CN101963495A - Device and method for measuring physical parameters of aeolotropic substance - Google Patents

Device and method for measuring physical parameters of aeolotropic substance Download PDF

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Publication number
CN101963495A
CN101963495A CN2009101616490A CN200910161649A CN101963495A CN 101963495 A CN101963495 A CN 101963495A CN 2009101616490 A CN2009101616490 A CN 2009101616490A CN 200910161649 A CN200910161649 A CN 200910161649A CN 101963495 A CN101963495 A CN 101963495A
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liquid crystal
reference signal
light beams
frequency
signal
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曾恒正
李瑞斌
陈威州
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Hannstar Display Corp
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Abstract

The invention provides a method and a device for measuring the physical parameters of an aeolotropic substance by using the transmission type heterodyne interferometry. Two mutually orthogonal polarized light beams with slightly different frequencies pass through the aeolotropic substance to be measured, and interference is produced through an analyzer with linear polarization. An optical detector is used for detecting the interfered light and converting the interfered light into an interference signal, and a phasometer or a locking amplifier is used for acquiring the phase difference between the interference signal and a reference signal.

Description

Measure the device and method of the physical parameter of anisotropic substance
Technical field
The present invention relates to relate more specifically to a kind of difference interference art of measuring the physical parameter of anisotropic substance in a kind of light path difference interference art altogether.
Background technology
Have many kinds to be used for doing the interferometry and the interferometer of optics and non-contact measurement, yet most interferometry or interferometer are not to be the structure of light path altogether.In general, the non-structure of light path altogether has following problem:
(1) in the structure of non-light path altogether, the optical path difference between reference beam and the test beams must be in coherent length.In addition, when optical path difference increased, the contrast of interference signal will reduce.
(2) in the structure of non-light path altogether, the environment of two light beams should strictly be controlled.For instance, the disturbance of air-flow and outside vibration should be avoided.In addition, the pressure of indoor environment, temperature and humidity also need stable and efficient control.
(3) analysis of interference figure also is comparatively complicated, trouble and lower accuracy.
The difference interference art then is to utilize the phase place of interference signal rather than amplitude to come measure physical parameters.Therefore, the variation of light intensity can't influence measurement result in interventional procedures, and the physical parameter that measure can utilize the phase place of interference signal to take out in real time, and this is the very special characteristic of difference interference art.Yet, if the difference interference art is not used the structure of common light path, still have the shortcoming of above-mentioned (1) and (2), and the degree of accuracy of measuring can reduce.
With reference to figure 1, United States Patent (USP) the 5th, 946 has proposed a kind of total reflection difference interference art, has been used for measuring the refractive index of isotropic substance for No. 096.Heterodyne light source 11 has produced twice quadrature and the different slightly linearly polarized photon of frequency each other, and this twice light beam becomes folded light beam and transmitted light beam by behind the spectroscope 12.Folded light beam can be passed through the checking bias slice 16 of linear polarisation, and is detected by photodetector 18.And on the other hand, transmitted light beam can pass through prism 13, then produces total reflection on the border of test substance 15, and the signal beams of this total reflection can pass through the checking bias slice 17 of linear polarisation, and is detected by photodetector 19.Then, the signal that is obtained by photodetector 18 and 19 detections is sent to phasometer 110, and machine 111 is done some calculating as calculated again, and to obtain the refractive index of test substance 15, last result is presented on the display 112.
Yet, United States Patent (USP) the 5th, 946, No. 096 disclosed method only can be measured the physical parameter of isotropic substance, can't measure for the physical parameter of anisotropic substance.
Summary of the invention
The invention provides a kind of device and method that utilizes transmission-type difference interference art to measure the physical parameter of anisotropic substance.
In first embodiment, the device that utilizes transmission-type difference interference art to measure the physical parameter of anisotropic substance of the present invention comprises light source, in order to produce the light beam of high-polarization.By the emitted light beam of light source can be according to circumstances polarizer slice by linear polarisation, to obtain the more light beam of high-polarization.Light beam then can pass through electrooptic modulator, and this electrooptic modulator is connected with driver and is driven by it and controls.Driver is connected with signal generator in addition, makes electrooptic modulator to be driven by driver according to desired pattern, uses the light beam of modulation by electrooptic modulator, to produce desired heterodyne light beam.In addition, signal generator also can transmit reference signal to phasometer or lock-in amplifier.
Laser beam can produce twice quadrature and the different slightly linearly polarized photon of frequency each other after the modulation of electrooptic modulator, the difference of both frequencies equates with the frequency of the reference signal of being sent out by signal generator.The light beam of this two mutual quadrature can for example be the twisted nematic liquid crystal box, and then pass through the checking bias slice of linear polarisation earlier by anisotropic test substance, arrives photodetector at last.Phasometer or lock-in amplifier receive by the interference signal that photodetector sent, and with compare by the reference signal that signal generator sent, to obtain both phase differential.In addition, rotation platform then is configured to make test substance to do rotation with respect to test beams, and with under the different anglecs of rotation, relatively interference signal and reference signal are poor to obtain desired electric signal.The data of these electric signal differences are sent to counter, to calculate the relevant physical parameter of test substance.
