CN101982286A - Method for strengthening axial flexible effect of film-coated fiber bragg grating - Google Patents
Method for strengthening axial flexible effect of film-coated fiber bragg grating Download PDFInfo
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- CN101982286A CN101982286A CN2010105056109A CN201010505610A CN101982286A CN 101982286 A CN101982286 A CN 101982286A CN 2010105056109 A CN2010105056109 A CN 2010105056109A CN 201010505610 A CN201010505610 A CN 201010505610A CN 101982286 A CN101982286 A CN 101982286A
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Abstract
The invention relates to a method for strengthening axial flexible effect of a film-coated fiber bragg grating. The method comprises the following steps: processing a microstructural array with a groove at the side surface of the optical fiber in which the fiber bragg grating is located by the micro-processing technology and then using the film-coating technology to coat single-layer or multi-layer sensitive film at the area provided with the grating and a surface micro-structure. The method is manly designed for the sensitive film with flexible effect and can effectively strengthen sensitiveness of a fiber bragg grating sensor coated with the flexible sensitive film, for instance, the fiber bragg grating sensor coated with a giant magnetostriction sensitive film, a humidity sensitive film and a gas sensitive film. The fiber bragg grating processed by the method in the invention has the advantages of strengthened axial flexible effect and improved sensing sensitivity. The method in the invention belongs to the field of optical fiber sensing and the field of microfabrication.
Description
Technical field
The present invention relates to be applicable to the scalable membranous type fiber-optic grating sensor that to monitor different kinds of parameters.Comprise that specifically the side surface to fiber grating carries out preliminary treatment, surface preparation retractable material sensing membrane after processing, as the magnetostriction materials sensitive membrane, humidity sensitive material sensing membrane and gas sensitive material sensing membrane, this fiber-optic grating sensor can be used for electric current or magnetic field, humidity, and the online distributed monitoring in a plurality of fields such as density of hydrogen.
Background technology
Fiber grating sensing technology development in recent years rapidly, characteristics such as wavelength-modulated, resolution ratio height, wavelength-division multiplex, anti-electromagnetic interference, volume are little because fiber grating has, good reproducibility, become a big focus of sensor research field, be used widely at building, bridge, mine locating, ocean, aviation, medical domain, and obtained many achievements.But its major product still is confined to the Application in Sensing aspect stress and temperature.And fiber grating also is in conceptual phase in the application of other field.The fiber-optic grating sensor that for example is used for electric current, the fiber grating chemical sensor of humidity and gas concentration all are present research focuses.
Fiber grating mainly is meant Prague (Bragg) grating (being called for short FBG) at present.Bragg grating is a kind of optical fiber with periodic index distribution, and it only has reflex to the light of specific wavelength.When the light of big bandwidth passes through grating, only be that the light of the arrowband of centre wavelength is reflected with the optic fiber grating wavelength.According to coupled mode theory, the grating equation of fiber grating is λ
B=2n
EffA, wherein, λ
BBe the back wave centre wavelength (Bragg wavelength) of FBG, n
EffBe the effective refractive index of fiber grating, Λ is the cycle (referring to Fig. 1) of fiber grating.Can cause n
EffSome physical quantity that Λ changes as stress, temperature, pressure, humidity etc., all can make the FBG reflection wavelength drift about, and therefore all can measure with FBG.If the employing retractable material can be converted into the different kinds of parameters of fiber grating environment of living in the strain parameter, can arrive these parameters by indirect monitoring by the bragg wavelength drift of monitoring fiber grating.With the ultra-magnetic telescopic sensitive membrane, the Flexible film of humidity sensing film and several quasi-representatives of gas sensitive membrane is the application of example explanation fiber grating at other sensory fields below.
The ultra-magnetic telescopic sensitive membrane
Magnetostriction materials are meant magnetic ()-mechanical energy transition material with magnetostrictive effect, its saturation magnetostriction coefficient lambda
sBe generally 10
-6The order of magnitude.Giant magnetostrictive material (Giant magnetostriction material is called for short GMM) is the magnetostriction materials with big magnetostriction coefficient, its λ
sGenerally greater than 3.0 * 10
-5Making full use of its flex effect under magnetic field effect and fiber grating combines and can constitute fiber grating magnetic field (electric current) sensor.
