CN101902870A - Static eliminator - Google Patents
Static eliminator Download PDFInfo
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- CN101902870A CN101902870A CN2009102582152A CN200910258215A CN101902870A CN 101902870 A CN101902870 A CN 101902870A CN 2009102582152 A CN2009102582152 A CN 2009102582152A CN 200910258215 A CN200910258215 A CN 200910258215A CN 101902870 A CN101902870 A CN 101902870A
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Abstract
The present invention discloses a static eliminator including discharge electrodes 21-24 to generate positive or negative ions in accordance with polarity of an impressed dc high voltage; a counter electrode 60 provided apart from the discharge electrodes with a prescribed space between; and a high voltage generating means 10 to alternately impress a positive and negative dc high voltage onto the discharge electrodes, the high voltage generating means gently reduces at least the later half side high voltage part of the positive or negative dc high voltage impressed onto the discharge electrodes. The static eliminator is capable of reducing contamination and corrosion of discharge electrodes and maintaining discharge characteristics for a long period of time.
Description
Technical field
The present invention relates to a kind of neutralizer, particularly a kind of by making it be in electroneutral neutralizer to removing electric object irradiation negative ions.
Background technology
In the past, in the blocking production process of semiconductor fabrication lines or mobile phone etc., be electrostatic hazard or the Electrostatic Absorption that prevents to cause, near workbench or conveyer etc., set neutralizer owing to parts are charged.At the on-the-spot employed neutralizer of such manufacturing, by to because all or part of surplus of the electric charge of plus or minus is in the electric object (parts) that removes of the inhomogeneous state of electric charge emits (irradiation) and just reaching anion, thereby makes and be in electroneutral structure except that electric object (parts).But, this neutralizer have the pollution of electrode needle or corrosion and cause ion produce ability through the time problem that reduces.
With regard to the problems referred to above, disclose the neutralizer that patent documentation 1 is arranged, this neutralizer does not apply between the stand-down of voltage by being provided with between positive pulse signal that discharge is applied with electrode and negative pulse signal, thus minimizing electrode fouling or abrasion.And, also carry out following operation at this neutralizer, that is, apply the pulse signal of weak point with polarity antipolarity till this moment by the electrode before entering between stand-down, thereby neutralization remains in the residual voltage of this electrode.
Patent documentation 1: TOHKEMY 2003-86393 communique
Yet,, cause removing the minimizing of electric energy power owing to total ion generation reduces in the mode that is provided with between aforesaid stand-down.
And, at the pulse signal of the aforesaid weak point that applies antipolarity before entering between stand-down and rapidly and the mode of residual voltage, owing to causing the release near the residual ion the electrode, disappearing rapidly of electric field (ion wind) (reach, being added to counter electrode one side) power disappears rapidly, caused easy residual charged particle or ion in the discharge part space.
And, because after be not provided with between enough stand-downs, when electrode being applied the voltage of antipolarity, exist electrode absorption to remain near the charged particle of the antipolarity this electrode or the possibility of ion, this becomes and causes electrode fouling or reason for corrosion.
Summary of the invention
Be the deficiency that addresses the above problem, but the object of the present invention is to provide a kind of pollution of sparking electrode or corrosion less and the neutralizer of the good discharge performance of long term maintenance.
The neutralizer of first aspect present invention has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism slowly reduces the half side high voltage portion of back at least of the dc high voltage of the plus or minus that described sparking electrode is applied.
According to above-mentioned first aspect, at least the back half side high voltage portion of the dc high voltage of the plus or minus that sparking electrode has been applied by slow minimizing, when reducing the generation of new ion successively during this period, these ions are transported to counter electrode one side effectively by air-flow and electric field.Its result is applying the moment that voltage is roughly 0V, has removed to remain near the ion of electrode.Therefore, even after this rapidly electrode is being applied the dc high voltage of antipolarity, previous residual ion etc. also can not be attracted and get back to this electrode one side.Thereby, according to above-mentioned first aspect, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And the neutralizer of a second aspect of the present invention is in aforesaid neutralizer, slowly increase by described high voltage generating mechanism the plus or minus that described sparking electrode is applied dc high voltage at least before the structure of half side high voltage portion.