In second embodiment, device with first embodiment is identical substantially for the device that utilizes the physical parameter that transmission-type difference interference art measures anisotropic substance of the present invention, also includes electrooptic modulator, signal generator, driver, checking bias slice, photodetector, phasometer/lock-in amplifier, counter and rotation platform.Different with first embodiment is, the light source of present embodiment uses diode laser, and polarizer slice then changes half-wave plate into.In addition, diode laser also is electrically connected with the laser diode voltage stabilizer, so that the output of laser instrument can be stablized.By the emitted laser beam of diode laser, also utilizing collimation lens poly-is directional light, and again by being located at the adjustable aperture in collimation lens downstream, to filter out unwanted edge light.Then by half-wave plate, after this measuring principle of the device of present embodiment is identical with the measuring principle of the device of first embodiment again for laser beam.
The method of utilizing transmission-type difference interference art to measure the physical parameter of anisotropic substance according to the present invention can accurately be measured optical compensation curved (optical compensated bend; OCB) liquid crystal cell, TAC film (Triacetyl Cellulose film; TAC film) or twisted nematic (twisted Nematic; TN) torsion angle of liquid crystal cell (twist angle), tilt angle (pretilt angle) and thickness of liquid crystal box (cellgap).Because the subtle change of torsion angle is quite responsive for the contrast of twisted nematic liquid crystal box, therefore measuring torsion angle accurately is considerable to the twisted nematic liquid crystal box.According to the method for utilizing transmission-type difference interference art to measure the physical parameter of anisotropic substance of the present invention, because use light path altogether, reduced the interference of environment, can obtain more stable measurement numerical value.
In order to allow above and other objects of the present invention, feature and the advantage can be more obvious, hereinafter will be in conjunction with the accompanying drawings, be described in detail below.
Description of drawings
Fig. 1 utilizes total reflection difference interference art to measure the schematic representation of apparatus of the refractive index of isotropic substance for existing;
Fig. 2 measures the schematic representation of apparatus of the physical parameter of anisotropic substance for the transmission-type difference interference art of utilizing of first embodiment of the invention;
Fig. 3 measures the schematic representation of apparatus of the physical parameter of anisotropic substance for the transmission-type difference interference art of utilizing of second embodiment of the invention;
Fig. 4 be utilize transmission-type difference interference art of the present invention to the twisted nematic liquid crystal box do measure resulting in theory with experimentally phase differential figure to the liquid crystal cell anglec of rotation;
Fig. 5 does measurement for utilizing diode laser to the OCB liquid crystal cell, and resulting phase differential is to the figure of the liquid crystal cell anglec of rotation;
Fig. 6 utilizes helium-neon laser that identical OCB liquid crystal cell is done measurement, and resulting phase differential is to the figure of the liquid crystal cell anglec of rotation.
Embodiment
With reference to figure 2, the device that utilizes transmission-type difference interference art to measure the physical parameter of anisotropic substance (anisotropic material) of first embodiment of the invention includes light source 210, it for example is laser instrument, it for example is gas laser, for example be helium-neon laser, in order to produce the light beam of high-polarization.By the emitted light beams of light source 210 can be according to circumstances polarizer slice 212 by linear polarisation, to obtain the more light beam of high-polarization.Light beam then can pass through electrooptic modulator 220, and this electrooptic modulator 220 is connected with driver 232 and is driven by it and controls.Driver 232 is connected with signal generator 230 in addition, makes electrooptic modulator 220 to be driven by driver 232 according to desired pattern, uses the light beam of modulation by electrooptic modulator 220, to produce desired heterodyne light beam.In addition, signal generator 230 also can transmit reference signal to phasometer or lock-in amplifier 270.
Laser beam can produce twice quadrature (orthogonal) and the different slightly linearly polarized photon of frequency each other after the modulation of electrooptic modulator 220, the difference of both frequencies equates with the frequency of the reference signal of being sent out by signal generator 230.The light beam of this two mutual quadrature can pass through anisotropic test substance 240 earlier, and then passes through the checking bias slice 250 of linear polarisation, interferes to produce on this checking bias slice 250.Measure this interfering beam with photodetector 260, and convert it to the interference signal of electricity.The interference signal that 270 receptions of phasometer or lock-in amplifier are sent by photodetector 260, and compare with the reference signal that is sent by signal generator 230, to obtain both phase differential.In addition, 290 of rotation platforms are configured to make test substance 240 to do rotation with respect to test beams, and with under the different anglecs of rotation, relatively interference signal and reference signal are poor to obtain desired electric signal.The data of these electric signal differences are sent to counter 280, to calculate the relevant physical parameter of test substance 240.
