CN102001715A - Method for recycling single crystal silicon chip cleaning water - Google Patents
Method for recycling single crystal silicon chip cleaning water Download PDFInfo
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- CN102001715A CN102001715A CN 201010519261 CN201010519261A CN102001715A CN 102001715 A CN102001715 A CN 102001715A CN 201010519261 CN201010519261 CN 201010519261 CN 201010519261 A CN201010519261 A CN 201010519261A CN 102001715 A CN102001715 A CN 102001715A
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Abstract
The invention relates to a method for recycling single crystal silicon chip cleaning water. The cleaning of a single crystal silicon chip is subjected to ultrasonic cleaning, bubbling ultrasonic cleaning, ultrasonic cleaning of chemical and pure water for the first time, ultrasonic cleaning of chemical and pure water for the second time, pure water ultrasonic cleaning for the first time, pure water ultrasonic cleaning for the second time, pure water ultrasonic cleaning for the third time and pure water ultrasonic cleaning for the fourth time, wherein the tap water is separated into pure water and thick water by using water making equipment; only the discharged water after the third and fourth times of pure water ultrasonic cleaning is reclaimed, the reclaimed water is mixed with the thick water, the mixed water can be used for bubbling ultrasonic cleaning and ultrasonic cleaning in turn and then discharged, and the mixed water also can be used for bubbling ultrasonic cleaning and ultrasonic cleaning respectively and then discharged; or the prepared thick water can be used for bubbling ultrasonic cleaning and ultrasonic cleaning in turn and then discharged, and the thick water also can be used for bubbling ultrasonic cleaning and ultrasonic cleaning respectively and then discharged. The method can save a large amount of water, save the cost and reduce the discharge of waste water, and is favorable for environmental protection.
Description
Technical field
The present invention relates to a kind of recoverying and utilizing method of monocrystalline silicon piece water for cleaning.
Background technology
At present, in the production process of monocrystalline silicon piece, need water to clean, generally, generally to wash through tap water is super → the tap water bubbling is super to be washed → medicine+pure water super wash first time → medicine+pure water super wash second time → pure water super wash first time → pure water surpass wash the second time → pure water surpass wash for the third time → pure water surpasses and washes the 4th time, altogether will be through eight road waters, after finishing, the per pass water all emits, and pure water need make by water making device, its isolated dense water also will emit, this not only needs to consume great amount of water resources, and the discharging many more, bring adverse influence big more to environment.
Summary of the invention
The purpose of this invention is to provide and to save and recycle water resources, help the recoverying and utilizing method of a kind of monocrystalline silicon piece water for cleaning of environment protection.
The technical scheme that the present invention takes is: a kind of recoverying and utilizing method of monocrystalline silicon piece water for cleaning, the cleaning of its monocrystalline silicon piece need be through super super super super super super super super wash the 4th time (the 8th road) of (the 7th road) → pure water of washing for the third time of (the 6th road) → pure water for the second time of washing of (the 5th road) → pure water for the first time of washing of (the 4th road) → pure water for the second time of washing of (the 3rd road) → medicine+pure water for the first time of washing of (second road) → medicine+pure water of washing of (first road) → bubbling of washing, and wherein need to utilize water making device that tap water is separated into pure water and dense water, it is characterized in that super the 3rd (the 7th road) of washing of pure water, pure water surpasses washes the 4th the discharge water recovery after (the 8th road), and with after dense water mixes, this mixing water can be used for super wash (second road) of bubbling earlier, be used for super wash (first road) then, emission treatment afterwards, also can be respectively applied for bubbling super wash (second road) and surpass wash (first road), emission treatment separately again; Or above-mentioned prepared dense water can be used for earlier bubbling is super washes (second road), be used for super wash (first road) then, emission treatment afterwards, also can be respectively applied for bubbling super wash (second road) and surpass wash (first road), emission treatment separately again.
Adopt the present invention, not only can save a large amount of waters, save cost, also can reduce discharge of wastewater, help environmental protection.
Embodiment
The invention will be further described below in conjunction with specific embodiment.
Embodiment one
1, the cleaning of monocrystalline silicon piece: super washing → bubbling is super to be washed → medicine+pure water super wash first time → medicine+pure water super wash second time → pure water super wash first time → pure water surpass wash the second time → pure water surpass wash for the third time → pure water surpasses and washes the 4th time,
2, utilize water making device earlier, tap water is separated into pure water and dense water.
3, with pure water respectively by different pipelines, be used for super (the 3rd road), super (the 4th road), super (the 5th road), super (the 6th road), super (the 7th road), super wash the 4th time (the 8th road) of pure water washed for the third time of pure water for the second time washed of pure water for the first time washed of pure water for the second time washed of medicine+pure water for the first time washed of medicine+pure water.Then, to super (the 3rd road), super (the 4th road), super (the 5th road), the super water emission treatment in (the 6th road) for the second time of washing of pure water for the first time of washing of pure water for the second time of washing of medicine+pure water for the first time of washing of medicine+pure water.
