CN101901646B - A kind of Y1-xYbxBCO high temperature superconducting film and its preparation method - Google Patents

A kind of Y1-xYbxBCO high temperature superconducting film and its preparation method Download PDF

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CN101901646B
CN101901646B CN2010102285498A CN201010228549A CN101901646B CN 101901646 B CN101901646 B CN 101901646B CN 2010102285498 A CN2010102285498 A CN 2010102285498A CN 201010228549 A CN201010228549 A CN 201010228549A CN 101901646 B CN101901646 B CN 101901646B
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CN101901646A (en
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叶帅
索红莉
吴紫平
刘敏
袁慧萍
吕昭
徐燕
马麟
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Beijing University of Technology
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Abstract

本发明公开了一种Y1-xYbxBCO高温超导薄膜及其制备方法,0<X≤1,属于高温超导材料制备技术领域。Y1-xYbxBCO高温超导薄膜的厚度约为200nm,制备方法为:先制备Y1-xYbxBCO的前驱液,将前驱溶液涂到单晶基底上,然后在低于400℃的湿氧气中预烧得到前驱非晶膜,之后将前驱非晶膜于800-850℃下烧结1-4小时,其中前3/4的时间段内通入湿Ar/O2混合气,后1/4时间段内,通入干Ar/O2混合气;本发明方法设备简单,成本低,无需真空,沉积速度快,最重要的是薄膜成分容易控制,并可以随意改变掺杂物及其配比,更适合开发实用化的高温超导长带。

Figure 201010228549

The invention discloses a Y 1-x Yb x BCO high-temperature superconducting thin film and a preparation method thereof, where 0<X≤1, and belongs to the technical field of high-temperature superconducting material preparation. The thickness of the Y 1-x Yb x BCO high-temperature superconducting film is about 200nm. The preparation method is: first prepare the precursor solution of Y 1-x Yb x BCO, apply the precursor solution on the single crystal substrate, and then heat it under 400℃ The precursor amorphous film was pre-fired in wet oxygen, and then the precursor amorphous film was sintered at 800-850°C for 1-4 hours, and wet Ar/O 2 mixed gas was passed in the first 3/4 of the time period, and then In 1/4 of the time period, dry Ar/ O mixed gas is introduced; the method of the present invention has simple equipment, low cost, no need for vacuum, and fast deposition speed. The most important thing is that the composition of the film is easy to control, and the dopant and Its ratio is more suitable for the development of practical high-temperature superconducting long tapes.

Figure 201010228549

Description

一种Y1-xYbxBCO高温超导薄膜及其制备方法A kind of Y1-xYbxBCO high temperature superconducting film and its preparation method

技术领域 technical field

本发明属于高温超导材料制备技术领域,具体涉及稀土钡铜氧化物第二代涂层超导高温超导薄膜的制备技术。  The invention belongs to the technical field of preparation of high-temperature superconducting materials, and in particular relates to the preparation technology of second-generation coating superconducting high-temperature superconducting thin films of rare earth barium copper oxides. the

背景技术 Background technique

以YBCO为主的稀土钡铜氧化物第二代涂层超导体,由于具有高的不可逆场,高的载流能力、低的交流损失,潜在的价格优势,自上世纪80年代末被发现以来就一直受到广泛的关注。随着研究的进展,YBCO涂层导体技术越来越成熟,距离实用化的实现也越来越近。到目前为止,人们采用脉冲激光沉积技术(PLD)已经制备出在77K下临界电流值(Ic)高达1400A/cm的YBCO薄膜,而采用金属有机沉积(MOD)技术制备的YBCO薄膜Ic最高值也达到了795A/cm;在长带方面,美国SuperPower公司采用金属有机盐化学气相沉积(MOCVD)技术已经制备出1000多米的带材,而且带材整体的Ic值为220A/cm,完全可以达到实用的标准。  The second-generation coated superconductor of rare earth barium copper oxide mainly based on YBCO, due to its high irreversible field, high current-carrying capacity, low AC loss, and potential price advantage, has been popular since it was discovered in the late 1980s. has been widely concerned. With the progress of research, YBCO coated conductor technology is becoming more and more mature, and the realization of practical application is getting closer and closer. So far, people have prepared YBCO films with a critical current value (I c ) as high as 1400A/cm at 77K by using pulsed laser deposition (PLD), and YBCO films prepared by metal-organic deposition (MOD) have the highest I c The value has also reached 795A/cm; in terms of long strips, the US SuperPower company has used metal organic salt chemical vapor deposition (MOCVD) technology to prepare more than 1000 meters of strips, and the overall Ic value of the strips is 220A/cm, completely A practical standard can be achieved.