With reference to figure 3, the device with first embodiment is identical substantially for the device of the physical parameter of utilizing transmission-type difference interference art measurement anisotropic substance of second embodiment of the invention, also includes electrooptic modulator 220, signal generator 230, driver 232, checking bias slice 250, photodetector 260, phasometer/lock-in amplifier 270, counter 280 and rotation platform 290.Different with first embodiment is, the light source 210 of present embodiment uses diode lasers (diode laser), and polarizer slice 212 then changes half-wave plate (half wave plate) into.In addition, diode laser 210 also is electrically connected with laser diode voltage stabilizer (laser diode control circuit) 214, so that the output of laser instrument can be stablized.By the emitted laser beam of diode laser 210, utilize also that collimation lens (collimating lens) 216 is poly-to be directional light, and again by being located at the adjustable aperture 218 in collimation lens 216 downstreams, to filter out unwanted edge light.Then by half-wave plate 212, after this measuring principle of the device of present embodiment is identical with the measuring principle of the device of first embodiment, repeats no more in this again for laser beam.
The device and method that utilizes transmission-type difference interference art to measure the physical parameter of anisotropic substance of the present invention can be used to measure optical compensation curved (optical compensated bend; OCB) liquid crystal cell, TAC film (Triacetyl Cellulose film; TAC film) or twisted nematic (twisted Nematic; TN) thickness (cell gap) of the torsion angle of liquid crystal cell (twist angle), tilt angle (pretilt angle) and liquid crystal cell.The direction of now light being advanced is defined as the z direction of principal axis, vertical direction is defined as y direction of principal axis, horizontal direction and then is defined as the x direction of principal axis.The polarizing axis that the polarizing axis of polarizer slice 212 is parallel to x axle, checking bias slice 250 is parallel to the y axle, and fast angle with the x axle of electrooptic modulator 220 is 45 °.Suppose that twisted nematic liquid crystal box 240 is θ with respect to the anglec of rotation of test beams, when we rotate twisted nematic liquid crystal box 240, as shown in Figure 4, can obtain the phase differential under different θ angles, after curve fitting (curve fitting), can try to achieve the thickness of torsion angle, tilt angle and the liquid crystal cell of this twisted nematic liquid crystal box 240.
For the purpose of simplifying calculating, 240 equivalences of twisted nematic liquid crystal box are considered as m postpone wave plate (retardation plate) structure that forms that is connected in series, and define the pairing optical matrix of each delay wave plate individually.Just can calculate electric field after incident light passes twisted nematic liquid crystal box 240 and checking bias slice 250 by the method for Jones matrix (Jones matrix) thus, obtain following equation
Figure B2009101616490D0000053
The structural parameters of three twisted nematic liquid crystal boxes 240 have been defined at following formula
Figure B2009101616490D0000054
D and α, it represents the angle of torsion angle, thickness of liquid crystal box and liquid crystal cell optical axis and z axle respectively, and Γ is the phase differential that electrooptic modulator 220 is produced, θ rBe the initial orientation angle of frictional direction (rubbing direction), R is the rotation matrix function, n oAnd n e(α) be respectively the refractive index of ordinary light (o-wave) and extraordinary ray (e-wave), λ is the wavelength of laser optical 210.
Since light intensity be electric field square, so photodetector 260 measured light intensities can be expressed as: (p, q, A, B are real number for r wherein, s)
I ≡ | E | 2 = E x 2 + E y 2
= C + A 2 + B 2 cos ( Γ + φ )
Wherein
A = 1 2 ( r 2 + s 2 - p 2 - q 2 )
B=qr-ps
C = 1 2 ( p 2 + q 2 + r 2 + s 2 )
&phi; = tan - 1 B A ; - &pi; < &phi; < &pi;
Thus, the phase differential ψ that contributed of twisted nematic liquid crystal box 240 can obtain.
Then, from experimental data, capture the structural parameters of twisted nematic liquid crystal box 240 in the mode of data fitting
Figure B2009101616490D0000066
D and α.Employed fit procedure can be adjusted these three parameters in reasonable interval, and utilize the standard deviation SD circulate between experiment with computing data repeatedly and the theoretical value, until the numerical value of SD is gradually reduced to till the minimum, just can make matched curve and experimental data be tending towards identical thus.SD is defined as follows:
SD &equiv; 1 m &Sigma; &theta; i = &theta; 1 &theta; m [ &phi; cal ( &theta; i ) - &phi; exp ( &theta; i ) ] 2
ψ wherein CalWith ψ ExpDistinguish on the representation theory and phase differential experimentally.
Utilize the aforementioned calculation mode, the optimum structure parameter that from data, is captured
Figure B2009101616490D0000068
D and α system be respectively 90.8 °, 3.9454 μ m with 83.956 °, the matched curve of correspondence is then as shown in Figure 4.
Use the feasibility of diode laser for checking, use diode laser identical OCB liquid crystal cell to be done measurement respectively with helium-neon laser as light source, resulting phase differential to the liquid crystal cell anglec of rotation shown in the 5th and 6 figure.Can be clear that from figure, use diode laser to come to the same thing, therefore directly prove the feasibility of use diode laser with helium-neon laser is resulting.Because diode laser has the little advantage of volume with respect to helium-neon laser, but use the volume of reduction means on measurement mechanism.In addition, the output wavelength of diode laser can easily be adjusted compared to gas laser, therefore can increase the use flexibility ratio of device.
The method of utilizing transmission-type difference interference art to measure the physical parameter of anisotropic substance according to the present invention can accurately be measured torsion angle, tilt angle and the thickness of liquid crystal box of twisted nematic liquid crystal box.Because the subtle change of torsion angle is quite responsive for the contrast of twisted nematic liquid crystal box, therefore measuring torsion angle accurately is considerable to the twisted nematic liquid crystal box.According to the method for utilizing transmission-type difference interference art to measure the physical parameter of anisotropic substance of the present invention, because use light path altogether, reduced the interference of environment, can obtain more stable measurement numerical value.
Though the present invention discloses with previous embodiment, so it is not in order to qualification the present invention, any those skilled in the art, without departing from the spirit and scope of the present invention, when doing various changes and modification.Therefore protection scope of the present invention is as the criterion when looking the accompanying Claim person of defining.

