CN101907758A - The off-centre of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting - Google Patents
The off-centre of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting Download PDFInfo
- Publication number
- CN101907758A CN101907758A CN2010102001072A CN201010200107A CN101907758A CN 101907758 A CN101907758 A CN 101907758A CN 2010102001072 A CN2010102001072 A CN 2010102001072A CN 201010200107 A CN201010200107 A CN 201010200107A CN 101907758 A CN101907758 A CN 101907758A
- Authority
- CN
- China
- Prior art keywords
- optical element
- mentioned
- lens
- offset
- tested
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Lens Barrels (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The off-centre that the invention provides a kind of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting, and it only is positioned at the 1st lens (S1) that lean on the measuring light light incident side most.Secondly, measure the offset (S2) of the 1st lens, calculate the position adjustment amount (S3) of the 1st lens based on this measured value.Then, adjust the off-centre of the 1st lens, judge whether to become critical value following (S6) so that this offset, is measured the offset (S5) of the 1st lens once more near 0 (S4).Return step 3 during greater than critical value, when critical value is following with the bonding inside (S7) that remains in lens barrel (61) of the 1st lens.Afterwards, judge whether to exist the next lens (S8) that to install, if exist next lens then these lens to be repeated the processing of above-mentioned steps (1～7).Thereby when the multi-disc optical element is disposed at coaxial group body, as entire system, the offset of optical element is measured, the eccentric adjustment and the assembling high precision of optical element and carrying out effectively at tested optical elements sets body.
Description
Technical field
The off-centre that the present invention relates to a kind of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting, its coordinate data based on the index picture (censuring picture) that the tested surface irradiation measuring light of optical elements such as group lens etc. is formed is measured the offset of tested optical element, and adjusts this and assemble tested optical elements sets body eccentric the time.
Background technology
Known in the past have, and in the operation of making the device that uses lens, measures the offset of each lens, based on this measured value off-centre alleviated so that lens remain on the method in the lens frame (lens barrel).Wherein, have, use the method (with reference to following patent documentation 1～3) of the measuring method that is called autocollimation method as the method for the offset of measuring lens is known.
In these offset measuring methods, making tested optical element be that the measuring light that the index pattern of shape is stipulated in projection is shone at tested surface when rotating in the center with regulation (institute decide) axle, and the index that is formed by reflected light or transmitted light from tested surface is looked like on the shooting face that images in.This index picture is taken at the position of rotation of each tested surface, and obtains the coordinate of this inconocenter point at each position of rotation.If tested surface off-centre, then each inconocenter point of the index picture of taking at this each position of rotation is scattered in along 1 circle in the coordinate system of setting with respect to shooting face, so can obtain the offset of tested surface from its branch's situation.
Particularly, obtain the circle (hereinafter referred to as " approximate circle ") that is suitable for each inconocenter point and this center is set as datum mark, distance or approximate radius of a circle till from this datum mark to inconocenter point arbitrarily can be obtained as the offset of tested surface.
And the offset of tested lens calculates based on the central point distance each other of the above-mentioned circle of obtaining at each face in this table.
Utilize this method to measure the offset of tested lens, and adjust the processing of the position of tested lens, so that offset becomes 0 based on this measured value.
Patent documentation 1: the open 2005-55202 communique of Jap.P.
Patent documentation 2: the open 2007-17431 communique of Jap.P.
Patent documentation 3: the open 2007-327771 communique of Jap.P.
Yet, in said method, tested lens become signal-lens situation be illustrated, but in various lens combinations, also known have the multi-disc lens configuration in method coaxial, the group lens type.But in these group lens, how to carry out the measurement of lens deviations amount, the adjustment of off-centre and the assembling ability high precision and the effective this point of lens, do not establish clear and definite method at each each lens.
Summary of the invention
The present invention finishes in light of this situation, its purpose is, provide a kind of at tested optical element when the multi-disc optical element is disposed at coaxial element, but adjust assemble method and the eccentric apparatus for assembling of adjusting as the entire system high precision and the off-centre of optical element of carrying out the assembling of the measurement of the offset of optical element, eccentric adjustment and optical element effectively.
The off-centre of optical element involved in the present invention is adjusted assemble method, on a plurality of optical elements are coaxial in lens barrel, arrange in the tested optical elements sets body that forms, measure this optical element offset separately, and carry out the assembling of this tested optical elements sets body when adjusting this offset, it is characterized in that
At first, in should constituting each optical element of above-mentioned tested optical elements sets body, only should be disposed in the orientation the 1st optical element of any one party end be configured in above-mentioned coaxial on, and measure the offset of the 1st optical element, adjust the desired location of the 1st optical element based on this measured value, so that the offset of the 1st optical element diminishes, make the 1st optical element remain on lens barrel in the position of this adjustment
Then, should be with respect to the 1st optical element and in abutting connection be disposed at the 2nd optical element with the light incident side opposition side of above-mentioned measuring light be configured in above-mentioned coaxial on, and measure the offset of the 2nd optical element, the desired location of adjusting the 2nd optical element based on this measured value makes the 2nd optical element remain in lens barrel so that the offset of the 2nd optical element diminishes in this adjusted position.
After, similarly, after, similarly, for adjusting above-mentioned desired location while measure above-mentioned offset successively, and make it remain on lens barrel in abutting connection with the optical element that is disposed at the light incident side opposition side of above-mentioned measuring light.
And, the measurement of preferred above-mentioned offset is undertaken by following, promptly shine the measuring light of projection set quota pattern at tested surface, when making above-mentioned tested surface with the predetermined axis be the center rotation, take the index picture that is formed at shooting face by reflected light or transmitted light at each at least 3 different position of rotation or 2 position of rotation of each 180 degree of being separated by from this tested surface, the coordinate of the inconocenter point of specific respectively each the index picture in each this position of rotation shooting in the coordinate system of setting with respect to above-mentioned shooting face is measured the offset of above-mentioned tested surface based on the coordinate data of this each specific inconocenter point.
And the measurement of the offset of preferred above-mentioned optical element is following to be carried out, promptly separately to the table of above-mentioned optical element the inside, and the circle of specific These parameters picture by each each anglec of rotation of afore mentioned rules, and obtain the coordinate of the central point of this specific circle,
Afterwards, calculate that obtain, poor, this value that calculates is made as the offset of above-mentioned optical element the coordinate of the central point of the table the inside above-mentioned circle separately of above-mentioned optical element.