Humidity sensing film
It is very poor that fiber grating changes sensitiveness to humidity.In order to improve the susceptibility of fiber grating, need be coated with the last layer humidity-sensitive material at the outer surface of optical fiber to humidity.When humidity changes,, cause the strain-responsive of fiber grating owing to the expansion of optical fiber surface coating humidity-sensitive material.Problem to humidity sensor can be converted into the response problem of fiber grating like this to strain.
The hydrogen sensitive membrane
The fiber grating hydrogen gas sensor generally is made up of the fiber grating of surperficial alloy plating film.Alloy film absorbs the deformation that produces behind the hydrogen and is detected by fiber grating, reflects by fiber grating centre wavelength.Fiber grating hydrogen gas sensor biggest advantage is the characteristic that makes full use of insulation explosion-proof, can be applied in the such condition of work rugged environment of aircraft fuel tank.In addition, the fiber grating hydrogen gas sensor is simple in structure, and cost is low, is convenient to wavelength-division multiplex, constitutes the distributed measurement system, can be wrapped in outside big tank and the pipeline leakage of monitor large-area.
One of difficult point of this class plated film type fiber-optic grating sensor research is the selection of telescopic material and the preparation of film.Therefore multiple material is available, the optical fiber grating sensing field can be expanded to a plurality of territories based on the Collapsible strainer of these materials.But the linearisation of its flex effect is still waiting to strengthen.One of reason is that the telescopic sensitive membrane of this class generally all is plated in smooth optical fiber surface, and its flex effect mostly is multidirectional greatly, comprises axially and radially, and has only axial telescopic variation to be detected by fiber grating.Formerly two be that therefore the thickness of these scalable sensitive membrane is micron order, therefore too little in the axial stretching deformation of optical fiber surface, the grating strain that causes is not obvious.Therefore, how to improve the axial stretching effect and become one of key breakthrough point.
Summary of the invention
The present invention is directed to the axial stretching effect technical problem of above-mentioned raising coated optical fibre grating, a kind of method of effective reinforcement axial stretching effect is provided.Adopt micro-processing technology that optical fiber surface is carried out the processing (screw thread or annular ditch groove array) of radial groove array, make surface coating effectively to embed, improve the axial stretching effect of Flexible film.
The content that specifically comprises two aspects:
On the one hand, relate to the method at optical fiber surface machining screw shape or annular ditch groove array, it comprises that laser or other micro-processing technologies process optical fiber surface.On the other hand, relate to the fiber grating surface preparation retractable material sensing membrane that is processed with screw-like or annular ditch groove array this, improve the axial stretching effect of Flexible film, be used for the sensor monitoring in multiple field.
At preceding one side problem, the applicant is at " spin fiber carries out micro-machined method and apparatus " (application number: done detailed introduction 201010204597.3).Disclose and be used for the micro-machined clamping device of spin fiber, this device comprises adjustable speed drive motors, pedestal, speed change phase convertor, angular transducer, fiber clamp, optical fiber locator, girdling device; Wherein the adjustable speed drive motors is installed on the pedestal and connects the speed change phase convertor, fiber clamp passes the speed change phase convertor and by its clamping, optical fiber locator is installed on the pedestal, optical fiber passes fiber clamp and optical fiber locator, and the area to be machined of optical fiber is positioned in the middle of the optical fiber locator, and is exposed to the external process source by process window, the processing source is laser or assembles ion beam, angular transducer is positioned on the speed change phase convertor, is used to monitor rotational angle, and girdling device is positioned at the process window place.Described optical fiber locator is made up of the separable metal parts that contains accurate V shape groove, and V-type groove size is 100-400 μ m, decides according to the clamping fibre diameter.
