CN102024675B - System for discharging and recovering multiple chemicals according to classification - Google Patents
System for discharging and recovering multiple chemicals according to classification Download PDFInfo
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- CN102024675B CN102024675B CN200910220034A CN200910220034A CN102024675B CN 102024675 B CN102024675 B CN 102024675B CN 200910220034 A CN200910220034 A CN 200910220034A CN 200910220034 A CN200910220034 A CN 200910220034A CN 102024675 B CN102024675 B CN 102024675B
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Abstract
The invention relates to a device for classifiedly discharging or recovering multiple chemicals on semiconductor equipment, in particular to a system for classifiedly discharging and recovering multiple chemicals. After chemicals in a process processing unit are used, the multiple chemicals to be discharged are automatically classifiedly discharged or recovered and the system is mostly used for developing equipment, cleaning equipment, etching equipment and the like made of semiconductors. The system is provided with a discharged effluent collecting pipe, a classified discharging pipe, a rotating motor and a rotating support arm, wherein the discharged effluent collecting pipe is arranged on the rotating support arm; the rotating support arm is connected with the rotating motor on a classified effluent discharging pipe bracket through a bearing; and the rotating motor drives the rotating support arm to rotate so as to drive the discharged effluent collecting pipe to be aligned to a corresponding classified discharging pipe. The invention can avoid waste due to direct discharge and solves the problems of recycling and the classified discharging of the multiple chemicals.
Description
Affiliated technical field
The present invention relates to be used for the classification discharging of number of chemical article on the semiconductor equipment or the device that reclaims; Be specially one kind of multiple chemicals classification discharging recovery systems; After the chemicals of PROCESS FOR TREATMENT unit uses; To classify automatically discharging or reclaim of the number of chemical article that will discharge, be used for developing apparatus cleaning equipment etching apparatus that semiconductor processes etc. more.
Background technology
At present, along with the technology of equipment such as a lot of etching developments in the diversified equipment of processing at semiconductor is very complicated, need to use the number of chemical article in the processing procedure; The chemicals that has costs an arm and a leg; Use once the back just directly discharging cause waste, also have some chemicals each other can not dual disposal, otherwise can cause danger; Or the waste discharge system of factory caused corrosion harmfulness, board is processed not exclusively the technology of different process goods be suitable for.
Summary of the invention
In order to overcome direct discharging waste; The problem that solution is recycled and the classification of number of chemical article is discharged; The object of the present invention is to provide one kind of multiple chemicals classification discharging recovery system, it is the waste liquid discharging recovery system of classifying automatically, can fully address the above problem.
Technical scheme of the present invention is:
One kind of multiple chemicals classification discharging recovery systems; This system is provided with discharging waste collection pipe, classification delivery pipe, electric rotating machine, rotation support arm; Discharging waste collection pipe is installed on the rotation support arm; The rotation support arm is connected through bearing with the electric rotating machine that classification is discharged on the sewer pipe support, and it is corresponding with the respective classified delivery pipe that electric rotating machine drives discharging waste collection pipe through the rotation of driven in rotation support arm.
Described number of chemical article classification discharging recovery system also is provided with anti-leakage catch tray, and anti-leakage catch tray is a ring channel structures, and the classification delivery pipe is arranged in the cannelure of anti-leakage catch tray.
Described number of chemical article classification discharging recovery system, the floss hole of classification delivery pipe bottom are respectively with corresponding recyclable waste liquid barrel or can not be communicated with by the in line pipeline of withdrawal liquid.
Described number of chemical article classification discharging recovery system, this system is fixed on the swivel bearing of bottommost, and total system is that fulcrum rotates in 360 degree scopes with the swivel bearing.
Described number of chemical article classification discharging recovery system; Recyclable waste liquid barrel is arranged on the rotatable base plate of this system; Be provided with the upper limit block in the bottom of rotatable base plate, the below of total system is provided with and the corresponding lower limit block of upper limit block direction of rotation.
The invention has the beneficial effects as follows:
1, structure of the present invention is ingenious; Under the situation that does not delay the normal operation of board equipment; Automatically, simple to operate to the discharging of classifying of the number of chemical article of various uses, make equipment can be suitable for more multiple manufacturing process; But also utilize again after effectively expensive chemicals being reclaimed separately, thereby saving fund.
2, the present invention installs drain line in the technique unit bottom, utilizes the discharge opeing path of Electric Machine Control discharge opeing, and motor rotates stop position and accurately located by alignment sensor.When the technique unit on top uses a kind of chemicals, the emission sensor work of its its appointment of supply system communication, the motor-driven discharging tube rotates, and behind assigned address, stops discharging of waste liquid.When using another kind of chemicals, motor drives discharging tube automatically and forwards another appointed positions to and carry out discharge opeing, thereby realizes the purpose that the classification of different chemical article is discharged, and integral part can arbitrarily rotate a week, is convenient to operating personnel's picking and placeing recycling bin.
