CN101973085A - Clamping device for clamp used for cutting silicon wafer - Google Patents
Clamping device for clamp used for cutting silicon wafer Download PDFInfo
- Publication number
- CN101973085A CN101973085A CN 201010518416 CN201010518416A CN101973085A CN 101973085 A CN101973085 A CN 101973085A CN 201010518416 CN201010518416 CN 201010518416 CN 201010518416 A CN201010518416 A CN 201010518416A CN 101973085 A CN101973085 A CN 101973085A
- Authority
- CN
- China
- Prior art keywords
- clamping
- clamping component
- fixed block
- clamp
- clamping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention provides a clamping device for a clamp used for cutting a silicon wafer. The device comprises a fixing block, a clamping block, a first clamping component and a second clamping component, wherein the clamping block is movably arranged in the fixing block; one end of the first clamping component vertically passes through one end of the fixing block, and is in thread connection with the fixing block to form a whole; one end of the second clamping component is transversely inserted into the other end of the fixing block, and is in thread connection with the fixing block; a flange at one end of the second clamping component is matched wit a groove at one end of the clamping block; and the outer circumference of the flange is in clearance fit with the inner circumference of the groove. The clamping device is convenient to use; the clamping is operated manually, so the clamping force is uniform to protect the silicon wafer from broken; and after a single clamping device is broken, the clamping device can be replaced respectively, so the cost is greatly reduced.
Description
Technical field
The present invention relates to a kind of clamping device, particularly a kind of silicon chip that cuts belongs to the technical field of silicon chip machining tool with the clamping device of anchor clamps.
Background technology
Before the silicon chip processing, earlier silicon crystal slate to be cut split and become block.In the existing silicon chip cutting equipment,, generally adopt fixedly modes such as cylinder clamping, mobile cylinder clamping or Rodless cylinder clamping to the clamping mode of silicon crystal slate.In the above-mentioned clamping mode, the mode of fixing to clamp is used the most general, but its cost height; The Rodless cylinder translational speed is slow, and owing to be monolateral clamping, clamping force is inhomogeneous, makes silicon crystal slate draw damage easily, and the silicon wafer piece of appearance processing is lack of standardization, as phenomenons such as joint-cutting and surperficial out of plumb; Though mobile cylinder clamping has overcome above-mentioned phenomenon, there is the high problem of cost.
Summary of the invention
It is even that technical problem to be solved by this invention provides a kind of clamping force, the cutting silicon chip with low cost clamping device of anchor clamps.
In order to solve the problems of the technologies described above, a kind of clamping device that cuts silicon chip with anchor clamps of the present invention, comprise fixed block, clamp, first clamping component, second clamping component, described clamp is mobilizable to be arranged in the described fixed block, described first clamping component, one end vertically passes described fixed block one end, and is threaded with described fixed block and is integral; The laterally inserted described fixed block other end of described second clamping component, one end, and be threaded with described fixed block; The flange of described second clamping component, one end matches with the groove of described clamp one end, and the inner peripheral surface matched in clearance of described flange outer periphery face and described groove.
Above-mentioned a kind of clamping device that cuts silicon chip with anchor clamps wherein, is provided with ball between the end face of described groove floor and described flange.
The present invention can realize following beneficial effect:
1, owing to the present invention includes fixed mount, being arranged on the clamping device on the described fixed mount, described clamping device comprises fixed block, clamp, first clamping component, second clamping component, during clamping, clamping device is moved on to the appropriate location, first clamping component is tightened, end face by first clamping component is pressed on the fixed mount, and clamping device is located; Turn second clamping component again, promote clamp, silicon crystal slate is clamped by second clamping component; During dismounting, as long as second clamping component is oppositely turned, clamp is moved backward, silicon crystal slate is unclamped get final product, therefore, the present invention uses more convenient, and clamping is by manually-operated, and clamping force is even, avoids pressing from both sides silicon wafer bad; And after single clamping device damages, can change individually, greatly reduce cost; In addition, the present invention is made up of the minority parts, and is with low cost.