但是,由于YBCO薄膜在外加磁场下的Ic值随着外加磁场的增加而迅速下降,必须通过在YBCO薄膜人为引入一些纳米级的缺陷作为钉扎中心来抑制YBCO薄膜的Ic值的降低。采用其他稀土元素部分取代YBCO中的Y元素制备的Y1-xRExBCO薄膜,由于Y3+和稀土元素离子的半径不同而导致薄膜内部的晶格发生畸变。这些缺陷可以作为有效的钉扎中心来提高YBCO薄膜在磁场下的Ic值。此外,相对于PLD法和MOCVD法,采用MOD法制备这种Y1-xRExBCO薄膜不仅成本低廉,而且可以灵活地控制Y元素和稀土元素的化学计量比,具有更为广阔的应用前景。  However, since the Ic value of the YBCO film under the applied magnetic field decreases rapidly with the increase of the applied magnetic field, some nanoscale defects must be artificially introduced into the YBCO film as pinning centers to suppress the decrease of the Ic value of the YBCO film. The Y 1-x RE x BCO film prepared by using other rare earth elements to partially replace the Y element in YBCO, the lattice distortion inside the film is caused by the different radii of Y 3+ and rare earth element ions. These defects can serve as effective pinning centers to increase the Ic value of YBCO films under magnetic field. In addition, compared with the PLD method and MOCVD method, the Y 1-x RE x BCO film prepared by the MOD method is not only low in cost, but also can flexibly control the stoichiometric ratio of Y elements and rare earth elements, which has a broader application prospect .

发明内容 Contents of the invention

本发明的目的在于提供一种采用化学溶液法制备Y1-xYbxBCO薄膜及其制备方法。该方法设备简单、成本低廉,而且制备的Y1-xYbxBCO薄膜的表面致密平整,在外加磁场下的超导性能得到了很好的提高。  The object of the present invention is to provide a Y 1-x Yb x BCO thin film prepared by chemical solution method and its preparation method. The method has simple equipment and low cost, and the prepared Y 1-x Yb x BCO thin film has a compact and smooth surface, and the superconducting performance under an external magnetic field is well improved.

本发明所提供的一种Y1-xYbxBCO薄膜,其中0<X≤1,厚度大约在200~250nm 左右。由于Y3+和Yb3+离子该Y1-xYbxBCO薄膜中可以按照任意比例互换,可以根据不同的需求对Y3+和Yb3+离子的比例进行调节。  A Y 1-x Yb x BCO thin film provided by the present invention, wherein 0<X≤1, has a thickness of about 200-250 nm. Since Y 3+ and Yb 3+ ions can be exchanged in any ratio in the Y 1-x Yb x BCO film, the ratio of Y 3+ and Yb 3+ ions can be adjusted according to different requirements.

本发明采用成本低廉的MOD化学方法来制备Y1-xYbxBCO薄膜,首先获得Y1-xYbxBCO的前驱溶液、再经过涂膜、低温和高温烧结得到Y1-xYbxBCO薄膜,具体步骤如下:  The present invention adopts a low-cost MOD chemical method to prepare Y 1-x Yb x BCO film, firstly obtain the precursor solution of Y 1-x Yb x BCO, and then obtain Y 1-x Yb x BCO through coating, low temperature and high temperature sintering film, the specific steps are as follows:

1)Y1-xYbxBCO前驱溶液的配制:将三氟乙酸钇、三氟乙酸镱、三氟乙酸钡和三氟乙酸铜或丙烯酸铜按物质的量比1-x∶x∶2∶3完全溶解在无水甲醇中,0<X≤1,得到1.0-2.0mol/L的Y1-xYbxBCO前驱溶液;  1) Preparation of Y 1-x Yb x BCO precursor solution: Yttrium trifluoroacetate, ytterbium trifluoroacetate, barium trifluoroacetate and copper trifluoroacetate or copper acrylate in the ratio of 1-x:x:2: 3 is completely dissolved in anhydrous methanol, 0<X≤1, and a Y 1-x Yb x BCO precursor solution of 1.0-2.0 mol/L is obtained;

2)薄膜的涂覆:将Y1-xYbxBCO前驱溶液通过旋涂或浸涂的方式涂覆到单晶基底上得到前驱膜;  2) Coating of the thin film: coating the Y 1-x Yb x BCO precursor solution on the single crystal substrate by spin coating or dip coating to obtain the precursor film;

3)低温预烧:将涂覆好的前驱膜在低于400℃的湿氧气中预烧得到前驱非晶膜;  3) Low-temperature pre-firing: Pre-fire the coated precursor film in wet oxygen below 400°C to obtain a precursor amorphous film;