On the other hand, the off-centre of optical element involved in the present invention is adjusted apparatus for assembling, a plurality of optical elements are arranged in the tested optical elements sets body form on coaxial in lens barrel, measure this optical element offset separately, and carry out the assembling of this tested optical elements sets body when adjusting this offset, it is characterized in that possessing:
The optical element collocation mechanism successively disposes each optical element that should constitute above-mentioned tested optical elements sets body from the light incident side of above-mentioned measuring light above-mentioned on coaxial;
The offset measuring mechanism, when at every turn above-mentioned coaxial on configuration during above-mentioned optical element, use above-mentioned measuring light to measure the offset of the above-mentioned optical element of this configuration;
The desired location adjusting mechanism is adjusted the desired location of this optical element according to this measurement result, so that the offset of this optical element diminishes;
The optical element maintaining body makes this optical element remain on lens barrel in the position of this adjustment.
And preferred above-mentioned optical element collocation mechanism possesses the above-mentioned optical element of conveying optical element adsorbing mechanism is separately arranged.
And, preferred above-mentioned optical element collocation mechanism possess a plurality of be disposed at above-mentioned optical element around and for the offset of adjusting this optical element, only push the piezoelectric element of the side small quantity of this optical element.
In addition, preferred above-mentioned a plurality of piezoelectric elements constitute same relatively optical element and work in coordination with the group of adjusting, possess above-mentioned piezoelectric element is moved to and each self-corresponding position of this optical element, so that can be successively to the PZT travel mechanism of above-mentioned each self-adjusting offset of a plurality of optical elements, this PZT travel mechanism possesses makes above-mentioned piezoelectric element to PZT upper and lower travel mechanism that the orientation of above-mentioned optical element is moved and carry out PZT horizontal direction travel mechanism to the operation of the above-mentioned piezoelectric element of radially coming in and going out of above-mentioned optical element.
The off-centre of optical element involved in the present invention is adjusted in the assemble method, be set as follows, promptly in should constituting each optical element of tested optical elements sets body, only should be disposed in the optical element orientation the 1st optical element of any one party end be configured in above-mentioned coaxial on, and measure the offset of the 1st optical element, adjust the desired location of the 1st optical element based on this measured value, so that the offset of the 1st optical element diminishes, make the 1st optical element remain on lens barrel in the position of this adjustment, then, should be with respect to the 1st optical element and in abutting connection be disposed at the 2nd optical element with the light incident side opposition side of above-mentioned measuring light be configured in above-mentioned coaxial on, and measure the offset of the 2nd optical element, adjust the desired location of the 2nd optical element based on this measured value, so that the offset of the 2nd optical element diminishes, make the 2nd optical element remain on lens barrel in the position of this adjustment, after, similarly, for should be, adjust above-mentioned desired location when measuring above-mentioned offset successively and make it remain on lens barrel in abutting connection with the optical element that disposes with the light incident side opposition side of above-mentioned measuring light.
Thereby, because each optical element becomes and remain in lens barrel when the light incident side of measuring light is adjusted offset successively, so for example, when measuring the offset of the 2nd optical element, also can not consider the offset of the 1st optical element that kept, the offset of measuring this moment can be used as and results from the offset of the 2nd optical element and use.In the same manner, afterwards, the optical element of measured offset need not considered the influence of the offset of the optical element of adjusted, maintenance so far, and can be only as the offset of this optical element.
Thereby assembly object is when the tested optical elements sets body of arranged coaxial multi-disc optical element, but as the entire system high precision and carry out the measurement of the offset of optical element, eccentric adjustment and the assembling of optical element effectively.
And the off-centre of optical element involved in the present invention is adjusted in the apparatus for assembling, possesses: the optical element collocation mechanism should constitute each optical element of tested optical elements sets body successively in coaxial configuration from the light incident side of measuring light; The offset measuring mechanism when above-mentioned optical element being disposed at above-mentioned coaxial go up, uses above-mentioned measuring light to measure the offset of the above-mentioned optical element of this configuration; The desired location adjusting mechanism is adjusted the desired location of this optical element according to this measurement result, so that the offset of this optical element diminishes; The optical element maintaining body makes this optical element remain on lens barrel in the position of this adjustment.Thereby assembly object is when the tested optical elements sets body of arranged coaxial multi-disc optical element, but as the entire system pinpoint accuracy and carry out the measurement of the offset of optical element, eccentric adjustment and the assembling of optical element effectively.
Description of drawings
Fig. 1 is the process flow diagram that the off-centre of the related optical element of expression one embodiment of the present invention is adjusted the order of assemble method.
Fig. 2 is used to illustrate that being used in off-centre shown in Figure 1 adjusts the concise and to the point figure that the off-centre of assemble method is adjusted apparatus for assembling.
Fig. 3 is used for illustrating in embodiment method shown in Figure 1 being used to carry out the eccentric concise and to the point figure ((A) is that 2 adjustment methods, (B) are 3 adjustment methods) that adjusts method of operating.
Fig. 4 is the concise and to the point figure (from the measurement of below) that is used to illustrate the major part of embodiment method shown in Figure 1.
Fig. 5 is the concise and to the point figure (from the measurement of top) that is used to illustrate the major part of embodiment method shown in Figure 1.
Fig. 6 is the concept map that is used to illustrate the PZT travel mechanism of present embodiment device.
Fig. 7 is that expression is carried out from the measurement of top, the eccentric concise and to the point figure that adjusts apparatus for assembling.
Among the figure: 1, the eccentric apparatus for assembling of adjusting of 201-, 5,5A, 5B, the tested lens combination body of 205-, 10, the 210-measuring head, 11, the 211-light source, 12,212-reticule (レ チ Network Le) plate, 13,213-beam separator (PVC one system ス プ リ ッ タ), 14, the 214-collimation lens, 15, the 215-object lens, 16, the 216-imaging apparatus, 17, the 217-video camera, 20,220-base (base station), 21,221-mounting member, 22,222-XY axle objective table (ス テ one ジ), 23, the 223-rotatable stage, 30,230-analyzes operational part, 31,231-analyzes mounting, 32, the 232-image display device, 33, the 233-input media, 40,240-Z axle objective table, 41, the 241-support, 41A-horizontal direction travel mechanism, 41B-above-below direction travel mechanism, 42, the 242-guide part, 43, the 243-movable part, 51,51A～C, 52,251, the 252-lens, 51a, 51b, 52a, 52b, 251a, 251b, 252a, the 252b-lens face, 53,61A, 61B, 253-lens barrel (lens frame), 62A～E-PZT (piezoelectric element), 62Aa～Ea-pushes leading section, 63-spaced ring, F-optical convergence point, Z, the L-optical axis, the E-turning axle.