This application also discloses the operation principle of little processing clamping device: external power source drives adjustable speed motor, motor rotates by the fiber clamp that the speed change phase convertor drives clamping, the rotation drift of optical fiber locator constraint optical fiber makes the optical fiber that passes fiber clamp rotate with extremely low drift under the constraint of optical fiber locator.The area to be machined of optical fiber is positioned in the middle of the optical fiber locator, and is exposed to the external process source by process window, and the processing source is laser or assembles ion beam.
This application further discloses procedure of processing: the overlay of optical fiber area to be machined is peelled off; The entrance hole of optical fiber by fiber clamp passed fiber clamp; Fiber clamp is passed the centre bore of speed change phase convertor; Optical fiber locator is placed on both sides, optical fiber area to be machined, and the optical fiber area to be machined is exposed under the external process source by process window; Optical fiber locator clamps both sides, optical fiber area to be machined, makes optical fiber retrained by it; The optical fiber area to be machined is exposed under the external process source by process window.
At back one side problem, the invention provides a kind of method of strengthening the axial stretching effect of coated optical fibre grating, it is characterized in that, this method is to process micron-sized channel form micro structure array on the fiber grating surface along the radial direction of bare fibre, its channel form micro structure array surface is positioned at the side surface of the optical fiber of fiber grating position, and be distributed in the optical fiber side surface of fiber grating, adopt coating technique having the zone plating single or multiple lift retractable material sensitive membrane on grating and channel form micro structure array surface then.
Wherein, described groove micro structure array is screw-like or ring-type.
The degree of depth of described groove micro structure array does not influence the spectral waveform of fiber grating, and promptly waveform does not produce distortion.
The degree of depth of described groove micro structure array does not influence the reflection wavelength of fiber grating, and promptly the reflection kernel wavelength of fiber grating is not offset.
The cycle of described groove micro structure array is 0.001～3000 μ m.
Described retractable material sensitive membrane, comprise: the magnetostriction materials sensitive membrane, humidity sensitive material sensing membrane and gas sensitive material sensing membrane, this fiber-optic grating sensor that has prepared the retractable material sensitive membrane is used for electric current or magnetic field, humidity, and the online distributed monitoring in a plurality of fields such as density of hydrogen.
The invention has the advantages that effective raising fiber grating axial stretching effect, fiber-optic grating sensor is expanded to broader application.
Description of drawings
There is the optical fiber grating structure schematic diagram of annular ditch groove or thread groove array on Fig. 1 surface
Fig. 2 is the schematic diagram of the embodiment of annular ditch groove array
Fig. 3 is the schematic diagram of the embodiment of thread groove array
Fig. 4 application example schematic diagram of the present invention
Among the figure: 1 has the optical fiber of built-in grating, 2 annular ditch grooves or thread groove array, and 3 laser, 4 magnetic fields, arrow is represented the fibre movement direction.
The specific embodiment
Describe the present invention in detail below in conjunction with accompanying drawing.
The mode of fiber grating Surface Machining annular ditch groove array as shown in Figure 2.The optical fiber that adopts 3 pairs of laser to have built-in grating in this processing example carries out surperficial little processing, and after single groove processing finished, workbench moved length-specific along the x direction of principal axis.
The mode of fiber grating Surface Machining thread groove array as shown in Figure 3.The optical fiber 1 that adopts 3 pairs of laser to have built-in grating in this processing example carries out surperficial little processing, and when optical fiber rotated under the drive of anchor clamps, workbench moved along the x direction of principal axis.Accurately control laser energy, rotary speed and translational speed can reach the purpose of the control thread groove pitch and the degree of depth, so can process satisfactory thread groove.
One of application example of the present invention.As shown in Figure 4, at fibre-optical microstructure of the present invention surface plating ultra-magnetic telescopic sensitive material film (for example terbium dysprosium ferrum magnetostriction alloy Terfenol-D), make the sensing head of magnetic field (electric current).
Can predict, for a person skilled in the art, can develop multiple application example based on the present invention, these are revised and are not broken away from the spirit or scope of the present invention of determining in the claims.
