CN101995664A - Laser beam transformation shaper outputting uniform linear spots - Google Patents
Laser beam transformation shaper outputting uniform linear spots Download PDFInfo
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- CN101995664A CN101995664A CN 201010285845 CN201010285845A CN101995664A CN 101995664 A CN101995664 A CN 101995664A CN 201010285845 CN201010285845 CN 201010285845 CN 201010285845 A CN201010285845 A CN 201010285845A CN 101995664 A CN101995664 A CN 101995664A
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Abstract
The invention discloses a laser beam transformation shaper outputting uniform linear spots, which is an optical system capable of transforming and shaping laser beams with irregular spot shapes and nonuniformly distributed energy into laser beams with uniformly distributed energy and the spot shape approaching a line, and is mainly applied to laser polishing, laser cleaning and laser induced material surface modification, and belongs to field of laser surface processing technology and application thereof. The laser beam transformation shaper comprises seven parts, namely a first part of a telescope system consisting of a plurality of circular lenses or cylindrical lenses, second, third, fourth and fifth parts consisting of a cylindrical lens array respectively provided with N cylindrical lenses, a sixth part consisting of two cylindrical lenses of which the generatrices are vertical mutually, and a seventh part consisting of cylindrical lenses or cylindrical lens combination. The laser beam transformation shaper transforms and shapes incident laser into linear laser spots with uniformly distributed spot energy, and greatly improves the efficiency of laser polishing, laser cleaning and laser induced material surface modification by matching high-speed movement of a work bench.
Description
Technical field
The present invention is a kind of laser beam transformation reshaper that is output as the uniform line hot spot, to be a kind of laser beam with light spot shape irregular (as: circle, subcircular, ellipse, near oval, square, near square etc.), energy distribution inhomogeneous (as: Gaussian distribution, nearly Gaussian distribution etc.) be shaped as the optical system that energy even distribution, light spot shape are approximately the laser beam of a line through optical beam transformation for it, be mainly used in laser polishing, laser cleaning, laser-induced material surface modifying etc., belong to laser surface treating technology and application thereof.
Background technology
The required laser facula of laser surface treating technology and application thereof is according to the difference of employing technology and slightly different, wherein, it is a line that the laser facula shape is generally square, rectangle or shape approximation, and the laser facula energy distribution is generally Gaussian distribution, nearly Gaussian distribution or evenly distributes.In order to reach higher surface treatment efficient, it is the laser facula of a line that the laser facula shape adopts shape approximation usually, perhaps adopt short rectangle laser facula on one side, and the fast moving of cooperating platform forms the Laser Surface Treatment of scan-type.In order to reach better surface treatment effect, the laser facula energy distribution adopts evenly usually and distributes.Laser beam transformation reshaper in laser surface treating technology and the application thereof generally includes beam-expanding collimation device, reshaper and even three ingredients of device; To the less demanding laser beam transformation reshaper of surface treatment effect can be in some cases (as: incident laser is Gaussian beam or nearly Gaussian beam and intercepts core, incident laser distribution uniform etc. in the changing and shaping device) even device is omitted, even with beam-expanding collimation device and reshaper merging.The optical system of laser beam transformation reshaper is less demanding to quality of optical imaging, and is therefore also not high to the aberration requirement of each component units, only need consider that the spherical aberration of each component units gets final product when design.The optical system of laser beam transformation reshaper designs at single wavelength usually, therefore, usually carry out the selection of material at single wavelength when design, promptly whole optical system adopts homogenous material, need not consider the correction problem of chromatic aberation in the optical system; The optical system of laser beam transformation reshaper designs comparatively approaching a plurality of wavelength than I haven't seen you for ages, therefore, I haven't seen you for ages when design carries out the selection of material to comparatively approaching a plurality of wavelength, when a plurality of wavelength being carried out the material selection, because wavelength is comparatively approaching, therefore, according to the difference that is suitable for wave band, select 2-3 kind common used material (as: K9, B270 etc.) can satisfy the alignment requirements of optical system to chromatic aberation.The laser beam transformation reshaper requires to utilize as much as possible the laser energy of input usually, so the quantity of contained eyeglass is few in its optical system, is generally less than 10.