3, total system of the present invention is provided with leak detection, Level Detection, fluid discharge detection etc., and is simple in structure, practical.
Description of drawings
Fig. 1 three-dimensional structure diagram of the present invention (the recyclable waste liquid barrel 4 of clipped).
Fig. 2 is a front view of the present invention.
Among the figure, 1 discharging waste collection pipe; 2 classification delivery pipes; 3 electric rotating machines; 4 recyclable waste liquid barrel; 5 connect fixed disk; 6 rotatable base plates; 7 rotation support arms; 8 anti-leakage catch traies; 9 can not the in line pipeline of withdrawal liquid; 10 upper limit blocks; 11 lower limit blocks; 12 swivel bearings; 13 liquid level sensors; 14 classification discharging sewer pipe supports; 15 boards.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Like Fig. 1-shown in Figure 2; Number of chemical article of the present invention classification discharging recovery system mainly comprises discharging waste collection pipe 1, classification delivery pipe 2, electric rotating machine 3, recyclable waste liquid barrel 4, connects fixed disk 5, rotatable base plate 6, rotation support arm 7, anti-leakage catch tray 8, can not withdrawal liquid in line pipeline 9, upper limit block 10, lower limit block 11, swivel bearing 12, liquid level sensor 13, classification discharging sewer pipe support 14 etc., and concrete structure is following:
Discharging waste collection pipe 1 is installed on the rotation support arm 7; The electric rotating machine 3 that rotation support arm 7 and classification are discharged on the sewer pipe support 14 is connected through bearing; Electric rotating machine 3 supports through the connection fixed disk 5 of classification discharging sewer pipe support 14, and it is corresponding with the classification delivery pipe 2 of appointment that electric rotating machine 3 drives discharging waste collection pipe 1 through 7 rotations of driven in rotation support arm.Anti-leakage catch tray 8 is a ring channel structures; Classification delivery pipe 2 is arranged in the cannelure of anti-leakage catch tray 8; The floss hole of classification delivery pipe 2 bottoms is respectively with corresponding recyclable waste liquid barrel 4 or can not be communicated with by the in line pipeline 9 of withdrawal liquid; Liquid level sensor 13 is installed in recyclable waste liquid barrel 4, and recyclable waste liquid barrel 4 is arranged on the rotatable base plate 6 of this system.
In the present embodiment, classification delivery pipe 2 is six, wherein five classification delivery pipes 2 respectively with recyclable waste liquid barrel 4 corresponding another ones classification delivery pipes 2 with can not be communicated with by the in line pipeline 9 of withdrawal liquid.
Among the present invention, total system is fixed on the swivel bearing 12 of bottommost (being the bottom of rotatable base plate 6), and total system is that fulcrum rotates in 360 degree scopes with swivel bearing 12.Classification discharging sewer pipe support 14 is installed on the rotatable base plate 6; Bottom at rotatable base plate 6 also is provided with upper limit block 10; The below of total system is provided with and the corresponding lower limit block 11 of upper limit block 10 direction of rotation; Cooperate the anglec of rotation of limit overall system through upper limit block 10 and lower limit block 11.
The course of work of the present invention is following:
In Fig. 1; When the technique unit on top is worked; No matter will use which kind of chemicals, electric rotating machine 3 can rotate to discard solution discharge port appointment, classification delivery pipe 2 with discharging waste collection pipe 1 through instruction driven in rotation support arm 7, after waste and old chemicals utilizes; Flow down through discharging waste collection pipe 1, be discharged into the place of appointment through classification delivery pipe 2.If callable chemicals then directly is discharged in the corresponding recyclable waste liquid barrel 4.If expendable waste liquid; Then but diameter goes through can not the in line pipeline 9 of withdrawal liquid being discharged in the workshop-sink pipeline, and electric rotating machine 3 is that the connection fixed disk 5 through classification discharging sewer pipe support 14 supports, and total system is fixed on the swivel bearing 12 of bottommost; Total system can revolve three-sixth turn for fulcrum by swivel bearing 12; For preventing that rotating cycle from too much making relevant cables and pipeline coiling, limit through upper limit block 10 and lower limit block 11, upper limit block 10 is fixed on the bottom of rotatable base plate 6; Lower limit block 11 is fixed on the board 15 (board of equipment such as etching development is positioned at the below of total system of the present invention).In discharging waste collection pipe 1 rotary course, the debris of pipe interior is known from experience to drop on and is prevented so just avoiding leak of liquid in the leakage catch tray 8.When liquid be discharged to a certain amount of after, overflow from recyclable waste liquid barrel 4 in order to prevent excess, liquid level sensor 13 is installed in recyclable waste liquid barrel 4, in order to detect collecting amount, every kind of recyclable waste liquid barrel 4 is geostationary with corresponding classification delivery pipe 2 positions.