Embodiment
Below, with reference to accompanying drawing embodiment involved in the present invention is elaborated.Fig. 2 is to use the brief configuration figure that adjusts the device of assemble method in the off-centre of the related optical element of one embodiment of the present invention.
Promptly, this off-centre is adjusted the offset that apparatus for assembling 1 is measured each tested lens of tested lens combination body 5, and the offset that is adjusted to this measurement roughly becomes 0, possesses following formation under this state: measuring head 10, rotatably keep tested lens combination body 5 base 20, be used to calculate the various computings etc. of offset analysis operational part 30, above-below direction keeps the Z axle objective table 40 of measuring head 10 movably in the drawings.
Above-mentioned measuring head 10 possesses: output be radiated at the light beam of above-mentioned tested lens combination body 5 light source 11, make from the light beam of light source 11 output and pass through, for example have criss-cross slit (hereinafter referred to as " reticule ") reticule plate 12, will from the beam separator 13 of light beam top reflection in figure of reticule plate 12, with the light beam of incident be made as parallel beam collimation lens 14, make the parallel beam converge at the video camera 17 of the imaging apparatuss 16 such as object lens 15, lift-launch CCD or CMOS of optical convergence point F.
On the other hand, above-mentioned tested lens combination body 5 remains on 2 lens 51,52 in the lens barrel 53 and constitutes (in the present embodiment, for convenience of description, and group body 5 is described by the situation that 2 lens constitute, but can handle too by the situation that the lens more than 3 constitute group body 5), and constitute each lens face 51a, 51b at these lens 51,52, among 52a, the 52b, (the focus of lens face 52a (the paraxial center of curvature) C of the focus face of the lens face 52a of downside among the figure of lens 52
3Residing; Omit diagram) be arranged in lens face 51a than the figure downside of lens 51 more by the figure below.
Above-mentioned base 20 possesses following formation: the mounting member 21 of the above-mentioned tested lens combination body 5 of mounting, support the XY axle objective table 22 and the rotatable stage 23 of this mounting member 21.XY axle objective table 22 is to carry out the objective table that mounting is used when the position of the tested lens combination body 5 of mounting member 21 and measuring head 10 is adjusted, and constitutes and can move the tested lens combination body 5 of mounting in mounting member 21 to the direction vertical with the optical axis L of this tested lens combination body 5.And rotatable stage 23 constitutes mounting is rotated as the center with illustrated turning axle E in the tested lens combination body 5 of mounting member 21.And, be equipped with the through hole that continues in mounting member 21 at each central portion of XY axle objective table 22 and rotatable stage 23, can carry out the incident outgoing of the light beam between measuring head 10 and the tested lens 51,52 by this through hole.
And above-mentioned analysis operational part 30 possesses following formation: the image display device 32 of analytical equipment 31, display analysis result or each image etc. each graphical analysis of taking when measuring etc., that be made of computing machine etc., be used to carry out the input media 33 to the various inputs of analytical equipment 31.
And, each the tested lens 51,52 that constitutes tested lens combination body 5 in lens barrel 53 coaxial on configuration successively, but preferably constitute conveying and the setting of carrying out these each tested lens 51,52 by aut.eq..In this case, preferred aut.eq. possesses, for example can pass through flexible (Off レ キ シ Block Le な) sucker vacuum suction lens surface, the lens adsorbing mechanism.And, preferably possess the transfer arm mechanism that keeps the lens adsorbing mechanism and make it to move etc.
And tested lens combination body 5 carries out off-centre adjustment by the offset adjusting mechanism shown in Fig. 3 (A) or Fig. 3 (B), so that the offset of above-mentioned measurement is near 0 (preferably making it to become 0).
Promptly, Fig. 3 (A) is that expression is used to implement to use 2 PZT to carry out the figure that eccentric 2 of adjusting adjust the mode of method, and the outer peripheral face configuration of the lens barrel 61 that constitutes along each lens 51,52 is remained in assigned position has flexual columniform adjustment instrument 65.Corresponding to each lens equipping position of lens barrel 61, be provided with the hole portion 66 of running through wall portion at per 90 degree of its all direction, be provided with these hole portions 66 chimeric and be connected to the protuberance 67 of lens 51,52 at adjustment instrument 65.In addition, be provided with and have PZT62A, the B that pushes leading section 62Aa, Ba, to allow to push 2 protuberances 67 of adjacency in these protuberances 67.
And, Fig. 3 (B) is that expression is used to implement to use 3 PZT to carry out the figure that eccentric 3 of adjusting adjust the mode of method, all direction 120 degree of each of the lens barrel 61A that each lens 51,52 is remained in assigned position and constitute are provided with the 66A of hole portion that runs through wall portion, and be provided with the 66A of these hole portions chimeric separately and be connected to the side of lens 51 PZT62C, D, E push leading section 62Ca, Da, Ea.
And, even in the arbitrary mode shown in Fig. 3 (A) and Fig. 3 (B), PZT62A, B, C, D, E also can be provided with at each each the tested lens 51,52 that constitutes tested lens combination body 5 respectively, can make: with the amount (branch) corresponding PZT62A, B, C, D, E are set, and possess and make it the PZT above-below direction travel mechanism that moves to the lens arrangement direction with 1 tested lens 51,52.And the control of the moving of these PZT62A, B, C, D, E, driving etc. gets final product according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31.And, as above-mentioned, when setting makes PZT62A, B, C, D, E to PZT above-below direction travel mechanism that the lens arrangement direction moves, owing to need for the time being to make PZT62A, B, C, D, E operation along the radially discrepancy (go out and go into れ) of lens by PZT horizontal direction travel mechanism, so preferably constitute the related control of the operation that is taken into of this PZT62A, B, C, D, E, also carry out according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31.
Below, adjust assemble method with the off-centre of the related optical element of the flowchart text present embodiment of Fig. 1.
The off-centre of this optical element is adjusted assemble method, at first, only is positioned at the 1st lens (S1) that lean on the measuring light light incident side most.
Secondly, use eccentric adjusting apparatus for assembling shown in Figure 21 to measure the offset (S2) of the 1st lens.
Secondly, based on the offset of in above-mentioned steps 2 (S2), measuring, calculate the position adjustment amount (S3) of the 1st lens with formula described later (A), (B) etc.
Secondly, use the eccentric adjustment shown in Fig. 3 (A), (B) etc. etc., adjust the off-centre of the 1st lens, so that this offset is near 0 (S4).
Secondly, with the measurement of the offset of above-mentioned steps 2 (S2) in the same manner, measure the offset (S5) of the 1st lens once more.