At present, in laser surface treating technology and application thereof, employed laser beam transformation reshaper is mainly classified according to following three kinds of modes:
1. according to the requirement of changing and shaping device to incident laser, the changing and shaping device is divided into two classes: the incident laser of first kind changing and shaping device is Gaussian beam or nearly Gaussian beam; The incident laser of the second class changing and shaping device is to have certain light spot energy distribution and disperse the non-homogeneous light beam (non-Gasussian light bundle, non-nearly Gaussian beam) of feature.Wherein, first kind of changing and shaping device designs at the gauss laser or the nearly gauss laser of special parameter usually, can not be general at the changing and shaping device of different parameters design, for example: " Gauss-flat-top " changing and shaping device etc.; Certain light spot energy distributes and the non-homogeneous laser beam of dispersing feature designs at having usually for second kind of changing and shaping device, as long as the light spot energy of non-homogeneous laser beam distributes and disperses feature in scope of design, non-homogeneous laser gets final product general changing and shaping device, and for example: optical waveguide is all restrainted changing and shaping device etc.
2. control the method for shoot laser light spot shape according to the changing and shaping device, the changing and shaping device is divided into two classes: first kind changing and shaping device blocks laser beam by shutter body, absorb the laser energy of laser beam marginal portion, thus control shoot laser light spot shape; The optical system that the second class changing and shaping device is made up of catoptron, lens and prism etc. by inside is carried out changing and shaping to incident laser, thus control shoot laser light spot shape.Wherein, there is bigger laser energy loss in first kind of changing and shaping device, laser energy output input is lower, when higher-wattage laser is carried out changing and shaping, need air cooling system or water-cooling system to cooperate, thereby ensure the normal use of changing and shaping device, for example: have the telescopic system of diaphragm etc.; The shutter body that does not have laser beam in second kind of changing and shaping device, the laser energy loss is less, output is imported than higher, when higher-wattage laser is carried out changing and shaping, do not need air cooling system or water-cooling system to cooperate, for example " Gauss-flat-top " changing and shaping device etc.
3. according to the method for the even laser beam of changing and shaping device, the changing and shaping device is divided three classes: first kind changing and shaping device is controlled before to the incident laser laser wave by certain optical systems (as: free form surface etc.), thereby realize the effect of even laser beam, for example: " Gauss-flat-top " changing and shaping device etc.; The second class changing and shaping device makes incident laser repeatedly reflection in optical system by introduce optical waveguide in optical system, thereby realizes the effect of even laser beam, and for example: optical waveguide is all restrainted changing and shaping device etc.; The 3rd class changing and shaping device is cut apart and the light beam stack by the incident laser light beam being carried out light beam, thereby realizes the effect of even laser beam, and for example: compound eye is all restrainted changing and shaping device etc.
In laser surface treating technology and application thereof, because the difference of use occasion, also each is different for the index of laser beam transformation reshaper, and every kind of laser beam transformation reshaper all has its characteristics and usable range separately, is applied to specific occasions and purposes.For applications such as high precision laser polishing, high precision laser cleaning, high-level efficiency laser-induced material surface modifyings, traditional laser beam transformation reshaper is often because the problem of homogeneity and efficient can not reach desirable effect, for example: the shoot laser hot spot of " Gauss-flat-top " changing and shaping device is generally circular light spot, compound eye and restraints all that the shoot laser hot spot of changing and shaping device is generally square hot spot, to have laser energy loss in the telescopic system of diaphragm bigger etc., is unfavorable for the raising of surface treatment efficient; The shoot laser light spot energy distribution that optical waveguide is all restrainted the changing and shaping device is generally nearly Gaussian distribution, is unfavorable for the inhomogeneity raising of surface treatment.
Summary of the invention
The objective of the invention is to:, design and Implement a kind of laser beam transformation reshaper that is suitable for high precision laser polishing, high precision laser cleaning and high-level efficiency laser-induced material surface modifying etc. at laser surface treating technology and application thereof.This laser beam transformation reshaper not only can be applicable to that incident laser is the situation of Gaussian beam or nearly Gaussian beam, and can be applicable to that incident laser is to have the situation that certain light spot energy distributes and disperses the non-homogeneous light beam (non-Gasussian light bundle, non-nearly Gaussian beam) of feature.This laser beam transformation reshaper can be the uniform Linear Laser hot spot of laser facula energy distribution with the incident laser changing and shaping, the fast moving of cooperating platform can improve the efficient of laser polishing, laser cleaning and laser-induced material surface modifying greatly.
To achieve these goals, the present invention has taked following technical scheme: a kind of laser beam transformation reshaper that is output as the uniform line hot spot is made up of first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7, the 6th part 8 and the 7th part 11, as shown in Figure 1.Described first 1 is a telescopic system, is made up of a plurality of circle lens or post lens etc.; Described second portion 4, third part 5, the 4th part 6 and the 5th part 7 be the cylindrical lens array for being made up of N same column lens all, the concrete numerical value of N is given when the present invention designs and Implements, the span of N is more than or equal to 2, wherein: the cylindrical lens array bus of second portion 4 and third part 5 is parallel, third part 5 is vertical with the cylindrical lens array bus of the 4th part 6, and the 4th part 6 is parallel with the cylindrical lens array bus of the 5th part 7; Described the 6th part 8 is the post combination of lenses, wherein comprises two orthogonal post lens of bus, and first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, and second post lens bus 10 is parallel with the 4th part 6 cylindrical lens array buses; Described the 7th part 11 is post lens or post combination of lenses, and its bus is parallel with second portion 4 cylindrical lens array buses.
The effect of incident laser being carried out preliminary shaping is played by described first 1 in system, the laser beam transformation that is about to incident first 1 is shaped as the laser facula that is full of second portion 4 laser incident scopes as far as possible, and reduces dispersion angle as much as possible.The composition form of first 1 can by ray tracing class software as: SOD88, ZEMAX, CODE V, OSLO etc. design and Implement, this process and technology are known by industry, and its typical version is the telescopic system of being made up of multi-disc circle lens or post lens etc.
Among the present invention, the laser facula of incident laser can be arbitrary shape, as: square, rectangle, circle, ellipse etc., the laser facula of incident laser can be any energy distribution, as: Gaussian distribution, nearly Gaussian distribution or other non-uniform Distribution etc.; 1 pair of incident laser of first plays the effect of carrying out the processing in early stage, it is the laser facula that is full of second portion 4 laser incident scopes (second portion laser incident scope is a square or rectangular) as far as possible with the incident laser changing and shaping, and reduce dispersion angle as much as possible, for example: first 1 is the shoot laser that laser facula overlaps with second portion 4 laser incident scopes with the incident laser changing and shaping that laser facula is shaped as square or rectangular, and first 1 is shaped as laser facula circular or oval-shaped incident laser changing and shaping is the tangent shoot laser of laser facula shape edges and second portion 4 laser incident scope edges.
Described second portion 4 is the cylindrical lens array of being made up of N same column lens, and second portion 4 is given when designing and Implementing in first 1 with the distance of first 1.Second portion 4 is divided into N bundle parallel laser light beam with the laser of incident, shown in Fig. 5,6.
Described third part 5 is the cylindrical lens array of being made up of N same column lens, and the cylindrical lens array bus of third part 5 and second portion 4 is parallel, in the corresponding second portion 4 of each the post lens in N same column lens in N same column lens one; Each corresponding in second portion 4 and the third part 5 coupled columns lens are formed an optical system separately, the back focus 12 of second portion 4 post lens is positioned near the center of second portion 4 and 5 distances of third part, the front focus 13 of third part 5 post lens is positioned near 1/4 place of second portion 4 and third part 5 distances, as shown in Figure 2.By regulating the distance of third part 5 with respect to second portion 4, can regulate laser facula on equal bundle faces with second portion 4 cylindrical lens array bus vertical direction on width, when designing and Implementing, be narrower state with this width adjusting.
Described the 4th part 6 is the cylindrical lens array of being made up of N same column lens, and the cylindrical lens array bus of the 4th part 6 and third part 5 is vertical, and the distance of the 4th part 6 and third part 5 is given when designing and Implementing.The 4th part 6 is divided into N bundle parallel laser light beam with each bundle in the N bundle laser of incident, as shown in Figure 7.
Described the 5th part 7 is the cylindrical lens array of being made up of N same column lens, and the 5th part 7 is parallel with the cylindrical lens array bus of the 4th part 6, in corresponding the 4th part 6 of each the post lens in N same column lens in N same column lens one; Each corresponding in the 4th part 6 and the 5th part 7 coupled columns lens are formed an optical system separately, the back focus 14 of the 4th part 6 post lens is positioned near the center of 7 distances between the 4th part 6 and the 5th part, the front focus 15 of the 5th part 7 post lens is positioned near 1/4 place of the 4th part 6 and 7 distances of the 5th part, as shown in Figure 3.By regulating the distance of the 5th part 7 with respect to the 4th part 6, can regulate laser facula on equal bundle faces with the 4th part 6 cylindrical lens array bus vertical direction on width, when designing and Implementing, be the state of broad with this width adjusting.