According to above-mentioned second aspect, the dc high voltage of the plus or minus that sparking electrode is applied by slow increase at least before half side high voltage portion, in the counter-rotating of the electric field around slowly advancing this electrode, remove previous ion at first half during this period by air-flow, this latter half of increase gradually after once ion produce.And, after once (antipolarity) apply the moment that voltage reaches peak value, also can not be attracted and get back to electrode one side at the preceding residual ion that once produces etc.Thereby, according to above-mentioned second aspect, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And, the neutralizer of a third aspect of the present invention, be in aforesaid neutralizer, by described high voltage generating mechanism slowly increase to described sparking electrode apply just reach negative dc high voltage at least before half side high voltage portion, and, the slow structure that reduces the half side high voltage portion of back at least that just reaches negative dc high voltage that described sparking electrode is applied.
According to the above-mentioned third aspect, by applying voltage before the slow minimizing and slowly increasing after-applied voltage, during this connection, but the removing of the residual ion that once produced before within a short period of time, efficient realized well etc., after the slow increase of the antipolarity ion that once produces.Therefore, previous residual ion etc. can not be adsorbed onto sparking electrode.Thereby, according to the above-mentioned third aspect, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And the neutralizer of a fourth aspect of the present invention is in aforesaid neutralizer, by described high voltage generating mechanism, and the structure of the half side high voltage portion of back at least of the interim dc high voltage that reduces the plus or minus that described sparking electrode is applied.
According to above-mentioned fourth aspect, reduce the half side high voltage portion of back at least of the dc high voltage of the plus or minus that described sparking electrode is applied by stage, in the interim generation that reduces new ion during this period, these ions effectively are transported to counter electrode one side by air-flow and electric field.Its result has removed near ion that remains in the electrode etc. applying moment that voltage is roughly 0V.Therefore, even after this rapidly electrode is being applied the dc high voltage of antipolarity, previous residual ion etc. also can not be attracted and get back to this electrode one side.Thereby, according to above-mentioned fourth aspect, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And the neutralizer of a fifth aspect of the present invention in aforesaid neutralizer, by described high voltage generating mechanism, only slowly reduces the structure of the half side high voltage portion of back at least of the negative dc high voltage that described sparking electrode is applied.
The present inventor, notice applied positive high-tension electrode (particularly needle point) near can quicken the needle point corrosion when having (residual) anion, thereby invented the structure that can address these problems.Promptly, according to above-mentioned the 5th aspect, by only slowly reducing the half side high voltage portion of back at least of the negative dc high voltage that described sparking electrode is applied, make after this this electrode is applied positive dc high voltage the time do not had residual anion around being engraved in electrode.Thereby, according to above-mentioned the 5th aspect, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
Here be preferably, be set up in parallel a plurality of sparking electrodes at face with the flow direction quadrature of air.By this structure, can shine more ion to removing electric object.
And, being preferably, the described sparking electrode of adjacency divides each other at two groups, the described sparking electrode of each group is applied the dc high voltage of mutual antipolarity.Thus, can keep removing the ionic equilibrium of electric object well.And ionic equilibrium is meant that what index the residual electric potential of removing electric object behind the ion exposure leave from 0V.
And, be preferably, leaving predetermined distance from described sparking electrode and having the counter electrode of a plurality of ventilation holes with the face setting of the flow direction quadrature of air.The defencive function that the ion that counter electrode has both the stabilisation sparking electrode produces function, avoid people's hand to contact with this sparking electrode.
As mentioned above, can provide according to the present invention the pollution that can not reduce total ion generation, reduce sparking electrode or burn into through the time long neutralizer of life-span with low uncertainty.
Description of drawings
Fig. 1 is the summary pie graph of the neutralizer of expression embodiment of the present invention.
Fig. 2 is the sequential chart that the high voltage of expression first execution mode applies control.
Fig. 3 is the sequential chart that the high voltage of expression second execution mode applies control.
Fig. 4 is the sequential chart that the high voltage of expression the 3rd execution mode applies control.
Fig. 5 is the sequential chart that the high voltage of expression the 4th execution mode applies control.
Fig. 6 is the sequential chart that the high voltage of expression the 5th execution mode applies control.
Fig. 7 is the sequential chart that the high voltage of expression the 6th execution mode applies control.
In Fig. 1～Fig. 7,1, neutralizer, 10, the high voltage generating unit, 20, discharge part, 30, fan, 60, counter electrode, 70, remove electric object.
Embodiment
Below, the neutralizer 1 to suitable execution mode of the present invention is elaborated in conjunction with the accompanying drawings.Shown in Fig. 1 (A), neutralizer 1 has, the fan 30 of air-supply usefulness, can produce the dc high voltage of positive and negative high voltage generating unit 10, produce the electro-ionic discharge part 20 of positive and negative accordingly with the polarity that is applied in dc high voltage, leave the counter electrode 60 of predetermined distance ground setting from the sparking electrode of this discharge part.Be positioned at the air-supply downstream of neutralizer 1 except that electric object 70.
High voltage generating unit 10 is every stipulated time simultaneously the dc high voltage A that reverses between positive and negative of polarization and the direct voltage B of antipolarity with it.High voltage generating unit 10 applies dc high voltage A and B to the group and 22 of the pin electrode 21,23 of discharge part 20,24 group (with reference to Fig. 1 (B)) respectively.Though it is not shown, high voltage generating unit 10 has the transformer of the usefulness of boosting, the positive polarity that is connected with the secondary coil circuit of this transformer and the rectification circuit of negative polarity, can change the charge/discharge speed of savings at the electric charge of each capacitor of the rectification circuit of positive polarity and negative polarity.
More specify and be, utilization boost with transformer, to the primary current of this transformer carry out ON/OFF control charge switch, to the secondary current of this transformer output carry out rectification diode, by with charging repeatedly and the interim mode that increases (being actually slow increase) charging voltage increase the secondary voltage of this transformer output capacitor, by be situated between by the resistance stage (being actually slow discharge) to the discharge switch that the output voltage of this capacitor discharges, constitute high voltage generating unit 10.For the control that applies of the dc high voltage that utilizes the high voltage generating unit 10 that so constitutes, will after narrate.
Shown in Fig. 1 (B), for example at each terminal part of pin electrode 21～24 towards the center position of rectangular configuration, be arranged on two groups the diagonal.Wherein, the relative pin electrode group of terminal part is applied the dc high voltage of identical polar.During the group of pin electrode 21,23 produces cation, at the group generation anion of pin electrode 22,24.And, during the group of pin electrode 21,23 produces anion, at the group generation cation of pin electrode 22,24.
And, as the distance between pin electrode 21～24 and the counter electrode 60 be set to the pin electrode 21 and 22 of M, adjacency, the distance between 22 and 23 etc. needle point is set to K (for example, about K=40mm～120mm), then is preferably M＜K.By setting like this, can make the negative ions that produces at each pin electrode fly to the short counter electrode 60 of distance.And, as will be when the distance of removing electric object 70 be made as L from pin electrode 21～24, between the above-mentioned pin electrode apart from K, consider that the positive and negative ion that produces at discharge part 20 roughly mixes equably removing electric object 70, can be set at for example about K=L/5～L/4.
And by using above-mentioned high voltage generating unit 10, the situation that the high voltage that pin electrode 21～24 is carried out several patterns applies control is specifically described.Fig. 2 is the sequential chart that the high voltage of expression first execution mode applies control, and expression slowly reduces the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode has been applied.
In Fig. 2, S1 is the polarity switching signal that is used to switch in the high voltage output of positive polarity that high voltage generating unit 10 produces and negative polarity, and S2 is the charging control signal that charge switch is applied, and S3 is the discharge control signal that discharge switch is applied.In high voltage generating unit 10, can electromagnetic energy that put aside the primary winding of transformer can be controlled at required size by the pulse amplitude of control charging control signal S2.Thus, follow above-mentioned control, by secondary coil output is carried out once, also the charge Q put aside in the capacitor (that is, voltage Δ V=Q/C, wherein C is the electric capacity of capacitor) can be controlled at required size.Thereby, control at interval by pulse amplitude and generation charging control signal S2, the charging voltage of capacitor sharply can be increased or slowly increase.Discharge control signal 3 is also carried out identical control.
In the initial half period of Fig. 2, utilize polarity switching signal S1=0 (low level) that pin electrode 21,23 is applied positive dc high voltage, pin electrode 22,24 is applied negative dc high voltage.And then, at the terminal part of this half period, by the high voltage of intensive generation based on big primary current, the voltage that applies of the pin electrode 21,23 that increases sharply, and reduce the voltage that applies of pin electrode 22,24 rapidly.And, keeping this state after the stipulated time, latter half of in this half period is by producing the discharge control signal S3 of narrow pulses amplitude every the stipulated time, slowly reduce the voltage that applies of pin electrode 21,23, and slowly increase the voltage that applies of pin electrode 22,24.After half period, by polarity switching signal S1=1 (low level), the polarity inversion of the voltage that will apply pin electrode 21,23 and pin electrode 22,24.
And, the ion generation action of pin electrode 21,23 is described.In the initial half period, by (for example+5kV), making from the more cation of this pin electrode 21,23 generations from beginning that in early days pin electrode 21,23 is applied positive dc high voltage+V2.Keeping this state after the stipulated time, as applying voltage and slowly be reduced to+(for example+3kV), then when the generation of new cation was reduced in this interval successively, these cations were transported to counter electrode 60 1 sides by air-flow and electric field to V1.And, in this interval, because of exist previously generated cation by after the cation that produces from the effect of back thruster, residual move to counter electrode 60 1 sides rapidly near the positive charged particle the electrode or cation (below, these are referred to as cation etc.).
And electrode voltage is lower than+moment of V1, and the generation of new cation will stop, and after this, remain near the cation pin electrode 21,23 etc. and will move rapidly by air-flow and electric field and be transported to counter electrode 60 1 sides.Its result is applying the moment that voltage is roughly 0V, and the cation of the surrounding space of pin electrode 21,23 etc. is eliminated, thereby is in electric neutrality.
After half period, by (for example-5kV), making and to produce more anion from this pin electrode 21,23 from beginning that in early days pin electrode 21,23 is applied negative direct voltage-V2.Carve at this moment because not residual near pin electrode 21,23 cation etc. arranged, from begin in early days to apply-can not adsorb cation etc. during V2, and from beginning to produce more anion in early days at needle point yet.Keeping this state after the stipulated time, as slow increase voltage to-(for example-3kV), then when the generation of new anion was reduced in this interval successively, these anions were transported to counter electrode 60 1 sides by air-flow and effect of electric field to V1.And, in this interval, because of exist previously generated anion by after the anion that produces from the effect of back thruster, remain near the electrode negative charging particle or anion (below, these are referred to as anion etc.) and move to counter electrode 60 1 sides rapidly.
And then, surpassing at electrode voltage-moment of V1, the generation of new anion will stop, and after this, remain near the anion pin electrode 21,23 etc. and will be transported to counter electrode 60 1 sides rapidly by air-flow and electric field.Its result is applying the moment that voltage is roughly 0V, and the anion of the surrounding space of pin electrode 21,23 etc. is eliminated, thereby is in electric neutrality.Below, repeat such state.
On the one hand, pin electrode 22,24 is applied dc high voltage with above-mentioned explanation antipolarity simultaneously, the same ion that produces with above-mentioned explanation antipolarity.And, in these cases, the group of pin electrode 21,23 and pin electrode 22,24 is applied time of the voltage of slow variation, for example, can test near the time of the residual ion obtained a plurality of removing pin electrodes etc. and by equalization and obtain easily by majority.
Be preferably, apply control, removing the good ionic equilibrium that electric object 70 can obtain by the high voltage that in 10Hz～100Hz scope, carries out aforesaid one-period part repeatedly.The operation of this part and also is identical in each execution mode of following explanation.
In this first execution mode, the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode 21～24 is applied by slow minimizing, can utilize when removing during this period near stay the pin electrode 21～24 charged particle or ion effectively, even after this slowly applying the dc high voltage of antipolarity, previous residual ion etc. also can not be attracted and get back to pin electrode one side.Thereby, according to this first execution mode, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And, in the above-described first embodiment,, be not limited to this though be slowly to have reduced the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode 21～24 is applied.When the half side high voltage portion of the back at least of the dc high voltage that slowly reduces the plus or minus that pin electrode 21～24 is applied, also can obtain to prevent the effect of electrode fouling.
And, reduced electrode voltage with straight line in the above-described first embodiment, also can reduce electrode voltage by curve.
Fig. 3 is that the high voltage of expression second execution mode applies the sequential chart of control, expression slowly increase to pin electrode apply just reach negative dc high voltage at least before half side high voltage portion.
In the initial half period,, slowly increase the voltage that applies of pin electrode 21,23, and slowly reduce the voltage that applies of pin electrode 22,24 by from beginning to produce charging control signal S2 in early days with narrow pulse amplitude every the stipulated time.And, in the rearward end of this half period,, reduce the voltage that applies of pin electrode 21,23 rapidly by producing the discharge control signal S3 of wide pulse amplitude, and the voltage that applies of the pin electrode 22,24 that increases sharply.In the later half cycle, by polarity switching signal S1=1, will be to the polarity inversion of the dc high voltage that applies of pin electrode 21,23 and pin electrode 22,24.
And then, the generation action of the ion of pin electrode 22,24 is described.In the initial half period, the voltage that applies by pin electrode 21,23 (for example+5kV) slowly increases to positive dc high voltage+V2, the applying voltage and surpass of this pin electrode 21,23+V1 (when the interval for example+3kV) do not produce cation, the anion that the not shown preceding half period produces in this interval etc. along with gas delivery to counter electrode one side.And then, applying voltage and surpassing+when the generation of cation increases successively after the V1, at this constantly,, thereby can not be adsorbed with anion at pin electrode 21,23 because near pin electrode 21,23, removed the anion that produces in the preceding half period etc.Thus, can effectively prevent pin electrode 21,23 contaminated or corrosion.And, apply voltage at this to reach+when moment of V2 produces cation to greatest extent, keeping this state after the stipulated time, apply voltage and reduce to roughly 0V rapidly.Like this, in this second execution mode, apply till the rearward end by half period+V2, can produce more cation.
In the later half cycle, the voltage that applies by pin electrode 21,23 (for example-5kV) slowly reduces, in this interval, carries out removing, and the increase of the anion that produces subsequently of the cation that produces in the preceding half period etc. in the same manner with above-mentioned explanation to-V2.
On the one hand, pin electrode 22,24 is applied dc high voltage with above-mentioned explanation antipolarity simultaneously, produce the ion of comparing antipolarity with above-mentioned explanation equally.And, in these cases, the group of pin electrode 21,23 or pin electrode 22,24 is applied time of the voltage of slow variation, for example, can test near the time of the residual ion obtained a plurality of removing pin electrodes etc. and by equalization and obtain easily by majority.
In this second execution mode, by slow increase to pin electrode 21～24 apply just reach negative dc high voltage at least before half side high voltage portion, can remove that to utilize this slowly to increase interval when staying near the pin electrode 21～24 preceding charged particle or ion, after this, apply the moment that voltage reaches peak value at this, the residual ion that produces in preceding half period etc. also can not be attracted and gets back to pin electrode one side.Thereby, according to this second execution mode, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And, in the above-described 2nd embodiment, though be slowly increased to pin electrode 21～24 apply just reach negative dc high voltage at least before half side high voltage portion, be not limited to this.Even slowly increase the plus or minus that pin electrode 21～24 is applied dc high voltage at least before half side high voltage portion, can prevent effectively that also electrode is contaminated.
Fig. 4 is the sequential chart that the high voltage of expression the 3rd execution mode applies control, expression a little promptly increase to pin electrode apply just reach negative dc high voltage at least before half side high voltage portion, and a little promptly reduce the half side high voltage portion of back at least that just reaches negative dc high voltage that this pin electrode is applied.
In the initial half period, by from beginning to produce charging control signal S2 in early days with narrow pulse amplitude than comparatively dense, the voltage that applies of the pin electrode 21,23 that increases sharply a little, and reduce the voltage that applies of pin electrode 22,24 a little rapidly.And latter half of in this half period by producing the discharge control signal S3 with narrow pulse amplitude more thick and fast, a little promptly reduces the voltage that applies of pin electrode 21,23, and the voltage that applies of the pin electrode 22,24 that increases sharply a little.In the later half cycle, by polarity switching signal S1=1, the polarity inversion of the dc high voltage that will apply pin electrode 21,23 and pin electrode 22,24.
And, the ion generation action of pin electrode 21,23 is described.But, describe in this action to the latter half of and later half cycle first half of initial half period.The initial half period latter half of because of pin electrode 21,23 is applied+when V2 produces cation to greatest extent, after this state is kept the stipulated time, make that applying voltage a little promptly reduces to 0V.
By as mentioned above, applying voltage and be reduced to+interval of V1, when more promptly reducing the generation of new cation of pin electrode 21,23, these cations are transported to counter electrode 60 1 sides by air-flow and electric field.And, in this interval, because of exist previously generated cation by after the cation that produces from the effect of back thruster, near the cation the electrode etc. moves to counter electrode 60 1 sides rapidly.
And then, applying voltage and be reduced to+moment of V1, the generation of new cation will stop, and after this, remain near the cation pin electrode 21,23 etc. and will be transported to counter electrode 60 1 sides by air-flow and electric field.Its result is applying the moment that voltage is roughly 0V, and the major part of the cation of pin electrode 21,23 surrounding spaces etc. is eliminated, thereby is in electric neutrality.
In the later half cycle, by a little promptly reducing the voltage that applies of pin electrode 21,23 to negative dc high voltage-V2, apply voltage during-V1 in pin electrode 21,23 do not produce anion.And, in this interval, at cation that the preceding half period produced etc., along with gas delivery to counter electrode 60 1 sides, thereby can around pin electrode 21,23, be eliminated.And then, being reduced to less than behind-the V1 applying voltage, the generation of anion more promptly increases.And at this constantly, the cation that produces in the preceding half period etc. because be eliminated, thereby can not be adsorbed onto pin electrode 21,23 around pin electrode 21,23.Thus, can effectively prevent pin electrode 21,23 contaminated or corrosion.Aforesaid operations also is identical with regard to pin electrode 22,24.
In this 3rd execution mode, by preceding once apply voltage a little promptly reduce, after once apply voltage and a little promptly increase, utilize this connection during, but the removing of the residual ion that once produces before carrying out effectively within a short period of time etc., after the slow increase of the antipolarity ion that once produces.Thereby, on sparking electrode, can not be adsorbed with previous residual ion etc.Thereby, can not increase total ion generation according to this 3rd execution mode, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
Fig. 5 is the sequential chart that the high voltage of expression the 4th execution mode applies control, and expression reduces the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode is applied interimly.In Fig. 5, ± V2 be the voltage that can produce negative ions (for example ± 5kV), ± V1 be do not produce negative ions voltage (for example ± 3kV).
In the initial half period, by from beginning the high voltage of intensive generation in early days based on big primary current, the voltage that applies of the pin electrode 21,23 that increases sharply, and reduce the voltage that applies of pin electrode 22,24 rapidly.And, keeping this state after the stipulated time, for example be divided into twice generation the latter half of of this half period by the discharge control signal S3 that has than the pulse amplitude of broad, pin electrode 21,23 apply that voltage is divided into that two stages reduced and the voltage that applies of pin electrode 22,24 was divided into for two stages and increases.In the later half cycle, by reversed polarity switching signal S1, will be to the polarity inversion of pin electrode 21,23 and 22,24 voltages that apply.
And, the generation action of the ion of pin electrode 21,23 is described.In the initial half period,, make to produce more cation by applying+V2 from beginning in early days.After this state is kept the stipulated time, be reduced to+V1 as applying voltage rapid (interim ground), when then stopping the generation of new cation from this moment, remain near the pin electrode 21,23 charged particle or cation by air-flow and identical electric field, move to counter electrode 60 1 sides rapidly based on bias voltage+V1.And then, after this state is kept the stipulated time, as apply voltage and be reduced to roughly 0V, at this constantly, near the cation the pin electrode 21,23 etc. is eliminated, thereby is in electric neutrality.
In the later half cycle, by pin electrode 21,23 being applied-V2 from beginning in early days, thereby produce more anion.And, at this constantly, near noresidue cation etc. pin electrode 21,23, thus even apply-V2 from beginning in early days, can not be adsorbed with cation etc. at pin electrode 21,23 yet.And then, after this state is kept the stipulated time, as apply voltage and be increased to interimly-V1 and 0V roughly, then at this constantly, near the anion the pin electrode 21,23 etc. is eliminated, thereby is in electric neutrality.
On the one hand, for pin electrode 22,24,, carry out generation action with the ion of above-mentioned explanation antipolarity by applying the dc high voltage of comparing antipolarity with above-mentioned explanation simultaneously.
In this 4th execution mode, latter half of at the dc high voltage of positive and negative by stably applying the dc high voltage ± V1 that does not produce the corona degree, can effectively be removed the charged particle or the residual ion that remain near the pin electrode.And even then from beginning to apply the dc high voltage of antipolarity in early days, previous residual ion etc. also can not be attracted and get back to this pin electrode.Thereby, according to this 4th execution mode, can not reduce total ion generation, can be in for a long time pollute or corrosive environment in the time effective protection pin electrode.
And, though not shown, also can be increase interimly to pin electrode 21～24 apply just reach negative dc high voltage at least before half side high voltage portion and interim the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode is applied that reduces.
And, in the above-described 4th embodiment,, be not limited to this though reduced the half side high voltage portion of back at least that just reaches negative dc high voltage that pin electrode 21～24 is applied interimly.At least the back half side high voltage portion of dc high voltage that also can be by reducing the plus or minus that pin electrode 21～24 is applied interimly obtains to prevent the effect of the contaminated or corrosion of electrode.
And, having reduced electrode voltage with two stages in the above-described 4th embodiment, also can reduce by three stages.
Fig. 6 is the sequential chart that the high voltage of the 5th execution mode applies control, and expression applies the high voltage that changes with sinusoidal wave shape to pin electrode.Here, by CPU11 pulse amplitude or the pulse spacing of control signal S2, S3 are carried out the dc high voltage that various control produces required waveform, wherein, the pulse amplitude of this control signal S2, S3 or pulse spacing are to be used to be applied to charge switch 16 or discharge switch 17,19.
In the initial half period,, produce sinusoidal wave high-tension first half (phase place 0～pi/2) by the pulse spacing of charging control signal S2 being enlarged successively from beginning in early days.And, latter half of in this half period, narrow successively by the pulse spacing of discharge control signal S3, produce sinusoidal wave high-tension latter half of (phase place pi/2～π).In the later half cycle, replace signal S1 by reversed polarity, produce the sinusoidal wave high voltage (phase place π～2 π) of antipolarity equally.
In this 5th execution mode,, produce the remove electron ion suitable with so-called exchange way by pin electrode being applied the high voltage that changes with sinusoidal wave shape.And, when can freely adjust this frequency, do not apply between the stand-down of voltage in setting between each half period easily.
Yet, inventors of the present invention notice when near having applied positive high-tension needle point, having anion can the acceleration needle point corrosion, invented the structure that addresses this problem based on this.Below, this structure is described.
Fig. 7 is the sequential chart that the high voltage of expression the 6th execution mode applies control, and expression only slowly reduces the half side high voltage portion of back at least of the negative dc high voltage that pin electrode 21,23 is applied.The pollution of needle point owing to be easy to generate when having anion near the needle point that applies positive dc high voltage, only reduces slowly when pin electrode 21,23 applies negative dc high voltage here that this is latter half of.And, in this 6th execution mode,, can independently produce dc high voltage with these both different wave of positive and negative by with two default transformers and this control signal.In Fig. 7, S4 is the charging control signal that expression is used for negative high-voltage output, and S5 is the discharge control signal of negative high-voltage output.
In the initial half period, when the polarity switching signal becomes S1=0, make by charging control signal S2 increase sharply apply voltage+V2 and keep the stipulated time after, be reduced to 0V rapidly by discharge control signal S3.In the later half cycle, when the polarity switching signal becomes S1=1, make after the applying voltage-V2 and keeping the stipulated time of having reduced rapidly by charging control signal S4, slowly be increased to roughly 0V by discharge control signal S5.
In this 6th execution mode, by only slowly reducing the latter half of of negative dc high voltage that pin electrode 21,23 is applied, utilize when removing near remain in the pin electrode 21,23 negative charging particle or anion during this period effectively, even apply positive dc high voltage rapidly after this, residual anion etc. also can not be attracted and get back to pin electrode one side.Thereby, according to this 6th execution mode, can not reduce total ion generation, can when being in pollution or the corrosive environment for a long time, pin electrode 21,23 effectively protect pin electrode.
And, also can only be reduce negative dc high voltage latter half of interimly.Only perhaps also can be provided with and to apply between negative dc high voltage and the positive dc high voltage between the stand-down of 0V roughly.
And, told about in the respective embodiments described above dc high voltage ± V1 or ± 2 big or small identical example, but be not limited to this.In general, anion one side has lower voltage is compared in generation with cation tendency, therefore, can positive and negative direct voltage V1, V2 be set to required value respectively by considering the mode of ionic equilibrium.
And, in the respective embodiments described above,, also can use line electrode among the present invention though used pin electrode 21～24 at sparking electrode.
And, in the respective embodiments described above, use concrete numerical example to describe, but the present invention is not limited to these numerical examples.
Claims (10)
1. neutralizer has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism slowly reduces the half side high voltage portion of back at least of the dc high voltage of the plus or minus that described sparking electrode is applied.
2. neutralizer has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism, slowly increase the plus or minus that described sparking electrode is applied dc high voltage at least before half side high voltage portion.
3. neutralizer has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism, slowly increase to described sparking electrode apply just reach negative dc high voltage at least before half side high voltage portion, and, slowly reduce the half side high voltage portion of back at least that just reaches negative dc high voltage that described sparking electrode is applied.
4. neutralizer has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism, the interim half side high voltage portion of back at least that reduces the dc high voltage of the plus or minus that described sparking electrode is applied.
5. neutralizer has:
Produce the sparking electrode of plus or minus ion accordingly with the polarity of the dc high voltage that is applied in;
Leave the counter electrode that predetermined distance ground is provided with from this sparking electrode;
Described sparking electrode is alternately applied the high voltage generating mechanism of the dc high voltage of positive and negative,
Wherein, described high voltage generating mechanism only slowly reduces the half side high voltage portion of back at least of the negative dc high voltage that described sparking electrode is applied.
6. according to each described neutralizer in the claim 1～5, be set side by side with a plurality of sparking electrodes at face with the air-flow direction quadrature.
7. neutralizer according to claim 6, the described sparking electrode of adjacency divides each other at two groups, and described high voltage generating mechanism applies the dc high voltage of mutual antipolarity to the described sparking electrode of each group.
8. according to each described neutralizer in the claim 1～5, leave from described sparking electrode predetermined distance and with the face of the flow direction quadrature of air, be provided with counter electrode with a plurality of ventilation holes.
9. neutralizer according to claim 6, leave from described sparking electrode predetermined distance and with the face of the flow direction quadrature of air, be provided with counter electrode with a plurality of ventilation holes.
10. neutralizer according to claim 7, leave from described sparking electrode predetermined distance and with the face of the flow direction quadrature of air, be provided with counter electrode with a plurality of ventilation holes.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-322581 | 2008-12-18 | ||
| JP2008322581A JP2010146844A (en) | 2008-12-18 | 2008-12-18 | Static eliminator |
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| CN101902870A true CN101902870A (en) | 2010-12-01 |
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| CN (1) | CN101902870A (en) |
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| JP6008269B2 (en) * | 2011-09-29 | 2016-10-19 | 国立大学法人山形大学 | Ionizer |
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| CN101207964A (en) * | 2006-12-20 | 2008-06-25 | 株式会社其恩斯 | Electricity removal apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4840955B2 (en) * | 2001-09-12 | 2011-12-21 | 株式会社キーエンス | Static eliminator |
| JP2005328904A (en) * | 2004-05-18 | 2005-12-02 | Sharp Corp | Ion generator, and air conditioner using it |
| JP2006047641A (en) * | 2004-08-04 | 2006-02-16 | Matsushita Electric Ind Co Ltd | Ion generator and image forming apparatus having ion generator |
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| JPS63143954A (en) * | 1986-12-03 | 1988-06-16 | ボイエイジヤ−．テクノロジ−ズ | Air ionizing method and device |
| US5966296A (en) * | 1996-06-27 | 1999-10-12 | Eastman Kodak Company | Bipolar-duty cycle controllable DC corona power supply |
| JP2004178812A (en) * | 2002-09-30 | 2004-06-24 | Sunx Ltd | Destaticizing apparatus |
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| JP2010146844A (en) | 2010-07-01 |
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