4, will before described pure water is super washes for the third time (the 7th road) and the super water recovery of washing the 4th time (the 8th road) of pure water, after dense water mixes, the bubbling that allows mixing water be introduced into the silicon chip cleaning surpasses washes (second road), and then is used for super wash (first road), emission treatment afterwards.Or with mixing water be used for respectively bubbling super wash (second road) and surpass wash (first road), emission treatment separately again.
Embodiment two
1, the cleaning of monocrystalline silicon piece: super washing → bubbling is super to be washed → medicine+pure water super wash first time → medicine+pure water super wash second time → pure water super wash first time → pure water surpass wash the second time → pure water surpass wash for the third time → pure water surpasses and washes the 4th time,
2, utilize water making device earlier, tap water is separated into pure water and dense water.
3, with pure water respectively by different pipelines, be used for super (the 3rd road), super (the 4th road), super (the 5th road), super (the 6th road), super (the 7th road), super wash the 4th time (the 8th road) of pure water washed for the third time of pure water for the second time washed of pure water for the first time washed of pure water for the second time washed of medicine+pure water for the first time washed of medicine+pure water.Then, to super (the 3rd road), super (the 4th road), super (the 5th road), the super water emission treatment in (the 6th road) for the second time of washing of pure water for the first time of washing of pure water for the second time of washing of medicine+pure water for the first time of washing of medicine+pure water.
4, will before described dense water can be used for earlier that bubbling is super washes (second road), be used for super wash (first road) then, emission treatment is handled afterwards.Or will before described dense water be used for respectively bubbling super wash (second road) and surpass wash (first road), emission treatment separately again.
Claims (1)
1. the recoverying and utilizing method of a monocrystalline silicon piece water for cleaning, the cleaning of its monocrystalline silicon piece need be through super super super super super super super super wash the 4th time (the 8th road) of (the 7th road) → pure water of washing for the third time of (the 6th road) → pure water for the second time of washing of (the 5th road) → pure water for the first time of washing of (the 4th road) → pure water for the second time of washing of (the 3rd road) → medicine+pure water for the first time of washing of (second road) → medicine+pure water of washing of (first road) → bubbling of washing, and wherein need to utilize water making device that tap water is separated into pure water and dense water, it is characterized in that super the 3rd (the 7th road) of washing of pure water, pure water surpasses washes the 4th the discharge water recovery after (the 8th road), and with after dense water mixes, this mixing water can be used for super wash (second road) of bubbling earlier, be used for super wash (first road) then, emission treatment afterwards, also can be respectively applied for bubbling super wash (second road) and surpass wash (first road), emission treatment separately again; Or above-mentioned prepared dense water can be used for earlier bubbling is super washes (second road), be used for super wash (first road) then, emission treatment afterwards, also can be respectively applied for bubbling super wash (second road) and surpass wash (first road), emission treatment separately again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010519261 CN102001715A (en) | 2010-10-23 | 2010-10-23 | Method for recycling single crystal silicon chip cleaning water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010519261 CN102001715A (en) | 2010-10-23 | 2010-10-23 | Method for recycling single crystal silicon chip cleaning water |
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| CN102001715A true CN102001715A (en) | 2011-04-06 |
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| CN 201010519261 Pending CN102001715A (en) | 2010-10-23 | 2010-10-23 | Method for recycling single crystal silicon chip cleaning water |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108941037A (en) * | 2017-05-19 | 2018-12-07 | 浙江昱辉阳光能源有限公司 | A kind of silicon material recovery and rinsing method and device |
| CN109513707A (en) * | 2018-12-30 | 2019-03-26 | 江苏华东耀皮玻璃有限公司 | A kind of float glass cold cleaning process |
| CN113745096A (en) * | 2021-09-03 | 2021-12-03 | 苏州芯汇晶成半导体科技有限公司 | Wafer back surface water-saving and energy-saving processing technology |
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| WO1998008248A1 (en) * | 1996-08-20 | 1998-02-26 | Organo Corporation | Method and device for washing electronic parts member, or the like |
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2010
- 2010-10-23 CN CN 201010519261 patent/CN102001715A/en active Pending
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| WO1998008248A1 (en) * | 1996-08-20 | 1998-02-26 | Organo Corporation | Method and device for washing electronic parts member, or the like |
| EP1065708A2 (en) * | 1999-06-29 | 2001-01-03 | Intersil Corporation | Silicon wafer cleaning process for post-chemical mechanical polishing using immersion |
| CN1947870A (en) * | 2006-05-12 | 2007-04-18 | 浙江昱辉阳光能源有限公司 | Method for cleaning waste silicon materials |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108941037A (en) * | 2017-05-19 | 2018-12-07 | 浙江昱辉阳光能源有限公司 | A kind of silicon material recovery and rinsing method and device |
| CN109513707A (en) * | 2018-12-30 | 2019-03-26 | 江苏华东耀皮玻璃有限公司 | A kind of float glass cold cleaning process |
| CN113745096A (en) * | 2021-09-03 | 2021-12-03 | 苏州芯汇晶成半导体科技有限公司 | Wafer back surface water-saving and energy-saving processing technology |
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Open date: 20110406 |