned water pump outlet pipe road, and disposes medicine and wash power pump on this drug delivery pipeline; This cleaning medicine-chest also is connected with the first medicament reflux line and the second medicament reflux line, and this first medicament reflux line is connected on the aforementioned filtrate reflux line, and this second medicament reflux line is connected on the aforementioned concentrate recirculation pipeline;
This water washing device includes tap water and inserts pipeline, and this tap water inserts whether dispose access that pneumatic control valve controls tap water on pipeline, and this tap water inserts pipeline and is connected on the aforementioned water pump outlet pipe road;
This film protection of pipe device includes dense water side protective device and filtrate side protective device; This dense water side protective device is to be used to prevent that dense water side from producing negative pressure and damaging aforementioned microfiltration membranes pipe fitting, and it includes the air destructor, and this air destructor is arranged between aforementioned microfiltration membranes pipe fitting and the concentrate recirculation pipeline; This filtrate side protective device system is used to prevent that the filtrate side from producing negative pressure and damaging aforementioned microfiltration membranes pipe fitting, include evacuated tube, be disposed at being used on this evacuated tube and tackle retaining valve that filtrate passes through and the tubule that is used to discharge the bubble in the evacuated tube, wherein, one of this evacuated tube end system is connected on the aforementioned filtrate pipe holds, and its other end is connected in aforementioned thickener; This little piping is set up in the retaining valve two ends and is connected with the emptying pipe at its two ends;
This cleaning model control device includes: variable valve, tensimeter, flow are taken into account controller;
Wherein, this variable valve includes the water pump outlet pipe road that is arranged on the drug delivery pipeline and medicine and washes first variable valve between the power pump, is arranged at second variable valve on the first medicament reflux line, is arranged at the 3rd variable valve on the second medicament reflux line, is arranged at the 4th variable valve on the backwash reflux line, is arranged at cleaning bumper post on the filtrate reflux line and the 5th variable valve between the first medicament reflux line;
This tensimeter includes the dense water pressure table that is arranged at dense waterpipe, is arranged at the product water pressure table on the filtrate reflux line, and be arranged at inlet gage on the water pump outlet pipe road, by this dense water pressure table, produce water pressure table and inlet gage and read pressure differential before and after the microfiltration membranes pipe fitting jointly;
This flowmeter includes the flow of inlet water meter that is arranged on the water pump outlet pipe road, is positioned at the product water ga(u)ge on the filtrate reflux line, this flow of inlet water meter and produce the producing water ratio that water ga(u)ge obtains this microfiltration membranes pipe fitting jointly;
This controller is connected in aforementioned each variable valve, flowmeter and tensimeter, the corresponding variable valve of control opens or closes with startup or cuts out aforementioned backwash device this controller according to setting automatically, and it is controlled corresponding variable valve according to aforementioned pressure difference or producing water ratio and opens or closes with Intelligence Selection and start medicine cleaning device and water washing device.
As a kind of preferred version, described water pump outlet pipe road dispose a retaining valve near circulation power pump place.
As a kind of preferred version, dispose the flow pressure by-pass cock of the dense water pressure of a scalable on the described concentrate recirculation pipeline.
As a kind of preferred version, the quantity of the every row of described microfiltration membranes pipe fitting is 8 to 12.
A kind of cleaning method of developer solution circular treatment equipment is set the frequency of backwash and the time span of each backwash according to actual needs, and aforementioned controller then starts according to the automatic control of setting of parameter in good time or cuts out the backwash device to carry out backwash; Simultaneously, utilize tensimeter to read pressure differential before and after the microfiltration membranes pipe fitting in the developer solution circular treatment equipment, utilize flowmeter to obtain the producing water ratio of this microfiltration membranes pipe fitting, aforementioned controller controls according to aforementioned pressure difference or producing water ratio and starts or cut out corresponding variable valve and carry out medicine with Intelligence Selection and wash and wash.
As a kind of preferred version, when this producing water ratio was lower than 60%, the aforementioned medicine cleaning device operation of the automatic control of described controller was carried out medicine to the microfiltration membranes pipe fitting and is washed and wash.
As a kind of preferred version, when this pressure differential rose to 15%, the aforementioned medicine cleaning device of the automatic control of described controller carried out medicine to the microfiltration membranes pipe fitting and washes and wash.