Secondly, judge whether the offset of measuring becomes below the critical value of regulation (decide), that is, for example judgement has become the less value (S6) that can ignore degree in above-mentioned steps 5 (S5).
Secondly, the result of the judgement of above-mentioned steps 6 (S6), if judge into below the critical value of regulation, then enter step 7 (S7), if judge the critical value that becomes greater than regulation, then return step 3 (S3), with the calculating of position adjustment amount in the above-mentioned steps 3 (S3) in the same manner, make it calculate the position adjustment amount (S3) of the 1st lens based on offset of measuring.
On the other hand, the result of the judgement of above-mentioned steps 6 (S6) is if judge into below the critical value of regulation, then enter step 7 (S7), as shown in Figure 4, in this step 7 (S7), the state bonding (following) of adjusting the 1st lens with the position remains in the inside of lens barrel 61.
Afterwards, judge whether to exist the next lens that to install,, then finish this routine (Le one チ Application) if this judged result is not have next lens, if also have next lens, then make it carry out the processing of step 1～7 (S1～7) on the other hand for these lens.
As a result, all lens that constitute tested lens combination body 5 are carried out eccentric adjustment and the bonding maintenance in lens barrel 61 successively, finish assembling.
Below, with Fig. 4 the adjustment of each lens 51A, B, C is described in proper order.
In addition, in this example, constitute tested lens combination body 5 by 3 lens.
Shown in the concept map of Fig. 4, carry out in proper order by the equipping position of lens 51A, lens 51B, lens 51C from the measuring light of the object lens 15 of the measuring head 10 that is disposed at the below.
In the method for present embodiment, by the offset that the order of measuring light incident is carried out lens 51A, B, C measure, eccentric adjust and the lens barrel 61 of lens 51A, B, C in a series of processing (in Fig. 4, (A), the order of (B), (C)) of bonding maintenance.In addition, the processing between each lens is switched by Z axle objective table 40 above-below direction in figure being driven and carrying out in alignment with the position of the measuring basis that becomes each lens again.That is, for example by with the focal position F of object lens 15 in alignment with the focal position of the lens face that should measure (C for example
3) and carry out.
With this order assembling lens, then carry out carrying out after the off-centre adjustment of lens 51A the offset of lens 51B and measure, do not get final product based on the off-centre adjustment that this measured value only carries out lens 51B so do not comprise the offset of lens 51A in the offset of measuring this moment substantially.And secondly,, carry out the offset of lens 51C and measure, but roughly do not comprise the offset of lens 51A or 51B in the offset of measuring this moment and get final product based on the off-centre adjustment that the measured value of this moment only carries out lens 51C.In addition, so measuring head 10 is disposed at when below, also can not be provided with as shown in Figure 5, keep the spaced ring 63 of usefulness at interval.
And, with above-mentioned opposite, if with the offset that carries out lens 51A, B, C with the order of the reversed in order of measuring light incident measure, eccentric adjust and the lens barrel 61 of lens 51A, B, C in bonding maintenance, even then carry out the eccentric lens of adjusting for the time being, when the offset that carries out next lens is measured, also cause measuring and become to have off-centre, it is extremely complicated that the off-centre adjustment of each lens of formation group lens or entirety of lens package become, so not preferred.
And, ultraviolet curing (sclerosis) type bonding agent etc. is preferably used in bonding maintenance in the lens barrel 61A of said lens 51A, B, C, at this moment, preferably near lens barrel 61A, set ultraviolet radiation source, and only be controlled at moment driving light source that needs are adhesively fixed.In addition, the control of preferred this moment also constitutes according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31 and carries out.
According to the present embodiment method, measurement by will carrying out the offset of lens, eccentric adjust and the order of the lens of a succession of processing of the bonding maintenance of lens from the light incident side setting of measuring light, can simply and carry out the off-centre adjustment and the bonding maintenance of tested lens effectively.
In addition, the inventive method is not limited to the situation that measuring head 10 is configured in the below as shown in Figure 4, for example as shown in Figure 5, measuring head 10 can be configured in the top, utilization also can be carried out from the measuring light of object lens 15 outgoing of this measuring head 10, can embody roughly the same action effect.In addition, this moment, importantly configuration space kept the known spaced ring of usefulness between each lens 51A, B, C.
And, under the above-mentioned situation, order by measuring light incident, promptly as lens 51A, lens 51B, lens 51C, from figure upper side carry out successively offset measure, eccentric adjust and the lens barrel 61 of lens 51 in each of bonding maintenance handle (in Fig. 5) with the order of (A), (B), (C).
And, as shown in Figure 6, the present embodiment device possesses as PZT travel mechanism and makes the PZT above-below direction 41B of travel mechanism that PZT62A, B, C, D, E move to the lens arrangement direction and make PZT62A, B, C, D, the E PZT horizontal direction 41A of travel mechanism along the operation of radially coming in and going out of lens.Fig. 6 is the concise and to the point figure that is used to illustrate the concrete working method of these mechanisms.In addition, in fact, from lens 51A, B, C around 3 directions, the figure that shown in Fig. 3 (B), PZT62C, D, E is worked with respect to each lens 51A, B, C, but in Fig. 6 for convenience of description, the operation that mainly is conceived to PZT62C describes.
Promptly, shown in Fig. 6 (A), the PZT62C that faces mutually with the side of the lens 51A that is positioned at the hypomere of lens barrel 61A pushes the 66A of hole portion that leading section (head) 62Ca is inserted into lens barrel 61A, this pushes pushing the only mobile small quantity of leading section 62Ca and carry out by making according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31 with respect to pressing position adjustment of lens 51A operation of leading section 62Ca, so that these lens 51A is set in accurately the position of regular (regular).In addition, push leading section (head) 62Da, Ea for PZT62D, E (with reference to Fig. 3 (B)), also carry out and push leading section 62Ca identical operations, thus the result become utilize push leading section 62Ca, 62Da, Ea carries out the position adjustment of lens 51A from 3 directions around it.