Described second portion 4 and third part 5 and the 4th part 6 and the 5th part be 4 mutually orthogonal, be independent of each other, and therefore has the array configuration of three kinds of second portions 4, third part 5, the 4th part 6 and the 5th part 4.First kind of array configuration is: second portion 4, the 4th part 6, the 5th part 7 and third part 5, second kind of array configuration is second portion 4, the 4th part 6, third part 5 and the 5th part 7, and the third array configuration is second portion 4, third part 5, the 4th part 6, the 5th part 7; And every kind of array configuration can both serve the same role.
Described the 6th part 8 is the post combination of lenses, wherein comprise two orthogonal post lens of bus, first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, second post lens 10 bus is parallel with the 4th part 6 cylindrical lens array buses, and, the face of all restrainting 16 of first post lens 9 correspondence and second post lens 10 17 corresponding in all bundles faces keep certain distance, as shown in Figure 4; 9 pairs of second portions of first post lens of the 6th part, 4 separated light beams superpose, and as shown in Figure 8,10 pairs the 4th parts of second post lens of the 6th part, 6 separated light beams superpose, as shown in Figure 9; The distance that the 6th part 8 and second portion 4, third part 5, the 4th part 6, the 5th part are 7 is given when designing and Implementing.
Described the 7th part 11 is post lens or post combination of lenses, its bus is parallel with second portion 4 cylindrical lens array buses, the 7th part 11 is positioned near all bundles face 16 of first post lens 9 correspondence of the 6th part, the distance that the corresponding face of all restrainting of the corresponding face of all restrainting 16 of first post lens of the focal length of the 7th part 11 and the 6th part 9 and second post lens 10 is 17 equates, as shown in Figure 4; The 7th part 11 is transferred to the face of all restrainting 16 of first post lens 9 correspondence of the 6th part on all bundles face 17 of second post lens 10 correspondence of the 6th part, simultaneously to all restraint on the face 17 laser facula with second portion 4 cylindrical lens array bus vertical direction on width compress, uniform Linear Laser hot spot of laser facula energy distribution of final formation, as shown in figure 10.
Incident laser incides first 1, and first 1 is shaped as the laser beam transformation of incident and is full of second portion 4 laser incident scopes and the as far as possible little laser facula of dispersion angle as far as possible; Incident laser shines second portion 4 after first 1, second portion 4 is divided into N bundle parallel laser light beam with the laser of incident; Incident laser is behind first 1 and second portion 4, shine third part 5, a branch of in the corresponding N bundle of in third part 5N post lens each parallel laser light beam, the distance that control second portion 4 and third part are 5, scalable all restraint laser facula on the face 16 with second portion 4 cylindrical lens array bus vertical direction on width, and be narrower state; Incident laser shines the 4th part 6, the four parts 6 each bundle in the N bundle laser of incident is divided into N bundle parallel laser light beam after first 1, second portion 4 and third part 5; Incident laser is after first 1, second portion 4, third part 5 and the 4th part 6, shine the 5th part 7, N bundle parallel laser light beam after corresponding the 4th part 6 of in the 5th part 7N post lens each is cut apart, control the distance of 7 of the 4th part 6 and the 5th parts, scalable all restraint laser facula on the face 17 with the 4th part 6 cylindrical lens array bus vertical direction on width, and be the broad state; Incident laser is after first 1, second portion 4, third part 5, the 4th part 6 and the 5th part 7, shine the 6th part 8, first post lens 9 of the 6th part with the laser beam of incident with first post lens of the 6th part, 9 bus vertical direction on superpose, and face 16 is all restrainted in formation, second post lens 10 of the 6th part with the laser beam of incident with second post lens of the 6th part, 10 bus vertical direction on superpose, and form the face 17 of all restrainting; Incident laser is after first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7 and the 6th part 8, shine the 7th part 11, the 7th part 11 with the laser facula on the face of all restrainting 16 of first post lens 9 correspondence of the 6th part with second portion 4 cylindrical lens array bus vertical direction on width compress, and on all bundles face 17 of second post lens 10 correspondence of the 6th part, form the uniform Linear Laser hot spot of laser facula energy distribution.