As a kind of preferred version, whenever normally operation is in the time of 15 to 30 minutes when this developer solution circular treatment equipment, and described controller reaches the backwash in 5 to 10 seconds when the aforementioned backwash cleaning device of control carries out one time to the microfiltration membranes pipe fitting automatically.
The present invention compared with prior art has tangible advantage and beneficial effect, particularly, and as shown from the above technical solution:
One, the present invention's purging system have by backwash, the medicine of cleaning model control device control wash, water washing device cleans the microfiltration membranes pipe fitting, by this, on the one hand, can protect microfiltration membranes not stop up well, thereby, keep the optimum filtration function of microfiltration membranes pipe fitting effectively; On the other hand, the setting of cleaning model control device makes this purging system to select the corresponding cleaning pattern according to the different situations of microfiltration membranes pipe fitting, thereby, the more robotization of this purging system, intellectuality;
Two, the present invention's purging system also includes film protection of pipe device, and this film protection of pipe device specifically includes dense water side protective device and filtrate side protective device; This filtrate side protective device ties up to a retaining valve and a tubule is set in the emptying pipe, and tubule plays emptying, and retaining valve stops filtrate to be flowed out from emptying pipe, plays protection simultaneously and produces the damage to film when negative pressure occurring of water side; This dense water side protective device is an air destructive valve that is arranged on the dense waterpipe, and it can prevent to damage when dense water side from producing negative pressure the film pipe effectively;
Three, the present invention's cleaning method system judges by controller whether the microfiltration membranes pipe needs to clean and select the required cleaning model that carries out, control starts different cleaning devices then, this cleaning method is compared the cleaning method of tradition, and its advantage is: clean more timely, cleaning way is more reasonable;
Four, the present invention reasonably uses retaining valve between the water inlet of circulation power pump and microfiltration membranes pipe fitting, prevents that effectively aqueous reflux from going into pump, and prevents the inner dehydration of microfiltration membranes, when emergency situations such as unexpected power failure especially occurring;
Five, the polyphone quantity of set microfiltration membranes pipe is whenever classified 8 to 12 as among the present invention, can learn that through dynamics and flow dynamics analysis this serial arrangement can save kinetic energy to greatest extent;
Six, compact conformation of the present invention, rationally distributed.
For more clearly setting forth architectural feature of the present invention and effect, the present invention is described in detail below in conjunction with accompanying drawing and specific embodiment:
Description of drawings
Fig. 1 is the integrated piping arrangement synoptic diagram of the present invention's preferred embodiment;
Fig. 2 is the relevant connection diagrammatic sketch of the preferred embodiment middle controller of the utility model.
The accompanying drawing identifier declaration:
01, developing trough 02, thickener
03, circulation power pump 031, retaining valve
04, microfiltration membranes pipe fitting 05, backwash device
051, cleans bumper post 052, pneumatic control valve
06, medicine cleaning device 061, cleaning medicine-chest
062, drug delivery pipeline 063, medicine are washed power pump
064, the first medicament reflux line 065, the second medicament reflux line
07, water washing device 071, tap water insert pipeline
072, pneumatic control valve 08, film protection of pipe device
081, air destructor 082, evacuated tube
083, retaining valve 084, tubule
101, first variable valve 102, second variable valve
103, the 3rd variable valve 104, the 4th variable valve
105, the 5th variable valve 106, dense water pressure table
107, produce water pressure table 108, inlet gage
109, flow of inlet water meter 110, product water ga(u)ge
10, water pump outlet pipe road 20, concentrate recirculation pipeline
30, filtrate pipeline 31, filtrate reflux line
32, dense waterpipe 40, backwash reflux line
50, controller
Embodiment:
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
See also illustrated in figures 1 and 2, it has shown the concrete structure of the present invention's preferred embodiment, a kind of purging system and cleaning method thereof of developer solution circular treatment equipment, include developing trough 01, thickener 02, circulation power pump 03 and the microfiltration membranes pipe fitting 04 that adopts cross-flow filtration, wherein, this developing trough 01 is that duct type is connected in thickener 02, this thickener 02 is connected in circulation power pump 03, this circulation power pump 03 is connected in an end of microfiltration membranes pipe fitting 04 by water pump outlet pipe road 10, and the other end of this microfiltration membranes pipe fitting 04 system is connected in aforementioned thickener 02 by concentrate recirculation pipeline 20, this microfiltration membranes pipe fitting 04 is connected in developing trough 01 by filtrate reflux line 31, and is provided with sample valve in this filtrate reflux line 31.