Claims (6)
1. method of strengthening the axial stretching effect of coated optical fibre grating, it is characterized in that, this method is to process micron-sized channel form micro structure array on the fiber grating surface along the radial direction of bare fibre, its channel form micro structure array surface is positioned at the side surface of the optical fiber of fiber grating position, and be distributed in the optical fiber side surface of fiber grating, adopt coating technique having the zone plating single or multiple lift retractable material sensitive membrane on grating and channel form micro structure array surface then.
2. the method for the axial stretching effect of reinforcement coated optical fibre grating according to claim 1 is characterized in that, described groove micro structure array is screw-like or ring-type.
3. the method for the axial stretching effect of reinforcement coated optical fibre grating according to claim 1 is characterized in that the degree of depth of described groove micro structure array does not influence the spectral waveform of fiber grating, and promptly waveform does not produce distortion.
4. the method for the axial stretching effect of reinforcement coated optical fibre grating according to claim 1 is characterized in that the degree of depth of described groove micro structure array does not influence the reflection wavelength of fiber grating, and promptly the reflection kernel wavelength of fiber grating is not offset.
5. the method for the axial stretching effect of reinforcement coated optical fibre grating according to claim 1 is characterized in that, the cycle of described groove micro structure array is 0.001～3000 μ m.
6. the method for the axial stretching effect of reinforcement coated optical fibre grating according to claim 1 is characterized in that, described retractable material sensitive membrane comprises: magnetostriction materials sensitive membrane, humidity sensitive material sensing membrane or gas sensitive material sensing membrane.
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| CN 201010505610 CN101982286B (en) | 2010-10-13 | 2010-10-13 | Method for strengthening axial flexible effect of film-coated fiber bragg grating |
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| CN 201010505610 CN101982286B (en) | 2010-10-13 | 2010-10-13 | Method for strengthening axial flexible effect of film-coated fiber bragg grating |
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| CN101982286B CN101982286B (en) | 2013-03-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104949937A (en) * | 2015-06-24 | 2015-09-30 | 中国计量学院 | Phase-shifted fiber grating hydrogen sensor based on fiber grating microcavity |
| CN112748090A (en) * | 2020-12-25 | 2021-05-04 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
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| JP2005157299A (en) * | 2003-10-27 | 2005-06-16 | Nippon Telegr & Teleph Corp <Ntt> | Fiber grating module |
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| JP2005300649A (en) * | 2004-04-07 | 2005-10-27 | Mitsubishi Electric Corp | Phase mask to form bragg diffraction grating and optical fiber manufactured by using the phase mask |
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| CN200985787Y (en) * | 2006-12-14 | 2007-12-05 | 中国石油天然气集团公司 | Instrumentation for measuring casing coupling with fiber optic sensor |
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2010
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| CN2705777Y (en) * | 2004-03-18 | 2005-06-22 | 上海紫珊光电技术有限公司 | Slotted structure elastomer optical fiber rastor strain sensor head |
| JP2005300649A (en) * | 2004-04-07 | 2005-10-27 | Mitsubishi Electric Corp | Phase mask to form bragg diffraction grating and optical fiber manufactured by using the phase mask |
| EP1855131A1 (en) * | 2006-05-12 | 2007-11-14 | Interuniversitair Microelektronica Centrum Vzw | Slanted segmented grating coupler |
| CN200985787Y (en) * | 2006-12-14 | 2007-12-05 | 中国石油天然气集团公司 | Instrumentation for measuring casing coupling with fiber optic sensor |
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Cited By (3)
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|---|---|---|---|---|
| CN104949937A (en) * | 2015-06-24 | 2015-09-30 | 中国计量学院 | Phase-shifted fiber grating hydrogen sensor based on fiber grating microcavity |
| CN112748090A (en) * | 2020-12-25 | 2021-05-04 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
| CN112748090B (en) * | 2020-12-25 | 2024-03-26 | 武汉理工大学 | Hydrogen humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application |
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| CN101982286B (en) | 2013-03-20 |
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