Among the present invention, 1 pair of incident laser of first carries out early stage to be handled, and makes incident laser be fit to the subsequent treatment of second portion 4, third part 5, the 4th part 6, the 5th part 7, the 6th part 8 and the 7th part 11; 4 pairs of laser beams of second portion carry out cutting apart the first time; Each post lens in the third part 5 are corresponding with each the post lens in the second portion 4 respectively; 6 pairs of laser beams of the 4th part carry out cutting apart the second time; Each post lens in the 5th part 7 are corresponding with each the post lens in the 4th part 6 respectively; The laser beam of being cut apart by second portion 4 and the 4th part 6 all superposes on the bundle face at two respectively by the 6th part 8, the distance of the distance by 5 of control second portion 4 and third parts, the 4th part 6 and 7 of the 5th parts is controlled two respectively and is all restrainted the laser facula width that face 16-17 goes up correspondence; The 7th part 11 is positioned near all bundles face 16 of first post lens 9 correspondence of the 6th part, the face of all restrainting 16 of first post lens 9 correspondence of the 6th part is transferred on all bundles face 17 of second post lens 10 correspondence of the 6th part by the 7th part 11, make two all to restraint face 16-17 coincidence, further compress simultaneously the spot width on equal bundle faces, form and all restraint uniform Linear Laser hot spot of laser facula energy distribution on the face 17.
The present invention is directed to laser surface treating technology and application thereof, design and Implement a kind of laser beam transformation reshaper that is suitable for high precision laser polishing, high precision laser cleaning and high-level efficiency laser-induced material surface modifying etc.This laser beam transformation reshaper not only can be applicable to that incident laser is the situation of Gaussian beam or nearly Gaussian beam, and can be applicable to that incident laser is to have the situation that certain light spot energy distributes and disperses the non-homogeneous light beam (non-Gasussian light bundle, non-nearly Gaussian beam) of feature.This laser beam transformation reshaper can be the uniform Linear Laser hot spot of laser facula energy distribution with the incident laser changing and shaping, the fast moving of cooperating platform can improve the efficient of laser polishing, laser cleaning and laser-induced material surface modifying greatly.
Description of drawings
Fig. 1 optical system three-dimensional plot of the present invention (is example with N=9)
Fig. 2 second portion of the present invention and third part focus concern synoptic diagram
Fig. 3 the present invention the 4th part and the 5th part focus concern synoptic diagram
Fig. 4 the present invention the 6th part with all restraint the face graph of a relation
The laser facula figure of second portion is incided in Fig. 5 the present invention
Fig. 6 second portion of the present invention is cut apart laser facula figure (is example with N=9)
Fig. 7 the present invention the 4th part is cut apart laser facula figure (is example with N=9)
First post lens stack of Fig. 8 the present invention the 6th part laser facula figure (is example with N=9)
Second post lens stack of Fig. 9 the present invention the 6th part laser facula figure (is example with N=9)
The final uniform Linear Laser hot spot figure of laser facula energy distribution that forms of Figure 10 the present invention
Among the figure: 1, first; 2, first post lens of first among the embodiment; 3, second post lens of first among the embodiment; 4, second portion; 5, third part; 6, the 4th part; 7, the 5th part; 8, the 6th part; 9, first post lens of the 6th part; 10, second post lens of the 6th part; 11, the 7th part; 12, second portion back focus position; 13, third part front focus position; 14, the 4th part back focus position; 15, it is heard in the 5th part front focus place; 16, all bundles face of first post lens of the 6th part correspondence; 17, all bundles face of second post lens of the 6th part correspondence.
Embodiment
The invention will be further described below in conjunction with accompanying drawing:
Present embodiment is that (18mm * 35mm), light spot energy are distributed as non-uniform Distribution, and (the 18mm direction is a Gaussian distribution to rectangle at the light spot shape of incident laser, the 35mm direction is nearly Gaussian distribution), centre wavelength is that the excimer laser of 248nm designs, and is applicable to the laser polishing and the laser cleaning of high precision.Present embodiment is made up of first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7, the 6th part 8 and the 7th part 11.First is a telescopic system, is made up of two post lens; Second portion 4, third part 5, the 4th part 6 and the 5th part 7 are cylindrical lens array, wherein, the cylindrical lens array bus of second portion 4 and third part 5 is parallel, third part 5 is vertical with the cylindrical lens array bus of the 4th part 6, and the 4th part 6 is parallel with the cylindrical lens array bus of the 5th part 7; The 6th part 8 is the post combination of lenses, wherein comprises two orthogonal post lens of bus, and first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, and second post lens 10 bus is parallel with the 4th part 6 cylindrical lens array buses; The 7th part 11 is a slice post lens, and its bus is parallel with second portion 4 cylindrical lens array buses.
Incident laser incides first 1, is to be full of the laser facula that second portion 4 laser incident scopes and dispersion angle dwindle through first's 1 changing and shaping.Wherein, the laser facula of incident laser is shaped as rectangle (18mm * 35mm), the laser facula energy distribution is non-uniform Distribution (the 18mm direction is a Gaussian distribution, and the 35mm direction is nearly Gauss's branch); First 1 is a telescopic system, form by two post lens, composition form is designed and Implemented by ray tracing class software (as: SOD88, ZEMAX, CODE V, OSLO etc.), this process and technology are known by industry, and first 1 plays the effect of incident laser being carried out the processing in early stage in the present embodiment; Second portion 4 laser incident scopes are square (35mm * 35mm); The relative incident laser of laser beam divergence degree of second portion 4 incidents reduces half on the 18mm direction.
