CN105314579B - A kind of waste collecting device - Google Patents
A kind of waste collecting device Download PDFInfo
- Publication number
- CN105314579B CN105314579B CN201410252944.8A CN201410252944A CN105314579B CN 105314579 B CN105314579 B CN 105314579B CN 201410252944 A CN201410252944 A CN 201410252944A CN 105314579 B CN105314579 B CN 105314579B
- Authority
- CN
- China
- Prior art keywords
- waste liquid
- waste
- sleeve pipe
- liquid barrel
- fixed mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Abstract
The present invention relates to a kind of waste collecting device, available for spin coating in semiconductor wafer process, the waste collection of developing apparatus, collect box, sleeve pipe, handle and waste liquid barrel including waste liquid barrel fixed mount, waste liquid, wherein waste liquid collects box on the waste liquid barrel fixed mount, the waste liquid collect be arranged with the waste pipe of box can OQ t sleeve pipe；The waste liquid barrel is placed on the lower section of waste liquid barrel fixed mount, and the bung in the waste liquid barrel is corresponding with described sleeve pipe, described sleeve pipe is lifted by the realization of lifting or push for the handle being connected, and then insert the bung or extracted out by the bung, the waste liquid that the waste liquid collects box collection is flowed into the waste liquid barrel by sleeve pipe.The present invention collects in waste liquid has been arranged liftable sleeve pipe on the waste pipe of box, lifting or pushing using handle, lifts sleeve pipe, and then is inserted into waste liquid barrel or is extracted out from waste liquid barrel, both the problem of waste liquid barrel is easily with discharge pipe adhesion had been solved, and has facilitated waste liquid barrel to pick and place.
Description
Technical field
The present invention relates to a kind of waste collecting device, available for spin coating in semiconductor wafer process, developing apparatus
Waste collection.
Background technology
, it is necessary to carry out the coating of photoresist to chip with sol evenning machine in semiconductor wafer process, so that chip is complete
Into photoetching process.The waste liquid that current sol evenning machine is produced has two kinds of collection modes, and a kind of is the row for being directly discharged to inside plants
In useless pipeline, another be discharged into the waste liquid barrel of device interior, and the useless of device interior is discharged into when using the second way
During liquid bucket, because the ratio of viscosities of the chemicals such as photoresist is larger, often waste pipe and waste liquid barrel adhesion causes to pick and place waste liquid barrel
It is difficult.
The content of the invention
Often sticked together with discharge pipe to solve waste liquid barrel, pick and place the problems such as waste liquid barrel is inconvenient, mesh of the invention
Be a kind of waste collecting device is provided.
The purpose of the present invention is achieved through the following technical solutions：
The present invention includes waste liquid barrel fixed mount, waste liquid and collects box, sleeve pipe, handle and waste liquid barrel, and wherein waste liquid collects box peace
On the waste liquid barrel fixed mount, the waste liquid collect be arranged with the waste pipe of box can OQ t sleeve pipe；The waste liquid
Bucket is placed on the lower section of waste liquid barrel fixed mount, and the bung in the waste liquid barrel is corresponding with described sleeve pipe, and described sleeve pipe passes through phase
The realization of lifting or push of the handle of connection is lifted, and then is inserted the bung or extracted out by the bung, and the waste liquid collects
The waste liquid that box is collected is flowed into the waste liquid barrel by sleeve pipe.
Wherein：The handle is connected by depression bar with sleeve pipe, and one end of the depression bar is connected with described sleeve pipe, other end conduct
Fulcrum that the handle is lifted or pushed, abut with the waste liquid barrel fixed mount；The end face of the depression bar is " L " shape, " L " shape
One end is provided with " u "-shaped opening, and described sleeve pipe is placed in the " u "-shaped opening and is connected with the openend of the " u "-shaped opening,
The other end of " L " shape is cambered surface, abutted with waste liquid barrel fixed mount rolling；
The sensor of liquid level in detection waste liquid barrel is installed on the waste liquid barrel fixed mount；The waste liquid collects on box
Multiple waste liquid interface tubes are evenly equipped with, each waste liquid interface tube is connected with the waste pipe respectively；The waste pipe, sleeve pipe and bung
Longitudinal center line it is conllinear.
Advantages of the present invention is with good effect：
1. the present invention collects in waste liquid liftable sleeve pipe has been arranged on the waste pipe of box, using handle lift or under
Pressure, lifts sleeve pipe, and then is inserted into waste liquid barrel or is extracted out from waste liquid barrel, has both solved waste liquid barrel easily viscous with discharge pipe
Even the problem of, and facilitate waste liquid barrel to pick and place.
2. the present invention sleeve pipe be connected by depression bar with handle, handle during lifting or pushing, depression bar cambered surface
One end rolls with waste liquid barrel fixed mount and abutted, and is easy to lifting or pushing for handle.
3. the waste liquid of the present invention collects the uniform multiple waste liquid interface tubes in box top, be easy to inside spin coating and developing apparatus
Sewer pipe connection.
Brief description of the drawings
The structural front view of Fig. 1 present invention；
Fig. 2 is Fig. 1 left view；
Fig. 3 is Fig. 1 top view；
Fig. 4 is Fig. 1 axis side view；
Fig. 5 is Fig. 1 A-A cross section views (handle is fallen)；
Fig. 6 is Fig. 1 A-A cross section views (handle rise)；
Wherein：1 is waste liquid barrel fixed mount, and 2 be that waste liquid collects box, and 3 be sleeve pipe, and 4 be depression bar, and 5 be handle, and 6 be sensor
Mounting bracket, 7 be sensor, and 8 be waste liquid barrel, and 9 be waste pipe, and 10 be bung, and 11 be waste liquid interface tube.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As shown in figures 1-4, the present invention includes waste liquid barrel fixed mount 1, waste liquid and collects box 2, sleeve pipe 3, depression bar 4, handle 5, biography
Sensor mounting bracket 6, sensor 7 and waste liquid barrel 8, wherein waste liquid are collected box 2 and are fixed on the upper surface of waste liquid barrel fixed mount 1, give up
Liquid bucket 8 is placed on the lower section of waste liquid barrel fixed mount 1.The top that waste liquid collects box 2 is evenly equipped with multiple waste liquid interface tubes 11, spin coating and
Sewer pipe is inserted in each waste liquid interface tube 11 inside developing machine platform, and the waste liquid that spin coating and developing machine platform are produced enters through sewer pipe beam
Collect to waste liquid in box 2.The top that waste liquid collects box 2 is provided with waste pipe 9, be arranged with the waste pipe 9 can OQ t set
Pipe 3.Handle 5 is connected by depression bar 4 with sleeve pipe 3, and the depression bar 4 is located at the top of waste liquid barrel fixed mount 1, and the end face of depression bar 4 is " L "
Shape, one end of " L " shape is provided with " u "-shaped opening, sleeve pipe 3 be placed in the " u "-shaped opening and with the openend phase of " u "-shaped opening
Even, the other end of " L " shape is cambered surface, and the fulcrum for lifting or pushing as handle 5 is rolled with waste liquid barrel fixed mount 1 and abutted, handle 5
It is fixed on depression bar 4.
Bung 10 in waste liquid barrel 8 is corresponding with sleeve pipe 3, and the longitudinal center line of waste pipe 9, sleeve pipe 3 and bung 10 is conllinear.
Sleeve pipe 3 lifts or pushed realization lifting by handle 5, and then inserts bung 10 or extracted out by bung 10.Waste liquid collects box 2 and received
The waste liquid of collection is flowed into waste liquid barrel 8 by sleeve pipe 3.
Sensor 7 is arranged on sensor mount 6, and sensor mount 6 is fixed on the side of waste liquid barrel fixed mount 1,
Sensor 7 can detect the height of liquid level in waste liquid barrel 8.
The present invention operation principle be：
As shown in fig. 6, when handle 5 is in raised configuration, handle 5 declines sleeve pipe 3 by the effect of depression bar 4, insertion is useless
In bung 10 on liquid bucket 8；Sewer pipe insertion waste liquid collects the waste liquid interface tube 11 of the top of box 2 inside spin coating and developing machine platform
In, the waste liquid that spin coating and developing machine platform are produced is flowed into waste liquid through sewer pipe and collected in box 2, and waste liquid barrel 8 is flowed into by sleeve pipe 3
In；When the liquid level in waste liquid barrel 8 reaches the position that sensor 7 is installed, sensor 7 is alarmed, and points out to change waste liquid barrel 8.
When the waste liquid in waste liquid barrel 8 is filled, as shown in figure 5, when handle 5 is in pressed status, handle 5 passes through depression bar 4
Effect, rise sleeve pipe 3, depart from from the bung 10 in waste liquid barrel 8, take out and fill the waste liquid barrel 8 of waste liquid, by empty waste liquid
Bucket 8 is placed into the lower section of waste liquid barrel fixed mount 1, lifts handle 5, sleeve pipe 3 is inserted into waste liquid barrel 8, continues to collect waste liquid, directly
When reaching the position that sensor 7 is installed to the liquid level in second waste liquid barrel 8, then change to aforesaid operations empty waste liquid barrel.
Claims (5)
1. a kind of waste collecting device, it is characterised in that：Including waste liquid barrel fixed mount (1), waste liquid collect box (2), sleeve pipe (3),
Handle (5) and waste liquid barrel (8), wherein waste liquid collect box (2) on the waste liquid barrel fixed mount (1), and the waste liquid collects box
(2) be arranged with waste pipe (9) can OQ t sleeve pipe (3)；The waste liquid barrel (8) is placed on waste liquid barrel fixed mount (1)
Lower section, and the bung (10) in the waste liquid barrel (8) is corresponding with described sleeve pipe (3), and described sleeve pipe (3) passes through the hand that is connected
The realization of lifting or push of handle (5) is lifted, and then is inserted the bung (10) or extracted out by the bung (10), and the waste liquid converges
The waste liquid for collecting box (2) collection passes through in sleeve pipe (3) the inflow waste liquid barrel (8)；
The handle (5) is connected by depression bar (4) with sleeve pipe (3), and one end of the depression bar (4) is connected with described sleeve pipe (3), another
Hold the fulcrum for lifting or pushing as the handle (5), abutted with the waste liquid barrel fixed mount (1).
2. the waste collecting device as described in claim 1, it is characterised in that：The end face of the depression bar (4) is " L " shape, " L " shape
One end be provided with " u "-shaped opening, described sleeve pipe (3) be placed in the " u "-shaped opening and with the openend of the " u "-shaped opening
It is connected, the other end of " L " shape abuts for cambered surface, with the waste liquid barrel fixed mount (1) rolling.
3. the waste collecting device as described in claim 1 or 2, it is characterised in that：It is provided with the waste liquid barrel fixed mount (1)
Detect the sensor (7) of liquid level in waste liquid barrel (8).
4. the waste collecting device as described in claim 1 or 2, it is characterised in that：The waste liquid collect be evenly equipped with box (2) it is many
Individual waste liquid interface tube (11), each waste liquid interface tube (11) is connected with the waste pipe (9) respectively.
5. the waste collecting device as described in claim 1 or 2, it is characterised in that：The waste pipe (9), sleeve pipe (3) and bung
(10) longitudinal center line is conllinear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410252944.8A CN105314579B (en) | 2014-06-09 | 2014-06-09 | A kind of waste collecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410252944.8A CN105314579B (en) | 2014-06-09 | 2014-06-09 | A kind of waste collecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105314579A CN105314579A (en) | 2016-02-10 |
| CN105314579B true CN105314579B (en) | 2017-11-03 |
Family
ID=55243024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410252944.8A Active CN105314579B (en) | 2014-06-09 | 2014-06-09 | A kind of waste collecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105314579B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107687A (en) * | 2016-11-25 | 2018-06-01 | 沈阳芯源微电子设备有限公司 | A kind of waste liquid classified collection device and its categorised collection method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7213621B1 (en) * | 2005-12-01 | 2007-05-08 | Yung Yen Hsin Ind. Co., Ltd. | Oil change equipment |
| CN102024675A (en) * | 2009-11-20 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | System for classifiedly discharging and recovering multiple chemicals |
| CN102074491A (en) * | 2010-11-30 | 2011-05-25 | 沈阳芯源微电子设备有限公司 | Chemical-liquid classified recovering device with rotatable chassis |
| CN103626108A (en) * | 2013-11-27 | 2014-03-12 | 红塔烟草(集团)有限责任公司 | Device for collecting residual latex liquid in latex barrel |
| CN203625012U (en) * | 2013-12-23 | 2014-06-04 | 浙江祥邦科技有限公司 | High-efficiency liquid splash-proof device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5868150B2 (en) * | 2011-12-06 | 2016-02-24 | 株式会社ディスコ | Waste liquid treatment equipment |
-
2014
- 2014-06-09 CN CN201410252944.8A patent/CN105314579B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7213621B1 (en) * | 2005-12-01 | 2007-05-08 | Yung Yen Hsin Ind. Co., Ltd. | Oil change equipment |
| CN102024675A (en) * | 2009-11-20 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | System for classifiedly discharging and recovering multiple chemicals |
| CN102074491A (en) * | 2010-11-30 | 2011-05-25 | 沈阳芯源微电子设备有限公司 | Chemical-liquid classified recovering device with rotatable chassis |
| CN103626108A (en) * | 2013-11-27 | 2014-03-12 | 红塔烟草(集团)有限责任公司 | Device for collecting residual latex liquid in latex barrel |
| CN203625012U (en) * | 2013-12-23 | 2014-06-04 | 浙江祥邦科技有限公司 | High-efficiency liquid splash-proof device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105314579A (en) | 2016-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105314579B (en) | A kind of waste collecting device | |
| JP5141383B2 (en) | Water sampling apparatus and water sampling method | |
| CN204276417U (en) | The dirty device of the surface displacement of reservoir oil | |
| CN205099329U (en) | Tea -seed oil liquid filling machine is glib | |
| CN205241218U (en) | Cooking oil filling machine | |
| CN208596056U (en) | A kind of new type auto sampling of water quality detection device | |
| CN103742455A (en) | Liquid transfer device | |
| CN103656764A (en) | Improved negative-pressure aspirator | |
| CN202740325U (en) | Liquid suction device used for operation table | |
| CN202465242U (en) | Accumulated oil collection structure for automatic filling line | |
| CN103954403B (en) | Leakage point for liquid container detects equipment | |
| CN201619000U (en) | Oil tank for machining | |
| CN105502258B (en) | A kind of waste collecting device | |
| CN205109107U (en) | Dirty precipitation separation ware of profit is retrieved to vacuum pump oil secondary | |
| CN210056635U (en) | Otolaryngology synthesizes treatment platform scrubbing system | |
| CN211464179U (en) | Auxiliary device for cleaning coating cylinder | |
| CN212349788U (en) | Glass bottle belt cleaning device | |
| CN205313044U (en) | A vacuum pipe -line system for liquid filling machine | |
| CN211847883U (en) | Pathogen sample transfer detection device | |
| CN203929334U (en) | For the leakage point checkout equipment of liquid container | |
| CN216717914U (en) | Sewage multistage sampling and sample reserving device | |
| CN216280591U (en) | Bucket type oil collecting equipment for hydraulic valve platform | |
| CN201330281Y (en) | Multi-chemical separation and recycling device | |
| CN212428742U (en) | Scattered dirty oil water recovery and reinjection device | |
| CN103240248A (en) | Quartz cup cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
|
| CP03 | Change of name, title or address |