Through such scheme, can overcome direct discharging waste, solve the problem that is recycled with number of chemical article classification discharging.
Claims (5)
1. recovery systems are discharged in one kind of multiple chemicals classification; It is characterized in that: this system is provided with discharging waste collection pipe, classification delivery pipe, electric rotating machine, rotation support arm; Discharging waste collection pipe is installed on the rotation support arm; The rotation support arm is connected through bearing with the electric rotating machine that classification is discharged on the sewer pipe support, and it is corresponding with the respective classified delivery pipe that electric rotating machine drives discharging waste collection pipe through the rotation of driven in rotation support arm.
2. according to the described number of chemical article classification of claim 1 discharging recovery system, it is characterized in that: also be provided with anti-leakage catch tray, anti-leakage catch tray is a ring channel structures, and the classification delivery pipe is arranged in the cannelure of anti-leakage catch tray.
3. according to the described number of chemical article of claim 1 classification discharging recovery system, it is characterized in that: the floss hole of classification delivery pipe bottom is respectively with corresponding recyclable waste liquid barrel or can not be communicated with by the in line pipeline of withdrawal liquid.
4. according to the described number of chemical article classification of claim 1 discharging recovery system, it is characterized in that: this system is fixed on the swivel bearing of bottommost, and total system is that fulcrum rotates in 360 degree scopes with the swivel bearing.
5. according to the described number of chemical article classification of claim 1 discharging recovery system; It is characterized in that: recyclable waste liquid barrel is arranged on the rotatable base plate of this system; Be provided with the upper limit block in the bottom of rotatable base plate, the below of total system is provided with and the corresponding lower limit block of upper limit block direction of rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910220034A CN102024675B (en) | 2009-11-20 | 2009-11-20 | System for discharging and recovering multiple chemicals according to classification |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910220034A CN102024675B (en) | 2009-11-20 | 2009-11-20 | System for discharging and recovering multiple chemicals according to classification |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102024675A CN102024675A (en) | 2011-04-20 |
| CN102024675B true CN102024675B (en) | 2012-09-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200910220034A Active CN102024675B (en) | 2009-11-20 | 2009-11-20 | System for discharging and recovering multiple chemicals according to classification |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105314579B (en) * | 2014-06-09 | 2017-11-03 | 沈阳芯源微电子设备有限公司 | A kind of waste collecting device |
| CN105202369A (en) * | 2015-08-20 | 2015-12-30 | 武汉新芯集成电路制造有限公司 | Wafer cleaning equipment wastewater discharge system and application thereof |
| CN112495465A (en) * | 2020-12-11 | 2021-03-16 | 普林斯(安庆)医药科技有限公司 | Waste liquid classification diversion recovery system of chemical experiment table |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0947291A2 (en) * | 1998-03-30 | 1999-10-06 | Speedfam Co., Ltd. | Slurry recycling system of CMP apparatus and method of same |
| CN1414610A (en) * | 2001-10-23 | 2003-04-30 | Ums有限公司 | Method and equipment of removing organic film |
| CN1532006A (en) * | 2003-03-24 | 2004-09-29 | 力晶半导体股份有限公司 | Drain water recovery system and method for producing device |
| CN1551982A (en) * | 2002-05-08 | 2004-12-01 | 株式会社日立高新技术 | Chemical analysis equipment and gene diagnosis equipment |
| CN201017176Y (en) * | 2007-03-15 | 2008-02-06 | 浙江大学 | Liquid supplying and recycling seal control device in immersed photolithography system |
| CN201565291U (en) * | 2009-11-20 | 2010-09-01 | 沈阳芯源微电子设备有限公司 | System for classified discharge or recovery of various chemicals |
-
2009
- 2009-11-20 CN CN200910220034A patent/CN102024675B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0947291A2 (en) * | 1998-03-30 | 1999-10-06 | Speedfam Co., Ltd. | Slurry recycling system of CMP apparatus and method of same |
| CN1414610A (en) * | 2001-10-23 | 2003-04-30 | Ums有限公司 | Method and equipment of removing organic film |
| CN1551982A (en) * | 2002-05-08 | 2004-12-01 | 株式会社日立高新技术 | Chemical analysis equipment and gene diagnosis equipment |
| CN1532006A (en) * | 2003-03-24 | 2004-09-29 | 力晶半导体股份有限公司 | Drain water recovery system and method for producing device |
| CN201017176Y (en) * | 2007-03-15 | 2008-02-06 | 浙江大学 | Liquid supplying and recycling seal control device in immersed photolithography system |
| CN201565291U (en) * | 2009-11-20 | 2010-09-01 | 沈阳芯源微电子设备有限公司 | System for classified discharge or recovery of various chemicals |
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| Publication number | Publication date |
|---|---|
| CN102024675A (en) | 2011-04-20 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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