The concrete parameter of first 1 is: first post lens 2 is shaped as rectangle, and (18mm * 35mm), focal length is-80mm that modes of emplacement as shown in Figure 1; Second post lens 3 is shaped as square, and (35mm * 35mm), focal length is 156mm, and modes of emplacement as shown in Figure 1; The distance that first post lens 2 and second post lens are 3 is 80mm; Second post lens 3 are 45mm to the distance of second portion 4.
Incident laser shines second portion 4 after first 1.Second portion 4 is the cylindrical lens array of being made up of 7 same column lens.Second portion 4 is divided into 7 bundle parallel laser light beams with the laser of incident.
Incident laser shines third part 5 behind first 1 and second portion 4.Third part 5 is the cylindrical lens array of being made up of 7 same column lens, the cylindrical lens array bus of third part 5 and second portion 4 is parallel, a branch of in the corresponding 7 bundle parallel laser light beams of each post lens in the third part 5, and in 7 same column lens in the corresponding second portion 4.
The concrete parameter of second portion 4 is: each sheet post lens shape is that (35mm * 5mm), cylindrical lens array is that (35mm * 35mm), focal length is 70mm to square, and modes of emplacement as shown in Figure 1 to rectangle.The concrete parameter of third part 5 is: each sheet post lens shape is that (35mm * 5mm), cylindrical lens array is that (35mm * 35mm), focal length is 105mm to square, and modes of emplacement as shown in Figure 1 to rectangle.The distance that second portion 4 and third part are 5 is 140mm.By regulate the distance of third part 5, can regulate with respect to second portion 4 all restraint laser facula on the face 16 with second portion 4 cylindrical lens array bus vertical direction on width, when designing and Implementing, be 123mm with this width adjusting.The distance that third part 5 and the 4th part are 6 is 10mm.
Incident laser shines the 4th part 6 after first 1, second portion 4 and third part 5.The 4th part 6 is the cylindrical lens array of being made up of 7 same column lens, and the cylindrical lens array bus of the 4th part 6 and third part 5 is vertical.The 4th part 6 is divided into 7 bundle parallel laser light beams with each bundle in the 7 bundle laser of incident.
Incident laser shines the 5th part 7 after first 1, second portion 4, third part 5 and the 4th part 6.The 5th part 7 is the cylindrical lens array of being made up of 7 same column lens, and the 5th part 7 is parallel with the cylindrical lens array bus of the 4th part 6, in corresponding the 4th part 6 of each the post lens in the 5th part 7 in 7 same column lens one.
The concrete parameter of the 4th part 6 is: each sheet post lens shape is that (5mm * 35mm), cylindrical lens array is that (35mm * 35mm), focal length is 18mm to square, and modes of emplacement as shown in Figure 1 to rectangle.The concrete parameter of the 5th part 7 is: each sheet post lens shape is that (5mm * 35mm), cylindrical lens array is that (35mm * 35mm), focal length is 21mm to square, and modes of emplacement as shown in Figure 1 to rectangle.The distance that the 4th part 6 and the 5th part are 7 is 36mm.By regulate the distance of the 5th part 7, can regulate with respect to the 4th part 6 all restraint laser facula on the face 17 with the 4th part 6 cylindrical lens array bus vertical direction on width, when designing and Implementing, be 20mm with this width adjusting.The distance that the 5th part 7 and 8 first post lens of the 6th part are 9 is 15mm.
Incident laser shines the 6th part 8 after first 1, second portion 4, third part 5, the 4th part 6 and the 5th part 7.The 6th part 8 is the post combination of lenses, wherein comprises two orthogonal post lens of bus, and first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, and second post lens 10 bus is parallel with the 4th part 6 cylindrical lens array buses.First post lens 9 of the 6th part with the laser beam of incident with first post lens of the 6th part, 9 bus vertical direction on superpose, thereby to the laser beam of incident with first post lens of the 6th part, 9 bus vertical direction on all restraint, form the face 16 of all restrainting; Second post lens 10 of the 6th part with the laser beam of incident with second post lens of the 6th part, 10 bus vertical direction on superpose, thereby to the laser beam of incident with second post lens of the 6th part, 10 bus vertical direction on all restraint, form the face 17 of all restrainting.
