CN101902126B - Power supply device for sputter ion pumps - Google Patents
Power supply device for sputter ion pumps Download PDFInfo
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- CN101902126B CN101902126B CN 200910085553 CN200910085553A CN101902126B CN 101902126 B CN101902126 B CN 101902126B CN 200910085553 CN200910085553 CN 200910085553 CN 200910085553 A CN200910085553 A CN 200910085553A CN 101902126 B CN101902126 B CN 101902126B
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Abstract
The invention discloses a power supply device for ion pumps, which comprises a switching element, a sensing element, a booster transformer, a control circuit and a rectifier circuit, wherein the switching element is provided with a first end, a second end and a third end; the sensing element is connected with the second end of the switching element; the booster transformer comprises a primary winding and a secondary winding, the polarity of the same name end of the primary winding is opposite to that of the secondary winding, one end of the primary winding is connected to a direct current power supply, and the other end is connected to the third end of the switching element; the control circuit is used for generating a switching control signal to be applied to the first end of the switching element on the basis of the flyback voltage generated by the primary winding and the voltage on the sensing element; the switching element is connected or disconnected under the control of the switching control signal, thereby generating an output voltage at the output end of the secondary winding of the booster transformer; and the rectifier circuit is used for filtering the output voltage generated by the output end of the secondary winding of the transformer. The power supply device has the advantages of high efficiency, small size and light weight, and the power range meets the requirement for the power of the sputter ion pump power supply.
Description
Technical field
The present invention relates to the sputter ion pump power supply, be specifically related to the plasma sputter pumping source based on the single-end flyback switching power supply principle, and the application that operating current, the voltage of vacuum ionic pumping source is had the functional requirements such as real-time demonstration and interlock protection.
Background technology
Sputter ion pump is to use maximum a kind of vacuum pumps in ultra high vacuum acquisition system.The internal core parts are anode and negative electrode, and anode is a kind of thin-wall stainless steel cylinder, and negative electrode is the two blocks of titanium plates on anode both sides of being placed in, therefore sputter ion pump is called for short titanium pump.During its work, provide a magnetic line of force to be parallel to anode canister by external permanent magnet, intensity is 1000～1500 Gausses' magnetic field, directly be added with 3～7kV high direct voltage between anode and negative electrode, produce Penning discharge, gas molecule is ionized, the Ions Bombardment cathodic sputtering that produces goes out titanium atom, titanium atom is deposited on the less position of Ions Bombardment on anode barrel and negative electrode, form freezing Tifilm, freezing Tifilm can adsorb the polar gas molecule, buries Inert gas molecule, realizes the purpose of high vacuum thereby reach to bleed.During ionic pump work, required 3～7kV high direct voltage is provided by ion pump power, ion concentration after the size of current that produces is ionized by gas molecule and translational speed thereof determine, the size that is to say ion pump current is directly proportional to the gas molecule number, namely be inversely proportional to vacuum degree, therefore can be extrapolated the degree of system vacuum quality by the size of ion pump current, during the ionic pump normal operation, its electric current only has several microamperes to tens microamperes usually, under the extreme case that vacuum degenerates, operating current can arrive several milliamperes.The power of plasma sputter pumping source is generally tens watts.
Single-ended reverse exciting switching voltage regulator is a kind of emerging power technology, has that efficient is high, circuit is simple, volume is little and lightweight advantage, and shortcoming is that power is less, is generally 20～100W, so be mainly used at present the small-power low-voltage dc power supply.
The operation of electron accelerator be unable to do without vacuum technique, and core component accelerating tube wherein is high vacuum parts, and the acquisition of its vacuum and maintenance all realize by ionic pump.Need in the accelerator course of work vacuum state of accelerating tube inside is carried out on-line monitoring, control system decides the further work state of accelerator by vacuum state information, do great damage for whole accelerator system in case the decline of accelerating tube vacuum degree, ionic pump or ion pump power work are undesired.This just needs ion pump power that the high pressure of amplitude stability just can not be provided in the course of the work, and also want and can carry out Real Time Monitoring to voltage, current signal, and can be to higher level's control system signal that gives the alarm when noting abnormalities.When accelerator is shut down; also need the ionic pump can continuous firing, the vacuum state of accelerating tube is kept, in order to have a good vacuum state during accelerator start next time; can devote oneself to work immediately, this just requires ion pump power to work incessantly in 24 hours.