2, owing to be provided with ball between the end face of described groove floor and described flange, when second clamping component rotated, the friction of second clamping component and clamp was rolling friction, frictional force is less, avoid the damage of second clamping component and clamp, thereby, service life of anchor clamps prolonged.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of fixed block of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, a kind of cutting silicon chip of the present invention anchor clamps comprise that fixed block 21, clamp 22, first clamping component 23, second clamping component, 24, the first clamping components 23 are rod member, and the outer peripheral face of rod member is provided with external screw thread; Fixed block 21 is an integrated member, fixed block 21 surfaces are provided with first groove 211, this first groove 211 links to each other with fixed mount 1, horizontal thread hole 214, passage 212 that fixed block 21 1 ends are provided with the passage 212 that clamp 22 is installed and second clamping component 24 is installed communicate with screwed hole 214, the other end of fixed block 21 is provided with the longitudinal hole 213 that first clamping component 23 is installed, and the inner peripheral surface of longitudinal hole 213 is provided with internal thread; Second clamping component 24 is a rod member, and this rod member outer peripheral face is provided with external screw thread, and an end of rod member is provided with flange 241; Clamp 22 is the block member of rectangle, one end of clamp 22 is provided with groove 221, described clamp 22 is arranged in the described fixed block 21, clamp 22 and 21 movable connections of fixed block, described first clamping component, 23 1 ends pass the longitudinal hole 213 of described fixed block 21 1 ends, and are threaded with described fixed block 21 and are integral; Described second clamping component, 24 1 ends insert in the screwed hole of described fixed block 21, and are threaded with described fixed block; The flange 241 of described second clamping component, 24 1 ends matches with the groove 221 of described clamp 22 1 ends, and the inner peripheral surface matched in clearance of described flange 241 outer peripheral faces and described groove 221.The present invention uses more convenient, and clamps by manually-operated, and clamping force is even, avoids pressing from both sides silicon wafer bad; And after single clamping device damages, can change individually, greatly reduce cost; In addition, the present invention is made up of the minority parts, and is with low cost.
In order to prolong service life of the present invention, can between the end face of described groove 221 bottom surfaces and described flange 241, be provided with ball 25, owing to be provided with ball 25 between the end face of described groove 221 bottom surfaces and described flange 241, when second clamping component 24 rotates, second clamping component 24 is rolling friction with the friction of clamp 22, and frictional force is less, avoids the damage of second clamping component 24 and clamp 22, thereby, prolonged service life of anchor clamps.
During clamping, fixed block 21 is moved on to the appropriate location, first clamping component 23 is tightened, the end face by first clamping component 23 is pressed on the fixed mount, and clamping device is located; Turn second clamping component 24 again, promote clamp 22, silicon crystal slate is clamped by second clamping component 24; During dismounting, as long as second clamping component 24 is oppositely turned, clamp 22 is moved backward, silicon crystal slate is unclamped get final product.
In sum, it is even that the present invention has clamping force, with low cost, easy for installation, flexible and advantage of simple structure.
Here description of the invention and application is illustrative, is not to want that therefore, the present invention is not subjected to the restriction of present embodiment with scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (2)
1. one kind is cut the clamping device that silicon chip is used anchor clamps, it is characterized in that, comprise fixed block, clamp, first clamping component, second clamping component, described clamp is mobilizable to be arranged in the described fixed block, described first clamping component, one end vertically passes described fixed block one end, and is threaded with described fixed block and is integral; The laterally inserted described fixed block other end of described second clamping component, one end, and be threaded with described fixed block; The flange of described second clamping component, one end matches with the groove of described clamp one end, and the inner peripheral surface matched in clearance of described flange outer periphery face and described groove.
2. a kind of according to claim 1 clamping device that cuts silicon chip with anchor clamps is characterized in that, is provided with ball between the end face of described groove floor and described flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105184164A CN101973085B (en) | 2010-10-25 | 2010-10-25 | Clamping device for clamp used for cutting silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105184164A CN101973085B (en) | 2010-10-25 | 2010-10-25 | Clamping device for clamp used for cutting silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101973085A true CN101973085A (en) | 2011-02-16 |
| CN101973085B CN101973085B (en) | 2012-11-21 |
Family
ID=43573007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105184164A Expired - Fee Related CN101973085B (en) | 2010-10-25 | 2010-10-25 | Clamping device for clamp used for cutting silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101973085B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152425A (en) * | 2011-03-29 | 2011-08-17 | 胡林宝 | Fixing device assisting multi-wire cutting machine in cutting of silicon single crystal rods |
| CN105645302A (en) * | 2016-02-24 | 2016-06-08 | 国营海东造船厂 | Hydraulic jacking device and using method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1065470C (en) * | 1995-04-21 | 2001-05-09 | 詹华新 | Method for cutting big granite square tile |
| JP2007296832A (en) * | 2006-04-28 | 2007-11-15 | Hidekazu Obayashi | Tip holder of cutter wheel for brittle materials |
| CN201157971Y (en) * | 2008-02-20 | 2008-12-03 | 天津中西宏业数控机械技术有限公司 | Fixture special for safety transmission system component processing |
| CN201389927Y (en) * | 2009-04-21 | 2010-01-27 | 新乡市华盛天龙数控设备有限公司 | Clamping mechanism of multi-wire cutting machine |
| CN201863309U (en) * | 2010-10-25 | 2011-06-15 | 镇江市港南电子有限公司 | Clamping device of clamp for cutting silicon wafers |
-
2010
- 2010-10-25 CN CN2010105184164A patent/CN101973085B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1065470C (en) * | 1995-04-21 | 2001-05-09 | 詹华新 | Method for cutting big granite square tile |
| JP2007296832A (en) * | 2006-04-28 | 2007-11-15 | Hidekazu Obayashi | Tip holder of cutter wheel for brittle materials |
| CN201157971Y (en) * | 2008-02-20 | 2008-12-03 | 天津中西宏业数控机械技术有限公司 | Fixture special for safety transmission system component processing |
| CN201389927Y (en) * | 2009-04-21 | 2010-01-27 | 新乡市华盛天龙数控设备有限公司 | Clamping mechanism of multi-wire cutting machine |
| CN201863309U (en) * | 2010-10-25 | 2011-06-15 | 镇江市港南电子有限公司 | Clamping device of clamp for cutting silicon wafers |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152425A (en) * | 2011-03-29 | 2011-08-17 | 胡林宝 | Fixing device assisting multi-wire cutting machine in cutting of silicon single crystal rods |
| CN105645302A (en) * | 2016-02-24 | 2016-06-08 | 国营海东造船厂 | Hydraulic jacking device and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101973085B (en) | 2012-11-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103084874B (en) | Turbine rotor automobile clamper | |
| CN101973085B (en) | Clamping device for clamp used for cutting silicon wafer | |
| CN102452006A (en) | Clamp for machining gearbox | |
| CN103659667A (en) | Spring automatic clamping device | |
| CN201833494U (en) | Clamp for cutting silicon chips | |
| CN202655451U (en) | Rapid clamping mechanism for die | |
| CN101973078A (en) | Clamping device of silicon slice cutting device | |
| CN201863309U (en) | Clamping device of clamp for cutting silicon wafers | |
| CN203565890U (en) | Knife bar oblique iron adjusting device of pipe end face bevelling machine | |
| CN102922343A (en) | Tool clamp for drilling by rotor shaft | |
| CN101973086B (en) | Clamp for cutting silicon wafer | |
| CN104440690A (en) | Pneumatic jacking device | |
| CN201300320Y (en) | Exposed clip panel clamping device | |
| CN201863310U (en) | Clamping device of silicon wafer cutting equipment | |
| CN202199866U (en) | Clamp for milling teeth on end face of flange shaft | |
| CN104708405A (en) | Application method of cylinder drilling fixture | |
| CN201769068U (en) | Workpiece clamping device | |
| CN204277837U (en) | A kind of right angle fixture | |
| CN202779968U (en) | Milling groove machining tool | |
| CN202147069U (en) | Linear cutting fixture | |
| CN204621159U (en) | A kind of fixture of double-movement fixture block | |
| CN103231267A (en) | Adjustable fixture | |
| CN203566354U (en) | Positioning device for milling grooves | |
| CN103639781A (en) | Fixture for drilling outer circle hole | |
| CN103722396A (en) | Pressure measurable limiting type looseness-preventing clamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121121 Termination date: 20161025 |