The concrete parameter of the 6th part 8 is: first post lens 9 is shaped as square, and (35mm * 35mm), focal length is 190mm, and modes of emplacement as shown in Figure 1; Second post lens 10 is shaped as square, and (35mm * 35mm), focal length is 195mm, and modes of emplacement as shown in Figure 1; The distance that first post lens 9 and second post lens are 10 is 10mm; All bundles face 16 of first post lens 9 correspondence is positioned at 180mm place, second post lens, 10 rear, and all bundles face 17 of second post lens 10 correspondence is positioned at 195mm place, second post lens, 10 rear.The distance that second post lens 10 of the 6th part and the 7th part are 11 is 180mm.
Incident laser shines the 7th part 11 after first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7 and the 6th part 8.The 7th part 11 is a slice post lens, and its bus is parallel with second portion 4 cylindrical lens array buses.The 7th part 11 is transferred to the face of all restrainting 16 of first post lens 9 correspondence of the 6th part on all bundles face 17 of second post lens 10 correspondence of the 6th part, simultaneously to all restraint on the face 17 laser facula with second portion 4 cylindrical lens array bus vertical direction on width compress, form all uniform Linear Laser hot spot of laser facula energy distribution on the bundle face, laser facula length 18mm.
The concrete parameter of the 7th part 11 is: the post lens shape is that (18mm * 10mm), focal length is 15mm to rectangle, is positioned near all bundles face 16 of first post lens 9 correspondence of the 6th part, and concrete modes of emplacement as shown in Figure 1.
Claims (3)
1. a laser beam transformation reshaper that is output as the uniform line hot spot is characterized in that: be made up of first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7, the 6th part 8 and the 7th part 11; Described first 1 is a telescopic system, is made up of a plurality of circle lens or post lens etc.; Described second portion 4, third part 5, the 4th part 6 and the 5th part 7 be the cylindrical lens array for being made up of N same column lens all, the span of N is more than or equal to 2, wherein: the cylindrical lens array bus of second portion 4 and third part 5 is parallel, third part 5 is vertical with the cylindrical lens array bus of the 4th part 6, and the 4th part 6 is parallel with the cylindrical lens array bus of the 5th part 7; Described the 6th part 8 is the post combination of lenses, wherein comprises two orthogonal post lens of bus, and first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, and second post lens bus 10 is parallel with the 4th part 6 cylindrical lens array buses; Described the 7th part 11 is post lens or post combination of lenses, and its bus is parallel with second portion 4 cylindrical lens array buses;
The effect of incident laser being carried out preliminary shaping is played by described first 1 in system, the laser beam transformation that is about to incident first 1 is shaped as the laser facula that is full of second portion 4 laser incident scopes as far as possible, and reduces dispersion angle as much as possible;
Described second portion 4 is the cylindrical lens array of being made up of N same column lens, and second portion 4 is divided into N bundle parallel laser light beam with the laser of incident;
Described third part 5 is the cylindrical lens array of being made up of N same column lens, and the cylindrical lens array bus of third part 5 and second portion 4 is parallel, in the corresponding second portion 4 of each the post lens in N same column lens in N same column lens one; Each corresponding in second portion 4 and the third part 5 coupled columns lens are formed an optical system separately, the back focus 12 of second portion 4 post lens is positioned near the center of second portion 4 and 5 distances of third part, and the front focus 13 of third part 5 post lens is positioned near 1/4 place of second portion 4 and third part 5 distances; By regulating the distance of third part 5 with respect to second portion 4, can regulate laser facula on equal bundle faces with second portion 4 cylindrical lens array bus vertical direction on width;
Described the 4th part 6 is the cylindrical lens array of being made up of N same column lens, and the cylindrical lens array bus of the 4th part 6 and third part 5 is vertical, and the 4th part 6 is divided into N bundle parallel laser light beam with each bundle in the N bundle laser of incident;
Described the 5th part 7 is the cylindrical lens array of being made up of N same column lens, and the 5th part 7 is parallel with the cylindrical lens array bus of the 4th part 6, in corresponding the 4th part 6 of each the post lens in N same column lens in N same column lens one; Each corresponding in the 4th part 6 and the 5th part 7 coupled columns lens are formed an optical system separately, the back focus 14 of the 4th part 6 post lens is positioned near the center of 7 distances between the 4th part 6 and the 5th part, and the front focus 15 of the 5th part 7 post lens is positioned near 1/4 place of the 4th part 6 and 7 distances of the 5th part; By regulating the distance of the 5th part 7 with respect to the 4th part 6, can regulate laser facula on equal bundle faces with the 4th part 6 cylindrical lens array bus vertical direction on width;