4)高温烧结:将前驱非晶膜于800-850℃下烧结1-4小时,烧结过程中,前3/4的时间段内,通入氧含量为100-1000ppm的湿Ar/O2混合气,后1/4时间段内,通入氧含量为100-1000ppm的干Ar/O2混合气,烧结结束后在继续通入氧含量为100-1000ppm的干Ar/O2混合气下降温,当温度降到500℃时换成纯氧气,并保温2-4小时,随炉冷却得到Y1-xYbxBCO薄膜。  4) High temperature sintering: sinter the precursor amorphous film at 800-850°C for 1-4 hours, during the sintering process, in the first 3/4 of the time period, pass wet Ar/O 2 mixed with oxygen content of 100-1000ppm Gas, in the last 1/4 period of time, pass dry Ar/O 2 mixed gas with oxygen content of 100-1000ppm, after sintering, continue to pass dry Ar/O 2 mixed gas with oxygen content of 100-1000ppm to lower the temperature , when the temperature drops to 500°C, replace it with pure oxygen, keep it warm for 2-4 hours, and cool down with the furnace to obtain a Y 1-x Yb x BCO film.

其中,步骤1)中使用的三氟乙酸盐是通过相应的醋酸盐和三氟乙酸反应得到的,而丙烯酸铜是通过醋酸铜和丙烯酸反应得到的;  Wherein, the trifluoroacetate used in step 1) is obtained by the reaction of corresponding acetate and trifluoroacetic acid, and copper acrylate is obtained by the reaction of copper acetate and acrylic acid;

步骤2)中采用旋涂方式将Y1-xYbxBCO前驱溶液涂覆到铝酸镧(LAO)或钛酸锶(STO)基底上,涂膜转数为3000-6000转/分钟,涂膜时间为1-2分钟;采用浸涂的方式时,涂膜提拉速度为5-80毫米/分钟;  In step 2), the Y 1-x Yb x BCO precursor solution is coated on the lanthanum aluminate (LAO) or strontium titanate (STO) substrate by spin coating, and the rotation speed of the coating film is 3000-6000 rpm. The film time is 1-2 minutes; when dip coating is used, the film pulling speed is 5-80 mm/min;

步骤3)中所述的湿氧气是通过将氧气通入水浴加热的装有蒸馏水的容器实现的,水浴温度为20-50℃,氧气流量为0.2-1.0升/分钟,通入湿氧气的温度范围为150~400℃之间;  The wet oxygen described in step 3) is realized by feeding oxygen into a container of distilled water heated by a water bath. The range is between 150~400℃;

步骤3)中使用的烧结工艺根据使用的铜盐不同而有所差异:当使用三氟乙酸铜时,烧结工艺如下:室温至200℃的升温速度为135℃/小时,200℃-250℃间 的升温速度为5-7℃/小时,250℃-300℃间的升温速度为30℃/小时,300℃-400℃间的升温速度为300℃/小时;当使用丙烯酸痛时,其烧结工艺如下:室温至150℃的升温速度为400~600℃/小时,150~400℃的升温速度为100~300℃/小时;  The sintering process used in step 3) varies depending on the copper salt used: when copper trifluoroacetate is used, the sintering process is as follows: the heating rate from room temperature to 200 °C is 135 °C/hour, between 200 °C and 250 °C The temperature rise rate is 5-7°C/hour, the temperature rise rate between 250°C-300°C is 30°C/hour, and the temperature rise rate between 300°C-400°C is 300°C/hour; when using acrylic pain, the sintering process As follows: the temperature rise rate from room temperature to 150°C is 400-600°C/hour, and the temperature rise rate from 150-400°C is 100-300°C/hour;

步骤4)中所述的湿Ar/O2混合气是通过将Ar/O2混合气通入水浴加热的装有蒸馏水的容器实现的,水浴温度为30-50℃,混合气流量为0.2-1.5升/分钟。  The wet Ar/ O2 gas mixture described in step 4) is achieved by passing the Ar/ O2 gas mixture into a vessel heated by a water bath with distilled water. The temperature of the water bath is 30-50° C. 1.5 l/min.

与现有技术相比较,本发明具有以下有益效果:  Compared with the prior art, the present invention has the following beneficial effects:

1)相比目前广泛使用的PLD方法掺杂技术,本发明方法所使用的设备简单,成本低,无需真空,沉积速度快,最重要的是薄膜成分容易控制,并可以随意改变掺杂物及其配比,更适合开发实用化的高温超导长带。  1) Compared with the widely used PLD method doping technology at present, the equipment used in the method of the present invention is simple, the cost is low, no vacuum is needed, and the deposition speed is fast. The most important thing is that the film composition is easy to control, and the dopant and Its ratio is more suitable for the development of practical high-temperature superconducting long tapes. the

