CN101902126A - Power supply device for sputter ion pumps - Google Patents
Power supply device for sputter ion pumps Download PDFInfo
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- CN101902126A CN101902126A CN2009100855530A CN200910085553A CN101902126A CN 101902126 A CN101902126 A CN 101902126A CN 2009100855530 A CN2009100855530 A CN 2009100855530A CN 200910085553 A CN200910085553 A CN 200910085553A CN 101902126 A CN101902126 A CN 101902126A
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Abstract
The invention discloses a power supply device for ion pumps, which comprises a switching element, a sensing element, a booster transformer, a control circuit and a rectifier circuit, wherein the switching element is provided with a first end, a second end and a third end; the sensing element is connected with the second end of the switching element; the booster transformer comprises a primary winding and a secondary winding, the polarity of the same name end of the primary winding is opposite to that of the secondary winding, one end of the primary winding is connected to a direct current power supply, and the other end is connected to the third end of the switching element; the control circuit is used for generating a switching control signal to be applied to the first end of the switching element on the basis of the flyback voltage generated by the primary winding and the voltage on the sensing element; the switching element is connected or disconnected under the control of the switching control signal, thereby generating an output voltage at the output end of the secondary winding of the booster transformer; and the rectifier circuit is used for filtering the output voltage generated by the output end of the secondary winding of the transformer. The power supply device has the advantages of high efficiency, small size and light weight, and the power range meets the requirement for the power of the sputter ion pump power supply.
Description
Technical field
The present invention relates to the sputter ion pump power supply, be specifically related to plasma sputter pumping source based on the single-end flyback switching power supply principle, and the application that operating current, the voltage of vacuum ionic pumping source is had functional requirements such as real-time demonstration and interlock protection.
Background technology
Sputter ion pump is to use maximum a kind of vacuum pumps in the ultra high vacuum acquisition system.The internal core parts are anode and negative electrode, and anode is a kind of thin-wall stainless steel tube, and negative electrode is the two blocks of titanium plates on anode both sides of being placed in, so sputter ion pump is called for short titanium pump.During its work, provide a magnetic line of force to be parallel to the anode tube by external permanent magnet, intensity is 1000～1500 Gausses' magnetic field, directly be added with 3～7kV high direct voltage between anode and the negative electrode, produce Penning discharge, gas molecule is ionized, the ion bombardment cathodic sputtering that produces goes out titanium atom, titanium atom is deposited on the less position of ion bombardment on anode barrel and the negative electrode, form freezing Tifilm, freezing Tifilm can adsorb the polar gas molecule, buries the inert gas molecule, realizes the purpose of high vacuum thereby reach to bleed.Required 3～7kV high direct voltage is provided by the ionic pump power supply during ionic pump work, ion concentration after the size of current that is produced is ionized by gas molecule and translational speed decision thereof, the size that is to say ion pump current is directly proportional with the gas molecule number, just be inversely proportional to vacuum degree, therefore can extrapolate the degree of system vacuum quality by the size of ion pump current, its electric current has only several microamperes to tens microamperes usually during the ionic pump operate as normal, under the extreme case that vacuum degenerates, operating current can arrive several milliamperes.The power of plasma sputter pumping source is generally tens watts.
Single-ended reverse exciting switching voltage regulator is a kind of emerging power technology, has the efficient height, circuit is simple, volume is little and lightweight advantage, and shortcoming is that power is less, is generally 20～100W, so be mainly used in the small-power low-voltage dc power supply at present.
The operation of electron accelerator be unable to do without vacuum technique, and core component accelerating tube wherein is high vacuum parts, and the acquisition of its vacuum and maintenance all realize by ionic pump.Need in the accelerator course of work vacuum state of accelerating tube inside is carried out on-line monitoring, control system decides the further work state of accelerator by vacuum state information, does great damage for whole accelerator system in case the decline of accelerating tube vacuum degree, ionic pump or ionic pump power work are undesired.This just needs the ionic pump power supply that the high pressure of amplitude stability just can not be provided in the course of the work, and also want and can monitor in real time voltage, current signal, and can be to higher level's control system signal that gives the alarm when noting abnormalities.When accelerator is shut down; also need the ionic pump can continuous firing, the vacuum state of accelerating tube is kept, so that have a good vacuum state during accelerator start next time; can devote oneself to work immediately, this just requires the ionic pump power supply to work incessantly in 24 hours.
Traditional ionic pump power supply, major part all can only provide the simple high pressure function of supplying power, the pattern that the pattern of acquisition high pressure normally adopts traditional linear transformer to boost, though simple in structure, volume and weight is big, efficient is low, poor stability; And lack monitoring and warning function, be not suitable for needing the field of on-line monitoring to use to vacuum state at accelerator etc. to voltage, current signal.In the up-to-date technology, the scheme that adopts switch power technology to replace the linear transformer pressure build-up technique is also arranged, the technology that is adopted as Chinese patent (00112595.8) " intelligent sputtering ion pump power source controller ", though also had monitoring and the warning function of voltage, current signal, but the power supply supply power mode is single, can not satisfy the requirement of non-stop run in 24 hours when mains failure, and does not adopt up-to-date electronic technology and advantage electronic devices and components, circuit structure complexity, efficient are not high.
Summary of the invention
The purpose of this invention is to provide a kind of sputter ion pump power-supply device, use the single-end flyback switching power supply mode to replace traditional linear power supply mode based on the single-end flyback switching power supply principle.
In one aspect of the invention, provide a kind of power-supply device that is used for ionic pump, having comprised: switch element has first end, second end and the 3rd end; Sensing element is connected with second end of described switch element; Step-up transformer comprises elementary winding and secondary winding, and wherein the polarity of the end of the same name of the end of the same name of elementary winding and secondary winding is opposite, and an end of elementary winding is connected to DC power supply, and the other end is connected to the 3rd end of switch element; Control circuit, based on the anti-voltage that swashs on voltage and the sensing element that produces in the elementary winding, generation will be applied to the switch controlling signal of first end of switch element, wherein said switch element is conducting and disconnection under the control of described switch controlling signal, thereby produces output voltage at the output of the secondary winding of step-up transformer; Rectification circuit, the output voltage that the output of the secondary winding of step-up transformer is produced carries out filtering.
According to embodiments of the invention, described control circuit is based on anti-swash the two relative size of feedback voltage that the voltage dividing potential drop produces and the voltage on the sensing element and produce the time span of switch element conducting and disconnection described.
According to embodiments of the invention, this power-supply device also comprises leadage circuit, is used for when switch element is in off period the energy in the elementary winding of the step-up transformer of releasing.
According to embodiments of the invention, this leadage circuit comprises: diode, anode are connected to the 3rd end, and negative electrode is connected with the end of the same name of elementary winding by capacitor; The multiposition selector switch of a plurality of parallel connections, in parallel with described capacitor; With described capacitor parallel resistor device.
According to embodiments of the invention, described sensing element is a resistor.
According to embodiments of the invention, this rectification circuit comprises: a plurality of diode in series and the filtering capacitor in parallel with described diode in series.
According to embodiments of the invention, this power-supply device also comprises voltage monitoring and protective circuit, comprising: the sampling amplifying circuit, and output voltage is sampled, and sampled voltage is amplified; Voltage is adjusted display circuit, and sampled voltage is adjusted to predetermined multiple; Relatively warning circuit compares adjusted voltage and preset threshold value, when adjusted voltage surpasses predetermined threshold value, to User Alarms.
According to embodiments of the invention, this power-supply device also comprises current monitoring and protective circuit, comprising: the sampling amplifying circuit, and output current is sampled, and sample rate current is amplified; Electric current is adjusted display circuit, and sample rate current is adjusted to predetermined multiple; Relatively warning circuit compares adjusted electric current and preset threshold value, when adjusted electric current surpasses predetermined threshold value, to User Alarms.
According to embodiments of the invention, the voltage of described DC power supply is 24 volts.
According to embodiments of the invention, described DC power supply is a battery pack.
According to embodiments of the invention, described DC power supply converts from alternating current.
Above-mentioned power-supply device possesses the efficient height, and volume is little, lightweight advantage.
In addition, just the power requirement that meets the plasma sputter pumping source according to power-supply device power bracket 20～100W of embodiment, and can directly use 24V low-tension supply (as storage battery) power supply, when mains failure, still can realize non-stop runs in 24 hours of sputter ion pump.
The vacuum ion pump supply unit of the embodiment of the invention, the output high pressure is adjustable continuously from 3kV～7kV.