Traditional ion pump power, major part all can only provide simple high voltage supply function, the pattern that the pattern of acquisition high pressure normally adopts traditional linear transformer to boost, although simple in structure, volume and weight is large, and efficient is low, poor stability; And lack monitoring and warning function to voltage, current signal, be not suitable for needing the field of on-line monitoring to use at accelerator etc. to vacuum state.In up-to-date technology, the scheme that adopts switch power technology to replace the linear transformer pressure build-up technique is also arranged, the technology that adopts as Chinese patent (00112595.8) " intelligent sputtering ion pump power source controller ", although also had monitoring and the warning function of voltage, current signal, but the Power supply mode is single, can not satisfy the requirement of non-stop run in 24 hours when mains failure, and do not adopt up-to-date electronic technology and advantage electronic devices and components, circuit structure is complicated, and efficient is not high.
Summary of the invention
The purpose of this invention is to provide a kind of sputter ion pump power-supply device based on the single-end flyback switching power supply principle, use the single-end flyback switching power supply mode to replace traditional linear power supply mode.
In one aspect of the invention, provide a kind of power-supply device for ionic pump, having comprised: switch element has first end, the second end and the 3rd end; Sensing element is connected with the second end of described switch element; Step-up transformer comprises armature winding and secondary winding, and wherein the polarity of the Same Name of Ends of the Same Name of Ends of armature winding and secondary winding is opposite, and an end of armature winding is connected to DC power supply, and the other end is connected to the 3rd end of switch element; Control circuit, based on the anti-voltage that swashs on voltage and sensing element that produces in armature winding, generation will be applied to the switch controlling signal of the first end of switch element, wherein said switch element is conducting and disconnection under the control of described switch controlling signal, thereby produces output voltage at the output of the secondary winding of step-up transformer; Rectification circuit, the output voltage that the output of the secondary winding of step-up transformer is produced carries out filtering.
According to embodiments of the invention, described control circuit is based on described anti-feedback voltage and the relative size both of the voltage on sensing element that swashs the generation of voltage dividing potential drop is produced the time span of switch element conducting and disconnection.
According to embodiments of the invention, this power-supply device also comprises leadage circuit, is used for when switch element is in off period the energy in the armature winding of the step-up transformer of releasing.
According to embodiments of the invention, this leadage circuit comprises: diode, and anodic bonding to the three ends, negative electrode is connected with the Same Name of Ends of armature winding by capacitor; The multiposition selector switch of a plurality of parallel connections is with described Parallel-connected Capacitor; Resistor with described Parallel-connected Capacitor.
According to embodiments of the invention, described sensing element is resistor.
According to embodiments of the invention, this rectification circuit comprises: the diode of a plurality of series connection and with the filtering capacitor of described diodes in parallel of connecting.
According to embodiments of the invention, this power-supply device also comprises voltage monitoring and protective circuit, comprising: the amplifier circuit, to the output voltage sampling, and amplify sampled voltage; Voltage is adjusted display circuit, and sampled voltage is adjusted to predetermined multiple; Relatively warning circuit, compare the voltage after adjusting and the threshold value of presetting, when the voltage after adjusting surpasses predetermined threshold value, to User Alarms.
According to embodiments of the invention, this power-supply device also comprises current monitoring and protective circuit, comprising: the amplifier circuit, and output current is sampled, and sample rate current is amplified; Electric current is adjusted display circuit, and sample rate current is adjusted to predetermined multiple; Relatively warning circuit, compare the electric current after adjusting and the threshold value of presetting, when the electric current after adjusting surpasses predetermined threshold value, to User Alarms.
According to embodiments of the invention, the voltage of described DC power supply is 24 volts.
According to embodiments of the invention, described DC power supply is battery pack.
According to embodiments of the invention, described DC power supply converts from alternating current.
It is high that above-mentioned power-supply device possesses efficient, and volume is little, lightweight advantage.
In addition, just the power requirement that meets the plasma sputter pumping source according to power-supply device power bracket 20～100W of embodiment, and can directly use 24V low-tension supply (as storage battery) power supply, still can realize non-stop runs in 24 hours of sputter ion pump when mains failure.
