CN102023330A - Shading element array, method for manufacturing shading element array and lens module array - Google Patents
Shading element array, method for manufacturing shading element array and lens module array Download PDFInfo
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- CN102023330A CN102023330A CN2009103070452A CN200910307045A CN102023330A CN 102023330 A CN102023330 A CN 102023330A CN 2009103070452 A CN2009103070452 A CN 2009103070452A CN 200910307045 A CN200910307045 A CN 200910307045A CN 102023330 A CN102023330 A CN 102023330A
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Abstract
The invention relates to a shading element array which comprises a photic panel and a shading shielding layer arranged on the photic panel. The shading shielding layer is provided with a plurality of clear holes which are distributed at intervals. The shading shielding layer comprises a magnetic shielding layer and a shading layer arranged between the photic panel and the magnetic shielding layer. The invention further relates to a method for manufacturing the shading element array and a lens module array provided with the shading element array.
Description
Technical field
The present invention relates to a kind of optical element, relate in particular to the manufacture method of a kind of wafer scale (wafer level) shading element array, shading element array and have the lens module array of this shading element array.
Background technology
Along with the development of camera technique, combining of camera lens module and various portable electron devices such as mobile phone, video camera, computer etc. obtains numerous consumers' favor, especially so market is to the increase in demand of miniaturization camera lens module.
At present miniaturization camera lens module adopts processing procedure such as precision die to produce micro-optical component more, is electrically connected, encapsulates with the image sensor that Silicon Wafer is made then, cuts then, obtains the camera module.Yet, along with the camera lens module towards the development of microminiaturization more, currently used processing procedure more and more can not satisfy the accuracy requirement of micro-optical component, and processing procedures such as the gold-tinted that often adopts in the processing procedure, little shadow, etching are big to environmental impact.
Summary of the invention
In view of this, be necessary to provide a kind of camera lens module that can better adapt to the trend of microminiaturization development more, and the manufacture method method of processing procedure shading element array with low cost and eco-friendly, this shading element array and have the lens module array of this shading element array.
A kind of shading element battle array comprises that printing opacity is dull and stereotyped and is located at shading screen layer on this printing opacity flat board.This shading screen layer has a plurality of light holes spaced apart.This shading screen layer comprises magnetic masking layer and is folded in light shield layer between dull and stereotyped and this magnetic masking layer of this printing opacity.
A kind of method of making the shading element array, it comprises:
(1) provides a printing opacity flat board;
(2) on this printing opacity flat board, light shield layer is set;
(3) on this light shield layer, form magnetic masking layer;
(4) coated with ceramic powder layer on this magnetic masking layer, this ceramic powder layer comprise that a plurality of middle sections spaced apart reach the neighboring area around these a plurality of middle sections;
(5) adopt the mode of laser hardening that the ceramic powder on this neighboring area is hardened;
(6) remove ceramic powder on these a plurality of middle sections;
(7) this porcelain screen layer and light shield layer are carried out etching so that with these a plurality of middle sections over against the printing opacity flat board expose to the open air outside:
(8) remove the ceramic powder that this is crossed by laser hardening, to form a shading element array.
A kind of lens module array comprises: a lens array and a shading element array that is superimposed together with this lens array.This lens array comprises a plurality of eyeglasses.This shading element array comprises that printing opacity is dull and stereotyped and is located at shading screen layer on this printing opacity flat board.This shading screen layer comprises magnetic masking layer and is folded in light shield layer between dull and stereotyped and this magnetic masking layer of this printing opacity.This shading screen layer has a plurality of light holes spaced apart.The central shaft of these a plurality of light holes overlaps one by one with the central shaft of these a plurality of eyeglasses.
Compared with prior art, shading element array provided by the present invention and manufacture method thereof are by adopting with ceramic powder as auxiliary material, with the harden production method of this ceramic powder of laser method, removed from the camera lens module group procedure of wafer scale the processing procedures such as gold-tinted, little shadow, etching that often adopt, make the method for manufacturing shading element array provided by the present invention can better adapt to the camera lens module to the trend of microminiaturization development more, processing procedure is simple, with low cost and environmental protection.Simultaneously, shading element array provided by the invention not only has shade function and can prevent outside electromagnetic interference, thereby can improve the image quality of the lens module array with this shading element array.