Especially, in water pump outlet pipe road 10 dispose a retaining valve 031 near circulation power pump 03 place go into circulation power pump 03 so that effectively prevent aqueous reflux, and prevent the inner dehydration of microfiltration membranes pipe fitting 04, when emergency situations such as power failure suddenly especially occurring; And the quantity of aforementioned microfiltration membranes pipe fitting 04 every row setting is preferably 8 to 12, because can learn that according to dynamics and flow dynamics analysis this serial arrangement can save kinetic energy to greatest extent.The polyphone quantity of the microfiltration membranes pipe fitting 04 that is provided with in the present embodiment is whenever classified 8 as, and totally 1 row according to its length, are arranged into 4 row with the film pipe, and every row is arranged 2.Certainly, the microfiltration membranes pipe fitting 04 of can arranging according to actual needs is not as limit.
Simply introduce the product water process of aforementioned developer solution circular treatment equipment, promptly, aforementioned circulation power pump 03 extracts waste developing solution from thickener 02, waste developing solution enters water pump outlet pipe road 10,10 flow in the microfiltration membranes pipe fitting 04 from the water pump outlet pipe road, waste developing solution is separated into filtrate and concentrate in microfiltration membranes pipe fitting 04 inside, filtrate comes together in filtrate pipeline 30, filtrate pipeline 30 joins with filtrate reflux line 31, concentrate recirculation pipeline 20, filtrate is back to developing trough 01 by filtrate reflux line 31, concentrate is discharged from concentrate recirculation pipeline 20, finally is back to thickener 02.
Aforementioned product water process can cause microfiltration membranes pipe fitting 04 to be polluted or its filter opening blocked and influence filtration flux, by this, the present invention is directed to aforementioned microfiltration membranes pipe fitting 04 and be provided with a purging system, the film protection of pipe device 08 that this purging system includes backwash device 05, medicine cleaning device 06, water washing device 07 and microfiltration membranes pipe fitting 04 protected when being used to clean also includes the cleaning model control device;
Wherein, this backwash device 05 includes the pneumatic control valve 052 that cleans bumper post 051 and be connected in this cleaning bumper post 051 side openings place, and this pneumatic control valve 052 is a normally closed switch, directly joins with air; This cleaning bumper post 051 is arranged on the aforementioned filtrate reflux line 31, and at this backwash device 05, is provided with a backwash reflux line 40 that is connected between aforementioned water pump outlet pipe road 1 and the thickener 02;
This medicine cleaning device 06 includes and cleans medicine-chest 061, and this cleanings medicine-chest 061 inside is provided with PH meter, and this PH meter system is used for cleaning the monitoring of medicine in the medicine-chest, when pH value exceeds normal range in the medicine-chest, and then interpolation or the medicament that more renews; This cleaning medicine-chest one end is connected with drug delivery pipeline 062, and this drug delivery pipeline 062 is connected on the aforementioned water pump outlet pipe road 10, and disposes medicine and wash power pump 063 on this drug delivery pipeline 062; This cleaning medicine-chest 061 also is connected with the first medicament reflux line 064 and the second medicament reflux line 065, and this first medicament reflux line 064 is connected on the aforementioned filtrate reflux line 31, and this second medicament reflux line 065 is connected on the aforementioned concentrate recirculation pipeline 20;
This water washing device 07 includes tap water and inserts pipeline 071, and this tap water inserts whether dispose access that pneumatic control valve 072 controls tap water on pipeline 071, and this tap water inserts pipeline 071 and is connected on the aforementioned water pump outlet pipe road 10;
This film protection of pipe device 08 includes dense water side protective device and filtrate side protective device; This dense water side protective device is to be used to prevent that dense water side from producing negative pressure and damaging aforementioned microfiltration membranes pipe fitting 04, and it includes air destructor 081, and this air destructor 081 is arranged between aforementioned microfiltration membranes pipe fitting 04 and the concentrate recirculation pipeline 20; This filtrate side protective device system is used to prevent that the filtrate side from producing negative pressure and damaging aforementioned little film pipe fitting 04 that meets the eye on every side, include evacuated tube 082, be disposed at the tubule 084 that being used on this evacuated tube 082 tackle the retaining valve 083 that filtrate passes through and be used to discharge the bubble in the evacuated tube 082, wherein, one of this evacuated tube 082 end system is connected in end on the aforementioned filtrate pipe 3, and its other end is connected in aforementioned thickener 02; This tubule 084 is to be set up in retaining valve 083 two ends and to be connected with the evacuated tube 082 at its two ends;