The vacuum ion pump supply unit of the embodiment of the present invention, the output high pressure is adjustable continuously from 3kV～7kV.
The vacuum ion pump supply unit of the embodiment of the present invention also comprises complete ionic pump and power work state on_line monitoring and status alert defencive function, comprises voltage, electric current Real-Time Monitoring and demonstration, interlocking protective device when electric current, electric voltage exception.Can be when the vacuum state abnormal of the operating state of power supply or equipment contact by relay with Trouble Report to higher level's control system, vacuum system is carried out the requirement of electric current, voltage monitoring and interlock protection thereby satisfy some specific use equipment needs such as accelerator.
Description of drawings
By below in conjunction with description of drawings the preferred embodiments of the present invention, will make of the present invention above-mentioned and other objects, features and advantages are clearer, wherein:
Fig. 1 is a kind of simple novel evacuated ion pump power device.
Fig. 2 is a kind of functional structure signal of signal monitoring protective circuit.
Fig. 3 is a kind of with the concrete structure of voltage and current signal monitoring with the plasma sputter pumping source of defencive function.
Fig. 4 is the concrete structure of a kind of voltage monitoring and warning circuit.
Fig. 5 is the concrete structure of a kind of current monitoring and warning circuit.
Embodiment
The preferred embodiment of the invention will be described below by reference to the accompanying drawings.In description process below, having omitted is unnecessary details and function for the present invention, obscures to prevent that the understanding of the present invention from causing.
As shown in Figure 1, a kind of simply based on the sputter ion pump supply unit of single-end flyback switching power supply principle by 24V power supply 1, control circuit 2, HF switch 3, protective circuit 4, high-frequency step-up transformer 5 and rectification circuit 6 form.Wherein control circuit is controlled the break-make of HF switch, the quick break-make of HF switch allows H.V. step up transformer work in the single-ended reverse exciting pattern, produce high-voltage pulse, rectification circuit is shaped as high-voltage pulse the high direct voltage output of 3kV～7kV, supplies with sputter ion pump.
Fig. 2 has represented that Fig. 1 is described simply based on a kind of concrete implementing circuit of the sputter ion pump supply unit of single-end flyback switching power supply principle.
High-frequency step-up transformer 5 is made of T1, and T1 is one, and transformation ratio is not less than 1: 10 take ferrite as magnetic core, and primary coil is withstand voltage is not less than 500V, and secondary coil is withstand voltage is not less than 7kV, the high frequency transformer that input and output are isolated mutually.
Diode VD5, multiposition selector switch K1, serial voltage-stabiliser tube VZ1, resistance R 2, the energy discharge circuit that capacitor C 2 consists of, when HF switch was turn-offed, the energy of the armature winding of transformer T1 carried out bleed off by this circuit.Wherein the operating voltage V of voltage-stabiliser tube VZ1 is exactly the armature winding of the transformer T1 voltage on armature winding when carrying out energy discharge, this moment, the secondary winding of transformer T1 obtained high pressure Vo by instead swashing, form following relation: Vo=V * n between the no-load voltage ratio n of they and pulse transformer, select to connect the voltage-stabiliser tube VZ1 of different operating voltage by multiposition selector switch K1, can obtain different plasma sputter pumping source output high pressure.Simultaneously in order to protect HF switch VT1, what the operating voltage of voltage-stabiliser tube VZ1 will be lower than field effect transistor is withstand voltage, and in this circuit, the operating voltage of serial voltage-stabiliser tube VZ1 is respectively 150V, 250V, 350V.The no-load voltage ratio n of transformer is 20, and the maximum output voltage of plasma sputter pumping source corresponds to 3kV, 5kV, and 7kV is adjustable.In the ceiling voltage scope, the output voltage of continuous setup plasma sputter pumping source, can pass through regulator potentiometer RP1, change the reference voltage of UC3842 chip (2) pin, thereby change the output voltage of plasma sputter pumping source.
So-calledly in this circuit single-endedly refer to that the magnetic core of high-frequency step-up transformer T1 only is operated in a side of magnetic hysteresis loop.So-called anti-sharp, refer to that the terminals of high-frequency step-up transformer T1 connect according to method shown in Figure 2, terminals (1) consist of Same Name of Ends with terminals (3).When the HF switch conducting, the induced voltage of high-frequency step-up transformer T1 armature winding be (1) just (2) negative, the rectifier diode VD1～VD4 that is connected to secondary winding is in cut-off state, storage power in armature winding.When switching tube VT1 ends, the power generation of storing in transformer T1 armature winding is just instead swashing voltage (1) negative (2), be coupled to secondary winding and just bearing (4) for (3), rectifier diode VD1～VD4 conducting, the energy of armature winding instead swash to secondary winding by rectifier diode VD1～VD4 and the capacitor C 1 backward titanium pump of filtering (load) output.
The operation principle of whole circuit is:
The 24V power supply is through resistance R 4, voltage stabilizing didoe ZT2, and the voltage stabilizing circuit that capacitor C 3 consists of will offer higher than the driving power of 16V (7) pin of UC3842 chip, i.e. power end.Resistance R 9 and capacitor C 6 consists of (4) pin that oscillating circuits are received the UC3842 chip, makes its sawtooth waveforms that produces required frequency, is also that the frequency of oscillation of resistance R 9 and capacitor C 6 has determined that the UC3842 chip finally exports the frequency of pulse.Resistance R 3 and potentiometer RP1 consist of transformer T1 armature winding and instead swash the pressure sampling circuit of voltage, deliver to (2) pin of UC3842 chip as voltage reference, it is the Voltage Feedback input, (1) pin of UC3842 chip is the output compensation end of (2) pin, by the resistance R 5 of parallel connection, capacitor C 4 is connected with (2) pin.Resistance R 8 is introduced current feedback signal (3) pin of UC3842 chip, i.e. current detecting input from the upper end of protective circuit resistance R 1.Change and compare in UC3842 chip process with the voltage feedback signal that (2) pin is introduced from the current feedback signal of (3) pin introducing, produce a PWM (pulse-width modulation) ripple, export this signal from (6) pin (being output), control the break-make of field effect transistor VT1.The relative size of current feedback signal and voltage feedback signal has determined the pulse duration of PWM (pulse-width modulation) ripple, that is to say that they have determined the length of the each ON time of HF switch, current feedback signal with respect to voltage feedback signal is little must be more, pwm pulse is wider, and the VT1 ON time is longer; Current feedback signal is more approaching with respect to voltage feedback signal, and difference is less, and pwm pulse is narrower, and the VT1 ON time is shorter.Simultaneously the current detecting input is provided with the current-clamp of 1V, flows through large and when making voltage on resistance R 1 surpass 1V (namely 3 pin level are greater than 1V), will turn-off pwm pulse, thereby reach the purpose of current-limiting protection when protective circuit powers on.
The pulse of UC3842 chip (6 pin) output makes the VT1 conducting when being high level; the VT1 conducting; electric current flows through the armature winding of transformer T1 from the 24V power supply; arrive ground through HF switch VT1 and protective circuit R1; rectifier diode on transformer T1 secondary winding is equivalent to reversal connection at this moment; the secondary winding no-output, armature winding storage power, upper (3) pin (current detecting input) that obtains current feedback signal and deliver to the UC3842 chip of protective circuit R1.when the pulse of UC3842 chip (6 pin) output transfers low level to by high level, the VT1 cut-off, the energy that transformer T1 armature winding stores is by energy discharge circuit bleed off, form the reverse voltage of 350V on armature winding, secondary winding is by the anti-sharp approximately high pressure of 7kV that forms, by rectifier diode VD1, VD2, VD3, VD4 and filter capacitor C1 add to load (sputter ion pump), simultaneously the pressure sampling circuit that consists of of resistance R 3 and potentiometer RP1 will reflect transformer T1 armature winding anti-the signal of sharp voltage deliver to Voltage Feedback input (2) pin of UC3842 chip, this signal is controlled the width of the next output of UC3842 chip pulse with the current feedback signal of previous input after the conversion relatively of UC3842 chip internal process, what of storage power when changing task under transformer T1 by the length of adjusting field effect transistor VT1 ON time next time, adjust the purpose that power output reaches regulated output voltage.Because the operating frequency of whole circuit is very high, reach 500kHz, so the operating voltage of the actual output of plasma sputter pumping source of the embodiment of the present invention is highly stable, ripple is very little.
Fig. 3 has represented a kind of with the electric current and voltage monitoring structure with the plasma sputter pumping source of defencive function take Fig. 1 as the basis; it forms except 24V power supply 1; control circuit 2; HF switch 3, protective circuit 4 is outside high-frequency step-up transformer 5 and rectification circuit 6; comprise that also AC220V turns 24V circuit 7; 24V turns ± 12V circuit 8, voltage monitoring and warning circuit 9, current monitoring and warning circuit 10.
It is the alternating current of civil power 220V to be converted into the direct current of 24V that AC220V turns 24V circuit 7, satisfies the requirement that single-end flyback switching power supply can only transform based on direct current.The single-ended flyback plasma sputter pumping source that turns 24V circuit 7 with AC220V just can directly use the AC220V civil power as power supply, turn simultaneously the output access in parallel 24V storage battery of 24V circuit 7 at AC220V, when civil power being arranged, when AC220V supplies single-ended flyback sputter ion pump power work, also charge a battery, when civil power has a power failure suddenly, by storage battery to single-ended flyback sputter ion pump Power supply, thereby realized the non-stop run in 24 hours of single-ended flyback plasma sputter pumping source.
AC220V turns 24V circuit 7 and has multiple implementation, and traditional method has first by transformer and changes AC220V into the AC20V left and right, then uses the rectifier bridge rectification, the voltage stabilizing of 24V voltage-stabiliser tube, and capacitor filtering is realized the 24V direct current.Because present low-tension supply building block technique is very ripe, so directly adopt power module RS308 ripe on market in the embodiment of the present invention, input AC220V directly exports 24V, realizes that AC220V turns 24V circuit 7.
24V turns ± and 12V circuit 8 is that direct current 24V is converted into the positive 12V of direct current and negative 12V, as two low-voltage control circuit voltage monitorings of plasma sputter pumping source and the power supply of warning circuit 9 and current monitoring and warning circuit 10.24V turns ± and 12V circuit 8 also has multiple implementation, adopts power module HNM5-24D12 ripe on market equally in the embodiment of the present invention, input 24V, directly the two-way of acquisition ± 12V is exported, and realizes that 24V turns ± 12V circuit 8.
Voltage monitoring and warning circuit 9, output voltage to the plasma sputter pumping source carries out Real-Time Monitoring and demonstration, when power failure or load short circuits cause the alarming value that output voltage sets lower than the user, send alarm signal by the break-make superior control system of relay contact simultaneously.
Fig. 4 has represented the concrete structure of a kind of voltage monitoring and warning circuit.Comprise amplifier circuit 91; voltage is adjusted display circuit 92; compare 93 3 parts of warning circuit, its operation principle is: resistance R 21, and R22 completes the dividing potential drop sampling to the sputter ion pump output voltage; diode VD21; VD22 carries out voltage-limiting protection, comparator N21 and resistance R 23, R24; R25 amplifies output to voltage sampling signal, adjusts display circuit 92 and compares warning circuit 93 in order to offer voltage.Comparator N23, resistance R 27, R28 and variable potentiometer RP22 consist of voltage and adjust display circuit 92, sampling voltage is adjusted to suitable multiple, and show by low voltage voltage gauge outfit PV.As in this circuit, the output voltage of plasma sputter pumping source is 3～7kV, obtaining sampling voltage on the dividing potential drop sample resistance is 1.2～2.8V, comparator N21 is amplified to 2.4～5.6V with it, by regulating RP2, make N23 be output as 3～7V, namely correspond to the one thousandth of sputter ion pump electric power output voltage, just can show by the direct voltage gauge outfit of 10V the actual 1kV that represents of the every 1V of gauge outfit.comparator N22, resistance R 26, adjustable potentiometer RP21, diode VD23, relay K 21 consists of voltage ratio than warning circuit, the user is for the normal output voltage of plasma sputter pumping source, set the protection threshold value by adjustable potentiometer RP21, when the output signal of amplifier circuit 91 reflection sputter ion pump electric power output voltages is protected threshold value lower than this, comparator N22 output+12V high level makes the line bag no current of relay K 21, the contact of relay K 21 disconnects, the alarm signal A of higher level's control system is disconnected, form the fault alarm of " the sputter ion pump electric power output voltage is too low ".
Current monitoring and warning circuit 10, operating current to load (sputter ion pump) carries out Real-Time Monitoring and demonstration, work as simultaneously electric current excessive, reflect that ionic pump vacuum degree is relatively poor, and during lower than user's pre-provisioning request, send alarm signal by the break-make superior control system of relay contact.
Fig. 5 has represented the concrete structure of a kind of current monitoring and warning circuit.Comprise amplifier circuit 101; current display circuit 102 compares 103 3 parts of warning circuit, and its operation principle is: current display circuit 102 is by micro aning ammeter PA; diode VD31; VD32, capacitor C 31 forms, and microammeter directly is connected on the loop of sputter ion pump electric current; the PA gauge outfit directly shows the size of electric current in real time; diode VD31, VD32 forms the voltage-limiting protection effect to gauge outfit PA, and capacitor C 31 strobes.In amplifier circuit 101; sampling resistor R31 is connected on the sputter ion pump current circuit; during current flowing resistance R31, obtain a negative voltage signal in the upper end of R31, deliver to by comparator N31; resistance R 32; the amplifying circuit that R33, R34 form carries out signal and amplifies and export to comparison warning circuit 103, diode VD33; VD34 carries out voltage-limiting protection to sampled signal, and 32 pairs of sampled signals of capacitor C carry out filtering.relatively warning circuit 103 is by comparator N32, resistance R 35, adjustable potentiometer RP31, diode VD35, relay K 31 consists of, normal vacuum state and the operating current size of user during for the plasma sputter pump work, set the protection threshold value by adjustable potentiometer RP31, when the output signal of amplifier circuit 102 reflection sputter ion pump operating currents protect lower than this threshold value (be after sampled signal is amplified be than the protection threshold value negative the negative value of manying voltage more), comparator output+12V high level makes the line bag no current of relay K 21, the contact of relay K 21 disconnects, the alarm signal C of higher level's control system is disconnected, form the fault alarm of " the sputter ion pump electric current is excessive ".
Of particular note, Fig. 2, Fig. 4, Fig. 5 is respectively a concrete implementing circuit of the various functional modules of the embodiment of the present invention, in fact circuit is diversified in realization, comprise by to signal intensity in the change of the layout of components and parts in above-mentioned three physical circuits, like product, increase a small amount of resistance/capacitance device etc., all can original circuit not formed in the situation of essence change and realizes the described function of the embodiment of the present invention, this is that the electronic circuit engineer knows altogether.
So far invention has been described in conjunction with the preferred embodiments.Should be appreciated that, those skilled in the art can carry out various other change, replacement and interpolations without departing from the spirit and scope of the present invention.Therefore, scope of the present invention is not limited to above-mentioned specific embodiment, and should be limited by claims.
Claims (8)
1. power-supply device that is used for ionic pump comprises:
The HF switch element has first end, the second end and the 3rd end;
Sensing element is connected with the second end of described HF switch element;
High-frequency step-up transformer comprises armature winding and secondary winding, and wherein the polarity of the Same Name of Ends of the Same Name of Ends of armature winding and secondary winding is opposite, and an end of armature winding is connected to DC power supply, and the other end is connected to the 3rd end of HF switch element;
Control circuit, based on the anti-current feedback signal that swashs on voltage and sensing element that produces in armature winding, generation will be applied to the HF switch control signal of the first end of HF switch element, wherein said HF switch element turn-on and turn-off under the control of described HF switch control signal, thereby the output at the secondary winding of high-frequency step-up transformer produces output voltage, and the pulse frequency of described HF switch control signal is the frequency of oscillation of the oscillating circuit that consists of of a resistance and electric capacity;
Rectification circuit, the output voltage that the output of the secondary winding of high-frequency step-up transformer is produced carries out filtering;
Wherein, described control circuit is based on described anti-feedback voltage and the relative size both of the current feedback signal on sensing element that swashs the generation of voltage dividing potential drop is produced the time span of HF switch element conductive and shutoff;
Described power-supply device also comprises leadage circuit, is used for when the HF switch element is in blocking interval, and the energy in the armature winding of the high-frequency step-up transformer of releasing, described leadage circuit comprises:
Diode, anodic bonding to the three ends, negative electrode is connected with the Same Name of Ends of armature winding by capacitor;
The series voltage-stabiliser tube;
The multiposition selector switch, connect with described serial voltage-stabiliser tube rear and described Parallel-connected Capacitor; And
With the resistor of described Parallel-connected Capacitor,
Wherein, select to connect the voltage-stabiliser tube of different operating voltage in serial voltage-stabiliser tube by described multiposition selector switch, obtain different sputter ion pump electric power output voltages.
2. power-supply device as claimed in claim 1, described sensing element is resistor.
3. power-supply device as claimed in claim 1, wherein said rectification circuit comprises:
The diode of a plurality of series connection and with the filtering capacitor of described diodes in parallel of connecting.
4. power-supply device as claimed in claim 1, also comprise voltage monitoring and protective circuit, comprising:
The amplifier circuit to the output voltage sampling, and amplifies sampled voltage;
Voltage is adjusted display circuit, and sampled voltage is adjusted to predetermined multiple,
Relatively warning circuit, compare the voltage after adjusting and the threshold value of presetting, when the voltage after adjusting surpasses predetermined threshold value, to User Alarms.
5. power-supply device as claimed in claim 1, also comprise current monitoring and protective circuit, comprising:
The amplifier circuit is sampled to output current, and sample rate current is amplified;
Electric current is adjusted display circuit, and sample rate current is adjusted to predetermined multiple;
Relatively warning circuit, compare the electric current after adjusting and the threshold value of presetting, when the electric current after adjusting surpasses predetermined threshold value, to User Alarms.
6. power-supply device as claimed in claim 1, the voltage of described DC power supply is 24 volts.
7. power-supply device as claimed in claim 6, described DC power supply is battery pack.
8. power-supply device as claimed in claim 6, described DC power supply converts from alternating current.
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| CN 200910085553 CN101902126B (en) | 2009-05-25 | 2009-05-25 | Power supply device for sputter ion pumps |
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| CN 200910085553 CN101902126B (en) | 2009-05-25 | 2009-05-25 | Power supply device for sputter ion pumps |
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| CN101902126B true CN101902126B (en) | 2013-05-22 |
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| CN113992026A (en) * | 2021-10-28 | 2022-01-28 | 北京机械工业自动化研究所有限公司 | Be used for small-size direct current high voltage power supply of lightweight accelerator |
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| CN2667767Y (en) * | 2003-11-06 | 2004-12-29 | 郭有陆 | Intelligent electric machine protector |
| CN1806380A (en) * | 2003-06-18 | 2006-07-19 | 崇贸科技股份有限公司 | Primary-side regulated pulse width modulation controller with improved load regulation |
| CN201051716Y (en) * | 2007-06-07 | 2008-04-23 | 建德市正达电器有限公司 | An integrated electrode peak voltage absorption and voltage clamp circuit |
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| CN2394366Y (en) * | 1999-10-26 | 2000-08-30 | 李俊康 | Multi-level automatic charging controller |
| FI19992686A (en) * | 1999-12-14 | 2001-06-15 | Nokia Networks Oy | Synkronitasasuuntaus |
| JP2003070183A (en) * | 2001-08-27 | 2003-03-07 | Matsushita Electric Works Ltd | Power outage back-up power source equipment |
| JP2004007950A (en) * | 2002-04-15 | 2004-01-08 | Fuji Electric Holdings Co Ltd | Switching power unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1806380A (en) * | 2003-06-18 | 2006-07-19 | 崇贸科技股份有限公司 | Primary-side regulated pulse width modulation controller with improved load regulation |
| CN2667767Y (en) * | 2003-11-06 | 2004-12-29 | 郭有陆 | Intelligent electric machine protector |
| CN201051716Y (en) * | 2007-06-07 | 2008-04-23 | 建德市正达电器有限公司 | An integrated electrode peak voltage absorption and voltage clamp circuit |
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| CN101902126A (en) | 2010-12-01 |
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