So, then then carry out the same pressing position adjustment operation of lens 51B, lens 51C successively if the pressing position of lens 51A is adjusted EO.Fig. 6 (B) is the situation that pressing position adjustment when operation of lens 51B carried out in expression, this pressing position adjustment operation itself is carried out in the same manner with the pressing position adjustment operation of said lens 51A, but from the state of Fig. 6 (A) to the move operation of the PZT62C of the state of Fig. 6 (B), it is moved, so possess the PZT horizontal mobile mechanism 41A that PZT62C is moved to horizontal direction along last direction (Z direction in the drawing) with original state.That is,, move to horizontal direction (among the figure left to), thereby push leading section 62Ca from what the 66A of hole portion of lens barrel 61A extracted PZT62C by make PZT62C by PZT horizontal mobile mechanism 41A from the state shown in Fig. 6 (A).Make PZT62C only move predetermined predetermined distance to (Z direction) upward with this state by the PZT above-below direction 41B of travel mechanism, the leading section 62Ca that pushes of PZT62C moves to the position of facing mutually with the 66A of hole portion corresponding to lens 51B.Then, by by the PZT horizontal direction 41A of travel mechanism PZT62C is moved to the direction that approaches lens 51B, the leading section 62Ca that pushes of PZT62C is inserted into the hole portion 66A corresponding with lens 51B, thereby sets the state of Fig. 6 (B) for.
So, in the present embodiment device, make PZT62C, D, E the PZT horizontal direction 41A of travel mechanism owing to possess along the operation of radially coming in and going out of lens, and the PZT above-below direction 41B of travel mechanism that PZT62C, D, E are moved to the lens arrangement direction, so can simply and carry out the adjustment of multi-disc lens smoothly by 1 lens position adjusting mechanism.
In addition, afterwards, the position that the position that PZT62C is moved to carry out lens 51C is adjusted, but the move operation of the lens position adjusting mechanism of this moment also can similarly carry out with aforesaid operations.And, even under the mode shown in Fig. 3 (A), for each PZT62A, B (respectively pushing leading section 62Aa, Ba) it is moved by utilizing PZT horizontal direction 41A of travel mechanism and the PZT above-below direction 41B of travel mechanism, can carry out move operation in the same manner.And, be connected to each lens 51A shown in Fig. 3 (A), being provided with like that, B, during the protuberance 67 of C, perhaps as be equivalent to the above-mentioned leading section 62Ca that pushes, Da, bar-shaped member of the part of Ea is inserted in respectively and each lens 51A independently, B, in the time of in the hole portion 66 of C correspondence, pass through PZT62A, B, C, D, E pushes raised part 67 from foreign side, the foreign side end of above-mentioned bar-shaped member gets final product, so in this case, might not need the above-mentioned PZT horizontal direction 41A of travel mechanism, according to PZTA, B, C, D, the stroke of E also can only constitute PZT travel mechanism by the PZT above-below direction 41B of travel mechanism.
In addition, in embodiment shown in Figure 6, the adjustment that makes lens is carried out successively from the lens of below, but the adjustment that can certainly make lens is carried out successively from the lens of top.
And Fig. 7 is that expression possesses figure as shown in Figure 5, adjust apparatus for assembling 201 from the off-centre of the measuring head 210 of upper side irradiation measuring light.In addition, to the member corresponding with member shown in Figure 2 to add 200 symbolic representation, for these each member detailed at symbol shown in Figure 2.
At this,, enumerate an example and remark additionally the measurement of the offset that uses each lens that device shown in Figure 21 carries out.
And at following each lens face 51a, 51b, the 52a that enumerates at above-mentioned tested lens combination body 5, among the 52b, the example that lens face 52a is measured the situation of this offset as tested surface describes.At this moment, prepare as measuring, use Z axle objective table 40 carries out the height control of measuring head 10, so that the optical convergence point F of measuring head 10 is positioned at the focus face of lens face 52a.The position of the tested lens combination body 5 after this adjustment end is set as initial position.
＜1〉at first, (N is the integer arbitrarily more than 3 to the setting measurement points N.N=18 for example).
＜2〉secondly, take initial image from measuring head 10 for the measuring beam of tested lens combination body 5 irradiation projection set quota patterns (by the criss-cross pattern of reticule), after the shooting, use rotatable stage 23 to make tested lens combination body 5 (lens face 52a) be center rotation 360/N degree (being 20 degree under the situation of N=18) with turning axle E.
＜3〉then, in the coordinate system of setting with respect to the shooting face of imaging apparatus 16 (can suitably be set at orthogonal coordinate system or polar coordinate system etc.), obtain the coordinate of the inconocenter point of captured index picture (referring to the Standard picture).The coordinate of this inconocenter point ask method (ad hoc approach of the coordinate of the central point of cross curve) for example can be set as with above-mentioned patent documentation 3 record ask method identical.
＜4〉judge that whether tested surface (lens face 52a) is that three-sixth turn is revolved at the center altogether from initial position with turning axle E, if be judged to be not, then repeats said sequence＜1 〉～＜3, obtain the coordinate of the inconocenter point of the index picture of taking at each position of rotation.In addition, in analytical equipment 31, be used to ask the required Flame Image Process exclusive disjunction of coordinate of each inconocenter point to handle, and the coordinate of each the inconocenter point that will obtain is stored in the reservoir of analytical equipment 31 successively.
Afterwards, ask the approximate circle that is suitable for each image center and this central point is set as datum mark, distance or approximate radius of a circle till will be from this datum mark to inconocenter point be arbitrarily obtained as the offset of tested surface.In addition, Ci Shi calculation process is also carried out in analytical equipment 31.
Secondly, with above-mentioned Fig. 3 (A), (B) when adjusting off-centre, each computing method adds a supplementary explanation.
That is, shown in Fig. 3 (A), can adjust the off-centre of directions X and Y direction, utilize mathematical expression to calculate the eccentric adjustment amount of this moment to use the adjustment instrument of 2 PZT (piezoelectric element).
That is, the misalignment measurement value is made as (e
x, e
y), the eccentric adjustment amount L of 2 PZT62A, B that mutually are provided with the angles of 90 degree then
P1, L
P2For example by calculating (P1 represents the direction consistent with the Y direction, and P2 represents the direction consistent with directions X) with following formula (A).
[mathematical expression 1]
And, shown in Fig. 3 (B), can use 3 PZT to adjust the off-centre of directions X and Y direction, the eccentric adjustment amount of this moment also can utilize numerical expression to calculate.
That is, the misalignment measurement value is made as (e
x, e
y), then mutually with 3 PZT62A, B of the 120 angles settings of spending, the eccentric adjustment amount L of C
P1, L
P2, L
P3, for example by calculate (P1 represents the direction consistent with the Y direction, and P2 represents to rotate in a counter-clockwise direction direction behind 120 degree from the Y direction, and P3 represents to rotate in a counter-clockwise direction direction behind 240 degree from the Y direction) with following formula (B).