Description of drawings
Fig. 1 is the schematic perspective view of the shading element array that provides of first embodiment of the invention.
Fig. 2 is the cut-open view of Fig. 1 along the II-II line.
Fig. 3 is the process flow diagram of the manufacture method of shading element array among Fig. 2.
The dull and stereotyped synoptic diagram of the printing opacity that Fig. 4 provides.
Fig. 5 is provided with the filter layer synoptic diagram on the printing opacity flat board in Fig. 4.
Fig. 6 is the synoptic diagram that forms light shield layer on the filter layer in Fig. 5.
Fig. 7 is the synoptic diagram that forms magnetic masking layer on the light shield layer in Fig. 6, and this magnetic masking layer comprises copper layer and the stainless steel layer that outwards is provided with successively from this light shield layer.
Fig. 8 is the synoptic diagram of coated with ceramic powder layer on the stainless steel layer in Fig. 7, and this ceramic powder layer has a plurality of middle sections spaced apart and around the neighboring area of these a plurality of middle sections.
Fig. 9 is the synoptic diagram that the ceramic powder on the neighboring area among Fig. 8 is carried out cure process.
Figure 10 is the synoptic diagram that the ceramic powder on a plurality of middle sections among Fig. 9 is removed.
Figure 11 carries out etching to porcelain screen layer among Figure 10 and light shield layer so that with these a plurality of middle sections over against filter layer expose outside synoptic diagram to the open air.
Figure 12 is the synoptic diagram that the shading sheet array in Fig. 2 forms registration holes.
Figure 13 is the synoptic diagram of the lens module array that provides of second embodiment of the invention.
Embodiment
See also Fig. 1 and Fig. 2, it is for shading sheet array that first embodiment of the invention provides 100.Shading sheet array 100 comprises printing opacity dull and stereotyped 10 and the filter layer 20, the shading screen layer 30 that outwards set gradually from printing opacity flat board 10.Shading screen layer 30 comprises light shield layer 301 and the magnetic masking layer 303 that outwards sets gradually from filter layer 20.Shading screen layer 30 has a plurality of light holes spaced apart 305.Magnetic masking layer 303 comprises from light shield layer 301 outside successively copper film layer 3031 and stainless steel layer 3033.
See also Fig. 3, it is the process flow diagram of the manufacture method of shading element array 100.This method may further comprise the steps:
(1) provides a printing opacity flat board;
(2) on this printing opacity flat board, light shield layer is set;
(3) on this light shield layer, form magnetic masking layer;
(4) coated with ceramic powder layer on this magnetic masking layer, this ceramic powder layer comprise that a plurality of middle sections spaced apart reach the neighboring area around these a plurality of middle sections;
(5) adopt the mode of laser hardening that the ceramic powder on this neighboring area is hardened;
(6) remove ceramic powder on these a plurality of middle sections;
(7) this porcelain screen layer and light shield layer are carried out etching so that with these a plurality of middle sections over against the printing opacity flat board expose to the open air outside;
(8) remove the ceramic powder that this is crossed by laser hardening, to form a shading element array.
To the manufacture method of shading element array 100 be elaborated below.
See also Fig. 4, a printing opacity flat board 10 at first is provided.This printing opacity flat board 10 has opposite first 101 and second surface 102.In the present embodiment, printing opacity flat board 10 is made by glass.Certainly, printing opacity flat board 10 also can be made by light transmissive materials such as plastics.
See also Fig. 5, on the first surface 101 of printing opacity flat board 10, filter layer 20 is set, in order to avoid image sensor (figure does not show) produces noise.Filter layer 20 can adopt different designs to realize filtering the light of different wave length.In the present embodiment, filter layer 20 is the infrared cut of light filter coating.Certainly, this filter layer 20 also can be the optical filter of other types such as other type filter coating such as low pass filtered light film, ultraviolet cut-on filter coating or cutoff filter, ultraviolet cut-on optical filter.Certainly, also filter layer 20 can be arranged at the second surface 102 of printing opacity flat board 10.Certainly, also filter layer 20 can be set.
See also Fig. 6, form in filter layer 20 and go up light shield layer 301.In the present embodiment, adopt the method for sputter to form light shield layer 301, and the material of light shield layer 301 is a chromium in filter layer 20.Certainly, also can adopt other film plating process such as evaporation to form light shield layer 301, certainly, the material of light shield layer 301 also can titanium nitride etc. other can light-absorbing material.
See also Fig. 7, on light shield layer 301, form magnetic masking layer 303, thereby form shading screen layer 30 with light shield layer 301 and magnetic masking layer 303.Magnetic masking layer 303 can prevent the work of external electromagnetic wave interference image sensor.In the present embodiment, adopt the method for sputter to form magnetic masking layer 303, and magnetic masking layer 303 comprise copper film layer 3031 and the Thin Stainless Steel rete 3033 that outwards forms successively from light shield layer 301 in light shield layer 30.Thin Stainless Steel rete 3033 not only can armoured magnetic field, can also prevent that copper film layer 3031 is oxidized, thereby improve the shield effectiveness of magnetic masking layer 303.Certainly, also can adopt other film plating process such as evaporation to form magnetic masking layer 303.Certainly, the material of magnetic masking layer 303 also can be other maskable magnetic field materials such as iron, aluminium, nickel, fe-Ni soft magnetic alloy or ferroaluminium.
See also Fig. 8 and Fig. 9, coated with ceramic powder layer 40 on magnetic masking layer 303.Ceramic powder layer 40 comprises the neighboring area 402 that a plurality of middle sections 401 spaced apart reach around a plurality of middle sections 401.The ceramic powder of ceramic powder layer 40 is the potpourri of aluminum phosphate, silicon dioxide and water, wherein, the weight percentage ranges of aluminum phosphate is: 5%～10%, and the weight percentage ranges of silicon dioxide is: 40%～45%, the weight percentage ranges of water is: 45%～50%.In the present embodiment, adopt the mode of rotary coating that ceramic powder layer 40 is coated on the magnetic masking layer 303.
This printing opacity flat board 10 that is coated with this ceramic powder layer 40 is positioned over some LASER Light Source 50 times, ceramic powder on the neighboring area 402 is carried out preliminary cure process, to form the ceramic powder 403 that was tentatively hardened by laser, this laser hardening temperature range is [100 ℃, 200 ℃].In the present invention, this laser hardening temperature is 130 ℃.
See also Figure 10, remove the ceramic powder on these a plurality of middle sections 401, to stay ceramic powder 403 on the neighboring area 402 as the protective seam in the subsequent etch process.In the present embodiment, use pure water that the ceramic powder on a plurality of middle sections 401 is removed.
See also Figure 11, magnetic masking layer 303 and the light shield layer 301 that is formed at printing opacity flat board 10 carried out etching so that with a plurality of middle sections 401 over against filter layer 20 be exposed on outside.That is, shading screen layer 30 is carried out etching so that shading screen layer 30 have a plurality of and a plurality of middle sections 401 one by one over against light hole 305.
Remove the ceramic powder 403 on the neighboring area 402, to form shading element array 100 (consulting Fig. 2).Before the ceramic powder of removing on the neighboring area 402 403, the printing opacity flat board 10 that will have a ceramic powder 403 is put in the high temperature furnace (figure does not show) of temperature range for [250 ℃, 1000 ℃] and is carried out underhardening again.After the underhardening, employing alcohol or acetone equal solvent will be by ceramic powder 403 removals of underhardening more again.In the present embodiment, the temperature of this high temperature furnace is 280 ℃, adopt alcohol will by underhardening again ceramic powder 403 remove.
Certainly, if when making shading element array 100, printing opacity flat board 10 is not provided with filter layer 20, and perhaps filter layer 20 is arranged at the second surface 102 of printing opacity flat board 10, after the etching, with a plurality of middle sections 401 over against printing opacity flat board 10 be exposed on outside.
The manufacture method of shading element array 100 is by adopting with ceramic powder as auxiliary material, with the harden production method of this ceramic powder of laser method, removed from the processing procedure the processing procedures such as gold-tinted, little shadow, etching that often adopt, make the manufacture method of shading element array 100 can better adapt to lens module array (figure does not show) to the trend of microminiaturization development more, processing procedure is simple, with low cost and environmental protection.Simultaneously, shading element array 100 not only has shading, filtering functions and can prevent outside electromagnetic interference, thereby can improve the image quality of the lens module array with shading element array 100.