2)相对于纯的YBCO薄膜,Y1-xYbxBCO薄膜的表面得到很好的改善,变得更加平整致密;此外,Y1-xYbxBCO薄膜内部由于Y3+和Yb3+离子半径不同会导致晶格发生畸变,这种晶格的畸变可以作为钉扎中心,减少磁场下的磁场蠕动,提高YBCO薄膜在磁场下的临界电流密度。在相同温度下,磁场越高,掺杂样品的Jc越高于纯的YBCO薄膜。Y1-xYbxBCO薄膜在高温高场下具有更高的超导性能,相比纯的YBCO薄膜更有应用前景。  2) Compared with the pure YBCO film, the surface of the Y 1-x Yb x BCO film is well improved and becomes smoother and denser; in addition, the interior of the Y 1-x Yb x BCO film is due to the Y 3+ and Yb 3+ Different ionic radii will lead to lattice distortion. This lattice distortion can be used as a pinning center to reduce the magnetic field creep under the magnetic field and increase the critical current density of the YBCO film under the magnetic field. At the same temperature, the higher the magnetic field, the higher the J c of the doped sample than that of the pure YBCO film. Y 1-x Yb x BCO films have higher superconducting properties at high temperature and high field, and have more application prospects than pure YBCO films.

附图说明 Description of drawings

图1:对比例1中所得薄膜表面的SEM图。  Figure 1: SEM image of the surface of the film obtained in Comparative Example 1. the

图2:实施例1中所得薄膜的XRD图。  Figure 2: XRD pattern of the thin film obtained in Example 1. the

图3:实施例1中所得薄膜的(103)面Φ扫描结果。  Fig. 3: The (103) plane Φ scanning result of the thin film obtained in Example 1. the

图4:实施例2中所得薄膜的临界转变温度Tc结果。  Fig. 4: The results of the critical transition temperature Tc of the film obtained in Example 2.

图5:实施例2中所得薄膜的Jc值随外场的变化关系。  Fig. 5: The Jc value of the thin film obtained in Example 2 as a function of the external field.

图6:实施例3中所得薄膜的XRD图。  Figure 6: XRD pattern of the thin film obtained in Example 3. the

图7:实施例3中所得薄膜的SEM图。  Figure 7: SEM image of the thin film obtained in Example 3. the

图8:实施例4中所得薄膜的断面的SEM图  Fig. 8: SEM picture of the section of gained film in embodiment 4

以下结合附图及具体实施方式对本发明做进一步详细说明。  The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. the

具体实施方式 Detailed ways

对比例1  Comparative example 1

1)将0.01mol三氟乙酸钇,0.02mol三氟乙酸钡和0.03mol三氟乙酸铜溶解无水甲醇中,得到1.5mol/L的YBCO前驱溶液;  1) Dissolve 0.01mol yttrium trifluoroacetate, 0.02mol barium trifluoroacetate and 0.03mol copper trifluoroacetate in anhydrous methanol to obtain a 1.5mol/L YBCO precursor solution;

2)采用旋涂方法将YBCO前驱溶液涂覆到LAO基底上得到湿膜,涂膜转数为4000转/分钟,涂膜时间为1分钟;  2) Apply the YBCO precursor solution to the LAO substrate by spin coating method to obtain a wet film, the coating rotation speed is 4000 rpm, and the coating time is 1 minute;

3)将湿膜在400℃以下的湿氧气中低温预烧得到前驱非晶膜,其中,室温至200℃的升温速度为135℃/小时,200℃-250℃间的升温速度为5℃/小时,250℃-300℃间的升温速度为30℃/小时,300℃-400℃间的升温速度为300℃/小时;湿氧气是将氧气通入30℃的水浴加热的装有蒸馏水的容器实现的,从150℃(与发明内容不一致)开始通入,氧气流量为0.2升/分钟;  3) Pre-fire the wet film in wet oxygen below 400°C at low temperature to obtain the precursor amorphous film, wherein the temperature rise rate from room temperature to 200°C is 135°C/hour, and the temperature rise rate between 200°C and 250°C is 5°C/hour Hours, the temperature rise rate between 250°C-300°C is 30°C/hour, and the temperature rise rate between 300°C-400°C is 300°C/hour; wet oxygen is a container filled with distilled water heated by passing oxygen into a 30°C water bath Realized, starting from 150°C (inconsistent with the content of the invention), the oxygen flow rate is 0.2 liters/minute;