[mathematical expression 2]
More than, the embodiment of the off-centre of optical element of the present invention being adjusted assemble method is illustrated, but the present invention is not limited to the form of above-mentioned embodiment, various forms can be set as embodiment.For example, in the above-described embodiment, when making above-mentioned tested surface with the predetermined axis be the center rotation, take by reflected light at each at least 3 different position of rotation (for example each position of rotation of 120 degree of being separated by) and to be formed on index picture on the shooting face from tested surface, based on coordinate at the image center of each captured index picture of this each position of rotation, obtain datum mark (central point of the approximate circle that forms by each image center), but in the inventive method, also can replace this, take by reflected light by 2 position of rotation of 180 degree of being separated by at each and to be formed on index picture on the shooting face from tested surface, obtain coordinate average of the image center of each captured index picture, thereby obtain above-mentioned datum mark.
And, the piezoelectric element of 1 lens of adjustment more than 4 also can be set.
And, as above-mentioned mounting member 21, can use above it end face edge portion to support the columniform member of tested lens combination body 5, but also can use the chuck mechanism shown in Figure 3, that constitute by V piece (V Block ロ ッ Network) and armature of patent documentation 3 as described above.
And, in the above-mentioned embodiment, enumerated tested lens, but also can use the group body that multi-disc is arranged the various optical elements (for example, optical filter or prism etc.) that form on coaxial as tested optical element.
And, in the above-mentioned embodiment,, but also can replace this for projection index pattern has used criss-cross reticule, wait the reticule of other shapes to be used in pin hole (ピ Application ホ one Le) the index pattern is carried out projection.
And, the device of the measurement offset of Shi Yonging is a device of observing the light reflection type of the index picture that is formed by the reflected light from tested surface in the above-described embodiment, but when the device that uses the transmittance type of observing the index picture that is formed by the transmitted light from tested surface is measured offset, also can use the present invention.
Claims (7)
1. the off-centre of an optical element is adjusted assemble method, on a plurality of optical elements are coaxial in lens barrel, arrange in the tested optical elements sets body form, measure this optical element offset separately, while and adjust the assembling that this offset carries out this tested optical elements sets body, it is characterized in that
At first, in should constituting each optical element of above-mentioned tested optical elements sets body, only should be disposed in the orientation the 1st optical element of any one party end be configured in above-mentioned coaxial on, and measure the offset of the 1st optical element, the mode that diminishes with the offset of the 1st optical element based on this measured value is adjusted the desired location of the 1st optical element, and make the 1st optical element remain in lens barrel in this adjusted position
Then, should be with respect to the 1st optical element and in abutting connection be disposed at the 2nd optical element with the light incident side opposition side of above-mentioned measuring light be configured in above-mentioned coaxial on, and measure the offset of the 2nd optical element, adjust the desired location of the 2nd optical element so that the offset of the 2nd optical element diminishes based on this measured value, make the 2nd optical element remain in lens barrel in this adjusted position
After, similarly, for adjusting above-mentioned desired location while measure above-mentioned offset successively, and make it remain on lens barrel in abutting connection with the optical element that is disposed at the light incident side opposition side of above-mentioned measuring light.
2. the off-centre of optical element as claimed in claim 1 is adjusted assemble method, it is characterized in that,
The measurement of above-mentioned offset is carried out in the following manner, promptly in tested surface irradiation projection the measuring light of set quota pattern, making above-mentioned tested surface on one side is the center rotation with the predetermined axis, take the index picture that is formed at shooting face by reflected light or transmitted light at each at least 3 different position of rotation or 2 position of rotation of each 180 degree of being separated by on one side from this tested surface, coordinate at the inconocenter point of specific respectively each the index picture taken at each this position of rotation of the coordinate system of setting at above-mentioned shooting face, and, measure the offset of above-mentioned tested surface based on the coordinate data of this each specific inconocenter point.
3. the off-centre of optical element as claimed in claim 1 or 2 is adjusted assemble method, it is characterized in that,
The measurement of the offset of above-mentioned optical element is carried out in the following way, promptly to each of the table of above-mentioned optical element the inside, the circle of the These parameters picture of specific each each anglec of rotation by afore mentioned rules, and obtain the coordinate of central point of specific this circle,
Afterwards, to obtained, about the table of above-mentioned optical element the inside each, the coordinate difference of the central point of above-mentioned circle calculates, and this value that calculates is made as the offset of above-mentioned optical element.
4. the off-centre of an optical element is adjusted apparatus for assembling, on a plurality of optical elements are coaxial in lens barrel, arrange in the tested optical elements sets body form, measure this optical element offset separately, while and adjust the assembling that this offset carries out this tested optical elements sets body, it is characterized in that
Possess following mechanism:
The optical element collocation mechanism, it successively disposes each optical element that should constitute above-mentioned tested optical elements sets body from the light incident side of above-mentioned measuring light above-mentioned on coaxial;
The offset measuring mechanism, its when at every turn above-mentioned coaxial on configuration during above-mentioned optical element, use above-mentioned measuring light to measure the offset of the above-mentioned optical element after this configuration;
The desired location adjusting mechanism, its according to the result of this measurement so that the mode that the offset of this optical element diminishes is adjusted the desired location of this optical element;
The optical element maintaining body, it makes this optical element remain on lens barrel in this adjusted position.
5. the off-centre of optical element as claimed in claim 4 is adjusted apparatus for assembling, it is characterized in that,
Above-mentioned optical element collocation mechanism also possesses the optical element adsorbing mechanism of carrying each above-mentioned optical element.
6. adjust apparatus for assembling as the off-centre of claim 4 or 5 described optical elements, it is characterized in that,
Above-mentioned optical element collocation mechanism also possess a plurality of be configured in above-mentioned optical element around, only push the piezoelectric element of the side of this optical element with small quantity for the offset of adjusting this optical element.