This cleaning model control device includes: variable valve, tensimeter, flow are taken into account controller 50;
This variable valve includes the water pump outlet pipe road 10 that is arranged at respectively on the drug delivery pipeline 062 and medicine and washes first variable valve 101 between the power pump 063, places second variable valve 102 on the first medicament reflux line 064, is arranged at the 3rd variable valve 103 on the second medicament reflux line 065, is arranged at the 4th variable valve 104 on the backwash reflux line 40, is arranged at cleaning bumper post 051 on the filtrate reflux line 31 and the 5th variable valve 105 between the first medicament reflux line 064;
This tensimeter includes the dense water pressure table 106 that is arranged at dense waterpipe 32, is arranged at the product water pressure table 107 on the filtrate reflux line 31, and be arranged at inlet gage 108 on the water pump outlet pipe road 10, by this dense water pressure table 106, produce water pressure table 107 and inlet gage 108 reads the pressure differential of microfiltration membranes pipe fitting 04 front and back jointly;
This flowmeter includes the flow of inlet water meter 109 that is arranged on the water pump outlet pipe road 10, is positioned at the product water ga(u)ge 110 on the filtrate reflux line 31, this flow of inlet water meter 109 and produce the producing water ratio that water ga(u)ge 110 obtains this microfiltration membranes pipe fitting 04 jointly;
As shown in Figure 2, this controller is connected in aforementioned each variable valve, flowmeter and tensimeter, and in present embodiment, this controller 50 is to select a programmable logic controller (PLC) (PLC) for use, certainly, also can select other controller 50 that is suitable for for use, not as limit; This programmable logic controller (PLC) (PLC) is set the frequency of backwash and the time span of each backwash according to actual needs, starts according to the automatic control of setting of parameter then in good time or closes backwash device 05 to carry out backwash; Simultaneously, utilize tensimeter to read pressure differential before and after the microfiltration membranes pipe fitting in the developer solution circular treatment equipment, utilize flowmeter to obtain the producing water ratio of this microfiltration membranes pipe fitting 04, this controller 50 controls according to aforementioned pressure difference or producing water ratio and starts or cut out corresponding variable valve and carry out medicine with Intelligence Selection and wash and wash.
Aforementioned the present invention's purging system can carry out three cleaning processes, specifically includes: backwash process, medicine are washed process, water-washing process, and it is as follows simply to introduce these three cleaning processes:
Backwash process: in this embodiment of the present invention, be preferably in the every normal operation of this developer solution circular treatment equipment in the time of 15 to 30 minutes, reach 5 to 10 seconds backwash when carrying out one time, concrete backwash frequency and each backwash time can be according to the actual state settings; Its detailed process is: aforementioned analyzer-controller is opened pneumatic valve 052, the 4th variable valve 104 and the 5th variable valve 105 automatically, and close first variable valve 101 and second variable valve 102, enter air from this pneumatic valve 052, the liquid that cleans bumper post 051 inside is depressed in the pipeline 31, air-water mixture washes away microfiltration membranes pipe fitting 04 from producing the water direction, and backwash water is back to thickener 01 by backwash reflux line 40; This process is for producing the indispensable supporting process of water, and it can protect microfiltration membranes pipe fitting 04 effectively;
Medicine is washed process: when this producing water ratio is lower than normal producing water ratio, promptly be lower than at 60% o'clock, or aforementioned pressure difference rises at 15% o'clock, aforementioned medicine cleaning device 06 operation of aforementioned controller 50 automatic controls is carried out medicine to microfiltration membranes pipe fitting 04 and is washed; Its detailed process is: aforementioned analyzer-controller is opened first variable valve 101 automatically, second variable valve 102 and the 3rd variable valve 103, close the 4th variable valve 104 and the 5th variable valve 105 simultaneously, start medicine and wash power pump 063, this medicine is washed the medicament that power pump 063 will clean in the medicine-chest 061 and is pumped to drug delivery pipeline 062, this drug delivery pipeline 062 is provided with retaining valve and aforementioned first variable valve 101, this retaining valve is used to prevent that the 62 interior medicaments refluences of drug delivery pipeline from damaging medicine and washing power pump 063, enter aforementioned water pump outlet pipe road 10 through four-way valve again, and be delivered in the aforementioned microfiltration membranes pipe fitting 04, be divided into filtrate and concentrate at microfiltration membranes pipe fitting 04, the filtrate part enters the first medicament reflux line 064 through filtrate reflux line 31, drains back at last to clean in the medicine-chest 061; Concentrate flow in the concentrate recirculation pipeline 20 from dense waterpipe 32, and then the second medicament reflux line 065 of flowing through is back in the cleaning medicine-chest 061;
Water-washing process: this process is after the medicine process of washing is carried out, the process that need clean microfiltration membranes pipe fitting 04 inner residual medicament, promptly after the aforementioned medicine process of washing was finished, then these controller 50 automatic operation water washing devices 07 were washed, and wash away with the medicament that will residue in dense water side and product water side; Its detailed process is: tap water inserts pipeline 071 by tap water and provides, aforementioned controller 50 is opened pneumatic control valve 072, second variable valve 102 and the 3rd variable valve 103 automatically, close first variable valve 101, the 4th variable valve 104 and the 5th variable valve 105 simultaneously, tap water enters in the aforementioned microfiltration membranes pipe fitting 04, will be in the filtrate reflux line 31 streams first medicament recirculatory pipe 064 from the water that dilute side is handled, discharge outside the system at last, and the liquid that dense water side is handled enters in the concentrate recirculation pipeline 20 from dense waterpipe 32, at last outside the discharge system;
Next, the method that introduction utilizes aforementioned purging system that microfiltration membranes pipe fitting 04 is cleaned, promptly, before set the frequency of backwash and the time span of each backwash according to actual needs, 50 of aforementioned controllers start according to the automatic controls of setting of parameter in good time or cut out backwash device 05 to carry out backwash; Simultaneously, utilize tensimeter to read pressure differential before and after the microfiltration membranes pipe fitting in the developer solution circular treatment equipment, utilize flowmeter to obtain the producing water ratio of this microfiltration membranes pipe fitting 04, aforementioned controller 50 controls according to aforementioned pressure difference or producing water ratio and starts or cut out corresponding variable valve and carry out medicine with Intelligence Selection and wash and wash; So; this purging system can regularly clean with backwash mode aforementioned microfiltration membranes pipe fitting 04 according to actual needs; also can select corresponding medicine to wash and wash cleaning models such as clothing according to different situations; thereby; the more robotization of this purging system, intellectuality, it can protect microfiltration membranes pipe fitting 04 not stop up timely and effectively, thereby; keep the optimum filtration function of microfiltration membranes pipe fitting 04 well, guarantee its best filtration flux.
Design focal point of the present invention is:
One, the present invention's purging system have by backwash, the medicine of cleaning model control device control wash, water washing device cleans the microfiltration membranes pipe fitting, by this, on the one hand, can protect microfiltration membranes not stop up well, thereby, keep the optimum filtration function of microfiltration membranes pipe fitting effectively; On the other hand, the setting of cleaning model control device makes this purging system to select the corresponding cleaning pattern according to the different situations of microfiltration membranes pipe fitting, thereby, the more robotization of this purging system, intellectuality;
Two, the present invention's purging system also includes film protection of pipe device, and this film protection of pipe device specifically includes dense water side protective device and filtrate side protective device; This filtrate side protective device ties up to a retaining valve and a tubule is set in the emptying pipe, and tubule plays emptying, and retaining valve stops filtrate to be flowed out from emptying pipe, plays protection simultaneously and produces the damage to film when negative pressure occurring of water side; This dense water side protective device is an air destructive valve that is arranged on the dense waterpipe, and it can prevent to damage when dense water side from producing negative pressure the film pipe effectively;
Three, the present invention's cleaning method system judges by controller whether the microfiltration membranes pipe needs to clean and select the required cleaning model that carries out, control starts different cleaning devices then, this cleaning method is compared the cleaning method of tradition, and its advantage is: clean more timely, cleaning way is more reasonable;
Four, the present invention reasonably uses retaining valve between the water inlet of circulation power pump and microfiltration membranes pipe fitting, prevents that effectively aqueous reflux from going into pump, and prevents the inner dehydration of microfiltration membranes, when emergency situations such as unexpected power failure especially occurring;
Five, the polyphone quantity of set microfiltration membranes pipe is whenever classified 8 to 12 as among the present invention, can learn that through dynamics and flow dynamics analysis this serial arrangement can save kinetic energy to greatest extent;
Six, compact conformation of the present invention, rationally distributed.
The above, it only is preferred embodiment of the present invention, be not that technical scope of the present invention is imposed any restrictions, so every foundation technical spirit of the present invention all still belongs in the scope of technical solution of the present invention any trickle modification, equivalent variations and modification that above embodiment did.
Claims (8)
1. the purging system of a developer solution circular treatment equipment, include developing trough, thickener, the circulation power pump, and the microfiltration membranes pipe fitting and the filtrate pipe that adopt cross-flow filtration, wherein, this developing trough is that duct type is connected in thickener, this thickener is connected in the circulation power pump, this circulation power pump is connected in an end of microfiltration membranes pipe fitting by the water pump outlet pipe road, and the other end of this microfiltration membranes pipe fitting system is connected in aforementioned thickener by the concentrate recirculation pipeline, and, this filtrate pipe is connected in developing trough by the filtrate reflux line, it is characterized in that: be provided with a purging system at aforementioned microfiltration membranes pipe fitting, this purging system includes the backwash device, the medicine cleaning device, water washing device, film protection of pipe device and cleaning model control device;
Wherein, this backwash device includes the pneumatic control valve that cleans bumper post and be connected in this cleaning bumper post side openings place, and this pneumatic control valve is a normally closed switch; This cleaning bumper post is arranged on the aforementioned filtrate reflux line, and at this backwash device, is provided with a backwash reflux line that is connected between aforementioned water pump outlet pipe road and the thickener;
This medicine cleaning device includes the cleaning medicine-chest, and this cleaning medicine-chest one end is connected with the drug delivery pipeline, and this drug delivery pipeline is connected on the aforementioned water pump outlet pipe road, and disposes medicine and wash power pump on this drug delivery pipeline; This cleaning medicine-chest also is connected with the first medicament reflux line and the second medicament reflux line, and this first medicament reflux line is connected on the aforementioned filtrate reflux line, and this second medicament reflux line is connected on the aforementioned concentrate recirculation pipeline;
This water washing device includes tap water and inserts pipeline, and this tap water inserts whether dispose access that pneumatic control valve controls tap water on pipeline, and this tap water inserts pipeline and is connected on the aforementioned water pump outlet pipe road;
This film protection of pipe device includes dense water side protective device and filtrate side protective device; This dense water side protective device is to be used to prevent that dense water side from producing negative pressure and damaging aforementioned microfiltration membranes pipe fitting, and it includes the air destructor, and this air destructor is arranged between aforementioned microfiltration membranes pipe fitting and the concentrate recirculation pipeline; This filtrate side protective device system is used to prevent that the filtrate side from producing negative pressure and damaging aforementioned microfiltration membranes pipe fitting, include evacuated tube, be disposed at being used on this evacuated tube and tackle retaining valve that filtrate passes through and the tubule that is used to discharge the bubble in the evacuated tube, wherein, one of this evacuated tube end system is connected on the aforementioned filtrate pipe holds, and its other end is connected in aforementioned thickener; This little piping is set up in the retaining valve two ends and is connected with the emptying pipe at its two ends;
This cleaning model control device includes: variable valve, tensimeter, flow are taken into account controller;
Wherein, this variable valve includes the water pump outlet pipe road that is arranged on the drug delivery pipeline and medicine and washes first variable valve between the power pump, is arranged at second variable valve on the first medicament reflux line, is arranged at the 3rd variable valve on the second medicament reflux line, is arranged at the 4th variable valve on the backwash reflux line, is arranged at cleaning bumper post on the filtrate reflux line and the 5th variable valve between the first medicament reflux line;
This tensimeter includes the dense water pressure table that is arranged at dense waterpipe, is arranged at the product water pressure table on the filtrate reflux line, and be arranged at inlet gage on the water pump outlet pipe road, by this dense water pressure table, produce water pressure table and inlet gage and read pressure differential before and after the microfiltration membranes pipe fitting jointly;
This flowmeter includes the flow of inlet water meter that is arranged on the water pump outlet pipe road, is positioned at the product water ga(u)ge on the filtrate reflux line, this flow of inlet water meter and produce the producing water ratio that water ga(u)ge obtains this microfiltration membranes pipe fitting jointly;
This controller is connected in aforementioned each variable valve, flowmeter and tensimeter, the corresponding variable valve of control opens or closes with startup or cuts out aforementioned backwash device this controller according to setting automatically, and it is controlled corresponding variable valve according to aforementioned pressure difference or producing water ratio and opens or closes with Intelligence Selection and start medicine cleaning device and water washing device.
2. the purging system of developer solution circular treatment equipment according to claim 1 is characterized in that: described water pump outlet pipe road dispose a retaining valve near circulation power pump place.
3. the purging system of developer solution circular treatment equipment according to claim 1 is characterized in that: the flow pressure by-pass cock that disposes the dense water pressure of a scalable on the described concentrate recirculation pipeline.
4. the purging system of developer solution circular treatment equipment according to claim 1 is characterized in that: the quantity of the every row of described microfiltration membranes pipe fitting is 8 to 12.
5. the cleaning method of a developer solution circular treatment equipment, it is characterized in that: set the frequency of backwash and the time span of each backwash according to actual needs, aforementioned controller then starts according to the automatic control of setting of parameter in good time or cuts out the backwash device to carry out backwash; Simultaneously, utilize tensimeter to read pressure differential before and after the microfiltration membranes pipe fitting in the developer solution circular treatment equipment, utilize flowmeter to obtain the producing water ratio of this microfiltration membranes pipe fitting, aforementioned controller controls according to aforementioned pressure difference or producing water ratio and starts or cut out corresponding variable valve and carry out medicine with Intelligence Selection and wash and wash.
6. the cleaning method of developer solution circular treatment equipment according to claim 5 is characterized in that: when this producing water ratio was lower than 60%, the aforementioned medicine cleaning device operation of the automatic control of described controller was carried out medicine to the microfiltration membranes pipe fitting and is washed and wash.
7. the cleaning method of developer solution circular treatment equipment according to claim 5 is characterized in that: when this pressure differential rose to 15%, the aforementioned medicine cleaning device of the automatic control of described controller carried out medicine to the microfiltration membranes pipe fitting and washes and wash.
8. the cleaning method of developer solution circular treatment equipment according to claim 5, it is characterized in that: whenever normally operation is in the time of 15 to 30 minutes when this developer solution circular treatment equipment, and described controller reaches the backwash in 5 to 10 seconds when the aforementioned backwash cleaning device of control carries out one time to the microfiltration membranes pipe fitting automatically.
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| CN 201010510959 CN102053507B (en) | 2010-10-18 | 2010-10-18 | Cleaning system and cleaning method of developing solution circulation process equipment |
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| CN 201010510959 CN102053507B (en) | 2010-10-18 | 2010-10-18 | Cleaning system and cleaning method of developing solution circulation process equipment |
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| CN104570625A (en) * | 2013-10-17 | 2015-04-29 | 沈阳芯源微电子设备有限公司 | Feeding device with liquid defoaming function |
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| CN108037646A (en) * | 2017-12-28 | 2018-05-15 | 信利（惠州）智能显示有限公司 | Developing cell and etching apparatus |
| CN110703565A (en) * | 2019-11-01 | 2020-01-17 | 广东威迪科技股份有限公司 | Circuit board developer solution circulation recovery system |
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| CN102053507B (en) | 2013-07-03 |
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Address after: 523000 Guangdong province Dongguan city Humen town village unity Avenue Guangdong industrial zone / Polytron Technologies Inc Applicant after: GUANGDONG VICDI TECHNOLOGY CO., LTD. Address before: Dongguan City, Guangdong province 523000 Tuanjie Road, Humen Town Village Industrial Zone Dongguan vicdi Membrane Technology Co. Ltd Applicant before: Dongguan Vicdi Film Science & Technology Co., Ltd. |
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