4)将前驱非晶膜在820℃下保温2小时,其中,前1.5小时通入湿Ar/O2混合气(氧含量为200ppm,将Ar/O2混合气通入50℃的水浴加热的装有蒸馏水的容器实现的,混合气流量为0.5升/分钟),后0.5小时通入干Ar/O2混合气,烧结结束后,在继续通入干Ar/O2混合气的条件下降温,当温度降到500℃时换成纯氧气,并保温2小时,然后随炉冷却,得到YBCO薄膜。  4) Precursor amorphous film was kept at 820°C for 2 hours, among which, wet Ar/O 2 mixed gas (oxygen content was 200ppm was passed through for the first 1.5 hours, and Ar/O 2 mixed gas was passed into a water bath at 50°C to heat Realized by a container equipped with distilled water, the flow rate of the mixed gas is 0.5 liters/minute), after 0.5 hours, the dry Ar/O 2 mixed gas is introduced, and after the sintering is completed, the temperature is lowered under the condition of continuing to feed the dry Ar/O 2 mixed gas , when the temperature drops to 500°C, replace it with pure oxygen, keep it warm for 2 hours, and then cool down with the furnace to get a YBCO film.

该薄膜表面的SEM如图1所示,可以发现存在微小孔洞和球状颗粒。  The SEM of the surface of the film is shown in Figure 1, and it can be found that there are tiny holes and spherical particles. the

实施例1  Example 1

1)将0.0075mol三氟乙酸钇,0.0025mol三氟乙酸镱、0.02mol三氟乙酸钡和0.03mol丙烯酸铜溶解无水甲醇中,得到1.5mol/L的Y0.75Yb0.25BCO前驱溶液;  1) Dissolve 0.0075 mol of yttrium trifluoroacetate, 0.0025 mol of ytterbium trifluoroacetate, 0.02 mol of barium trifluoroacetate and 0.03 mol of copper acrylate in anhydrous methanol to obtain a 1.5 mol/L Y 0.75 Yb 0.25 BCO precursor solution;

2)采用旋涂方法将Y0.75Yb0.25BCO前驱溶液涂覆到LAO基底上得到湿膜,涂膜转数为4000转/分钟,涂膜时间2分钟;  2) Coating the Y 0.75 Yb 0.25 BCO precursor solution onto the LAO substrate by spin coating method to obtain a wet film, the coating rotation speed is 4000 rpm, and the coating time is 2 minutes;

3)将湿膜在400℃以下的湿氧气中低温预烧得到前驱非晶膜,其中,室温至150℃的升温速度为500℃/小时,150℃-400℃间的升温速度为200℃/小时;通入的湿氧气条件和对比例1中相同;  3) The wet film is pre-fired at a low temperature in wet oxygen below 400°C to obtain a precursor amorphous film, wherein the temperature rise rate from room temperature to 150°C is 500°C/hour, and the temperature rise rate between 150°C and 400°C is 200°C/hour Hour; The wet oxygen condition of feeding is identical with comparative example 1;

4)将前驱非晶膜在830℃下保温2.0小时,其中,前1.5小时通入湿Ar/O2混合气(氧含量为500ppm,将Ar/O2混合气通入50℃的水浴加热的装有蒸馏水的容器实现的,混合气流量为0.35升/分钟),后0.5小时通入干Ar/O2混合气, 烧结结束后,在继续通入干Ar/O2混合气的条件下降温,当温度降到500℃时换成纯氧气,并保温4小时,然后随炉冷却,得到Y0.75Yb0.25BCO薄膜。  4) Precursor amorphous film was kept at 830°C for 2.0 hours, and wet Ar/O 2 mixed gas (oxygen content was 500ppm, Ar/O 2 mixed gas was passed into a water bath at 50°C for heating in the first 1.5 hours) The container that is equipped with distilled water is realized, and the mixed gas flow rate is 0.35 liters/min), and after 0.5 hour, pass dry Ar/O 2 mixed gas, after sintering finishes, continue to pass into dry Ar/O 2 mixed gas condition to lower the temperature , when the temperature dropped to 500°C, it was replaced with pure oxygen, and kept at this temperature for 4 hours, and then cooled with the furnace to obtain a Y 0.75 Yb 0.25 BCO film.

该薄膜的XRD如图2所示,图中只出现了(00l)面的衍射峰,说明薄膜具有很好的取向生成,此外,在每个(00l)面的衍射峰上只出现了一个峰,说明制备的薄膜为纯的Y0.75Yb0.25BCO,而不是YBCO和YbBCO的混合体。从该薄膜(103)面的Phi扫描可以看出该薄膜具有很好的面内织构,如图3所示。  The XRD of the film is shown in Figure 2. Only the diffraction peaks of the (00l) plane appear in the figure, indicating that the film has a good orientation. In addition, only one peak appears on each (00l) plane diffraction peak , indicating that the prepared film is pure Y 0.75 Yb 0.25 BCO, not a mixture of YBCO and YbBCO. From the Phi scanning of the (103) surface of the film, it can be seen that the film has a good in-plane texture, as shown in FIG. 3 .