The vacuum ion pump supply unit of the embodiment of the invention also comprises complete ionic pump and power work state on_line monitoring and status alert defencive function, comprises the monitoring in real time of voltage, electric current and shows interlocking protective device when electric current, electric voltage exception.Can take place at the vacuum state of the operating state of power supply or equipment to give higher level's control system by the contact of relay with Trouble Report when unusual, vacuum system be carried out the requirement of electric current, voltage monitoring and interlock protection thereby satisfy some specific use equipment needs such as accelerator.
Description of drawings
By below in conjunction with description of drawings the preferred embodiments of the present invention, will make above-mentioned and other purpose of the present invention, feature and advantage clearer, wherein:
Fig. 1 is a kind of simple novel evacuated ionic pump supply unit.
Fig. 2 is a kind of functional structure signal of signal monitoring protective circuit.
Fig. 3 is a kind of concrete structure that has the plasma sputter pumping source of voltage and current signal monitoring and defencive function.
Fig. 4 is the concrete structure of a kind of voltage monitoring and warning circuit.
Fig. 5 is the concrete structure of a kind of current monitoring and warning circuit.
Embodiment
The preferred embodiment of the invention will be described below in conjunction with the accompanying drawings.In the description process below, having omitted is unnecessary details and function for the present invention, obscures to prevent that the understanding of the present invention from causing.
As shown in Figure 1, a kind of simply based on the sputter ion pump supply unit of single-end flyback switching power supply principle by 24V power supply 1, control circuit 2, HF switch 3, protective circuit 4, high-frequency step-up transformer 5 and rectification circuit 6 are formed.Wherein control circuit is controlled the break-make of HF switch, the quick break-make of HF switch allows H.V. step up transformer work in the single-ended reverse exciting pattern, produce high-voltage pulse, rectification circuit is exported the high direct voltage that high-voltage pulse is shaped as 3kV～7kV, supplies with sputter ion pump.
Fig. 2 has represented that Fig. 1 is described simply based on a kind of concrete enforcement circuit of the sputter ion pump supply unit of single-end flyback switching power supply principle.
High-frequency step-up transformer 5 is made of T1, and it is magnetic core with the ferrite that T1 is one, and transformation ratio was not less than 1: 10, and primary coil is withstand voltage to be not less than 500V, and secondary coil is withstand voltage to be not less than 7kV, the high frequency transformer that input and output are isolated mutually.
Diode VD5, multiposition selector switch K1, serial voltage-stabiliser tube VZ1, resistance R 2, the energy bleed off circuit that capacitor C 2 constitutes, when HF switch was turn-offed, the energy of the elementary winding of transformer T1 carried out bleed off by this circuit.Wherein the operating voltage V of voltage-stabiliser tube VZ1 is exactly the elementary winding of the transformer T1 voltage on the elementary winding when carrying out the energy bleed off, this moment, the secondary winding of transformer T1 obtained high pressure Vo by instead swashing, form following relation: Vo=V * n between the no-load voltage ratio n of they and pulse transformer, by the voltage-stabiliser tube VZ1 of multiposition selector switch K1 selection connection different operating voltage, then can obtain different plasma sputter pumping source output high pressure.In order to protect HF switch VT1, the operating voltage of voltage-stabiliser tube VZ1 will be lower than the withstand voltage of field effect transistor simultaneously, and in this circuit, the operating voltage of serial voltage-stabiliser tube VZ1 is respectively 150V, 250V, 350V.The no-load voltage ratio n of transformer is 20, and the maximum output voltage of plasma sputter pumping source corresponds to 3kV, 5kV, and 7kV is adjustable.In the ceiling voltage scope, adjust the output voltage of plasma sputter pumping source continuously, can pass through regulator potentiometer RP1, change the reference voltage of UC3842 chip (2) pin, thereby change the output voltage of plasma sputter pumping source.
The so-called single-ended magnetic core of high-frequency step-up transformer T1 that is meant only is operated in a side of magnetic hysteresis loop in this circuit.So-called anti-sharp, be meant that the terminals of high-frequency step-up transformer T1 connect according to method shown in Figure 2, terminals (1) constitute end of the same name with terminals (3).When the HF switch conducting, the induced voltage of the elementary winding of high-frequency step-up transformer T1 be (1) just (2) negative, the rectifier diode VD1～VD4 that is connected secondary winding is in cut-off state, storage power in elementary winding.When switching tube VT1 ends, the energy of storing in the transformer T 1 elementary winding is just producing anti-sharp voltage (1) negative (2), be coupled to secondary winding and just bearing (4) for (3), rectifier diode VD1～VD4 conducting, the energy of elementary winding are anti-sharp to be passed through to export to titanium pump (load) after rectifier diode VD1～VD4 and capacitor C 1 filtering to secondary winding.
The operation principle of entire circuit is:
The 24V power supply is through resistance R 4, and the driving power that voltage stabilizing didoe ZT2, the voltage stabilizing circuit that capacitor C 3 constitutes will be higher than 16V offers (7) pin of UC3842 chip, i.e. power end.Resistance R 9 and capacitor C 6 constitute (4) pin that oscillating circuit is received the UC3842 chip, make its sawtooth waveforms that produces required frequency, also are that the frequency of oscillation of resistance R 9 and capacitor C 6 has determined the UC3842 chip finally to export the frequency of pulse.Resistance R 3 and potentiometer RP1 constitute the pressure sampling circuit that the elementary winding of transformer T1 instead swashs voltage, deliver to (2) pin of UC3842 chip as voltage reference, it is the Voltage Feedback input, (1) pin of UC3842 chip is the output compensation end of (2) pin, by parallel resistor R5, capacitor C 4 links to each other with (2) pin.Resistance R 8 is introduced current feedback signal from the upper end of protective circuit resistance R 1 (3) pin of UC3842 chip, i.e. current detecting input.The voltage feedback signal that the current feedback signal of introducing from (3) pin and (2) pin are introduced at the UC3842 chip through conversion and relatively produces a PWM (pulse-width modulation) ripple, exports this signal from (6) pin (being output), controls the break-make of field effect transistor VT1.The relative size of current feedback signal and voltage feedback signal has determined the pulse duration of PWM (pulse-width modulation) ripple, that is to say that they have determined the length of the each ON time of HF switch, current feedback signal with respect to voltage feedback signal is little must be many more, then pwm pulse is wide more, and the VT1 ON time is long more; Current feedback signal is approaching more with respect to voltage feedback signal, and difference is more little, and then pwm pulse is narrow more, and the VT1 ON time is short more.Simultaneously the current detecting input is provided with the current-clamp of 1V, flows through big and when making voltage on the resistance R 1 surpass 1V (promptly 3 pin level are greater than 1V), will turn-off pwm pulse, thereby reach the purpose of current-limiting protection when protective circuit powers on.
The pulse of UC3842 chip (6 pin) output makes the VT1 conducting during for high level; the VT1 conducting; then electric current flows through the elementary winding of transformer T1 from the 24V power supply; arrive ground through HF switch VT1 and protective circuit R1; rectifier diode on the transformer T1 secondary winding is equivalent to reversal connection at this moment; the secondary winding no-output, elementary winding storage power, protective circuit R1 goes up (3) pin (current detecting input) that obtains current feedback signal and deliver to the UC3842 chip.When the pulse of UC3842 chip (6 pin) output transfers low level to by high level, VT1 ends, the elementary winding energy stored of transformer T1 is by energy bleed off circuit bleed off, on elementary winding, form the reverse voltage of 350V, secondary winding is by the anti-high pressure that swashs the about 7kV of formation, by rectifier diode VD1, VD2, VD3, VD4 and filter capacitor C1 add to load (sputter ion pump), simultaneously the pressure sampling circuit that constitutes of resistance R 3 and potentiometer RP1 will reflect the elementary winding of transformer T1 anti-the signal of sharp voltage deliver to Voltage Feedback input (2) pin of UC3842 chip, this signal is controlled the next width of exporting pulse of UC3842 chip with the current feedback signal of input before after the UC3842 chip internal is through conversion relatively, what of storage power when changing task under the transformer T1 by the length of adjusting field effect transistor VT1 ON time next time are adjusted the purpose that power output reaches regulated output voltage.Because the operating frequency of entire circuit is very high, reaches 500kHz, so the operating voltage of the actual output of plasma sputter pumping source of the embodiment of the invention is highly stable, ripple is very little.
Fig. 3 has represented a kind of structure that has the plasma sputter pumping source of electric current and voltage monitoring and defencive function based on Fig. 1; it is formed except 24V power supply 1; control circuit 2; HF switch 3, protective circuit 4 is outside high-frequency step-up transformer 5 and the rectification circuit 6; comprise that also AC220V changes 24V circuit 7; 24V commentaries on classics ± 12V circuit 8, voltage monitoring and warning circuit 9, current monitoring and warning circuit 10.
It is the direct currents that the alternating current of civil power 220V are converted into 24V that AC220V changes 24V circuit 7, satisfies the requirement that single-end flyback switching power supply can only transform based on direct current.The single-ended flyback plasma sputter pumping source that has AC220V commentaries on classics 24V circuit 7 just can directly use the AC220V civil power as power supply, change the output 24V of the access in parallel storage battery of 24V circuit 7 simultaneously at AC220V, when then civil power being arranged, when AC220V supplies single-ended flyback sputter ion pump power work, also charge a battery, when civil power has a power failure suddenly, then give the power supply of single-ended flyback plasma sputter pumping source, thereby realized the non-stop run in 24 hours of single-ended flyback plasma sputter pumping source by storage battery.
AC220V changes 24V circuit 7 and has multiple implementation, and traditional method has elder generation by transformer AC220V to be changed into about AC20V, uses the rectifier bridge rectification then, the voltage stabilizing of 24V voltage-stabiliser tube, and capacitor filtering is realized the 24V direct current.Because present low-tension supply building block technique is very ripe, so directly adopt power module RS308 ripe on the market in the embodiment of the invention, input AC220V directly exports 24V, realizes that AC220V changes 24V circuit 7.
24V commentaries on classics ± 12V circuit 8 is that direct current 24V is converted into positive 12V of direct current and negative 12V, as two the low-voltage control circuit voltage monitorings of plasma sputter pumping source and the power supply of warning circuit 9 and current monitoring and warning circuit 10.24V commentaries on classics ± 12V circuit 8 also has multiple implementation, the same power module HNM5-24D12 that adopts maturation on the market in the embodiment of the invention, and input 24V, the directly two-way of acquisition ± 12V output realizes 24V commentaries on classics ± 12V circuit 8.
Voltage monitoring and warning circuit 9, the output voltage of plasma sputter pumping source is monitored in real time and shown, when power failure or load short circuits cause output voltage to be lower than the alarming value that the user sets, send alarm signal to higher level's control system simultaneously by the break-make of relay contact.
Fig. 4 has represented the concrete structure of a kind of voltage monitoring and warning circuit.Comprise sampling amplifying circuit 91; voltage is adjusted display circuit 92; compare 93 3 parts of warning circuit, its operation principle is: resistance R 21, and R22 finishes the dividing potential drop sampling to the sputter ion pump output voltage; diode VD21; VD22 carries out voltage-limiting protection, comparator N21 and resistance R 23, R24; R25 amplifies output to voltage sampling signal, adjusts display circuit 92 and compares warning circuit 93 so that offer voltage.Comparator N23, resistance R 27, R28 and variable potentiometer RP22 constitute voltage and adjust display circuit 92, sampling voltage is adjusted to suitable multiple, and show by low voltage voltage gauge outfit PV.As in this circuit, the output voltage of plasma sputter pumping source is 3～7kV, obtaining sampling voltage on the dividing potential drop sample resistance is 1.2～2.8V, comparator N21 is amplified to 2.4～5.6V with it, by regulating RP2, make N23 be output as 3～7V, promptly correspond to the one thousandth of sputter ion pump electric power output voltage, just can show the actual 1kV that represents of the every 1V of gauge outfit by the direct voltage gauge outfit of 10V.Comparator N22; resistance R 26; adjustable potentiometer RP21; diode VD23; relay K 21 constitutes voltage ratio than warning circuit; the user is at the normal output voltage of plasma sputter pumping source; set the protection threshold value by adjustable potentiometer RP21; when reflecting the output signal of sputter ion pump electric power output voltages, sampling amplifying circuit 91 is lower than this protection threshold value; then comparator N22 output+12V high level makes the line bag no current of relay K 21; the contact of relay K 21 disconnects, and the alarm signal A of higher level's control system is disconnected, and forms the fault alarm of " the sputter ion pump electric power output voltage is low excessively ".
Current monitoring and warning circuit 10, the operating current of load (sputter ion pump) is monitored in real time and shown, excessive when electric current simultaneously, reflect that ionic pump vacuum degree is relatively poor, and when being lower than user's pre-provisioning request, send alarm signal to higher level's control system by the break-make of relay contact.
Fig. 5 has represented the concrete structure of a kind of current monitoring and warning circuit.Comprise sampling amplifying circuit 101; current display circuit 102 compares 103 3 parts of warning circuit, and its operation principle is: current display circuit 102 is by micro aning ammeter PA; diode VD31; VD32, capacitor C 31 is formed, and microammeter directly is connected on the loop of sputter ion pump electric current; the PA gauge outfit directly shows the size of electric current in real time; diode VD31, VD32 forms the voltage-limiting protection effect to gauge outfit PA, and capacitor C 31 strobes.In the sampling amplifying circuit 101; sampling resistor R31 is connected on the sputter ion pump current circuit; during current flowing resistance R31, obtain a negative voltage signal, deliver to by comparator N31 in the upper end of R31; resistance R 32; R33, the amplifying circuit that R34 forms carry out the signal amplification and export to comparison warning circuit 103, diode VD33; VD34 carries out voltage-limiting protection to sampled signal, and 32 pairs of sampled signals of capacitor C carry out filtering.Relatively warning circuit 103 is by comparator N32; resistance R 35; adjustable potentiometer RP31; diode VD35; relay K 31 constitutes; normal vacuum state and the operating current size of user during at the plasma sputter pump work; set the protection threshold value by adjustable potentiometer RP31; when the output signal of sampling amplifying circuit 102 reflection sputter ion pump operating currents be lower than this protection threshold value (be after sampled signal is amplified be than the protection threshold value bear the negative value of manying voltage more); then comparator output+12V high level makes the line bag no current of relay K 21; the contact of relay K 21 disconnects; the alarm signal C of higher level's control system is disconnected, and forms the fault alarm of " the sputter ion pump electric current is excessive ".
Of particular note, Fig. 2, Fig. 4, Fig. 5 is respectively a concrete circuit of implementing of the various functional modules of the embodiment of the invention, in fact circuit is diversified in realization, comprise that by signal in the change of the layout of components and parts in above-mentioned three physical circuits, the like product is changed, increases a small amount of resistance device etc. all can original circuit not formed under the situation of essence change and realize the described function of the embodiment of the invention, this is that the electronic circuit engineer knows altogether.
So far invention has been described in conjunction with the preferred embodiments.Should be appreciated that those skilled in the art can carry out various other change, replacement and interpolations under the situation that does not break away from the spirit and scope of the present invention.Therefore, scope of the present invention is not limited to above-mentioned specific embodiment, and should be limited by claims.
Claims (11)
1. power-supply device that is used for ionic pump comprises:
Switch element has first end, second end and the 3rd end;
Sensing element is connected with second end of described switch element;
Step-up transformer comprises elementary winding and secondary winding, and wherein the polarity of the end of the same name of the end of the same name of elementary winding and secondary winding is opposite, and an end of elementary winding is connected to DC power supply, and the other end is connected to the 3rd end of switch element;
Control circuit, based on the anti-voltage that swashs on voltage and the sensing element that produces in the elementary winding, generation will be applied to the switch controlling signal of first end of switch element, wherein said switch element is conducting and disconnection under the control of described switch controlling signal, thereby produces output voltage at the output of the secondary winding of step-up transformer;
Rectification circuit, the output voltage that the output of the secondary winding of step-up transformer is produced carries out filtering.
2. power-supply device as claimed in claim 1, wherein said control circuit is based on anti-swash the two relative size of feedback voltage that the voltage dividing potential drop produces and the voltage on the sensing element and produce the time span of switch element conducting and disconnection described.
3. power-supply device as claimed in claim 2 also comprises leadage circuit, is used for when switch element is in off period the energy in the elementary winding of the step-up transformer of releasing.
4. power-supply device as claimed in claim 3, wherein said leadage circuit comprises:
Diode, anode are connected to the 3rd end, and negative electrode is connected with the end of the same name of elementary winding by capacitor;
The multiposition selector switch of a plurality of parallel connections, in parallel with described capacitor;
With described capacitor parallel resistor device.
5. power-supply device as claimed in claim 2, described sensing element is a resistor.
6. power-supply device as claimed in claim 1, wherein said rectification circuit comprises:
A plurality of diode in series and the filtering capacitor in parallel with described diode in series.
7. power-supply device as claimed in claim 2 also comprises voltage monitoring and protective circuit, comprising:
The sampling amplifying circuit is sampled to output voltage, and sampled voltage is amplified;
Voltage is adjusted display circuit, and sampled voltage is adjusted to predetermined multiple,
Relatively warning circuit compares adjusted voltage and preset threshold value, when adjusted voltage surpasses predetermined threshold value, to User Alarms.
8. power-supply device as claimed in claim 2 also comprises current monitoring and protective circuit, comprising:
The sampling amplifying circuit is sampled to output current, and sample rate current is amplified;
Electric current is adjusted display circuit, and sample rate current is adjusted to predetermined multiple;
Relatively warning circuit compares adjusted electric current and preset threshold value, when adjusted electric current surpasses predetermined threshold value, to User Alarms.
9. power-supply device as claimed in claim 1, the voltage of described DC power supply are 24 volts.
10. power-supply device as claimed in claim 9, described DC power supply is a battery pack.
11. power-supply device as claimed in claim 9, described DC power supply converts from alternating current.
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| CN 200910085553 CN101902126B (en) | 2009-05-25 | 2009-05-25 | Power supply device for sputter ion pumps |
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| CN 200910085553 CN101902126B (en) | 2009-05-25 | 2009-05-25 | Power supply device for sputter ion pumps |
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| CN111106642A (en) * | 2018-10-29 | 2020-05-05 | 丰田自动车株式会社 | Vehicle and portable device |
| WO2021194838A1 (en) * | 2020-03-24 | 2021-09-30 | Power Integrations, Inc. | A circuit path configuration for enhancing overvoltage protection in a switching power supply |
| CN113992026A (en) * | 2021-10-28 | 2022-01-28 | 北京机械工业自动化研究所有限公司 | Be used for small-size direct current high voltage power supply of lightweight accelerator |
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| CN102969916A (en) * | 2012-12-07 | 2013-03-13 | 深圳市安邦信电子有限公司 | Single-ended flyback switching power supply used for small-sized frequency converter |
| CN107533944B (en) * | 2015-05-01 | 2019-05-03 | 株式会社日立高新技术 | The charged particle beam apparatus for having ionic pump |
| CN107533944A (en) * | 2015-05-01 | 2018-01-02 | 株式会社日立高新技术 | Possesses the charged particle beam apparatus of ionic pump |
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| CN105703659A (en) * | 2016-04-07 | 2016-06-22 | 厦门大学 | High-frequency and high-voltage pulse generator for sterilizing |
| CN106899282A (en) * | 2017-03-24 | 2017-06-27 | 成都云材智慧数据科技有限公司 | A kind of pulse-width modulation type network control system |
| CN106899282B (en) * | 2017-03-24 | 2023-09-08 | 成都云材智慧数据科技有限公司 | Pulse width modulation type network control system |
| CN107345978A (en) * | 2017-06-23 | 2017-11-14 | 沈阳工程学院 | The packaged type of power plant or intelligent substation controls power supply and control method |
| CN107345978B (en) * | 2017-06-23 | 2023-07-04 | 沈阳工程学院 | Movable control power supply for power plant or intelligent substation and control method |
| CN109387324A (en) * | 2017-08-08 | 2019-02-26 | 上海卓亚医疗科技有限公司 | A kind of accelerator vacuum level real-time monitoring system |
| CN108322067A (en) * | 2017-12-29 | 2018-07-24 | 河南北瑞电子科技有限公司 | A kind of Switching Power Supply |
| CN108322051A (en) * | 2017-12-29 | 2018-07-24 | 河南北瑞电子科技有限公司 | A kind of inverse-excitation type switch power-supply |
| CN108282090A (en) * | 2017-12-29 | 2018-07-13 | 河南北瑞电子科技有限公司 | A kind of flyback switch voltage-stabilized source |
| CN111106642A (en) * | 2018-10-29 | 2020-05-05 | 丰田自动车株式会社 | Vehicle and portable device |
| WO2021194838A1 (en) * | 2020-03-24 | 2021-09-30 | Power Integrations, Inc. | A circuit path configuration for enhancing overvoltage protection in a switching power supply |
| CN113992026A (en) * | 2021-10-28 | 2022-01-28 | 北京机械工业自动化研究所有限公司 | Be used for small-size direct current high voltage power supply of lightweight accelerator |
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