Preferably, see also Figure 12, for better with shading element array 100 and lens array (figure does not show) contraposition, so that the central shaft of a plurality of light holes 305 is aimed at one by one with the central shaft of a plurality of eyeglasses of lens array, in the present embodiment, magnetic masking layer 303 also is provided with two registration holes 60 that run through shading screen layer 30, filter layer 20 and printing opacity flat board 10.Certainly, the number of registration holes 60 also can for three, four etc. more a plurality of, can design as required.
See also Figure 13, the lens module array 200 that it provides for second embodiment of the invention.Lens module array 200 comprises a shading sheet array 300 and a lens array 400 that is superimposed together with shading sheet array 300.
Certainly, also can between shading element array 300 and lens array 400, establish a distance piece array (figure does not show).This distance piece array has a plurality of through holes spaced apart, and the central shaft of these a plurality of through holes overlaps one by one with the central shaft of a plurality of eyeglasses 80 and the central shaft of a plurality of light hole 305a.
Certainly, also can earlier shading element array 300 and a plurality of lens arrays be superimposed together, with Silicon Wafer pressing encapsulation, cut into a plurality of camera modules at last then with a plurality of image sensor.
In addition, those skilled in the art can also do other variation in spirit of the present invention, and certainly, the variation that these are done according to spirit of the present invention all should be included within the present invention's scope required for protection.
Claims (10)
1. shading element array, it comprises that printing opacity is dull and stereotyped and is located at shading screen layer on this printing opacity flat board, this shading screen layer has a plurality of light holes spaced apart, it is characterized in that this shading screen layer comprises magnetic masking layer and is folded in light shield layer between dull and stereotyped and this magnetic masking layer of this printing opacity.
2. shading element array as claimed in claim 1 is characterized in that: this magnetic masking layer comprises copper film layer and the stainless steel rete that outwards sets gradually from this light shield layer.
3. shading element array as claimed in claim 1 is characterized in that: this light shield layer comprises chromium layer or chromium nitride layer.
4. shading element array as claimed in claim 1 is characterized in that: this shading element array further comprises the filter layer that is located between this printing opacity flat board and this light shield layer.
5. method of making the shading element array, it comprises:
(1) provides a printing opacity flat board;
(2) on this printing opacity flat board, light shield layer is set;
(3) on this light shield layer, form magnetic masking layer;
(4) coated with ceramic powder layer on this magnetic masking layer, this ceramic powder layer comprise that a plurality of middle sections spaced apart reach the neighboring area around these a plurality of middle sections;
(5) adopt the mode of laser hardening that the ceramic powder on this neighboring area is hardened;
(6) remove ceramic powder on these a plurality of middle sections;
(7) this porcelain screen layer and light shield layer are carried out etching so that with these a plurality of middle sections over against the printing opacity flat board expose to the open air outside;
(8) remove the ceramic powder that this is crossed by laser hardening, to form a shading element array.
6. the method for manufacturing shading element array as claimed in claim 5, it is characterized in that: the ceramic powder of this ceramic powder layer is the potpourri of aluminum phosphate, silicon dioxide and water, wherein, the weight percentage ranges of aluminum phosphate is: 5%～10%, the weight percentage ranges of silicon dioxide is: 40%～45%, and the weight percentage ranges of water is: 45%～50%.
7. the method for manufacturing shading element array as claimed in claim 5 is characterized in that: the temperature range of this laser hardening is [100 ℃, 200 ℃].
8. the method for manufacturing shading element array as claimed in claim 5, it is characterized in that: the method for this manufacturing shading element array further is included in carries out a printing opacity flat board that will have this ceramic powder of being crossed by laser hardening and puts into high temperature furnace between step (7) and (8), so that the ceramic powder that should be crossed by laser hardening is by the step of underhardening again.
9. the method for manufacturing shading element array as claimed in claim 8 is characterized in that: the temperature range of this high temperature furnace is [250 ℃, 1000 ℃].
10. lens module array, it comprises: a lens array, this lens array comprises a plurality of eyeglasses;
A shading element array that is superimposed together with this lens array, this shading element array comprises that printing opacity is dull and stereotyped and is located at shading screen layer on this printing opacity flat board, this shading screen layer comprises magnetic masking layer and is folded in light shield layer between dull and stereotyped and this magnetic masking layer of this printing opacity, this shading screen layer has a plurality of light holes spaced apart, and the central shaft of these a plurality of light holes overlaps one by one with the central shaft of these a plurality of eyeglasses.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009103070452A CN102023330A (en) | 2009-09-15 | 2009-09-15 | Shading element array, method for manufacturing shading element array and lens module array |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009103070452A CN102023330A (en) | 2009-09-15 | 2009-09-15 | Shading element array, method for manufacturing shading element array and lens module array |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073075A (en) * | 2009-11-24 | 2011-05-25 | 鸿富锦精密工业（深圳）有限公司 | Manufacture method of light-shielding component array |
| CN103888642A (en) * | 2012-12-20 | 2014-06-25 | 奥林巴斯映像株式会社 | Shooting device |
| TWI635601B (en) * | 2011-07-19 | 2018-09-11 | 新加坡恒立私人有限公司 | Method for manufacturing passive optical components, and devices comprising the same |
| CN108873673A (en) * | 2018-06-19 | 2018-11-23 | 业成科技（成都）有限公司 | Display device, assemble method, the judgment method of assembling accuracy and cover plate assembly |
| CN110464310A (en) * | 2019-08-29 | 2019-11-19 | 山东百多安医疗器械有限公司 | A kind of pole weak magnetic measuring method and therapeutic effect of acupuncture measurement device judging therapeutic effect of acupuncture |
| CN112887567A (en) * | 2021-01-27 | 2021-06-01 | 维沃移动通信有限公司 | Shielding device, method, electronic equipment and readable storage medium |
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| JPH10282309A (en) * | 1997-04-04 | 1998-10-23 | Toppan Printing Co Ltd | Lens sheet with electromagnetic shield function, and its manufacture |
| US20070145242A1 (en) * | 2005-12-27 | 2007-06-28 | Funai Electric Co., Ltd. | Compound-eye imaging device |
| CN101226949A (en) * | 2007-01-15 | 2008-07-23 | 采钰科技股份有限公司 | Image sensing apparatus and encapsulation method thereof |
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2009
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10282309A (en) * | 1997-04-04 | 1998-10-23 | Toppan Printing Co Ltd | Lens sheet with electromagnetic shield function, and its manufacture |
| US20070145242A1 (en) * | 2005-12-27 | 2007-06-28 | Funai Electric Co., Ltd. | Compound-eye imaging device |
| CN101226949A (en) * | 2007-01-15 | 2008-07-23 | 采钰科技股份有限公司 | Image sensing apparatus and encapsulation method thereof |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073075A (en) * | 2009-11-24 | 2011-05-25 | 鸿富锦精密工业（深圳）有限公司 | Manufacture method of light-shielding component array |
| CN102073075B (en) * | 2009-11-24 | 2013-12-11 | 鸿富锦精密工业（深圳）有限公司 | Manufacture method of light-shielding component array |
| TWI635601B (en) * | 2011-07-19 | 2018-09-11 | 新加坡恒立私人有限公司 | Method for manufacturing passive optical components, and devices comprising the same |
| CN103888642A (en) * | 2012-12-20 | 2014-06-25 | 奥林巴斯映像株式会社 | Shooting device |
| CN103888642B (en) * | 2012-12-20 | 2017-05-24 | 奥林巴斯株式会社 | Shooting device |
| CN108873673A (en) * | 2018-06-19 | 2018-11-23 | 业成科技（成都）有限公司 | Display device, assemble method, the judgment method of assembling accuracy and cover plate assembly |
| CN110464310A (en) * | 2019-08-29 | 2019-11-19 | 山东百多安医疗器械有限公司 | A kind of pole weak magnetic measuring method and therapeutic effect of acupuncture measurement device judging therapeutic effect of acupuncture |
| CN112887567A (en) * | 2021-01-27 | 2021-06-01 | 维沃移动通信有限公司 | Shielding device, method, electronic equipment and readable storage medium |
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Application publication date: 20110420 |