7. the off-centre of optical element as claimed in claim 6 is adjusted apparatus for assembling, it is characterized in that,
Above-mentioned a plurality of piezoelectric element constitutes works in coordination with the group of adjusting to same optical element,
The above-mentioned eccentric apparatus for assembling of adjusting also possesses: PZT travel mechanism, and it makes above-mentioned piezoelectric element move to each corresponding position with this optical element, so that can adjust offset successively to each of above-mentioned a plurality of optical elements,
This PZT travel mechanism possesses: make above-mentioned piezoelectric element along the PZT above-below direction travel mechanism that the orientation of above-mentioned optical element is moved, and make the PZT horizontal direction travel mechanism of above-mentioned piezoelectric element along the operation of radially coming in and going out of above-mentioned optical element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-137585 | 2009-06-08 | ||
| JP2009137585A JP5222796B2 (en) | 2009-06-08 | 2009-06-08 | Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101907758A true CN101907758A (en) | 2010-12-08 |
| CN101907758B CN101907758B (en) | 2013-11-06 |
Family
ID=43263261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010200107.2A Expired - Fee Related CN101907758B (en) | 2009-06-08 | 2010-06-08 | Eccentricity adjusting and assembling method, and eccentricity adjusting and assembling device of optical element |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5222796B2 (en) |
| KR (1) | KR101299509B1 (en) |
| CN (1) | CN101907758B (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879882A (en) * | 2012-09-21 | 2013-01-16 | 长春理工大学 | Method and apparatus for assembling and correcting lens group based on coaxiality conversion |
| CN105445889A (en) * | 2015-12-02 | 2016-03-30 | 宁波舜宇光电信息有限公司 | Shooting module using split type lens and assembling method of the shooting module |
| CN105445885A (en) * | 2015-10-30 | 2016-03-30 | 宁波舜宇光电信息有限公司 | Adjustable optical lens and shooting module, and manufacturing method for the adjustable optical lens and the shooting module |
| CN105738078A (en) * | 2014-12-24 | 2016-07-06 | 全欧光学有限公司 | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system |
| CN107577027A (en) * | 2017-10-13 | 2018-01-12 | 南京工业职业技术学院 | Camera lens and circuit board automatic focusing mechanism |
| CN109702467A (en) * | 2018-12-07 | 2019-05-03 | 上海蔚来汽车有限公司 | A kind of wheel automatic installation method and wheel automatic installation apparatus |
| CN109916299A (en) * | 2019-03-11 | 2019-06-21 | 东莞市凯融光学科技有限公司 | A kind of method of contact type measurement free form surface infrastructure product bias |
| CN111515811A (en) * | 2019-02-01 | 2020-08-11 | 株式会社荏原制作所 | Substrate processing apparatus and substrate processing method |
| CN112114424A (en) * | 2020-10-19 | 2020-12-22 | 中国科学院苏州生物医学工程技术研究所 | Micro-imaging system for adjusting and detecting micro-objective |
| CN112484609A (en) * | 2020-11-16 | 2021-03-12 | 凌卫岚 | Ratio piezoelectric type rotating shaft eccentricity detection early warning device |
| CN113064264A (en) * | 2019-12-31 | 2021-07-02 | 长春长光华大智造测序设备有限公司 | Image quality compensation method and device for microscopic optical system |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
| US11435545B2 (en) | 2015-12-02 | 2022-09-06 | Ningbo Sunny Opotech Co., Ltd. | Camera lens module and manufacturing method thereof |
| US11835784B2 (en) | 2015-12-21 | 2023-12-05 | Ningbo Sunny Opotech Co., Ltd. | Adjustable optical lens and camera module and aligning method thereof |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406547B (en) * | 2014-12-09 | 2017-11-07 | 上海新跃仪表厂 | The eccentric measuring device and its measuring method of a kind of optical element |
| TWI636291B (en) * | 2017-02-03 | 2018-09-21 | 國立虎尾科技大學 | Lens installation device |
| CN114001931B (en) * | 2021-11-02 | 2024-04-30 | Oppo广东移动通信有限公司 | Testing device and testing method for imaging assembly |
| CN114967024B (en) * | 2022-06-24 | 2024-04-12 | 江西弘耀光学水晶有限公司 | High-precision optical lens eccentric adjustment structure and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2031931U (en) * | 1988-01-26 | 1989-02-01 | 中国科学院长春光机所 | Photoelectric automatic centering device for optical lenses |
| JP2005055202A (en) * | 2003-08-06 | 2005-03-03 | Mitsutoyo Corp | Eccentricity measuring device, lens mounting method, and eccentricity measuring method for lens |
| CN1877282A (en) * | 2005-06-07 | 2006-12-13 | 富士能株式会社 | Core shift measuring method |
| CN1913328A (en) * | 2005-08-12 | 2007-02-14 | 富士能株式会社 | Actuator |
| CN101086445A (en) * | 2006-06-06 | 2007-12-12 | 富士能株式会社 | Method for measuring eccentricity quantity |
| JP2008096197A (en) * | 2006-10-10 | 2008-04-24 | Olympus Corp | Device for measuring eccentricity |
| CN101387761A (en) * | 2008-10-08 | 2009-03-18 | 上海微电子装备有限公司 | Center aligning assembling and regulating apparatus and method for optical system |
| CN101398522A (en) * | 2007-09-28 | 2009-04-01 | 三星电机株式会社 | Apparatus for assembling lenses |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58200126A (en) * | 1982-05-18 | 1983-11-21 | Canon Inc | Method for measuring amount of eccentricity of lens system |
| JPS5963316U (en) * | 1982-10-22 | 1984-04-26 | 株式会社リコー | lens mirror frame |
| JPS60150016A (en) * | 1984-01-17 | 1985-08-07 | Ricoh Co Ltd | Adjusting and assembling device for lens system |
| JPH03155512A (en) * | 1989-11-14 | 1991-07-03 | Topcon Corp | Manufacture of lens |
| JP2000121902A (en) * | 1998-10-19 | 2000-04-28 | Canon Inc | Method and device for adjusting lens system optical axis |
| JP2002333563A (en) * | 2001-05-08 | 2002-11-22 | Ricoh Co Ltd | Image-formation lens, optical unit, image reader and image forming device |
| JP4370064B2 (en) * | 2001-07-23 | 2009-11-25 | オリンパス株式会社 | Lens centering device |
| JP2003225852A (en) * | 2001-11-28 | 2003-08-12 | Olympus Optical Co Ltd | Method and device for sticking lens |
| JP4943946B2 (en) * | 2007-06-04 | 2012-05-30 | 富士フイルム株式会社 | Eccentricity measuring device |
| JP2008304200A (en) * | 2007-06-05 | 2008-12-18 | Fujinon Corp | Method for adjusting height position of eccentricity measuring head |
-
2009
- 2009-06-08 JP JP2009137585A patent/JP5222796B2/en not_active Expired - Fee Related
-
2010
- 2010-06-08 KR KR1020100053640A patent/KR101299509B1/en not_active IP Right Cessation
- 2010-06-08 CN CN201010200107.2A patent/CN101907758B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2031931U (en) * | 1988-01-26 | 1989-02-01 | 中国科学院长春光机所 | Photoelectric automatic centering device for optical lenses |