Claims (22)

1. method of measuring the physical quantity of anisotropic substance comprises the following step:
Anisotropic material is provided;
The twice polarization state is mutually orthogonal and light beams that frequency is different are by described material, and described two light beams can cause different phase-delay quantities after by described material;
Utilize photodetector with the interference signal of the conversion of signals of described two light beams after for electricity by described material; And
Described interference signal and reference signal are compared, to obtain both phase differential.
2. the method for claim 1, the difference of the frequency of wherein said two light beams equals the frequency of described reference signal.
3. the method for claim 1, the generation of wherein said interference signal is that described two light beams are reached by the checking bias slice of linear polarisation.
4. the method for claim 1, the comparison of wherein said interference signal and described reference signal is reached by phasometer or lock-in amplifier.
5. the method for claim 1, wherein said two light beams produce by electrooptic modulator by the light beam of polarization.
6. the method for claim 1 also comprises:
Rotate described material; And
, under the different anglecs of rotation, described interference signal and described reference signal are compared at described material.
7. the method for claim 1, wherein said reference signal is produced by signal generator.
8. the method for claim 1, wherein said material can be twisted nematic liquid crystal box, OCB liquid crystal cell or TAC film.
9. method as claimed in claim 8, the physical parameter of the described twisted nematic liquid crystal box that wherein will measure is torsion angle, tilt angle and thickness of liquid crystal box.
10. device of measuring the physical parameter of anisotropic substance, it comprises:
Light source is in order to produce light beam;
Electrooptic modulator is in order to be the light beam that the twice polarization state is mutually orthogonal and frequency is different with the Beam Transformation that described light source produced, to be incident to anisotropic material to be measured;
The checking bias slice of linear polarisation is used so that described two light beams are being interfered by producing behind the described material;
Photodetector is converted to electric interference signal with described interfering beam;
Signal generator produces reference signal; And
Phasometer or lock-in amplifier are in order to more described interference signal and described reference signal, to obtain both phase differential.
11. device as claimed in claim 10, the difference of the frequency of wherein said two light beams equals the frequency of described reference signal.
12. device as claimed in claim 10 also comprises:
Driver, in order to driving described electrooptic modulator,
Wherein said signal generator is connected with described driver.
13. device as claimed in claim 10 also comprises:
The polarizer slice of linear polarisation is arranged between described laser instrument and the electrooptic modulator.
14. device as claimed in claim 10 also comprises:
Rotation platform is in order to rotate described material.
15. device as claimed in claim 10, wherein said material can be twisted nematic liquid crystal box, OCB liquid crystal cell or TAC film.
16. a device of measuring the physical parameter of anisotropic substance, it comprises:
Diode laser is in order to produce laser beam;
The laser diode voltage stabilizer is electrically connected with described diode laser;
Electrooptic modulator is in order to be the light beam that the twice polarization state is mutually orthogonal and frequency is different with the Beam Transformation that described light source produced, to be incident to anisotropic material to be measured;
The checking bias slice of linear polarisation is used so that described two light beams are being interfered by producing behind the described material;
Photodetector is converted to electric interference signal with described interfering beam;
Signal generator produces reference signal; And
Phasometer or lock-in amplifier are in order to more described interference signal and described reference signal, to obtain both phase differential.
17. device as claimed in claim 16 also comprises:
Collimation lens, it is directional light that the light beam that described diode laser produced is gathered; And
Adjustable aperture is located at the downstream of collimation lens.
18. device as claimed in claim 16, the difference of the frequency of wherein said two light beams equals the frequency of described reference signal.
19. device as claimed in claim 16 also comprises:
Driver, in order to driving described electrooptic modulator,
Wherein said signal generator is connected with described driver.
20. device as claimed in claim 16 also comprises:
Half-wave plate is arranged between described laser instrument and the electrooptic modulator.
21. device as claimed in claim 16 also comprises:
Rotation platform is in order to rotate described material.
22. device as claimed in claim 16, wherein said material can be twisted nematic liquid crystal box, OCB liquid crystal cell or TAC film.
CN2009101616490A 2009-07-24 2009-07-24 Device and method for measuring physical parameters of aeolotropic substance Pending CN101963495A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103477206A (en) * 2011-04-11 2013-12-25 肖特茉丽特株式会社 Optical anisotropic parameter measurement device, measurement method and measurement program
CN103616077A (en) * 2013-12-04 2014-03-05 中国人民解放军陆军军官学院 Measuring system and measuring method for vector polarized light polarization states of any columns
CN104266852A (en) * 2014-08-06 2015-01-07 哈尔滨工业大学 Anisotropism friction surface vibration feeding test platform
CN105943183A (en) * 2016-04-26 2016-09-21 哈尔滨工业大学 Infrared thermal wave imaging detection device based on heterodyne method
CN107036972A (en) * 2016-10-21 2017-08-11 华南师范大学 A kind of double-mode imaging method and device of anisotropic substance
CN110879040A (en) * 2019-09-19 2020-03-13 中北大学 Displacement measurement method of Michelson heterodyne interferometer based on double acousto-optic modulator
WO2023029978A1 (en) * 2021-09-01 2023-03-09 董仕 Wavefront-splitting one-way orthogonal optical path interferometer

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103477206A (en) * 2011-04-11 2013-12-25 肖特茉丽特株式会社 Optical anisotropic parameter measurement device, measurement method and measurement program
CN103477206B (en) * 2011-04-11 2015-11-25 肖特茉丽特株式会社 Optical anisotropy's parameter measuring apparatus, measuring method and measurement system
CN103616077A (en) * 2013-12-04 2014-03-05 中国人民解放军陆军军官学院 Measuring system and measuring method for vector polarized light polarization states of any columns
CN104266852A (en) * 2014-08-06 2015-01-07 哈尔滨工业大学 Anisotropism friction surface vibration feeding test platform
CN104266852B (en) * 2014-08-06 2016-08-31 哈尔滨工业大学 Anisotropy friction surface vibration feeding test platform
CN105943183A (en) * 2016-04-26 2016-09-21 哈尔滨工业大学 Infrared thermal wave imaging detection device based on heterodyne method
CN105943183B (en) * 2016-04-26 2017-09-01 哈尔滨工业大学 Infrared thermal wave imaging detection device based on heterodyne method
CN107036972A (en) * 2016-10-21 2017-08-11 华南师范大学 A kind of double-mode imaging method and device of anisotropic substance
CN107036972B (en) * 2016-10-21 2019-07-02 华南师范大学 A kind of double-mode imaging method and device of anisotropic substance
CN110879040A (en) * 2019-09-19 2020-03-13 中北大学 Displacement measurement method of Michelson heterodyne interferometer based on double acousto-optic modulator
WO2023029978A1 (en) * 2021-09-01 2023-03-09 董仕 Wavefront-splitting one-way orthogonal optical path interferometer

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