Described the 6th part 8 is the post combination of lenses, wherein comprise two orthogonal post lens of bus, first post lens 9 bus is parallel with second portion 4 cylindrical lens array buses, second post lens 10 bus is parallel with the 4th part 6 cylindrical lens array buses, and the face of all restrainting 16 of first post lens 9 correspondence and second post lens 10 17 corresponding in all bundles faces keep certain distance; 9 pairs of second portions of first post lens of the 6th part, 4 separated light beams superpose, and 10 pairs the 4th parts of second post lens of the 6th part, 6 separated light beams superpose;
Described the 7th part 11 is post lens or post combination of lenses, its bus is parallel with second portion 4 cylindrical lens array buses, the 7th part 11 is positioned near all bundles face 16 of first post lens 9 correspondence of the 6th part, and the distance that the corresponding face of all restrainting of the corresponding face of all restrainting 16 of first post lens of the focal length of the 7th part 11 and the 6th part 9 and second post lens 10 is 17 equates; The 7th part 11 is transferred to the face of all restrainting 16 of first post lens 9 correspondence of the 6th part on all bundles face 17 of second post lens 10 correspondence of the 6th part, simultaneously to all restraint on the face 17 laser facula with second portion 4 cylindrical lens array bus vertical direction on width compress, finally form a uniform Linear Laser hot spot of laser facula energy distribution;
Incident laser incides first 1, and first 1 is shaped as the laser beam transformation of incident and is full of second portion 4 laser incident scopes and the as far as possible little laser facula of dispersion angle as far as possible; Incident laser shines second portion 4 after first 1, second portion 4 is divided into N bundle parallel laser light beam with the laser of incident; Incident laser is behind first 1 and second portion 4, shine third part 5, a branch of in the corresponding N bundle of in third part 5N post lens each parallel laser light beam, the distance that control second portion 4 and third part are 5, scalable all restraint laser facula on the face 16 with second portion 4 cylindrical lens array bus vertical direction on width, and be narrower state; Incident laser shines the 4th part 6, the four parts 6 each bundle in the N bundle laser of incident is divided into N bundle parallel laser light beam after first 1, second portion 4 and third part 5; Incident laser is after first 1, second portion 4, third part 5 and the 4th part 6, shine the 5th part 7, N bundle parallel laser light beam after corresponding the 4th part 6 of in the 5th part 7N post lens each is cut apart, control the distance of 7 of the 4th part 6 and the 5th parts, scalable all restraint laser facula on the face 17 with the 4th part 6 cylindrical lens array bus vertical direction on width, and be the broad state; Incident laser is after first 1, second portion 4, third part 5, the 4th part 6 and the 5th part 7, shine the 6th part 8, first post lens 9 of the 6th part with the laser beam of incident with first post lens of the 6th part, 9 bus vertical direction on superpose, and face 16 is all restrainted in formation, second post lens 10 of the 6th part with the laser beam of incident with second post lens of the 6th part, 10 bus vertical direction on superpose, and form the face 17 of all restrainting; Incident laser is after first 1, second portion 4, third part 5, the 4th part 6, the 5th part 7 and the 6th part 8, shine the 7th part 11, the 7th part 11 with the laser facula on the face of all restrainting 16 of first post lens 9 correspondence of the 6th part with second portion 4 cylindrical lens array bus vertical direction on width compress, and on all bundles face 17 of second post lens 10 correspondence of the 6th part, form the uniform Linear Laser hot spot of laser facula energy distribution.
2. a kind of laser beam transformation reshaper that is output as the uniform line hot spot according to claim 1, it is characterized in that: described second portion and third part and the 4th part and the 5th part be mutually orthogonal, be independent of each other, and therefore has the array configuration of three kinds of second portions, third part, the 4th part and the 5th part.First kind of array configuration is: second portion, the 4th part, the 5th part and third part, second kind of array configuration is second portion, the 4th part, third part and the 5th part, and the third array configuration is second portion, third part, the 4th part, the 5th part; And every kind of array configuration can both serve the same role.
3. a kind of laser beam transformation reshaper that is output as the uniform line hot spot according to claim 1, it is characterized in that: the laser facula shape of incident laser is any, as: square, rectangle, circle, ellipse etc.; The laser facula energy distribution arbitrarily as: Gaussian distribution, nearly Gaussian distribution or other non-uniform Distribution etc.
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