实施例2  Example 2

1)将0.005mol三氟乙酸钇,0.005mol三氟乙酸镱、0.02mol三氟乙酸钡和0.03mol三氟乙酸铜溶解无水甲醇中,得到1.0mol/L的Y0.5Yb0.5BCO前驱溶液;  1) Dissolve 0.005 mol of yttrium trifluoroacetate, 0.005 mol of ytterbium trifluoroacetate, 0.02 mol of barium trifluoroacetate and 0.03 mol of copper trifluoroacetate in anhydrous methanol to obtain a 1.0 mol/L Y 0.5 Yb 0.5 BCO precursor solution;

2)采用旋涂方法将Y0.5Yb0.5BCO前驱溶液涂覆到STO基底上得到湿膜,涂膜转数为4500转/分钟,涂膜时间为2分钟;  2) Coating the Y 0.5 Yb 0.5 BCO precursor solution onto the STO substrate by spin coating method to obtain a wet film, the coating rotation speed is 4500 rpm, and the coating time is 2 minutes;

3)烧结过程与对比例1的步骤3)相同;  3) the sintering process is the same as step 3) of comparative example 1;

4)烧结过程与对比例1的步骤4)相同;  4) sintering process is identical with the step 4) of comparative example 1;

该薄膜的临界转变温度Tc如图4所示,其起始临界转变温度为86.5K;其Jc值随外加磁场的变化关系如图5所示。  The critical transition temperature Tc of the film is shown in Figure 4, and its initial critical transition temperature is 86.5K; the relationship between its Jc value and the external magnetic field is shown in Figure 5.

实施例3  Example 3

1)将0.0025mol三氟乙酸钇,0.0075mol三氟乙酸镱、0.02mol醋酸钡和0.03mol丙烯酸铜溶解在无水甲醇中,得到1.3mol/L的Y0.25Yb0.75BCO前驱溶液;  1) Dissolve 0.0025mol of yttrium trifluoroacetate, 0.0075mol of ytterbium trifluoroacetate, 0.02mol of barium acetate and 0.03mol of copper acrylate in anhydrous methanol to obtain a 1.3mol/L Y 0.25 Yb 0.75 BCO precursor solution;

2)采用浸涂方法将Y0.25Yb0.75BCO前驱溶液涂覆到LAO基底上得到湿膜,提拉速度为20毫米/分钟;  2) Coating the Y 0.25 Yb 0.75 BCO precursor solution onto the LAO substrate by dip coating method to obtain a wet film at a pulling speed of 20 mm/min;

3)将湿膜在400℃以下湿的氧气中低温预烧得到前驱非晶膜,其中,室温至150℃的升温速度为600℃/小时,150℃-400℃间的升温速度为300℃/小时;湿氧气是将氧气通入50℃的水浴加热的装有蒸馏水的容器实现的,从150℃开始通入,氧气流量为0.3升/分钟;  3) Pre-fire the wet film in wet oxygen below 400°C to obtain the precursor amorphous film, wherein the heating rate from room temperature to 150°C is 600°C/hour, and the heating rate between 150°C and 400°C is 300°C/hour Hours; wet oxygen is achieved by passing oxygen into a container filled with distilled water heated by a water bath at 50°C, starting from 150°C, and the oxygen flow rate is 0.3 liters/minute;

4)将前驱非晶膜在780℃下保温2小时,其中,前1.5小时通入湿Ar/O2混合气(氧含量为200ppm,将Ar/O2混合气通入50℃的水浴加热的装有蒸馏水的容器实现的,混合气流量为0.5升/分钟),后0.5小时通入干Ar/O2混合气,烧结 结束后,在继续通入干Ar/O2混合气的条件下降温,当温度降到500℃时换成纯氧气,并保温2小时,然后随炉冷却,得到Y0.25Yb0.75BCO薄膜。  4) Precursor amorphous film was kept at 780°C for 2 hours, among which, wet Ar/O 2 mixed gas (oxygen content was 200ppm, Ar/O 2 mixed gas was passed into a water bath at 50°C for heating in the first 1.5 hours) The container that distilled water is housed is realized, and the flow rate of mixed gas is 0.5 liters/minute), after 0.5 hours, feed dry Ar/O 2 mixed gas, after sintering finishes, continue to feed dry Ar/O 2 mixed gas, lower the temperature , when the temperature dropped to 500°C, it was replaced with pure oxygen, and kept for 2 hours, and then cooled with the furnace to obtain Y 0.25 Yb 0.75 BCO film.

该薄膜的XRD如图6所示,图中只出现了(00l)面的衍射峰,说明薄膜具有很好的取向生成,且制备的薄膜为纯的Y0.25Yb0.75BCO。图7所示是该薄膜的表面的SEM图,可以看出该薄膜具有十分平整的表面。  The XRD of the film is shown in Figure 6. Only the diffraction peak of the (00l) plane appears in the figure, indicating that the film has a good orientation, and the prepared film is pure Y 0.25 Yb 0.75 BCO. FIG. 7 is a SEM image of the surface of the film, and it can be seen that the film has a very smooth surface.

实施例4  Example 4

1)将0.005mol三氟乙酸镱,0.01mol三氟乙酸钡和0.015mol三氟乙酸铜溶解在无水甲醇中,得到1.0mol/L的YbBCO前驱溶液;  1) Dissolve 0.005mol ytterbium trifluoroacetate, 0.01mol barium trifluoroacetate and 0.015mol copper trifluoroacetate in anhydrous methanol to obtain a 1.0mol/L YbBCO precursor solution;

2)采用浸涂方法将YbBCO前驱溶液涂覆到LAO基底上得到湿膜,提拉速度为50毫米/分钟;  2) Apply the YbBCO precursor solution to the LAO substrate to obtain a wet film by dip coating, and the pulling speed is 50 mm/min;

3)将湿膜在400℃以下湿氧气中低温预烧得到前驱非晶膜,其中,室温至200℃的升温速度为135℃/小时,200℃-250℃间的升温速度为4℃/小时,250℃-300℃间的升温速度为30℃/小时,300℃-400℃间的升温速度为300℃/小时;  3) Pre-fire the wet film in wet oxygen below 400°C at low temperature to obtain the precursor amorphous film. The temperature rise rate from room temperature to 200°C is 135°C/hour, and the temperature rise rate between 200°C and 250°C is 4°C/hour , the heating rate between 250°C-300°C is 30°C/hour, and the heating rate between 300°C-400°C is 300°C/hour;

4)将前驱非晶膜在820℃下保温2.5小时,其中,前2小时通入湿Ar/O2混合气(氧含量为500ppm,将Ar/O2混合气通入50℃的水浴加热的装有蒸馏水的容器实现的,混合气流量为0.8升/分钟),后0.5小时通入干Ar/O2混合气,烧结结束后,在继续通入干Ar/O2混合气的条件下降温,当温度降到500℃时换成纯氧气,并保温2小时,然后随炉冷却,得到YbBCO薄膜。  4) Precursor amorphous film was kept at 820°C for 2.5 hours, wherein, the first 2 hours was fed with wet Ar/O 2 mixed gas (the oxygen content was 500ppm, and the Ar/O 2 mixed gas was passed into a 50°C water bath to heat The container that is equipped with distilled water is realized, and the mixed gas flow rate is 0.8 liters/min), and the dry Ar/O 2 mixed gas is passed into after 0.5 hours, and after the sintering is completed, the temperature is lowered under the condition of continuing to pass into the dry Ar/O 2 mixed gas , when the temperature dropped to 500 ° C, it was replaced with pure oxygen, and kept for 2 hours, and then cooled with the furnace to obtain a YbBCO film.

图8所示的是该薄膜的断面的SEM图。可以看出,该薄膜的厚度为200nm左右。  FIG. 8 is a SEM image of a cross-section of the thin film. It can be seen that the thickness of the film is about 200nm. the

Claims (7)

1.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,包括以下步骤:1. a kind of Y of claim 1 The preparation method of Yb x BCO thin film is characterized in that, comprises the following steps: (1)Y1-xYbxBCO前驱溶液的配制:将三氟乙酸钇、三氟乙酸镱、三氟乙酸钡和丙烯酸铜按物质的量比1-x∶x∶2∶3完全溶解在无水甲醇中,0<X≤1,得到1.0-2.0mol/L的Y1-xYbxBCO前驱溶液;(1) Preparation of Y 1-x Yb x BCO precursor solution: Dissolve yttrium trifluoroacetate, ytterbium trifluoroacetate, barium trifluoroacetate and copper acrylate completely in In anhydrous methanol, 0<X≤1, a Y 1-x Yb x BCO precursor solution of 1.0-2.0 mol/L is obtained; (2)薄膜的涂覆:将Y1-xYbxBCO前驱溶液通过旋涂或浸涂的方式涂覆到单晶基底上得到前驱膜;(2) Coating of thin films: Coating the Y 1-x Yb x BCO precursor solution onto a single crystal substrate by spin coating or dip coating to obtain a precursor film; (3)低温预烧:将涂覆好的前驱膜在低于400℃的湿氧气中预烧得到前驱非晶膜;(3) Low-temperature pre-firing: pre-fire the coated precursor film in wet oxygen below 400°C to obtain a precursor amorphous film; (4)高温烧结:将前驱非晶膜于800-850℃下烧结1-4小时,烧结过程中,前3/4的时间段内,通入氧含量为100-1000ppm的湿Ar/O2混合气,后1/4时间段内,通入氧含量为100-1000ppm的干Ar/O2混合气,烧结结束后在继续通入氧含量为100-1000ppm的干Ar/O2混合气下降温,当温度降到500℃时换成纯氧气,并保温2-4小时,随炉冷却得到Y1-xYbxBCO薄膜。(4) High temperature sintering: sinter the precursor amorphous film at 800-850°C for 1-4 hours, during the sintering process, in the first 3/4 of the time period, pass wet Ar/O 2 with an oxygen content of 100-1000ppm Mixed gas, in the last 1/4 period of time, feed dry Ar/O 2 mixed gas with oxygen content of 100-1000ppm, and continue to feed dry Ar/O 2 mixed gas with oxygen content of 100-1000ppm after sintering Lower the temperature, and replace it with pure oxygen when the temperature drops to 500°C, keep it warm for 2-4 hours, and cool down with the furnace to obtain a Y 1-x Yb x BCO film. 2.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,步骤(1)中使用的三氟乙酸钇、三氟乙酸镱、三氟乙酸钡是通过相应的醋酸盐和三氟乙酸反应得到的,丙烯酸铜是通过醋酸铜和丙烯酸反应得到的。2. the preparation method of a kind of Y 1-x Yb x BCO thin film of claim 1 is characterized in that, yttrium trifluoroacetate, ytterbium trifluoroacetate, barium trifluoroacetate used in step (1) are by corresponding vinegar It is obtained by the reaction of acid salt and trifluoroacetic acid, and copper acrylate is obtained by the reaction of copper acetate and acrylic acid. 3.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,步骤(2)中采用旋涂方式将Y1-xYbxBCO前驱溶液涂覆到铝酸镧(LAO)或钛酸锶(STO)基底上,涂膜转数为3000-6000转/分钟,涂膜时间为1-2分钟;采用浸涂的方式时,涂膜提拉速度为5-80毫米/分钟。3. the preparation method of a kind of Y 1-x Yb x BCO thin film of claim 1 is characterized in that, in step (2), adopts spin-coating mode with Y 1-x Yb x BCO precursor solution is coated on lanthanum aluminate ( LAO) or strontium titanate (STO) substrates, the number of rotations of the coating film is 3000-6000 rpm, and the coating time is 1-2 minutes; when dip coating is used, the coating film pulling speed is 5-80 mm /minute. 4.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,步骤(3)中所述的湿氧气是通过将氧气通入水浴加热的装有蒸馏水的容器实现的,水浴温度为20-50℃,氧气流量为0.2-1.0升/分钟,通入湿氧气的温度范围为150~400℃之间。4. the preparation method of a kind of Y 1-x Yb x BCO thin film of claim 1 is characterized in that, the wet oxygen described in step (3) is to pass oxygen into the container that the distilled water of water bath heating is housed and realize , the temperature of the water bath is 20-50°C, the oxygen flow rate is 0.2-1.0 liters/min, and the temperature range of the wet oxygen is 150-400°C. 5.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,使用丙烯酸铜时,其烧结工艺如下:室温至150℃的升温速度为400~600℃/小时,150~400℃的升温速度为100~300℃/小时。5. The preparation method of a Y 1-x Yb x BCO film according to claim 1, characterized in that, when copper acrylate is used, the sintering process is as follows: the heating rate from room temperature to 150°C is 400-600°C/hour, 150°C The rate of temperature rise to 400°C is 100°C to 300°C/hour. 6.权利要求1的一种Y1-xYbxBCO薄膜的制备方法,其特征在于,步骤(4)中所述的湿Ar/O2混合气是通过将Ar/O2混合气通入水浴加热的装有蒸馏水的容器实现的,水浴温度为30-50℃,混合气流量为0.2-1.5升/分钟。6. a kind of Y 1-x Yb x BCO film preparation method of claim 1 is characterized in that, the wet Ar/O described in step (4) mixed gas is by Ar/ O mixed gas is passed into It is realized by a container filled with distilled water heated by a water bath, the temperature of the water bath is 30-50° C., and the flow rate of the mixed gas is 0.2-1.5 liters/minute. 7.按照权利要求1的方法所制备的一种一种Y1-xYbxBCO薄膜,0<X≤1。7. A Y 1-x Yb x BCO thin film prepared according to the method of claim 1, 0<X≤1.
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Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
W.Zhang, etc.Control of Flux Pinning in MOD YBCO Coated Conductor.《applied superconductivity》.2007,第17卷(第2期),3347-3350. *

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