| JP2005055202A (en) * | 2003-08-06 | 2005-03-03 | Mitsutoyo Corp | Eccentricity measuring device, lens mounting method, and eccentricity measuring method for lens |
| CN1877282A (en) * | 2005-06-07 | 2006-12-13 | 富士能株式会社 | Core shift measuring method |
| CN1913328A (en) * | 2005-08-12 | 2007-02-14 | 富士能株式会社 | Actuator |
| CN101086445A (en) * | 2006-06-06 | 2007-12-12 | 富士能株式会社 | Method for measuring eccentricity quantity |
| JP2008096197A (en) * | 2006-10-10 | 2008-04-24 | Olympus Corp | Device for measuring eccentricity |
| CN101398522A (en) * | 2007-09-28 | 2009-04-01 | 三星电机株式会社 | Apparatus for assembling lenses |
| CN101387761A (en) * | 2008-10-08 | 2009-03-18 | 上海微电子装备有限公司 | Center aligning assembling and regulating apparatus and method for optical system |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879882B (en) * | 2012-09-21 | 2015-01-07 | 长春理工大学 | Apparatus for assembling and correcting lens group based on coaxiality conversion |
| CN102879882A (en) * | 2012-09-21 | 2013-01-16 | 长春理工大学 | Method and apparatus for assembling and correcting lens group based on coaxiality conversion |
| CN105738078A (en) * | 2014-12-24 | 2016-07-06 | 全欧光学有限公司 | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system |
| CN105738078B (en) * | 2014-12-24 | 2019-10-08 | 全欧光学有限公司 | The measurement of the position of the center of curvature of simple lens or the optical surface of poly-lens optical system |
| CN105445885A (en) * | 2015-10-30 | 2016-03-30 | 宁波舜宇光电信息有限公司 | Adjustable optical lens and shooting module, and manufacturing method for the adjustable optical lens and the shooting module |
| CN105445885B (en) * | 2015-10-30 | 2019-06-18 | 宁波舜宇光电信息有限公司 | Adjustable optical camera lens and camera module and its manufacturing method |
| US11435545B2 (en) | 2015-12-02 | 2022-09-06 | Ningbo Sunny Opotech Co., Ltd. | Camera lens module and manufacturing method thereof |
| CN105445889A (en) * | 2015-12-02 | 2016-03-30 | 宁波舜宇光电信息有限公司 | Shooting module using split type lens and assembling method of the shooting module |
| US11703654B2 (en) | 2015-12-02 | 2023-07-18 | Ningbo Sunny Opotech Co., Ltd. | Camera lens module and manufacturing method thereof |
| US11835784B2 (en) | 2015-12-21 | 2023-12-05 | Ningbo Sunny Opotech Co., Ltd. | Adjustable optical lens and camera module and aligning method thereof |
| CN107577027A (en) * | 2017-10-13 | 2018-01-12 | 南京工业职业技术学院 | Camera lens and circuit board automatic focusing mechanism |
| CN109702467B (en) * | 2018-12-07 | 2023-11-03 | 上海蔚来汽车有限公司 | Automatic wheel mounting method and automatic wheel mounting device |
| CN109702467A (en) * | 2018-12-07 | 2019-05-03 | 上海蔚来汽车有限公司 | A kind of wheel automatic installation method and wheel automatic installation apparatus |
| CN111515811A (en) * | 2019-02-01 | 2020-08-11 | 株式会社荏原制作所 | Substrate processing apparatus and substrate processing method |
| CN109916299A (en) * | 2019-03-11 | 2019-06-21 | 东莞市凯融光学科技有限公司 | A kind of method of contact type measurement free form surface infrastructure product bias |
| CN113064264A (en) * | 2019-12-31 | 2021-07-02 | 长春长光华大智造测序设备有限公司 | Image quality compensation method and device for microscopic optical system |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
| CN112114424A (en) * | 2020-10-19 | 2020-12-22 | 中国科学院苏州生物医学工程技术研究所 | Micro-imaging system for adjusting and detecting micro-objective |
| CN112114424B (en) * | 2020-10-19 | 2024-05-28 | 中国科学院苏州生物医学工程技术研究所 | Microscopic imaging system for microscope objective adjustment and detection |
| CN112484609A (en) * | 2020-11-16 | 2021-03-12 | 凌卫岚 | Ratio piezoelectric type rotating shaft eccentricity detection early warning device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010282151A (en) | 2010-12-16 |
| JP5222796B2 (en) | 2013-06-26 |
| KR20100131945A (en) | 2010-12-16 |
| KR101299509B1 (en) | 2013-08-29 |
| CN101907758B (en) | 2013-11-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101907758A (en) | The off-centre of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting | |
| CN107346059B (en) | Variable focal length imaging system | |
| US8339463B2 (en) | Camera lens calibration system | |
| US8934721B2 (en) | Microscopic vision measurement method based on adaptive positioning of camera coordinate frame | |
| CN102998892B (en) | Possess camera model follow-on test and the focus control of position detecting function | |
| CA2819292C (en) | Robotic surveying instrument and method for the automated autocollimation of a telescope of a surveying instrument comprising an autocollimation target | |
| CN107449374B (en) | Visual auxiliary laser galvanometer scanning system with flexible layout and field calibration method thereof | |
| CN104730673A (en) | Optical system for tracking a target | |
| CN1932432B (en) | Light wave interferometer | |
| EP3503525A1 (en) | Variable focal length lens system including a focus state reference subsystem | |
| TW200831972A (en) | Method, device and program for adjusting decentration of lens optical system | |
| CN106468572B (en) | Articulated robot dynamic property evaluation system | |
| CN105572130A (en) | Touch screen terminal test method and device | |
| CN104765160A (en) | Calibration system and calibration method for optical beam orientation | |
| CN104181685A (en) | Automatic digital slide focusing device and method based on microscope | |
| CN102189331A (en) | Defect correction device and defect tracking method | |
| CN101782369A (en) | Image measurement focusing system and method | |
| CN101872059B (en) | Automatic focusing system and method thereof of OTF (Optical Transfer Function) tester | |
| CN111610636A (en) | System and method for installing and adjusting display device in optical module | |
| CN101408660B (en) | Automatic multiple-focus focusing device and method thereof | |
| CN110631477A (en) | Optical imaging unit and system for measurement techniques | |
| CN105100528A (en) | Visual laser scanning error correcting system and control method | |
| JP5747396B1 (en) | Optical axis adjustment device | |
| KR20170020475A (en) | Lens element transfer mechanism, lens drive device, optical axis adjustment device, and equipment and method for manufacturing optical module | |
| KR101891681B1 (en) | Apparatus for alignment of pivot point using vision |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: FUJI FILM CORP. Free format text: FORMER OWNER: FUJINON CORP. Effective date: 20131126 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20131126 Address after: Tokyo, Japan Patentee after: Fuji Film Corp. Address before: Japan's Saitama Prefecture Patentee before: Fujinon Corp. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20210608 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |