CN1019604B - Spectrophotometer - Google Patents

Spectrophotometer

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Publication number
CN1019604B
CN1019604B CN90100456.1A CN90100456A CN1019604B CN 1019604 B CN1019604 B CN 1019604B CN 90100456 A CN90100456 A CN 90100456A CN 1019604 B CN1019604 B CN 1019604B
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CN
China
Prior art keywords
wavelength
conversion table
motor
control device
rotation amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CN90100456.1A
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Chinese (zh)
Other versions
CN1044986A (en
Inventor
福间俊明
佐藤辰已
西垣日出久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1019251A external-priority patent/JPH0660844B2/en
Priority claimed from JP2215589A external-priority patent/JPH02201231A/en
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN1044986A publication Critical patent/CN1044986A/en
Publication of CN1019604B publication Critical patent/CN1019604B/en
Expired legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/06Scanning arrangements arrangements for order-selection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/06Scanning arrangements arrangements for order-selection
    • G01J2003/062Scanning arrangements arrangements for order-selection motor-driven
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804Plane gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

A spectrophotometer of the type using a pulse motor to rotate a diffraction grating through a speed reducing mechanism has a capability of constructing a conversion table according to a program, by which table a rotation amount of the motor is converted to a corresponding wavelength of output light from a monochromator . The spectrophotometer is capable of designating a calibration mode in which an emission peak at a known wavelength of light from a light source is detected, a coefficient in a conversion equation is determined on the basis of the known wavelength of the emission peak and a rotation amount of the motor at a time when the emission peak is detected, and the determined coefficient is used to construct the conversion table which is then stored in a nonvolatile memory. In an analysis mode, a rotation amount of the motor is converted to a corresponding wavelength in accordance with the conversion table in the nonvolatile memory.

Description

Spectrophotometer
The present invention relates to a kind of spectrophotometer, particularly relate to and a kind ofly make the rotation of dispersion element to scan certain wavelength coverage or to set up the spectrophotometer of a certain wavelength with motor.
Be equipped with on the spectrophotometer of diffraction grating, using sine gauge in the past as the mechanism of in certain wavelength coverage, scanning.In this mechanism, utilize a feed screw to move a nut, to promote from the outstanding sine gauge of the shaft extension of grating.Although the rotation amount of feed screw and wavelength are linear, the use feed screw can not fast feed in a wavelength coverage.It is more or less freely that the feasible rotation amount with pulse motor of recent improvement of computer science promptly converts desired functional value to.In this case, have this advantage of linear relationship between the rotation amount of feed screw and the wavelength and progressively lost its attractive force, and the difficulty of fast feed has become subject matter for the spectrophotometric user who adopts sine gauge mechanism in a wavelength coverage.On the other hand, directly make the spectrophotometer of this type of chromatic dispersion element rotation because simple in structure and cheap etc. former thereby universal day by day by a reducing gear.
By a reducing gear dispersion element is rotated in such spectrophotometer, even grating is used as dispersion element, the also non-linear relation of the rotation amount of motor and wavelength.If as dispersion element, the pass that grating begins from the reference position between the wavelength X of the angle θ that turned over and emergent light is with grating:
λ= (2d)/(n) cosφsinθ……(1)
Wherein, d is the grating constant of grating, and n is that the order of diffraction is inferior.As shown in Figure 4, angle Φ is half at incident light on the grating G and the angle between the diffraction light, that is the incident seam of monochromator and outgoing half (with respect to grating center) of stitching formed angle.Provide and describe the formula (1) that concerns between grating rotating angle and wavelength, described spectrophotometer, promptly directly make such spectrophotometer of dispersion element rotation by a reducing gear, the ROM(ROM (read-only memory) of a table is being stored in use) the rotation amount x of driving motor is converted into corresponding wavelength, this table links rotation amount x and wavelength by following formula:
λ=k·Sinpx(θ=px)…(2)
In formula (2), p is the constant by reducing gear decision, and K not only comprises the grating constant [seeing formula (1)] of grating, and comprises the amount that incident seam and outgoing seam with optical element such as monochromator interrelate.This tittle contains the error that is produced in processing and assembling monochromator assembly, even thereby the spectrophotometer of making by same design, this tittle of each is also slightly different.And, proceed from the reality, to be inconvenient for each spectrophotometer is equipped with a ROM (read-only memory) of storing a table of working out by actual measurement K according to formula (2), for this reason, usually adopt following method: set in advance a ROM, it is being stored according to many tables of formula (2) by the actual several K value establishments that record, and then this ROM is installed on each spectrophotometer of making.Before shipment is dispatched from the factory, proofread and correct test for each spectrophotometer, select the table an of the best the table in those are stored in ROM.Just the rotation amount of driving motor is converted into the wavelength of correspondence with selected table during use.
As mentioned above, directly make such one type spectrophotometer of dispersion element rotation via a reducing gear, be to use a conversion table that the motor rotation amount is converted into corresponding wavelength value by motor.Desirable way is, since the restriction of the machining precision of monochromator assembly, different conversion table of the essential outfit of every suit device, still, be actually by proofreading and correct a best is selected in test from several tables that prepare in advance table, it is used for subsequently spectrophotometric measurement.For this purpose, wish to prepare in advance the slightly different table as much as possible of content.The number of the table that can prepare is subjected to the restriction of the capacity of ROM (read-only memory) then, occurs sometimes can not get a best situation about showing and necessary with the situation of the intermediate value between two values in two different table as the best for a certain spectrophotometer.And for some device, the relation between rotation amount and the wavelength value may the not adaptive any table for preparing.Yet, do not have a kind of method of simple prior art can handle these problems.
Therefore, an object of the present invention is to provide a kind of spectrophotometer, it can be handled the problems referred to above and needn't prepare a large amount of conversion tables in advance.
According to a first aspect of the invention, spectrophotometer has the ability of bridge tabulation, will drive the rotation amount of the motor of a chromatic dispersion element, is scaled the wavelength value of corresponding monochromator emergent light by this conversion table.This monochromator can be selected a kind of correction mode, in this correction mode, detect the emission peak of known wavelength of the light of light source, the coefficient that uses in the bridge tabulation is that the rotation amount of driving motor when detecting emission peak and the known wavelength of described emission peak are determined, work out a conversion table with the coefficient of determining like this, it is stored in the nonvolatile memory of a control module then.At last, in analytical model, the rotation amount of driving motor is scaled corresponding wavelength value according to the conversion table in the storer.
The rotational angle theta of diffraction grating and the relation between the wavelength X are provided by formula (2), and wherein K comprises grating constant and optical element, such as the machining deviation of the position of slit.The K value of each device is slightly different each other.According to a first aspect of the invention, spectrophotometer has the ability that is scaled the table of corresponding wavelength X according to rotation amount with driving motor of formula (2) establishment.Therefore, by in correction mode via actual measurement definite K value, just can work out the table that is converted to λ from x.In each occasion of actual analysis, working out such table needs calculating consuming time.But in the present invention, deceive the table of making in advance and be stored in the nonvolatile memory, so in actual analysis, use this table just can immediately the motor rotation amount be scaled wavelength.
According to a second aspect of the invention, spectrophotometer has to be stored in is proofreading and correct the correction coefficient of measuring in the test by x to the single conversion table of λ and one in the ROM (read-only memory), takes out one from this conversion table and on dutyly just can obtain wavelength right value corresponding to the motor rotation amount with correction coefficient.This correction coefficient is stored in the nonvolatile memory of a control module.When using this spectrophotometric timing, the coefficient that the data of the table in the ROM are stored in the nonvolatile memory is proofreaied and correct, thereby work out a conversion table adaptive with described spectrophotometer, the table of finishing is stored in the random access memory, and the wavelength that is used for is thereafter measured.
More particularly, according to formula (2), with a predetermined K value: in a ROM, set in advance a conversion table from x to λ, in proofreading and correct test, utilize described table that wavelength and the known wavelength determined are made comparisons, to determine correction coefficient alpha, the wavelength that will obtain from the conversion table of ROM multiply by this correction coefficient alpha.Correction coefficient alpha is stored in the nonvolatile memory of control module.In actual measurement, the wavelength value corresponding to those x of taking out from ROM (read-only memory) multiply by α and is stored in a RAM(random access memory) lining is to form correct conversion table, and it is optimum for the spectrophotometer of being considered.In operation subsequently, the table of this among the RAM is used for the rotation amount of motor is converted into the right value of respective wavelength.
Fig. 1 is the skeleton view that is used in the monochromator in the spectrophotometer of the present invention;
Fig. 2 is the block diagram of the described spectrophotometer general structure of expression;
Fig. 3 is illustrated in the curve map of proofreading and correct the spectral energy characteristic of employed deuterium lamp in the test;
Fig. 4 is the synoptic diagram that is illustrated in the incident angle and the relation between emergence angle and the diffraction grating corner of the light on the diffraction grating.
Fig. 1 shows the monochromator that uses in spectrophotometer of the present invention, and Fig. 2 shows this spectrophotometric general structure. G among Fig. 1 represents a plane diffraction grating, and A represents the rotating shaft of grating G, and it is as the output revolving shaft of a reducing gear B. P represents a pulse motor, and its rotation is transferred to output revolving shaft A via the B of mechanism. S1 represents the incident seam of monochromator; S2 represents the outgoing seam; M1 is a collimating mirror, and its collimation makes it to incide on the grating G from the incident light of S1, and M2 is a camera speculum, it make the collimated light of diffraction be focused on the outgoing seam S2 a bit. Half of angle shown in Figure 1 equals the angle Φ in the formula (1). Be positioned at raster center and perpendicular to grating C2The orientation of the grating G of straight line when the straight line of angle Φ two five equilibriums is overlapped, be the reference position of this grating G. The conversion θ of grating begins to measure from this reference position.
Among Fig. 2, monochromator shown in Figure 1 represents with MC, and light source L1 and L2 are set in spectrophotometer; L1 is the short deuterium lamp of wave-length coverage, and L2 is the long tungsten lamp of wave-length coverage. A conversion speculum ml is in such a way mobile: if it inserts in the light path of L1, then the light of L2 incides in the monochromator M C; If it is removed from described light path, then the light of L1 incides in the MC. C represents a sample room. Pass this sample room from the light of MC outgoing. Sample is placed in the light path of the light of MC outgoing. PD represents a photo-detector, and its receives from MC and passes the light of sample room C. The output signal of photo-detector PD is exaggerated device AP amplifies, and by an interface IF feed-in control module K. Control module K comprises a central processing unit CPU, a read only memory ROM (has wherein write an operation sequence and a conversion table, a perhaps program that is used for bridge tabulation), a nonvolatile storage EEPROM and a random access memory ram. The whole operating process of control module K control system, and the luminosity data that provides via IF is provided. P represents a display, such as the cathode ray tube (CRT) display, is used for the information of display analysis result and other any needs. F represents an operation part, and the operator sends into control module K to various data or operational order by it.
First embodiment of the present invention is described below.
Stored the program that the formula (2) that concerns between the rotation amount x according to expression wavelength X and motor P is worked out a conversion table at the ROM in the control module K.Utilize internal light source L1 on spectrophotometer, to proofread and correct test by following step.L1 has the deuterium lamp of spectral pattern as shown in Figure 3, and it has spike at 486.0nm and 656.1nm place.Correction is carried out with these two peaks.As grating G during towards the rotation of zero wavelength direction, wavelength be zero place detect zero order diffracted light, survey near the output peak value of photo-detector zero wavelength, when recording the peak value center, corresponding to the reference position as grating, the orientation of the diffraction grating at the peak value center that is detected, pulse motor P is from the x of the amount substitution formula (2) of this reference position rotation.This numerical value x obtains by beginning the driving pulse of feed-in pulse motor P counted when grating G is in its reference position.Driving pulse is to be supplied with and counted by the CPU in the control module K.When along with grating rotates and the rotation amount of paired pulses motor P when counting from its reference position towards the longer wavelength scope, the emission peak of 486.0nm and 656.1nm enters in the photo-detector PD successively in the spectrum of the light of L1.Then survey emission peak at 486.0nm and 656.1nm.When recording the peak value center, will connect corresponding to the rotation amount x of the pulse motor P that detects the peak value center and wavelength 486.0nm or 656.1nm.Determine the K value of formula (2) lining according to the x value that obtains above and the wavelength that is stored in two emission peaks in the ROM in advance.The K value is got the mean value that two emission peaks is calculated the value of gained.Thereafter, according to the program composition conversion table in the ROM and write among the nonvolatile memory EEPROM.
The program that is used for bridge tabulation in ROM is calculated wavelength X to rotate each the x value that records one by one at pulse motor P.From formula (2) as can be known, the calculating of λ relates to the sine value that calculates Px.In order to shorten computing time, calculate the value of Sinpx in advance for the numerical value of some x, and be stored in the ROM, and between two parties x value, the value of Simpx is then calculated by suitable interpolation method.The Sinpx that calculates like this multiply by the k value, and this product writes among the nonvolatile memory EEPROM with the value of the x of each step gained of motor rotation.
When carrying out actual analysis, corresponding x(that is pulse motor p are from the amount of the reference position rotation of grating G) wavelength value can from the conversion table in the nonvolatile memory EEPROM, obtain.
In above-mentioned first embodiment, proofread and correct test and only use two emission peaks, therefore, by the K value of substitution formula (2) is on the mean value theory that the K value that these two emission peaks record is calculated, if with diffraction grating as dispersion element, then only emission peak just is enough to reach the purpose of correction, yet, in fact, the K value in the formula (2) also is the function of wavelength, because it is subjected to such as grating constant influence of factors such as variation with the position difference on the grating.If the K value is measured according to several emission peaks and is handled to obtain a function K(x with least square method or with additive method), and conversion table is with K(x) the form establishment of Sinpx, then can finish correction in a point-device mode.
Under the situation of only proofreading and correct test, second embodiment of the present invention described below with an emission peak.
In the ROM of control module K, stored a conversion table, the relation between the rotation amount of its expression wavelength X and motor P according to formula (2).This table is relevant with spectrophotometric design.Use internal light source L1, finish on spectrophotometer by following step and proofread and correct test.L1 is a deuterium lamp, and it has the wavelength characteristic curve that a spike is as shown in Figure 3 arranged at the 656.1nm place.Proofread and correct with this peak.As grating G during, record zero order diffracted light at zero wavelength place towards the direction rotation of zero wavelength.Survey the output peak of the photo-detector PD zero wavelength near then.When recording the peak value center, the reference position that is used as diffraction grating G corresponding to the orientation of the diffraction grating G of the peak center of being measured, and pulse motor P from the amount of this reference position rotation by the X of substitution formula (2), this amount X begins the driving pulsation of feed-in pulse motor P counted when grating G is in its reference position and obtains.Driving pulse is to be supplied with and counted by the CPU in the control module K.When along with grating drives and the rotation amount of paired pulses motor P when counting from its reference position towards the longer wavelength scope, the emission peak that is in 656.1nm in the spectrum of the light of L1 enters in the photo-detector PD.Then seek the emission peak of 656.1nm, when detecting the peak value center, will interrelate corresponding to rotation amount x and the wavelength 656.1nm of the pulse motor P at the peak value center that records.On the other hand, if the value of wavelength X is to determine according to the x value that is stored in the conversion table in the ROM, then as a result λ usually and 656.1nm different.The right value of the spectrophotometric wavelength of being considered can multiply by correction coefficient alpha=656.1/ λ ' by the λ that will obtain like this and obtain.This correction coefficient alpha is write nonvolatile memory EEPROM, and the step of proofreading and correct test so far finishes.
Spectrophotometer operating process in actual use among second embodiment of the present invention is described below.At first, the conversion table in the ROM is read the λ value corresponding to those x, then these is on dutyly write RAM to be stored in the correction coefficient alpha in the nonvolatile memory EEPROM with these products, and they are associated with the X value.The result is, at the rotation amount that forms an expression x(pulse motor P in the RAM) and λ (wavelength) between the conversion table of relation, its represents a concrete spectrophotometric characteristic being considered.In actual measurement, this conversion table is used for determining wavelength from the rotation amount of pulse motor P.
In above-mentioned second embodiment, only proofread and correct test with an emission peak.If necessary, when each wavelength coverage was determined correction coefficient, available more than one emission peak did to proofread and correct test.In second embodiment, the conversion table relevant with spectrophotometric design is written into ROM, in the timing of practical application spectrophotometric, the data in the conversion table be multiply by correction coefficient.If what store in ROM is a conversion table from Px to Sinpx, and if in nonvolatile memory EEPROM storage by in proofreading and correct test through actual measurement and the K value in definite formula (2) then can obtain identical result.
In above-mentioned two embodiment, in proofreading and correct test, used from the emission peak in the spectrum of the light of the inner light source in the spectrophotometer, this has such advantage: not only Zhuan Zhi fabricator, and user all can proofread and correct in case of necessity thinking.Yet, should be noted that, also can use outer light source to proofread and correct.
In the above-described embodiments, the reference position of diffraction grating is to measure by the peak value center of detecting zero order diffracted light.Also interchangeable another kind of method detects a pin that is in an ad-hoc location in the grating rotating shaft with photoelectricity or mechanical hook-up, and when detecting this root pin, grating just in time reaches the reference position.
According to the present invention, can use the suitable rotation amount of opening and closing from the x(dispersion element for each spectrophotometer) to the conversion table of λ (wavelength), and no matter how may be present in each mismachining tolerance in installing.Spectrophotometer of the present invention can be done point-device measurement and the king-sized ROM of capacity needn't be housed.

Claims (9)

1, a kind of spectrophotometer is characterized in that comprising:
Dispersion element;
Light source;
Rotate the pulse motor of described dispersion element;
Control the control device of described dispersion element rotation, described control device can work in correction mode and analytical model; Described control device has CPU (central processing unit), and nonvolatile memory and has the memory storage of reduction formula that rotation amount with described motor is converted into the emergent light wavelength of described light source;
In described correction mode, described control device carry out search operation detect respectively according to the known wavelength of two emission peaks of this light source emergent light and when in search operation, detecting each emission peak each time of described motor rotate value and two definite coefficient values; Described control device is defined as the coefficient of described reduction formula the mean value of described two coefficient values; Described control device is determined a conversion table by described reduction formula and it is stored in the described nonvolatile memory;
In described analytical model, described control device utilization is stored in the described emergent light wavelength that conversion table in the described nonvolatile memory is converted into the rotation amount of described motor described light source.
According to the described beam split photometry of claim 1, it is characterized in that 2, described conversion table is according to writing program composition in the ROM (read-only memory) in advance, described program comprises described reduction formula.
3, by the described spectrophotometer of claim 1, it is characterized in that described reduction formula is:
λ=K·Sinpx
Wherein λ represents described emergent light wavelength, and K represents described coefficient, and P represents to depend on a constant of described reducing gear, and x represents the described rotation amount of described motor.
According to the described spectrophotometer of claim 1, it is characterized in that 4, described coefficient is the mean value of two coefficients obtaining from two emission peaks.
According to the described spectrophotometer of claim 1, it is characterized in that 5, described coefficient is the function of the described rotation amount of described motor, it is to determine according to the rotation amount of the correspondence of the emission peak of a plurality of known wavelength and described motor.
6, a kind of spectrophotometer is characterized in that comprising:
Dispersion element;
Light source;
Rotate the pulse motor of described dispersion element;
Control the control device of described dispersion element rotation, described control device can work in correction mode and analytical model; Described control device has random access memory, ROM (read-only memory), and CPU (central processing unit), nonvolatile memory and has the memory storage of reduction formula that rotation amount with described motor is converted into the emergent light wavelength of described light source;
Described ROM (read-only memory) stores the conversion table that the rotation amount of described motor is converted into the emergent light wavelength of described light source;
In described correction mode, described control device carry out search operation detect respectively according to the known wavelength of two emission peaks of this light source emergent light and when in search operation, detecting each emission peak each time of described motor rotate value and two definite coefficient values; The rotation amount of described motor was determined correction coefficient when described control device detected described emission peak according to the known wavelength of at least one emission peak of this light source emergent light with in search operation, the wavelength that takes out from described first conversion table is multiplied by the wavelength that this correction coefficient obtains proofreading and correct, and this correction coefficient is stored in the described nonvolatile memory;
In described analytical model, described control device is worked out second conversion table according to described first conversion table and the described correction coefficient that is stored in the described nonvolatile memory, second conversion table is stored in described random access memory, and described second conversion table of described control device utilization in described RAM is converted into the described rotation amount of described motor the wavelength of correction.
According to the described spectrophotometric of claim 6, it is characterized in that 7, the reduction formula of described first and second conversion tables is:
λ=K·Sinpx
Wherein λ represents described emergent light wavelength, and K represents a coefficient, and p represents to depend on a constant of described reducing gear, and x represents the described rotation amount of described motor.
8, according to the described spectrophotometer of claim 6, it is characterized in that, described first conversion table be one with the relevant conversion table of described spectrophotometric design.
9, by the described spectrophotometer of claim 6, it is characterized in that, each wavelength coverage of being divided is got in touch corresponding emission peak determine a plurality of correction coefficient, these correction coefficient are stored in the described nonvolatile memory, and be used for working out described second conversion table, this second conversion table has a plurality of zones, corresponding to the wavelength coverage of described each division.
CN90100456.1A 1989-01-28 1990-01-24 Spectrophotometer Expired CN1019604B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP19251/1989 1989-01-28
JP19251/89 1989-01-28
JP1019251A JPH0660844B2 (en) 1989-01-28 1989-01-28 Spectrophotometer
JP2215589A JPH02201231A (en) 1989-01-31 1989-01-31 Spectrophotometer
JP22155/89 1989-01-31

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Publication Number Publication Date
CN1044986A CN1044986A (en) 1990-08-29
CN1019604B true CN1019604B (en) 1992-12-23

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CN1044986A (en) 1990-08-29
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US5268737A (en) 1993-12-07
EP0381053A1 (en) 1990-08-08
DE69002955T2 (en) 1994-04-28

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